Low-energy sputtering research
By: P.K. Ray and V. Shutthanandan.
Contributors: Shutthanandan, V.; NASA Glenn Research Center.
Series: [NASA contractor report] -- NASA/CR-1999-209162.; NASA contractor report -- NASA CR-209162.
Publisher: National Aeronautics and Space Administration, Glenn Research Center; National Technical Information Service, distributor
Published: 1999
Place of publication: [Cleveland, Ohio]; Springfield, VA
Language: eng
Format: Microform
Other titles: Low energy sputtering research.
Notes: Shipping list no.: 2000-0108-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1999] 1 microfiche.