Proceedings
Subtitle: IEEE Micro Electro Mechanical Systems, an investigations of micro structures, sensors, actuators, machines and robotic systems, Oiso, Japan, January 25-28, 1994
By: sponsored by the IEEE Robotics and Automation Society ; in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center.
Contributors: IEEE Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.
Publisher: IEEE Service Center
Published: 1994
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 360
Subjects: Electromechanical devices -- Congresses.; Microelectronics -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.
Other titles: 1994 IEEE Micro Electro Mechanical Systems.; Micro electro mechanical systems.
Notes: "IEEE catalog no. 94CH3304-1."

Proceedings of the 7th workshop.

Title on cover and spine: 1994 IEEE Micro Electro Mechanical Systems.

Includes bibliographical references and author index.