Chemical-mechanical polishing 2001
Subtitle: advantages and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.
By: editors, Suryadevara V. Babu, Kenneth C. Cadien, Hiroyuki Yano.
Contributors: Babu, S. V.; Cadien, Kenneth Charles, 1951-; Yano, Hiroyuki.; Materials Research Society. Meeting
Series: Materials Research Society symposium proceedings ;; v. 671; Materials Research Society symposia proceedings ;; v. 671.
Publisher: Materials Research Society
Published: 2001
Place of publication: Warrendale, Pa
Language: eng
Subjects: Electrolytic polishing -- Congresses.; Grinding and polishing -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and indexes.
"This volume comprises most of the papers that were presented at Symposium M, 'Chemical-Mechanical Polishing 2001--Advances and Future Challenges,' held April 18-20 at the 2001 MRS Spring Meeting in San Francisco, California ..."--Pref.