Rapid thermal and integrated processing V
Subtitle: symposium held April 8-12, 1996, San Francisco, California, U.S.A.
By: editors, J.C. Gelpey ... [et al.].
Contributors: Gelpey, Jeffrey C.; Materials Research Society. Meeting
Series: Materials Research Society symposium proceedings -- v. 429
Publisher: Materials Research Society
Published: 1996
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 389
Subjects: Chemical vapor deposition -- Congresses.; Dielectrics -- Congresses.; Rapid thermal processing -- Congresses.; Semiconductor doping -- Congresses.; Semiconductors -- Heat treatment -- Congresses.; Vapor-plating -- Congresses.
Other titles: Rapid thermal and integrated processing 5; Rapid thermal and integrated processing five
Notes: "Symposium volume, 'Rapid thermal and integrated processing V,' from the 1996 MRS Spring Meeting"--Pref.

Includes bibliographical references and indexes.