Materials, technology and reliability for advanced interconnects and low-k dielectrics, 2003
Subtitle: symposium held April 21-25, 2003, San Francisco, California, U.S.A
By: editors: Andrew J. McKerrow ... [et al.].
Contributors: McKerrow, Andrew J.; Materials Research Society. Meeting; Symposim on Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics (2003 : San Francisco, Calif.)
Series: Materials Research Society symposium proceedings ;; v. 766; Materials Research Society symposia proceedings ;; v. 766.
Publisher: Materials Research Society
Published: 2003
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 515
Subjects: Semiconductors -- Materials -- Congresses.; Semiconductors -- Junctions -- Congresses.; Dielectric films -- Congresses.; Integrated circuits -- Materials -- Congresses.; Integrated circuits -- Reliability -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and indexes.
"Symposium E, 'Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics,' was held April 23-25 at the 2003 MRS Spring Meeting in San Francisco, California."--p. xv.