Smart sensors, actuators, and MEMS
Subtitle: 19-21 May 2003, Maspalomas, Gran Canaria, Spain
By: Jung-Chih Chiao, Vijay K. Varadan, Carles Cané, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Spanish Government ... [et al.] ; cooperating organizations, Las Palmas University Foundation [and] Sociedad Española de Optica (SEDO).
Contributors: Chiao, Jung-Chih.; Varadan, V. K., 1943-; Cané, Carles.; Society of Photo-optical Instrumentation Engineers.; Universidad de Las Palmas de Gran Canaria.; Sociedad Española de Optica (Spain)
Series: SPIE proceedings series,; v. 5116; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5116.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash. USA
Language: eng
Number of pages: 928
Subjects: Microelectromechanical systems -- Congresses.; Microtechnology -- Congresses.; Actuators -- Industrial applications -- Congresses.; Detectors -- Industrial applications -- Congresses.; Scanning systems -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.