Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems
By: editors, P.J. Hesketh, G. Barna, H.G. Hughes.
Contributors: Hesketh, P. J.; Barna, G.; Hughes, Henry G.; Electrochemical Society. Sensor Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Meeting
Series: Proceedings ;; 97-5; Proceedings (Electrochemical Society) ;; v. 97-5.
Publisher: Electrochemical Society
Published: 1997
Place of publication: Pennington, NJ
Language: eng
Number of pages: 217
Subjects: Microelectronics -- Congresses.; Microstructure -- Congresses.; Micromechanics -- Congresses.; Micromachining -- Congresses.
Other titles: Microstructures and microfabricated systems III; Microstructures and microfabricated systems 3; Microstructures and microfabricated systems three
Notes: Includes bibliographical references and indexes.
"Sensor, Electronics and Dielectric Science and Technology Divisions."
"Held at the 191st Meeting of the Electrochemical Society, May 4-9th, 1997, in Montréal.