Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York
By: special editors for the proceesings, Roger Kelly and J.J. Cuomo ; program committee, J.J. Cuomo ... [et al.] ; workshop aids, V.A. Fastiggi, R.J. Cuomo, and S.M. Kelly.
Contributors: Kelly, Roger.; Cuomo, J. J.
Publisher: Published for the American Vacuum Society by the American Institute of Physics
Published: 1982
Place of publication: New York
Language: eng
Number of pages: 815
Subjects: Plasma engineering -- Congresses.; Sputtering (Physics) -- Congresses.; Ion implantation -- Congresses.
Notes: Includes bibliographical references and index.
"Also published in the 1982 September/October issue of the Journal of vacuum science and technology, vol. 21, no. 3"--T.p. verso.