Optical/laser microlithography VII
Subtitle: 2-4 March 1994, San Jose, California
By: Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.
Contributors: Brunner, Timothy A.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: SPIE proceedings -- . 2197; Proceedings of SPIE--the International Society for Optical Engineering -- v. 2197.
Publisher: SPIE--the International Society for Optical Engineering
Published: 1994
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 1008
Subjects: Lasers -- Industrial applications -- Congresses.; Microlithography -- Congresses.; Optical instruments -- Congresses.
Notes: Includes bibliographical references and index.