International Conference on Micro- and Nano-Electronics, 2009
Subtitle: 5-9 October 2009, Zvenigorod, Russian Federation
By: Kamil A. Valiev, Alexander A. Orlikovsky, editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences (Russian Federation) ; sponsored by Russian Academy of Sciences (Russian Federation) ... [et al.].
Contributors: Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich); Valiev, Kamilʹ Akhmetovich; Fiziko-tekhnologicheskiĭ institut (Rossiĭskai︠a︡ akademii︠a︡ nauk); Rossiĭskai︠a︡ akademii︠a︡ nauk; SPIE (Society)
Series: Proceedings of SPIE -- v. 7521
Publisher: SPIE
Published: 2010
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819479112
Subjects: Nanoelectronics; Congresses; Microelectronics
Other titles: ICMNE 2009
Notes: Includes bibliographical references and index.