Characterization of semiconductor substrates and structures
Subtitle: proceedings of the International Workshop on Characterization of Semiconductor Substrates and Structures, Smolenice, Czechoslavakia, 1-4 April, 1992
By: edited by M. Schieber, D. Korytár.
Contributors: Schieber, M.; Korytár, D.
Series: Journal of crystal growth -- vol.126 (1)
Publisher: North Holland
Published: 1993
Place of publication: Amsterdam
Language: eng