Optical metrology roadmap for the semiconductor, optical, and data storage industries II
Subtitle: 2-3 August, 2001, San Diego, USA
By: Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Duparré, Angela.; Singh, Bhanwar.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,; v. 4449; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4449.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 294
Subjects: Optoelectronics -- Congresses.; Optical measurements -- Industrial applications -- Congresses.; Surfaces (Technology) -- Measurement -- Congresses.; Optoelectronic devices -- Industrial applications -- Congresses.; Information retrieval -- Technological innovations -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.