Acoustic wave and electromechanical resonators
Subtitle: concept to key applications
By: Humberto Campanella
Series: Integrated microsystems series; Artech House integrated microsystems series
Publisher: Artech House
Published: 2010
Place of publication: Norwood, MA
Language: eng
Format: [electronic resource] :
Number of pages: 345
ISBN-13: 9781607839781
Subjects: TECHNOLOGY & ENGINEERING; Engineering: Electrical; Electric resonators; Acoustic surface wave devices; Microelectronics; Engineering; Digital; Electronics
Other titles: Acoustic wave & electromechanical resonators
Description: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin.
Notes: Includes bibliographical references and index.

Description based on print version record.
Table of contents: title: 1. MEMs and NEMs resonator technologies; title: 2. Acoustic microresonator technologies; title: 3. Design and modeling of micro- and nanoresonators; title: 4. Fabrication techniques; title: 5. Characterization techniques; title: 6. Performance optimization; title: 7. Integration of resonator to CMOS technologies; title: 8. Sensor applications; title: 9. Radio frequency applications; title: 10. Case studies.