Microstereolithography and other Fabrication Techniques for 3D MEMS
Publisher: Wiley
Published: March 14, 2001
Language: eng
Number of pages: 274
ISBN-13: 9780471521853
First sentence: Microelectromechanical systems (MEMS) refer to a collection of microseconds and actuators that can sense its environment and have the ability to react to changes in that environment with the use of a microcircuit control.