Vlsi Electronics Microstructure Science Volume 6 
Subtitle: Materials and Process Characterization
Contributors: Graydon B. Larrabee (Editor)
Edition: 1st edition
Publisher: Academic Pr
Published: April 1983
Language: eng
Format: Hardcover
Number of pages: 601
ISBN-13: 9780122341069
Subjects: Circuits & components; Integrated Circuits; Very large scale integration