Nanoparticle engineering for chemical-mechanical planarization
Subtitle: fabrication of next-generation nanodevices
By: authors, Ungyu Paik, Jea-Gun Park.
Contributors: Park, Jea-Gun.
Publisher: Taylor & Francis
Published: 2009
Place of publication: Boca Raton
Language: eng
ISBN-13: 9781420059113
Subjects: Chemical mechanical planarization; Nanoparticles; Nanoelectronics
Notes: "A CRC title."

Includes bibliographical references and index.