Gate dielectrics and MOS ULSIs
Subtitle: principles, technologies, and applications
By: Takashi Hori.
Series: Springer series in electronics and photonics,; v. 34
Publisher: Springer
Published: 1997
Place of publication: Berlin; New York
Language: eng
Number of pages: 352
Subjects: Integrated circuits -- Ultra large scale integration.; Dielectric devices.; Metal oxide semiconductors.; Silicon-on-insulator technology.
Notes: Includes bibliographical references (p. 325-341) and index.