Problemy submikronnoĭ tekhnologii
By: otvetstvennyĭ redaktor A.A. Orlikovskiĭ.
Contributors: Orlikovskiĭ, A. A.
Series: Trudy FTIAN,; t. 6
Publisher: "Nauka"
Published: 1993
Place of publication: Moskva
Language: rus
Number of pages: 111
Subjects: Integrated circuits -- Design and construction.; Plasma engineering.
Notes: Includes bibliographical references.
At head of title: Rossiĭskai͡a︡ akademii͡a︡ nauk. Fiziko-tekhnologicheskiĭ institut.
Summary in English.