Microengineering, MEMS, and interfacing
Subtitle: a practical guide
By: Danny Banks
Series: Mechanical engineering -- 199
Publisher: CRC/Taylor & Francis
Published: 2006
Place of publication: Boca Raton, Fla
Language: eng
Format: [electronic resource] :
ISBN-13: 9781420015416
Subjects: Microelectromechanical systems
Other titles: ENGnetBASE.
Notes: Includes bibliographical references and index.

Also available in print edition. CRC Press (http://www.crcpress.com)

Mode of access: World Wide Web.