Dielectric material integration for microelectronics
By: editors W.D. Brown ... [et al.] ; Dielectric Science and Technology, and Electronics Divisions [of the Electrochemical Society].
Contributors: Brown, William D., 1943-; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting
Series: Proceedings ;; v. 98-3; Proceedings (Electrochemical Society) ;; v. 98-3.
Publisher: Electrochemical Society
Published: 1998
Place of publication: Pennington, NJ
Language: eng
Number of pages: 366
Subjects: Dielectric devices -- Congresses.; Dielectrics -- Congresses.; Integrated  circuits -- Materials -- Congresses.; Electronic packaging -- Materials -- Congresses.
Notes: Includes bibliographical references and index.
"This combined volume ... contains material from 2 symposia of the 193rd meeting of the Electrochemical Society, May 3-8, 1998 ... in San Diego ..."--Preface.