In-Situ Patterning: Selective Area Deposition and Etching 
Subtitle: Symposium Held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings)
Publisher: Materials Research Society
Published: October 1990
Language: eng
Format: Hardcover
Number of pages: 496
ISBN-13: 9781558990463
Subjects: Semiconductors; Science/Mathematics