Nanoparticle Engineering for Chemical-Mechanical Planarization
Subtitle: Fabrication of Next-Generation Nanodevices
Contributors: Park, Jea-Gun
Publisher: Taylor & Francis
Published: 20090220
ISBN-13: 9781420059137
Subjects: Nanotechnology
Description: Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. This comprehensive text also presents design techniques using polymeric additives to improve CMP performance.
Notes: Open Access Unrestricted online access

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