High purity silicon 9
By: editors, C.L. Claeys ... [et al.] ; sponsoring division, Electronics and Photonics.
Contributors: Claeys, Cor L.; Electrochemical Society. Electronics and Photonics Division.; Electrochemical Society. Meeting
Series: ECS transactions -- v. 3, no.4
Publisher: Electrochemical Society
Published: 2006
Place of publication: Pennington, NJ
Language: eng
Number of pages: 492
Subjects: Silicon crystals -- Congresses.; Crystal growth -- Congresses.; Silicon -- Defects -- Congresses.; Semiconductor wafers -- Congresses.
Genres: Congresses.
Notes: Papers from meeting held Oct. 29-Nov. 3, 2006, Cancún, Mexico)

Includes bibliographical references and index.