Defects and Diffusion in Silicon Processing
Subtitle: Symposium Held April 1-4, 1997, San Francisco, California, U.S.A (Materials Research Society Symposia Proceedings, V. 469.)
Contributors: Tomas Diaz De LA Rubia (Editor); Salvatore Coffa (Editor); Peter A. Stolk (Editor); Conor S. Rafferty (Editor)
Publisher: Materials Research Society
Published: June 1997
Language: eng
Format: Hardcover
Number of pages: 541
ISBN-13: 9781558993730
Subjects: Semiconductors; Technology & Industrial Arts; Science/Mathematics; Congresses; Electronics - Semiconductors; Technology; Silicon crystals; Semiconductor doping; Defects