Prakticheskai͡a korrekt͡sii͡a ėffekta blizosti v ėlektronnoĭ litografii
By: V.V. Aristov, S.I. Zaĭt͡sev, A.A. Svint͡sov
Contributors: Zaĭt͡sev, Sergeĭ (Sergeĭ Ivanovich); Svint͡sov, A. A.; Institut problem tekhnologii mikroėlektroniki i osobochistykh materialov (Akademii͡a nauk SSSR)
Publisher: Akademii͡a nauk SSSR, In-t problem tekhnologii mikroėlektroniki i osobochistykh materialov
Published: 1989
Place of publication: Chernogolovka
Language: rus
Number of pages: 46
Notes: Title from cover.

"Preprint."

Includes bibliographical references (p. 45-46)