Ceramic thick films for MEMS and microdevices
By: Robert A. Dorey
Series: Micro and nano technologies series; Micro & nano technologies
Publisher: William Andrew
Published: 2012
Place of publication: Waltham, [MA]
Language: eng
Number of pages: 191
ISBN-13: 9781437778175
Subjects: Nanoelectronics; Microelectromechanical systems; Thick-film circuits; Design and construction
Notes: Includes bibliographical references (p. 183-185) and index.