MOEMS and miniaturized systems VI
Subtitle: 24-25 January 2007, San Jose, California, USA
By: David L. Dickensheets, Bishnu P. Gogoi, Harald Schenk, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Dickensheets, David L.; Gogoi, Bishnu P.; Schenk, Harald.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE -- v. 6466; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6466.
Publisher: SPIE
Published: 2007
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819465795
Subjects: Microelectromechanical systems -- Congresses; Miniature electronic equipment -- Congresses; Micromechanics -- Congresses; Optical scanners -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and author index.