Materials science in microelectronics
By: E.S. Machlin.
Publisher: GiRo Press
Published: 1995
Place of publication: Croton-on-Hudson, N.Y
Language: eng
Subjects: Thin films.; Microelectronics.
Notes: Includes bibliographical references and indexes.
Table of contents: title: 1. The relationships between thin film processing and structure; title: v. 2. The effects of structure on properties in thin films.