Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
By: editors, Richard E. Novak, Jerzy Ruzyllo ; assistant editors, A. Bowling ... [et al.].
Contributors: Novak, Richard E.; Rużyłło, Jerzy.; Electrochemical Society. Electronics Division.
Series: Proceedings ;; v. 95-20; Proceedings (Electrochemical Society) ;; v. 95-20.
Publisher: Electrochemical Society
Published: 1996
Place of publication: Pennington, NJ
Language: eng
Number of pages: 626
Subjects: Semiconductor wafers -- Cleaning -- Congresses.
Other titles: Cleaning technology in semiconductor device manufacturing IV
Notes: Includes bibliographical references and indexes.
"Electronics Division."