Characterization of Plasma-Enhanced Cvd Processes
Subtitle: Symposium Held November 27-28, 1989, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings)
Publisher: Materials Research Society
Published: June 1990
Language: eng
Format: Hardcover
Number of pages: 250
ISBN-13: 9781558990531
Subjects: Metal Manufacturing; Congresses; Design and construction; Integrated circuits; Plasma-enhanced chemical vapor deposition; Science/Mathematics