Electrochemical processing in ULSI fabricatrion III
Subtitle: proceedings of the International Symposium
By: editors, P.C. Andricacos ... [et al.] ; sponsoring Divisions, Electrodeposition, Dielectric Science and Technology, Electronics.
Contributors: Andricacos, Panayotis C., 1951-; Electrochemical Society. Electrodeposition Division.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting
Series: Proceedings -- v. 2000-8; Proceedings (Electrochemical Society) -- v.2000-8.
Publisher: Electrochemical Society
Published: 2002
Place of publication: Pennington, N.J
Language: eng
Number of pages: 258
Subjects: Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses.; Integrated circuits -- Ultra large scale integration -- Materials -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Dielectrics -- Congresses.; Electrochemical metallizing -- Congresses.; Electric contacts -- Congresses.
Genres: Congresses.
Notes: "Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.

Includes bibliographical references and indexes.