2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013)
Subtitle: Taipei, Taiwan, 20-24 January 2013
Publisher: IEEE
Published: 2013
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 1210
ISBN-13: 9781467356541
Subjects: Microelectromechanical systems; Congresses
Other titles: MEMS 2013
Notes: "IEEE Catalog Number: CFP13MEM-PRT."

Includes bibliographical references and index.