Characterization and Metrology for ULSI Technology: 2003
Subtitle: 2003 International Conference on Characterization and Metrology for ULSI Technology (AIP Conference Proceedings)
Contributors: David G. Seiler (Editor); Alain C. Diebold (Editor); Thomas J. Shaffner (Editor); Robert McDonald (Editor); Stefan Zollner (Editor); Rajinder P. Khosla (Editor); Eric M. Secula (Editor)
Edition: 1 edition
Publisher: American Institute of Physics
Published: October 8, 2003
Language: eng
Format: Hardcover
Number of pages: 846
ISBN-13: 9780735401525
Subjects: Circuits & components; Technology; Computers - General Information; Science/Mathematics; Electricity; General; Logic Design; Science / Weights & Measures; Electronics - Semiconductors; Congresses; Integrated circuits; Software; Ultra large scale integration