Semiconductor measurement technology
Subtitle: a collection of computer programs two-probe resistance (spreading resistance)  and four-probe resistance calculations, RESPAC
By: John Albers and Harry L. Berkowitz.
Contributors: Berkowitz, Harry L.
Series: NIST special publication -- 400-91.
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; Washington, D.C.; For sale by Supt. of Docs., U.S. G.P.O.
Published: 1993
Place of publication: Gaithersburg, MD
Language: eng
Format: Microform
Number of pages: 139
Subjects: Semiconductors -- Computer programs.; Electric resistance, Spreading -- Computer programs.
Notes: "June 1993"

"Includes bibliographical references (p. 69-71).

Microfilm. [Washington : U.S. SUPTDOCS/GPO, 1993] 2  microfiches ; 11 x 15 cm.