Handbook of thin-film deposition processes and techniques
Subtitle: principles, methods, equipment, and applications
By: edited by Krishna Seshan.
Contributors: Seshan, Krishna.
Publisher: Noyes Publications
Published: 2000
Place of publication: Park Ridge, N.J
Language: eng
Subjects: Thin film devices -- Design and construction -- Handbooks, manuals, etc; Thin films -- Handbooks, manuals, etc; Chemical vapor deposition -- Handbooks, manuals, etc
Genres: Handbooks, manuals, etc.
Notes: Includes bibliographical references and index.