Metallic structures with reduced dimensions
By: Johannes Romijn
Contributors: Technische Universiteit Delft
Publisher: [s.n.]
Published: 1991
Place of publication: [s.l.]
Language: eng; dut
Number of pages: 136
Subjects: Electron beam Lithography; Microelectronics; Thin films
Notes: Thesis (doctoral)--Technische Universiteit Delft, 1991.

Includes bibliographical references.