A manual wafer probe station for an integrated circuit test system
By: G.P. Carver and W.A. Cullins.
Contributors: Cullins, W. C.; United States. National Bureau of Standards.; United States. National Engineering Laboratory. Electron Devices Division.
Series: Semiconductor measurement technology; NBS special publication ;; 400-68
Publisher: U.S. Dept. of Commerce, National Bureau of Standards; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1981
Place of publication: Washington, D.C
Language: eng
Number of pages: 14
Subjects: Integrated circuits -- Testing.; Probes (Electronic instruments)
Notes: Includes bibliographical references.
"Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards."
"Issued May 1981."
S/N 003-003-02319-1
Item 247