Proceedings of the 34th National Symposium of the American Vacuum Society, 2-6 November 1987, Hilton Hotel ... Anaheim, California.
Series: Journal of vacuum science and technology A -- vol.6, no.3
Publisher: American Institute of Physics for the American Vacuum Society
Published: 1988
Place of publication: Woodbury, NY
Language: eng
Table of contents: value: Part 1 contents: Surface science, applied surface science, vacuum technology.; value: Part 2 contents: Electronic materials, thin films, plasma science, vacuum metallurgy, joint sessions.