Proceedings of the Issm2000
Subtitle: The Ninth International Symposium on Semiconductor Manufacturing September 26-28, 2000 Hotel East 21 Tokyo Tokyo, Japan
Publisher: Ieee
Published: December 2000
Language: eng
Format: Hardcover
Number of pages: 500
ISBN-13: 9780780364059
Subjects: Semi-conductors & super-conductors; Manufacturing; Technology & Engineering; Science/Mathematics