Nanopatterning--from ultralarge-scale integration to biotechnology
Subtitle: symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.
By: editors, Lhadi Merhari ... [et al.].
Contributors: Merhari, Lhadi.
Series: Materials Research Society symposium proceedings ;; v. 705; Materials Research Society symposia proceedings ;; v. 705.
Publisher: Materials Research Society
Published: 2002
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 338
Subjects: Nanostructures -- Congresses.; Nanotechnology -- Congresses.; Microlithography -- Congresses.; Integrated circuits -- Ultra large scale integration -- Congresses.; Biotechnology -- Congresses.
Genres: Congresses.
Description: xiii, 338 p. : 24 cm
Notes: Includes bibliographical references and indexes.