Plazmokhimicheskoe i ionno-khimicheskoe travlenie mikrostruktur
By: V.I͡U. Kireev, B.S. Danilin, V.I. Kuznet͡sov.
Contributors: Danilin, B. S.; Kuznet͡sov, V. I. 1915-
Series: Massovai͡a biblioteka inzhenera--Ėlektronika ;; vyp. 36; Massovai͡a biblioteka inzhenera "Ėlektronika" ;; 36.
Publisher: Radio i svi͡azʹ
Published: 1983
Place of publication: Moskva
Language: rus
Number of pages: 124
Subjects: Integrated circuits.; Semiconductors -- Etching.; Plasma etching.
Notes: Bibliography: p. 121-[125].