Polymers for microelectronics
Subtitle: resists and dielectrics
By: Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.
Contributors: Thompson, L. F., 1944-; Willson, C. G. 1939-; Tagawa, Seiichi.; American Chemical Society. Division of Polymeric Materials: Science and Engineering.; American Chemical Society. Meeting
Series: ACS symposium series,; 0097-6156 ;
Publisher: American Chemical Society
Published: 1994
Place of publication: Washington, DC
Language: eng
Number of pages: 571
Subjects: Microelectronics -- Materials -- Congresses.; Polymers -- Congresses.
Notes: Includes bibliographical references and indexes.
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."