The role of microscopy in semiconductor failure analysis
By: B.P. Richards and P.K. Footner.
Contributors: Footner, P. K.
Series: Microscopy handbooks ;; 25; Oxford science publications
Publisher: Oxford University Press
Published: 1992
Place of publication: Oxford; New York
Language: eng
Number of pages: 108
Subjects: Semiconductors -- Testing.; Semiconductors -- Failures.; Microscopes.
Notes: Includes bibliographical references (p. [98]-101) and index.