Chō LSI jidai no purazuma kagaku
By: "Denshi Zairyō" Henshūbu hen.
Contributors: Kōgyō Chōsakai. "Denshi Zairyō" Henshūbu.
Edition: Shohan.
Publisher: Kōgyō Chōsakai
Published: 1983
Place of publication: Tōkyō
Language: jpn
Number of pages: 213
Subjects: Plasma chemistry.
Other titles: Chō L.S.I. jidai no purazuma kagaku.
Notes: Includes bibliographies and indexes.