Rapid thermal processing and beyond
Subtitle: applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany
By: edited by W. Lerch and J. Niess.
Contributors: Lerch, W.; Niess, J.
Series: Materials science forum -- v. 573-574
Publisher: Trans-Tech Publications
Published: 2008
Place of publication: Stafa-Zurich, Switzerland; United Kingdom; Enfield, NH
Language: eng
Number of pages: 432
ISBN-13: 9780878493913
Subjects: Semiconductors -- Thermal properties; Rapid thermal processing
Notes: Includes bibliographical references and indexes.