Structure and properties of TiN Thin Films and TiN/VN Superlattices Prepared by Reactive Sputtering
By: by Ulf Helmersson
Contributors: Universitetet i Linköping
Series: Linkoping studies in science and technology : Dissertations -- no. 153; Linkoping studies in science and technology dissertations -- no. 153
Publisher: Department of Physics and Measurement Technology, Linkoping University
Published: 1986
Place of publication: Linkoping
Language: eng
Notes: Thesis (doctoral)--Linköping University, 1986.

Includes bibliographical references.