Maskentechnik für Mikroelektronik-Bausteine
Subtitle: Tagung München, 15. November 1984
By: VDI/VDE-Gesellschaft Feinwerktechnik.
Contributors: VDI/VDE-Gesellschaft Feinwerktechnik.
Series: VDI-Berichte,; 555
Publisher: VDI
Published: 1985
Place of publication: Düsseldorf
Language: ger
Number of pages: 141
Subjects: Integrated circuits -- Masks -- Congresses.
Notes: Includes bibliographies.