Structure and properties of titanium- and hafnium- nitride films prepared by reactive magnetron sputtering
By: Bengt Olof Johansson
Contributors: Universitetet i Linköping
Series: Linköping Studies in Science and Technology. Dissertations -- no 122
Publisher: Linköping University
Published: 1984
Language: eng
Number of pages: 176
Notes: Thesis (doctoral)--Linköping University, 1984.