Principles and applications of NanoMEMS physics
By: edited by Hector De Los Santos.
Contributors: Santos, Héctor J. de los.
Series: Microsystems ;; v. 15; Microsystems (Series) ;; v. 15.
Publisher: Springer
Published: 2005
Place of publication: New York
Language: eng
Subjects: Quantum electronics; Wave-particle duality; Nanotechnology; Microelectromechanical systems
Table of contents: title: Nanoelectromechanical systems; title: NanoMEMS physics: quantum wave-particle phenomena; title: NanoMEMS physics: quantum wave-phenomena; title: NanoMEMS applications: circuits and systems; title: NanoMEMS applications: photonics.