Silicon micromechanics with applications in optical scanning and sensing systems
By: by Kari Gustafsson
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 160
Publisher: Uppsala University; Distributor, Almqvist and Wiksell International
Published: 1988
Place of publication: Uppsala; Stockholm, Sweden
Language: eng
Number of pages: 30
Subjects: Micromechanics; Silicon; Fiber optics
Notes: Thesis (doctoral)--Uppsala University, 1988.

Includes bibliographical references (p. 30)