Two- and three-dimensional methods for inspection and metrology VI
Subtitle: 10-11 August 2008, San Diego, California, USA
By: Peisen S. Huang, Toru Yoshizawa, Kevin G. Harding, editors ; sponsored and published by by SPIE
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 7066; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7066.
Publisher: SPIE
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819472861
Notes: Includes bibliographical references and author index.