Ion tracks and microtechnology
Subtitle: principles and applications
By: Reimar Spohr ; edited by Klaus Bethge.
Contributors: Bethge, Klaus, 1931-
Publisher: Vieweg
Published: 1990
Place of publication: Braunschweig
Language: eng
Number of pages: 272
Subjects: Materials -- Effect of radiation on.; Ion bombardment -- Industrial applications.; Ion beam lithography.
Notes: Includes bibliographical references and index.