Micromachined devices and components
Subtitle: 23-24 October, 1995, Austin, Texas
By: Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering.
Contributors: Roop, Ray.; Chau, Kevin.; Semiconductor Equipment and Materials International.; Society of Photo-optical Instrumentation Engineers.; National Institute of Standards and Technology (U.S.); Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2642; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2642.
Publisher: SPIE
Published: 1995
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 296
Subjects: Microelectromechanical systems -- Congresses.; Micromachining -- Congresses.
Notes: Includes bibliographic references and index.