Micro- and nanopatterning polymers
By: Hiroshi Ito, editor ... [et al.].
Contributors: Ito, Hiroshi.; American Chemical Society. Division of Polymeric Materials: Science and Engineering.; American Chemical Society. Meeting
Series: ACS symposium series,; 706
Publisher: American Chemical Society; Distributed by Oxford University Press
Published: 1998
Place of publication: Washington, DC; [New York]
Language: eng
Number of pages: 386
Subjects: Microelectronics -- Materials.; Polymeric composites.; Photoresists -- Materials.
Notes: Includes bibliographical references and indexes.
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 214th ACS National Meeting, Las Vegas, Nevada, September 7-11, 1997."