Advances in resist technology and processing VIII
Subtitle: 4-5 March, 1991, San Jose, California
By: Hiroshi Ito, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Ito, Hiroshi.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering -- v. 1466.; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1466.
Publisher: SPIE
Published: 1991
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 679
ISBN-13: 9780819405654
Subjects: Photoresistors -- Congresses; Photoresists -- Congresses; Photolithography -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.