Doping engineering for device fabrication
Subtitle: symposium held April 18-19, 2006, San Francisco, California, U.S.A.
By: editors, B.J. Pawlak ... [et al.].
Contributors: Pawlak, B. J.; Materials Research Society. Meeting; Symposium on Sub-Second Rapid Thermal Processing for Device Fabrication (2006 : Francisco, Calif.)
Series: Materials Research Society symposium proceedings -- v. 912; Materials Research Society symposia proceedings -- v.  912.
Publisher: Materials Research Society
Published: 2006
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 213
ISBN-13: 9781558998681
Subjects: Semiconductor doping -- Congresses.; Semiconductors -- Materials -- Congresses.; Semiconductors -- Design and construction -- Congresses.
Genres: Congresses.
Other titles: Sub-second rapid thermal processing for device fabrication
Notes: "This volume contains papers presented at Symposium C, 'Sub-Second Rapid Thermal Processing for Device Fabrication,' held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.

Includes bibliographical references and indexes.