Si Front-End Processing-Physics and Technology of Dopant-Defect Interactions II: Physics and Technology of Dopant-Defect Interactions II 
Subtitle: Symposium Held ... Research Society Symposium Proceedings)
Contributors: Aditya Agarwal (Editor); L. Pelaz (Editor); H-H Vuong (Editor); P. Packan (Editor); M. Kase (Editor)
Publisher: Materials Research Society
Published: July 2000
Language: eng
Format: Hardcover
Number of pages: 416
ISBN-13: 9781558995185
Subjects: Semiconductor doping; Technology; Electronics - Semiconductors; Semiconductors; Technology & Industrial Arts; Silicon; Science/Mathematics; Congresses; Design and construction