Development of new characterization techniques for thin-film silicon-on-insulator (SOI) materials and devices
By: by Ping-Chang Yang
Published: 1993
Language: eng
Number of pages: 123
Subjects: Silicon-on-insulator technology; Thin films; Electric properties; Metal oxide semiconductors
Notes: Typescript.

Vita.

Thesis (Ph. D.)--University of Florida, 1993.

Includes bibliographical references (leaves 112-119).