Proceedings of the Workshop on Metals, Dielectrics, and Interfaces for VLSI VI, 9-12 May 1988, St. Francis Retreat Center, San Juan Bautista, California
By: sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley and the American Vacuum Society ; Special editor ... Michael D. Strathman.
Contributors: Strathman, Michael D.; American Vacuum Society.; University of California, Berkeley. Continuing Education in Engineering.
Series: Journal of vacuum science & technology B -- vol. 6, no. 6
Publisher: American Institute of Physics for the American Vacuum Society
Published: 1988
Place of publication: New York
Language: eng
Number of pages: 1795