Microlithography
Subtitle: science and technology
By: edited by James R. Sheats, Bruce W. Smith.
Contributors: Sheats, James R., 1948-; Smith, Bruce W., 1959-
Publisher: Marcel Dekker
Published: 1998
Place of publication: New York
Language: eng
Number of pages: 780
Subjects: Microlithography -- Industrial applications.; Integrated circuits -- Masks.; Metal oxide semiconductors, Complementary -- Design and construction.; Manufacturing processes.
Notes: Includes bibliographical references and index.