Ion implantation of semiconductors
By: G. Carter, W. A. Grant.
Contributors: Grant, W. A. 1941- joint author.
Publisher: Wiley
Published: 1976
Place of publication: New York
Language: eng
Number of pages: 214
Subjects: Semiconductor doping.; Semiconductors -- Effect of radiation on.; Ion implantation.
Notes: Includes bibliographical references and index.
"A Halsted Press book."