Beam injection assessment of defects in semiconductors
Subtitle: proceedings of the 5th International Workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98), held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998
By: editors, M. Kittler, O. Breitenstein, A. Endros, W. Schroter.
Contributors: Kittler, M.; Breitenstein, O.; Endrös, A.; Schröter, W.
Series: Solid state phenomena -- v. 63-64; Diffusion and defect data -- v. 63-64.
Publisher: Scitec; Distributed in the Americas by Trans Tech Publications, Inc.
Published: 1991
Place of publication: Uetikon-Zuerich, Switzerland; Enfield, N.H
Language: eng
Number of pages: 537
Subjects: Condensed matter -- Congresses; Electron beams -- Congresses
Genres: Congresses.
Other titles: B.I.A.D.S. 98
Notes: Includes bibliographical references and index.