Some studies related to laser annealing of ion implanted silicon
By: Göran Alestig
Contributors: Chalmers tekniska högskola
Series: Doktorsavhandlingar vid Chalmers tekniska högskola -- ny ser., nr. 568
Publisher: Dept. of Physics, Chalmers University of Technology
Published: 1986
Place of publication: Göteborg, Sweden
Language: eng
Subjects: Lasers; Ions; Silicon
Notes: Series title stamped on cover.

Added title page in Swedish and abstract in English inserted.

Thesis (doctoral)--Chalmers Tekniska Högskola, 1986.

Includes references.