Proceedings of the 9th International Autumn Meeting Gettering and defect engineering in semiconductor technology
Subtitle: GADEST 2001, S. Tecla, Italy, September 30-October 3, 2001
By: editors, V. Raineri ... [et al.].
Contributors: Raineri, V.
Series: Diffusion and defect data.; v. 82/84
Publisher: Sci-Tech Pub. Ltd.; Trans Tech Pub. Ltd. [distributor]
Published: 2002
Place of publication: Uetikon-Zürich, Switzerland; Enfield, N.H
Language: eng
Number of pages: 823
Subjects: Semiconductors -- Defects -- Congresses; Getters -- Congresses; Silicon crystals -- Defects -- Congresses; Electric engineering -- Materials -- Congresses
Genres: Congresses.
Other titles: GADEST 2001; Gettering and defect engineering in semiconductor technology
Notes: Includes bibliographical references and index.