MEMS
Subtitle: a practical guide to design, analysis, and applications
By: edited by Jan G. Korvink and Oliver Paul.
Contributors: Korvink, J. G.; Paul, Oliver.
Publisher: W. Andrew Pub.; Springer
Published: 2005
Place of publication: Norwich, NY; Heidelberg Germany
Language: eng
Number of pages: 965
Subjects: Microelectromechanical systems.
Notes: Includes bibliographical references and index.