An introduction to microelectromechanical systems engineering
By: Nadim Maluf
Series: Artech House MEMS library
Publisher: Artech House
Published: 2000
Place of publication: Boston
Language: eng
Number of pages: 265
Subjects: Microelectromechanical systems
Description: "Here's a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describes in detail the materials used in producing MEMS - including silicon, polymers, and glass and quartz substrates - as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications."--BOOK JACKET.
Notes: Includes bibliographical references and index