Proceedings of the 30th International Symposium on Electron, Ion, and Photon Beams, 27-30 May 1986, Boston, Massachusetts
By: special editor for the proceedings: Andrew R. Neureuther; sponsored by American Vacuum Society and the IEEE Electron Devices Group.
Contributors: American Institute of Physics; American Vacuum Society; IEEE. Electron Devices Group; International Symposium on Electron, Ion, and Photon Beams (30th : 1986 : Boston)
Publisher: Published for the American Vacuum Society by the American Institute of Physics
Published: 1987
Place of publication: New York
Number of pages: 456
Subjects: Electron beams -- Congresses; Ion bombardment -- Congresses; Photon beams -- Congresses
Notes: Includes bibliographical references and author index.

Source: Journal of vacuum science & technology, B, v.5, no.1, Jan-Feb. 1987, p.37-456

1:SERIALS Journal of vacuum science & technology