Atomic layer deposition applications 3
By: editors, A. Londergan ... [et al.].
Contributors: Londergan, A.; Electrochemical Society. Meeting.; Electrochemical Society. Dielectric Science and Technology Division.
Series: ECS transactions -- vol. 11, no.7
Publisher: Electrochemical Society
Published: 2007
Place of publication: Pennington, NJ
Language: eng
Number of pages: 288
ISBN-13: 9781566775731
Subjects: Chemical vapor deposition -- Congresses; Vapor-plating -- Congresses
Genres: Congresses
Notes: "Third Symposium on Atomic Layer Deposition Applications was held on October 8 and 9, 2007 in the Hilton Washington, Washington, DC as part of the 212th meeting of the Electrochemical Society"--P. iii.

"Dielectric and semiconductor materials, devices, and processing"--Cover.

Includes bibliographical references and index.