Analytical and diagnostic techniques for semiconductor materials, devices, and processes
Subtitle: joint proceedings of symposia on: ALTEC 2003 : Analytical techniques for semiconductor materials and process characterization IV : Paris, France ; and the 202nd Meeting of the Electrochemical Society : Diagnostic techniques for semiconductor materials and devices VI : Salt Lake City, Utah
By: editors, Bernd O. Kolbesen ... [et al.] ; sponsored by the Electrochemical Society Electronics Division ; published in cooperation with: SPIE--the International Society for Optical Engineering.
Contributors: Kolbesen, Bernd O.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting; Electrochemical Society. Meeting; Society of Photo-optical Instrumentation Engineers; Symposium on Diagnostic Techniques for Semiconductor Materials and Devices (6th : 2002 : Salt Lake City, Utah)
Series: ECS Proceedings ;; v. 2003-03; SPIE ;; v. 5133; Proceedings (Electrochemical Society); v. 2003-03.; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5133.
Publisher: Electrochemical Society; SPIE
Published: 2003
Place of publication: Pennington, N.J; Bellingham, Wash
Language: eng
Number of pages: 556
Subjects: Semiconductors -- Analysis -- Congresses.
Genres: Congresses.
Other titles: Analytical techniques for semiconductor materials and process characterization IV; Diagnostic techniques for semiconductor materials and devices VI
Notes: Includes bibliographic references and indexes.
"... ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.