Scaling issues and design of MEMS
By: Salvatore Baglio, Salvatore Castorina, Nicolò Savalli.
Contributors: Castorina, Salvatore.; Savalli, Nicol.
Publisher: John Wiley & Sons
Published: 2007
Place of publication: Chichester, West Sussex, England; Hoboken, NJ
Language: eng
Number of pages: 229
ISBN-13: 9780470016992
Subjects: Microelectromechanical systems -- Design and construction.
Other titles: Scaling issues and design of microelectromechanical systems
Notes: Includes bibliographical references and index.