Ultra Clean Processing of Silicon Surfaces V
Subtitle: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (Ucpss 2002) ... September 2002 (Solid State Phenomena)
Contributors: Marc Heyns (Editor); Paul Mertens (Editor); Marc Meuris (Editor)
Publisher: Scitec Pubns
Published: July 2003
Language: eng
Format: Paperback
Number of pages: 320
ISBN-13: 9783908450788
Subjects: Industrial chemistry; Materials science; Surface chemistry & adsorption; Material Science; Technology; Science/Mathematics