Resolution enhancement techniques in optical lithography
By: Alfred Kwok-Kit Wong.
Series: Tutorial texts in optical engineering -- v. TT 47.
Publisher: SPIE Optical Engineering Press; SPIE Publications; Brand: SPIE Publications; SPIE Press
Published: 2001
Place of publication: Bellingham, WA
Language: eng
Number of pages: 214
Subjects: Integrated circuits -- Design and construcition; Microlithography
Notes: Includes bibliographical references (p. 189-208) and index.