Handbook of semiconductor manufacturing technology
By: Second Edition edited by Robert Doering and Yoshio Nishi.
Contributors: Doering, Robert, 1946-; Nishi, Yoshio, 1940-
Publisher: CRC/Taylor & Francis; CRC Press
Published: 2007
Place of publication: Boca Raton
Language: eng
ISBN-13: 9781574446753
Subjects: Semiconductors -- Design and construction -- Handbooks, manuals, etc; Semiconductor industry -- Handbooks, manuals, etc
Genres: Handbooks, manuals, etc.; Handbooks, manuals, etc
Notes: Includes bibliographical references and index.