Microelectronic manufacturing yield, reliability, and failure analysis IV
Subtitle: 23-24 September, 1998, Santa Clara, California
By: Sharad Prasad, Hans-Dieter Hartmann, Tohru Tsujide, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.].
Contributors: Prasad, Sharad.; Hartmann, Hans-Dieter.; Tsujide, Tohru.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3510; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3510.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 240
Subjects: Microelectronics -- Congresses.; Integrated circuits -- Very large scale integration -- Congresses.; Integrated circuits -- Reliability -- Congresses.; Integrated circuits -- Defects -- Congresses.; Integrated circuits -- Testing -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.