Modeling MEMS and NEMS
By: John A. Pelesko, David H. Bernstein.
Contributors: Bernstein, David H.
Publisher: Chapman & Hall/CRC
Published: 2003
Place of publication: Boca Raton, FL
Language: eng
Number of pages: 357
Subjects: Microelectromechanical systems -- Mathematical models.
Notes: Includes bibliographical references (p. 325-340) and index.