Semiconductor Lithography
Subtitle: Principles, Practices, and Materials (Microdevices)
Edition: 1 edition
Publisher: Springer
Published: December 31, 1987
Language: eng
Format: Paperback
Number of pages: 952
ISBN-13: 9780306421853
Subjects: Electronic devices & materials; Semiconductors; Technology & Industrial Arts; Science/Mathematics; Electricity; Electronics - Semiconductors; Engineering - Electrical & Electronic; Optics; Technology / Engineering / Electrical; Microlithography; Photoresists