Microprocesses and Nanotechnology '98
Subtitle: digest of papers : 1998 International Microprocesses and Nanotechnology Conference, July 13-16, 1998, Kyoungju, Korea
By: sponsored by the Japan Society of Applied Physics ... [et al.].
Contributors: Ōyō Butsuri Gakkai.
Publisher: IEEE]
Published: 1998
Place of publication: [Piscataway, New Jersey
Language: eng
Number of pages: 355
Subjects: Microfabrication -- Congresses.; Nanotechnology -- Congresses.
Genres: Congresses.
Other titles: Digest of papers
Notes: Includes bibliographical references and author index.
IEEE Catalog Number and microfiche ISBN from label on verso of T.p.
"IEEE Catalog Number 98EX135 ; JSAP Cat. No. 981223"--verso of T.p.