Developments in semiconductor microlithography III
Subtitle: April 10-11, 1978, San Jose, California
By: Richard L. Ruddell ... [et al.] editors ; presented by the Society of Photo-optical Instrumentation Engineers.
Contributors: Ruddell, Richard L.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 135; Proceedings of the Society of Photo-optical Instrumentation Engineers ;; v. 135.
Publisher: The Society
Published: 1978
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 170
Subjects: Semiconductors -- Congresses.; Microlithography -- Congresses.
Notes: Includes bibliographical references and indexes.