Carbon films grown from plasma on III-V semiconductors
By: J.J. Pouch, J.D. Warner, and D.C. Liu.
Contributors: Warner, J.D.; Liu, D.C.; United States. National Aeronautics and Space Administration.
Series: NASA technical memorandum -- 87140.
Publisher: National Aeronautics and Space Administration
Published: 1985
Place of publication: [Washington, DC?]
Language: eng
Format: Microform
Subjects: Semiconductors.
Notes: Distributed to depository libraries in microfiche.

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1985. 1 microfiche ; 11 x 15 cm.