MOEMS
Subtitle: micro-opto-electro-mechanical systems
By: Manouchehr E. Motamedi, editor.
Contributors: Motamedi, M. Edward.
Publisher: SPIE Press
Published: 2005
Place of publication: Bellingham, WA
Language: eng
Number of pages: 614
Subjects: Microelectromechanical systems; Optoelectronic devices; Microfabrication
Notes: Includes bibliographical references and index.