Plasma deposition of amorphous silicon-based materials
By: edited by Giovanni Bruno, Pio Capezzuto, Arun Madan.
Contributors: Bruno, Giovanni.; Capezzuto, Pio.; Madan, A.
Series: Plasma--materials interactions
Publisher: Academic Press
Published: 1995
Place of publication: Boston
Language: eng
Number of pages: 324
Subjects: Amorphous semiconductors -- Design and construction.; Silicon alloys.; Plasma-enhanced chemical vapor deposition.
Notes: Includes bibliographical references and index.