Microlithography
Subtitle: science and technology
By: edited by James R. Sheats, Bruce W. Smith
Publisher: Marcel Dekker
Published: 1998
Place of publication: New York
Language: eng
Number of pages: 780
ISBN-13: 9780585139333
Copyright date: 1998
Subjects: Microlithography; Industrial applications; Integrated circuits; Masks; Complementary Metal oxide semiconductors; Design and construction; Manufacturing processes; Microlithographie; Applications industrielles; Circuits intégrés; Masques; MOS complémentaires; Conception et construction; Fabrication; TECHNOLOGY & ENGINEERING; Mechanical
Notes: Includes bibliographical references and index.