LSI process development
By: by D. W. Clements
Contributors: Bendix Corporation. Kansas City Division. Communications Services; United States. Dept. of Energy
Series: BDX ; 613-2138 (Rev.)
Publisher: Dept. of Energy; for sale by the National Technical Information Service]
Published: 1979
Place of publication: [Washington; Springfield, Va
Language: eng
Number of pages: 25
Subjects: Integrated circuits; Manufacturing processes
Notes: Prepared for the U.S. Dept. of Energy under contract no. DE-AC04-76-DP00613

"Communications Services, Bendix, Kansas City Division."

Final report, June 1979