Micromachining and microfabrication process technology XVI
Subtitle: 25 and 27 January 2011, San Francisco, California, United States
By: Mary Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored ... by SPIE
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 7926; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7926.
Publisher: SPIE
Published: 2011
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819484635
Subjects: Microfabrication; Congresses; Electromechanical devices; Micromachining; Miniature electronic equipment; Design and construction
Notes: Includes bibliographical references and author index.