Silicon microelectronics programs at the National Institute of Standards and Technology
Subtitle: programs, activities, and accomplishments
By: edited by Joaquin V. Martinez de Pinillos, Stephen Knight, and Alice Settle-Raskin.
Contributors: Pinillos, Joaquin V. Martinez de.; Knight, Stephen.; Settle-Raskin, Alice.; National Institute of Standards and Technology (U.S.)
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology, Technology Administration
Published: 2000
Place of publication: [Gaithersburg, MD.]
Language: eng
Number of pages: 151
Subjects: National Semiconductor Metrology Program (U.S.); Semiconductors -- Measurement.
Notes: Includes bibliographical references.
"June 2000."
"NISTIR 6522."