Papers from the International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces (BANPIS '97)
Subtitle: 26-27 January 1997, Nanki Seaside Lodge, Shirahama, Wakayama, Japan
By: sponsored by AFOSR/AOARD ; in cooperation with the Japan Society of Applied Physics and the American Vacuum Society.
Contributors: United States. Air Force. Asian Office of Aerospace Research and Development.; Ōyō Butsuri Gakkai.; American Vacuum Society.
Publisher: Published for the American Vacuum Society by the American Institute of Physics
Published: 1998
Place of publication: New York
Language: eng
Number of pages: 382
Subjects: Nonequilibrium plasmas -- Congresses.; Plasma etching -- Congresses.; Microelectronics -- Congresses.; Surfaces (Physics) -- Congresses.; Surfaces (Technology) -- Congresses.
Other titles: International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces
Notes: Includes bibliographical references and index.
"Published in both the 1998 Jan/Feb issue of the Jourl nal of vacuum science and technology A, vol. 16, no. 1 and in a special casebound edition available to participants"--T.p. verso.