Production techniques for application specific microsensors
By: Günter Köhler, Thomas Schroeter, Guido Tschulena, eds.
Contributors: Köhler, Günter, 1941-; Schroeter, Thomas.; Tschulena, Guido R.
Series: Berichte aus der Mikrosystemtechnik
Publisher: Shaker Verlag
Published: 2004
Place of publication: Aachen
Language: eng
Number of pages: 369
Subjects: Miniature electronic equipment -- Design and construction; Detectors -- Design and construction; Microelectronics
Notes: Includes bibliographical references.

The research and development project PAMIS was funded by the German Federal Ministry for Education and Research (BMBF) within the national "Research in Production for Tomorrow" Programme fund numbers 02PP2310-02PP2317