E/m 87
Subtitle: Energy Pulse and Particle Beam Modification of Materials (Physical Research Vol 8)
Publisher: Vch Pub
Published: December 1988
Language: eng
Format: Hardcover
Number of pages: 594
ISBN-13: 9783055005404
Subjects: Ion implantation; Technology; Material Science; Particle beams; Congresses; Semiconductors; Surfaces