Lithography process control
By: Harry J. Levinson.
Series: Tutorial texts in optical engineering ;; v. TT 28
Publisher: SPIE Optical Engineering Press
Published: 1999
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 190
Subjects: Semiconductors -- Etching.; Microlithography -- Quality control.
Description: x, 190 p. : 26 cm
Notes: Includes bibliographical references (p. 169-188) and index.