User's manual for the program MONSEL-1
Subtitle: Monte Carlo simulation of SEM signals for linewidth metrology
By: Jeremiah R. Lowney and Egon Marx.
Contributors: Marx, Egon.; National Institute of Standards and Technology (U.S.)
Series: Semiconductor measurement technology; NIST special publication -- 400-95.
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1994
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Format: Microform
Number of pages: 39
Subjects: Scanning electron microscopy -- Computer programs -- Handbooks, manuals, etc.; Electrons -- Scattering -- Mathematical models -- Computer programs -- Handbooks, manuals, etc.; Monte Carlo method -- Computer programs -- Handbooks, manuals, etc.
Genres: Handbooks, manuals, etc.
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 94-0956-M.

"August 1994."

Includes bibliographical references.

Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1994] 1 microfiche : negative.