Corrections for component imperfections and azimuth errors in an automatic self-compensating ellipsometer
By: Craig G. Smith, Janet S. Remer, and Rolf H. Muller, Materials and Molecular Research Division, Lawrence Berkeley Laboratory, University of California
Contributors: Remer, Janet S., joint author; Muller, Rolf H., joint author; Lawrence Berkeley Laboratory. Materials and Molecular Research Division
Series: LBL ; 7303
Publisher: Dept. of Energy, Lawrence Berkeley Laboratory, Materials and Molecular Research Division; for sale by the National Technical Information Service]
Published: 1978
Place of publication: Berkeley Calif; [Springfield, Va
Language: eng
Number of pages: 96
Subjects: Ellipsometry; Azimuth; Error-correcting codes (Information theory)
Notes: Contract W-7405-ENG-48

Aug. 1978

Includes bibliographical references