Characterisation of thin films by phase modulated spectroscopic ellipsometry
By: by D. Bhattacharyya and N.C. Das.
Contributors: Bhabha Atomic Research Centre.
Publisher: Bhabha Atomic Research Centre
Published: 1998
Place of publication: Mumbai
Language: eng
Format: Microform
Number of pages: 33
Subjects: Thin film devices.
Notes: Microfiche. New Delhi : Library of Congress Office ; Washington, D.C. : Library of Congress Photoduplication Service, 1999. 1 microfiche. Master microform held by: DLC.
Includes bibliographical references (p. 32-33).
At head of title: Government of India, Atomic Energy Commission.
"BARC/1998/E/018".