EUV kōgen no kaihatsu to ōyō
Subtitle: Development and application of extreme ultraviolet light source
By: kanshū Toyoda Kōichi, Okazaki Shinji
Edition: Fukyūban
Series: Erekutoronikusu shirīzu
Publisher: Shīemushī Shuppan
Published: 2013
Place of publication: Tōkyō-to Chiyoda-ku
Language: jpn
Number of pages: 273
ISBN-13: 9784781307091
Subjects: Extreme ultraviolet lithography; Ultraviolet radiation; Industrial applications
Other titles: Development and application of extreme ultraviolet light source
Notes: Includes bibliographical references.