In Situ Real-Time Characterization of Thin Films
Contributors: Orlando Auciello (Editor); Alan R. Krauss (Editor)
Publisher: Wiley-Interscience
Published: November 20, 2000
Language: eng
Number of pages: 280
ISBN-13: 9780471241416
First sentence: As thin-film materials, device structures, and processing conditions become increasingly more complex, there is a growing need for in situ, real-time, surface-specific analytical tools to characterize phenomena occurring at interfaces between layered structures and at the surface of thin films during growth.