Materials issues in silicon integrated circuit processing
Subtitle: symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
By: editors, Marc Wittmer, James Stimmell, Michael Strathman.
Contributors: Wittmer, Marc.; Stimmell, James.; Strathman, Michael.
Series: Materials Research Society symposia proceedings,; v. 71
Publisher: Materials Research Society
Published: 1986
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 535
Subjects: Microelectronics -- Materials -- Congresses.
Notes: Includes bibliographies and indexes.