Nano- and microtechnology
Subtitle: materials, processes, packaging and systems : 16-18 December 2002, Melbourne, Australia
By: Dinesh K. Sood, Ajay P. Malshe, Ryutaro Maeda, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by RMIT University (Australia) ... [et al.] ; cooperating organizations, Swinburne University of Technology (Australia) ... [et al.].
Contributors: Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro.; Society of Photo-optical Instrumentation Engineers.; RMIT University.; Swinburne University of Technology.; International Symposium on Smart Materials, Nano-, and Micro-Smart Systems (2002 : RMIT University)
Series: Proceedings of SPIE,; v. 4936; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4936.
Publisher: SPIE
Published: 2002
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 476
Subjects: Microelectronics -- Congresses.; Microelectromechanical systems -- Congresses.; Nanotechnology -- Congresses.; Mechatronics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.