SemiConductor Wafer Bonding
Subtitle: Science and Technology
Publisher: Wiley-Interscience
Published: November 23, 1998
Language: eng
Number of pages: 320
ISBN-13: 9780471574811
First sentence: "Wafer bonding" generally refers to a process by which two mirror-polished wafers adhere to each other at room temperature without the application of any macroscopic gluing layer or outside force.