Ion implantation into semiconductors, oxides, and ceramics
Subtitle: proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides, and Ceramics, Strasbourg, France, 16-19 June, 1998
By: edited by J.K.N. Lindner ... [et al.].
Contributors: Lindner, J. K. N.; European Materials Research Society. Meeting
Series: European Materials Research Society symposia proceedings -- v. 85
Publisher: Elsevier
Published: 1999
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 442
Subjects: Semiconductors -- Effect of radiation on -- Congresses.; Ion implantation -- Congresses.; Semiconductor doping -- Congresses.; Oxides -- Effect of radiation on -- Congresses.; Ceramic materials -- Effect of radiation on -- Congresses.; Oxides -- Congresses.; Ceramics -- Congresses.; Semiconductors -- Congresses.; Ion implantation -- Congresses.
Genres: Congresses.
Notes: "Reprinted from Nuclear instruments and methods B., vol. 147/1-4"--T.p. verso.

Includes bibliographical references and index.