MEMS and Microsystems
Subtitle: Design and Manufacture
Edition: 1 edition
Publisher: McGraw-Hill Science/Engineering/Math
Published: November 9, 2001
Language: eng
Format: Hardcover
Number of pages: 448
ISBN-13: 9780072393910
Subjects: Electronics engineering; Mechanical engineering; Microelectronics; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - General; Engineering - Electrical & Electronic; Engineering - Mechanical; Technology / Robotics; Electronics - Microelectronics; Microelectromechanical systems; Microelectronic packaging