1994 Semiconductor Manufacturing Technology Workshop
Subtitle: Apr. 18-19, 1994, Hsinchu, Taiwan, R.O.C.
By: [organized by] IEEE Electron Devices Society Taipei Chapter
Contributors: Lu, C. Y.; Gong ye ji shu yan jiu yuan; IEEE Electron Devices Society. Taipei Chapter
Publisher: ERSO, ITRI
Published: 1994
Place of publication: Hsinchu, Taiwan]
Language: eng; chi
Number of pages: 347
Subjects: Semiconductor industry; Congresses; Semiconductors; Design and construction; Process control; Semiconductor storage devices; Miniature electronic equipment; Factory management; Production control
Other titles: Nineteen ninety-four Semiconductor Manufacturing Technology Workshop.; 1994 SMT Workshop.; Nineteen ninety-four SMT Workshop.
Notes: Title page and cover in Chinese and English.

Jointly organized by the Electronics Research and Service Organization of Industrial Technology Research Institute (ESRO/ITRI) and the IEEE Electron Devices Society Taipei Chapter. Cf. Pref.

Pref. signed: C.Y. Lu, workshop chairman.

Includes bibliographical references (p. 139).
Table of contents: title: Preface; title: Symposium agenda; title: Symposium organization; title: pt. 1. DRAM manufacturing (keynote speech) / Alex Cheng. Deep submicron MOSFET modeling for manufacturing (keynote speech) / Kwyro Lee. Process control and quality enhancement system for microelectronics fabrication process / Albert Hu. Activity-based costing study : a case study for IC testing shop / Yang Chang and Rong-Kwei Li. Semiconductor IC packaging trend / Charles Chiou. Experience of SPC and quality plan through a Ford Q1 program / C.D. Lee and N.S. Tsai. Materials handling automation technology / T.M. Tseng. Experience on fab. automation in TSMC / C.H. Hung and Constance Chu; title: pt. 2.  Sub-quarter micron ULSI device design considerations (keynote speech) / Hee Gook Lee. Consideration for manufacturing control systems (keynote speech) / Faa-Ching Wang. Plasma diagnostics and processing in ULSI oxide etch / Hongching Shan. Step-by-step implementation of integrated production control and planning of; title: wafer fab. / Richard Hwang. Scheduling and on-line delivery system in a semiconductor manufacturing shop floor / Shou-Yi Cheng, Min-Da Tsai,Chih-Lung Shen, and Chun-Yuan Cheng. A daily scheduling tool for semiconductor manufacturing / Chin-Fang Hung, Kuo-Wei Pei, Chiou-Ming Tsai, Cheng-Chung Chien,Da-Yin Liao, and Shi-Chung Chang. The development of TPM in the first 8" wafer pilot line in Taiwan / David Liu, Jer-Ming Yang, Jong-Yeng Lin, and Bob Hsiaopin Tseng. Particle and contamination control in DRAM manufacturing / Bernard Cheng and Frank Lee.