Handōtai CMP yōgo jiten
By: Seimitsu Kōgakkai Puranarizēshon CMP to Sono Ōyō Gijutsu Senmon Iinkai hen.
Contributors: Seimitsu Kōgakkai. Puranarizēshon CMP to Sono Ōyō Gijutsu Senmon Iinkai.
Edition: Dai 1-han
Publisher: Ōmusha
Published: 2008
Place of publication: Tōkyō
Language: jpn
Number of pages: 262
ISBN-13: 9784274206122
Subjects: Chemical mechanical planarization -- Dictionaries -- Japanese; Grinding and polishing -- Dictionaries -- Japanese; Semiconductors -- Dictionaries -- Japanese
Genres: Dictionaries
Other titles: Chemical mechanical polishing
Notes: Includes bibliographical references (p. 253) and index.

Entry words also in English; index in English with Japanese.