Chemical mechanical polishing in silicon processing
By: Volume editors Shin Hwa Li, Robert O. Miller.
Contributors: Li, Shin Hwa.; Miller, Robert O., 1947-
Series: Semiconductors and semimetals -- v. 63
Publisher: Academic Press
Published: 2000
Place of publication: San Diego, CA
Language: eng
Number of pages: 307
Subjects: Grinding and polishing; Silicon
Notes: Includes bibliographical references and index.