Arsine source replacement for the growth of gallium arsenide via MOCVD
By: Thomas M. Mirandi
Contributors: University of Massachusetts at Lowell. Toxics Use Reduction Institute
Series: Technical report -- no. 8; Technical report (University of Massachusetts at Lowell. Toxics Use Reduction Institute) -- no. 8.
Publisher: Toxics Use Reduction Institute, University of Massachusetts Lowell
Published: 1993
Place of publication: Lowell, Mass
Language: eng
Number of pages: 14
Subjects: Hazardous substances; Semiconductor industry
Notes: Includes bibliographical references.