Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry
By: A.R. Heyd ... [et al.].
Contributors: Heyd, A. R.; United States. National Aeronautics and Space Administration.
Series: NASA-TM -- 111685.; NASA technical memorandum -- 111685.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1996
Place of publication: [Washington, D.C; Springfield, Va
Language: eng
Format: Microform
Subjects: Silicon compounds; Superlattices; Germanium compounds; Ellipsometry; Spectroscopic analysis; Strain measurement; Thickness
Notes: Shipping list no.: 98-0791-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.