Laser scanning of active semiconductor devices--videotape script
By: David E. Sawyer and David W. Berning.
Contributors: Berning, David W., joint author.
Series: Semiconductor measurement technology; NBS special publication ; 400-27; NBS special publication ;; 400-27.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1976
Place of publication: Washington
Language: eng
Number of pages: 21
Subjects: Semiconductors -- Testing.; Optical scanners.; Semiconductor industry -- Laser use in.; Lasers.
Notes: "This activity was supported by the Defense Advanced Research Projects Agency and the National Bureau of Standards."