Laser processing of semiconductor devices
Subtitle: January 18-19, 1983, Los Angeles, California
By: Charles C. Tang, chairman/editor ; cooperating organization, Materials Research Society.
Contributors: Tang, Charles C.; Materials Research Society.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 385
Publisher: SPIE--the International Society for Optical Engineering
Published: 1983
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 155
Subjects: Microelectronics.; Lasers -- Industrial applications.
Notes: Includes bibliographical references and indexes.