Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing III
Subtitle: DECON 2001 : Proceedings of the satellite symposium to ESSDERC 2001, Nuremberg, Germany
By: editors, B.O. Kolbesen ... [et al.] ; Electronics Division [of the Electrochemical Society].
Contributors: Kolbesen, Bernd O.; Electrochemical Society. Electronics Division.; European Solid State Device Research Conference (31st : 2001 : Nuremberg, Germany)
Series: Proceedings -- v. 2001-29; Proceedings (Electrochemical Society) -- v. 2001-29.
Publisher: Electrochemical Society
Published: 2001
Place of publication: Pennington, NJ
Language: eng
Number of pages: 362
Subjects: Integrated circuits -- Very large scale integration -- Congresses.; Crystals -- Defects -- Congresses.; Contamination (Technology) -- Congresses.
Other titles: DECON 2001
Notes: Previous conferences entered under title.

Includes bibliographic references and indexes.