Micromachining and microfabrication process technology XVII
Subtitle: 24 and 26 January 2012, San Francisco, California, United States
By: Mary Ann Maher, Paul J. Resnick, editors ; sponsored by SPIE ; cosponsored by Dyoptyka (Ireland) [and] VUZIX Corportation (United States)
Contributors: SPIE (Society); Dyoptyka (Firm); Vuzix Corporation
Series: Proceedings of SPIE -- v. 8248; Proceedings of SPIE--the International Society for Optical Engineering -- v. 8248.
Publisher: SPIE
Published: 2012
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819488916
Subjects: Microfabrication; Congresses; Electromechanical devices; Micromachining; Miniature electronic equipment; Design and construction
Other titles: Micromachining and microfabrication process technology 17; Micromachining and microfabrication process technology seventeen
Notes: Includes bibliographical references and index.