Defekty struktury v ionno-implantirovannom kremnii
By: F.F. Komarov ... [et al.].
Contributors: Komarov, F. F. 1945-
Publisher: "Universitetskoe"
Published: 1990
Place of publication: Minsk
Language: rus
Number of pages: 318
Subjects: Silicon crystals -- Defects.; Semiconductorts -- Defects.; Ion implantation.
Notes: Summary in English.
Includes bibliographical references (p. [293]-318).