Miniaturized systems with micro-optics and micromechanics III
Subtitle: 26-27 January 1998, San Jose, California
By: M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Motamedi, M. Edward.; Göring, Rolf.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3276; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3276.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 282
Subjects: Integrated optics -- Congresses.; Miniature electronic equipment -- Congresses.; Micromechanics -- Congresses.; Optical scanners -- Congresses.; Microelectromechanical systems -- Congresses.
Notes: Includes bibliographical references and index.