Reactive Sputter Deposition
By: edited by Diederik Depla, Stijn Mahieu
Contributors: Mahieu, S. (Stijn); SpringerLink (Online service)
Series: Springer Series in Materials Science -- 109
Publisher: Springer-Verlag Berlin Heidelberg
Published: 2008
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] /
ISBN-13: 9783540766629; 9783540766643
Subjects: Physical organic chemistry; Surfaces (Physics); Chemical engineering; Condensed matter