Micromachining and microfabrication process technology
Subtitle: 23-24 October, 1995, Austin, Texas
By: Karen W. Markus, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society of Optical Engineering.
Contributors: Markus, Karen W.; Semiconductor Equipment and Materials International.; National Institute of Standards and Technology (U.S.); Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society of Optical Engineering ;; v. 2639; Proceedings of SPIE--the International Society of Optical Engineering ;; v. 2639.
Publisher: SPIE
Published: 1995
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 336
Subjects: Micromachining -- Congresses; Microfabrication -- Congresses; Electromechanical devices -- Design and construction -- Congresses
Notes: Includes bibliographical references and index.