Materials aspects of x-ray lithography
Subtitle: symposium held April 12-14, 1993, San Francisco, California, U.S.A.
By: editors, George K. Celler, Juan R. Maldonado.
Contributors: Celler, George K.; Maldonado, Juan R.; Materials Research Society.
Series: Materials Research Society symposium proceedings,; v. 306; Materials Research Society symposia proceedings ;; v. 306.
Publisher: Materials Research Society
Published: 1993
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 291
Subjects: X-ray lithography -- Congresses.
Notes: Includes bibliographical references and indexes.
Papers based on the symposium on Materials Aspects of X-Ray Lithography, held in San Francisco, California, on April 12-14, 1993.