The deposition and characterisation of atmospheric pressure chemical vapour deposited silicate glass films
Subtitle: a dissertation in partial fulfilment of the requirement for the degree of Master of Science of the Council for National Academic Awards.
Contributors: Middlesex Polytechnic. Microelectronics Centre.
Publisher: Middlesex Polytechnic
Published: 1988
Place of publication: London
Language: eng
Number of pages: 105
Notes: Research conducted under the auspices of the Microelectronics Centre at Middlesex Polytechnic.