Ion Impantation Technology
Subtitle: 16th International Conference on Ion Implantation Technology; IIT 2006 (AIP Conference Proceedings / Accelerators, Beams, and Instrumentations)
Contributors: Karen J. Kirkby (Editor); Russell M. Gwilliam (Editor); Andy Smith (Editor); David Chivers (Editor)
Edition: 1 edition
Publisher: American Institute of Physics
Published: December 4, 2006
Language: eng
Format: Hardcover
Number of pages: 682
ISBN-13: 9780735403659
Subjects: Materials science; Technology: General Issues; Technology; Technology & Industrial Arts; Science/Mathematics; Material Science; Nuclear Physics; CMOS; Technology / Material Science; cluster sources; doping; infusion doping; ion beam modification; ion implantation and equipment; ion sources; laser annealing; proton beam writing; rapid thermal annealing; silicon device processing; thermal processing