Thin film technology
By: by Robert W. Berry, Peter M. Hall, Murray T. Harris.
Contributors: Hall, Peter M. 1934-, joint author.; Harris, Murray T., joint author.
Publisher: R. E. Krieger Pub. Co.
Published: 1979
Place of publication: Huntington, N.Y
Language: eng
Number of pages: 706
Subjects: Thin films.; Thin film circuits.; Integrated circuits.
Notes: Includes bibliographical references and index.
Reprint of the ed. published by Van Nostrand Reinhold, New York.