Nanolithography
Subtitle: a borderland between STM, EB, IB, and X-ray lithographies
By: edited by M. Gentili, C. Giovannella, and S. Selci.
Contributors: Gentili, M.; Giovannella, Carlo.; Selci, S.
Series: NATO ASI series.; no. 264
Publisher: Kluwer Academic Publishers
Published: 1994
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 215
Subjects: Molecular electronics -- Congresses; Microlithography -- Congresses; Nanotechnology -- Congresses; Integrated circuits -- Design and construction -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"Proceedings of the NATO Advanced Research Workshop on "Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies", Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso.
"Published in cooperation with NATO Scientific Affairs Division."