CW laser annealing of ion implanted single crystal silicon
By: by Arnon Gat.
Contributors: Gat, Arnon.
Publisher: Coherent Center for Laser Annealing
Published: 1979
Place of publication: Palo Alto, Calif
Language: eng
Number of pages: 119
Subjects: Ion implantation.; Annealing of crystals.; Silicon crystals.
Notes: Includes bibliographical references.