Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
By: D.J. Larkin.
Contributors: United States. National Aeronautics and Space Administration.
Series: NASA-TM -- 112474.; NASA technical memorandum -- 112474.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1995
Place of publication: [Washington, DC; Springfield, Va
Language: eng
Format: Microform
Subjects: Silicon.; Vapor deposition.; Epitaxy.; Additives.; Nitrogen.
Other titles: Site competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers.
Notes: Shipping list no.: 99-0055-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.