Computational modeling in semiconductor processing
By: M. Meyyappan, editor.
Contributors: Meyyappan, M.
Series: The Artech House materials science library
Publisher: Artech House; Artech House Publishers
Published: 1995
Place of publication: Boston
Language: eng
Number of pages: 363
Subjects: Semiconductors -- Design and construction -- Data processing.; Process control -- Mathematical models.; Semiconductor industry.
Notes: Includes bibliographical references and index.