Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV, 12-15 May 1986, San Juan Bautista, California
By: special editor for the proceedings: Michael D. Strathman; sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley and the American Vacuum Society.
Contributors: American Institute of Physics; American Vacuum Society; University of California, Berkeley; Workshop on Refractory Metals and Silicides for VLSI (4th : 1986 : San Juan Bautista, Calif.)
Publisher: Published for the American Vacuum Society by the American Institute of Physics
Published: 1986
Place of publication: New York
Number of pages: 1415
Subjects: Integrated circuits -- Large scale integration -- Congresses
Notes: Includes bibliographical references.

Source: Journal of vacuum science & technology B, 2nd ser., v.4, no.6, Nov/Dec. 1986, p.1321-1415

1:SERIALS Journal of vacuum science & technology