Electron microscopy of semiconducting materials and ULSI devices
By: editors, Clive Hayzelden, Crispin Hetherington, Frances Ross.
Contributors: Hayzelden, Clive.; Hetherington, Crispin.; Ross, Frances.
Series: Materials Research Society Symposium proceedings ;; v. 523; Materials Research Society symposia proceedings ;; v. 523.
Publisher: Materials Research Society
Published: 1998
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 270
Subjects: Integrated circuits -- Ultra large scale integration -- Testing -- Congresses.; Semiconductors -- Testing -- Congresses.; Electron microscopy -- Congresses.
Notes: Includes bibliographical references and indexes.
"Symposium held April 15-16, 1998, San Francisco, California, U.S.A."