Materials Science of Microelectromechanical Systems (MEMS) Devices IV
Subtitle: symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.
By: editors, Arturo A. Ayón ... [et al.].
Contributors: Ayón, Arturo A.
Series: Materials Research Society symposium proceedings -- v. 687; Materials Research Society symposia proceedings -- v. 687.
Publisher: Materials Research Society
Published: 2002
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 318
Subjects: Microelectromechanical systems -- Materials -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and indexes.