Optiko-ėlektronnye sredstva razmernogo kontroli͡a︡ tekhnologicheskikh mikroobʺektov
By: V.K. Aleksandrov, I͡U︡.N. Bienko, V.N. Ilʹin.
Contributors: Bienko, I͡U︡. N.; Ilʹin, V. N.
Edition: Nauch. izd.
Publisher: "Nauka i tekhnika"
Published: 1988
Place of publication: Minsk
Language: rus
Number of pages: 239
Subjects: Optoelectronic devices.; Miniature objects -- Testing.
Notes: Bibliography: p. 233-[238]
At head of title: Akademii͡a︡ nauk Belorusskoĭ SSR. Institut ėlektroniki.