Laser and particle-beam chemical processing for microelectronics
Subtitle: symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.
By: editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko.
Contributors: Ehrlich, Daniel J.; Higashi, Gregg S.; Oprysko, Modest Michael, 1957-; Materials Research Society.
Series: Materials Research Society symposium proceedings,; v. 101; Materials Research Society symposia proceedings ;; v. 101.
Publisher: Materials Research Society
Published: 1988
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 509
Subjects: Integrated circuits -- Design and construction -- Congresses.; Lasers -- Industrial applications -- Congresses.; Lasers in chemistry -- Congresses.
Notes: Includes bibliographies and indexes.