10 years of teaching and research, 5 years of clean room operation
Subtitle: report 1991-2001
By: S. Büttgenbach (editor).
Contributors: Büttgenbach, S. 1945-
Series: Berichte aus der Mikro- und Feinwerktechnik -- Bd. 7
Publisher: Shaker
Published: 2002
Place of publication: Aachen
Language: eng
Number of pages: 97
Subjects: Technische Universität Braunschweig. -- Institut für Mikrotechnik.; Microelectronics -- Research.; Clean rooms.
Notes: Includes bibliographical references (p. 81-95).