comparison of the TaN-Cr-Au and TaN-Cr-Pd-Au hybrid metallization systems--D.C. electrical properties, resistor aging, corrosion resistance, and chromium layer depletion studies
By: Ralph E. Hampy, Jerry Villanueva, Floyd P. Ganyard ; prepared by Sandia Laboratories for the United States Department of Energy.
Contributors: Villanueva, Jerry.; Ganyard, Floyd P.; United States. Dept. of Energy.; Sandia Laboratories.
Series: SAND ; 78-0604; SAND (Series) (Albuquerque, N.M.) -- 78-0604.
Publisher: Dept. of Energy, Sandia Laboratories
Published: 1978
Place of publication: Albuquerque, N.M; [Springfield, Va. : for sale by the National Technical Information Service]
Language: eng
Number of pages: 49
Subjects: Metal spraying.
Notes: Contract no. AT(29-1)-789.

July 1978.

Includes bibliographical references.