Integrated circuit metrology, inspection, and process control V
Subtitle: 4-5 March 1991, San Jose, California
By: William H. Arnold, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering.
Contributors: Arnold, William H.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering -- v. 1464; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1464.
Publisher: Society of Photo-Optical Instrumentation Engineers
Published: 1991
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 630
Subjects: Integrated circuits -- Congresses; Mensuration -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references.