Microcrystalline silicon thin films deposited by VHF plasmas for solar cell applications
By: by Roger Sylvain Flückiger.
Edition: 1. Aufl.
Publisher: Hartung-Gorre Verlag
Published: 1995
Place of publication: Konstanz
Language: eng
Number of pages: 96
Subjects: Thin films.; Plasma-enhanced chemical vapor deposition.; Silane.; Solar cells -- Materials.
Notes: Includes bibliographical references (p. 92-96).
Thesis (Ph. D.)--Université de Neuchâtel, 1995.