Submicrometer metallization
Subtitle: the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California
By: Thomas Kwok, Takamaro Kikkawa, Krishna Shenai, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Kwok, Thomas.; Kikkawa, Takamaro.; Shenai, Krishna.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1805; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1805.
Publisher: SPIE
Published: 1993
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 344
Subjects: Integrated circuits -- Design and construction -- Congresses.; Metallic films -- Congresses.; Metallizing -- Congresses.; Electrodiffusion -- Congresses.; Semiconductor-metal boundaries -- Congresses.
Notes: Includes bibliographical references and index.