Investigation of refractory dielectrics for integrated circuits
By: by V. Y. Doo and D. R. Kerr.
Contributors: Kerr, D. R., joint author.; International Business Machines Corp.; Electronics Research Center (U.S.)
Series: NASA CR-955; NASA contract report ;; NASA CR-955.
Publisher: National Aeronautics and Space Administration; for sale by the Clearinghouse for Federal Scientific and Technical Information, Springfield, Va.
Published: 1968
Place of publication: [Washington]
Language: eng
Number of pages: 73
Subjects: Silicon nitride.; Dielectrics.; Integrated circuits.
Notes: Bibliography: p. 69.
Prepared by International Business Machines Corp., Cambridge, Mass. for Electronics Research Center.