The Tenth Annual International Workshop on Micro Electro Mechanical Systems
Subtitle: an investigation of micro structures, sensors, actuators, machines and robots : proceedings, Nagoya, Japan, January 26-30, 1997
By: sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center.
Contributors: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; Micromachine Center (Japan)
Publisher: Institute of Electrical and Electronics Engineers
Published: 1997
Place of publication: [New York]
Language: eng
Number of pages: 545
Subjects: Microelectronics -- Congresses.; Microelectromechanical systems -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.
Genres: Congresses.
Other titles: Micro electro mechanical systems; Investigation of micro structures, sensors, actuators, machines and robots
Notes: Includes bibliographical references and indexes.
"IEEE catalog number 97CH36021."