Advanced semiconductor processing and characterization of electronic and optical materials
Subtitle: January 24-25, 1984, Los Angeles, California
By: Devendra K. Sadana, Carl M. Lampert, chairmen/editors ; cooperating organizations, American Vacuum Society, Electronic Materials and Process Division.
Contributors: Sadana, Devendra K.; Lampert, Carl M.; American Vacuum Society. Electronic Materials and Process Division.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 463
Publisher: SPIE--the International Society for Optical Engineering
Published: 1984
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 147
Subjects: Semiconductors -- Congresses.
Notes: Includes bibliographies and index.