Spectroscopic characterization techniques for semiconductor technology V
Subtitle: 25-26 January 1994, Los Angeles, California
By: Orest J. Glembocki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering : cooperating organization-- Center for Advanced Technology for Ultrafast Photonic Materials and Applications, City University of New York.
Contributors: Glembocki, O. J.; Society of Photo-optical Instrumentation Engineers.; City University of New York. Center for Advanced Technology for Ultrafast Photonic Materials and Applications.
Series: Proceedings / SPIE--the International Society for Optical Engineering -- v. 2141; Proceedings of SPIE--the International Society for Optical Engineering -- v. 2141.
Publisher: SPIE
Published: 1994
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 220
Subjects: Semiconductors -- Testing -- Congresses.; Spectrum analysis -- Congresses.
Notes: Includes bibliographical references and index.