Plasma Deposition, Treatment, and Etching of Polymers
Subtitle: The Treatment and Etching of Polymers (Plasma-Materials Interactions)
Contributors: Riccardo d'Agostino (Editor); Daniel L. Flamm (Series Editor); Orlando Auciello (Series Editor)
Publisher: Academic Press
Published: October 28, 1990
Language: eng
Number of pages: 544
ISBN-13: 9780122004308
First sentence: Plasma polymerization is a specific type of plasma chemistry and involves reactions between plasma species, between plasma and surface species and between surface species.