Etching of III-V semiconductors
Subtitle: an electrochemical approach
By: P.H.L. Notten, J.E.A.M. van den Meerakker, J.J. Kelly.
Contributors: Meerakker, J. E. A. M. van den; Kelly, J. J.
Publisher: Elsevier Advanced Technology; Distributed in the USA and Canada by Elsevier Science Pub. Co.
Published: 1991
Place of publication: Oxford, UK; New York, NY, USA
Language: eng
Number of pages: 349
Subjects: Semiconductors -- Etching.; Electrochemistry.
Other titles: Etching of 3-5 semiconductors.
Notes: Includes bibliographical references and indexes.