Vlsi Electronics: Microstructure Science 
Subtitle: Plasma Processing for Vlsi (V L S I Electronics)
Publisher: Academic Pr
Published: June 1984
Language: eng
Format: Hardcover
Number of pages: 527
ISBN-13: 9780122341083
Subjects: Integrated circuits; Circuits & components; General Theory of Computing; Plasma (Ionized gases); Very-Large-Scale Integration (Vlsi); Industrial applications; Very large scale integration