Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing
Subtitle: symposium held April 27-29, 192, San Francisco, California, U.S.A.
By: editors, Robert J. Nemanich ... [et. al.].
Contributors: Nemanich, R.J.
Series: Materials Research Society symposium proceedings ;; v. 259; Materials Research Society symposia proceedings ;; v. 259.
Publisher: Materials Research Society
Published: 1992
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 529
Subjects: Semiconductors -- Congresses.; Crystal growth -- Congresses.; Surface preparation -- Congresses.
Notes: Includes bibliographical references and indexes.