Design, process integration, and characterization for microelectronics
Subtitle: 6-7 March 2002, Santa Clara, USA
By: Alexander Starikov, Kenneth W. Tobin, Jr., chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Starikov, Alexander, 1952-; Tobin, Kenneth W.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,; v. 4692; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4692.
Publisher: SPIE
Published: 2002
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 628
Subjects: Integrated circuits -- Design and construction -- Congresses.; Integrated circuits -- Defects -- Analysis -- Congresses.; Semiconductors -- Characterization -- Congresses.; Semiconductor wafers -- Defects -- Analysis -- Congresses.; Microelectronics industry -- Quality control -- Congresses.; Quality control -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.