Papers from the 39th International Symposiumon Electron, Ion and Photon Beam Technology and Nanofabrication, 30 May-2 June 1995, ... Scottsdale, Arizona
By: special editor ...: Dieter Kern.
Contributors: Kern, Dieter.
Series: Journal of vacuum science & technology B -- vol.13 (6)
Publisher: American Institute of Physics for the American Vacuum Society
Published: 1995
Place of publication: New York
Language: eng