CVD growth and material quality control of silicon carbide
By: Jie Zhang
Contributors: Universitetet i Linköping
Series: Linköping studies in science and technology -- no. 713
Publisher: Dept. of Physics and Measurement Technology, Linköpings universitet
Published: 2001
Place of publication: Linköping
Language: eng
Number of pages: 215
Subjects: Silicon carbide; Chemical vapor deposition; Quality control
Notes: Thesis (doctoral)--Linköping University, 2001.