Materials and processes for microelectronic systems
By: edited by K.M. Nair, R. Pohanka, R.C. Buchanan.
Contributors: Nair, K. M.; Pohanka, R.; Buchanan, R. C.; International Ceramic Science and Technology Congress (1st : 1989 : Anaheim, Calif.)
Series: Ceramic transactions ;; v. 15
Publisher: American Ceramic Society
Published: 1990
Place of publication: Westerville, Ohio
Language: eng
Number of pages: 733
Subjects: Microelectronics -- Materials -- Congresses.; Integrated circuits -- Design and construction -- Congresses.; Ceramic materials -- Congresses.
Notes: Includes bibliographical references and index.
"Proceedings of the Symposium on Materials and Processes for Microelectronic Systems held during the First International Ceramic Science and Technology Congress held in Anaheim, CA, on October 31-November 3, 1989"--T.p. verso.