Micro Process Engineering
Subtitle: Fundamentals, Devices, Fabrication, and Applications (Advanced Micro and Nanosystems)
Contributors: Norbert Kockmann (Editor); Oliver Brand (Series Editor); Gary K. Fedder (Series Editor); Christofer Hierold (Series Editor); Jan G. Korvink (Series Editor); Osamu Tabata (Series Editor)
Publisher: Wiley-VCH
Published: April 17, 2006
Language: eng
Format: Hardcover
Number of pages: 529
ISBN-13: 9783527312467
Subjects: Computer architecture & logic design; Microprocessors; Personal computers; Science/Mathematics; Technology; Technology & Industrial Arts; Technology / Engineering / Chemical & Biochemical; Engineering - Chemical & Biochemical; Microtechnology; Production engineering