Shape and Functional Elements of the Bulk Silicon Microtechnique
Subtitle: A Manual of Wet-Etched Silicon Structures
Edition: 1 edition
Publisher: Springer
Published: November 23, 2004
Language: eng
Format: Hardcover
Number of pages: 221
ISBN-13: 9783540221098
Subjects: Materials science; Technology & Industrial Arts; Optics; Technology; Science/Mathematics; Engineering - Chemical & Biochemical; Material Science; Technology / Optics; Engineering - General
First sentence: The manual is written for producers of sensors and microtechnical components but also for producers of components of precision engineering and optical applications.