Micromachined devices and components II
Subtitle: 14-15 October 1996, Austin, Texas
By: Kevin Chau, Ray M. Roop, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute for Standards and Technology.
Contributors: Chau, Kevin.; Roop, Ray M.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; National Institute of Standards and Technology (U.S.)
Series: Proceedings / SPIE--the International Society of Optical Engineering ; v. 2882; Proceedings of SPIE--the International Society for OPtical Engineering ;; v. 2882.
Publisher: SPIE
Published: 1996
Place of publication: Bellingham, WA
Language: eng
Number of pages: 340
Subjects: Microelectromechanical systems -- Congresses.; Micromachining -- Congresses.
Other titles: Micromachined devices and components 2; Micromachined devices and components two
Notes: Includes bibliographical references and index.