Cleaning and surface conditioning technology in semiconductor device manufacturing 10
By: editors, T. Hattori ... [et al.].
Contributors: Hattori, Takeshi, 1945-; Electrochemical Society. Electronics and Photonics Division.; Electrochemical Society. Meeting
Series: ECS transactions -- vol. 11, no. 2
Publisher: Electrochemical Society
Published: 2007
Place of publication: Pennington, NJ
Language: eng
Number of pages: 481
ISBN-13: 9781566775687
Subjects: Semiconductor wafers -- Cleaning -- Congresses
Genres: Congresses
Notes: "Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing was held during the fall meeting of the Electrochemical Society in Washington, DC in October 2007"--P. iii.

"Dielectric and semiconductor materials, devices, and processing"--Cover.

Includes bibliographical references and index.