Microelectronic devices based on ultra-shallow junctions and silicon-on-insulator materials
By: by Anders Soderbarg
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 352
Publisher: Uppsala University; Distributor, Almqvist & Wiksell International
Published: 1991
Place of publication: Uppsala; Stockholm, Sweden
Language: eng
Number of pages: 42
Subjects: Metal semiconductor field-effect transistors; Silicon-on-insulator technology; Semiconductors; Junctions; Microelectronics
Notes: Thesis (doctoral)--Uppsala University, 1991.

Includes bibliographical references (p. 37-42)