RF Mems & Their Applications
Contributors: K. J. Vinoy (Editor)
Publisher: Wiley
Published: December 2002
Language: eng
Number of pages: 350
ISBN-13: 9780470843086
First sentence: During the past decade, several new fabrication techniques have evolved which helped popularize microelectromechanical systems (MEMS), and numerous novel devices have been reported in diverse areas of engineering and science.