SEM Sentinel
Subtitle: SEM performance measurement system
By: Alice V. Ling ... [et al.]
Contributors: Ling, Alice V.; National Institute of Standards and Technology (U.S.)
Series: NISTIR
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Published: 2000
Place of publication: Gaithersburg, MD
Language: eng
Format: Microform
Subjects: Scanning electron microscopes; Semiconductor wafers -- Measurement
Other titles: Scanning electron microscope Sentinel; SEM performance measurement system; Scanning electron microscope performance measurement system
Notes: "April 2000"--Pt. 1

Shipping list no.: 2000-0860-M (Pt. 1)

Includes bibliographical references

Issued in parts

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [2000- microfiches : negative.