Fundamentals of microfabrication
By: Marc Madou.
Publisher: CRC Press
Published: 1997
Place of publication: Boca Raton, Fla
Language: eng
Number of pages: 589
Subjects: Microelectronics.; Integrated circuits -- Design and construction.; Microelectromechanical systems -- Design and construction.; Machining.; Microelectronic packaging.; Lasers -- Industrial applications.
Notes: Includes bibliographical references (p. 565-569) and index.