Gate dielectric integrity
Subtitle: material, process, and tool qualification
By: Dinesh C. Gupta and George A. Brown, editors.
Contributors: Gupta, D. C.; Brown, George A., 1937-; Conference on Gate Dielectric Integrity (1999 : San Jose, Calif.)
Publisher: ASTM
Published: 2000
Place of publication: West Conshocken, Pa
Language: eng
Number of pages: 169
Subjects: Semiconductor wafers -- Reliability.; Integrated circuits -- Wafer-scale integration -- Reliability.; Gate array circuits -- Materials.; Silicon oxide films -- Testing.; Dielectrics -- Testing.
Notes: Conference on Gate Dielectric Integrity, held Jan. 25, 1999, San Jose, Calif.

Includes bibliographical references.