Tungsten and other refractory metals for VLSI applications III
Subtitle: proceedings of the 1987 workshop held October 7-9, 1987, IBM Thomas J. Watson Research Center, Yorktown Heights, New York, U.S.A.
By: editor, Victor A. Wells; associate editors: Carol  M. McConica ... [et al.].
Contributors: Wells, Victor A.; Materials Research Society.; Workshop on Tungsten and Other Refractory Metals for VLSI Applications (4th : 1987 : Yorktown Heights, N.Y.)
Publisher: Materials Research Society
Published: 1988
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 428
Subjects: Integrated circuits -- Very large scale integration -- Materials -- Congresses.; Tungsten -- Congresses.; Heat resistant alloys -- Congresses.
Genres: Congresses.
Notes: "University Extension, University of California, Berkeley ... is in charge of workshop administration."

Includes bibliographies and indexes.