MEMS/MOEMS components and their applications V
Subtitle: special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA
By: Srinivas A. Tadigadapa, Babak A. Parviz, Albert K. Henning, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA)
Contributors: Society of Photo-optical Instrumentation Engineers; Boston University. Photonics Center
Series: Proceedings of SPIE -- v. 6885; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6885.
Publisher: SPIE
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819470607
Notes: Includes bibliographical references and author index.