Characterization and Metrology for Ulsi Technology 
Subtitle: 1998 International Conference (AIP Conference Proceedings, Vol. 449)
Contributors: D.G. Seiler (Editor); A.C. Diebold (Editor); W.M. Bullis (Editor); T.J. Shaffner (Editor); R. McDonald (Editor); E.J. Walters (Editor)
Edition: 1 edition
Publisher: American Institute of Physics
Published: December 14, 1998
Language: eng
Format: Hardcover
Number of pages: 960
ISBN-13: 9781563967535
Subjects: Circuits & components; Electronic devices & materials; Scientific standards; Software; Logic Design; Congresses; Ultra large scale integration; Science; Semiconductors; Very-Large-Scale Integration (Vlsi); Computers - General Information; Integrated circuits; Science/Mathematics; General; Electronics - Circuits - VLSI; Engineering - Electrical & Electronic; Technology / Material Science; Physics