Optical microlithography
Subtitle: technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California
By: Harry L. Stover, chairman/editor.
Contributors: Stover, Harry L.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 334
Publisher: SPIE--the International Society for Optical Engineering
Published: 1982
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 265
Subjects: Microlithography -- Congresses.; Integrated circuits -- Very large scale integration -- Congresses.
Notes: Includes bibliographical references and indexes.
"In cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society."