Chemical Mechanical Planarization of Semiconductor Materials
Edition: 1 edition
Publisher: Springer
Published: March 19, 2004
Language: eng
Format: Hardcover
Number of pages: 425
ISBN-13: 9783540431817
Subjects: Chemistry; Physics; Grinding and polishing; Technology; Science; Science/Mathematics; Semiconductors; Chemistry - Physical & Theoretical; Engineering - Industrial; Science / Chemistry / Physical & Theoretical; Science-Physics; Technology / Material Science; Technology-Engineering - Industrial; Material Science; Chemical mechanical planarization; Materials