Particle control for semiconductor manufacturing
By: [edited by] R.P. Donovan.
Contributors: Donovan, R. P.
Publisher: M. Dekker
Published: 1990
Place of publication: New York
Language: eng
Number of pages: 464
Subjects: Semiconductors -- Design and construction.; Semiconductors -- Defects.; Particles.
Notes: Includes bibliographical references.
Updated revision of the course notes distributed at a short course held on Apr. 19-21, 1988, in Research Triangle Park, N.C.