Papers presented at the European Materials Research Society 1998 Meeting.
By: guest editors: A. Slaoui ... [et al.].
Contributors: Slaoui, A.; European Materials Research Society. Meeting
Series: Materials science in semiconductor processing -- v. 1, no. 3/4.
Publisher: Pergamon
Published: 1999
Place of publication: Kidlington, Oxford, U.K
Language: eng
Number of pages: 350
Subjects: Rapid thermal processing -- Congresses.; Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses.; Semiconductor doping -- Congresses.
Genres: Congresses.
Notes: Held in Strasbourg, France.

Includes bibliographical references.