OSA proceedings on extreme ultraviolet lithography
Subtitle: proceedings of the topical meeting, September 19-21, 1994, Monterey, California
By: edited by Frits Zernike and David T. Attwood ; sponsored by Optical Society of America.
Contributors: Zernike, Frits, 1930-; Attwood, David T.; Optical Society of America.
Publisher: The Society
Published: 1995
Place of publication: Washington, DC
Language: eng
Number of pages: 283
Subjects: Optical coatings -- Congresses.; Photolithography -- Congresses.; Ultraviolet radiation -- Industrial applications -- Congresses.; Interferometry -- Congresses.; Lasers -- Industrial applications -- Congresses.
Other titles: Extreme ultraviolet lithography.
Notes: Includes bibliographical references and index.
"Volume 23."