Microelectromechanical systems (MEMS)
Subtitle: presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia
By: sponsored by the Dynamic Systems and Control Division, ASME ... [et al.] ; organizers, C. Thomas Avedisian ... [et al.].
Contributors: Avedisian, C. T.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; International Mechanical Engineering Congress and Exposition (1996 : Atlanta, Ga.)
Series: DSC -- vol. 59; DSC (Series) -- vol. 59.
Publisher: American Society of Mechanical Engineers
Published: 1996
Place of publication: New York, N.Y
Language: eng
Number of pages: 460
Subjects: Electromechanical devices -- Congresses.; Microelectronics -- Congresses.
Other titles: Micro-electro-mechanical systems (MEMS)
Notes: Includes bibliographical references and index.
Table of contents: value: Microscale thermal phenomena in electronic systems; value: Applications of miocrofabrication to fluid mechanics; value: Mechanics in micro-electro-mechanical systems (MEMS); value: Micromechanical systems.