A fast ion beam pattern generator
By: door Hendrik Nicolaas Slingerland
Contributors: Technische Universiteit Delft
Publisher: [s.n.]
Published: 1988
Place of publication: Netherlands
Language: eng
Number of pages: 176
Subjects: Ion beam lithography; Semiconductor wafers
Notes: Summary in Dutch.

Vita.

Thesis (doctoral)--Technische Universiteit Delft, 1988.

Includes bibliographical references.