Growth, structure and morphology of CVD carbon films
By: by Ann-Sofie Johansson
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 6
Publisher: Acta Universitatis Upsaliensis
Published: 1993
Place of publication: Uppsala
Language: eng
Number of pages: 34
ISBN-13: 9789155431914
Subjects: Chemical vapor deposition; Thin films; Carbon
Notes: Thesis (doctoral)--Uppsala University, 1993.

Includes bibliographical references.