Silicon front-end technology--materials processing and modelling
By: editors, Nicholas E.B. Cowern ... [et al.].
Contributors: Cowern, Nicholas E. B.
Series: Materials Research Society symposium proceedings ;; v. 532; Materials Research Socisty symposia ;; v. 532.
Publisher: Materials Research Society
Published: 1998
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 228
Subjects: Semiconductors -- Design and construction -- Congresses.; Semiconductor doping -- Congresses.; Semiconductors -- Defects -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.
Proceedings of a symposium held April 13-15, 1998 in San Francisco, California.