Micromachining and micropackaging of transducers
By: [edited by] Clifford D. Fung ... [et al.].
Contributors: Fung, Clifford D. 1947-; Workshop on Micromachining and Micropackaging of Transducers (1984 : Case Western Reserve University)
Series: Studies in electrical and electronic engineering ;; 20
Publisher: Elsevier; [Distributor] for the U.S.A. and Canada; Elsevier Science Pub. Co.; Elsevier Science Ltd
Published: 1985
Place of publication: Amsterdam; New York; New York, N.Y
Language: eng
Number of pages: 244
Subjects: Transducers -- Design and construction -- Congresses.; Micromachining -- Congresses.
Notes: Includes bibliographies.
Papers from the Workshop on Micromachining and Micropackaging of Transducers, organized by the faculty associated with the Semiconductor Chemical Transducer Resource at Case Western Reserve University, on Nov. 7-9, 1984.