In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II
Subtitle: 23-24 September, 1998, Santa Clara, California
By: Sergio Ajuria, Tim Z. Hossain, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.].
Contributors: Ajuria, Sergio.; Hossain, Tim Z.; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
Series: SPIE proceedings series ;; v. 3509; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3509.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 244
Subjects: Integrated circuits -- Design and construction -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Optical pattern recognition -- Congresses.; Manufacturing processes -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.