Rapid thermal and integrated processing VII
Subtitle: symposium held April 13-15, 1998, San Francisco, California, U.S.A.
By: editors, Mehmet C. Ozturk ... [et al.].
Contributors: Öztürk, Mehmet C.; Materials Research Society.
Series: Materials Research Society symposium proceedings -- v. 525; Materials Research Society symposia proceedings -- v. 525.
Publisher: Materials Research Society
Published: 1998
Place of publication: Warrendale, Pennsylvania
Language: eng
Number of pages: 403
Subjects: Semiconductors -- Heat treatment -- Congresses; Semiconductor doping -- Congresses; Vapor-plating -- Congresses; Rapid thermal processing -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and indexes.