Fundamentals of semiconductor manufacturing and process control
By: Gary S. May, Costas J. Spanos.
Contributors: Spanos, Costas J.
Publisher: J. Wiley & Sons
Published: 2006
Place of publication: Hoboken, NJ
Language: eng
Number of pages: 488
Subjects: Semiconductors -- Design and construction.; Integrated circuits -- Design and construction.; Process control -- Statistical methods.
Notes: Includes bibliographical references and index.
"Wiley-Interscience."