Polymeric materials for microelectronic applications
Subtitle: science and technology
By: Hiroshi Ito, editor, Seiichi Tagawa, editor, Kazuyuki Horie, editor.
Contributors: Ito, Hiroshi.; Tagawa, Seichi.; Horie, Kazuyuki, 1941-; Kōbunshi Gakkai (Japan). Polymers for Microelectronics and Photonics Group.; American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Series: ACS symposium series,; 0097-6156 ;
Publisher: American Chemical Society
Published: 1994
Place of publication: Washington, DC
Language: eng
Number of pages: 468
Subjects: Microelectronics -- Materials -- Congresses.; Polymers -- Congresses.
Notes: Includes bibliographical references and indexes.
"Developed from a symposium sponsored by the Polymers for Microelectronics and Photonics Group of the Society of Polymer Science, Japan, and the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society, at the polymers for microelectronics 1993 meeting, Kawasaki, Japan, November 15-19, 1993."