Sputtering by Particle Bombardment III
Subtitle: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)
Contributors: K. Wittmaack (Editor)
Publisher: Springer
Published: September 1991
Language: eng
Format: Hardcover
Number of pages: 410
ISBN-13: 9780387534282
Subjects: Physics; Particle Physics; Science; Science/Mathematics