Wafer fabrication
Subtitle: factory performance and analysis
By: Linda F. Atherton, Robert W. Atherton.
Contributors: Atherton, Robert W.
Series: The Kluwer international series in engineering and computer science ;; SECS 339.; Microelectronics manufacturing; Kluwer international series in engineering and computer science ;; SECS 339.; Kluwer international series in engineering and computer science.
Publisher: Kluwer Academic Publishers
Published: 1995
Place of publication: Boston
Language: eng
Number of pages: 468
Subjects: Semiconductor wafers -- Design and construction; Factory management
Notes: Includes bibliographical references and index.