CVD-growth and characterisation of silicon carbide
By: Christer Hallin
Contributors: Universitetet i Linköping. Department of Physics and Measurement Technology
Publisher: Applied Physics Department of Physics and Measurement Technology Linköping University
Published: 1996
Place of publication: Linköping
Language: eng
Number of pages: 144
Notes: Thesis (doctoral)--Linköping University, 1996.