Environmental, safety, and health issues in IC production
Subtitle: symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.
By: editors, Rafael Reif ... [et al.].
Contributors: Reif, Rafael.; Symposium on Environmental, Safety, and Health (ESH) Issues in IC Production (1996 : Boston, Mass.)
Series: Materials Research Society symposia proceedings ;; v. 447
Publisher: Materials Research Society
Published: 1997
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 154
Subjects: Semiconductor industry -- Safety measures -- Congresses.; Integrated circuits industry -- Safety measures -- Congresses.; Manufacturing processes -- Safety measures -- Congresses.; Green technology -- Congresses.
Notes: Includes bibliographical references and index.