MEMS '99 : Twelfth IEEE International Conference on Micro Electro Mechanical Systems
Subtitle: technical digest : Orlando, Florida, USA, January 17-21, 1999
By: sponsored by the IEEE Robotics and Automation Society.
Contributors: IEEE Robotics and Automation Society.
Publisher: IEEE
Published: 1999
Place of publication: Piscataway, NJ
Language: eng
Number of pages: 660
Subjects: Microelectromechanical systems -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.
Genres: Congresses.
Other titles: IEEE International Conference on Micro Electro Mechanical Systems; Micro Electro Mechanical Systems
Notes: Includes index and bibliographic references.
"IEEE Catalog Number 99CH36291"--verso of T.p.