Materials aspects in microsystem technologies
Subtitle: proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998
By: edited by D. Barbier ... [et al.].
Contributors: Barbier, D.; European Materials Research Society. Meeting
Series: European Materials Research Society symposia proceedings ;; v 83
Publisher: Elsevier
Published: 1999
Place of publication: Amsterdam; Oxford
Language: eng
Number of pages: 257
Subjects: Microelectronics -- Congresses.; Detectors -- Congresses.; Microactuators -- Congresses.; Microelectromechanical systems -- Congresses.
Genres: Congresses.
Other titles: Sensors and actuators.
Notes: Includes bibliographical references and index.
Reprinted from: Sensors and actuators, v. 74, no. 1-3, 1999.