Dielectric layers in semiconductors
Subtitle: novel techniques and devices : June 17th-20th 1986, Strasbourg, France
By: edited by G.G. Bentini.
Contributors: Bentini, G. G.; European Materials Research Society.; Council of Europe.
Publisher: Editions de physique
Published: 1986
Place of publication: Les Ulis, France
Language: eng
Number of pages: 406
Subjects: Semiconductors -- Congresses.; Dielectric films -- Congresses.; Silicon-on-insulator technology -- Congresses.
Notes: Includes bibliographical references.
"European Materials Research Society, Council of Europe"--Cover.