IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Subtitle: ASMC '92 proceedings, September 30-October 1, 1992, Cambridge, Massachusetts.
Contributors: Semiconductor Equipment and Materials International.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1992
Place of publication: New York
Language: eng
Number of pages: 232
Subjects: Semiconductor industry -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Process control -- Congresses.
Genres: Congresses.
Notes: "Sponsored by Semiconductor Equipment and Materials International ... [et al]"--Cover.

"IEEE catalog number 92-CH31823"--Cover.

Includes bibliographical references.