Proceedings of the Symposium on Advances in Ion Technology, 26 May 1976, Bell Telephone Laboratories, Murray Hill, New Jersey
Subtitle: sponsored by the Greater New York Chapter of the American Vacuum Society
By: special editor for the proceedings, R. E. Honig.
Contributors: Honig, R. E.; American Vacuum Society. Greater New York Chapter.
Publisher: Published for the American Vacuum Society by the American Institute of Physics
Published: 1976
Place of publication: New York
Language: eng
Number of pages: 1046
Subjects: Sputtering (Physics) -- Congresses.; Ion implantation -- Congresses.; Ions -- Congresses.
Other titles: Advances in ion technology.
Notes: The Proceedings were also published in the 1976 September/October issued of the Journal of vacuum science and technology, v.13, no.5.

These are the invited papers of the seventh annual symposium of the Greater New York Chapter of the American Vacuum Society.

Includes bibliographical references.