Rapid thermal and integrated processing
Subtitle: 10-11 September 1991, San Jose, California
By: Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Moslehi, Mehrdad M.; Singh, Rajendra, 1946-; Kwong, Dim-Lee.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1595; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1595.
Publisher: SPIE
Published: 1992
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 207
Subjects: Semiconductors -- Heat treatment -- Congresses.; Semiconductor doping -- Congresses.; Vapor-plating -- Congresses.
Notes: Includes bibliographical references and index.
"Part of a two-conference program ... held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991"--P. ix.