Microfluidics and bioMEMS
Subtitle: 22-24 October 2001, San Francisco, [California] USA
By: Carlos H. Mastrangelo, Holger Becker, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].
Contributors: Mastrangelo, Carlos H.; Becker, H.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: SPIE proceedings series ; v. 4560; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4560.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 274
Subjects: Fluidic devices -- Congresses.; Micromechanics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.