Electron Optical Systems for Microscopy, Microanalysis and Microlithography
Subtitle: Proceedings of the 3rd Pfefferkorn Conference, Held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD
Contributors: John J. Hren (Editor)
Publisher: Scanning Microscopy Intl
Published: December 1984
Language: eng
Format: Hardcover
Number of pages: 272
ISBN-13: 9780931288340
Subjects: Science/Mathematics; Congresses; Microlithography; Electron microscopy; Electron optics; Microchemistry