Advanced metallization for ULSI applications for 1994
Subtitle: proceedings of the conference held October 4-6, 1994 in Austin, Texas, U.S.A.
By: editors, Roc Blumenthal, Guido Janssen.
Contributors: Blumenthal, Roc.; Janssen, Guido.; University of California, Berkeley. Continuing Education in Engineering.; Advanced Metallization for ULSI Applications Conference (1994 : Austin, Tex.)
Series: Materials Research Society conference proceedings,
Publisher: Materials Research Society
Published: 1995
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 564
Subjects: Integrated circuits -- Ultra large scale integration -- Materials -- Congresses.; Vapor-plating -- Congresses.; Electrochemical metallizing -- Congresses.
Notes: "Papers presented at the Advanced Metallization for ULSI Application Conference"--Pref.
"Sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California U.S.A."