Advances in Rapid Thermal Processing
Subtitle: Proceedings of the Symposium (Proceedings (Electrochemical Society), 99-10.)
Contributors: Electrochemical Society Electronics Division (Corporate Author); Electrochemical Society. Dielectric Science and Technology Division (Corporate Author); Electrochemical Society High Temperature Materials Division (Corporate Author); Fred Roozeboom (Editor)
Publisher: Electrochemical Society
Published: September 1999
Language: eng
Format: Hardcover
Number of pages: 452
ISBN-13: 9781566772327
Subjects: Electronics - Semiconductors; Technology & Industrial Arts; Congresses; Heat treatment; Rapid thermal processing; Semiconductors; Science/Mathematics