Microprocesses and Nanotechnology '99
Subtitle: digest of papers : 1999 International Microprocesses and Nanotechnology Conference : July 6-8, 1999, Yokohama, Japan
By: sponsored by the Japan Society of Applied Physics ... [et al.].
Contributors: Ōyō Butsuri Gakkai.
Publisher: Business Center for Academic Societies Japan
Published: 1999
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 234
Subjects: Microfabrication -- Congresses.; Micromechanics -- Congresses.; Nanotechnology -- Congresses.
Genres: Congresses.
Notes: "IEEE Catalog No. 99EX248 ; JSAP Cat. No. 991224"--verso of T.p.

Includes bibliographic references and author index.