Vsli Electronics Microstructure Science
Subtitle: Lithography for Vlsi (VLSI electronics)
Contributors: R. K. Watts (Editor)
Publisher: Academic Pr
Published: September 1987
Language: eng
Format: Hardcover
Number of pages: 361
ISBN-13: 9780122341168
Subjects: Very large scale integration; Optical Lithography; Very-Large-Scale Integration (Vlsi); Science/Mathematics; Integrated circuits; Circuits & components; Lithography; Printed circuits