Materials science in microelectronics
By: E.S. Machlin.
Edition: 2nd ed.
Publisher: Elsevier
Published: 2005
Place of publication: Amsterdam; Boston
Language: eng
Subjects: Thin films; Microelectronics
Table of contents: title: v. 1. The relationships between thin film processing and structure; title: v. 2. The effects of structure on properties in thin films.