Proceedings of the Symposium on Multilevel Metallization, Interconnection, and Contact Technologies
By: edited by L. B. Rothman, T. Herndon.
Contributors: Rothman, L. B.; Herndon, T.; Electrochemical Society.
Series: Proceedings / the Electrochemical Society ;; v. 87-4; Proceedings (Electrochemical Society ;; v. 87-4.
Publisher: Electrochemical Society, Inc.
Published: 1987
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 272
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Metallizing -- Congresses.
Other titles: Multilevel metallization, interconnection, and contact technologies.
Notes: Includes bibliographies and indexes.
Spine title: Multilevel metallization, interconnection, and contact technologies.