The electrical activity of defects created in silicon single crystals during ion implantation
By: by Åke Andersson
Series: Chalmers tekniska högskola. Doktorsavhandlingar; Doktorsavhandlingar vid Chalmers tekniska högskola
Published: 1974
Place of publication: Göteborg
Language: eng
Number of pages: 78
Subjects: Crystals; Effect of radiation on; Silicon crystals; Ion implantation
Notes: Photocopy. 1974. -- 30 cm.

Thesis (doctoral)--Chalmers University of Technology.

Includes bibliographical references.