Reduced Thermal Processing for ULSI
Edition: 1 edition
Publisher: Springer
Published: January 31, 1990
Language: eng
Format: Hardcover
Number of pages: 450
ISBN-13: 9780306433825
Subjects: Condensed matter physics (liquids & solids); Very-Large-Scale Integration (Vlsi); Science; Computers - General Information; Science/Mathematics; Crystallography; Logic Design; Science / Physics; Physics; Congresses; Heat treatment; Integrated circuits; Ultra large scale integration
Notes: NATO Science Series: B: