Nano Science and Technology
Subtitle: Novel Structures and Phenomena
Contributors: Ping Sheng (Editor); Zikang Tang (Editor)
Publisher: CRC
Published: March 6, 2003
Language: eng
Number of pages: 272
ISBN-13: 9780415308328
First sentence: There has been an interest in going beyond conventional lithographic techniques in order to make features of ever smaller scale and higher density over large areas.