VLSI fabrication principles
Subtitle: silicon and gallium arsenide
By: Sorab K. Ghandhi.
Publisher: Wiley
Published: 1983
Place of publication: New York
Language: eng
Number of pages: 665
Subjects: Integrated circuits -- Very large scale integration.; Silicon.; Gallium arsenide.
Other titles: V.L.S.I. fabrication principles.
Notes: Includes bibliographical references and index.
"A Wiley-Interscience publication."