Optical metrology and inspection for industrial applications
Subtitle: 18-20 October 2010
By: Kevin Harding, Peisen S. Huang, Toru Yoshizawa, editors ; sponsored by SPIE [and] COS--Chinese Optical Society ; cooperating organizations, Beijing Institute of Technology (China) ... [et al.] ; supporting organizations, China Association for Science and Technology (China), National Nature Science Foundation (China), [and] the Ministry of Science and Technology (China)
Contributors: SPIE (Society); Zhongguo guang xue xue hui; Beijing gong ye xue yuan; Zhongguo ke xue ji shu xie hui; Guo jia zi ran ke xue ji jin wei yuan hui (China); China. Guo jia ke xue ji shu bu
Series: Proceedings of SPIE -- v. 7855; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7855.
Publisher: SPIE
Published: 2010
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819483850
Subjects: Engineering inspection; Industrial applications; Optical methods; Quality control; Congresses; Optical measurements; Optical detectors; Interferometry
Notes: Includes bibliographical references and author index.