Integrated chemical microsensor systems in CMOS technology
By: A. Hierlemann.
Series: Microtechnology and MEMS
Publisher: Springer
Published: 2005
Place of publication: Berlin; New York
Language: eng
Number of pages: 229
Subjects: Metal oxide semiconductors, Complementary; Microelectromechanical systems; Sensorimotor integration
Notes: Includes bibliographical references (p. [193]-217) and index.