Electron optical systems for microscopy, microanalysis & microlithography
Subtitle: proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD
By: edited by John J. Hren ... [et al.] ; managing editor, Sudha A. Bhatt.
Contributors: Hren, John J.; Bhatt, Sudha A.
Publisher: Scanning Electron Microscopy
Published: 1984
Place of publication: AMF O'Hare [Chicago], IL. U.S.A
Language: eng
Number of pages: 272
Subjects: Electron optics -- Congresses; Electron microscopy -- Congresses; Microchemistry -- Congresses; Microlithography -- Congresses; Magnetic lenses -- Congresses
Notes: Includes bibliographies and indexes.