15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98
Subtitle: 16-17 November 1998, Munich-Unterhaching, Germany
By: Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), [and] SPIE--the International Society for Optical Engineering.
Contributors: Behringer, Uwe.; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.; Forschungszentrum Karlsruhe. Institute for Microstructure Technology.; SEMI-Europe.; BACUS (Technical Group); Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3665; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3665.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 180
Subjects: Integrated circuits -- Masks -- Congresses; Microlithography -- Congresses; X-ray lithography -- Congresses
Genres: Congresses.
Other titles: Fifteenth European Conference on Mask Technology for Integrated Circuits and Microcomponents; European Conference on Mask Technology for Integrated Circuits and Microcomponents; Mask technology for integrated circuits and microcomponents
Notes: Includes bibliographical references and index.