Crystalline defects and contamination
Subtitle: their impact and control in device manufacturing IV, DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
By: editors Bernd O. Kolbesen ... [et al.].
Contributors: Kolbesen, Bernd O.; Electrochemical Society. Electronics and Photonics Division.; European Solid State Device Research Conference (35th : 2005 : Grenoble, France)
Series: Proceedings / The Electrochemical Society -- 2005-10; Proceedings (Electrochemical Society) -- 2005-10.
Publisher: Electrochemical Society
Published: 2005
Place of publication: Pennington, NJ
Language: eng
Number of pages: 190
ISBN-13: 9781566774284
Subjects: Crystals -- Defects -- Congresses.; Integrated circuits -- Design and construction -- Congresses.
Genres: Congresses.
Other titles: Proceedings of the Satellite Symposium to ESSDERC 2005; Electrochemical Society proceedings volume 2005-10
Notes: DECON 2005 was held in Genoble, France in conjunction with ESSDERC 2005, the 35th European Solid State Device Research Conference, held September 12-16, 2005.

"Sponsoring Division: Electronics and Photonics."

Includes bibliographical references and indexes.