Polysilicon films and interfaces
Subtitle: symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.
By: editors, C.Y. Wong, C.V. Thompson, K.N. Tu.
Contributors: Wong, C. Y.; Thompson, C. V.; Tu, K. N. 1937-; Symposium on Polysilicon Films and Interfaces (1987 : Boston, Mass.)
Series: Materials Research Society symposium proceedings,; v. 106; Materials Research Society symposia proceedings ;; v. 106.
Publisher: Materials Research Society
Published: 1988
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 369
Subjects: Silicon -- Electric properties -- Congresses.; Integrated circuits -- Materials -- Congresses.
Notes: Includes bibliographies and indexes.
"This volume represents the Proceedings of the Symposium on Polysilicon Films and Interfaces"--P. xi.