High energy and high dose ion implantation
Subtitle: proceedings of Symposium C on High Energy Ion Implantation and Symposium D on Ion Beam Synthesis of Compound and Elemental Layers of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28-31, 1991
By: edited by S.U. Campisano ... [et al.].
Contributors: Campisano, S. U.; European Materials Research Society.; Symposium D on Ion Beam Synthesis of Compound and Elemental Layers (1991 : Strasbourg, France)
Series: European Materials Research Society symposia proceedings ;; v. 23
Publisher: North-Holland
Published: 1992
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 308
Subjects: Ion implantation -- Congresses.; Ion bombardment -- Congresses.; Compound semiconductors -- Congresses.; Superlattices as materials -- Congresses.
Notes: Includes bibliographical references and index.