Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon
Subtitle: low cost silicon array project
Contributors: Breneman, W. C; Farrier, E. G; Morihara, Hiroshi; United States. Dept. of Energy
Series: DOE/JPL ; 954334-8
Publisher: Dept. of Energy; for sale by the National Technical Information Service
Published: 1979
Place of publication: [Washington]; Springfield, Va
Language: eng
Subjects: Silane; Silicon; Semiconductors
Notes: Authors: W. C. Breneman, E. G. Farrier, H. Morihara

Contract no. NAS-7-100-954334

Includes bibliographical references
Table of contents: Quarterly progress report for July-September 1978