Issledovanie tekhnologicheskikh prot︠s︡essov i priborov mikroėlektroniki
By: otvetstvennyĭ redaktor toma V.A. Kurchidis.
Contributors: Kurchidis, V. A.; Fiziko-tekhnologicheskiĭ institut (Rossiĭskai︠a︡ akademii︠a︡ nauk)
Series: Trudy FTIAN -- t. 12
Publisher: Nauka, Fizmatlit
Published: 1997
Place of publication: Moskva
Language: rus
Number of pages: 168
Subjects: Microelectronics -- Design
Notes: Includes bibliographical references.

Summary in English.