Science and Technology of Microfabrication
Subtitle: Symposium (Materials Research Society Symposia Proceedings, Vol 76)
Publisher: Materials Research Society
Published: April 1987
Language: eng
Format: Hardcover
Number of pages: 373
ISBN-13: 9780931837425
Subjects: Design and construction; Integrated circuits; Very-Large-Scale Integration (Vlsi); Congresses; Microfabrication; Very large scale integration