Microelectronic test pattern NBS-4
By: W. Robert Thurber and Martin G. Buehler.
Contributors: Buehler, Martin G.
Series: Semiconductor measurement technology; NBS special publication ; 400-32; NBS special publication ;; 400-32.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1978
Place of publication: Washington
Language: eng
Number of pages: 83
Subjects: Semiconductors -- Testing -- Equipment and supplies.
Notes: Includes bibliographical references.
"This activity was supported by the Defense Advanced Research Projects Agency and the National Bureau of Standards."