Photoacoustic infrared spectroscopy of thin polyimide layers on glass substrates
By: Brian Dickens ; sponsored by the NIST Office of Microelectronics Programs
Contributors: National Institute of Standards and Technology (U.S.)
Series: NISTIR -- 6097
Publisher: U.S. Department of Commerce, Technology Administration, National Institute of Standards and Technology
Published: 1997
Place of publication: [Gaithersburg, MD]
Language: eng
Format: Microform
Number of pages: 30
Subjects: Polyimides -- Spectra; Optoacoustic spectroscopy; Infrared spectroscopy
Notes: Shipping list no.: 98-0577-M

"December 1997."

Includes bibliographical references (p. 19-20)

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1998] 1 microfiche : negative

s 1998 dcu n b