MEMS technology and devices
Subtitle: Suntec, Singapore, 1-6 July 2007
By: Aiqun Liu ... [et al.].
Contributors: Liu, Aiqun.
Publisher: Pan Stanford Pub.; Distributed by World Scientific Pub. Co.
Published: 2007
Place of publication: Singapore; Hackensack, NJ
Language: eng
Number of pages: 441
ISBN-13: 9789812709608
Subjects: Microelectromechanical systems -- Congresses; Nanostructured materials -- Congresses
Genres: Congresses.
Notes: "ICMAT 2007 conference proceedings"--T.p. verso.

Includes bibliographical references.