MEMS reliability for critical and space applications
Subtitle: 21-22 September, 1999, Santa Clara, California
By: Russell A. Lawton ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology ... [et al.].
Contributors: Lawton, Russell A.; Society of Photo-optical Instrumentation Engineers.; Solid State Technology (Organization)
Series: Proceedings of SPIE,; v. 3880; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3880.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 176
Subjects: Microelectromechanical systems -- Reliability -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.