Record.
Contributors: Institute of Electrical and Electronics Engineers. Industrial Electronics and Control Instrumentation Group.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1969
Place of publication: [New York]
Language: eng
Number of pages: 55
Subjects: Integrated circuits -- Addresses, essays, lectures
Notes: Includes bibliographies.
On cover: Industrial electronics and control instrumentation for integrated circuit manufacturing.
"IEEE Catalog No. 13-C-65."
Papers presented at a special one-day symposium, sponsored by the Industrial Electronics and Control Instrumentation Group, June 5, 1967.