Electrochemical Processing in Ulsi Fabrication & Semiconductor/Metal Deposition II
Subtitle: Proceedings of the International Symposium (Proceedings (Electrochemical Society), V. 99-9.)
Contributors: Panayotis C. Andricacos (Editor); Electrochemical Society. Dielectric Science and Technology Division (Corporate Author); Electrochemical Society Electronics Division (Corporate Author)
Publisher: Electrochemical Society
Published: September 1999
Language: eng
Format: Hardcover
Number of pages: 400
ISBN-13: 9781566772310
Subjects: Congresses; Design and construction; Electric contacts; Integrated circuits; Semiconductors; Science/Mathematics