Micromachining and microfabrication process technology VI
Subtitle: 18-20 September 2000, Santa Clara, USA
By: Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Contributors: Karam, Jean-Michel.; Yasaitis, John.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series ;; v. 4174; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4174.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 524
Subjects: Micromachining -- Congresses.; Microfabrication -- Congresses.; Electromechanical devices -- Design and construction -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.