Lecture Notes on Principles of Plasma Processing
Edition: 1 edition
Publisher: Springer
Published: January 31, 2003
Language: eng
Format: Paperback
Number of pages: 208
ISBN-13: 9780306474972
Subjects: Plasma physics; Engineering Physics; Process Engineering; Technology; Technology & Industrial Arts; Science/Mathematics; Engineering - Mechanical; Nuclear Physics; Physics; Science / Nuclear Physics; Engineering - General; Manufacturing; Plasma chemistry; Plasma dynamics; Plasma engineering
First sentence: Plasma is matter heated beyond its gaseous state, heated to a temperature so high that atoms are stripped of at least one electron in their outer shells, so that what remains are positive ions in a sea of free electrons.
Description: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.