Chemical vapor deposition polymerization
Subtitle: the growth and properties of parylene thin films
By: by Jeffrey B. Fortin, Toh-Ming Lu.
Contributors: Lu, T.-M. 1943-
Publisher: Kluwer Academic Publishers; Springer
Published: 2004
Place of publication: Boston
Language: eng
Number of pages: 102
Subjects: Chemical vapor deposition; Thin films
Notes: Includes bibliographical references (p. [91]-99) and index.