Twelfth IEEE International Conference on Micro Electro Mechanical Systems: 1999
Subtitle: Orlando, Florida, U S A, January 17-21, 1999
Publisher: Institute of Electrical & Electronics Enginee
Published: February 1999
Language: eng
Format: Paperback
Number of pages: 660
ISBN-13: 9780780351943
Subjects: Circuits & components; Power utilization & applications; Technology & Industrial Arts; Applied Electromagnetics; Microelectronics; Technology; Science/Mathematics; Electronics - General; Engineering - Electrical & Electronic; Actuators; Congresses; Detectors; Microelectromechanical systems