[Osazhdenie plenok iz nizkotemperaturnoǐ plazmy i ionnykh puchkov
By: (romanized form)
Contributors: Folmanis, Gundar Ėduardovich, joint author.
Publisher: Izd-vo Nauka]
Published: 1973
Place of publication: Moskva
Language: rus
Number of pages: 87
Subjects: Thin films.; Low temperature plasmas.; Ion bombardment.
Notes: Bibliography: p. 82-[85]
At head of title: K. A. Osipov, G. Ė. Folmanis.