Optical/laser microlithography
Subtitle: 3-5 March 1993, San Jose, California
By: John D. Cuthbert, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Cuthbert, John D.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineerng -- v. 1927.; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1927.
Publisher: SPIE--the International Society for Optical Engineering
Published: 1993
Place of publication: Bellingham, WA
Language: eng
Number of pages: 933
Subjects: Lasers -- Industrial applications -- Congresses.; Optical instruments -- Congresses.; Microlithography -- Congresses.
Other titles: Optical/laser microlithography VI.
Notes: Spine title: Optical/laser microlithography VI.

Includes bibliographical references and index.