Growth, microstructure and mechanical properties of Ti and TiN thin films, and TiN-based superlattices
By: Henrik Ljungcrantz
Contributors: Universitetet i Linköping. Department of Physics and Measurement Technology; Universitetet i Linköping
Publisher: Department of Physics and Measurement Technology, Linköping University
Published: 1995
Place of publication: Linköping
Language: eng
Number of pages: 162
Notes: Thesis (doctoral)--Linköping University, 1995.