Removal of oxygen from electronic materials by vapor-phase processes
By: Witold Palosz.
Contributors: United States. National Aeronautics and Space Administration.
Series: [NASA contractor report] -- NASA-CR-205248.; NASA contractor report -- NASA CR-205248.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1997
Place of publication: [Washington, DC; Springfield, Va
Language: eng
Format: Microform
Subjects: Partial pressure.; Thermochemistry.; Vapor phases.; Oxides.; Purification.
Notes: Shipping list no.: 98-0949-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.