MOEMS display and imaging systems
Subtitle: 28-29 January 2003, San Jose, California, USA
By: Hakan Urey, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Contributors: Urey, Hakan, 1970-; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series,; v. 4985; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4985.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 306
Subjects: Microelectromechanical systems -- Congresses.; Imaging systems -- Congresses.; Scanning systems -- Congresses.; Optics, Adaptive -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.