Impurity diffusion and gettering in silicon
Subtitle: symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
By: editors, Richard B. Fair, Charles W. Pearce, Jack Washburn.
Contributors: Fair, Richard B.; Pearce, Charles W.; Washburn, Jack, 1921-; Materials Research Society. Meeting; Symposium on Impurity Diffusion and Gettering in Semiconductors (1984 : Boston, Mass.)
Series: Materials Research Society symposia proceedings,; v. 36
Publisher: Materials Research Society
Published: 1985
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 284
Subjects: Semiconductors -- Defects -- Congresses.; Diffusion -- Congresses.; Semiconductor doping -- Congresses.; Getters -- Congresses.
Notes: Includes bibliographies and indexes.
"Proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors ... held as Symposium C at the Materials Research Society Meeting, November 27-30, 1984 in Boston"--Acknowledgments.