Materials science of microelectromechanical systems (MEMS) devices III
By: editors, Harold Kahn ... [et al.].
Contributors: Kahn, Harold.
Series: Materials Research Society symposium proceedings -- v. 657; Materials Research Society symposia proceedings -- v. 657.
Publisher: Materials Research Society
Published: 2001
Place of publication: Warrendale, Pa
Language: eng
Subjects: Microelectromechanical systems -- Materials -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.