Plasma Processing of Semiconductors
Edition: 1 edition
Publisher: Springer
Published: May 31, 1997
Language: eng
Format: Hardcover
Number of pages: 628
ISBN-13: 9780792345671
Subjects: Semi-conductors & super-conductors; Technology; Plasma Physics; Semiconductors; Technology & Industrial Arts; Science/Mathematics; Plasma engineering; Electronics - Semiconductors; Engineering - Electrical & Electronic; Physics; Science-Physics; Technology / Electronics / Semiconductors; Technology / Engineering / Electrical; Technology-Engineering - Electrical & Electronic; Etching; Material Science; Industrial applications; Plasma etching
Notes: NATO Science Series E: (closed)