Gettering and defect engineering in semiconductor technology
Subtitle: GADEST '89 : Proceedings of the 3rd International Autumn Meeting : held at Garzau, Germany, October 8-13, 1989
By: edited by M. Kittler.
Contributors: Kittler, M.
Series: Solid state phenomena -- Vols.6-7
Publisher: Sci-Tech Publications
Published: 1989
Place of publication: Vaduz
Language: und
Number of pages: 610
Other titles: GADEST '89.