Reliability, testing, and characterization of MEMS/MOEMS
Subtitle: 22-24 October 2001, San Francisco, USA
By: Rajeshuni Ramesham, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.].
Contributors: Ramesham, Rajeshuni.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: SPIE proceedings series ;; v. 4558; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4558.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 296
Subjects: Microelectromechanical systems -- Reliability -- Congresses.; Microelectromechanical systems -- Testing -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.