Micromachining and microfabrication process technology XIV
Subtitle: 27 January 2009, San Jose, California, United States
By: Mary-Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored by SPIE ; symposium cosponsors, Texas Instruments Inc. (United States) ... [et al.].
Contributors: SPIE (Society); Texas Instruments Incorporated
Series: Proceedings of SPIE -- v. 7204; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7204.
Publisher: SPIE
Published: 2009
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819474506
Subjects: Micromachining; Congresses; Microfabrication; Electromechanical devices; Design and construction; Miniature electronic equipment
Other titles: Micromachining and microfabrication process technology 14; Micromachining and microfabrication process technology fourteen
Notes: Includes bibliographical references and index.