In-situ patterning
Subtitle: selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
By: editors, Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg.
Contributors: Bernhardt, Anthony.; Black, Jerry G.; Rosenberg, R.
Series: Materials Research Society symposium proceedings ;; v. 158; Materials Research Society symposia proceedings ;; v. 158.
Publisher: Materials Research Society
Published: 1990
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 496
Subjects: Semiconductors -- Etching -- Congresses.; Semiconductor doping -- Congresses.; Lasers -- Industrial applications -- Congresses.; Plasma etching -- Congresses.
Notes: Includes bibliographical references and indexes.