ULSI process integration
Subtitle: proceedings of the first international symposium
By: editors,  C.L. Claeys ... [et al.].
Contributors: Claeys, Cor L.; Electrochemical Society. Meeting; International Symposium on ULSI Process Integration (1st : 1999 : Honolulu, Hawaii)
Series: Proceedings ;; v. 99-18; Proceedings (Electrochemical Society); v.99-18.
Publisher: Electrochemical Society
Published: 1999
Place of publication: Pennington, NJ
Language: eng
Number of pages: 386
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"Includes papers that were presented at the First Symposium on ULSI Process Integration held in Honolulu, Hawaii at the 196th Meeting of the Electrochemical Society, October 17-22, 1999"--Pref.