Microelectromechanical systems--materials and devices III
Subtitle: symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.
By: editors, Jörg Bagdahn ... [et al.].
Contributors: Materials Research Society. Meeting; Symposium DD, "Microelectromechanical Systems--Materials and Devices III" (2009 : Boston, Mass.)
Series: Materials Research Society symposium proceedings -- v. 1222; Materials Research Society symposia proceedings -- v. 1222.
Publisher: Materials Research Society
Published: 2010
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 211
ISBN-13: 9781605111957
Subjects: Silicon; Microelectromechanical systems; Materials; Congresses; Nanostructured materials; Thin films
Notes: "... papers presented at Symposium DD, 'Microelectromechanical Systems--Materials and Devices III,' held November 30-December 2 at the 2009 MRS Fall Meeting in Boston, Massachusetts"-- preface.

Includes bibliographical references and indexes.