Metal Impurities in Silicon- and Germanium-Based Technologies
Subtitle: Origin, Characterization, Control, and Device Impact
Publisher: Springer
Published: Jan 30, 2019
Format: paperback
Number of pages: 438
ISBN-13: 9783030067472
Notes: Source title: Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (Springer Series in Materials Science)