Proceedings of the First International Symposium on Advanced Materials for ULSI
By: edited by Martin Scott, Yoichi Akasaka, Rafael Reif.
Contributors: Scott, Martin; Akasaka, Yoichi.; Reif, Rafael.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. High Temperature Materials Division.
Series: Proceedings / Electrochemical Society ;; v. 88-19; Proceedings (Electrochemical Society) ;; v. 88-19.
Publisher: Electrochemical Society
Published: 1988
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 246
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses.
Other titles: Advanced materials for ULSI.
Notes: Includes bibliographies and index.
"[Sponsored by] Electronics, Dielectrics and Insulation, and High Temperature Materials Divisions [of the Electrochemical Society]".