Materials Science of Microelectromechanical Systems (Mems)  Devices IV (Materials Research Society Symposia Proceedings, V. 687.)
Contributors: Arturo A. Ayon (Editor); Thomas E. Buchheit (Editor); Harold G. Kahn (Editor); S. M. Spearing (Editor)
Publisher: Materials Research Society
Published: June 2002
Language: eng
Format: Hardcover
Number of pages: 318
ISBN-13: 9781558996236
Subjects: Electronics - General; Technology & Industrial Arts; Congresses; Materials; Microelectromechanical systems