SiO2 in Si Microdevices
Edition: 1 edition
Publisher: Springer
Published: January 17, 2003
Language: eng
Format: Hardcover
Number of pages: 334
ISBN-13: 9783540433392
Subjects: Circuits & components; Materials science; Semi-conductors & super-conductors; Semiconductors; Integrated circuits; Technology; Very-Large-Scale Integration (Vlsi); Computers - General Information; Science/Mathematics; Nanostructures; Logic Design; Engineering - Electrical & Electronic; General; Computers / Logic Design; Gate oxides; Medical : General; Oxide defects; Si-Si02 interface; Very large scale integration; Silica; Electronics - Circuits - VLSI; Electronics - Semiconductors; Design and construction; Materials