The 14th IEEE International Conference on Micro Electro Mechanical Systems
Subtitle: MEMS 2001 : Interlaken, Switzerland, January 21-25, 2001
By: sponsored by the IEEE Robotics and Automation Society.
Contributors: IEEE Robotics and Automation Society.
Publisher: Institute of Electrical and Electronics Engineers
Published: 2001
Place of publication: Piscataway N.J
Language: eng
Number of pages: 610
Subjects: Microelectromechanical systems -- Congresses.
Genres: Congresses.
Other titles: Micro Electro Mechanical Systems; MEMS 2001
Notes: Includes bibliographical references.
"IEEE Catalog Number: 01CH37090"--T.p. verso.
Ahead of title : "Technical Digest".