Secondary ion mass spectrometry
Subtitle: a practical handbook for depth profiling and bulk impurity analysis
By: R.G. Wilson, F.A. Stevie, C.W. Magee.
Contributors: Stevie, F. A.; Magee, C. W.
Publisher: Wiley
Published: 1989
Place of publication: New York
Language: eng
Subjects: Secondary ion mass spectrometry.
Notes: Includes bibliographical references.
"A Wiley-Interscience publication.