Micro- and nanoelectronics 2003
Subtitle: 6-10 October 2003, Zvanigorod, Russia
By: Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences ; sponsored by Ministry of Industry ... [et al.]
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, WA
Language: eng
Number of pages: 762