Alternative lithography
Subtitle: unleashing the potentials of nanotechnology
By: edited by Clivia M. Sotomayor Torres
Contributors: Sotomayor Torres, C. M
Series: Nanostructure science and technology
Publisher: Kluwer Academic/Plenum
Published: 2003
Place of publication: New York
Language: eng
Number of pages: 333
Subjects: Molecular electronics; Microlithography; Nanotechnology
Notes: Includes bibliographical references and index