Electrostatic charge in cleanrooms and other controlled environments
By: IES, Contamination Control Division.
Contributors: Institute of Environmental Sciences. Contamination Control Division.
Series: IES recommended practice ;; IES-RP-CC022.1
Publisher: Institute of Environmental Sciences
Published: 1992
Place of publication: Mount Prospect, Ill
Language: eng
Number of pages: 29
Subjects: Clean rooms.; Electrostatics.
Notes: Includes bibliographical references (p. 26-28).
Cover title.
"Recommended practice 022.1."