16th European Conference EMC on Mask Technology for Integrated Circuits and Microcomponents '99
By: conference chairperson: Uwe F.W. Behringer ; organizer: VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) in cooperation with Semiconductor Equipment and Materials International, Europe (SEMI-Europe), SPIE ... [et al.].
Contributors: Behringer, Uwe.; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.
Series: GMM-Fachbericht -- 30
Publisher: VDE Verlag
Published: 1999
Place of publication: Berlin
Language: eng
Number of pages: 227
Subjects: Integrated circuits -- Masks -- Congresses.; Microlithography -- Congresses.
Genres: Congresses.
Notes: "Lectures held at the GMM-Conference November 15-16, 1999 in Munich, Germany.

Includes bibliographical references.