Materials Science of Microelectromechanical Systems (Mems) Devices II: Symposium Held November 29-December 1, 1999, Boston, Massachusetts, U.S.A (Materials ... Society Symposia Proceedings, V. 605.)
Contributors: Maarten P. De Boer (Editor); A. H. Heuer (Editor); S. Joshua Jacobs (Editor); Eric Peeters (Editor)
Publisher: Materials Research Society
Published: October 2000
Language: eng
Format: Hardcover
Number of pages: 314
ISBN-13: 9781558995130
Subjects: Microactuators; Science; Machinery; Microelectronics; Technology; Science/Mathematics; Microelectromechanical systems; Materials; General; Electronics - Microelectronics; Congresses