Ekishin risogurafi no purosesu to zairyō
Subtitle: Process and ingredient of immersion lithography
By: kanshū Higashiki Tatsuhiko
Edition: Fukyūban
Series: Erekutoronikusu shirīzu
Publisher: Shīemushī Shuppan
Published: 2012
Place of publication: Tōkyō-to Chiyoda-ku
Language: jpn
Number of pages: 243
ISBN-13: 9784781305509
Subjects: Immersion lithography
Other titles: Process and ingredient of immersion lithography
Notes: Includes bibliographical references.

In Japanese.