Multichamber and in-situ processing of electronic materials
Subtitle: 10-11 October 1989, Santa Clara, California
By: Robert S. Freund, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: Freund, Robert S.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1188; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1188.
Publisher: The Society
Published: 1990
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 196
Subjects: Electronics -- Materials -- Congresses.; Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Semiconductors -- Congresses.
Notes: Includes bibliographical references and index.