Digest of papers
Subtitle: Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan
By: sponsored by the Japan Society of Applied Physics ; technical-cosponsored by IEEE Electron Device Society ; in cooperation with Association of Super-Advanced Electronics Technologies ... [et al.].
Publisher: Japan Society of Applied Physics
Published: 2007
Place of publication: Tokyo
Language: eng
Number of pages: 543
Subjects: Nanotechnology -- Congresses; Microelectronics -- Congresses; Microlithography -- Congresses
Genres: Congresses
Notes: Includes bibliographical references and index.