Gettering & Defect Engineering in Semiconductor Technology
Subtitle: Gadest '97 (Solid State Phenomena,)
Contributors: M. Kittler (Editor); H. Richter (Editor); C. Claeys (Editor)
Publisher: Scitec Publications
Published: January 1998
Language: eng
Format: Hardcover
Number of pages: 556
ISBN-13: 9783908450276
Subjects: Materials science; Semi-conductors & super-conductors; Electronics - Semiconductors; Technology & Industrial Arts