Fundamentals of Microfabrication
Subtitle: The Science of Miniaturization, Second Edition
Edition: 2 edition
Publisher: CRC
Published: March 13, 2002
Language: eng
Format: Hardcover
Number of pages: 752
ISBN-13: 9780849308260
Subjects: Electronic devices & materials; Technology; Lasers; Laser Technology; Microelectronics; Technology & Industrial Arts; Science/Mathematics; Machining; Electronics - Microelectronics; Engineering - Electrical & Electronic; Engineering - Mechanical; Technology / Electronics / Microelectronics; Design and construction; Integrated circuits; Microelectromechanical systems