Silicon nitride and silicon dioxide thin insulating films VII
Subtitle: proceedings of the international symposium
By: editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielectric Science and Technology, Electronics.
Contributors: Sah, R. E.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting
Series: Proceedings ;; v. 2003-02; Proceedings (Electrochemical Society) ;; v. 2003-02.
Publisher: Electrochemical Society
Published: 2003
Place of publication: Pennington, NJ
Language: eng
Number of pages: 636
Subjects: Thin film devices -- Congresses.; Silicon nitride -- Congresses.; Silica -- Congresses.; Electric insulators and insulation -- Thin films -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films to be held April 28-May 2, 2003 in Paris"--Pref.