CMOS front-end materials and process technology
Subtitle: symposium held April 22-24, 2003, San Francisco, California, U.S.A.
By: editors, Tsu-Jae King ... [et al.].
Contributors: King, Tsu-Jae.; Materials Research Society. Meeting; Symposium on CMOS Front-End Materials and Process Technology (2003 : San Francisco, Calif.)
Series: Materials Research Society symposium proceedings ;; v. 765; Materials Research Society symposia proceedings ;; v. 765.
Publisher: Materials Research Society
Published: 2003
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 308
Subjects: Metal oxide semiconductors -- Materials -- Congresses.; Metal oxide semiconductors, Complementary -- Materials -- Congresses.; Nanostructured materials -- Congresses.; Gate array circuits -- Materials -- Congresses.; Dielectrics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"... proceedings from Symposium D, 'CMOS Front-End Materials and Process Technology,' held April 22-24 at the 2003 MRS Spring Meeting in San Francisco, California ..."--p. xi.