Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. ... Research Center, Yorktown Heights, New York
Publisher: Published for the American Vacuum Society by the American Institute of Physics
Published: 1982
Language: eng
Format: Unknown Binding
ISBN-13: 9780883184059
Subjects: Ion implantation; Sputtering (Physics); Plasma engineering; Congresses