Electron-Beam, X Ray, and Ion-Beam Technology; Submicrometer Lithographics VII (Proceedings of SPIE--the International Society for Optical Engineering)
Publisher: Society of Photo Optical
Published: July 1988
Language: eng
Format: Paperback
Number of pages: 307
ISBN-13: 9780892529582
Subjects: Ion beam lithography; Lithography, Electron beam; X-ray lithography; Congresses