Maikuro mashin kenkyū kaihatsu purojekuto tsuiseki hyōka hōkokusho
Publisher: Sangyō Kōzō Shingikai Sangyō Gijutsu Bunkakai Hyōka Shōiinkai
Published: 2006
Place of publication: [Tokyo]
Language: jpn
Number of pages: 70
Subjects: Microelectromechanical systems; Research
Notes: Cover title.