Nanofabrication
Subtitle: fundamentals and applications
By: editor, Ampere A. Tseng.
Contributors: Tseng, A. A.
Publisher: World Scientific
Published: 2008
Place of publication: Singapore; Hackensack, N.J
Language: eng
Number of pages: 574
ISBN-13: 9789812700766; 9789812705426
Subjects: Nanostructured materials.; Nanostructures.; Scanning probe microscopy.; Lithography, Electron beam.
Notes: Includes bibliographical references and index.