18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Subtitle: proceedings : 15-16 January, 2002, Munich, Germany
By: Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ... [et al. ; published by SPIE--The International Society for Optical Engineering].
Contributors: Behringer, Uwe F. W.; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 4764; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4764.
Publisher: SPIE
Published: 2002
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 256
Subjects: Integrated circuits -- Masks -- Congresses.; Microlithography -- Congresses.
Genres: Congresses.
Other titles: Mask technology for integrated circuits and microcomponents
Notes: Includes bibliographical references and index.