Photon, beam, and plasma enhanced processing
Subtitle: June 2nd-5th, 1987, Strasbourg, (France)
By: edited by A. Golanski, V.T. Nguyen, E.F. Krimmel.
Contributors: Golanski, A.; Nguyen, Van Tran.; Krimmel, E. F.
Series: Symposia proceedings / European Materials Research Society ;; v. 15; Symposia proceedings (European Materials Research Society) ;; v. 15.
Publisher: Editions de Physique
Published: 1987
Place of publication: Les Ulis, France
Language: eng
Number of pages: 701
Subjects: Semiconductors -- Design and construction -- Congresses.; Silicon-on-insulator technology -- Congresses.; Thin film devices -- Design and construction -- Congresses.; Semiconductor films -- Design and construction -- Congresses.
Notes: Includes bibliographical references and index.