Ultraclean technology handbook
By: edited by Tadahiro Ohmi.
Contributors: Ohmi, Tadahiro, 1939-
Publisher: M. Dekker
Published: 1993
Place of publication: New York
Language: eng
Subjects: Manufacturing processes -- Cleaning.
Notes: Includes bibliographical references and index.
Table of contents: title: v. 1. Ultrapure water.