Multilayer optics for advanced x-ray applications
Subtitle: 22-23 July 1991, San Diego, California
By: Natale M. Ceglio, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Ceglio, Natale M.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1547; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1547.
Publisher: SPIE
Published: 1992
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 242
Subjects: X-ray optics -- Congresses.; Thin films, Multilayered -- Congresses.; X-ray lithography -- Congresses.
Notes: Includes bibliographical references and index.
"Part of a five-conference program ... held at SPIE's 1991 International Symposium on Optical Applied Science and Engineering, 21-26 July 1991"--P. v.