Rapid thermal processing (RTP) of semiconducters in space
Subtitle: progress report for 12 month period ending March 31, 1993
By: submitted by T.J. Anderson and K.S. Jones.
Contributors: Jones, K. S.; United States. National Aeronautics and Space Administration.
Series: NASA contractor report -- NASA CR-193110.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1993
Place of publication: [Washington, DC; Springfield, Va
Language: eng
Format: Microform
Subjects: Semiconductors.; Space industrialization.
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 93-1094-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1993] 1 microfiche.