Laser processing of thin films and microstructures
Subtitle: oxidation, deposition, and etching of insulators
By: Ian W. Boyd.
Series: Springer series in materials science ;; 3; Springer series in materials science ;; v. 3.
Publisher: Springer-Verlag
Published: 1987
Place of publication: Berlin; New York
Language: eng
Number of pages: 320
Subjects: Lasers -- Industrial applications.
Notes: Bibliography: p. 287-313.
Includes index.