Advanced Metallization for Ulsi Applications in 1993
Subtitle: Proceedings of the Conference Held October 5-7, 1993, San Diego, California, U.S.A., and (Materials Research Society Conference Proceedings)
Contributors: Yosi Shacham-Diamand (Editor); Yasuhiro Horiike (Editor); David P. Favreau (Editor); Berkeley Continuing Education in engineering University of California (Corporate Author)
Publisher: Materials Research Society
Published: February 1994
Language: eng
Format: Hardcover
Number of pages: 611
ISBN-13: 9781558992351
Subjects: Metallic films; Technology; Logic Design; Computer Bks - General Information; Vapor deposition; Science/Mathematics; Metallurgy; Materials; Integrated circuits; Ultra large scale integration; Congresses