Lithography Asia 2008
Subtitle: 4-6 November 2008, Taipei, Taiwan
By: Alek C. Chen, Burn Lin, Anthony Yen,  editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association
Contributors: SPIE (Society); Taiwan Semiconductor Industry Association
Series: Proceedings of SPIE -- v. 7140
Publisher: SPIE
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819473813
Subjects: Electron beam Lithography; Congresses; Microlithography; Industrial applications; X-ray lithography; X-rays; Masks (Electronics)
Notes: Includes bibliographical references and index.