Ėllipsometrii͡a--teorii͡a, metody, prilozhenii͡a
By: otvetstvennye redaktory A.V. Rzhanov, L.A. Ilʹina.
Contributors: Rzhanov, Anatoliĭ Vasilʹevich.; Ilʹina, L. A.; Institut fiziki poluprovodnikov (Akademii͡a nauk SSSR)
Publisher: Izd-vo "Nauka," Sibirskoe otd-nie
Published: 1987
Place of publication: Novosibirsk
Language: rus
Number of pages: 191
Subjects: Ellipsometry.
Notes: Includes bibliographies.
At head of title: Akademii͡a nauk SSSR. Sibirskoe otdelenie. Institut fiziki poluprovodnikov.