Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Engineering)
Edition: 3 edition
Publisher: Oxford University Press, USA; Oxford University Press
Published: August 17, 2007
Language: eng
Format: Paperback
Number of pages: 672
ISBN-13: 9780195320176
Subjects: Technology & Engineering; Technology & Industrial Arts; Science/Mathematics; Electricity; Electronics - Microelectronics; Nanotechnology; Technology / Engineering / Electrical; Electronics - Semiconductors; Engineering - Electrical & Electronic; Design and construction; Semiconductors