Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psī] and derived thickness and refractive index of a silicon dioxide layer on silicon
By: G.A. Candela... [et al.].
Contributors: Candela, G. A.
Series: NIST special publication -- 260-109
Publisher: National Institute of Standards and Technology
Published: 1988
Place of publication: Washington, D.C
Language: eng