Optical microscanners and microspectrometers using thermal bimorph actuators
By: Gerhard Lammel, Sandra Schweizer, and Philippe Renaud.
Contributors: Schweizer, Sandra.; Renaud, Philippe, 1958-
Series: Microsystems ;; v. 8; Microsystems (Series) ;; v. 8.
Publisher: Kluwer Academic
Published: 2002
Place of publication: Boston
Language: eng
Number of pages: 268
Subjects: Microelectromechanical systems; Optical scanners; Optical spectrometers
Notes: Includes bibliographical references (p. 229-253) and index.