Nano- and Micro-Electromechanical Systems
Subtitle: Fundamentals of Nano- and Microengineering
Edition: 1 edition
Publisher: CRC
Published: September 28, 2000
Language: eng
Format: Hardcover
Number of pages: 352
ISBN-13: 9780849309168
Subjects: Technology; Science/Mathematics; Microelectronics; Specific Machine Technologies; Technology & Industrial Arts; Engineering - Electrical & Electronic; Nanotechnology; Electronic devices & materials; Technical design; Technology / Nanotechnology; Machinery; Electronics - Microelectronics; Microelectromechanical systems
First sentence: The development and deployment of NEMS and MEMS are critical to the U.S. economy and society because nano- and microtechnologies will lead to major breakthroughs in information technology and computers, medicine and health, manufacturing and transportation, power and energy systems, and avionics and national security.