IEEE micro electro mechanical systems
Subtitle: proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995
By: sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.
Contributors: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; IEEE Workshop on Micro Electro Mechanical Systems (1995 : Amsterdam, the Netherlands)
Publisher: Institute of Electrical and Electronics Engineers
Published: 1995
Place of publication: [New York]
Language: eng
Number of pages: 418
Subjects: Electromechanical devices -- Congresses.; Microelectronics -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.
Other titles: Micro electro mechanical systems workshop.
Notes: Includes bibliographical references and index.
"Micro Electro Mechanical Systems Workshop"--Spine.
"IEEE catalog number 95CH35754."