Physical sputtering of elemental metals and semiconductors
By: by Wolfgang O. Hofer
Series: Berichte der Kernforschungsanlage Jülich -- Nr. 2028
Publisher: Zentralbibliothek der Kernforschungsanlage
Published: 1985
Place of publication: Jülich
Language: eng
Number of pages: 24
Notes: Includes bibliographical references (p. 21-24)