The Capabilities and limitations of auger sputter profiling for studies of semiconductors
By: S.A Schwarz ... [et al.] ; sponsored by the Defense Advanced Research Projects Agency.
Contributors: Schwarz, S. A.; United States. Defense Advanced Research Projects Agency.; United States. National Bureau of Standards.
Series: NBS special publication :; 400-67; Semiconductor measurement technology
Publisher: U.S. Dept. of Commerce, National Bureau of Standards
Published: 1981
Place of publication: Washington, D.C
Language: eng
Number of pages: 46
Subjects: Semiconductors -- Testing; Electron spectroscopy; Sputtering (Physics)
Notes: Includes bibliographical references.
"Issued September 1981."
Item 247 (microfiche)