Thin film metallurgy for microelectronics
Subtitle: physical and technical studies of Si-metal reactions
By: Shaofang Gong
Contributors: Universitetet i Linköping
Series: Linköping studies in science and technology- dissertations -- no 226
Publisher: University of Linköping, Department of Physics and Measurement Technology
Published: 1990
Language: eng
Notes: Thesis (doctoral)--University of Linköping, 1990.