Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology
By: edited by G.R. Srinivasan, K. Taniguchi, C.S. Murthy.
Contributors: Srinivasan, G. R.; Taniguchi, Kenji.; Murthy, C. S.; Electrochemical Society. Electronics Division.
Series: Proceedings ;; v. 93-6; Proceedings (Electrochemical Society) ;; v. 93-6.
Publisher: Electrochemical Society
Published: 1993
Place of publication: Pennington, NJ
Language: eng
Number of pages: 628
Subjects: Semiconductors -- Mathematical models -- Congresses.; Semiconductors -- Congresses.
Other titles: Process physics and modeling in semiconductor technology.
Notes: Includes bibliographical references and indexes.
"Electronics Division."
Spine title: Process physics and modeling in semiconductor technology.
Papers from a symposium held in Honolulu, Hawaii, May 19-21, 1993, as part of the Spring Meeting of the Electrochemical Society.