Stoffbelastung in der Mikroelektronik
By: P. Sartori, W. Pahlmann.
Contributors: Pahlmann, W.
Series: Schriftenreihe der Bundesanstalt für Arbeitsschutz.; GA 36
Publisher: Bundesanstalt für Arbeitsschutz; Wirtschaftsverlag NW
Published: 1990
Place of publication: Dortmund; Bremerhaven
Language: ger
Number of pages: 122
Subjects: Semiconductor industry -- Germany -- Health aspects.
Notes: Includes bibliographical references (p. 81-87).
Summary in English, French, and German.