Piezoelectric Multilayer Beam-Bending Actuators (Microtechnology and MEMS)
Edition: 1 edition
Publisher: Springer
Published: March 12, 2007
Language: eng
Format: Hardcover
Number of pages: 382
ISBN-13: 9783540326410
Subjects: Electric motors; Technology & Engineering; Technology & Industrial Arts; Science/Mathematics; Electricity; Optics; Physics; Science; MEMS; Technology / Electronics / Microelectronics; actuators; beam benders; beam bending actuators; electromagnetic field theory; electromechanical circuit representation; micro electromechnical systems; microsystems technology; multilayer; piezoceramics; Engineering - Electrical & Electronic