IEEE/SEMI International Semiconductor Manufacturing Science Symposium
Subtitle: Theme: "Manufacturing Science" : Burlingame, CA, USA, May 21-23, 1990.
Contributors: Institute of Electrical and Electronics Engineers.; Semiconductor Equipment and Materials Institute.
Publisher: IEEE
Published: 1990
Place of publication: New York, N.Y
Language: eng
Number of pages: 152
Subjects: Semiconductors -- Design and construction -- congresses
Other titles: Manufacturing science; 1990 IEEE/SEMI International Semiconductor Manufacturing Science; International Semiconductor Manufacturing Science Symposium.; 1990 Proceedings, International Semiconductor Manufacturing Science Symposium.; ISMSS 1990.
Notes: On cover and spine: 1990 IEEE/SEMI International Semiconductor Manufacturing Science.

"IEEE catalog number 90CH2810-0."

Caption title.

Includes bibliographical references.