Introduction to VLSI process engineering
By: edited by the Society of Chemical Engineers of Japan ; [editor in chief, Yuji Naka].
Contributors: Naka, Yuji, 1945-; Kagaku Kōgaku Kyōkai (Japan)
Edition: English language ed.
Publisher: Chapman & Hall
Published: 1993
Place of publication: London; New York
Language: eng
Number of pages: 210
Subjects: Integrated circuits -- Very large scale integration -- Design and construction; Manufacturing processes
Notes: Includes bibliographical references (p. [201]-204) and index.
"The English language edition has been translated from the original Japanese publication ... "--T.p. verso.