Ion implantation technology--1998
Subtitle: 1998 International Conference on Ion Implantation Technology :  Proceedings, Kyoto, Japan, June 22-26, 1998
By: editors, J. Matsuo, G. Takaoka, I. Yamada.
Contributors: Matsuo, J.; Takaoka, G.; Yamada, I.; IEEE Electron Devices Society.
Publisher: The Institute of Electrical and Electronics Engineers, Inc.
Published: 1998
Place of publication: New York City, NY
Language: eng
Subjects: Semiconductors -- Congresses; Ion implantation -- Congresses; Semiconductor doping -- Congresses
Genres: Congresses.
Other titles: Iit '98 Kyoto; 1998 International Conference on Ion Implantation Technology proceedings.; Ion Implantation Technology proceedings, 1998 International Conference on.
Notes: Also available via the World Wide Web with additional title: Ion Implantation Technology proceedings, 1998 International Conference on.
Includes bibliographical references and index.
"98EX144"--Cover.
Cosponsors : Electron Devices Society, the IEEE ...