Fundamentals of silicon integrated device technology
By: edited by R.M. Burger and R.P. Donovan.
Contributors: Donovan, R. P. joint ed.
Series: Solid state physical electronics series; Prentice-Hall electrical engineering series
Published: 1967
Place of publication: Englewood Cliffs, N.J
Language: eng
Subjects: Microelectronics.; Silicon.
Notes: Includes bibliographies.
Table of contents: title: v. 1 Oxidation, diffusion, and epitaxy. v. 2. Bipolar and unipolar transistors.