Lithographic and micromachining techniques for optical component fabrication II
Subtitle: 3-4 August 2003, San Diego, California, USA
By: Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, WA
Language: eng
Number of pages: 208