Ion beam processes in advanced electronic materials and device technology
Subtitle: symposium held April 15-18, 1985, San Francisco, California, U.S.A.
By: editors, B.R. Appleton, F.H. Eisen, T.W. Sigmon.
Contributors: Appleton, B. R.; Eisen, Fred H.; Sigmon, T. W.; Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology (1985 : San Francisco, Calif.)
Series: Materials Research Society symposia proceedings,; v. 45
Publisher: Materials Research Society
Published: 1985
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 393
Subjects: Semiconductors -- Congresses.; Ion implantation -- Congresses.
Notes: Includes bibliographies and indexes.
"These proceedings are a referred account of the Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology presented at the 1985 spring meeting of the Materials Research Society, April 15-18, 1985, in San Francisco, California."--Pref.