Recent Developments in Thin Film Research
Subtitle: Epitaxial Growth and Nanostructures, Electron Microscopy and X-Ray Diffraction (European Materials Research Society Symposia Proceedings)
Publisher: Elsevier Science
Published: July 1, 1998
Language: eng
Number of pages: 502
ISBN-13: 9780444205131
First sentence: Precise control of doping is important for the fabrication of novel semiconductor devices with decreasing dimensions.