Modelling of Microfabrication Systems
Edition: 1 edition
Publisher: Springer
Published: August 5, 2003
Language: eng
Format: Hardcover
Number of pages: 350
ISBN-13: 9783540002529
Subjects: Encyclopaedias & Reference Works; Mathematics; Nanotechnology; Science; Nanostructures; Science/Mathematics; Engineering - Electrical & Electronic; Number Systems; Technology / Engineering / Electrical; Reference
First sentence: Ion beam technology is of vital importance in the area of microfabrication.