Handbook of ion beam processing technology
Subtitle: principles, deposition, film modification, and synthesis
By: edited by Jerome J. Cuomo and Stephen M. Rossnagel, Harold R. Kaufman
Edition: Reprint ed.
Publisher: Noyes Publications
Published: 1989
Place of publication: Westwood, N.J
Language: eng
Number of pages: 438
ISBN-13: 9781591249795
Subjects: Ion implantation; Ion bombardment; Industrial applications; Ions; Implantation; Bombardement ionique; Applications industrielles
Notes: Includes bibliographical references and index.
Table of contents: title: Perspective on past, present and future uses of ion beam technology / Jerome J. Cuomo, Stephen M. Rossnagel and Harold R. Kaufman; title: Gridded broad-beam ion sources / Harold R. Kaufman and Raymond S. Robinson; title: Electron cyclotron resonance (ECR) ion sources / William M. Holber; title: Hall effect ion sources / Raymond S. Robinson and Harold R. Kaufman; title: Ionized cluster bean (ICB) deposition and epitaxy / Isao Yamada and Toshinori Takagi; title: Quantitative sputtering / Peer C. Zalm; title: Laser- induced fluorescence as a tool for the study of ion beam sputtering / Wallis F. Calaway [and others]; title: Characterization of atoms desorbed from surfaces by ion bombardment using multiphoton ionization detection / David L. Pappas, Nicholas Winograd and Fred M. Kimock.; title: The application of positionization for sputtering studies and surface or thin film analysis / Hans Oechsner; title: The modification of films by ion bombardment / Eric Kay and Stephen M. Rossnagel; title: Control of film properties by ion-assisted deposition using broad beam sources / Ronnen A. Roy and Dennis S. Yee; title: Etching with directed beams / Michael Geis [and others]; title: Film growth modification by concurrent ion bombardment : theory and simulation / Karl-Heinz Muller; title: Interface structure and thin film adhesion / John Baglin; title: Modification of thin films by off-normal incidence ion bombardment / R. Mark Bradley; title: Ion beam interactions with polymer surfaces / Robert C. White and Paul S. Ho.; title: Topography : texturing effects / Bruce A. Banks; title: Methods and techniques of ion beam processes / Stephen M. Rossnagel; title: Ion-assisted dielectric and optical coatings / Phil J. Martin and Roger P. Netterfield; title: Diamond and diamond-like thin films by ion beam techniques / Makoto Kitabatake and Kiyotaka Wasa.