Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition
By: S.A. Gokoglu ... [et al.].
Contributors: Gokoglu, Suleyman A.; United States. National Aeronautics and Space Administration.
Series: NASA technical memorandum -- 102001
Publisher: National Aeronautics and Space Administration; For sale by the National Technical Information Service
Published: 1989
Place of publication: [Washington, DC]; [Springfield, Va
Language: eng
Format: Microform
Subjects: Vapor-plating.; Silicon.
Notes: Distributed to depository libraries in microfiche.

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1989. 1 microfiche.