Proceedings of the Symposium om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
By: organizers/editors, M. Meyyappan, D.J. Economou, S.W. Butler; [sponsored by] Dielectric Science and Technologyand Electronics Divisions.
Contributors: Meyyappan, M.; Economou, D. J. 1958-; Butler, S. W. 1963-; Electrochemical Society. Dielectric and Technology Division.; Electrochemical Society. Electronics Division.
Series: Proceedings ; v. 95-2; Proceedings (Electrochemical Society) ;; v. 95-2.
Publisher: Electrochemical Society
Published: 1995
Place of publication: Pennington, NJ
Language: eng
Number of pages: 629
Subjects: Semiconductors -- Design and construction -- Congresses.; Semiconductor industry -- Production control -- Congresses.; Process control -- Congresses.
Notes: Includes bibliographical references and index.