Proceedings of ISSM2000
Subtitle: the Ninth [IEEE] International Symposium on Semiconductor Manufacturing : September 26-28, 2000, Hotel East 21 Tokyo, Tokyo, Japan
By: sponsored by, UCS, IEEE EDS, SEMI ... [et al.].
Contributors: Ultra Clean Society.; IEEE Electron Devices Society.; Semiconductor Equipment and Materials International.
Publisher: IEEE; Ultra Clean Society
Published: 2000
Place of publication: [Piscataway, New Jersey]; Tokyo, Japan
Language: eng
Number of pages: 449
Subjects: Electronic industries -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Computer integrated manufacturing systems -- Congresses.
Genres: Congresses.
Other titles: International Symposium on Semiconductor Manufacturing.; ISSM2000.
Notes: "IEEE CATALOG NUMBER: 00CH37130"--verso of T.p.

Includes bibliographic references.

English with some material in Japanese.