Extreme ultraviolet lithography
Subtitle: summaries of papers presented at the topical meeting, Extreme Ultraviolet Lithography, September 19-21, 1994, Monterey, California
By: sponsored by Optical Society of America.
Contributors: Optical Society of America.
Edition: Conference ed.
Series: Technical digest; Technical digest series (Optical Society of America)
Publisher: The Society
Published: 1994
Place of publication: Washington, DC
Language: eng
Number of pages: 146
Subjects: Optical coatings -- Congresses.; Photolithography -- Congresses.; Ultraviolet radiation -- Industrial applications -- Congresses.; Interferometry -- Congresses.; Lasers -- Industrial applications -- Congresses.
Notes: Includes bibliographical references and index.