Microelectromechanical structures for materials research
Subtitle: symposium held April 15-16, 1998 , San Francisco, California, U.S.A.
By: editors, Stuart Brown ... [et al.].
Contributors: Brown, Stuart B.
Series: Materials Research Society symposium proceedings ; v. 518; Materials Research Society symposia proceedings ;; v. 518.
Publisher: Materials Research Society
Published: 1998
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 248
Subjects: Materials -- Research -- Equipment and supplies -- Congresses.; Microelectromechanical systems -- Congresses.
Notes: Includes bibliographical references and index.