Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II
Subtitle: 29-30 January 1998, San Jose, California
By: John C. Stover, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Stover, John C.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 3275; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3275.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 186
Subjects: Semiconductor wafers -- Measurement -- Congresses.; Surface roughness -- Measurement -- Congresses.; Flatness measurement -- Congresses.
Notes: Includes bibliographical references and index.