Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
By: James E. Potzick
Contributors: National Institute of Standards and Technology (U.S.)
Series: NIST special publication -- 260-129; Standard reference materials
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1997
Place of publication: Gaithersburg, MD; Washington
Language: eng
Format: Microform
Number of pages: 23
Subjects: Microscopes -- Calibration -- Standards; Integrated circuits -- Masks -- Measurement; Chromium -- Spectra -- Standards
Other titles: Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Notes: Distributed to depository libraries in microfiche

Shipping list no.: 98-0086-M

Includes bibliographical references (p. 17-18)

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1997] 1 microfiche : negative