Semiconductor process and device performance modeling
Subtitle: symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.
By: editors, Scott T. Dunham, Jeffrey S. Nelson.
Contributors: Dunham, S. T.; Nelson, Jeffrey S.
Series: Materials Research Society symposium proceedings,; v. 490; Materials Research Society symposia proceedings ;; v. 490.
Publisher: Materials Research Society
Published: 1998
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 273
Subjects: Semiconductors -- Mathematical models -- Congresses.; Semiconductors -- Defects -- Congresses.; Solid state physics -- Congresses.
Notes: Includes bibliographical references and indexes.