Ion implantation and plasma assisted processes
Subtitle: proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988
By: edited by Robert F. Hochman, Hillary Solnick-Legg, Keith O. Legg ; sponsored by the Ion Implantation Committee and the Plasma Processes Committee of the Surface Treating and Coating Division of ASM International.
Contributors: Hochman, Robert F. 1928-; Solnick-Legg, Hillary.; Legg, Keith O.; ASM International. Ion Implantation Committee.; ASM International. Plasma Processes Committee.
Publisher: ASM International; Brand: Asm Intl; Asm Intl
Published: 1988
Place of publication: Metals Park, Ohio
Language: eng
Number of pages: 205
Subjects: Ion implantation -- Congresses.; Ion bombardment -- Industrial applications -- Congresses.; Plasma (Ionized gases) -- Industrial applications -- Congresses.; Metals -- Finishing -- Congresses.
Notes: Includes bibliographical references.