Multilevel interconnect technology III
Subtitle: 22-23 September 1999, Santa Clara, California
By: Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.].
Contributors: Graef, Mart.; Patel, Divyesh N.; Society of Photo-optical Instrumentation Engineers.; Electrochemical Society.
Series: SPIE proceedings series ;; v. 3883; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3883.
Publisher: SPIE
Published: 1999
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 184
Subjects: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Plasma etching -- Congresses.; Metallizing -- Congresses.; Dielectric films -- Congresses.
Genres: Congresses.
Other titles: Multilevel interconnect technology 3; Multilevel interconnect technology three
Notes: Includes bibliographical references and index.