Microelectronic Processing
Subtitle: Chemical Engineering Aspects (Advances in Chemistry Series)
Contributors: Dennis W. Hess (Editor); Klaus F. Jensen (Editor)
Publisher: An American Chemical Society Publication
Published: March 11, 1998
Language: eng
Format: Hardcover
Number of pages: 524
ISBN-13: 9780841214750
Subjects: Biochemical Engineering; Circuits & components; Surface chemistry; Integrated circuits; Chemical Engineering Operations; Science; Science/Mathematics; Materials; Chemistry - Industrial & Technical; Electronics - General; General; Science / Chemistry / Technical & Industrial; Design and construction; Microelectronics