Optical microlithography V
Subtitle: 13-14 March 1986, Santa Clara, California
By: Harry L. Stover, chairman/editor.
Contributors: Stover, Harry L.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 633
Publisher: SPIE--the International Society for Optical Engineering
Published: 1986
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 309
Subjects: Microlithography -- Congresses.; Integrated circuits -- Very large scale integration -- Congresses.
Other titles: Optical microlithography 5.; Optical microlithography five.
Notes: Includes bibliographies and index.