Proceedings IEEE the twentieth annual International Conference on Micro Electro Mechanical Systems
Subtitle: Hyogo, Japan, 21-25 January 2007
By: IEEE.
Contributors: Institute of Electrical and Electronics Engineers.
Publisher: IEEE
Published: 2007
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 897
ISBN-13: 9781424409501
Subjects: Microelectromechanical systems -- Congresses
Genres: Congresses
Other titles: Micro electro mechanical systems
Notes: "IEEE catalog number: CFP07MEM-PRT."

Includes bibliographical references and indexes.