Impurity doping processes in silicon
By: edited by F.F.Y. Wang.
Contributors: Wang, Franklin F. Y., 1928-
Series: Materials processing, theory and practices ;; v. 2
Publisher: North-Holland Pub. Co.; Sole distributors for the USA and Canada, Elsevier North-Holland; North-Holland Pub Co
Published: 1981
Place of publication: Amsterdam; New York; New York, N.Y
Language: eng
Number of pages: 643
Subjects: Semiconductor doping.
Notes: Includes bibliographical references and index.