Laser Precision Microfabrication
By: edited by Koji Sugioka, Michel Meunier, Alberto Piqué
Contributors: Meunier, Michel; Piqué, Alberto; SpringerLink (Online service)
Series: Springer Series in Materials Science -- 135
Publisher: Springer-Verlag Berlin Heidelberg
Published: 2010
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] /
ISBN-13: 9783642105227; 9783642105234
Subjects: Nanotechnology; Physics