Rapid Thermal Processing for Future Semiconductor Devices
Publisher: Elsevier Science
Published: April 2, 2003
Language: eng
Format: Paperback
Number of pages: 160
ISBN-13: 9780444513397
Subjects: Semi-conductors & super-conductors; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - Circuits - General; Physics; Science / Physics; Technology : Electronics - Circuits - General; Acoustics & Sound; Electronics - Semiconductors; Engineering - Electrical & Electronic; Congresses; Heat treatment; Rapid thermal processing; Semiconductors