Silicon carbide semiconductor device fabrication and characterization
Subtitle: final report.
Contributors: United States. National Aeronautics and Space Administration.
Series: NASA-CR -- 186354.; NASA contractor report -- NASA CR-186354.
Publisher: College of Engineering, North Carolina State University
Published: 1990
Place of publication: Raleigh, N.C
Language: eng
Format: Microform
Subjects: Silicon carbide.; Semiconductors.
Notes: Distributed to depository libraries in microfiche.

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1990. 1 microfiche.