Amorphous silicon carbide thin films
Subtitle: deposition, characterization, etching, and piezoresistive sensors applications
By: Mariana Amorim Fraga
Publisher: Nova Science Publishers
Published: 2011
Place of publication: Hauppauge, N.Y
Language: eng
ISBN-13: 9781613247747
Subjects: Silicon carbide; Amorphous semiconductors; Silicon-carbide thin films
Notes: Includes bibliographical references.