Iskusstvennai͡a︡ ėpitaksii͡a︡--perspektivnai͡a︡ tekhnologii͡a︡ ėlementnoĭ bazy mikroėlektroniki
By: E.I. Givargizov ; s predisloviem E.P. Velikhova.
Series: Problemy nauki i tekhnicheskogo progressa
Publisher: "Nauka," Glav. red. fiziko-matematicheskoĭ lit-ry; "Nauka," Glav. red. fiziko-matematicheskoĭ lit-ry
Published: 1988
Place of publication: Moskva
Language: rus
Number of pages: 175