Handbook of ion beam processing technology
Subtitle: principles, deposition, film modification, and synthesis
By: edited by Jerome J. Cuomo and Stephen M. Rossnagel, Harold R. Kaufman.
Contributors: Cuomo, J. J.; Rossnagel, Stephen M.; Kaufman, Harold R.
Publisher: Noyes Publications
Published: 1989
Place of publication: Park Ridge, N.J., U.S.A
Language: eng
Number of pages: 438
Subjects: Ion implantation.; Ion bombardment -- Industrial applications.
Notes: Includes bibliographies and index.