Patterning Science and Technology II and Interconnection and Contact Metallization for Ulsi (Proceedings / Electrochemical Society)
Publisher: Electrochemical Society
Published: March 1992
Language: eng
Format: Hardcover
Number of pages: 382
ISBN-13: 9781566770071
Subjects: Science/Mathematics; Congresses; Design and construction; Integrated circuits; Lithography; Microelectronic packaging; Ultra large scale integration