MEMS length and strain measurements using an optical interferometer
By: J.C. Marshall
Contributors: National Institute of Standards and Technology (U.S.)
Series: NISTIR -- 6779
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Published: 2001
Place of publication: Gaithersburg, MD
Language: eng
Format: Microform
Number of pages: 81
Subjects: Microelectromechanical systems; Interferometers
Notes: "August 2, 2001."

Shipping list no.: 2002-0384-M

Includes bibliographical references (p. 42-44)

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 2002 1 microfiche : negative