Microlithography 1999: Advances in Resist Technology and Processing XVI 
Subtitle: Proceedings of Spie 15-17 March 1999 Santa Clara, California (Proceedings of SPIE)
Publisher: Society of Photo Optical
Published: June 1999
Language: eng
Format: Paperback
Number of pages: 1402
ISBN-13: 9780819431523
Subjects: Applied optics; Materials science; Science/Mathematics