Materials Aspects of X-Ray Lithography
Subtitle: Symposium Held April 12-14, 1993 San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
Contributors: Juan R. Maldonado (Editor)
Publisher: Materials Research Society
Published: March 1994
Language: eng
Format: Hardcover
Number of pages: 291
ISBN-13: 9781558992023
Subjects: Technology; Optical Engineering; Optical Properties Of Materials; Science/Mathematics; X-ray lithography; TEC035000; TEC; Congresses; Reference