Plasma processing XIV
Subtitle: proceedings of the International Symposium
By: editor, G.S. Mathad ; assistant editors, M.D. Allendorf, R.E. Sah, M. Yang.
Contributors: Mathad, G. S.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting
Series: Proceedings -- v. 2002-17; Proceedings (Electrochemical Society) -- v. 2002-17.
Publisher: Electrochemical Society
Published: 2002
Place of publication: Pennington, NJ
Language: eng
Number of pages: 324
ISBN-13: 9781566773416
Subjects: Semiconductors -- Etching -- Congresses.; Plasma etching -- Congresses.
Genres: Congresses.
Notes: "Sponsoring Divisions: Dielectric Science and Technology and Electronics."

"This proceedings volume contains the papers presented at the Fourteenth International Symposium on Plasma Processing ... held as part of the 201st Centennial meeting of the Electrochemical Society, Inc. in Philadelphia, PA, May 12-17, 2002"--Pref.

Includes bibliographical references and indexes.