Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies
By: edited by Yves Pauleau
Series: NATO Science Series, Series II: Mathematics, Physics and Chemistry, 1568-2609 -- 55; NATO science series -- 55.
Publisher: Springer Netherlands; Imprint; Springer
Published: 2002
Place of publication: Dordrecht
Language: eng
Format: [electronic resource] /
Number of pages: 384
ISBN-13: 9789401003537
Other titles: Proceedings of the NATO Advanced Study Institute, held in Kaunas, Lithuania, from 3-14 September 2001