Micro-electro-mechanical systems--2005
Subtitle: presented at 2005 ASME International Mechanical Engineering Congress and Exposition : November 5-11, 2005, Orlando, Florida, USA
By: sponsored by the Micro-Electro-Mechanical Systems Division, ASME.
Contributors: American Society of Mechanical Engineers. Micro-Electro-Mechanical Systems Division.; International Mechanical Engineering Congress and Exposition (2005 : Orlando, Fla.)
Series: MEMS -- vol. 7; MEMS (Series) (American Society of Mechanical Engineers) -- v. 7.
Publisher: ASME
Published: 2005
Place of publication: New York, N.Y
Language: eng
Number of pages: 772
Subjects: Microelectromechanical systems -- Congresses.; Fluidic devices -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.