7. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, 26./27. Oktober, 2005.
Publisher: Technische Universität Chemnitz
Published: 2005
Place of publication: Chemnitz
Language: ger
Number of pages: 214
Subjects: Microelectronics -- Congresses.; Micromechanics -- Congresses.; Microelectromechanical systems -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.

German and English.