Ionenimplantation
By: von Heiner Ryssel u. Ingolf Ruge.
Contributors: Ruge, Ingolf, joint author.
Publisher: Teubner
Published: 1978
Place of publication: Stuttgart
Language: ger
Number of pages: 366
Subjects: Ion implantation.; Semiconductors.
Notes: Bibliography: p. [344]-360.
Includes index.