Miniaturized systems with micro-optics and MEMS
Subtitle: 20-22 September 1999, Santa Clara, California
By: M.E. Motamedi, Rolf Goering, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.].
Contributors: Motamedi, M. Edward.; Göring, Rolf.; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
Series: SPIE proceedings series ;; v. 3878; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3878.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 426
Subjects: Integrated optics -- Congresses.; Miniature electronic equipment -- Congresses.; Micromechanics -- Congresses.; Optical scanners -- Congresses.; Microelectromechanical systems -- Congresses.
Genres: Congresses.
Other titles: Miniaturized systems with micro-optics and micromechanics.
Notes: Includes bibliographical references and index.
Earlier conferences titled: Miniaturized systems with micro-optics and micromechanics.