Handbook of surface and nanometrology
By: by David J. Whitehouse
Contributors: Whitehouse, D. J. (David J.).
Edition: 2nd ed.
Publisher: CRC Press
Published: 2011
Place of publication: Boca Raton
Language: eng
Number of pages: 975
ISBN-13: 9781420082012
Subjects: Surfaces (Technology); Measurement
Notes: Rev. ed. of: Handbook of surface metrology. c1994.

Includes bibliographical references and index.