Euro CVD five
Subtitle: proceedings of the Fifth European Conference on Chemical Vapour Deposition, June 17-20, 1985, Uppsala, Sweden
By: edited by J.-O. Carlsson, J. Lindström
Contributors: Carlsson, J.-O. (Jan-Otto); Lindström, J. (Jan)
Publisher: Uppsala University, Dept. of Chemistry
Published: 1985
Place of publication: Uppsala, Sweden
Language: eng
Number of pages: 552
Subjects: Vapor-plating; Congresses; Thin films; Semiconductors