Structure and properties of titanium nitride and zirconium nitride thin films prepared by reactive ion plating
By: J. M. Molarius
Series: Dissertation- Helsingen Teknillinen Korkeakoulu -- 636
Publisher: Helsinki University of Technology
Published: 1987
Language: eng
Number of pages: 83
Notes: Thesis for the degree of doctor of technology.

Thesis (doctoral)--Helsinki University of Technology, 1987.