Characterization and Metrology for ULSI Technology 2005 (AIP Conference Proceedings / Materials Physics and Applications)
Contributors: David G. Seiler (Editor); Alain C. Diebold (Editor); Robert McDonald (Editor); Caroline R. Ayre (Editor); Rajinder P. Khosla (Editor); Stefan Zollner (Editor); Erik M. Secula (Editor)
Edition: 1 edition
Publisher: American Institute of Physics
Published: September 29, 2005
Language: eng
Format: Hardcover
Number of pages: 667
ISBN-13: 9780735402775
Subjects: Circuits & components; Science; Computers - General Information; Weights & Measures; Logic Design; Science/Mathematics; General; Electronics - General; Engineering - Electrical & Electronic; Semiconductor manufacturing; Technology / Mensuration; analytical techniques; measuring techniques; metrology; process control; quality control; silicon research