Micro- and nanoelectronics 2007
Subtitle: 1-5 October 2007, Zvenigorod, Russia
By: Kamil A. Vaiev, Alexander A. Orlikovsky, editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences (Russia), SPIE Russia Chapter ; sponsored by Russian Foundation for Basic Research (Russia) ... [et al.] ; published by SPIE
Contributors: Valiev, Kamilʹ Akhmetovich; Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich); Fiziko-tekhnologicheskiĭ institut (Rossiĭskai︠a︡ akademii︠a︡ nauk); Society of Photo-optical Instrumentation Engineers. Russian Chapter; Rossiĭskiĭ fond fundamentalʹnykh issledovaniĭ; Society of Photo-optical Instrumentation Engineers
Series: Proceedings of SPIE -- v. 7025; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7025.
Publisher: SPIE
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819472380
Other titles: ICMNE-2007
Notes: "This volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2007 (ICMNE-2007), held in Zvenigirod, Moscow region, 1-5 October 2007 "--P. xv.

Includes bibliographical references and index.