Lazernai͡a︡ obrabotka plenochnykh ėlementov
By: V.P. Veĭko.
Publisher: "Mashinostroenie," Leningradskoe otd-nie
Published: 1986
Place of publication: Leningrad
Language: rus
Number of pages: 247
Subjects: Laser beam cutting.; Integrated circuits -- Design and construction.
Notes: Bibliography: p. 239-[246]