Microrobotics and microassembly
Subtitle: 21-22 September, 1999, Boston, Massachusetts
By: Bradley J. Nelson, Jean-Marc Breguet, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Nelson, Bradley J.; Breguet, Jean-Marc.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3834; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3834.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 222
Subjects: Robotics -- Congresses.; Microelectromechanical systems -- Congresses.; Microfabrication -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.