MEMS/MOEMS
Subtitle: advances in photonic communications, sensing, metrology, packaging and assembly ; 28-29 October 2002, Brugge, Belgium
By: Uwe F. W. Behringer ... [et al.], chairs/editors.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, WA
Language: eng
Number of pages: 203