An automated photovoltaic system for the measurement of resistivity variations, in high-resistivity circular silicon slices
By: David L. Blackburn.
Series: Semiconductor measurement technology; NBS special publication ; 400-52; NBS special publication ;; 400-52.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1979
Place of publication: Washington
Language: eng
Number of pages: 35
Subjects: Semiconductors -- Testing -- Equipment and supplies.; Semiconductor wafers -- Testing.; Silicon -- Electric properties.; Semiconductor industry -- Automation.
Notes: Includes bibliographical references.