Silicon Processing for the VLSI Era, Vol. 1
Subtitle: Process Technology
Edition: 2nd edition
Publisher: Lattice Press
Published: November 1, 1999
Language: eng
Format: Hardcover
Number of pages: 960
ISBN-13: 9780961672164
Subjects: Technology & Industrial Arts; Semiconductors; Etching; Science/Mathematics; Very large scale integration; Silicon; Electronics - General; Engineering - Electrical & Electronic; Integrated circuits