CMOS cantilever sensor systems
Subtitle: atomic force microscopy and gas sensing applications
By: D. Lange, O. Brand, H. Baltes
Contributors: Brand, Oliver, 1964-; Baltes, H.
Series: Microtechnology and MEMS
Publisher: Springer
Published: 2002
Place of publication: Berlin; New York
Language: eng
Number of pages: 142
Subjects: Microelectromechanical systems -- Design and construction; Metal oxide semiconductors, Complementary -- Design and construction; Levers -- Design and construction; Atomic force microscopy -- Equipment and supplies -- Design and construction; Gas detectors -- Design and construction
Notes: Includes bibliographical references (p. [131]-140) and index