Fiziko-khimii͡a︡ materialov i prot͡s︡essov v mikroėlektronike
Subtitle: sbornik nauchnykh trudov
By: [redakt͡s︡ionnai͡a︡ kollegii͡a︡ I͡A︡.A. Ugaĭ (otv. redaktor) ... et al.].
Contributors: Ugaĭ, I͡A︡. A.; Voronezhskiĭ gosudarstvennyĭ universitet imeni Leninskogo komsomola.
Publisher: Izd-vo Voronezhskogo universiteta
Published: 1989
Place of publication: Voronezh
Language: rus
Number of pages: 196
Subjects: Microelectronics.
Notes: Includes bibliographical references.
At head of title: Voronezhskiĭ ordena Lenina gosudarstvennyĭ universitet im. Leninskogo komsomola.