Strömungstechnische Auslegung reinraumtauglicher Fertigungseinrichtungen
By: Elmar Degenhart.
Series: IPA-IAO Forschung und Praxis ;; Bd. 165
Publisher: Springer-Verlag
Published: 1992
Place of publication: Berlin; New York
Language: ger
Number of pages: 137
Subjects: Clean rooms.
Notes: Includes bibliographical references (p. [127]-137).