Optical microlithography XXI
Subtitle: 26-29 February 2008, San Jose, California, USA
By: Harry J. Levinson, Mircea V. Dusa, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA)
Contributors: Society of Photo-optical Instrumentation Engineers; International SEMATECH
Series: Proceedings of SPIE -- v. 6924; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6924.
Publisher: SPIE
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819471093
Notes: Includes bibliographical references and author index.