Semiconductor measurement technology
Subtitle: spreading resistance analysis for silicon layers with nonuniform resistivity
By: David H. Dickey and James R. Ehrstein.
Contributors: Ehrstein, James R., joint author.
Series: NBS special publication ; 400-48; NBS special publication ;; 400-48.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1979
Place of publication: Washington
Language: eng
Number of pages: 65
Subjects: Semiconductors -- Testing.; Electric resistance, Spreading.; Silicon -- Electric properties.
Notes: "This activity was supported by the Defense Advanced Research Projects Agency."