Micro- and nanotechnology sensors, systems, and applications III
Subtitle: 25-29 April 2011, Orlando, Florida, United States
By: Thomas George, M. Saif Islam, Achyut K. Dutta, editors ; sponsored and published by SPIE
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 8031; Proceedings of SPIE--the International Society for Optical Engineering -- v. 8031.
Publisher: SPIE
Published: 2011
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819486059
Subjects: Microelectromechanical systems; Congresses; Nanophotonics; Nanoelectromechanical systems; Nanoelectronics; Nanotechnology
Notes: Includes bibliographical references and index.