Process, equipment, and materials control in integrated circuit manufacturing
Subtitle: 25-26 October 1995, Austin, Texas
By: Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
Contributors: Sabnis, Anant G.; Raaijmakers, Ivo J.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2637; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2637.
Publisher: SPIE
Published: 1995
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 238
Subjects: Integrated circuits industry -- Congresses.; Integrated circuits -- Design and construction -- Congresses.; Manufacturing processes -- Congresses.; Plasma etching -- Congresses.; Metallizing -- Congresses.
Notes: Includes bibliographic references and author index.