Maskentechnik für Mikroelektronik-Bausteine
Subtitle: Tagung München, 9. November 1988
By: VDI/VDE-Gesellschaft Feinwerktechnik.
Contributors: VDI/VDE-Gesellschaft Feinwerktechnik.
Series: VDI Berichte,; 720; VDI-Berichte ;; 720.
Publisher: VDI Verlag
Published: 1988
Place of publication: Düsseldorf
Language: ger
Number of pages: 134
Subjects: Integrated circuits -- Masks -- Congresses.
Notes: Includes bibliographical references.