ALTECH 95
Subtitle: analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands
By: edited by Bernd O. Kolbesen, Cor Claeys, Peter Stallhofer ; [sponsored by] Electronics Division.
Contributors: Kolbesen, Bernd O.; Claeys, Cor L.; Stallhofer, Peter.; Electrochemical Society. Electronics Division.; European Solid State Device Research Conference (25th : 1995 : Hague, Netherlands)
Series: Proceedings / The Electrochemical Society ;; v. 95-30; Proceedings (Electrochemical Society) ;; v. 90-11.
Publisher: Electrochemical Society
Published: 1995
Place of publication: Pennington, NJ
Language: eng
Number of pages: 365
Subjects: Semiconductors -- Analysis -- Congresses.
Other titles: Analytical techniques for semiconductor materials and process characterization II
Notes: Includes bibliographical references and indexes.
ALTECH 95 was held Sept. 28-29, 1995 in The Hague, Netherlands in conjunction with ESSDERC 95, the 25th European Solid State Device Research Conference, held Sept. 24-27, 1995.