Low Pressure Plasmas and Microstructuring Technology
By: by Gerhard Franz
Contributors: SpringerLink (Online service)
Publisher: Springer-Verlag Berlin Heidelberg
Published: 2009
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] /
ISBN-13: 9783540858485; 9783540858492
Subjects: Surfaces (Physics); Molecular structure; Materials; Electronics; Optical materials