Microprocesses and Nanotechnology '97
Subtitle: digest of papers : 1997 International Microprocesses and Nanotechnology Conference : July 7-10, 1997, Nagoya, Japan
By: sponsored by the Japan Society of Applied Physics ... [et al.].
Contributors: Ōyō Butsuri Gakkai.
Publisher: Business Center for Academic Societies Japan
Published: 1997
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 238
Subjects: Microfabrication -- Congresses.; Micromechanics -- Congresses.; Nanotechnology -- Congresses.
Genres: Congresses.
Notes: "JSAP Cat. No. 971216"--verso of T.p.

Includes bibliographic references and author index.