Two-dimensional periodic nanoscale patterning of solid surfaces by four-beam standing wave excimer laser lithography
By: D.O. Filatov
Series: Lasers and electro-optics research and technology; Lasers and electro-optics research and technology series
Publisher: Nova Science Pub. Inc.
Published: 2010
Place of publication: New York
Language: eng
Number of pages: 87
ISBN-13: 9781616686741
Subjects: Industrial applications; Microlithography; Excimer lasers
Notes: Includes bibliographical references (p. [73]-79) and index.