On thermal oxidation of silicon in steam
By: [by] M. Leppihalme, S. Leppävuori [and] M. Malmelin.
Contributors: Leppävuori, S., joint author.; Malmelin, M., joint author.
Series: Valtion teknillinen tutkimuslaitos. Tiedotus. Sarja 2: Metalli, 30
Publisher: State Institute for Technical Research
Published: 1970
Place of publication: Helsinki
Language: eng
Number of pages: 12
Subjects: Silicon.; Oxidation.; Steam.
Notes: Includes bibliographical references.