RF MEMS
Subtitle: Theory, Design, and Technology
Publisher: Wiley-Interscience
Published: June 15, 2002
Language: eng
Number of pages: 350
ISBN-13: 9780471201694
First sentence: Microelectromechanical Systems (MEMS) have been developed since the 1970s for pressure and temperature sensors, accelerometers, gas chromatographs, and other sensor devices.