Process of deposition of single crystal silicon directly from the vapour phase
By: A. Franzosi... [et. al.]. Final report.
Contributors: Franzosi, A.; Commission of the European Communities. Directorate-Generalfor Research, Science and Education.
Series: Energy; EUR7093
Publisher: Commission ofthe European Communities. Directorate-General for Research, Science and Education
Published: 1981
Place of publication: Luxembourg
Language: eng
Notes: Contract no. 186-77 ESI.