Study of InGaAs based MODEFET structures using variable angle spectroscopic ellipsometry
By: S.A. Alterovitz ... [et al.].
Contributors: Alterovitz, Samuel A.; United States. National Aeronautics and Space Administration.
Series: NASA technical memorandum -- 103792.
Publisher: National Aeronautics and Space Administration; For sale by the National Technical Information Service
Published: 1991
Place of publication: [Washington, DC]; [Springfield, Va
Language: eng
Format: Microform
Subjects: Ellipsometry.
Notes: Distributed to depository libraries in microfiche.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1991] 1 microfiche.