Fabrication of SOI micromechanical devices
By: Jyrki Kiihamäki.
Contributors: Valtion teknillinen tutkimuskeskus.
Series: VTT publications -- 559.; VTT julkaisuja -- 559.
Publisher: VTT Technical Research Centre of Finland
Published: 2005
Place of publication: [Espoo, Finland]
Language: eng
Subjects: Silicon-on-insulator technology.; Microelectromechanical systems -- Design and construction.
Notes: Thesis (doctoral)--Helsinki University of Technology, 2005.

Includes bibliographical references.

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