Proceedings of the SIRA International Seminar on Film Preparation and Etching using Vacuum or Plasma Technology, University of Sussex, Brighton, U.K., 22-24 March 1983
By: guest editor: B.D. Williams.
Contributors: SIRA International Seminar on Film Preparation and Etching using Vacuum or Plasma Technology (1983 : University of Sussex)
Publisher: Pergamon
Published: 1984
Place of publication: Oxford
Number of pages: 494
Subjects: Vacuum technology -- Congresses
Notes: Includes bibliographical references.

Source: Vacuum, v.34, no.3-4, Mar-Apr. 1984, p.341-494