1996 1st International Symposium on Plasma Process-Induced Damage
Subtitle: 13-14 May 1996, Santa Clara, California, USA
Contributors: Kin P. Cheung (Editor); Moritaka Nakamura (Editor); Calvin T. Gabriel (Editor)
Publisher: Northern California Chapter of the American V
Published: December 1996
Language: eng
Format: Paperback
Number of pages: 237
ISBN-13: 9780965157704
Subjects: Technology & Industrial Arts; Semiconductors; Very-Large-Scale Integration (Vlsi); Technology; Science/Mathematics; Electronics - Semiconductors; Congresses; Effect of radiation on; Plasma radiation; Semiconductor wafers