2003 8th International Symposium on Plasma- And Process-Induced Damage
Subtitle: April 24-25, 2003, Corbeil-Essonnes, France
Publisher: Institute of Electrical & Electronics Enginee
Published: January 2003
Language: eng
Format: Hardcover
Number of pages: 189
ISBN-13: 9780780377479
Subjects: Applied physics & special topics; Mechanical engineering; Electronics - Semiconductors; Technology & Industrial Arts