Cleanrooms
Subtitle: facilities and practices
By: M. Kozicki with S. Hoenig and P. Robinson.
Contributors: Hoenig, Stuart A.; Robinson, P.
Publisher: Van Nostrand Reinhold
Published: 1991
Place of publication: New York
Language: eng
Number of pages: 374
Subjects: Clean rooms.
Other titles: Clean rooms, facilities and practices.
Notes: Includes index.