Semiconductors for micro- and nanotechnology
Subtitle: an introduction for engineers
By: Jan G. Korvink and Andreas Greiner.
Contributors: Greiner, Andreas.
Publisher: Wiley-VCH
Published: 2002
Place of publication: Weinheim
Language: eng
Number of pages: 340
Subjects: Semiconductors -- Textbooks.; Nanotechnology -- Mathematics -- Textbooks.; Microtechnology -- Mathematics -- Textbooks.
Genres: Textbooks.
Notes: Includes bibliographical references and index.