Materials Fundamentals of Gate Dielectrics
Contributors: Alexander A. Demkov (Editor); Alexandra Navrotsky (Editor)
Edition: 1 edition
Publisher: Springer
Published: August 23, 2005
Language: eng
Format: Hardcover
Number of pages: 476
ISBN-13: 9781402030772
Subjects: Semi-conductors & super-conductors; Physics; Science; Science/Mathematics; Chemistry - Physical & Theoretical; Optics; Science / Physics; Dielectrics; Gate array circuits; Metal oxide semiconductors, Complementary
First sentence: Rapid shrinking in device dimensions to follow Moore's law calls for replacement of SiO2 by new gate insulators in future generations of MOSFETs.