1988 IEEE SOS/SOI Technology Workshop, October 3-5, 1988, Sea Palms Resort, St. Simons Island, Georgia, proceedings
By: general chairman, Marie Burnham ...[et al.].
Contributors: Burnham, Marie.
Publisher: s.n.
Published: 1988
Place of publication: [United States
Language: eng
Number of pages: 82
Subjects: Silicon oxide films -- Congresses.; Semiconductor films -- Congresses.; Semiconductor wafers -- Congresses.
Notes: On spine: 88CH2698-9.

Includes bibliographical references.