Proceedings of the First International Symposium on Chemical Mechanical Planarization
By: editors, I. Ali, S. Raghavan.
Contributors: Ali, Iqbal.; Raghavan, S.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Meeting
Series: Proceedings / Electrochemical Society ;; v. 96-22; Proceedings (Electrochemical Society) ;; v. 96-22.
Publisher: Electrochemical Society
Published: 1997
Place of publication: Pennington, NJ
Language: eng
Number of pages: 275
Subjects: Microelectronics -- Materials -- Congresses.; Grinding and polishing -- Congresses.; Metals -- Pickling -- Congresses.; Semiconductors -- Surfaces -- Congresses.
Notes: Includes bibliographical references and index.
"Electronics and Dielectric Science and Technology Divisions."
Held at the 190th meeting of the Electrochemical Society in San Antonio, Texas, Oct. 6-11, 1996.