High purity silicon VI
Subtitle: proceedings of the Sixth International Symposium
By: editors, C.L. Claeys ... [et al.] ; sponsored by: Electrochemical Society, Inc., Electronics Division ; published in cooperation with: SPIE--the International Society for Optical Engineering.
Contributors: Claeys, Cor L.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting; Society of Photo-optical Instrumentation Engineers.
Series: ECS Proceedings ;; 2000-17; Proceedings (Electrochemical Society) ;; 2000-17.
Publisher: Electrochemical Society; SPIE
Published: 2000
Place of publication: Pennington, New Jersey; Bellingham, Washington
Language: eng
Number of pages: 696
Subjects: Silicon diodes -- Congresses.; Silicon crystals -- Congresses.; Crystal growth -- Congresses.; Semiconductor wafers -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and indexes.
"... papers that were presented at the Sixth Symposium on High Purity Silicon held in Phoenix, Arizona at the 198th Meeting of the Electrochemical Society, October 22-27, 2000."--Preface.