Functional micro- and nanosystems
Subtitle: proceedings of the 4th caesarium, Bonn, June 16-18, 2003
By: Karl-Heinz Hoffmann, editor.
Contributors: Hoffmann, K.-H.
Publisher: Springer
Published: 2004
Place of publication: Berlin; New York
Language: eng
Number of pages: 131
Subjects: Microelectromechanical systems -- Congresses; Microstructure -- Congresses; Nanostructured materials -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references.