Materials and device characterization in micromachining III
Subtitle: 18-19 September 2000, Santa Clara, USA
By: Yuli Vladimirsky, Philip J. Coane, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA).
Contributors: Vladimirsky, Yuli.; Coane, Philip J.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series,; v. 4175; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4175.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 200
Subjects: Micromachining -- Congresses.; Electromechanical devices -- Congresses.; Micromechanics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.