Introduction to microfabrication
By: Sami Franssila.
Edition: 2nd ed.
Publisher: John Wiley & Sons; Wiley
Published: 2010
Place of publication: Chichester, West Sussex, England; Hoboken, NJ
Language: eng
Number of pages: 536
ISBN-13: 9780470749838
Subjects: Microelectromechanical systems; Electronic apparatus and appliances; Microfabrication
Notes: Includes index.