Microelectromechanical systems (MEMS)--1997--
Subtitle: micromechanical systems, microscale energy transport : presented at the 1997 International Mechanical Engineering Congress and Exposition, November 16-21, 1997, Dallas, Texas
By: edited by W.S. Chang ... [et al.] ; sponsored by the Dynamic Systems and Control Division, ASME ... [et al.].
Contributors: Chang, W. S.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; International Mechanical Engineering Congress and Exposition (1997 : Dallas, Texas)
Series: DSC ;; vol. 62; HTD ;; vol. 354; DSC (Series) ;; v. 62.; HTD (Series) ;; v. 354.
Publisher: American Society of Mechanical Engineers; Amer Society of Mechanical
Published: 1997
Place of publication: New York, N.Y
Language: eng
Number of pages: 284
Subjects: Microelectronics -- Congresses.; Electromechanical devices -- Congresses.; Microelectromechanical systems -- Congresses.
Notes: Includes bibliographical references and index.