Theoretical and experimental investigations on silicon single crystal resonant structures
By: by Rudolf A. Buser
Contributors: Université de Neuchâtel
Publisher: Institute of Microtechnology, University of Neuchâtel
Published: 1989
Place of publication: Neuchâtel, Switzerland
Language: eng
Number of pages: 234
Notes: Thesis (doctoral)--University of Neuchâtel, 1989.

Includes bibliographical references.

Preface also in German.