Ion implantation in microelectronics
Subtitle: a comprehensive bibliography
By: A.H. Agajanian.
Series: Computer science information guides ;; v. 1
Publisher: IFI/Plenum
Published: 1981
Place of publication: New York
Language: eng
Number of pages: 255
Subjects: Semiconductor doping -- Bibliography.; Ion implantation -- Bibliography.
Notes: Includes indexes.