ASMC 2001
Subtitle: the 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 23-24, International Conference Center, Munich Germany / sponsored by: [IEEE] Electron Devices Society ... [et al.].
Contributors: IEEE Electron Devices Society.; Semiconductor Equipment and Materials International.
Publisher: IEEE; SEMI
Published: 2001
Place of publication: Piscataway, New Jersey; San Jose, California
Language: eng
Number of pages: 244
Subjects: Semiconductor industry -- Congresses; Semiconductors -- Design and construction -- Congresses; Process control -- Congresses
Genres: Congresses.
Other titles: 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.; Advancing the science of semiconductor manufacturing excellence.; Advanced Semiconductor Manufacturing Conference and Workshop.; Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI.
Notes: Cover title.

"IEEE Catalog Number 01CH37150"--cover.

Includes bibliographic references.

Also available via the World Wide Web with additional title: Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI.