Sub-half-micron lithography for ULSIs
By: edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai
Contributors: Suzuki, Katsumi, 1950-; Matsui, Shinji; Ochiai, Yukinori, 1955-
Publisher: Cambridge University Press
Published: 2000
Place of publication: Cambridge; New York
Language: eng
Number of pages: 323
Subjects: Integrated circuits -- Ultra large scale integration -- Design and construction; Microlithography; Printed circuits -- Design and construction
Notes: Includes bibliographical references and index