Stress-induced phenomena in metallization
Subtitle: first international workshop, Ithaca, NY, 1991
By: editors, Che-Yu Li, Paul Totta, Paul Ho.
Contributors: Li, Che-Yu.; Totta, Paul.; Ho, P. S.
Series: American Vacuum Society series ;; 13; Conference proceedings ;; no. 263; AIP conference proceedings ;; no. 263.
Publisher: American Institute of Physics
Published: 1992
Place of publication: New York
Language: eng
Number of pages: 280
Subjects: Semiconductors -- Defects -- Congresses.; Metallic films -- Congresses.; Thin film devices -- Defects -- Congresses.; Aluminum films -- Congresses.; Metallizing -- Congresses.
Notes: Includes bibliographical references and index.
"DOE CONF-9109327"--T.p. verso.