Kijun ninshō kenkyū kaihatsu jigyō.
Contributors: Japan. Keizai Sangyōshō.; Sangyō Gijutsu Sōgō Kenkyūjo.
Publisher: Sangyō Gijutsu Sōgō Kenkyūjo
Published: 2008
Place of publication: [Ibaraki-ken Tsukuba-shi]
Language: jpn
Number of pages: 205
Subjects: Thin films
Other titles: Yūki hakumaku no kōseido sosei bunseki no tame no hyōjunka
Notes: Cover title.

"Heisei 19-nendo Keizai Sangyōshō itaku jigyō seika"

Includes bibliographical references.