MEMS reliability for critical applications
Subtitle: 20 September 2000, Santa Clara, USA
By: Russell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Contributors: Lawton, Russell A.
Series: SPIE proceedings series,; v. 4180; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4180.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 146
Subjects: Microelectromechanical systems -- Reliability -- Congresses.
Genres: Congresses.
Other titles: Microelectromechanical systems reliability for critical applications
Notes: Includes bibliographical references and index.