PIDAT - a computer Program for Implant Diffusion And Trapping
By: W. Moller.
Contributors: Max-Planck-Institut fur Plasmaphysik
Publisher: Max-Planck-Institut fur Plasmaphysik
Published: 1983
Place of publication: Munchen
Number of pages: 30
Subjects: Diffusion; Ion implantation; Plasma-wall interaction; Trapping
Notes: Includes bibliographical references: p. 24-25.