Design, test, integration, and packaging of MEMS/MOEMS 2002
Subtitle: 6-8 May, 2002, Cannes, France
By: Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.].
Contributors: Courtois, B.; Centre national de la recherche scientifique (France)
Series: SPIE proceedings series ;; v. 4755; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4755.
Publisher: SPIE
Published: 2002
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 832
Subjects: Microelectromechanical systems -- Congresses.; Optoelectronic devices -- Congresses.; Micromachining -- Congresses.; Microelectronic packaging -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.