Science and technology of chemical mechanical planarization (CMP)
Subtitle: symposium held April 14-16, 2009, San Francisco, California, U.S.A.
By: editors, Ashok Kumar ... [et al.].
Contributors: Kumar, Ashok, 1962-
Series: Materials Research Society symposium proceedings -- v. 1157; Materials Research Society symposia proceedings -- v. 1157.
Publisher: Materials Research Society
Published: 2010
Place of publication: Warrendale, Penn
Language: eng
Number of pages: 165
ISBN-13: 9781605111308
Subjects: Chemical mechanical planarization; Semiconductors; Congresses; Design and construction
Notes: Includes bibliographical references and indexes.