19th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Subtitle: 13-15 January, 2003, Sonthofen, Germany
By: Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ... [et al.] ; cooperating oganizations, SEMI Europe ... [et al.] ; published by SPIE--The International Society for Optical Engineering.
Contributors: Behringer, Uwe F. W.; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.; Semiconductor Equipment and Materials Institute. Europe.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 5148; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5148.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 264
Subjects: Integrated circuits -- Masks -- Congresses.; Microlithography -- Congresses.
Genres: Congresses.
Other titles: Mask technology for integrated circuits and microcomponents
Notes: Includes bibliographical references and author index.