Electron Microscopy of Semiconducting Materials and Ulsi Devices
Subtitle: Symposium Held April 15-16, 1998, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
Contributors: Clive Hayzelden (Editor); Crispin Hetherington (Editor); Frances Ross (Editor)
Publisher: Materials Research Society
Published: August 1998
Language: eng
Format: Hardcover
Number of pages: 270
ISBN-13: 9781558994294
Subjects: Semiconductors; Testing; Integrated Circuits; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - Semiconductors; Congresses; Ultra large scale integration; Electronics - Circuits - Integrated; Electron microscopy