Advances in rapid thermal processing
Subtitle: proceedings of the symposium
By: editors, Fred Roozeboom ... [et al.].
Contributors: Roozeboom, Fred.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. High Temperature Materials Division.; Electrochemical Society. Meeting; International Symposium on Advances in Rapid Thermal Processing (1999 : Seattle, Washington).
Series: Proceedings -- v. 99-10; Proceedings (Electrochemical Society) -- 99-10.
Publisher: Electrochemical Society
Published: 1999
Place of publication: Pennington, NJ
Language: eng
Number of pages: 452
Subjects: Semiconductors -- Heat treatment -- Congresses.; Rapid thermal processing -- Congresses.
Genres: Congresses.
Notes: "Electronics, Dielectric Science and Technology, and High Temperature Materials divisions."

Includes bibliographical references and indexes.