Advances in resist technology and processing X
Subtitle: 1-2 March, 1992, San Jose, California
By: William D. Hinsberg, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Hinsberg, William D.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering -- v. 1925.; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1925.
Publisher: SPIE
Published: 1993
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 738
ISBN-13: 9780819408273
Subjects: Photoresistors -- Congresses; Photoresists -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and author index.