Reactive sputtering of cubic-phase BN:C and nanostructured B-N-C films
Subtitle: growth, microstructure and mechanical properties
By: Mats P. Johansson
Contributors: Universitetet i Linköping. Department of Physics and Measurement Technology; Universitetet i Linköping
Publisher: Department of Physics and Measurement Technology, Linköping University
Published: 1998
Place of publication: Linköping
Language: eng
Notes: Thesis (doctoral)--Linköpings universitet, 1998.