Integrated circuit metrology, inspection, and process control III
Subtitle: 27-28 February 1989, Los Angeles, California
By: Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: Monahan, Kevin M.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 1087
Publisher: SPIE
Published: 1989
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 535
Subjects: Integrated circuits -- Inspection -- Congresses.; Integrated circuits -- Measurement -- Congresses.
Notes: Includes bibliographical references.