Abscheidung metastabiler Ti₁₋xAlxN-Schichten nach dem plasmagestützten CVD-Verfahren
By: Robert Prange
Series: Fortschritt-Berichte VDI -- Nr. 576
Publisher: VDI Verlag
Published: 2000
Place of publication: Düsseldorf
Language: ger
Number of pages: 80
Subjects: Protective coatings; Titanium nitride
Other titles: PECVD-Abscheidung von (Ti,Al)N-Schichten
Notes: Added t.p. with dissertation statement.

Originally presented as the author's thesis (doctoral)--Rheinisch-Westfälische Technische Hochschule Aachen, 1999.

Includes bibliographical references (p. 75-80).