Advances in resist technology and processing VII
Subtitle: 5-6 March 1990, San Jose, California
By: Michael P.C. Watts, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: Watts, Michael P. C.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series -- v. 1262.; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1262.
Publisher: SPIE
Published: 1990
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 595
ISBN-13: 9780819403094
Subjects: Photoresistors -- Congresses; Photoconductivity -- Congresses; Photolithography -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.