Technology of Integrated Circuits
By: by Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
Contributors: Mader, Hermann; Friedrich, Hans; Heywang, Walter; Müller, Rudolf
Series: Springer Series in ADVANCED MICROELECTRONICS -- 2; Springer Series in ADVANCED MICROELECTRONICS -- 2
Publisher: Springer Berlin Heidelberg
Published: 2000
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] /
Number of pages: 340
ISBN-13: 9783642085475; 9783662041604
Subjects: Engineering; Chemical engineering; Electronics; Optical materials
Description: Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.
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Mode of access: World Wide Web.
Table of contents: title: Introduction; title: Basic Principles of Integrated Circuit Technology; title: Film Technology; title: Lithography; title: Etching Technology; title: Doping Technology; title: Cleaning Technology; title: Process Integration.