The physics of micro/nano-fabrication
By: Ivor Brodie and Julius J. Muray.
Contributors: Muray, Julius J.
Series: Microdevices
Publisher: Plenum Press
Published: 1992
Place of publication: New York
Language: eng
Number of pages: 650
Subjects: Microelectronics; Thin-film circuits
Notes: Includes bibliographical references and indexes.