Laser-assisted microtechnology
By: Simeon M. Metev, Vadim P. Veiko.
Contributors: Veĭko, V. P.
Edition: 2nd, updated ed.
Series: Springer series in materials science,; 19; Springer series in materials science ;; v. 19.
Publisher: Springer
Published: 1998
Place of publication: Berlin; New York
Language: eng
Number of pages: 270
Subjects: Electronic industries -- Technological innovations.; Lasers -- Industrial applications.; Manufacturing processes.; Micromachining.; Thin  film devices -- Design and construction.
Notes: Includes bibliographical references (p. 247-267) and index.