Precision nanometrology
Subtitle: sensors and measuring systems for nanomanufacturing
By: Wei Gao
Series: Springer series in advanced manufacturing; Springer series in advanced manufacturing
Publisher: Springer
Published: 2010
Place of publication: London; New York
Language: eng
Number of pages: 354
ISBN-13: 9781849962537; 9781849962544
Subjects: Nanostructured materials; Measurement
Notes: Includes bibliographical references and index.