Plasma Electronics
Subtitle: Applications in Microelectronic Device Fabrication (Series in Plasma Physics)
Publisher: Taylor & Francis
Published: March 27, 2006
Language: eng
Format: Hardcover
Number of pages: 360
ISBN-13: 9780750309769
Subjects: Mechanical engineering; Science/Mathematics; Physics; Science; Technology & Industrial Arts; Electronics - General; Engineering - Mechanical; Science / Physics; Plasma engineering