Microengineering, MEMS, and Interfacing
Subtitle: A Practical Guide (Mechanical Engineering)
Publisher: CRC
Published: March 23, 2006
Language: eng
Format: Hardcover
Number of pages: 352
ISBN-13: 9780824723057
Subjects: Mechanical engineering; Technology; Microelectromechanical systems; Technology & Industrial Arts; Science/Mathematics; Engineering - Electrical & Electronic; Engineering - Mechanical; Nanotechnology; Technology / Electronics / Microelectronics; Electronics - Microelectronics
First sentence: Microengineering and Microelectromechanical systems (MEMS) have very few watertight definitions regarding their subjects and technologies.