Optical micro- and nanometrology III
Subtitle: 13-16 April 2010, Brussels, Belgium
By: Christophe Gorecki, Anand Krishna Asundi, Wolfgang Osten, editors ; sponsored by SPIE ; cosponsored by B-PHOT--Brussels Photonics Team (Belgium) ... [et al.] ; cooperating organizations, CBO-BCO (Belgium) ... [et al.].
Contributors: SPIE (Society); B-PHOT--Brussels Photonics Team; Comité belge d'optique
Series: Proceedings of SPIE -- v. 7718; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7718.
Publisher: SPIE
Published: 2010
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819481917
Subjects: Photonics; Congresses; Metrology; Microscopy; Optical measurements
Other titles: Optical micro- and nanometrology 3; Optical micro- and nanometrology three
Notes: Includes bibliographical references and author index.