Proceedings of the 10th International Autumn Meeting Gettering and defect engineering in semiconductor technology
Subtitle: GADEST 2003, Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003
By: edited by H. Richter and M. Kittler.
Contributors: Richter, H., 1940-; Kittler, M.
Series: Diffusion and defect data. Pt. B, Solid state phenomena ;; v. 95/96; Diffusion and defect data.; v. 95/96
Publisher: SciTech Publications Ltd.; Trans Tech Pub. [distributor]; Scitec Publications, Ltd.
Published: 2004
Place of publication: Uetikon-Zürich, Switzerland; Enfield, N.H
Language: eng
Number of pages: 682
Subjects: Semiconductors -- Congresses; Getters -- Congresses; Silicon crystals -- Defects -- Congresses; Electric engineering -- Materials -- Congresses
Genres: Congresses.
Other titles: GADEST 2003; Gettering and defect engineering in semiconductor technology
Notes: Includes bibliographical references and index.