MOEMS and miniaturized systems IV
Subtitle: 27-28 January, 2004, San Jose, California, USA
By: Ayman El-Fatatry, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: El-Fatatry, Ayman.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 5346; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5346.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 260
Subjects: Microelectromechanical systems -- Congresses; Miniature electronic equipment -- Congresses; Micromechanics -- Congresses; Optics, Adaptive -- Congresses; Optical scanners -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.