In Situ Process Diagnostics and Modelling
Subtitle: Symposium Held April 6-7, 1999, San Francisco, California, U.S.A (Materials Research Society Symposium Proceedings)
Contributors: Orlando Auciello (Editor); Alan Robert Krauss (Editor); Eugene A. Irene (Editor); J. A. Schultz (Editor)
Publisher: Materials Research Society
Published: September 1999
Language: eng
Format: Hardcover
Number of pages: 199
ISBN-13: 9781558994768
Subjects: Quantum Electronics; Solid State Electronics; Technology; Technology & Industrial Arts; Science/Mathematics; Material Science; Electronics - General; Electronics - Solid State; Congresses; Design and construction; Industrial applications; Lasers; Plasma diagnostics; Thin film devices