Nanometer structure electronics
Subtitle: an investigation of the future of micro-electronics : proceedings of the International Symposium on Nanometer Structure Electronics, April 16-18, 1984 Osaka University, Toyonaka, Japan.
Contributors: Yamamura, Yūichi, 1918-; Fujisawa, Toshio, 1928-; Namba, Susumu; Ōsaka Daigaku.
Publisher: Ohm
Published: 1985
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 215
Subjects: Microelectronics -- Congresses; Lithography, Electron beam -- Congresses; Quantum electronics -- Congresses