Laser-assisted microtechnology
By: Simeon M. Metev, Vadim P. Veiko.
Contributors: Veiko, V. P.
Series: Springer series in materials science ;; 19; Springer series in materials science ;; v. 19.
Publisher: Springer-Verlag
Published: 1994
Place of publication: Berlin; New York
Language: eng
Number of pages: 240
Subjects: Electronic industries -- Technological innovations.; Lasers -- Industrial applications.; Manufacturing processes.; Electronic circuit design.; Thin film devices -- Design and construction.
Notes: Includes bibliographical references (p. 221-238) and index.