Scanning capacitance microscope imaging and modelling
By: Lorenzo Ciampolini
Edition: 1st ed.
Series: Series in microelectronics -- v. 130
Publisher: Hartung-Gorre
Published: 2002
Place of publication: Konstanz
Language: eng
Number of pages: 161
Subjects: Scanning electron microscopy
Notes: "Reprint of Diss. ETH no. 14304"-- T.p. verso.

Includes bibliographical references (p. 145-159).

Summary also in French.