Indentation plasticity and fracture in silicon
By: George C. Rybick;i, P. Pirouz.
Contributors: Pirouz, P.; United States. National Aeronautics and Space Administration. Scientific and Technical Information Division.
Series: NASA technical paper -- 2863.
Publisher: National Aeronautics and Space Administration, Scientific aand Technical Information Division; For sale by the National Technical Information Service]
Published: 1988
Place of publication: [Washington, D.C.]; [Springfield, Va
Language: eng
Format: Microform
Subjects: Silicon.
Notes: Distributed to depository libraries in microfiche.

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1988. 1 microfiche ; 11 x 15 cm.