MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)
Publisher: SPIE Publications; SPIE Optical Engineering Press
Published: December 1, 2000
Language: eng
Format: Hardcover
Number of pages: 528
ISBN-13: 9780819437167
Subjects: Applied optics; Technology & Industrial Arts; Science/Mathematics; Electricity; Engineering - Electrical & Electronic; Engineering - Mechanical; Mechanical; Electronics - Microelectronics; Mechanics; Microelectronics; Science; Technology; Science / Mechanics; Technology / Electronics / Microelectronics; Microelectromechanical systems; Optoelectronic devices