Electron micropobe analysis of tantalum-nitride thin films
By: by D. L. Stoltz and J. P. Starkey
Contributors: Bendix Corporation. Kansas City Division. Communications Services; United States. Dept. of Energy
Series: BDX ; 613-1198 (Rev.)
Publisher: Dept. of Energy; for sale by the National Technical Information Service]
Published: 1979
Place of publication: [Washington]; [Springfield, Va
Language: eng
Number of pages: 18
Subjects: Metal coating; Tantalum -- Analysis; Nitrogen -- Analysis
Notes: Prepared for the U.S. Dept. of Energy under contract no. DE-AC04-76-DP00613

"Communications Services, Bendix, Kansas City Division."

Topical report, June 1979

Includes bibliographical references