CVD growth of silicon carbide for high frequency applications
By: Urban Forsberg
Contributors: Universitetet i Linköping
Series: Linköping studies in science and technology -- no. 708
Publisher: Dept. of Physics and Measurement Technology, Linköpings universitet
Published: 2001
Place of publication: Linköping
Language: eng
Number of pages: 184
Subjects: Silicon carbide
Notes: Thesis (doctoral)--Linköpings universitet.