Advanced processing of semiconductor devices
Subtitle: 23-25 March 1987, Bay Point, Florida
By: Sayan D. Mukherjee, editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
Contributors: Mukherjee, Sayan D.; Society of Photo-optical Instrumentation Engineers.; Metallurgical Society (U.S.)
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 797
Publisher: SPIE
Published: 1987
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 362
Subjects: Semiconductors -- Design and construction -- Congresses.
Notes: Includes biblographies.