Laser processing of semiconductors and hybrids
Subtitle: 21-22 January 1986, Los Angeles, California
By: Edward J. Swenson, chairman/editor ; presented in cooperation with American Association of Physicists in Medicine ... [et al.].
Contributors: Swenson, Edward J.; American Association of Physicists in Medicine.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 611; Eighteenth in the SPIE critical reviews of technology series; SPIE critical reviews of technology series ;; 18th.
Publisher: SPIE--the International Society for Optical Engineering
Published: 1986
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 101
Subjects: Integrated circuits -- Design and construction -- Congresses.; Lasers -- Industrial applications -- Congresses.
Notes: Includes bibliographies and index.