15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007
Subtitle: October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy
By: IEEE Electron Devices Society.
Contributors: IEEE Electron Devices Society.
Publisher: IEEE
Published: 2007
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 326
Subjects: Semiconductors -- Heat treatment -- Congresses; Rapid thermal processing -- Congresses; Semiconductor doping -- Congresses; Semiconductors -- Defects -- Congresses
Genres: Congresses.
Other titles: RTP 2007
Notes: "IEEE Catalog Number: 07EX1783"--T.p. verso.

Includes bibliographical references.