Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Dielectrics VIII 2005
Contributors: R. E. Sah (Editor); M. J. Deen (Editor); J. F. Zhang (Editor); J. Yota (Editor); Y. Kamakura (Editor)
Publisher: Electrochemical Society
Published: June 2005
Language: eng
Format: Hardcover
Number of pages: 588
ISBN-13: 9781566774598
Subjects: Science; Science/Mathematics; Chemistry - Inorganic; Congresses; Silica; Silicon nitride; Thin film devices