Silicon microstructures fabrication techniques and applications
By: by Leif Smith
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 8
Publisher: Acta Universitatis Upsaliensis
Published: 1993
Place of publication: Uppsala
Language: eng
Number of pages: 36
Subjects: Microstructure; Micromechanics; Silicon crystals
Notes: Thesis (doctoral)--Uppsala University, 1993.

Includes bibliographical references.