ULSI science and technology/1987
Subtitle: proceedings of the First International Symposium on Ultra Large Scale Integration Science and Technology
By: edited by S. Broydo, C.M. Osburn ; assistant editors, J.M. Andrews ... [et al.].
Contributors: Broydo, S.; Osburn, C. M.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Series: Proceedings / The Electrochemical Society ;; v. 87-11; Proceedings (Electrochemical Society) ;; v. 87-11.
Publisher: Electrochemical Society
Published: 1987
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 840
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses.
Notes: Includes bibliographies and indexes.
The Symposium was held May 11-15, 1987 in Philadelphia, Pa., and co-sponsored by the Electronics and Dielectrics & Insulation Divisions of the Electrochemical Society, Inc.