Proceedings of the ninth European Conference on Chemical Vapour Deposition, Tampere, Finland, 22-27 August 1993
By: edited by: Tapio Mäntylä.
Contributors: Mäntylä, Tapio.
Series: Journal de physique IV -- C3; Supplement JP 2 (8)
Publisher: Journal de Physique
Published: 1993
Place of publication: Courtaboeuf
Language: eng