Micro electro mechanical systems
Subtitle: an investigation of micro structures, sensors, actuators, machines and robots : proceedings
By: IEEE, Salt Lake City, Utah, February 20-22, 1989 ; sponsored by the IEEE Robotics and Automation Council.
Contributors: IEEE Robotics and Automation Council.; IEEE Worskshop on Micro Electro Mechanical Systems (2nd : 1989 : Salt Lake City, Utah)
Publisher: Institute of Electrical and Electronics Engineers
Published: 1989
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 156
Subjects: Electromechanical devices -- Congresses.; Miniature objects -- Congresses.; Microelectronics -- Congresses.; Robotics -- Congresses.
Other titles: IEEE micro electro mechanical systems.
Notes: Includes bibliographies.
Papers presented at the second IEEE Workshop on Micro Electro Mechanical Systems.
"IEEE catalog number 89TH0249-3."