Tekhnika raspylenii͡a︡ ionnymi puchkami
By: A.P. Semenov.
Publisher: BNT͡S︡ SO RAN
Published: 1996
Place of publication: Ulan-Udė
Language: rus
Number of pages: 118
Other titles: Ion beams sputtering techniques
Notes: Includes bibliographical references (p. 106-[119]).