Charged particle optics III
Subtitle: 27-28 July 1997, San Diego, California
By: Eric Munro, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Munro, Eric.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,; v. 3155; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3155.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 266
Subjects: Electron optics -- Congresses.; Electron optics -- Industrial applications -- Congresses.
Other titles: Charged particle optics 3; Charged particle optics three
Notes: Includes bibliographical references and index.