Nanofabrication using focused ion and electron beams
Subtitle: principles and applications
By: edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell
Series: Nanomanufacturing series -- v. 1
Publisher: Oxford University Press
Published: 2012
Place of publication: Oxford; New York
Language: eng
Number of pages: 813
ISBN-13: 9780199734214
Subjects: Electron beams; Nanostructured materials; Nanotechnology; Industrial applications; Ion bombardment
Notes: Includes bibliographical references and index.