Science and technology of semiconductor surface preparation
Subtitle: symposium held April 1-3, 1997, San Francisco, California, U.S.A.
By: editors, Gregg S. Higashi ... [et al.].
Contributors: Higashi, Gregg S.
Series: Materials Research Society symposium proceedings,; v. 477; Materials Research Society symposia proceedings ;; v. 477.
Publisher: Materials Research Society
Published: 1997
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 545
Subjects: Semiconductors -- Surfaces -- Congresses.; Surface preparation -- Congresses.; Semiconductors -- Cleaning -- Congresses.; Surface chemistry -- Congresses.
Notes: Includes bibliographical references and indexes.