Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
By: W. Murray Bullis, S. Perkowitz, D.G. Seiler.
Contributors: Perkowitz, S.; Seiler, David G.; National Institute of Standards and Technology (U.S.)
Series: NIST special publication -- 400-98.; Semiconductor measurement technology
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Published: 1995
Place of publication: Gaithersburg, MD
Language: eng
Format: Microform
Number of pages: 51
Subjects: Semiconductors -- Testing -- Optical methods.; Semiconductors -- Characterization.; Semiconductor industry -- United States.
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 97-0518-M.

Paper version no longer available for sale by the Supt. of Docs.

"December 1995."

Includes bibliographical references.

Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1997] 1 microfiche : negative.