Advanced Processing of Semiconductor Devices II
Subtitle: 17-18 March 1988, Newport Beach, California
By: Harold G. Craighead, J. Narayan, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society.
Contributors: Craighead, Harold G.; Narayan, J.; Society of Photo-optical Instrumentation Engineers.; Metallurgical Society (U.S.)
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 945
Publisher: SPIE
Published: 1988
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 164
Subjects: Semiconductors -- Design and construction -- Congresses.
Notes: Includes bibliographies and indexes.