Advances in resist technology and processing IV
Subtitle: 2-3 March 1987, Santa Clara, California
By: Murrae J. Bowden, chair/editor.
Contributors: Bowden, M. J., 1943-; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 771.
Publisher: SPIE--the International Society for Optical Engineering
Published: 1987
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 367
Subjects: Photoresists -- Congresses.
Notes: Includes bibliographies and index.