Characterization in compound semiconductor processing
By: editors, Yale Strausser and Gary E. McGuire ; consulting editor, C.R. Brundle ; managing editor, Lee E. Fitzpatrick.
Contributors: Strausser, Yale.; McGuire, G. E.
Series: Materials characterization series
Publisher: Butterworth-Heinemann; Manning
Published: 1995
Place of publication: Boston; Greenwich
Language: eng
Number of pages: 199
Subjects: Compound semiconductors.; Compound semiconductors -- Surfaces.
Description: Characterization in Compound Semiconductor Processing is for scientists and engineers working with compound semiconductor materials and devices who are not characterization specialists. Materials and processes typically used in R&D and in the fabrication of GaAs, GaAlAs, InP and HgCdTe based devices provide examples of common analytical problems.

The book discusses a variety of characterization techniques to provide insight into how each individually, or in combination, might be used in solving problems associated with these materials. The book will help in the selection and application of the appropriate analytical techniques by its coverage of all stages of materials or device processing: substrate preparation, epitaxial growth, dielectric film deposition, contact formation and dopant introduction.
Notes: Includes bibliographical references and index.