Silicon nitride, silicon dioxide thin insulating films, and other emerging diele[c]trics VIII
Subtitle: proceedings of the international symposium
By: editors R.E. Sah ... [et al.] ; sponsoring divisions, Dielectric Science and Technology and Electronics.
Contributors: Sah, R. E.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting
Series: Proceedings / Electrochemical Society -- v. 2005-01; Proceedings (Electrochemical Society) -- v. 2005-01.
Publisher: Electrochemical Society
Published: 2005
Place of publication: Pennington, N.J
Language: eng
Number of pages: 588
ISBN-13: 9781566774598
Subjects: Thin film devices -- Congresses.; Silicon nitride -- Congresses.; Silica -- Congresses.; Dielectric films -- Congresses.; Electric insulators and insulation -- Thin films -- Congresses.; Electric insulators and insulation -- Silicon nitride -- Congresses.
Genres: Congresses.
Notes: "Proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Dielectrics to be held May 16-20, 2005 in Québec City as part of the 207th Meeting of the Electrochemical Society (ECS)."--Pref.

Includes bibliographical references and index.