Microelectronic Test Structures for CMOS Technology
By: by Manjul Bhushan, Mark B. Ketchen
Contributors: Ketchen, Mark B.; SpringerLink (Online service)
Publisher: Springer Science+Business Media, LLC
Published: 2011
Place of publication: New York, NY
Language: eng
Format: [electronic resource] /
ISBN-13: 9781441993762; 9781441993779
Subjects: Systems engineering; Engineering; Electronics; Optical materials