Nondestructive evaluation and reliability of micro- and nanomaterial systems
Subtitle: 18-19 March 2002, Newport Beach, USA
By: Norbert Meyendorf, George Y. Baaklini, Bernd Michel, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Meyendorf, Norbert.; Baaklini, George Y.; Michel, Bernd.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series -- v. 4703; Proceedings of SPIE--the International Society for Optical Engineering -- v. 4703.
Publisher: SPIE
Published: 2002
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 228
Subjects: Nanostructured materials -- Testing -- Congresses.; Microelectromechanical systems -- Evaluation.; Microelectromechanical systems -- Reliability.; Nondestructive testing -- Congresses.; Surfaces (Technology) -- Congresses.; Quality control -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.