Spectroscopic charcterization techniques for semiconductor technology
Subtitle: November 9-10, 1983 Cambridge, Massachusetts
By: Fred H. Pollak, Robert S. Bauer, chairmen/editors.
Contributors: Bauer, Robert S.; Pollak, Fred H.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 452
Publisher: SPIE--The International Society for Optical Engineering
Published: 1983
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 203
Subjects: Semiconductors -- Optical properties -- Congresses; Spectrum analysis -- Instruments -- Congresses
Notes: Includes bibliographies and index.