Proceedings of the Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors
By: edited by S.J. Pearton, K.S. Jones, V.J. Kapoor ; [sponsored by the] Electronics and Dielectric Science and Technology divisions.
Contributors: Pearton, S. J.; Jones, K. S.; Kapoor, Vikram J.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Series: Proceedings / Electrochemical Society ;; v. 90-13; Proceedings (Electrochemical Society) ;; v. 90-13.
Publisher: Electrochemical Society
Published: 1990
Place of publication: Pennington, NJ
Language: eng
Number of pages: 472
Subjects: Semiconductors -- Congresses.; Ion implantation -- Congresses.; Dielectrics -- Congresses.
Other titles: Ion implantation and dielectrics for elemental and compound semiconductors.
Notes: Includes bibliographical references and indexes.