Plasma Etching: An Introduction (Plasma : Materials Interactions)
Contributors: Dennis M. Manos (Editor); Daniel L. Flamm (Editor)
Publisher: Academic Press
Published: July 28, 1989
Language: eng
Number of pages: 476
ISBN-13: 9780124693708
First sentence: The rapid development of plasma etching technology was stimulated by its application to the manufacture of microelectronic devices.