Thin film reference materials development
Subtitle: final report for CRADA CN-1364
By: Barbara J. Belzer ... [et al.].
Contributors: Belzer, Barbara J.; National Institute of Standards and Technology (U.S.)
Series: Semiconductor measurement technology; NIST special publication -- 400-100.
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1998
Place of publication: Gaithersburg, MD; Washington, DC
Language: eng
Format: Microform
Number of pages: 38
Subjects: Silica -- United States; Thin-film circuits
Other titles: Semiconductor measurement technology: thin film reference materials development.
Notes: "April 1998."

Shipping list no.: 99-0049-M.

Includes bibliographical references (p. 26-27).

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 1998 1 microfiche : negative.