Laser assisted aluminum deposition for microelectronics applications
By: Theodore Cacouris
Published: 1991
Language: eng
Number of pages: 130
Notes: "91-27,830."

Thesis (Ph. D.)--Columbia University, 1990.

Includes bibliographical references.

Microfilm. Ann Arbor, Mich. : University Microfilms International, 1991. 1 microfilm reel ; 35 mm.