Optical/laser microlithography V
Subtitle: 11-13 March 1992, San Jose, California
By: John D. Cuthbert, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Cuthbert, John D.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings -- . 1674; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1674.
Publisher: SPIE--the International Society for Optical Engineering
Published: 1992
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 907
Subjects: Lasers -- Industrial applications -- Congresses.; Microlithography -- Congresses.; Optical instruments -- Congresses.
Other titles: Optical laser microlithography 5
Notes: Includes bibliographical references and index.