Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control
By: edited by G.S. Mathad, Y. Horiike.
Contributors: Mathad, G. S.; Horiike, Yasuhiro.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.
Series: Proceedings ;; v. 93-21; Proceedings (Electrochemical Society) ;; v. 93-21.
Publisher: Electrochemical Society
Published: 1993
Place of publication: Pennington, NJ
Language: eng
Number of pages: 438
Subjects: Semiconductors -- Etching -- Congresses.; Plasma etching -- Congresses.
Notes: Includes bibliographical references and indexes.
"Dielectric Science and Technology and Electronics Divisions."