Photons and Low Energy Particles in Surface Processing
Subtitle: Symposium Held December 3-6, 1991, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings)
Contributors: Stella W. Pang (Editor)
Publisher: Materials Research Society
Published: April 1992
Language: eng
Format: Hardcover
Number of pages: 552
ISBN-13: 9781558991309
Subjects: Science/Mathematics; Physical Properties Of Materials; Optical Engineering; Surfaces (Technology); Plasma etching; Congresses; Industrial applications; Lasers