High vacuum production in the microelectronics industry
By: Pierre Duval.
Contributors: Alcatel Vacuum Technology (Firm)
Series: Plasma technology ;; 2
Publisher: Elsevier
Published: 1988
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 222
Subjects: Vapor-plating.; Vacuum microelectronics.
Notes: Bibliography: p. 163-167.
"ALCATEL."
Includes index.