Nano- i mikrosistemnai︠a︡ tekhnika
Subtitle: ot issledovaniĭ k razrabotkam : sbornik stateĭ
By: pod red. P.P. Malʹt︠s︡eva
Series: Mir ėlektroniki
Publisher: Tekhnosfera
Published: 2005
Place of publication: Moskva
Language: rus
Number of pages: 589