MEMS/MOEMS technologies and applications
Subtitle: 17-18 October, 2002, Shanghai, China
By: Guofan Jin, John S. McKillop, Kazuhiro Hane, chairs/editors ; sponsored by, SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Shanghai Jiaotong University (China) ... [et al.] ; supported by, National Natural Science Foundation of China ... [et al.] ; published by, SPIE--the International Society for Optical Engineering.
Contributors: Jin, Guofan.; McKillop, John S.; Hane, Kazuhiro.; Society of Photo-optical Instrumentation Engineers.; Zhongguo guang xue xue hui.; Shanghai jiao tong da xue.; Guo jia zi ran ke xue ji jin wei yuan hui (China)
Series: SPIE proceedings series -- v. 4928; Proceedings of SPIE--the International Society for Optical Engineering -- v. 4928.
Publisher: SPIE
Published: 2002
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 302
Subjects: Microelectromechanical systems -- Congresses.; Optoelectronic devices -- Congresses.
Genres: Congresses.
Other titles: MOEMS technologies and applications
Notes: Includes bibliographic references and author index.