Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII
Subtitle: 28 August, San Diego, California, United States
By: Michael T. Postek, Ndubuisi G. Orji, editors ; sponsored and published by SPIE
Contributors: Postek, Michael T., editor; Orji, Ndubuisi George, editor; SPIE (Society)
Series: Proceedings of SPIE -- volume 8819; SPIE optics + photonics
Publisher: SPIE
Published: 2013
Place of publication: Bellingham, Washington, USA
Language: eng
ISBN-13: 9780819496690
Subjects: Nanostructured materials; Microfabrication; Congresses; Nanotechnology
Other titles: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors 7; Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors seventh
Notes: "SPIE optics + photonics" --cover.

Includes bibliographical references and index.