Micromanufacturing
Subtitle: international assessment of research and development
By: K.F. Ehmann ... [et al.].
Contributors: Ehmann, K. F.
Publisher: Springer
Published: 2007
Place of publication: Dordrecht
Language: eng
Number of pages: 362
ISBN-13: 9781402059483
Subjects: Microfabrication.; Micromachining.
Other titles: Micromanufacturing :
Notes: "WTEC"--Cover.

Includes bibliographical references.
Table of contents: title: Introduction / Richard E. DeVor and Kornel F. Ehmann; title: Design / Martin L. Culpepper and Thomas R. Kurfess; title: Materials / David Bourell and Kamlakar Rajurkar; title: Processes / Kamlakar Rajurkar and Marc Madou; title: Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson; title: Non-lithography applications / Marc Madou; title: Business, education, the environment, and other issues / Thom J. Hodgson.