ASMC 99
Subtitle: 10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : [proceedings] : September 8-10, 1999, the Fairmont Copley Plaza, Boston, Massachusetts, USA
By: co-sponsored by: Semiconductor Equipment and Materials International (SEMI), Institute of Electrical and Electronics Engineers, Inc. (IEEE) ... [et al.].
Contributors: Institute of Electrical and Electronics Engineers.; Semiconductor Equipment and Materials International.
Publisher: IEEE; SEMI
Published: 1999
Place of publication: Piscataway, New Jersey; Mountain View, California
Language: eng
Number of pages: 455
Subjects: Semiconductor industry -- Congresses; Semiconductors -- Design and construction -- Congresses; Process control -- Congresses
Genres: Congresses.
Other titles: 1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.; 10 years of advancing the science of semiconductor manufacturing excellence.; Advanced Semiconductor Manufacturing Conference and Workshop.
Notes: Cover title.

"!0 Years of Advancing the Science of Semiconductor Manufacturing Excellence"--p. i.

"IEEE Catalog Number 99CH36295"--p. iii.

Includes bibliographic references.