Polysilicon thin films and interfaces
Subtitle: symposium held April 17-19, 1990, San Francisco, California, U.S.A.
By: editors, Theodore Kamins, Bruha Raicu, Carl V. Thompson.
Contributors: Kamins, Theodore I.; Raicu, Bruha.; Thompson, C. V.; Materials Research Society.
Series: Materials Research Society Symposium proceedings ;; v. 182; Materials Research Society symposia proceedings ;; v. 182.
Publisher: Materials Research Society
Published: 1990
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 403
Subjects: Silicon -- Electric properties -- Congresses.; Integrated circuits -- Materials -- Congresses.; Thin film devices -- Congresses.
Notes: Includes bibliographical references and indexes.