Semiconductor silicon 1986
Subtitle: proceedings of the Fifth International Symposium on Silicon Materials Science and Technology
By: edited by Howard R. Huff, Takao Abe, Bernd Kolbesen ; Electronics and Dielectrics and Insulation Divisions [sponsors]
Contributors: Huff, Howard R.; Electrochemical Society. Electronics Division; Electrochemical Society. Dielectrics and Insulation Division
Series: Proceedings (Electrochemical Society) -- v. 86-4
Publisher: Electrochemical Society
Published: 1986
Place of publication: Pennington, NJ
Language: eng
Number of pages: 1096
Copyright date: 1986
Subjects: Silicon; Congresses; Semiconductors
Notes: Held 5-9 May, 1986 in Boston.

Includes bibliographical references and indexes.