Molecular theory of lithography
By: by Uzodinma Okoroanyanwu
Publisher: SPIE
Published: 2015
Place of publication: Bellingham, Washington, USA
Language: eng
ISBN-13: 9781628415513
Subjects: Microlithography; Industrial applications; Molecular theory; Molecular electronics; Integrated circuits; Masks
Notes: Includes bibliographical references and index.