Advanced applications of ion implantation
Subtitle: January 23-25, 1985, Los Angeles, California
By: Michael I. Current, Devendra K. Sadana, chairmen/editors.
Contributors: Current, Michael I.; Sadana, Devendra K.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 530
Publisher: SPIE--the International Society for Optical Engineering
Published: 1985
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 263
Subjects: Ion implantation -- Congresses.; Semiconductor doping -- Congresses.
Notes: Includes bibliographies.
Papers presented at a conference held at the January 1985 SPIE meeting.