Proceedings of the Second International Symposium on Process Physics and Modeling in Semiconductor Technology
By: edited by G.R. Srinivasan, J.D. Plummer, S.T. Pantelides.
Contributors: Srinivasan, G. R.; Plummer, J.; Pantelides, Sokrates T.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.
Series: Proceedings / Electrochemical Society ;; v. 91-4; Proceedings (Electrochemical Society) ;; v. 91-4.
Publisher: Electrochemical Society
Published: 1991
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 800
Subjects: Semiconductors -- Mathematical models -- Congresses.
Other titles: Process physics and modeling in semiconductor technology.
Notes: Includes bibliographical references and indexes.
Spine title: Process physics and modeling in semiconductor technology.
"Electronics and Dielectric Science and Technology Divisions."
Papers from a symposium held in Montreal, Quebec, May 1990.