Tekhnologii͡a︡ i apparatura gazovoĭ ėpitaksii kremnii͡a︡ i germanii͡a︡
By: [I.M. Skvort͡s︡ov, I.I. Lapidus, B.V. Orion ... et al.].
Contributors: Skvort͡s︡ov, Igorʹ Mikhaiĭlovich.
Publisher: Ėnergii͡a︡
Published: 1978
Place of publication: Moskva
Language: rus
Number of pages: 135
Subjects: Vapor-plating.; Semiconductor films.; Epitaxy.
Notes: Bibliography: p. 129-[134]