Proceedings of the Eighth Symposium on Plasma Processing
By: edited by G.S. Mathad and D.W. Hess
Contributors: Mathad, G. S.; Hess, Dennis W.; Electrochemical Society. Dielectric Science and Technology Division; Electrochemical Society. Electronics Division
Series: Proceedings / The Electrochemical Society -- v. 90-14; Proceedings (Electrochemical Society) -- v. 90-14
Publisher: Electrochemical Society
Published: 1990
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 787
Copyright date: 1990
Subjects: Semiconductors; Etching; Congresses; Plasma etching
Other titles: Plasma processing.
Notes: "Dielectric Science and Technology and Electronics divisions."

Includes bibliographical references and indexes.