Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II
By: editors, Bernd O. Kolbesen ... [et al.] ; Electronics Division [of the Electrochemical Society].
Contributors: Kolbesen, Bernd O.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting; International Society of Electrochemistry. Meeting; Symposium on Silicon Cleaning Technology (1997 : Paris, France)
Series: Proceedings ;; v. 97-22; Proceedings (Electrochemical Society) ;; v. 97-22.
Publisher: Electrochemical Society
Published: 1997
Place of publication: Pennington, NJ
Language: eng
Number of pages: 517
Subjects: Integrated circuits -- Very large scale integration -- Congresses.; Crystals -- Defects -- Congresses.; Contamination (Technology) -- Congresses.
Other titles: Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II
Notes: Includes bibliographic references and indexes.
"This ... volume contains the 13 invited papers, 21 of 22 contributed papers and 10 papers presented as poster at the Second Symposium on 'Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing' which was part 01B of the Symposium on Silicon Cleaning Technology' held at the '1997 Joint International Meeting--The 192nd Meeting of the Electrochemical Society and the 48th Annual Meeting of the International Society of Electrochemistry' from August 31 to September 5, 1997 in Paris/France."--Preface.