Polycrystalline silicon for integrated circuit applications
By: by Ted Kamins.
Series: Kluwer international series in engineering and computer science ;; SECS 45
Publisher: Kluwer Academic Publishers
Published: 1988
Place of publication: Boston
Language: eng
Number of pages: 290
Subjects: Integrated circuits -- Materials.; Silicon -- Electric properties.
Notes: Bibliography: p. 249-280.
Includes index.