Ion Implantation Techniques
Subtitle: Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982
By: edited by Heiner Ryssel, Hans Glawischnig
Contributors: Glawischnig, Hans
Series: Springer Series in Electrophysics -- 10; Springer series in electrophysics -- 10.
Publisher: Springer Berlin Heidelberg
Published: 1982
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] :
ISBN-13: 9783642687815; 9783642687792
Subjects: Engineering; Crystallography; Physics; Surfaces (Physics)
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