RTP 2003
Subtitle: 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC
By: editors, J. Gelpey ... [et al.] ; IEEE EDS.
Contributors: Gelpey, Jeffrey C.; IEEE Electron Devices Society.
Publisher: IEEE
Published: 2003
Place of publication: Piscataway, N.J
Language: eng
Number of pages: 220
Subjects: Semiconductors -- Heat treatment -- Congresses.; Rapid thermal processing -- Congresses.; Semiconductor doping -- Congresses.; Semiconductors -- Defects -- Congresses.
Genres: Congresses.
Other titles: Advanced thermal processing of semiconductors; Advanced Thermal Processing of Semiconductors, 2003, RTP 2003, 11th IEEE International Conference on.
Notes: Includes bibliographical references.
"IEEE Catalog Number: 03EX696"--T.p. verso.
Also available via the World Wide Web with additional title: Advanced Thermal Processing of Semiconductors, 2003, RTP 2003, 11th IEEE International Conference on.