Proceedings of the Japan-U.S. Seminar on Focused Ion Beam Technology and Applications
Subtitle: 15-19 November 1987, Senri Hankyu Hotel, Osaka, and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan
By: sponsored by the Japan Society for the Promotion of Science and the National Science Foundation ; cosponsored by the American Vacuum Society ; special editor for the proceedings, Lloyd R. Harriott.
Contributors: Harriott, Lloyd R.; Nihon Gakujutsu Shinkōkai.; National Science Foundation (U.S.); American Vacuum Society.
Publisher: Published for the American Vacuum Society by the American Institute of Physics
Published: 1988
Place of publication: New York
Language: eng
Number of pages: 1045
Subjects: Ion bombardment -- Congresses.; Ion bombardment -- Industrial applications -- Congresses.
Notes: Includes bibliographies and index.
"The proceedings are published in both the 1988 May/June issue of the Journal of vacuum science and technology B, vol. 6, no. 3 and in a special casebound edition"--T.p. verso.