The Physics of Submicron Lithography
By: by Kamil A. Valiev
Series: Microdevices, Physics and Fabrication Technologies; Microdevices, Physics and Fabrication Technologies
Publisher: Springer US
Published: 1992
Place of publication: Boston, MA
Language: eng
Format: [electronic resource] /
Number of pages: 493
ISBN-13: 9781461364610; 9781461533184
Subjects: Computer engineering; Crystallography; Physics; Optical materials
Description: This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.
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