Notes on SEM examination of microelectronic devices
By: John R. Devaney, K. O. Leedy, and W. J. Keery.
Contributors: Leedy, Kathryn O., joint author.; Keery, W. J., joint author.
Series: Semiconductor measurement technology; NBS special publication ; 400-35; NBS special publication ;; 400-35.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.
Published: 1977
Place of publication: Washington
Language: eng
Number of pages: 48
Subjects: Miniature electronic equipment -- Testing.; Semiconductors -- Testing.; Scanning electron microscopy.
Notes: Includes bibliographical references.