Kalte Plasmen
Subtitle: Grundlagen, Erscheinungen, Anwendungen
By: Gerhard Franz.
Publisher: Springer-Verlag
Published: 1990
Place of publication: Berlin; New York
Language: ger
Number of pages: 297
Subjects: Plasma (Ionized gases); Plasma (Ionized gases) -- Industrial applications.; Low temperature plasmas.; Plasma engineering.; Plasma etching.
Notes: Includes bibliographical references (p. [272]-285) and indexes.