Electron-beam induced damage in thin insulating films on compound semiconductors
By: Dragan M. Pantic.
Contributors: United States. National Aeronautics and Space Administration.
Series: NASA contractor report -- 185177.; NASA contractor report -- NASA CR-185177.
Publisher: University of Cincinnati; For sale by the National Technical Information Service
Published: 1990
Place of publication: Cincinnati, Ohio; [Springfield, Va
Language: eng
Format: Microform
Subjects: Semiconductors.; Electronics.
Other titles: Electron beam induced damage in thin insulating films on compound semiconductors.
Notes: Distributed to depository libraries in microfiche.

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1990. 2 microfiches.