JTEC panel on microelectromechanical systems in Japan
Subtitle: final report
By: Kensall D. Wise, chair ... [et al.].
Contributors: Wise, Kensall D., 1928-; United States. National Aeronautics and Space Administration.
Publisher: International Technology Research Institute, Loyola College in Maryland; National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1994
Place of publication: Baltimore, Md; [Washington, D.C; Springfield, Va
Language: eng
Format: Microform
Subjects: Microelectronics -- Research -- Japan.; Electromechanical devices -- Research -- Japan.
Other titles: Microelectromechanical systems in Japan.; JTEC panel report on microelectromechanical systems in Japan.
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 95-0749-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1995] 4 microfiches.