Metal-dielectric interfaces in gigascale electronics
Subtitle: thermal and electrical stability
By: Ming He, Toh-Ming Lu
Contributors: Lu, T.-M. (Toh-Ming), 1943-
Series: Springer series in materials science -- v. 157; Springer series in materials science -- v. 157.
Publisher: Springer
Published: 2012
Place of publication: New York
Language: eng
Number of pages: 149
ISBN-13: 9781461418115; 9781461418122
Subjects: Materials; Microelectronics; Interfaces (Physical sciences)
Notes: Includes bibliographical references and index.