Microelectronic device and multilevel interconnection technology II
Subtitle: 16-17 October, 1996, Austin, Texas
By: Ih-chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].
Contributors: Chen, Ih-Chin.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2875; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2875.
Publisher: SPIE
Published: 1996
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 392
Subjects: Microelectronics -- Congresses.
Notes: Includes bibliographic references and author index.