Semiconductor Device Fabrication Process
Publisher: World Technologies
Published: 2011
Place of publication: New Delhi
Language: eng
Format: [electronic resource]
Number of pages: 96
ISBN-13: 9789381157312
Subjects: Electrical engineering; Semiconductors; Engineering; Design and construction
Description: This book has been written with the purpose of covering all aspects about Semiconductor Device Fabrication Process.
Notes: Description based on print version record.
Table of contents: title: Cover; Table of Contents; Chapter 1- Semiconductor Device Fabrication; Chapter 2; title: Photolithography; Chapter 3; title: Ion Implantation; Chapter 4; title: Dry Etching, Etching & Plasma Ashing; Chapter 5; title: Thermal Treatments; Chapter 6; title: Chemical Vapor Deposition; Chapter 7; title: Physical Vapor Deposition; Chapter 8; title: Molecular Beam Epitaxy & Chemical-Mechanical Planarization; Chapter 9; title: Wafer Testing, Wafer Backgrinding & Die Preparation; Chapter 10; title: Other Processes in Semiconductor Device Fabrication.