The Physics and Fabrication of Microstructures and Microdevices
Subtitle: Proceedings of the Winter School Les Houches, France, March 25-April 5, 1986
By: edited by Michael J. Kelly, Claude Weisbuch
Contributors: Weisbuch, Claude
Series: Springer Proceedings in Physics, 0930-8989 -- 13; Springer proceedings in physics -- 13.
Publisher: Springer Berlin Heidelberg
Published: 1986
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] :
ISBN-13: 9783642714467