Microelectronic processing laboratory at NBS
By: T. F. Leedy, Y. M. Liu.
Contributors: Liu, Y. M. joint author.
Series: Semiconductor measurement technology; National Bureau of Standards special publication ; 400-53; NBS special publication ;; 400-53.
Publisher: .U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1978
Place of publication: Washington
Language: eng
Number of pages: 28
Subjects: Semiconductors -- Testing.; Transistors.; Electronics laboratories.; Microelectronics.