Processing of poly-Si electrodes for charge-coupled devices
By: John W. Sherohman and Fred D. Cook
Contributors: Cook, Fred D., 1929- joint author; United States. Dept. of Energy; Lawrence Livermore Laboratory
Series: UCID ; 17995
Publisher: Dept. of Energy, Lawrence Livermore Laboratory; for sale by the National Technical Informaion Service]
Published: 1978
Place of publication: [Livermore, Calif.]; [Springfield, Va
Language: eng
Number of pages: 11
Subjects: Electrodes; Silicon
Notes: Prepared for U.S. Department of Energy under contract no. W-7405-Eng-48

At head of title: Lawrence Livermore Laboratory

Dec. 6, 1978

Includes bibliographical references