The design, testing, and analysis of a comprehensive test pattern for measuring CMOS/SOS process performance and control
By: Loren W. Linholm ; sponsored by U.S. Air Force ... [et al.].
Contributors: United States. National Engineering Laboratory. Electron Devices Division.; United States. National Bureau of Standards.
Series: NBS special publication ;; 400-66; Semiconductor measurement technology
Publisher: U.S. Dept. of Commerce, National Bureau of Standards; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1981
Place of publication: Washington, D.C
Language: eng
Number of pages: 142
Subjects: Integrated circuits -- Testing.
Notes: Includes bibliographical references.
"Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards."
S/N 003-003-02345-1