Rapid Thermal and Integrated Processing VI
Subtitle: Symposium Held April 1-4, 1997, San Francisco, California, U.S.A. (Materials Research Society Syposium Proceedings, Vol 470)
Contributors: Thomas J. Riley (Editor); Jeffrey C. Gelpey (Editor); Fred Roozeboom (Editor); S. Saito (Editor)
Publisher: Materials Research Society
Published: March 1999
Language: eng
Format: Hardcover
Number of pages: 435
ISBN-13: 9781558993747
Subjects: Material Science; Reference; Technology; Technology & Industrial Arts; Science/Mathematics