Osa Proceedings on Extreme Ultraviolet Lithography
Subtitle: Proceedings of the Tropical Meeting, September 19-21, 1994 Monterey, California
Contributors: Frits Zernike (Editor); Optical Society of America (Corporate Author); David T. Attwood (Editor)
Publisher: American Society of Civil Engineers
Published: March 1995
Language: eng
Format: Hardcover
Number of pages: 283
ISBN-13: 9781557523631
Subjects: Ultraviolet radiation; Photolithography; Optics; Science/Mathematics; Optical coatings; Congresses; Industrial applications