Proceedings
Subtitle: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Nara, Japan, 30 January-2 February 1991
By: sponsored by the IEEE Robotics and Automation Society ; and in cooperation with the IEE of Japan and the ASMR Dynamic Systems and Control Division.
Contributors: IEEE Robotics and Automation Council.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; Denki Gakkai (1888)
Publisher: Institute of Electrical and Electronics Engineers
Published: 1991
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 288
Subjects: Electromechanical devices.; Miniature objects.; Microelectronics.; Robotics.
Other titles: IEEE micro electro mechanical systems.; 1991 IEEE Micro Electro Mechanical Systems.; Micro electro mechanical systems.; MEMS '91.
Notes: Papers presented at the fourth IEEE Workshop on Micro Electro Mechanical Systems.

"IEEE catalog number 91CH2957-9."

On spine and cover: 1991 IEEE Micro Electro Mechanical Systems.

"MEMS '91"

Includes bibliographies.