Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density
By: T.J. Russell ; prepared for Air Force Wright Aeronautical Laboratories and Naval Air Systems Command.
Contributors: Air Force Wright Aeronautical Laboratories.; United States. Naval Air Systems Command.; United States. National Bureau of Standards.
Series: NBSIR -- 81-2413.; NBSIR -- 2413.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards; National Technical Information Service, distributor
Published: 1982
Place of publication: Washington, DC; [Springfield, VA
Language: eng
Number of pages: 36
Subjects: Microelectronics.; Oxides -- Thermal properties.; Electric charge and distribution.
Notes: "January 1982."

Includes bibliographical references.