Monitoring and control of plasma-enhanced processing of semiconductors
Subtitle: proceedings : 1-2 November 1988, Santa Clara, California
By: James E. Griffiths, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: Griffiths, James E.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 1037; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1037.
Publisher: SPIE
Published: 1989
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 147
Subjects: Semiconductors -- Congresses.; Plasma engineering -- Congresses.; Epitaxy -- Congresses.; Vapor plating -- Congresses.
Notes: Includes bibliographical references.