IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems
Subtitle: An investigation of micro structures, sensors, actuators, machines, and ... Diego, California, USA, February 11-15, 1996
Publisher: Institute of Electrical and Electronics Engineers
Published: 1996
Language: eng
Format: Unknown Binding
Number of pages: 530
ISBN-13: 9780780329867
Subjects: Microelectronics; Detectors; Actuators; Electromechanical devices; Congresses