Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2
By: J.C. Marshall and R.L. Mattis.
Contributors: Mattis, Richard L.; National Institute of Standards and Technology (U.S.)
Series: Semiconductor measurement technology; NIST special publication ;; 400-90
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1992
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Number of pages: 140
Subjects: SPICE (Computer file); Metal oxide semiconductors, Complementary -- Computer simulation.
Notes: Includes bibliographical references (p. 41-42).
"April 1992."