Surface scattering and diffraction III
Subtitle: 4-6 August, 2003, San Diego, California, USA
By: Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Gu, Zu-Han.; Maradudin, A. A.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series ;; v. 5189; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5189.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 198
Subjects: Surface roughness -- Measurement -- Congresses.; Diffractive scattering -- Congresses.; Optical measurements -- Congresses.; Scattering (Physics) -- Congresses.; Metrology -- Congresses.
Genres: Congresses.
Other titles: Surface scattering and diffraction for advanced metrology
Notes: Includes bibliographical references and author index.
Previous symposia entitled: Surface scattering and diffraction for advanced metrology.