Ion Sources
Contributors: Jianrong Zhang (Editor)
Edition: 1 edition
Publisher: Springer
Published: December 10, 1999
Language: eng
Format: Hardcover
Number of pages: 476
ISBN-13: 9783540657477
Subjects: Electronic devices & materials; Industrial applications of scientific research & technological innovation; Particle & high-energy physics; States of matter; Science/Mathematics; Electricity; Science; Nuclear Physics; Physics; Science / Nuclear Physics; Science-Physics; Ion sources
Description: "Ion beam techniques have become a basic technology in the sciences and device manufacturing. For the efficient use of these techniques the appropriate choice, design and operation of ion source is important. This book deals with the fundamental knowledge regarding the gas discharge, extraction system, space-charge self-neutralization, and principles for producing various ions and determining the mass and energy spectra of the sources.

The book is intended for researchers, technicians and university students."--BOOK JACKET.