Proceedings of the Sixth Symposium on Automated Integrated Circuits Manufacturing
By: edited by Vaughn E. Akins, Hiroyuki Harada ; assistant editors, Robert Miller, Mihir Parikh.
Contributors: Akins, Vaughn E.; Harada, Hiroyuki.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.
Series: Proceedings ;; v. 91-5; Proceedings (Electrochemical Society) ;; v. 91-5.
Publisher: Electrochemical Society
Published: 1991
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 413
Subjects: Integrated circuits -- Design and construction -- Data processing -- Congresses.; Computer integrated manufacturing systems -- Congresses.; Electronic industries -- Automation -- Congresses.
Notes: Includes bibliographical references and indexes.
"[Sponsored by] Electronics and Dielectric Science and Technology Divisions."