Tekhnologicheskoe oborudovanie mikroėlektroniki
Subtitle: sbornik nauchnykh trudov
By: pod redakt͡s︡ieĭ V.M. Redina.
Contributors: Redin, V. M.; Moskovskiĭ institut ėlektronnoĭ tekhniki (Moscow, Russia)
Publisher: Moskovskiĭ in-t ėlektronnoĭ tekhniki
Published: 1993
Place of publication: Moskva
Language: rus
Number of pages: 68
Subjects: Integrated circuits -- Design and construction.
Notes: Includes bibliographical references.
At head of title: Ministerstvo nauki, vyssheĭ shkoly i tekhnicheskoĭ politiki RF. Komitet po vyssheĭ shkole. Moskovskiĭ institut ėlektronnoĭ tekhniki.