Surface scattering and diffraction for advanced metrology II
Subtitle: 9 July, 2002, Seattle, Washington, USA
By: Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Boeing Company ... [et al.].
Contributors: Gu, Zu-Han.; Maradudin, A. A.; Society of Photo-optical Instrumentation Engineers.; Boeing Company.
Series: SPIE proceedings series ;; v. 4780; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4780.
Publisher: SPIE
Published: 2002
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 186
Subjects: Surface roughness -- Measurement -- Congresses.; Diffractive scattering -- Congresses.; Optical measurements -- Congresses.; Scattering (Physics) -- Congresses.; Metrology -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.