Advanced metallization for ULSI applications in 1993
Subtitle: proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A.
By: editors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike.
Contributors: Favreau, David P.; Shacham-Diamand, Yosi.; Horiike, Yasuhiro.; University of California, Berkeley. Continuing Education in Engineering.
Series: Materials Research Society conference proceedings,
Publisher: Materials Research Society
Published: 1994
Place of publication: Pittsburgh, PA
Language: eng
Number of pages: 611
Subjects: Integrated circuits -- Ultra large scale integration -- Materials -- Congresses.; Metallic films -- Congresses.; Vapor deposition -- Congresses.; Electrochemical metallizing -- Congresses.
Notes: Includes bibliographical references and indexes.