Silicon materials--processing, characterization and reliability
Subtitle: symposium held April 1-5, 2002, San Francisco, California, U.S.A.
By: editors: Janice L. Veteran ... [et al.].
Contributors: Veteran, Janice L.
Series: Materials Research Society symposium proceedings -- v. 716; Materials Research Society symposia proceedings -- 716.
Publisher: Materials Research Society
Published: 2002
Place of publication: Warrendale, PA
Language: eng
Number of pages: 672
Subjects: Semiconductors -- Congresses.; Semiconductors -- Reliability -- Congresses.; Silicon -- Congresses.; Silicon alloys -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.