Frontiers of characterization and metrology for nanoelectronics
Subtitle: 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Albany, New York, 11-15 May 2009
By: editors, David G. Seiler ... [et al.]
Contributors: Seiler, David G.
Series: AIP conference proceedings -- v. 1173; AIP conference proceedings -- no. 1173.
Publisher: AIP Conference Proceedings
Published: 2009
Place of publication: Melville, N.Y
Language: eng
Number of pages: 398
ISBN-13: 9780735407121
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses; Integrated circuits -- Ultra large scale integration -- Congresses -- Software
Genres: Congresses; Software
Notes: Previous conferences entitled: Characterization and metrology for ULSI technology.

Includes bibliographical references and indexes.