The MEMS handbook
By: edited by Mohamed Gad-el-Hak.
Contributors: Gad-el-Hak, Mohamed, 1945-
Edition: 2nd ed.
Series: Mechanical engineering series; Mechanical engineering series (Boca Raton, Fla.)
Publisher: CRC/Taylor & Francis
Published: 2006
Place of publication: Boca Raton, FL
Language: eng
ISBN-13: 9780849321061; 9780849391378; 9780849391385; 9780849391392
Subjects: Microelectromechanical systems -- Handbooks, manuals, etc.; Microeletrônica - manuais.
Genres: Handbooks, manuals, etc.
Notes: Includes bibliographical references and indexes.
Table of contents: value: MEMS, introduction and fundamentals; value: MEMS, design and fabrication; value: MEMS, applications.