Materials for mechanical and optical microsystems
Subtitle: symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.
By: editors, Michael L. Reed ... [et al.].
Contributors: Reed, Michael L.
Series: Materials Research Society symposium proceedings ;; v. 444; Materials Research Society symposia proceedings ;; v. 444.
Publisher: Materials Research Society
Published: 1997
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 242
Subjects: Microelectronics -- Materials -- Congresses.; Electromechanical devices -- Materials -- Congresses.; Thin films -- Congresses.; Optical films -- Congresses.
Notes: Includes bibliographical references and indexes.