Influence of substrate reactivity on chemical vapour deposition processes
By: by Mats Boman
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 56
Publisher: Uppsala University; Distributor, Almqvist and Wiksell International
Published: 1986
Place of publication: Uppsala; Stockholm, Sweden
Language: eng
Number of pages: 27
Subjects: Vapor-plating; Surfaces (Technology)
Notes: Thesis (doctoral)--Uppsala University, 1986.

Includes bibliographical references (p. 26-27)