Laser diagnostics and photochemical processing for semiconductor devices
Subtitle: symposium held November 1982 in Boston, Massachusetts, U.S.A.
By: editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.
Contributors: Osgood, R. M.; Brueck, S. R. J.; Schlossberg, H. R.; United States. Air Force. Office of Scientific Research.
Series: Materials Research Society symposia proceedings ;; v. 17
Publisher: North-Holland
Published: 1983
Place of publication: New York
Language: eng
Number of pages: 298
Subjects: Lasers -- Industrial applications -- Congresses.; Semiconductors -- Congresses.
Notes: Includes bibliographical references and indexes.
"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.