MEMS
Subtitle: A Practical Guide to Design, Analysis, and Applications
Contributors: Jan G. Korvink (Editor); Oliver Paul (Editor)
Publisher: William Andrew Publishing
Published: November 14, 2005
Language: eng
Format: Hardcover
Number of pages: 900
ISBN-13: 9780815514978
Subjects: Technology & Industrial Arts; Science/Mathematics; Engineering - Electrical & Electronic; Technology; Electronics - Microelectronics; Electronics - Semiconductors; Technology / Electronics / Semiconductors; Reference; Microelectromechanical systems
First sentence: Rooted in mechanical, electrical, and chemical engineering and relying on physical insight, biological techniques, and materials science know-how, microelectromechanical systems (MEMS) engineering is a fundamentally interdisciplinary field.