2002 Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: Boston, Massachusetts, Usa, April 30-May 2, 2002
Contributors: SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Corporate Author)
Publisher: Ieee
Published: April 2002
Language: eng
Format: Paperback
Number of pages: 440
ISBN-13: 9780780371583
Subjects: Circuits & components; Precision instruments manufacture; Semi-conductors & super-conductors; Electronics - Semiconductors; Technology & Engineering; Science/Mathematics