Multi-wafer rotating MEMS machines
Subtitle: turbines, generators, and engines
By: Jeffrey H. Lang, editor
Series: MEMS reference shelf; MEMS reference shelf
Publisher: Springer
Published: 2009
Place of publication: New York; London
Language: eng
Number of pages: 456
ISBN-13: 9780387777467
Subjects: Microelectromechanical systems; Turbomachines
Notes: Includes bibliographical references and index.