Micromachining and microfabrication process technology XV
Subtitle: 26 January 2010, San Francisco, California, United States
By: Mary Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored and published by SPIE
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 7590; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7590.
Publisher: SPIE
Published: 2010
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819479860
Other titles: Micromachining and microfabrication process technology 15; Micromachining and microfabrication process technology fifteen
Notes: Includes bibliographical references.