ARPA/NBS workshop IV
Subtitle: surface analysis for silicon devices
By: [edited by] A. George Lieberman.
Contributors: Lieberman, A. George 1937-; United States. National Bureau of Standards.
Series: Semiconductor measurement technology; NBS special publication ; 400-23; NBS special publication ;; 400-23.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards ; [for sale by the Supt. of Docs., Govt. Print. Off.]
Published: 1976
Place of publication: Washington
Language: eng
Number of pages: 239
Subjects: Semiconductors -- Testing -- Congresses.; Silicon -- Testing -- Congresses.; Surfaces (Technology) -- Analysis -- Congresses.; Spectrum analysis -- Congresses.
Notes: Includes bibliographical references and index.
"Contains the proceedings of the ARPA/NBS workshop IV, Surface analysis for silicon devices, held at the National Bureau of Standards on April 23-24, 1975."