Micromachining and microfabrication process technology and devices
Subtitle: 7-9 November 2001, Nanjing, China
By: Norman C. Tien, Qing-An Huang, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU--Southeast University (China), [and] COEMA--China Optics and Optoelectronics Manufacturers Association ; cooperating organizations, Electronic Society, Jiangsu Province (China) [and] Laser and Optical Engineering Society, Jiangsu Province (China).
Contributors: Tien, Norman C.
Series: SPIE proceedings series,; v. 4601; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4601.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 440
Subjects: Micromachining -- Congresses.; Microfabrication -- Congresses.; Electromechanical devices -- Design and construction -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.