Microelectronics manufacturing and reliability
Subtitle: 21-22 September 1992, San Jose, California
By: Barbara Vasquez ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Vasquez, Barbara.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1802; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1802.
Publisher: SPIE
Published: 1993
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 258
Subjects: Integrated circuits -- Design and construction -- Congresses.; Integrated circuits -- Testing -- Congresses.
Notes: Includes bibliographical references and index.