Tungsten and Other Refractory Metals for Vlsi Applications IV
Subtitle: Proceedings of the 1988 Workshop Held October 4-6, 1988, Albuquerque, New Mexico, USA (Materials Research Society Conference Proceedings)
Contributors: Carol M. Conica (Editor)
Publisher: Materials Research Society
Published: December 1989
Language: eng
Format: Hardcover
Number of pages: 373
ISBN-13: 9780931837982
Subjects: Electronics - Circuits - VLSI; Very-Large-Scale Integration (Vlsi); Technology & Industrial Arts; Science/Mathematics