ULSI process integration 5
By: editors, C. Claeys ... [et al.].
Contributors: Claeys, Cor L.; Electrochemical Society. Meeting; Electrochemical Society. Electronics and Photonics Division.
Series: ECS transactions -- vol. 11, no. 6
Publisher: Electrochemical Society
Published: 2007
Place of publication: Pennington, NJ
Language: eng
Number of pages: 495
ISBN-13: 9781566775724
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses
Genres: Congresses
Other titles: ULSI process integration V; ULSI process integration five
Notes: "Presented at the Fifth Symposium on ULSI Process Integration held in Washington, DC at the 212th Meeting of the Electrochemical Society, October 7-12, 2007"--P. iii.

"Dielectric and semiconductor materials, devices, and processing"--Cover.

Sponsoring Division: Electronics and Photonics.

Includes bibliographical references and index.