Materials, technology and reliability for advanced interconnects and low-k dielectrics
Subtitle: symposium held April 23-27, 2000, San Fransico, California, U.S.A.
By: editors, G.S. Oehrlein ... [et al.].
Series: Materials Research Society symposium proceedings -- v. 612; Materials Research Society symposia proceedings -- v. 612.
Publisher: Materials Research Society
Published: 2001
Place of publication: Warrendale, Pa
Language: eng
Subjects: Semiconductors -- Congresses; Semiconductors -- Junctions -- Congresses; Dielectric films -- Congresses; Integrated circuits -- Materials -- Congresses; Integrated circuits -- Reliability -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.