Poluchenie i svoĭstva slabolegirovannykh sloev kremnievykh struktur
By: V.E. Bakhrushin
Publisher: Zaporoz︠h︡skoe gos. red.-izd-koe predprii︠a︡tie "Vydavet︠s︡ʹ"
Published: 1997
Place of publication: Zaporoz︠h︡ʹe
Language: rus
Number of pages: 268
Notes: Includes bibliographical references (p. 250-266).