Micromachining and microfabrication
Subtitle: 28-30 November 2000, Singapore
By: Kevin Chau, Ash M. Parameswaran, Francis E.H. Tay, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.].
Contributors: Chau, Kevin.; Parameswaran, Ash M.; Tay, Francis E. H.; Society of Photo-optical Instrumentation Engineers.; Nanyang Technological University.; Institute of Physics, Singapore.
Series: SPIE proceedings series.; v. 4230; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4230.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 248
Subjects: Micromachining -- Congresses.; Microfabrication -- Congresses.; Microelectromechanical systems -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.