Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
By: James E. Potzick.
Contributors: National Institute of Standards and Technology (U.S.)
Series: Standard reference materials; NIST special publication ;; 260-129
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O
Published: 1997
Place of publication: Gaithersburg, MD; Washington, D.C
Language: eng
Number of pages: 23
Subjects: Microscopes -- Calibration -- Standards.; Integrated circuits -- Masks -- Measurement.; Chromium -- Spectra -- Standards.
Other titles: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Notes: Includes bibliographical references (p. 17-18).
"Issued February 1997."