Proceedings of the Fifth International Symposium on Silicon-on-Insulator Technology and Devices
By: edited by Wayne E. Bailey ; assistant editors, Katsu Izumi ... [et al.] ; Electronics and Dielectrics and Insulation divisions.
Contributors: Bailey, Wayne E.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Series: Proceedings / The Electrochemical Society, Inc. ;; v. 92-13; Proceedings (Electrochemical Society) ;; v. 92-13.
Publisher: Electrochemical Society
Published: 1992
Place of publication: Pennington, NJ
Language: eng
Number of pages: 440
Subjects: Semiconductors -- Congresses.; Silicon-on-insulator technology -- Congresses.
Other titles: Silicon-on-insulator technology and devices.
Notes: Includes bibliographical references and indexes.
Spine title: Silicon-on-insulator technology and devices.