Perspectives, Science and Technologies for Novel Silicon on Insulator Devices
By: edited by Peter L.F. Hemment, V.S. Lysenko, A.N. Nazarov
Contributors: Lysenko, V. S.; Nazarov, A. N.
Series: NATO Science Series, Series 3. High Technology, 1388-6576 -- 73; NATO science series -- 73.
Publisher: Springer Netherlands; Imprint; Springer
Published: 2000
Place of publication: Dordrecht
Language: eng
Format: [electronic resource] /
Number of pages: 368
ISBN-13: 9789401142618
Other titles: Proceedings of the NATO Advanced Research Workshop, Kiev, Ukraine, 12-15 October 1998
Description: This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI and related materials into circuits and systems to consideration of low temperature electronics, quantum devices and MEMS. <br/> <em>Readership:</em> Postgraduate and professional engineers and researchers in the major silicon manufacturing companies, universities and research institutes.