Stroenie i ėlektronnai͡a struktura amorfnykh diėlektrikov v kremnievykh MDP strukturakh
By: V.A. Grit͡senko ; otvetstvennyĭ redaktor V.G. Litovchenko.
Contributors: Litovchenko, Vladimir Grigorʹevich.
Publisher: VO "Nauka"
Published: 1993
Place of publication: Novosibirsk
Language: rus
Number of pages: 277
Subjects: Silicon nitride.; Dielectrics.; Integrated circuits.
Notes: Includes bibliographical references (p. 260-[278]).
At head of title: Rossiĭskai͡a akademii͡a nauk. Sibirskoe otdelenie. Institut fiziki poluprovodnikov.