Modeling aspects in optical metrology
Subtitle: 18-19 June 2007, Munich, Germany
By: Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).
Contributors: Bosse, Harald.; Bodermann, Bernd.; Silver, Richard M.; Wissenschaftliche Gesellschaft Lasertechnik.; SPIE Europe.; European Optical Society.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE -- v. 6617.; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6617.
Publisher: SPIE
Published: 2007
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819467591
Subjects: Optical measurements -- Congresses; Integrated circuits -- Congresses; Semiconductors -- Design and construction -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and author index.