Modeling aspects in optical metrology II
Subtitle: 15-16 June 2009, Munich, Germany
By: Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)
Contributors: SPIE Europe; European Optical Society; Wissenschaftliche Gesellschaft Lasertechnik; SPIE (Society)
Series: Proceedings of SPIE -- v. 7390; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7390.
Publisher: SPIE
Published: 2009
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819476739
Other titles: Modeling aspects in optical metrology 2; Modeling aspects in optical metrology two
Notes: Includes bibliographical references and author index.