MEMS/MOEMS technologies and applications II
Subtitle: 10-12 November,  2004, Beijing, China
By: Zhichun Ma, Guofan Jin, Xuyuan Chen, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.] ; published by, SPIE--the International Society for Optical Engineering.
Publisher: SPIE
Published: 2005
Place of publication: Bellingham, WA
Language: eng
Number of pages: 364