Handbook of microlithography, micromachining, and microfabrication
By: P. Rai-Choudhury, editor. Vol.1, Microlithography.
Contributors: Rai-Choudhury, P.; Institution of Electrical Engineers.
Series: IEE materials and devices series -- 12; SPIE Press monograph -- PM39
Publisher: SPIE Optical Engineering Press; Institution of Electrical Engineers
Published: 1997
Place of publication: Bellingham, Wash; London
Language: eng