Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Subtitle: standard reference materials
By: Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
Contributors: Varner, Ruth N.; Potzick, James E.; National Institute of Standards and Technology (U.S.)
Series: Standard reference materials; NIST special publication ;; 260-119
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1992
Place of publication: Gaithersburg, MD; Washington, D.C
Language: eng
Number of pages: 36
Subjects: Microscopes -- Calibration -- Standards.; Chromium -- Spectra -- Standards.; Integrated circuits -- Masks -- Measurement.; Microscopes -- Calibration -- Standards.; Integrated circuits -- Masks -- Measurement.; Chromium -- Spectra -- Standards.
Notes: Distributed to depository libraries in microfiche.
Shipping list no.: 92-2587-M.