Integrated Circuit Metrology, Inspection, and Process Control III
Subtitle: 27-28 February 1989, Los Angeles, California (Spie Proceedings, Vol 1087)
Publisher: Society of Photo Optical
Published: July 1989
Language: eng
Format: Paperback
Number of pages: 535
ISBN-13: 9780819401229
Subjects: Congresses; Inspection; Integrated Circuits; Measurement; Science/Mathematics