Proceedings of the Symposium on Microstructures and Microfabricated Systems
By: edited by P.J. Hesketh, J.N. Zemel, H.G. Hughes.
Contributors: Hesketh, P. J.; Zemel, Jay N.; Hughes, Henry G.; Electrochemical Society. Sensor Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Meeting
Series: Proceedings ;; v. 94-14; Proceedings (Electrochemical Society) ;; v. 94-14.
Publisher: Electrochemical Society
Published: 1994
Place of publication: Pennington, NJ
Language: eng
Number of pages: 255
Subjects: Microelectronics -- Congresses.; Microstructure -- Congresses.; Micromechanics -- Congresses.
Other titles: Microstructures and microfabricated systems.
Notes: Includes bibliographical references and indexes.
"Sensors [i.e. Sensor], Electronics and Dielectric Science and Technology Divisions."
"Held at the 185th Meeting of the Electrochemical Society, May 22nd to 27th, 1994, in San Francisco"--Pref.
Spine title: Microstructures and microfabricated systems.