Ėlektronno-mikroskopicheskoe issledovanie struktury i fazovogo sostava tonkikh plenok, poluchennykh lazerno-khimicheskim osazhdeniem ...
Subtitle: preprint
By: V.V. Aristov ... [et al.]
Contributors: Institut problem tekhnologii mikroėlektroniki i osobochistykh materialov (Akademii͡a nauk SSSR)
Published: 1988
Place of publication: Chernogolovka
Language: rus
Number of pages: 15
Notes: Cover title.

At head of title: Akademii͡a nauk SSSR. Institut problem teknologii mikroėlektroniki i osobochistykh materialov.

Includes bibliographical references (p. 15-16)