Rapid Thermal and Integrated Processing IV
Subtitle: Symposium Held April 17-20, 1995, San Francisco, California, U.S.A (Symposium Proceedings Series; Vol. 387)
Contributors: S. R. J. Brueck (Editor); Jeffrey C. Gelpey (Editor); A. Kermani (Editor); J. L. Regolini (Editor); J. C. Sturm (Editor)
Publisher: Materials Research Society
Published: September 1995
Language: eng
Format: Paperback
Number of pages: 455
ISBN-13: 9781558992900
Subjects: Electronics - Semiconductors; Reference; Technology; Technology & Industrial Arts; Chemical vapor deposition; Congresses; Heat treatment; Semiconductor doping; Semiconductors; Science/Mathematics