Laser microfabrication
Subtitle: thin film processes and lithography
By: edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.
Contributors: Ehrlich, Daniel J.; Tsao, Jeffrey Y.
Publisher: Academic Press
Published: 1989
Place of publication: Boston
Language: eng
Number of pages: 587
Subjects: Lasers -- Industrial applications.; Thin film devices -- Design and construction.; Microlithography.; Microfabrication.
Notes: Includes bibliographies and index.