Reduced Thermal Processing for ULSI
By: edited by Roland A. Levy
Series: NATO ASI Series, Series B: Physics, 0258-1221 -- 207; NATO ASI series -- 207.
Publisher: Springer US
Published: 1990
Place of publication: Boston, MA
Language: eng
Format: [electronic resource] /
Number of pages: 450
ISBN-13: 9781461305415
Subjects: Crystallography; Physics
Other titles: Proceedings of a NATO ASI held in Boca Raton, Florida, June 20-July 1, 1988