Materials science of microelectromechanical systems (MEMS) devices
By: editors, Arthur H. Heuer, S. Joshua Jacobs.
Contributors: Heuer, A. H. 1936-; Jacobs, S. Joshua.
Series: Materials Research Society symposium proceedings -- v. 546; Materials Research Society symposia proceedings -- v. 546.
Publisher: Materials Research Society
Published: 1999
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 246
Subjects: Microelectromechanical systems -- Congresses.; Microelectronics -- Materials -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.