Handbook of VLSI Micrelithography
Edition: 2 edition
Publisher: Noyes Publications
Published: April 15, 2001
Language: eng
Format: Hardcover
Number of pages: 995
ISBN-13: 9780815514442
Subjects: Circuits & components; Printing & reprographic technology; Technology; Very-Large-Scale Integration (Vlsi); Technology & Industrial Arts; Science/Mathematics; Very large scale integration; Electronics - Circuits - Printed; Electronics - Circuits - VLSI; Engineering - Electrical & Electronic; Electronics - Semiconductors; Technology / Electronics / Circuits / VLSI; Technology / Electronics / Semiconductors; Integrated circuits; Microlithography