Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2009
Subtitle: symposium held April 14-17, 2009, San Francisco, California, U.S.A.
By: editors, Martin Gall ... [et al.].
Contributors: Gall, Martin; Materials Research Society. Meeting
Series: Materials Research Society symposium proceedings -- v. 1156; Materials Research Society symposia proceedings -- v. 1156.
Publisher: Materials Research Society
Published: 2009
Place of publication: Warrendale, Penn
Language: eng
Number of pages: 189
ISBN-13: 9781605111292
Subjects: Materials; Congresses; Nanoelectronics; Very large scale integration; Microelectronics; Integrated circuits; Interconnects (Integrated circuit technology)
Notes: "Symposium D, 'Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics --2009,' held April 14-17 at the 2009 MRS Spring Meeting in San Francisco, California ..."--Pref.

Includes bibliographical references and indexes.