Microelectronic structures and MEMS for optical processing II
Subtitle: 14-15 October 1996, Austin, Texas
By: M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology.
Contributors: Motamedi, M. Edward.; Bailey, Wayne E.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; National Institute of Standards and Technology (U.S.)
Series: Proceedings / SPIE--the International Society of Optical Engineering ;; v. 2881; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2881.
Publisher: SPIE
Published: 1996
Place of publication: Bellingham, WA
Language: eng
Number of pages: 220
Subjects: Microelectronics -- Congresses.; Microelectromechanical systems -- Congresses.; Optical data processing -- Equipment and supplies -- Congresses.; Optoelectronics -- Congresses.
Notes: Includes bibliographical references.