Optical/laser microlithography
By: Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: Lin, Burn Jeng, 1942-; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 922, 1088
Publisher: SPIE
Published: 1988
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 486
Subjects: Lasers -- Industrial applications -- Congresses.; Optical instruments -- Congresses.; Microlithography -- Congresses.
Notes: Includes bibliographies and index.
Table of contents: title: [1]. 2-4 March 1988; title: 2. 1-3 March 1989, San Jose, Calif.