Processing of electronic materials
Subtitle: proceedings of the First International Conference held at Santa Barbara, California, USA, February 23-28, 1987
By: editors, Clarence G. Law, Jr. and Richard Pollard ; sponsored by Engineering Foundation.
Contributors: Law, Clarence G.; Pollard, Richard.; Engineering Foundation (U.S.); National Science Foundation (U.S.)
Publisher: American Institute of Chemical Engineers
Published: 1987
Place of publication: New York, N.Y
Language: eng
Number of pages: 478
Subjects: Manufacturing processes -- Congresses.; Semiconductors -- Congresses.; Thin films -- Congresses.; Electronic industries -- Congresses.
Genres: Congresses.
Notes: Supported by the National Science Foundation : ECS-8513719.

Includes bibliographies and index.