Problemy submikronnoĭ tekhnologii
By: A.A. Orlikovskiĭ.
Contributors: Orlikovskiĭ, A. A.
Series: Trudy FTIAN -- t. 10
Publisher: Nauka; Fizmatlit
Published: 1996
Place of publication: Moskva
Language: rus
Number of pages: 106
Subjects: Integrated circuits -- Design and construction; Plasma engineering
Notes: At head of title: Rossiĭskai︠a︡ akademii︠a︡ nauk. Fiziko-tekhnologicheskiĭ institut.

Summary in English.

Includes bibliographical references.