Nano- and microtechnology
Subtitle: materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia
By: Dinesh K. Sood, Ajay P. Malshe, Ryutaro Maeda, chairs/editors.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, WA
Language: eng
Number of pages: 476