Nanoporous silicon carbide for nanoelectromechanical systems applications
By: T. Hossain ... [et al.].
Contributors: NASA Glenn Research Center.
Series: [NASA contractor report] -- NASA/CR-2003-212198.; NASA contractor report -- NASA/CR-212198.
Publisher: National Aeronautics and Space Administration, Glenn Research Center; Available from NASA Center for Aerospace Information; National Technical Information Service [distributor
Published: 2003
Place of publication: [Cleveland, Ohio]; Hanover, MD; Springfield, VA
Language: eng
Format: Microform
Subjects: Nanostructure (Characteristics); Porous silicon.; Silicon carbides.; Nanotechnology.; Crystal morphology.
Notes: Shipping list no.: 2003-0490-M.

"April 2003."

Also available via Internet from the NASA Technical Report Server web site. Address as of 10/28/04: http://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/20030037184%5F2003041828.pdf; current access available via PURL.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 2003?] 1 microfiche.