Design for manufacturability through design-process integration II
Subtitle: 28-29 February 2008, San Jose, California, USA
By: Vivek K. Singh, Michael L. Rieger, editors ; sponsored by SPIE ; cooperating organization, SEMATECH (USA)
Contributors: Society of Photo-optical Instrumentation Engineers; International SEMATECH
Series: Proceedings of SPIE -- v. 6925; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6925.
Publisher: SPIE
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819471109
Notes: Includes bibliographical references and author index.