Materials and process characterization of ion implantation
By: edited by M.I. Current and C.B. Yarling.
Contributors: Current, Michael I.; Yarling, C. B.
Edition: 1st ed.
Publisher: Ion Beam Press
Published: 1997
Place of publication: Austin, Texas
Language: eng
Number of pages: 487
Subjects: Ion implantation
Other titles: Ion implantation
Notes: Includes bibliographic references.