Handbook of Advanced Plasma Processing Techniques
Contributors: R.J. Shul (Editor); S.J. Pearton (Editor)
Edition: 1 edition
Publisher: Springer
Published: October 2000
Language: eng
Format: Hardcover
Number of pages: 653
ISBN-13: 9783540667728
Subjects: Plasma Physics; Science/Mathematics; Physics; Science; Technology & Industrial Arts; Plasma etching; Engineering - Mechanical; Material Science; Technology / Material Science; Electronic circuits; Design and construction; Integrated circuits; Plasma engineering
First sentence: Industrial applications of glow discharges have increased tremendously during the last third of the 20th century.