Handbook of Thin Film Process Technology 98/1 Reactive Sputtering
Contributors: D Glocker (Editor); S Shah (Editor); W Westwood (Editor)
Publisher: Taylor & Francis
Published: July 1, 1998
Language: eng
Format: Loose leaf
Number of pages: 76
ISBN-13: 9780750305280
Subjects: Industrial Chemistry & Manufacturing Technologies; Reference works; Material Science; Technology / Material Science; Technology; Technology & Industrial Arts; Science/Mathematics