Laser applications in microelectronic and optoelectronic manufacturing V
Subtitle: 24-26 January, 2000, San Jose, USA
By: Henry Helvajian, ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering.
Contributors: Helvajian, Henry; United States. Air Force. Office of Scientific Research.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE ;; v. 3933; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3933.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 514
Subjects: Microelectronics industry -- Equipment and supplies -- Congresses.; Lasers -- Industrial applications -- Congresses.; Manufacturing processes -- Congresses.; Laser ablation -- Congresses.; Optoelectronic devices -- Design and construction -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.