Advanced metallization and interconnect systems for ULSI applications in 1996
Subtitle: proceedings of the conference held October 1-3, 1996, in Boston, Massachusetts, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 23-24, 1996, in Tokyo, Japan
By: editors, Robert Havemann ... [et al.].
Contributors: Havemann, Robert; University of California, Berkeley. Continuing Education in Engineering.
Series: Conference proceedings,; Materials Research Society conference proceedings.
Publisher: Materials Research Society
Published: 1997
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 608
Subjects: Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses.; Vapor-plating -- Congresses.; Electrochemical metallizing -- Congresses.; Dielectrics -- Congresses.; Titanium nitride -- Congresses.
Notes: Includes bibliographical references and indexes.