Ion implantation in semiconductors, silicon and germanium
By: [by] James W. Mayer, Lennart Eriksson and John A. Davies.
Contributors: Eriksson, Lennart, 1938- joint author.; Davies, John Arthur, 1927- joint author.
Publisher: Academic Press
Published: 1970
Place of publication: New York
Language: eng
Number of pages: 280
Subjects: Ion implantation.; Semiconductors.
Notes: Includes bibliographical references.