Multilevel interconnect technology II
Subtitle: 23-24 September, Santa Clara, California
By: Mart Graef, Divyseh N. Patel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.].
Contributors: Graef, Mart.; Patel, Divyesh N.; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization); Electrochemical Society.; American Vacuum Society.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 3508; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3508.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 224
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Plasma etching -- Congresses.; Metallizing -- Congresses.; Dielectric films -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.