Diffusion phenomena in thin films and microelectronic materials
By: edited by Devendra Gupta and Paul S. Ho.
Contributors: Gupta, Devendra.; Ho, P. S.
Series: Materials science and process technology series
Publisher: Noyes Publications; Brand: Noyes Publications
Published: 1988
Place of publication: Park Ridge, N.J., U.S.A
Language: eng
Number of pages: 588
Subjects: Diffusion.; Thin films.; Microstructure.
Notes: Includes bibliographical references and index.