Primenenie nizkotemperaturnoĭ plazmy dli͡a︡ travlenii͡a︡ i ochistki materialov
By: B.S. Danilin, V.I͡U︡. Kireev.
Contributors: Kireev, V. I͡U︡.
Edition: Proizvodstvennoe izd.
Publisher: Ėnergoatomizdat
Published: 1987
Place of publication: Moskva
Language: rus
Number of pages: 262
Subjects: Materials -- Cleaning.; Etching.; Low temperature plasmas.
Notes: Bibliography: p. 252-[260].