Photon, beam, and plasma stimulated chemical processes at surfaces
Subtitle: symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
By: editors, Vincent M. Donnelly, Irving P. Herman, Masataka Hirose.
Contributors: Donnelly, Vincent M.; Herman, Irving P.; Hirose, Masataka.; Materials Research Society.
Series: Materials Research Society symposia proceedings,; v. 75
Publisher: Materials Research Society; Cambridge University Press
Published: 1987
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 826
Subjects: Materials -- Effect of radiation on -- Congresses.; Surface chemistry -- Congresses.; Lasers -- Industrial applications -- Congresses.; Photon beams -- Industrial applications -- Congresses.; Plasma etching -- Congresses.
Notes: Includes bibliographies and indexes.