Microelectronic processes, sensors, and controls
Subtitle: 27-29 September 1993, Monterey, California
By: James A. Bondur ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Bondur, James.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2091; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2091.
Publisher: SPIE
Published: 1994
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 462
Subjects: Integrated circuits -- Design and construction -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Integrated circuits -- Heat treatment -- Congresses.; Plasma etching -- Congresses.; Optical detectors -- Congresses.
Notes: Includes bibliographical references and index.