Spectroscopic characterization techniques for semiconductor technology II
Subtitle: January 21-22, 1985, Los Angeles, California
By: Fred H. Pollak, chairman/editor.
Contributors: Pollak, Fred H.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 524
Publisher: SPIE--the International Society for Optical Engineering
Published: 1985
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 169
Subjects: Semiconductors -- Testing -- Congresses.; Spectrum analysis -- Congresses.
Notes: Includes bibliographies and index.