Silicide thin films--fabrication, properties, and application
Subtitle: symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
By: editors, Ray Tung ... [et al.].
Contributors: Tung, R. T.
Series: Materials Research Society symposium proceedings ;; v. 402; Materials Research Society symposia proceedings ;; v. 402.
Publisher: Materials Research Society
Published: 1996
Place of publication: Pittsburgh
Language: eng
Number of pages: 648
Subjects: Thin films -- Congresses.; Silicides -- Congresses.; Thin film devices -- Congresses.
Notes: Includes bibliographical references and index.