Introduction to Microlithography
Subtitle: Theory, Materials, and Processing (Acs Symposium Series)
Publisher: Amer Chemical Society
Published: May 1983
Language: eng
Format: Hardcover
Number of pages: 363
ISBN-13: 9780841207752
Subjects: Congresses; Microlithography; Chemical Engineering (Specific Aspects); Photoresists; Plasma etching; Semiconductors