Proceedings of the Second International Symposium on Electrochemical Microfabrication
By: editors, Madhav Datta, Keith Sheppard, John O. Dukovic.
Contributors: Datta, Madhav.; Sheppard, Keith.; Dukovic, John O.; Electrochemical Society. Electrodeposition Division.
Series: Proceedings / Electrochemical Society ;; v. 94-32; Proceedings (Electrochemical Society) ;; v. 94-32.
Publisher: Electrochemical Society
Published: 1995
Place of publication: Pennington, NJ
Language: eng
Number of pages: 412
Subjects: Microelectronics -- Congresses.; Electrochemistry, Industrial -- Congresses.; Masks (Electronics) -- Congresses.; Microelectronic packaging -- Congresses.; Silicon -- Congresses.; Microfabrication.
Other titles: Electrochemical microfabrication
Notes: Includes bibliographical references and indexes.
"Electrodeposition Division."
The symposium was held Oct. 10-12, 1994, in Miami Beach, Fla.