Selected papers on optical microlithography
By: Harry L. Stover, editor.
Contributors: Stover, Harry L.
Series: SPIE milestones series ;; v. MS 55
Publisher: SPIE Optical Engineering Press
Published: 1992
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 676
Subjects: Semiconductors -- Design and construction.; Microlithography.; Masks (Electronics)
Other titles: Optical microlithography.
Notes: Includes bibliographical references and index.
Papers originally published in various journals, 1974-1991.