1997 IEEE International Symposium on Semiconductor Manufacturing
Subtitle: conference proceedings : October 6-8, 1997, San Francisco, California.
Contributors: IEEE Electron Devices Society.
Publisher: IEEE
Published: 1997
Place of publication: Piscataway, N.J
Language: eng
Subjects: Semiconductors -- Design and construction -- Congresses.
Genres: Congresses.
Other titles: Semiconductor manufacturing.; Semiconductor Manufacturing conference proceedings, 1997 IEEE International Symposium on.
Notes: "Sponsored by: IEEE Electron Devices Society" ... [et al.]--cover.

Includes bibliographical references and indexes.

Also available via the World Wide Web with additional title: Semiconductor Manufacturing conference proceedings, 1997 IEEE International Symposium on.