Microsystem Technology and Microrobotics
By: by Sergej Fatikow, Ulrich Rembold
Contributors: Rembold, Ulrich
Publisher: Springer Berlin Heidelberg
Published: 1997
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] /
Number of pages: 408
ISBN-13: 9783642082320; 9783662034507
Subjects: Engineering; Physics; Electronics; Artificial intelligence; Computer science
Description: Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.
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