Measurement of thermal conductivity of thin films on silicon substrates =
Subtitle: mesurage de la conductivit́́́́́e thermique des films minces sur substrat de silicium.
Contributors: International Organization for Standardization.; Versailles Project on Advanced Materials and Standards.
Edition: 1st ed.
Series: Technology trends assessment -- ISO/TTA 4.
Publisher: International Organization for Standardization; Versailles Project on Advanced Materials and Standards, National Institute of Standards and Technology
Published: 2002
Place of publication: Geneva, Switzerland; Gaithersburg, Md
Language: eng
Number of pages: 19
Subjects: Thin films -- Thermal conductivity -- Measurement.
Notes: Cover title.

"2002-11-15."

Includes bibliographical references (p. 19).