Dry process
By: edited by Yasuhiro Horiike ... [et al.].
Contributors: Horiike, Yasuhiro.; Dry Process Symposium, (13th : 1991 : Tokyo)
Series: Japanese journal of applied physics -- vol.31 (6B)
Publisher: Japanese Journal of Applied Physics
Published: 1992
Place of publication: Tokyo
Language: eng
Notes: Special issue. Contains papers presented at the 13th Dry Process Symposium (DPS 1991) which was held in Zendentsurodo-Kaikan, Tokyo, October 23 and 24,1991.