Advances in Resist Technology and Processing XV
Publisher: SPIE-International Society for Optical Engine
Published: 1998
Language: eng
Format: Hardcover
Number of pages: 1500
ISBN-13: 9780819427786
Subjects: Applied optics; Materials science; Technology; Technology & Industrial Arts; Science/Mathematics; Material Science; Electronics - Microelectronics; Electronics - Optoelectronics
Other titles: Advances in Resist Technology & Processing XV