2009 International Conference on Optical Instruments and Technology
Subtitle: MEMS/NEMS technology and applications : 19-21 October 2009, Shanghai, China
By: Zhaoying Zhou ... [et al.], editors ; sponsored by CIS--China Instrument and Control Society, COS--the Chinese Optical Society [and] SPIE ; cooperating organizations, Optoelectronic-Mechanic Technology and System Integration Chapter, CIS (China) ... [et al.].
Contributors: Zhou, Zhaoying; Zhongguo yi qi yi biao xue hui; Zhongguo guang xue xue hui; Zhongguo yi qi yi biao xue hui. Optoelectronic-Mechanic Technology and System Integration Chapter; SPIE (Society)
Series: Proceedings of SPIE -- v. 7510; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7510.
Publisher: SPIE
Published: 2009
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819478962
Other titles: MEMS/NEMS technology and applications
Notes: Includes bibliographical references and author index.