Handbook of Chemicals & Gases for the Semi- Conductor Industry
Publisher: Wiley-Interscience
Published: March 2002
Language: eng
Format: Hardcover
Number of pages: 363
ISBN-13: 9780471316718
Subjects: Heavy chemicals; Physical Chemistry; Semi-conductors & super-conductors; Semiconductors; Science; Technology & Industrial Arts; Science/Mathematics; Electronics - Semiconductors; Engineering - Chemical & Biochemical; Manufacturing; Science / Chemistry / Technical & Industrial; Chemistry - Industrial & Technical; Chemistry - Physical & Theoretical; Chemicals; Handbooks, manuals, etc; Materials
First sentence: Chemical vapor deposition (CVD): This is a process where one or more volatile inorganic, metal-organic, or organometallic precursors are transported in the vapor phase, often in a carrier gas, to the reactor chamber where they decompose on a heated substrate and subsequently deposit a solid film along with volatile byproducts.