Proceedings of the Symposium on Interconnect and Contact Metallization
By: editor, Hazara S. Rathore ... [et al.].
Contributors: Rathore, Harzara S.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Electrodeposition Division.
Series: Proceedings ;; 97-31; Proceedings (Electrochemical Society) ;; v. 97-31.
Publisher: Electrochemical Society
Published: 1998
Place of publication: Pennington, NJ
Language: eng
Number of pages: 276
Subjects: Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses.; Integrated circuits -- Ultra large scale integration -- Materials -- Congresses.; Electrochemical metallizing -- Congresses.; Plasma-enhanced chemical vapor deposition -- Congresses.; Dielectrics -- Congresses.
Other titles: Interconnect and contact metallization
Notes: Includes bibliographical references and index.
"Dielectric Science and Technology, Electronics, and Electrodeposition divisions."