Microlithography
Subtitle: high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28-Sept. 1, 1989
By: editors, Aldo Craievich, G. Gerson Bezerra de Souza, Vitor Baranauskas.
Contributors: Craievich, Aldo.; Souza, G. Gerson Bezerra de.; Baranauskas, Vitor.
Publisher: World Scientific
Published: 1990
Place of publication: Singapore; Teaneck, NJ
Language: eng
Number of pages: 184
Subjects: Microlithography -- Congresses.; Microelectronics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references.