Ion beams; with applications to ion implantation
By: [by] Robert G. Wilson [and] George R. Brewer.
Contributors: Brewer, George Raymond, 1922- joint author.
Publisher: Wiley
Published: 1973
Place of publication: New York
Language: eng
Number of pages: 500
Subjects: Ion implantation.; Ion bombardment.
Notes: Includes bibliographies.
"A Wiley-Interscience publication."