Problemy mikroėlektronnoĭ tekhnologii
By: otvetstvennyĭ redaktor L.V. Velikov.
Contributors: Velikov, L. V.
Series: Trudy FTIAN,; t. 4
Publisher: "Nauka"
Published: 1992
Place of publication: Moskva
Language: rus
Number of pages: 97
Subjects: Microelectronics.
Notes: Includes bibliographical references.
At head of title: Rossiĭskai͡a︡ akademii͡a︡ nauk. Fiziko-tekhnologicheskiĭ institut.
Summary and table of contents in English.