Design, Test, Integration, and Packaging of Mems/Moems
Subtitle: 9-11 May 2000, Paris, France (Proceedings of Spie--the International Society for Optical Engineering, V. 4019.)
Publisher: SPIE-International Society for Optical Engine
Published: June 2000
Language: eng
Format: Paperback
Number of pages: 596
ISBN-13: 9780819436450
Subjects: PHYSICS; Electronics - General; Technology & Industrial Arts; Congresses; Microelectromechanical systems; Microelectronic packaging; Micromachining; Optoelectronic devices