LSI process development
By: by D. W. Clements.
Contributors: Bendix Corporation. Kansas City Division. Communications Services.; United States. Dept. of Energy.
Series: BDX ; 613-2138 (Rev.); BDX -- 613-2138 (rev.)
Publisher: Dept. of Energy; for sale by the National Technical Information Service]
Published: 1979
Place of publication: [Washington; Springfield, Va
Language: eng
Number of pages: 25
Subjects: Integrated circuits.; Manufacturing processes.
Notes: Prepared for the U.S. Dept. of Energy under contract no. DE-AC04-76-DP00613.

"Communications Services, Bendix, Kansas City Division."

Final report, June 1979.