Maskentechnik für Mikroelektronik-Bausteine
Subtitle: Tagung München, 13. November 1986
By: VDI/VDE-Gesellschaft Feinwerktechnik.
Contributors: VDI/VDE-Gesellschaft Feinwerktechnik.
Series: VDI Berichte,; 621; VDI-Berichte ;; 621.
Publisher: VDI Verlag
Published: 1986
Place of publication: Düsseldorf
Language: ger
Number of pages: 168
Subjects: Integrated circuits -- Masks -- Congresses.
Notes: Includes bibliographies.