ASMC 2000 Proceedings
Subtitle: 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop :  September 12-14, 2000, Boston, Massachusetts, USA
By: [co-sponsored by: Semiconductor Equipment and Materials International (SEMI), Institute of Electrical and Electronics Engineers, Inc. (IEEE)].
Contributors: Institute of Electrical and Electronics Engineers.; Semiconductor Equipment and Materials International.
Publisher: IEEE; SEMI
Published: 2000
Place of publication: Piscataway, New Jersey; Mountain View, California
Language: eng
Number of pages: 480
Subjects: Semiconductor industry -- Congresses; Semiconductors -- Design and construction -- Congresses; Process control -- Congresses
Genres: Congresses.
Other titles: Advancing the science of semiconductor manufacturing excellence.; Advanced Semiconductor Manufacturing Conference and Workshop.
Notes: "IEEE Catalog Number 00CH37072"--t.p. verso.

Includes bibliographic references.