Comprehensive microsystems
By: editor-in-chiefs, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe.
Contributors: Gianchandani, Yogesh B.; Tabata, Osamu.; Zappe, Hans P.
Publisher: Elsevier; Elsevier Science
Published: 2008
Place of publication: Amsterdam; Boston
Language: eng
Number of pages: 2100
ISBN-13: 9780444521941
Subjects: Microelectromechanical systems
Notes: Includes bibliographical references and index.
Table of contents: title: v. 1. Materials.  Fabrication and packaging.  Electronics and system design; title: v. 2. Actuation mechanism.  Physical sensing.  Chemical and biological systems; title: v. 3. Optical systems.  Industrial applications.  Emerging topics.