Mechanical Microsensors (Microtechnology and MEMS)
Edition: 1 edition
Publisher: Springer
Published: January 12, 2001
Language: eng
Format: Hardcover
Number of pages: 296
ISBN-13: 9783540675822
Subjects: Electronics engineering; Mechanical engineering; Nanotechnology; Precision instruments manufacture; Technology; Microelectromechanical systems; Electronic Measurements; Microelectronics; Transducers; Technology & Industrial Arts; Technical & Manufacturing Trades; Science/Mathematics; Silicon; Electronics - Microelectronics; Engineering - Electrical & Electronic; Technology / Nanotechnology; Detectors; Design and construction
First sentence: The use of silicon microsensors for pressure, acceleration, angular rate and fluid flow is increasing at high rates since micromachining has become a more or less mature technology.