Advances in rapid thermal and integrated processing
By: edited by Fred Roozeboom.
Contributors: Roozeboom, Fred.; North Atlantic Treaty Organization. Scientific Affairs Division.; NATO Advanced Study Institute on Advances in Rapid Thermal and Integrated Processing (1995 : Acquafredda di Maratea, Italy)
Series: NATO ASI series: Series E, Applied sciences ;; vol. 318; NATO ASI series.; no. 318.
Publisher: Kluwer Academic Publishers
Published: 1996
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 565
Subjects: Semiconductors -- Heat treatment -- Congresses; Rapid thermal processing -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.
"Published in cooperation with NATO Scientific Affairs Division."
"Proceedings of the NATO Advanced Study Institute on Advances in Rapid Thermal and Integrated Precessing, Acquafredda di Maratea, Italy, July 3-14, 1995"--T.p. verso.