Handbook of Semiconductor Interconnection Technology
Edition: 1 edition
Publisher: CRC
Published: November 24, 1997
Language: eng
Format: Hardcover
Number of pages: 577
ISBN-13: 9780824799663
Subjects: Circuits & components; Condensed matter physics (liquids & solids); Technology & Industrial Arts; Material Science; Semiconductor Junction Devices; Semiconductors; Technology; Science/Mathematics; Electronics - Semiconductors; Engineering - Electrical & Electronic; Technology / Material Science; Electronics - General; Design and construction; Electric contacts; Junctions
First sentence: This chapter covers many of the basic principles and methods used today in semiconductor manufacturing for depositing and etching both dielectric and conducting films.