Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
By: edited by Steven B. Bibyk ... [et al.] ; Dielectrics and Insulation, and Electronics, and High Temperature Materials Divisions.
Contributors: Bibyk, Steven B.; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. High Temperature Materials Division.
Series: Proceedings / Electrochemical Society ;; v. 89-7; Proceedings (Electrochemical Society) ;; v. 89-7.
Publisher: Electrochemical Society
Published: 1989
Place of publication: Pennington, NJ
Language: eng
Number of pages: 455
Subjects: Thin film devices -- Congresses.; Electric insulators and insulation -- Thin films -- Congresses.; Silicon nitride -- Congresses.; Silicon dioxide -- Congresses.
Other titles: Silicon nitride and silicon dioxide thin insulating films.
Notes: Includes bibliographical references.