Micromachining and microfabrication process technology VIII
Subtitle: 27-29 January, 2003, San Jose, California, USA
By: John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].
Contributors: Yasaitis, John.; Perez-Maher, Mary Ann.; Karam, Jean-Michel.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: SPIE proceedings series ;; v. 4979; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4979.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 604
Subjects: Micromachining -- Congresses.; Microfabrication -- Congresses.; Electromechanical devices -- Design and construction -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.