Vacuum Mechatronics .. AVS Series 7
Edition: 1 edition
Publisher: American Institute of Physics
Published: March 26, 1998
Language: eng
Format: Hardcover
Number of pages: 167
ISBN-13: 9780883183946
Subjects: Instruments & instrumentation engineering; Mechanical engineering; Science/Mathematics; Material Science; Technology; Science; Engineering - Mechanical; General; Technology / Material Science; Congresses; Mechatronics; Vacuum Technology
Notes: AIP Conference Proceedings