Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)
Publisher: Cambridge University Press
Published: May 13, 1999
Language: eng
Format: Hardcover
Number of pages: 420
ISBN-13: 9780521590549
Subjects: Electronic devices & materials; Technology; Microelectronics; Semiconductor Physics; Technology & Industrial Arts; Silicon; Science/Mathematics; Micromachining; Electronics - Circuits - General; Engineering - Electrical & Electronic; Material Science; Technology / Engineering / Electrical; Electronics - Microelectronics; Etching