Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon
Subtitle: low cost silicon array project.
Contributors: Breneman, W. C.; Farrier, E. G.; Morihara, Hiroshi.; United States. Dept. of Energy.
Series: DOE/JPL ; 954334-8
Publisher: Dept. of Energy; for sale by the National Technical Information Service
Published: 1979
Place of publication: [Washington]; Springfield, Va
Language: eng
Subjects: Silane.; Silicon.; Semiconductors.
Notes: Authors: W. C. Breneman, E. G. Farrier, H. Morihara.

Contract no. NAS-7-100-954334.

Includes bibliographical references.
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