Spectroscopic ellipsometry and reflectometry
Subtitle: a user's guide
By: Harland G. Tompkins, William A. McGahan.
Contributors: McGahan, William A., 1966-
Publisher: Wiley
Published: 1999
Place of publication: New York
Language: eng
Number of pages: 228
Subjects: Ellipsometry.; Reflectometer.; Materials -- Optical properties.; Thin films -- Optical properties.; Surfaces (Technology)
Notes: Includes bibliographical references and index.
"A Wiley-Interscience publication."