MEMS/MOEMS components and their applications
Subtitle: 26-27 January, 2004, San Jose, California, USA
By: Siegfried W. Janson, Albert K. Henning, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Janson, Siegfried W.; Henning, Albert Karl.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 5344; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5344.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 232
Subjects: Microelectromechanical systems -- Congresses.; Optoelectronic devices -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.