Chemical Vapor Deposition for Microelectronics
Subtitle: Principles, Technology, and Applications (Materials Science and Process Technology)
Publisher: Noyes Publications
Published: March 1, 1988
Language: eng
Format: Hardcover
Number of pages: 215
ISBN-13: 9780815511366
Subjects: Circuits & components; Semiconductors; Coating Technology; Technology; Technology & Industrial Arts; Science/Mathematics; Vapor-plating; Electronics - Circuits - Integrated; Electronics - Microelectronics; Technology / Electronics / Microelectronics; Design and construction; Integrated circuits
First sentence: Chemical vapor deposition (CVD) is a process where one or more gaseous species react on a solid surface and one of the reaction products is a solid phase material.