Ultraclean Surface Processing of Silicon Wafers
Subtitle: Secrects of VLSI Manufacturing
Contributors: Takeshi Hattori (Editor); T. Hattori (Translator); S. Heusler (Translator); J.P. Webb (Translator)
Edition: 1 edition
Publisher: Springer
Published: October 30, 1998
Language: eng
Format: Hardcover
Number of pages: 616
ISBN-13: 9783540616726
Subjects: Condensed matter physics (liquids & solids); Electronic devices & materials; Science/Mathematics; Semiconductors; Technology; Technology & Industrial Arts; Electronics - Semiconductors; Manufacturing - Japanese Techniques; Physics; Technology / Material Science
First sentence: More than 50 years have passed since the transistor first came into being at Bell Laboratories in the United States, during which time semiconductor devices have developed at a startling rate.