A software program for aiding the analysis of ellipsometric measurements, simple spectroscopic models
By: J.F. Marchiando.
Contributors: National Institute of Standards and Technology (U.S.)
Series: Semiconductor measurement technology; NIST special publication -- 400-84.
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; U.S. G.P.O.; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1990
Place of publication: Gaithersburg, MD; Washington
Language: eng
Format: Microform
Number of pages: 334
Subjects: Ellipsometry -- Computer programs.
Notes: "April 1990."

Includes bibliographical references (p. 333-334).

Microfiche. Washington, D.C. : U.S. G.P.O., 1990. 4 microfiches.