Principles of Lithography (SPIE PRESS Monograph Vol. PM97) (Spie Press Monograph)
Publisher: SPIE-International Society for Optical Engine
Published: July 2001
Language: eng
Format: Hardcover
Number of pages: 410
ISBN-13: 9780819440457
Subjects: Applied optics; Circuits & components; Printing, packaging & reprographic industry; Technology / Optics; Microlithography; Engineering - Electrical & Electronic; Science; Technology & Industrial Arts; Technology / Electronics / Circuits / General; Science/Mathematics; Electronics - Circuits - Integrated; Electronics - Microelectronics; Electronics - Circuits - General; Optics; Technology; General; Design and construction; Integrated circuits