Ion implantation technology
Subtitle: selected papers of the ninth International Conference on Ion Implantation Technology (IIT '92), Gainesville, FL, USA, September 20-24, 1992
By: editors: D.F. Downey ... [et al.].
Contributors: Downey, D. F.
Series: Nuclear instruments and methodsin physics research -- vol.B74 (1-2)
Publisher: North-Holland
Published: 1993
Place of publication: Amsterdam
Language: eng