In situ process diagnostics and intelligent materials processing
Subtitle: symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.
By: editors, Peter A. Rosenthal, Walter M. Duncan, John A. Woollam.
Contributors: Rosenthal, Peter A.; Duncan, Walter Marvin.; Woollam, John A.
Series: Materials Research Society symposium proceedings ;; v. 502; Materials Research Society symposia proceedings ;; v. 502.
Publisher: Materials Research Society
Published: 1998
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 290
Subjects: Electronics -- Materials -- Congresses.; Manufacturing processes -- Congresses.; Semiconductors -- Congresses.; Thin films -- Congresses.; Lasers -- Industrial applications -- Congresses.
Notes: Includes bibliographical references and indexes.