MOEMS and miniaturized systems
Subtitle: 18-20 September 2000, Santa Clara, USA
By: M. Edward Motamedi, Rolf Göering, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA).
Contributors: Motamedi, M. Edward.; Göring, Rolf.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series ;; v. 4178; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4178.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 412
Subjects: Microelectromechanical systems -- Congresses.; Miniature electronic equipment -- Congresses.; Micromechanics -- Congresses.; Optoelectronic devices -- Congresses.
Genres: Congresses.
Other titles: Microoptoelectromechanical systems and miniaturized systems
Notes: Includes bibliographical references and index.