Proceedings
Subtitle: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, Fort Lauderdale, Florida, February 7-10, 1993
By: sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.
Contributors: IEEE Robotics and Automation Society.
Publisher: IEEE
Published: 1993
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 294
Subjects: Electromechanical devices -- Congresses.; Miniature objects -- Congresses.; Microelectronics -- Congresses.; Robotics -- Congresses.
Other titles: 1993 IEEE Micro Electro Mechanical Systems.; MEMS '93.; IEEE Micro Electro Mechanical Systems.; Micro Electro Mechanical Systems.
Notes: IEEE catalog number 93CH3265-6.

On cover and spine: 1993 IEEE Micro Electro Mechanical Systems.

Includes bibliographical references.