Characterization and metrology for ULSI technology
By: editors, David G. Seiler ... [et al.]
Contributors: Seiler, David G.; National Institute of Standards and Technology (U.S.)
Series: AIP conference proceedings -- v. 788; AIP conference proceedings -- no.788.
Publisher: American Institute of Physics
Published: 2005
Place of publication: Melville, N.Y
Language: eng
Number of pages: 667
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses; Integrated circuits -- Ultra large scale integration -- Congresses -- Software
Genres: Congresses; Software
Notes: Includes bibliographical references and index.