Surface characterization for computer disks, wafers, and flat panel displays
Subtitle: 28 January 1999, San Jose, California
By: John C. Stover, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Stover, John C.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series -- v. 3619; Proceedings of SPIE--the International Society for Optical Engineering -- v. 3619.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 136
Subjects: Semiconductor wafers -- Measurement -- Congresses; Magnetic disks -- Congresses; Surface roughness -- Measurement -- Congresses; Flatness measurement -- Congresses; Surfaces (Technology) -- Analysis -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.