Integrated circuits
Subtitle: chemical and physical processing : developed from the winter symposium
By: sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis, March 26-27, 1984 ; Pieter Stroeve, editor.
Contributors: Stroeve, Pieter, 1945-; American Chemical Society. Division of Industrial and Engineering Chemistry.
Series: ACS symposium series,; 290
Publisher: American Chemical Society
Published: 1985
Place of publication: Washington, D.C
Language: eng
Number of pages: 348
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.
Notes: Includes bibliographies and indexes.