MEMS 2003
Subtitle: IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems : Kyoto, Japan, January 19-23, 2003
By: sponsored by: IEEE and the Robotics and Automation Society.
Contributors: Institute of Electrical and Electronics Engineers.; IEEE Robotics and Automation Society.
Publisher: IEEE
Published: 2003
Place of publication: Piscataway, N.J
Language: eng
Number of pages: 711
Subjects: Microelectromechanical systems -- Congresses.
Genres: Congresses.
Other titles: Micro electro mechanical systems; MEMS-03 Kyoto; Micro Electro Mechanical Systems, 2003, MEMS-03 Kyoto, IEEE The Sixteenth Annual International Conference on.
Notes: Includes bibliographical references and indexes.
"MEMS-03 Kyoto"--T.p.
"IEEE Catalog Number: 03CH37426"--T.p.
Also available via the World Wide Web.
Also available via the World Wide Web with additional title: Micro Electro Mechanical Systems, 2003, MEMS-03 Kyoto, IEEE The Sixteenth Annual International Conference on.