Electron Beam Testing Technology
By: edited by John T.L. Thong
Series: Microdevices, Physics and Fabrication Technologies; Microdevices, Physics and Fabrication Technologies
Publisher: Springer US; Imprint; Springer
Published: 1993
Place of publication: Boston, MA
Language: eng
Format: [electronic resource] /
Number of pages: 462
ISBN-13: 9781489915221; 9781489915245
Subjects: Computer engineering; Condensed Matter Physics; Spectroscopy and Microscopy; Optical and Electronic Materials; Optical materials; Solid State Physics; Electrical Engineering; Crystallography; Physics
Description: This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.
Table of contents: title: Background to Electron Beam Testing Technology; title: I; title: 1. Introduction; title: 2. Principles and Applications; title: II; title: 3. Essential Electron Optics; title: 4. Electron Beam Interaction with Specimen; title: 5. Electron Spectrometers and Voltage Measurements; title: 6. High-Speed Techniques; title: 7. Picosecond Photoemission Probing; title: 8. Signal and Image Processing; title: III; title: 9. System Integration; title: 10. Practical Considerations in Electron Beam Testing; title: 11. Industrial Case Studies.