Proceedings of the Fourth European Conference on Chemical Vapour Deposition, 1983
Subtitle: Euro CVD Four at Philips Congress Centre, Eindhoven, The Netherlands, May 31st-June 2nd
By: edited by J. Bloem, G. Verspui, L.R. Wolff.
Contributors: Bloem, J.; Verspui, G.; Wolff, L. R.
Edition: 2nd ed.
Publisher: Philips Centre for Manufacturing Technology
Published: 1983
Place of publication: Eindhoven, Netherlands
Language: eng
Number of pages: 586
Subjects: Plasma-enhanced chemical vapor deposition -- Congresses.
Other titles: Euro CVD Four.; Chemical vapour deposition.
Notes: Includes bibliographical references and index.
Cover title: Euro CVD Four.