The Physics and fabrication of microstructures and microdevices
Subtitle: proceedings of the winter school, Les Houches, France, March 25-April 5, 1986
By: editors, M.J. Kelly and C. Weisbuch.
Contributors: Weisbuch, C. 1945-; Kelly, M. J. 1949-; Winter School on "the Physics and Fabrication of Microstructures" (1986 : Les Houches, Haute-Savoie, France)
Series: Springer proceedings in physics ;; v. 13
Publisher: Springer-Verlag
Published: 1986
Place of publication: Berlin; New York
Language: eng
Number of pages: 469
Subjects: Semiconductors -- Congresses.; Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Semiconductors -- Design and construction -- Congresses.
Notes: Includes bibliographies and index.
Proceedings of the Winter School on "the Physics and Fabrication of Microstructures."