Role of boundary conditions in Monte Carlo simulation of MEMS devices
By: Robert P. Nance, David B. Hash, H.A. Hassan.
Contributors: Hash, David B.; Hassan, H. A.; United States. National Aeronautics and Space Administration.
Series: [NASA contractor report] -- NASA-CR-205107.; NASA contractor report -- NASA CR-205107.
Publisher: American Institute of Aeronautics and Astronautics; [National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1997
Place of publication: Washington, D.C; Springfield, Va
Language: eng
Format: Microform
Subjects: Boundary conditions.; Monte Carlo method.; Microchannels.; Subsonic flow.
Notes: Shipping list no.: 98-0283-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.