AlGaAs growth by OMCVD using an excimer laser
By: Joseph D. Warner ... [et al.].
Contributors: Warner, Joseph D.; United States. National Aeronautics and Space Administration.
Series: NASA technical memorandum -- 88937.
Publisher: National Aeronautics and Space Administration; For sale by the National Technical Information Service
Published: 1987
Place of publication: [Washington, DC; Springfield, Va
Language: eng
Format: Microfiche
Subjects: Excimer lasers.; Solid state physics.
Notes: Distributed to depository libraries in microfiche.

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1987. 1 microfiche.