Semiconductor device processing
Subtitle: technology trends in the VLSI era
By: Robert N. Castellano.
Publisher: Gordon and Breach Science Publishers
Published: 1993
Place of publication: Philadelphia, Pa., U.S.A
Language: eng
Number of pages: 234
Subjects: Semiconductors -- Design and construction.; Integrated circuits -- Very large scale integration -- Design and construction.
Notes: Includes bibliographical references and index.