Chemical perspectives of microelectronic materials III
Subtitle: symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.
By: editors, C.R. Abernathy ... [et al.].
Contributors: Abernathy, C. R.
Series: Materials Research Society symposium proceedings ;; v. 282; Materials Research Society symposia proceedings ;; v. 282.
Publisher: Materials Research Society
Published: 1993
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 727
Subjects: Microelectronics -- Materials -- Congresses.; Semiconductors -- Congresses.; Surface chemistry -- Congresses.
Notes: Includes bibliographical references and indexes.