Micromechanical systems, 1993
Subtitle: presented at the 1993 ASME Winter Annual Meeting, New Orleans, Louisiana, November 28-December 3, 1993
By: sponsored by the Dynamic Systems and Control Division, ASME  ; edited by A.P. Pisno, J. Jara-Almonte, W. Trimmer.
Contributors: Pisano, A. P.; Jara-Almonte, J.; Trimmer, W.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; American Society of Mechanical Engineers. Winter Meeting.
Series: DSC -- vol. 46; DSC (Series) -- vol. 46.
Publisher: The Society
Published: 1993
Place of publication: New York
Language: eng
Number of pages: 107
Subjects: Microelectronics -- Congresses.; Micromechanics -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.; Electromechanical devices -- Congresses.
Notes: Includes bibliographical refrences and index.