CMOS hotplate chemical microsensors
By: M. Graf ... [et al.].
Contributors: Graf, M.
Series: Microtechnology and MEMS
Publisher: Springer
Published: 2007
Place of publication: Berlin; New York
Language: eng
Number of pages: 125
ISBN-13: 9783540695615
Subjects: Microelectromechanical systems -- Design and construction; Microfabrication
Other titles: Complementary metal oxide semiconductor hotplate chemical microsensors
Notes: Includes bibliographical references (p. 113-121) and index.