Spectroscopic characterization techniques for semiconductor technology
Subtitle: 9-10 November 1983, Cambridge, Massachusetts
By: Fred H. Pollak, Robert S. Bauer, chairmen/editors.
Contributors: Pollak, Fred H.; Bauer, Robert S.; Society of Photo-Optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 452
Publisher: SPIE--the International Society for Optical Engineering
Published: 1984
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 203
Subjects: Semiconductors -- Testing -- Congresses.; Spectrum analysis -- Congresses.
Notes: Includes bibliographies and index.