Nanoscience
Subtitle: Nanotechnologies and Nanophysics
Contributors: Claire Dupas (Editor); Philippe Houdy (Editor); Marcel Lahmani (Editor)
Edition: 1 edition
Publisher: Springer
Published: October 9, 2006
Language: eng
Format: Hardcover
Number of pages: 823
ISBN-13: 9783540286165
Subjects: Nanotechnology; Science/Mathematics; Science; Technology & Industrial Arts; Material Science; Physics; Courses; Master; Nanosciences; Nanotechnologies; Technology / Material Science; Nanoscience; Nanostructures
First sentence: Lithography is the process of printing patterns onto a thin film called a resist, using a localised interaction between tins layer and an engraving micro-tool or particle beam.