Atomic layer deposition
Subtitle: principles, characteristics, and nanotechnology applications
By: Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman
Contributors: Cameron, David, 1949-; Kääriäinen, Marja-Leena; Sherman, Arthur, 1931-
Edition: 2nd Edition
Publisher: Scrivener Publishing
Published: 2013
Place of publication: Beverly, MA
Language: eng
Number of pages: 253
ISBN-13: 9781118062777
Copyright date: 2013
Subjects: Chemical vapor deposition; Epitaxy; Microelectronics; Nanotechnology; Atomic layer deposition
Notes: Includes bibliographical references and index.