Micro- and nanotechnology
Subtitle: materials, processes, packaging, and systems II : 13-15 December 2004, Sydney, Australia
By: Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, University of New South Wales (Australia) ... [et al.] ; cooperating organizations, University of Adelaide (Australia), Centre for Biomedical Engineering, Adelaide (Australia).
Contributors: Chiao, Jung-Chih.; Society of Photo-optical Instrumentation Engineers.; University of New South Wales.; University of Adelaide.; International Symposium on Smart Materials, Nano-,  and Micro-Smart Systems (2004 : University of New South Wales)
Series: SPIE proceedings series,; v. 5650; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5650.
Publisher: SPIE
Published: 2005
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 572
Subjects: Microelectromechanical systems -- Congresses.; Microtechnology -- Materials -- Congresses.; Nanotechnology -- Materials -- Congresses.; Electronic packaging -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.
"Part of SPIE's 2004 International Symposium on Smart Materials, Nano-,  and Micro-Smart Systems, held at University of New South Wales, Sydney, Australia, on 12-15 December 2004"--P. xiii.