Synthesis of silane and silicon in a non-equalibrium plasma jet ...
By: H. F. Calcote, E. J. Lewis and R. H. Mullen
Contributors: Calcote, H. F; California Institute of Technology, Pasadena. Jet Propulsion Laboratory; United States. Dept. of Energy
Series: DOE/JPL ; 954560-8; AeroChem-TP ; 377
Publisher: Dept. of Energy; for sale by the National Technical Information Service
Published: 1978
Place of publication: [Washington]; Springfield, Va
Language: eng
Subjects: Plasma jets; Silane; Silicon
Notes: Contract no. NAS-7-100-954560

Performed for the Jet Propulsion Laboratory, California Institute of Technology

Oct. 1978

Includes bibliographical references
Table of contents: Final report; Seventh quarterly report, February 1-April 30, 1978; Fifth quarterly report, June 21 - October 31, 1977; Sixth quarterly report, November 1, 1977-Jan 31, 1978