Micromachining and microfabrication process technology VII
Subtitle: 22-24 October 2001, San Francisco, [California] USA
By: Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) ... [et al.].
Contributors: Karam, Jean-Michel.; Yasaitis, John.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: SPIE proceedings series ;; v. 4557; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4557.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 486
Subjects: Micromachining -- Congresses.; Microfabrication -- Congresses.; Electromechanical devices -- Design and construction -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.