Atomic layer epitaxy
By: edited by T. Suntola and M. Simpson.
Contributors: Suntola, T.; Simpson, M.
Publisher: Blackie; Chapman and Hall
Published: 1990
Place of publication: Glasgow; New York
Language: eng
Number of pages: 182
Subjects: Thin films, Multilayered -- Technique.; Epitaxy.; Layer structure (Solids); Surface chemistry.
Notes: Includes bibliographical references and index.