MOEMS display and imaging systems III
Subtitle: 24-25 January 2005, San Jose, California, USA
By: Hakan Urey, David L. Dickensheets, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA).
Contributors: Urey, Hakan, 1970-; Dickensheets, David L.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: Proceedings of SPIE,; v. 5721; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5721.
Publisher: SPIE
Published: 2005
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 214
Subjects: Microelectromechanical systems -- Congresses.; Imaging systems -- Design and construction -- Congresses.; Scanning systems -- Design and construction -- Congresses.; Optics, Adaptive -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.