Diffractometry and scatterometry
Subtitle: 24-28 May 1993, Warsaw, Poland
By: Maksymilian Pluta, Mariusz Szyjer, chairs/editors ; organized by SPIE Poland Chapter [and] Institute of Applied Optics, Warsaw ; sponsored by SPIE--the International Society for Optical Engineering [and] State Committee for Scientific Research (Poland).
Contributors: Pluta, Maksymilian.; Szyjer, Mariusz.; Society of Photo-optical Instrumentation Engineers. Poland Chapter.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1991; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1991.
Publisher: SPIE
Published: 1994
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 268
Subjects: Diffraction -- Congresses.; Optical instruments -- Design and construction -- Congresses.
Notes: Includes bibliographical references and index.