Extreme ultraviolet lithography
By: Banqiu Wu, Ajay Kumar, editors.
Contributors: Wu, Banqiu.; Kumar, Ajay, 1962-
Publisher: McGraw-Hill; McGraw-Hill Education; McGraw Hill
Published: 2009
Place of publication: New York
Language: eng
Number of pages: 482
ISBN-13: 9780071549189
Subjects: Extreme ultraviolet lithography; Integrated circuits -- Masks; Integrated circuits -- Design and construction
Notes: Includes bibliographical references and index.