Multilevel interconnection
Subtitle: issues that impact competitiveness : 27-28 September 1993, Monterey, California
By: Hoang H. Hoang ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Hoang, Hoang H.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2090; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2090.
Publisher: SPIE
Published: 1993
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 228
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Integrated circuits -- Very large scale integration -- Materials -- Congresses.; Metallizing -- Congresses.
Notes: Includes bibliographical references and author index.