Journal of microelectromechanical systems
Subtitle: a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
Contributors: American Society of Mechanical Engineers
Publisher: Institute of Electrical and Electronics Engineers
Published: 1992
Place of publication: New York, NY
Language: eng
Subjects: Microelectronics; Periodicals; Electromechanical devices
Other titles: Microelectromechanical systems