Micromachining and microfabrication process technology IX
Subtitle: 27-29 January 2004, San Jose, California, USA
By: Mary Ann Maher, Jerome F. Jakubczak, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Perez-Maher, Mary Ann.; Jakubczak, Jerome Florian.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,; v. 5342; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5342.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 276
Subjects: Micromachining -- Congresses.; Microfabrication -- Congresses.; Electromechanical devices -- Design and construction -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.