20th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Subtitle: 12-14 January 2004, Dresden, Germany
By: Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.].
Contributors: Behringer, Uwe F. W.; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.; Forschungszentrum Karlsruhe. Institute for Microstructure Technology.; SEMI-Europe.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,; v. 5504; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5504.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 210
Subjects: Integrated circuits -- Masks -- Congresses; Microlithography -- Congresses
Genres: Congresses.
Other titles: Twentieth European Conference on Mask Technology for Integrated Circuits and Microcomponents; European Conference on Mask Technology for Integrated Circuits and Microcomponents; Mask technology for integrated circuits and microcomponents
Notes: Includes bibliographical references and index.