Process module metrology, control, and clustering
Subtitle: 11-13 September 1991, San Jose, California
By: Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Davis, Cecil J.; Herman, Irving P.; Turner, Terry R.; Society of Photo-Optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1594; Proceedings of SPIE--the International Society for OPtical Engineering ;; v. 1594.
Publisher: SPIE
Published: 1992
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 419
Subjects: Microelectronics industry -- Production control -- Congresses.; Integrated circuits -- Design and construction -- Congresses.; Optical detectors -- Industrial applications -- Congresses.; Manufacturing processes -- Automation -- Congresses.
Notes: Includes bibliographical references and index.