Modern optical characterization techniques for semiconductors and semiconductor devices
By: O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
Contributors: Glembocki, O. J.; Pollak, Fred H.; Song, Jin-Joo.; Society of Photo-optical Instrumentation Engineers.; Metallurgical Society (U.S.)
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 794
Publisher: SPIE--the International Society for Optical Engineering
Published: 1987
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 282
Subjects: Thin film devices -- Congresses.; Thin films -- Optical properties -- Congresses.
Notes: Includes bibliographies and index.
"26-27 March 1987, Bay Point, Florida."