CMOS-MEMS
By: volume editors: O. Brand and G.K. Fedder
Series: Advanced micro & nanosystems -- v. 2
Publisher: Wiley-VCH
Published: 2005
Place of publication: Weinheim; [Great Britain]
Language: eng
Format: [elektronische middelen] /
Number of pages: 594
ISBN-13: 9783527616930
Subjects: Complementary Metal oxide semiconductors; Microelectromechanical systems; Electronic books
Notes: Includes bibliographical references and index.