Evaluation of a CMOS/SOS process using process validation wafers
By: J.S. Suehle, L.W. Linholm, and G.M. Marshall ; prepared for Defense Nuclear Agency
Contributors: Linholm, Loren W; Marshall, Glen Murray, 1953-; United States. Defense Nuclear Agency; United States. National Bureau of Standards
Series: NBSIR -- 82-2514
Publisher: U.S. Dept. of Commerce, National Bureau of Standards; National Technical Information Service, distributor
Published: 1982
Place of publication: Washington, DC; [Springfield, VA
Language: eng
Number of pages: 42
Subjects: Integrated circuits; Semiconductor wafers; Process control
Other titles: Evaluation of a C.M.O.S./S.O.S. process using process validation wafers
Notes: "June 1982."

Includes bibliographical references