Development of a quadrupole-based secondary-ion mass spectrometry (SIMS) system at Lewis Research Center
By: Carlos Vargas-Aburto, Paul R. Aron, and Dale R. Liff.
Contributors: Aron, Paul R.; Liff, Dale Russell.; United States. National Aeronautics and Space Administration.
Series: NASA technical memorandum -- 102531.
Publisher: NASA; For sale by the National Technical Information Service
Published: 1990
Place of publication: [Washington, D.C.]; [Springfield, Va
Language: eng
Format: Microform
Number of pages: 30
Subjects: Secondary ion mass spectrometry.; High vacuum.; Ion probes.; Mass spectrometers.; Mass spectroscopy.; Numerical control.; Quadrupoles.; Vacuum chambers.
Other titles: Development of a quadrupole based secondary-ion mass spectrometry (SIMS) system at Lewis Research Center.
Notes: Cover title.

Shipping list no.: 91-0093-M.

"June 1990."

"E-5341"--P. 1.

Includes bibliographical references (p. 13).

Also available via Internet from the NASA Technical Report Server web site. Address as of 4/19/06: http://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/19900014160%5F1990014160.pdf; current access available via PURL.

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration, 1990]. 1 microfiche : negative.