Lineĭnye izmerenii︠a︡ mikrometrovogo i nanometrovogo diapazonov v mikroėlektronike i nanotekhnologii
By: otvetstvennyĭ redaktor toma, I︠U︡.A. Novikov.
Contributors: Novikov, I︠U︡. A.; Institut obshcheĭ fiziki (Rossiĭskai︠a︡ akademii︠a︡ nauk)
Series: Trudy Instituta obshcheĭ fiziki im. A.M. Prokhorova -- t. 62
Publisher: Nauka
Published: 2006
Place of publication: Moskva
Language: rus
Number of pages: 142
Subjects: Nanotechnology -- Measurement; Microelectronics -- Measurement
Other titles: Linear measurements in micrometer and nanometer ranges for microelectronics and nanotechnology.
Notes: Includes bibliographical references.