Si Front-End Processing - Physics and Technology of Dopant-Defect Interactions III: Physics and Technology of Dopant-Defect Interactions III 
Subtitle: Symposium ... Symposium Proceedings Series Vol. 669)
Contributors: Erin C. Jones (Editor); Peter A. Stolk (Editor); K. S. Jones (Editor); J. Matsuo (Editor); M. D. Giles (Editor)
Publisher: Materials Research Society
Published: October 2001
Language: eng
Format: Hardcover
Number of pages: 352
ISBN-13: 9781558996052
Subjects: Electronics - Semiconductors; Technology & Industrial Arts; Congresses; Design and construction; Semiconductor doping; Semiconductors; Silicon; Science/Mathematics