X-ray metrology in semiconductor manufacturing
By: by David K. Bowen, Brian K. Tanner.
Contributors: Tanner, B. K.
Publisher: Taylor & Francis
Published: 2006
Place of publication: Boca Raton, FL
Language: eng
Subjects: Semiconductors -- Design and construction -- Quality control.; Integrated circuits -- Measurement.; Semiconductor wafers -- Inspection.; X-rays -- Diffraction.; Fluroscopy.
Notes: Includes bibliographical references and index.