Introduction to Microlithography (Acs Professional Reference Book)
Contributors: Larry F. Thompson (Editor); C. Grant Willson (Editor); Murrae J. Bowden (Editor)
Edition: 2 edition
Publisher: An American Chemical Society Publication
Published: February 10, 1998
Language: eng
Format: Hardcover
Number of pages: 540
ISBN-13: 9780841228481
Subjects: Art techniques & materials; Circuits & components; Industrial Chemistry & Manufacturing Technologies; PHYSICS; Planographic processes (eg lithography, screen printing, stencilling); Production & quality control management; Science; Electronics - Circuits - Printed; Electronic Apparatus And Devices; Microelectronics; Semiconductors; Plasma etching; Science/Mathematics; Photoresists; Chemistry - Organic; Chemistry - Physical & Theoretical; Science / Chemistry / Organic; Congresses; Microlithography
First sentence: The microelectronics revolution has had a profound impact on our technological society over the latter half of the twentieth century in such diverse fields as automobiles, computers and communications, medicine, energy, and home entertainment.