Handbook of VLSI Microlithography
Subtitle: Principles, Technology and Applications (Materials Science and Process Technology Series)
Contributors: William B. Glendinning (Editor); John N. Helbert (Editor)
Publisher: Noyes Publications
Published: February 1, 1992
Language: eng
Format: Hardcover
Number of pages: 649
ISBN-13: 9780815512813
Subjects: Circuits & components; Science/Mathematics; Very-Large-Scale Integration (Vlsi); Technology; Technology & Industrial Arts; Very large scale integration; Electronics - Circuits - Printed; Electronics - Circuits - VLSI; Handbooks & Manuals; Integrated circuits; Microlithography
First sentence: Integrated Circuit (IC) fabrication requires performing a long sequence of many complex processes.