Silicon nitride and silicon dioxide thin insulating films
Subtitle: proceedings of the sixth international symposium
By: editors, K.B. Sundaram ... [et al.].
Contributors: Sundaram, K. B.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. High Temperature Materials Division.; Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (6th : 2001 : Washington, D.C.)
Series: Proceedings ;; v. 2001-7; Proceedings (Electrochemical Society) ;; v. 2001-7.
Publisher: Electrochemical Society
Published: 2001
Place of publication: Pennington, NJ
Language: eng
Number of pages: 286
Subjects: Thin film devices -- Congresses.; Silicon nitride -- Congresses.; Silicon dioxide -- Congresses.
Notes: Includes bibliographical references and index.
"Dielectric Science and Technology, Electronics, and High Temperature Materials Divisions."
"Papers presented at the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films held on March 25-30, 2001 in Washington DC U.S.A."--Pref.