Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
By: edited by Jerzy Ruzyllo, Richard E. Novak ; [sponsored by the] Electronics and Dielectric Science and Technology divisions.
Contributors: Rużyłło, Jerzy.; Novak, Richard E.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.
Series: Proceedings / Electrochemical Society ;; v. 92-12; Proceedings (Electrochemical Society) ;; v. 92-12.
Publisher: Electrochemical Society
Published: 1992
Place of publication: Pennington, NJ
Language: eng
Number of pages: 502
Subjects: Semiconductor wafers -- Cleaning -- Congresses.
Other titles: Cleaning technology in semiconductor device manufacturing.
Notes: Includes bibliographical references and indexes.