Ion implantation technology
Subtitle: 17th International Conference on Ion Implantation Technology : IIT 2008, Monterey, California, 8-13 June 2008
By: editors, Edmund G. Seebauer ... [et al.] ; sponsoring organizations, Plansee Metal GmbH ... [et al.].
Contributors: Seebauer, Edmund G.; American Institute of Physics.; Plansee Metal (Firm)
Series: AIP conference proceedings -- v. 1066
Publisher: American Institute of Physics
Published: 2008
Place of publication: Melville, N.Y
Language: eng
Number of pages: 556
ISBN-13: 9780735405974
Subjects: Ion implantation -- Congresses; Semiconductors -- Congresses; Semiconductor doping -- Congresses
Genres: Congresses
Other titles: 17th International Conference on Ion Implantation Technology; IIT 2008
Notes: Includes bibliographical references and index.