Gallium arsenide micromechanics
By: Klas Hjort
Contributors: Uppsala universitet
Series: Comprehensive summaries of Uppsala dissertations from the Faculty of Science -- 465; Acta Universitatis Upsaliensis -- 465
Publisher: Acta Universitatis Upsaliensis
Published: 1993
Place of publication: Uppsala
Language: eng
Subjects: Gallium arsenide; Micromechanics
Other titles: Gallium arsenide as a mechanical material.; Micromachining of gallium arsenide and related compounds.; Bulk and surface micromachining of GaAs.; Epitaxial regrowth in surface micromachining of GaAs.; GaAs low temperature fusion bonding.; Hardness and fracture toughness of AlxGa1-xAs.; Micromechanical fracture strength of semi-insulating GaAs.; Micro scribes in semi-insulating GaAs studied by cross-sectional TEM.; Flexural vibrations in piezoelectric semi-insulating GaAs.; Piezoelectric effect of GaAs used for resonant sensors and actuators.
Notes: Thesis (doctoral)--Uppsala University, 1993.

Includes bibliographical references.
Table of contents: title: A. Gallium arsenide as a mechanical material / K. Hjort, J. Söderkvist and J.-Å. Schweitz; title: B. Micromachining of gallium asenide [sic] and related compounds / B. Hök and K. Hjort; title: 1. Bulk and surface micromachining of GaAs / K. Hjort, B. Hök and J.-Å. Schweitz; title: 2. Epitaxial regrowth in surface micromachining of GaAs / K. Hjort ... [et al.); title: 3. GaAs low temperature fusion bonding / K. Hjort ... [et al.]; title: 4. Hardness and fracture toughness of Al[x]Ga[1-x]As / K. Hjort ... [et al.]; title: 5. Micromechanical fracture strength of semi-insulating GaAs / K. Hjort, F. Ericson and J.-Å. Schweitz; title: 6. Micro scribes in semi-insulating GaAs studied by cross-sectional TEM / F. Ericson ... [et al.]; title: 7. Flexural vibrations in piezoelectric semi-insulating GaAs / J. Söderkvist and K. Hjort; title: 8. The piezoelectric effect of GaAs used for resonant sensors and actuators / K. Hjort and J. Söderkvist.