Handbook of thin-film deposition processes and techniques
Subtitle: principles, methods, equipment, and applications
By: edited by Klaus K. Schuegraf.
Contributors: Schuegraf, Klaus K.
Publisher: Noyes Publications
Published: 1988
Place of publication: Park Ridge, N.J., U.S.A
Language: eng
Number of pages: 413
Subjects: Thin film devices -- Design and construction -- Handbooks, manuals, etc.
Other titles: Hand book of thin-film deposition processes and techniques.
Notes: Includes bibliographies and index.