IEEE micro electro mechanical systems
Subtitle: an investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994
By: sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center.
Contributors: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; Micromachine Center (Japan); IEEE Workshop on Micro Electro Mechanical Systems (1994 : Ōiso-machi, Japan)
Publisher: Institute of Electrical and Electronics Engineers]
Published: 1994
Place of publication: [New York
Language: eng
Number of pages: 360
Subjects: Electromechanical devices -- Congresses.; Microelectronics -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.
Other titles: IEEE micro electro mechanical systems workshop.; Micro electro mechanical systems.
Notes: Includes bibliographical references and index.
"IEEE Workshop on Micro Electro Mechanical Systems"--P. iii.
"IEEE catalog number 94CH3404-1."
Title on spine: IEEE Micro Electro Mechanical Systems Workshop.