Fundamentals of semiconductor fabrication
By: Gary S. May, Simon M. Sze.
Contributors: Sze, S. M., 1936-
Edition: Wiley international ed.
Publisher: Wiley
Published: 2004
Place of publication: New York
Language: eng
Number of pages: 305
Subjects: Semiconductors -- Design and construction.; Integrated circuits -- Design and construction.
Notes: Includes bibliographical references and index.