Low energy ion beam and plasma modification of materials
Subtitle: symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.
By: editors, James M.E. Harper ... [et al.].
Contributors: Harper, James M. E.; Materials Research Society.; Symposium on Low Energy Ion Beam and Plasma Modification of Materials (1991 : Anaheim, Calif.)
Series: Materials Research Society symposium proceedings ;; v. 223; Materials Research Society symposia proceedings ;; v. 223.
Publisher: Materials Research Society
Published: 1991
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 399
Subjects: Materials -- Congresses.; Ion bombardment -- Congresses.; Electronics -- Materials -- Effect of radiation on -- Congresses.
Notes: Includes bibliographical references and index.
Presentations from the Symposium on Low Energy Ion Beam and Plasma Modification of Materials held at the Spring 1991 Materials Research Society Conference.