Micro mechanical systems
Subtitle: principles and technology
By: edited by T. Fukuda and W. Menz.
Contributors: Fukuda, T. 1948-; Menz, W.
Series: Handbook of sensors and actuators ;; v. 6
Publisher: Elsevier
Published: 1998
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 268
Subjects: Microelectromechanical systems -- Handbooks, manuals, etc
Notes: Includes bibliographical references.