Handbook of microlithography, micromachining, and microfabrication
By: P. Rai-Choudhury, editor.
Contributors: Rai-Choudhury, P.
Series: IEE materials and devices series ;; 12A-12B; IEE materials & devices series ;; 12A-12B.
Publisher: SPIE Optical Engineering Press; Institution of Electrical Engineers; Brand: Society of Photo-Optical Instrumentation Engineers; Society of Photo-Optical Instrumentation Engineers
Published: 1997
Place of publication: Bellingham, Wash., USA; London, UK
Language: eng
Number of pages: 768
Subjects: Microlithography.; Micromachining.; Microfabrication.
Other titles: Microlithography, micromachining, and microfabrication
Notes: Includes bibliographical references and indexes.
Table of contents: title: v. 1. Microlithography; title: v. 2. Micromachining and microfabrication.