Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
Publisher: Springer
Published: Oct 07, 2017
Format: hardcover
Number of pages: 164
ISBN-13: 9783319666068
Notes: Source title: Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets (Springer Theses)