Modelling and micromachining of capacitive microphones
By: by Johan Bergqvist
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 27
Publisher: Acta Universitatis Upsaliensis; Distributor, Almqvist & Wiksell International
Published: 1994
Place of publication: Uppsala; Stockholm, Sweden
Language: eng
Number of pages: 38
Subjects: Microphone; Silicon; Micromechanics
Notes: Thesis (Doctoral)--Uppsala University, 1994.

Includes bibliographical references.