Changes in structure and stress in Mo/a-Si thin films upon annealing
By: by Frank John Weber.
Published: 1995
Language: eng
Number of pages: 31
Subjects: Thin films, Multilayered -- Mechanical properties.; Molybdenum -- Heat treatment.; Silicon -- Heat treatment.
Notes: Typescript (photocopy)

Thesis (M.S.)--Oregon State University, 1996.

Includes bibliographical references (leaves 30-31).