Zhidkofaznai͡a︡ ėpitaksii͡a︡ kremnii͡a︡
By: [L.V. Kozhitov ... et al.].
Contributors: Kozhitov, L. V.
Publisher: "Metallurgii͡a︡"
Published: 1989
Place of publication: Moskva
Language: rus
Number of pages: 200
Subjects: Semiconductors -- Design and construction.; Silicon crystals -- Growth.; Epitaxy.; Silicon-on-insulator technology.
Notes: Includes bibliographical references (p. 195-p. 3 of cover).