Low-k nanoporous interdielectrics
Subtitle: materials, thin film fabrications, structures and properties
By: authors, Moonhor Ree, Jinhwan Yoon, Kyuyoung Heo
Contributors: Yoon, Jinhwan; Heo, Kyuyoung
Publisher: Nova Science Publishers
Published: 2010
Place of publication: Hauppauge, N.Y
Language: eng
ISBN-13: 9781616687496
Notes: Includes bibliographical references and index.