Micro-Electro-Mechanical Systems (Mems) 1998: Micro-Manuacturing Processes in Mems and Other Advanced Systems (Dsc (Series), Vol. 66.)
Contributors: American Society of Mechanical Engineers Dynamic Systems and Control Division (Corporate Author); Xiang Zhang (Editor); Narayan R. Aluru (Editor); Liwei Lin (Editor); Fred K. Forster (Editor)
Publisher: American Society of Mechanical Engineers
Published: January 1998
Language: eng
Format: Paperback
Number of pages: 593
ISBN-13: 9780791815960
Subjects: Mechanical Engineering & Materials; Science/Mathematics; Electronics - General; Science; Technology & Industrial Arts; Microelectromechanical systems; Fluidic devices; Mechanics - General; Congresses