Ion implantation in semiconductors, silicon and germanium [by] James W. Mayer, Lennart Eriksson and John A. Davies.
Contributors: Eriksson, Lennart, 1938-,; Davies, John A., 1927-,
Publisher: Academic Press
Published: 1970
Place of publication: New York
Language: eng
Number of pages: 280
Subjects: Semiconductors; Ion bombardment