Materials Science of Microelectromechanical Systems (Mems) Devices: Symposium Held December 1-2, 1998, Boston, Massachusetts, U.S.A/ (Materials Research Society Symposium Proceedings)
Contributors: A. H. Heuer (Editor); S. Joshua Jacobs (Editor)
Publisher: Materials Research Society
Published: February 2000
Language: eng
Format: Hardcover
Number of pages: 246
ISBN-13: 9781558994522
Subjects: Science/Mathematics; Microelectromechanical systems; Machinery; Microelectronics; Technology; Technology & Industrial Arts; Electronics - General; Electronics - Microelectronics; Congresses; Materials