Micromechanical systems
Subtitle: presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Anaheim, California, November 8-13, 1992
By: sponsored by the Dynamic Systems and Control Division, the Heat Transfer Division, and the Advanced Energy Systems Division, ASME ; edited by D. Cho ... [et al.].
Contributors: Cho, D.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; American Society of Mechanical Engineers. Heat Transfer Division.; American Society of Mechanical Engineers. Advanced Energy Systems Division.; American Society of Mechanical Engineers. Winter Meeting
Series: DSC ;; vol. 40; DSC (Series) ;; v. 40.
Publisher: The Society
Published: 1992
Place of publication: New York
Language: eng
Number of pages: 372
Subjects: Microelectronics -- Congresses.; Microelectromechanical systems -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.; Electromechanical devices -- Congresses.
Notes: Includes bibliographical references and index.