Occupational exposure characterization of vacuum pump maintenance technicians in a semiconductor manufacturing environment
By: by Deborah Elaine Buser.
Published: 1997
Language: eng
Number of pages: 74
Subjects: Vacuum pumps -- Maintenance and repair -- Health aspects.; Semiconductor industry -- Employees -- Health and hygiene.
Notes: Typescript (photocopy)

Thesis (M.S.)--Oregon State University, 1997.

Includes bibliographical references (leaves 57-59).