Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III
By: editor, Dennis N. Schmidt ... [et al.].
Contributors: Schmidt, Dennis N.; Electrochemical Society. Electronics Division.
Series: Proceedings ;; v. 94-9; Proceedings (Electrochemical Society) ;; v. 94-9.
Publisher: Electrochemical Society
Published: 1994
Place of publication: Pennington, NJ
Language: eng
Number of pages: 433
Subjects: Semiconductors -- Design and construction -- Congresses.; Semiconductors -- Defects -- Congresses.
Other titles: Contamination control and defect reduction in semiconductor manufacturing III.
Notes: Includes bibliographical references and indexes.
Spine title: Contamination control and defect reduction in semiconductor manufacturing III.
"Electronics Divisions [sic]."