Laser-Assisted Microtechnology
By: by Simeon M. Metev, Vadim P. Veiko
Contributors: Veiko, Vadim P.
Edition: Second, Updated edition.
Series: Springer Series in Materials Science -- 19; Springer Series in Materials Science -- 19.
Publisher: Springer Berlin Heidelberg
Published: 1994
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] /
Number of pages: 240
ISBN-13: 9783642973291; 9783642973277
Subjects: Engineering; Computer engineering
Description: Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
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