Handbook of contamination control in microelectronics
Subtitle: principles, applications, and technology
By: edited by Donald L. Tolliver.
Contributors: Tolliver, Donald L.
Series: Materials science and process technology series
Publisher: Noyes Publications
Published: 1988
Place of publication: Park Ridge, N.J., U.S.A
Language: eng
Number of pages: 488
Subjects: Integrated circuits -- Design and construction.; Contamination (Technology)
Notes: Includes bibliographies and index.