Micromechanics and MEMS
Subtitle: Classic and Seminal Papers to 1990
Publisher: Wiley-IEEE Press
Published: January 15, 1997
Language: eng
Format: Paperback
Number of pages: 720
ISBN-13: 9780780310858
Subjects: Electronic devices & materials; Materials science; Mechanical engineering; Engineering - Electrical & Electronic; Microelectronics; Electronic Apparatus And Devices; Technology; Technology & Industrial Arts; Electronics - General; Science/Mathematics; Technology / Electronics / General; Technology / Engineering / Mechanical; Technology-Engineering - Electrical & Electronic; Engineering - Mechanical; Actuators; Microelectromechanical systems