ICMTS'93
By: [Loren W. Linholm, guest editor].
Contributors: Linholm, Loren W.; International Conference on Microelectronic Test Structures (1993 : Sitges, Spain)
Series: IEEE transactions on semiconductor manufacturing -- vol.7 (3)
Publisher: Institute of Electrical and Electronics Engineers
Published: 1994
Place of publication: New York
Language: eng
Notes: Special issue. Papers presented at the International Confernce on Microelectronic Test Structures, Sitges, Barcelona, Spain, 1993.