Microelectronic polymers
By: edited by Maung S. Htoo.
Contributors: Htoo, Maung S., 1927-
Publisher: M. Dekker
Published: 1989
Place of publication: New York
Language: eng
Number of pages: 407
Subjects: Polymers.; Microlithography -- Materials.; Microelectronics -- Materials.
Notes: Includes bibliographies and index.