Instabilities in Silicon Devices 
Subtitle: New Insulators Devices and Radiation Effects
Contributors: Gerard Barbottin (Editor); Andre Vapaille (Editor)
Edition: 1st edition
Publisher: North Holland
Published: February 1, 1999
Language: eng
Format: Hardcover
Number of pages: 964
ISBN-13: 9780444818010
Subjects: Nuclear chemistry, photochemistry & radiation; Semi-conductors & super-conductors; Science; Technology & Industrial Arts; Science/Mathematics; Chemistry - Inorganic; Electricity; Electronics - Microelectronics; Engineering - Electrical & Electronic; Technology / Engineering / Electrical; General
First sentence: Although thermal oxide remains an insulator of choice for silicon-based microelectronic devices, thin nitride and oxynitride films possess superior qualities for specific applications.