Growth of wide-band gap A1N and (SiC)x(A1N)1-x thin films by reactive magnetron sputter deposition
By: Sukkaneste Tungasmita
Contributors: Universitetet i Linköping
Series: Linköping studies in science and technology -- no. 711
Publisher: Thin Film Physics Division, Dept. of Physics and Measurement Technology, Linköpings universitet
Published: 2001
Place of publication: Linköping
Language: eng
Subjects: Thin films; Sputtering (Physics)
Notes: Thesis (doctoral)--Linköpings universitet, 2001.

Includes bibliographical references.