Semiconductor devices, physics and technology
By: S.M. Sze.
Publisher: Wiley; John Wiley & Sons Inc
Published: 1985
Place of publication: New York
Language: eng
Number of pages: 523
Subjects: Semiconductors.
Description: "This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices."--Publisher's description.
Notes: Includes bibliographies and index.