Si front-end processing
Subtitle: physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.
By: editors: Erin C. Jones ... [et al.].
Contributors: Jones, Erin C.
Series: Materials Research Society symposium proceedings -- v. 669; Materials Research Society symposia proceedings -- v. 669.
Publisher: Materials Research Society
Published: 2001
Place of publication: Warrendale, PA
Language: eng
Subjects: Semiconductors -- Design and construction -- Congresses.; Semiconductor doping -- Congresses.; Silicon -- Congresses.; Semiconductors -- Defects -- Congresses.
Genres: Congresses.
Other titles: Silicon front-end processing
Notes: Includes bibliographic references and indexes.