Obrabotka monokristallov v mikroėlektronike
By: V.I. Karbanʹ, I͡U︡.I. Borzakov.
Contributors: Borzakov, I͡U︡. I.
Edition: Proizvodstvennoe izd.
Series: Massovai͡a︡ biblioteka inzhenera "Ėlektronika" ;; 30
Publisher: "Radio i svi͡a︡zʹ"
Published: 1988
Place of publication: Moskva
Language: rus
Number of pages: 103
Subjects: Semiconductors.; Microelectronics.
Notes: Bibliography: p. 96-102.