Microrobotics and micromechanical systems
Subtitle: 25 October 1995, Philadelphia, Pennsylvania
By: Lynne E. Parker, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Parker, Lynne E.; Society of Photo-optical Instrumentation Engineers.; Microrobotics and Micromechanical Systems Conference (1995 : Philadelphia, Pa.)
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2593; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2593.
Publisher: SPIE
Published: 1995
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 132
Subjects: Robotics -- Congresses.; Microelectromechanical systems -- Congresses.
Notes: Includes bibliographical references and index.
Proceedings of the Microrobotics and Micromechanical Systems Conference.