Radiation defects in ion implanted and/or high-energy irradiated MOS structures
By: S. Kaschieva, S.N. Dmitriev.
Contributors: Dmitriev, S. N., 1961-
Publisher: Nova Science Publishers
Published: 2009
Place of publication: Hauppauge, N.Y
Language: eng
ISBN-13: 9781608761883
Subjects: Metal oxide semiconductors; Semiconductor doping; Semiconductors -- Effect of radiation on; Ion implantation
Notes: Includes bibliographical references and index.