Microelectronics
Subtitle: processing and phenomena : proceedings of the seventh Molecular Beam Epitaxy Workshop, 20-22 October 1986, Massachusetts Institute of Technology, Cambridge, Massachusetts
By: sponsored by the American Vacuum Society ; special editor: David L. Miller.
Contributors: Miller, David L.; American Vacuum Society.
Series: Journal of vacuum science & technology B -- vol. 5 (3)
Publisher: American Institute of Physics for the American Vacuum Society
Published: 1987
Place of publication: New York
Language: eng