Process, equipment, and materials control in integrated circuit manufacturing IV
Subtitle: 22-24 September, 1998, Santa Clara, California
By: Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.].
Contributors: Toprac, Anthony J. 1955-; Dang, Kim.; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 3507; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3507.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 322
Subjects: Integrated circuits -- Design and construction -- Congresses.; Plasma etching -- Congresses.; Metallizing -- Congresses.; Dielectric films -- Congresses.
Notes: Includes bibliographical references and index.