Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
By: edited by Vik J. Kapoor, Kevin T. Hankins ; [sponsored by the] Dielectrics and Insulation and Electronics Divisions.
Contributors: Kapoor, Vikram J.; Hankins, Kevin T.; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Electronics Division.
Series: Proceedings / Electrochemical Society ;; v. 87-10; Proceedings (Electrochemical Society) ;; v. 87-10.
Publisher: Electrochemical Society)
Published: 1987
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2696
Language: eng
Number of pages: 550
Subjects: Thin film devices -- Congresses.; Silicon nitride -- Congresses.; Silicon dioxide -- Congresses.; Electric insulators and insulation -- Thin films -- Congresses.
Other titles: Silicon nitride and silicon dioxide thin insulating films.
Notes: Includes bibliographies and indexes.
Spine title: Silicon nitride and silicon dioxide thin insulating films.