Epitaxy
Subtitle: Physical Principles and Technical Implementation
By: by Marian A. Herman, Wolfgang Richter, Helmut Sitter
Contributors: Richter, Wolfgang; Sitter, Helmut
Series: Springer Series in MATERIALS SCIENCE -- 62; Springer Series in MATERIALS SCIENCE -- 62
Publisher: Springer Berlin Heidelberg
Published: 2004
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] :
Number of pages: 525
ISBN-13: 9783642087370; 9783662070642
Subjects: Chemical engineering; Physical organic chemistry; Surfaces (Physics); Crystallography; Physics; Optical materials
Description: Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy's coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization. It is intended for undergraduate students, PhD students, research scientists, lecturers and practicing engineers interested in materials science, solid state electronics and crystal growth.
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Table of contents: title: Introduction; title: Homo- and Heteroepitaxial Crystallization Phenomena; title: Application Areas of Epitaxially Grown Layer Structures; title: Solid Phase Epitaxy; title: Liquid Phase Epitaxy; title: Vapour Phase Epitaxy; title: Molecular Beam Epitaxy; title: Metal Organic Vapour Phase Epitaxy; title: In-situ Analysis of Species and Transport; title: In-situ Surface Analysis; title: Thermodynamic Aspects; title: Atomic Aspects; title: Quantum Mechanical Aspects; title: Heteroepitaxy: Growth Phenomena; title: Material-Related Problems of Heteroepitaxy; title: Closing Remarks.