Micromachining and microfabrication process technology X
Subtitle: 25-27 January 2005, San Jose, California, USA
By: Mary Ann Maher, Harold D. Stewart, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories.
Contributors: Perez-Maher, Mary Ann.; Stewart, Harold D.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: Proceedings of SPIE,; v. 5715; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5715.
Publisher: SPIE
Published: 2005
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 200
Subjects: Micromachining -- Congresses.; Microfabrication -- Congresses.; Electromechanical devices -- Design and construction -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.