MEMS components and applications for industry, automobiles, aerospace, and communication II
Subtitle: 28-29 January 2003, San Jose, California, USA
By: Siegfried W. Janson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Contributors: Janson, Siegfried W.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series,; v. 4981; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4981.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 248
Subjects: Microelectromechanical systems -- Design and construction -- Congresses.; Microelectromechanical systems -- Industrial applications -- Congresses.; Manufacturing processes -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.