Tochnoe mashinostroenie dli͡a︡ mikroėlektroniki
By: E.E. Onegin.
Series: Massovai͡a︡ biblioteka inzhenera "Elektronika"
Publisher: "Radio i svi͡a︡zʹ"
Published: 1986
Place of publication: Moskva
Language: rus
Number of pages: 86
Subjects: Microelectronics industry -- Equipment and supplies.
Notes: Bibliography: p. 86-[87]