In Situ Process Diagnostics and Intelligent Materials Processing
Subtitle: Symposium Held December 2-5, 1997, Boston, Massachusetts, U.S.A (Materials Research Society Symposium Proceedings)
Contributors: Peter A. Rosenthal (Editor); Walter M. Duncan (Editor); John A. Woollam (Editor)
Publisher: Materials Research Society
Published: June 1998
Language: eng
Format: Hardcover
Number of pages: 290
ISBN-13: 9781558994072
Subjects: Science/Mathematics; Technology & Industrial Arts; Manufacturing processes; Electronic Apparatus And Devices; Semiconductors; Technology; Materials; Electronics - General; Congresses; Electronics