Ultraclean surface processing of silicon wafers
Subtitle: secrets of VLSI manufacturing
By: Takeshi Hattori (ed.).
Contributors: Hattori, Takeshi, 1945-
Publisher: Springer
Published: 1998
Place of publication: Berlin; New York
Language: eng
Number of pages: 616
Subjects: Semiconductor wafers -- Cleaning; Silicon -- Surfaces; Surface preparation
Notes: Includes bibliographical references and index.