VLSI metallization
By: edited by Norman G. Einspruch, Simon S. Cohen, Gennady Sh. Gildenblat.
Contributors: Einspruch, Norman G.; Cohen, Simon S.; Gildenblat, Gennady Sh.
Series: VLSI electronics ;; v. 15
Publisher: Academic Press; Academic Pr
Published: 1987
Place of publication: Orlando
Language: eng
Number of pages: 480
Subjects: Integrated circuits -- Very large scale integration -- Design and construction.; Metallic films.; Metallizing.
Notes: Includes bibliographies and index.