Ion Implantation in Semiconductors
Subtitle: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany
Publisher: Springer London, Limited
Published: 2012
Language: eng
Number of pages: 508
ISBN-13: 9783642806605