The physics of microfabrication
By: Ivor Brodie and Julius J. Muray.
Contributors: Muray, Julius J.
Publisher: Plenum Press
Published: 1982
Place of publication: New York
Language: eng
Number of pages: 503
Subjects: Microelectronics.; Thin-film circuits.; Microfabrication.
Notes: Includes bibliographical references and index.