Deposition and growth
Subtitle: limits for microelectronics, Anaheim, CA, 1987
By: editor, G.W. Rubloff.
Contributors: Rubloff, G. W.; American Institute of Physics.
Series: American Vacuum Society series ;; 4; American Institute of Physics conference proceedings ;; no. 167; AIP conference proceedings ;; no. 167.
Publisher: American Institute of Physics
Published: 1988
Place of publication: New York
Language: eng
Number of pages: 388
Subjects: Thin films -- Congresses.; Microelectronics -- Materials -- Congresses.
Notes: Includes bibliographies and index.