Microelectronic structures and MEMS for optical processing III
Subtitle: 29-30 September, 1997, Austin, Texas
By: M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology.
Contributors: Motamedi, M. Edward.; Herzig, Hans Peter.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; National Institute of Standards and Technology (U.S.)
Series: Proceedings of SPIE,; v. 3226; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3226.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 214
Subjects: Microelectronics -- Congresses.; Microelectromechanical systems -- Congresses.; Optoelectronics -- Congresses.
Notes: Includes bibliographic references and index.