Reliability of MEMS
By: edited by Osamu Tabata and Toshiyuki Tsuchiya.
Contributors: Tsuchiya, Toshiyuki.; Tabata, Osamu, 1956-
Series: Advanced micro & nanosystems -- v.6
Publisher: Wiley-VCH
Published: 2008
Place of publication: Weinheim
Language: eng
Number of pages: 303
ISBN-13: 9783527314942
Subjects: Microelectromechanical systems -- Reliability
Notes: "Testing of materials and devices"--Cover.

Includes bibliographical references and index.