Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications
Subtitle: 24 October, 1995, Austin, Texas
By: Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering.
Contributors: Bailey, Wayne E.; Motamedi, M. Edward.; Luo, Fang-Chen.; Semiconductor Equipment and Materials International.; National Institute of Standards and Technology (U.S.); Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2641; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2641.
Publisher: SPIE
Published: 1995
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 154
Subjects: Microelectronics -- Congresses.; Microelectromechanical systems -- Congresses.; Optoelectronics -- Congresses.
Notes: Includes bibliographic references and index.