Gate Stack and Silicide Issues in Silicon Processing
Subtitle: Symposium Held April 25-27, 2000, San Francisco, California, U.S.A (Materials Research Society Symposia Proceedings, V. 611.)
Contributors: L. A. Clevenger (Editor); S. A. Campbell (Editor); P. R. Besser (Editor); S. B. Herner (Editor); J. Kittl (Editor)
Publisher: Materials Research Society
Published: July 2000
Language: eng
Format: Hardcover
Number of pages: 236
ISBN-13: 9781558995192
Subjects: Logic Design; Material Science; Technology; Computer Bks - General Information; Congresses; Gate array circuits; Integrated circuits; Materials; Silicides; Ultra large scale integration; Science/Mathematics