Rapid Thermal Processing of Electronic Materials
Subtitle: Symposium (Materials Research Society Symposia Proceedings, Vol 92)
Contributors: D. Eirug Davies (Editor)
Publisher: Materials Research Society
Published: September 1987
Language: eng
Format: Hardcover
Number of pages: 485
ISBN-13: 9780931837593
Subjects: Semiconductors; Congresses; Heat treatment; Rapid thermal processing; Semiconductor doping