Structure and Electronic Properties of Ultrathin Dielectric Films on Silicon and Related Structures (Materials Research Society Symposia Proceedings, V. 592.)
Publisher: Materials Research Society
Published: November 2000
Language: eng
Format: Hardcover
Number of pages: 386
ISBN-13: 9781558995000
Subjects: Technology & Industrial Arts; Silicon-on-insulator technology; General; Technology; Science/Mathematics; Electronics - Semiconductors; Congresses; Dielectric films; Silicon-on-insulator technolog