Advanced Metallization Conference 2003 (AMC 2003)
Subtitle: proceedings of the conference held October 21-23, 2003, in Montreal, Canada, and September 29-October 1, 2003, University of Tokyo, Tokyo, Japan
By: editors, Gary W. Ray ... [et al.]
Contributors: Ray, Gary W.; University of California, Berkeley. Continuing Education in Engineering
Series: Materials Research Society conference proceedings
Publisher: Materials Research Society
Published: 2004
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 792
Subjects: Semiconductors; Design and construction; Congresses; Integrated circuits; Ultra large scale integration; Materials; Thin films; Metallic films; Metallizing
Notes: "This conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."

Includes bibliographical references and indexes.