Selected papers on optical MEMS
By: Victor M. Bright, editor.
Contributors: Bright, Victor M., 1965-
Series: SPIE milestone series ;; v. MS 153
Publisher: SPIE Optical Engineering Press
Published: 1999
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 628
Subjects: Microelectronics; Microelectromechanical systems
Other titles: Optical MEMS; Selected papers on optical micro-electro-mechanical systems
Notes: Includes bibliographical references and indexes.