Photomask and X-ray mask technology
Subtitle: 22 April 1994, Kawasaki City, Kanagawa, Japan
By: Hideo Yoshihara, chair/editor ; sponsored by Japan Chapter of SPIE ; cosponsored by BACUS, SPIE--the International Society for Optical Engineering.
Contributors: Yoshihara, Hideo.; Society of Photo-optical Instrumentation Engineers. Japan Chapter.; BACUS (Technical group)
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 2254; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 2254.
Publisher: SPIE
Published: 1994
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 488
Subjects: Integrated circuits -- Masks -- Congresses.; Microlithography -- Congresses.
Notes: Includes bibliographical references and index.