Microelectronic device technology III
Subtitle: 22-23 September 1999, Santa Clara, California
By: David Burnett, Toshiaki Tsuchiya, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.].
Contributors: Burnett, David.; Tsuchiya, Toshiaki.; Society of Photo-optical Instrumentation Engineers.; Electrochemical Society.
Series: SPIE proceedings series ;; v. 3881; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3881.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 304
Subjects: Semiconductors -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Microelectronics -- Congresses.
Genres: Congresses.
Other titles: Microelectronic device technology 3; Microelectronic device technology three
Notes: Includes bibliographical references and index.