A laser scanner for semiconductor devices
By: David E. Sawyer and David W. Berning.
Contributors: Berning, David W., joint author.
Series: Semiconductor measurement technology; NBS special publication ; 400-24; NBS special publication ;; 400-24.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1977
Place of publication: Washington
Language: eng
Number of pages: 64
Subjects: Optical scanners.; Semiconductor industry -- Laser use in.; Semiconductors -- Testing.