Fabrication and design of resonant microdevices
By: Behraad Bahreyni.
Series: Micro & nano technologies -- 3
Publisher: W. Andrew Inc.
Published: 2008
Place of publication: Norwich, NY
Language: eng
ISBN-13: 9780815515777
Subjects: Microelectromechanical systems -- Design and construction; Microfabrication; Resonance
Notes: Includes bibliographical references and index.