Ion implantation and ion beam equipment
Subtitle: proceedings of the international conference, Elenite, Bulgaria, September 24-30, 1990
By: editors, D.S. Karpuzov, I.V. Katardjiev & S.S. Todorov.
Contributors: Karpuzov, D. S.; Katardjiev, I. V.; Todorov, S. S.
Publisher: World Scientific
Published: 1991
Place of publication: Singapore; Teaneck, N.J
Language: eng
Number of pages: 588
Subjects: Ion implantation -- Congresses.; Ion bombardment -- Congresses.; Semiconductor doping -- Congresses.
Notes: "... International Conference on Ion Implantation and Ion Beam Equipment (I© rBE)"--p. v.

Includes bibliographical references and index.