Advanced metallization for ULSI applications, 1992
Subtitle: proceedings of the conference held October 20-22, 1992, in Tempe, Arizona
By: sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, California, U.S.A. ; editors, Timothy S. Cale, Fabio S. Pintchovski ; associate editors, Robert S. Blewer ... [et al.].
Contributors: Cale, Timothy S.; Pintchovski, Fabio S.; Blewer, R. S.; University of California, Berkeley. Continuing Education in Engineering.
Series: Materials Research Society conference proceedings,
Publisher: Materials Research Society.
Published: 1993
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 404
Subjects: Integrated circuits -- Ultra large scale integration -- Materials -- Congresses.; Metallic films -- Congresses.; Vapor deposition -- Congresses.; Electrochemical metallizing -- Congresses.; Tungsten -- Congresses.
Notes: Includes bibliographical references and indexes.