Characterization and Metrology for ULSI Technology 2000
Subtitle: International Conference (AIP Conference Proceedings)
Contributors: David G. Seiler (Editor); Alain C. Diebold (Editor); Thomas J. Shaffner (Editor); Robert McDonald (Editor); W. Murray Bullis (Editor); Patrick J. Smith (Editor); Erik M. Secula (Editor)
Edition: 1 edition
Publisher: American Institute of Physics
Published: March 1, 2001
Language: eng
Format: Hardcover
Number of pages: 708
ISBN-13: 9781563969676
Subjects: Circuits & components; General Theory of Computing; Semi-conductors & super-conductors; Semiconductors; Very-Large-Scale Integration (Vlsi); Technology; Science; Science/Mathematics; Astronomy - General; General; Solid State Physics; Technology / Material Science; materials characterization; Electronics - Circuits - VLSI; Electronics - Semiconductors; Engineering - Industrial; Congresses; Integrated circuits; Software; Ultra large scale integration