Reactively sputtered films of silicon nitride for diffusion masking
By: by Dennis Richard Delzer.
Published: 1967
Language: eng
Number of pages: 80
Subjects: Silicon nitride.; Sputtering (Physics).; Surfaces (Technology).
Notes: Typescript (photocopy).

Thesis (M.S.)--Oregon State University, 1967.

Bibliography: p.69-71.