Rare-Earth Implanted MOS Devices for Silicon Photonics
Subtitle: Microstructural, Electrical and Optoelectronic Properties
Publisher: Springer; Brand: Springer
Published: Dec 01, 2012
Format: paperback
Number of pages: 192
ISBN-13: 9783642265587
Notes: Source title: Rare-Earth Implanted MOS Devices for Silicon Photonics: Microstructural, Electrical and Optoelectronic Properties (Springer Series in Materials Science)