Ablation of polyimide, PMMA, and teflon with vacuum ultraviolet excimer lasers
Series: Canadian theses = Thèses canadiennes
Publisher: National Library of Canada = Bibliothèque nationale du Canada
Published: 1992
Place of publication: Ottawa
Language: eng
Format: Microform
Notes: University Microfilms order no. UMI00367302.

Thesis (M.A.Sc.)--University of Toronto, 1991.

Includes bibliographical references.