Micromachining and imaging
Subtitle: 13 February 1997, San Jose, California
By: Terry A. Michalske, Mark A. Wendman, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organization, DARPA--Defense Advanced Research Projects Agency.
Contributors: Michalske, Terry A.; Wendman, Mark A.; Society of Photo-optical Instrumentation Engineers.; United States. Defense Advanced Research Projects Agency.
Series: SPIE proceedings series ;; v. 3009; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3009.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 152
Subjects: Micromachining -- Congresses.; Scanning probe microscopy -- Congresses.; Microwave imaging -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.