Proceedings of the satellite symposium to ESSDERC 2001 Nuremberg/Germany
Subtitle: crystalline defects and contamination : their impact and control in device manufacturing III ; DECON 2001
By: editors by B.O. Kolbesen ... [et al.] ; Electronics Division.
Contributors: Kolbesen, Bernd O.; Electrochemical Society. Electronics Division.; European Solid State Device Research Conference (31st : 2001 : Nuremberg/Germany); DECON 2001.
Series: Proceedings -- v. 2001-29; Proceedings (Electrochemical Society) -- v. 2001-29.
Publisher: Electrochemical Society
Published: 2001
Place of publication: Pennington, NJ
Language: eng
Number of pages: 362
Subjects: Integrated circuits -- Very large scale integration -- Congresses.; Crystals -- Defects -- Congresses.
Genres: Congresses.
Other titles: Crystalline defects and contamination
Notes: Includes bibliographical references and indexes.