Functional integration of opto-electro-mechanical devices and systems II
Subtitle: 23-24 January 2002, San Jose, USA
By: Michael R. Descour, Juha T. Rantala, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Descour, Michael R.; Rantala, Juha T.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,; v. 4647; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4647.
Publisher: SPIE
Published: 2002
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 104
Subjects: Optoelectronic devices -- Congresses.; Microelectromechanical systems -- Congresses.; Microelectronic packaging -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.