Microsensors
By: edited by Richard S. Muller ... [et al.].
Contributors: Muller, Richard S.; IEEE Electron Devices Society.
Publisher: IEEE Press
Published: 1991
Place of publication: New York
Language: eng
Number of pages: 472
Subjects: Miniature electronic equipment -- Design and construction.; Detectors -- Design and construction.; Microelectronics.
Notes: Includes bibliographical references (p. 451-461) and indexes.
"Prepared under the sponsorship of the IEEE Electron Devices Society."