Nano- and micro-electromechanical systems
Subtitle: fundamentals of nano- and microengineering
By: Sergey Edward Lyshevski.
Edition: 2nd ed.
Series: Nano- and microscience, engineering, technology, and medicine series
Publisher: CRC Press; CRC
Published: 2005
Place of publication: Boca Raton, Fla
Language: eng
Number of pages: 722
Subjects: Microelectromechanical systems.; Nanotechnology.
Notes: Includes bibliographical references and index.