Soft-x-ray projection lithography
Subtitle: summaries of papers presented at the Soft-X-ray Projection Lithography Topical Meeting, April 6-8, 1992, Monterey, California
By: sponsored by Air Force Office of Scientific Research, Defense Advanced Research Projects Agency, National Science Foundation for the Optical Society of America.
Contributors: United States. Air Force. Office of Scientific Research.; United States. Defense Advanced Research Projects Agency.; National Science Foundation (U.S.)
Edition: Postconference ed.
Series: 1992 technical digest series ;; v. 8; Technical digest series (Optical Society of America) ;; 1992, v. 8.
Publisher: The Society
Published: 1992
Place of publication: Washington, DC
Language: eng
Number of pages: 153
Subjects: X-ray lithography -- Congresses.
Notes: Includes bibliographical references and index.