Characterization in silicon processing
By: editor, Yale Strusser ; contributing editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick.
Contributors: Strausser, Yale.
Series: Materials characterization series
Publisher: Butterworth-Heinemann; Manning
Published: 1993
Place of publication: Boston; Greenwich
Language: eng
Number of pages: 240
Subjects: Silicon.; Electric conductors.; Semiconductor films.; Surface chemistry.
Notes: Includes bibliographical references and index.