Polymers in microlithography
Subtitle: materials and processes
By: Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.
Contributors: Reichmanis, Elsa, 1953-; MacDonald, Scott A.; Iwayanagi, Takao, 1949-; American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Series: ACS symposium series,; 412
Publisher: American Chemical Society
Published: 1989
Place of publication: Washington, DC
Language: eng
Number of pages: 449
Subjects: Polymers -- Congresses.; Photoresists -- Congresses.; Microlithography -- Materials -- Congresses.
Notes: Includes bibliographical references.
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."