Papers from the Fourth International Plasma-Based Ion Implantation Workshop
Subtitle: 2-4 June 1998, Dearborn, Michigan
By: sponsored by the American Vacuum Society ; editors for the conference, Joseph V. Mantese, Carlton E. Speck
Contributors: Mantese, Joseph Vito, 1955-; Speck, Carlton E.; American Vacuum Society
Publisher: American Vacuum Society through the American Institute of Physics
Published: 1999
Place of publication: Woodbury, NY
Language: eng
Number of pages: 900
Subjects: Ion implantation; Congresses
Other titles: Fourth International Plasma-Based Ion Implantation Workshop; Journal of vacuum science and technology.
Notes: Includes bibliographical references and index.