Emerging Lithographic Technologies for Nanopatterning
Contributors: Ampere A. Tseng (Editor); Walt Trybula (Editor)
Publisher: CRC
Published: December 15, 2008
Language: eng
Format: Hardcover
ISBN-13: 9780849374210
Subjects: Materials science; Production engineering; Technology: General Issues; Technology / Nanotechnology; Engineering - Industrial; Material Science; Nanotechnology; Technology; Technology & Industrial Arts; Science/Mathematics