Plasma deposited "diamondlike" carbon on GaAs and InP
By: J.D. Warner ... [et al.] ; prepared for the Thirty-first National Symposium of the American Vacuum Society, Reno, Nevada, December 3-7, 1984
Contributors: Warner, J. D; United States. National Aeronautics and Space Administration
Series: NASA technical memorandum -- 86870
Publisher: National Aeronautics and Space Administration
Published: 1984
Place of publication: [Washington, D.C.?
Language: eng
Format: Microform
Subjects: Hydrocarbons -- Research -- United States; Plasma (Ionized gases)
Notes: "N85-10844"--Microfiche header

Bibliography: p. 8

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1984. 1 microfiche ; 11 x 15 cm