VLSI electronics
Subtitle: microstructure science
By: edited by Norman G. Einspruch.
Contributors: Einspruch, Norman G.
Publisher: Academic Press
Published: 1981
Place of publication: New York
Language: eng
Number of pages: 24
Subjects: Integrated circuits -- Very large scale integration.
Notes: Includes bibliographies and indexes.
Vols. 11-<16   > have imprint: Orlando : Academic Press; v. 17-<19, 21-24> : San Diego : Academic Press.
Beginning with vol. 6, some vols. edited by Norman G. Einspruch with other editors.
Table of contents: title: v. 1-5. [without special titles]; title: v. 6. Materials and process characterization; title: v. 7. [without special title]; title: v. 8. Plasma processing for VLSI; title: v. 9. [without special title]; title: v. 10. Surface and interface effects in VLSI; title: v. 11. GaAs microelectronics; title: v. 12. Silicon materials; title: v. 13. Metal-semiconductor contacts and devices; title: v. 14. VLSI design; title: v. 15. VLSI metallization; title: v. 16. Lithography for VLSI; title: v. 17. VLSI in medicine; title: v.18. Advanced MOS device physics; title: 19. Advanced CMOS process technology; title: v. 21. Beam processing technologies; title: v. 22. VLSI reliability; title: v. 23. Application specific integrated circuit (ASIC) technology; title: v. 24. Heterostructures and quantum devices.