Characterization of Gd2O3 high-K dielectric films on Si(001)
Series: Canadian theses = -- Thèses canadiennes
Publisher: National Library of Canada
Published: 2000
Place of publication: Ottawa
Language: eng
Format: Microform
Other titles: Characterization of Gadolinium oxide high-K dielectric films on Si(001).
Notes: Thesis (M.A.Sc.) -- University of Toronto, 2000.