Materials science in microelectronics.
By: E.S. Machlin.
Edition: 2nd ed.
Publisher: Elsevier
Published: 2006
Place of publication: Amsterdam; Boston; London
Language: eng
Number of pages: 255
Subjects: Thin films.; Microelectronics.
Other titles: Effects of structure on properties in thin films
Notes: Previous ed.: 1998.

Includes index.