Smart sensors, actuators, and MEMS II
Subtitle: 9-11 May 2005, Seville, Spain
By: Carles Cané, Jung-Chih Chiao, Fernando Vidal Verdú, chairs/editors ; sponsored by, SPIE Europe, ; cosponsored by, AnaFocus (Spain)  ... [et al.] ;  cooperating organizations, CNM--Centro Nacional de Microelectrónica (Spain) ... [et al.] ; published by SPIE--the International Society for Optical Engineering
Contributors: SPIE Europe; AnaFocus; Centro Nacional de Microlectrónica; Society of Photo-optical Instrumentation Engineers
Series: Proceedings of SPIE proceedings series -- v. 5836; Proceedings of SPIE--the International Society for Optical Engineering -- v. 5836.
Publisher: SPIE
Published: 2005
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 730
Subjects: Microelectromechanical systems; Congresses; Microtechnology; Actuators; Industrial applications; Detectors; Scanning systems
Notes: Includes bibliographical references and author index.