Kijun ninshō kenkyū kaihatsu jigyō (MEMS debaisu kikō zairyō no jumyō kasoku shikenhō, narabi ni sono tokusei hyōka shikenʼyō kōsei shiryō no hyōjunka) seika hōkokusho.
Contributors: Japan. Keizai Sangyōshō.; Maikuromashin Sentā.
Publisher: Maikuromashin Sentā
Published: 2007
Place of publication: [Tokyo]
Language: jpn
Number of pages: 140
Subjects: Microelectromechanical systems -- Testing -- Standards -- Japan.
Other titles: MEMS debaisu kikō zairyō no jumyō kasoku shikenhō, narabi ni sono tokusei hyōka shikenʼyō kōsei shiryō no hyōjunka
Notes: Cover title.

"Heisei 18-nendo Keizai Sangyōshō itaku jigyō seika"

Includes bibliographical references.

Abstract also in English.