Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
By: Carol F. Vezzetti, Ruth N. Varner, James E. Potzick
Contributors: Varner, Ruth N; Potzick, James E; National Institute of Standards and Technology (U.S.)
Series: Standard reference materials; NIST special publication -- 260-117
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; Order from National Technical Information Service]
Published: 1992
Place of publication: Gaithersburg, MD; [Springfield, VA
Language: eng
Format: Microform
Number of pages: 37
Subjects: Integrated circuits -- Calibration -- Standards; Microscopes -- Calibration -- Standards; Optical measurements -- Standards
Other titles: Antireflecting chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
Notes: Distributed to depository libraries in microfiche

Shipping list no.: 92-2096-M

Paper version no longer for sale by the Supt. of Docs

"Issued January 1992."

Includes bibliographical references

Final

Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1992] 1 microfiche : negative

s 1992 dcu n b