16th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Subtitle: 15-16 November 1999, Munich, Germany
By: Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) ; cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany).
Contributors: Behringer, Uwe.; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.; Forschungszentrum Karlsruhe. Institute for Microstructure Technology.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3996; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3996.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 252
Subjects: Integrated circuits -- Masks -- Congresses.; Microlithography -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.
At head of title: Proceedings.