Calibration service for laser power and energy at 248 nm
By: Rodney W. Leonhardt.
Contributors: National Institute of Standards and Technology (U.S.)
Series: NIST technical note -- 1394.
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1998
Place of publication: Boulder, Colo; Washington, DC
Language: eng
Format: Microform
Number of pages: 34
Subjects: Excimer lasers -- Calibration.; Lasers -- Industrial applications.
Notes: Shipping list no.: 99-0021-M.

"January 1998."

Includes bibliographical references (p. 28).

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1998] 1 microfiche : negative.