The Eleventh Annual International Workshop on Micro Electro Mechanical Systems
Subtitle: An investigation of micro structures, sensors, actuators, machines and ... January 25-29, 1998, Heidelberg, Germany
Publisher: Institute of Electrical and Electronics Engineers
Published: 1998
Language: eng
Format: Unknown Binding
Number of pages: 666
ISBN-13: 9780780344143
Subjects: Microactuators; Detectors; Microelectromechanical systems; Congresses