Advances in Imaging and Electron Physics, 98
Publisher: Elsevier
Published: 1996
Place of publication: Burlington
Language: eng
Format: [electronic resource]
Number of pages: 449
ISBN-13: 9780080577647
Description: This text features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithology, electron microscopy, and the computing methods used in all these domains.
Notes: Description based on print version record.