Tables of ion implantation spatial distributions
By: A.F. Burenkov ... [et al.].
Contributors: Burenkov, A. F.; Amoretty, S. J.
Edition: English ed., rev. and enl. / translated from the Russian by S.J. Amoretty.
Publisher: Gordon & Breach Science Publishers
Published: 1986
Place of publication: New York
Language: eng
Number of pages: 462
Subjects: Ion implantation -- Tables.
Notes: Bibliography: p. 52-55.
Translation of: Tablit͡s︡y parametrov prostranstvennogo raspredelenii͡a︡ ionno-implantirovannykh primeseĭ.
"Published under license by OPA Ltd. for Gordon and Breach Science Publishers S.A."
Includes index.