Acoustic wave and electromechanical resonators
Subtitle: concept to key applications
By: Humberto Campanella
Series: Integrated microsystems series; Artech House integrated microsystems series
Publisher: Artech House; Artech House Publishers
Published: 2010
Place of publication: Norwood, MA
Language: eng
Number of pages: 345
ISBN-13: 9781607839774
Subjects: Electric resonators; Acoustic surface wave devices
Other titles: Acoustic wave & electromechanical resonators
Notes: Includes bibliographical references and index.
Table of contents: title: 1. MEMs and NEMs resonator technologies; title: 2. Acoustic microresonator technologies; title: 3. Design and modeling of micro- and nanoresonators; title: 4. Fabrication techniques; title: 5. Characterization techniques; title: 6. Performance optimization; title: 7. Integration of resonator to CMOS technologies; title: 8. Sensor applications; title: 9. Radio frequency applications; title: 10. Case studies.