Tekhnologii͡a obrabotki poverkhnosteĭ v mikroėlektronike
By: I͡U.G. Poltavt͡sev, A.S. Kni͡azev.
Contributors: Kni͡azev, A. S.
Publisher: Tėkhnyka
Published: 1990
Place of publication: Kiev
Language: rus
Number of pages: 205
Subjects: Integrated circuits -- Design and construction.; Semiconductors.; Surfaces (Technology)
Notes: Includes bibliographical references (p. 197-[204]).
"Proizvodstvennoe izdanie"--Colophon.