The MEMS handbook
By: edited by Mohamed Gad-el-Hak.
Contributors: Gad-el-Hak, Mohamed, 1945-
Series: Mechanical engineering; Mechanical engineering series (Boca Raton, Fla.)
Publisher: Taylor&Francis
Published: 2005
Place of publication: Boca Raton, FL
Language: eng
Subjects: Microelectromechanical systems -- Handbooks, manuals, etc
Genres: Handbooks, manuals, etc.