Mikrosystemtechnik
Subtitle: Chemnitz '97 : Mikromechanik & Mikroelektronik, 13.-14. Oktober 1997, Chemnitz
By: Technische Universität Chemnitz ; [Veranstalter, Wolfram Dötzel, Dietmar Müller].
Contributors: Dötzel, Wolfram.; Müller, Dietmar, Prof. Dr.-Ing. habil.; Technische Universität Chemnitz.
Publisher: Technische Universität Chemnitz, Fakultät für Elektrotechnik und Informationstechnik
Published: 1997
Place of publication: Chemnitz
Language: ger
Number of pages: 273
Subjects: Microelectronics -- Congresses; Micromechanics -- Congresses
Genres: Congresses.
Other titles: Chemnitz '97
Notes: Includes bibliographical references.