Plasma-Aided Nanofabrication
Subtitle: From Plasma Sources to Nanoassembly
Publisher: Wiley-VCH
Published: September 17, 2007
Language: eng
Format: Hardcover
Number of pages: 315
ISBN-13: 9783527406333
Subjects: Nanotechnology; Plasma physics; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - Microelectronics; Technology / Electronics / Microelectronics