Fabrication, Packaging and Integration of MEMS and Related Microsystems
Edition: 1 edition
Publisher: Springer
Published: October 2008
Language: eng
Format: Hardcover
Number of pages: 500
ISBN-13: 9780387728926
Subjects: Electronics engineering; Technology & Engineering; Technology & Industrial Arts; Science/Mathematics; Nanotechnology; MEMS; SOC; Technology / Electronics / Microelectronics; artificial intelligence; components; device; devices; mixed environmental domains; mixed signals; nanopackaging; packaging; sub-micron; system-on-a-chip; Electronics - Microelectronics; Optics