Ion implantation in semiconductors and other materials
Subtitle: [proceedings]
By: Edited by Billy L. Crowder.
Contributors: Crowder, Billy L., ed.
Series: The IBM research symposia series
Publisher: Plenum Press
Published: 1973
Place of publication: New York
Language: eng
Number of pages: 657
Subjects: Ion implantation -- Congresses.; Semiconductors -- Congresses.
Notes: Includes bibliographical references.