Radio-frequency capacitive discharges
By: Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko.
Contributors: Shneider, Mikhail N.; Yatsenko, Nikolai A.
Publisher: CRC Press
Published: 1995
Place of publication: Boca Raton
Language: eng
Number of pages: 292
Subjects: Radio frequency discharges.; Electric discharges through gases.; Carbon dioxide lasers.; Plasma diagnostics.
Notes: Includes bibliographical references (p. 271-289) and index.
Translation from Russian.