Proceedings of the Fifth International Symposium on High Purity Silicon
By: editors, C.L. Claeys ... [et al.].
Contributors: Claeys, Cor L.; Electrochemical Society. Electronics Division.
Series: Proceedings ;; 98-13; Proceedings (Electrochemical Society) ;; 98-13.
Publisher: Electrochemical Society
Published: 1998
Place of publication: Pennington, NJ
Language: eng
Number of pages: 478
Subjects: Silicon crystals -- Congresses.; Crystal growth -- Congresses.; Semiconductor wafers -- Congresses.
Other titles: High purity silicon V
Notes: Includes bibliographical references and indexes.
"Electronics Division."