Environmental issues with materials and processes for the electronics and semiconductor industries V
Subtitle: proceedings of the international symposium
By: editor, L. Mendicino
Contributors: Mendicino, L. (Laura); Electrochemical Society. Dielectric Science and Technology Division; Electrochemical Society. Meeting
Series: Proceedings -- v. 2002-15.; Proceedings (Electrochemical Society) -- v. 2002-15.
Publisher: Electrochemical Society
Published: 2002
Place of publication: Pennington, NJ
Language: eng
Number of pages: 262
Subjects: Electronic industries; Congresses; Electrochemistry; Photochemistry
Notes: "The Fifth Annual Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries was held at the 201st Meeting of the Electrochemical Society in Philadelphia, PA"--Pref.

"Sponsoring divisions, Dielectric Science and Technology Division."

Includes bibliographical references and indexes.