Low cost silicon array project
Subtitle: feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon
Contributors: Breneman, W. C; Farrier, E. G; Morihara, Hiroshi; United States. Dept. of Energy
Series: DOE/JPL ; 954334-9
Publisher: Dept. of Energy; for sale by the National Technical Information Service
Published: 1978
Place of publication: [Washington]; Springfield, Va
Language: eng
Subjects: Silicon; Pyrolysis; Fluidized reactors
Notes: Authors: W. C. Breneman, E. G. Farrier, H. Morihara

Contract no. NAS-7-100-954334

Includes bibliographical references
Table of contents: value: Quarterly progress report, October-December 1978; value: Quarterly progress report, January-March 1978