Micro systems technologies '96
Subtitle: 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996
By: Herbert Reichl, Anton Heuberger (editors)
Contributors: Reichl, H.; Heuberger, A.
Publisher: VDE-Verlag
Published: 1996
Place of publication: Berlin
Language: eng
Number of pages: 868
Subjects: Microelectronics -- Congresses.; Electronic circuit design -- Data processing -- Congresses.; Computer-aided design -- Congresses.; Microelectronics -- Materials -- Congresses.
Notes: Includes bibliographical references.