Materials modification by energetic atoms and ions
Subtitle: Symposium held April 28-30, 1992, San Francisco, California, USA
By: editors, Kenneth S. Grabowski ... [et al.].
Contributors: Grabowski, Kenneth S.
Series: Materials Research Society symposium proceedings ;; v. 268; Materials Research Society symposia proceedings ;; v. 268.
Publisher: Materials Research Society
Published: 1992
Place of publication: Pittsburgh, PA
Language: eng
Number of pages: 405
Subjects: Semiconductors -- Etching -- Congresses.; Plasma etching -- Congresses.; Ion bombardment -- Congresses.; Thin films -- Congresses.
Notes: Includes bibliographical references and index.