The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements
By: J.R. Ehrstein, M.C. Croarkin
Contributors: Croarkin, M. C. 1934-; National Institute of Standards and Technology (U.S.)
Series: NIST special publication -- 260-131; Standard reference materials
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Published: 1997
Place of publication: Gaithersburg, MD
Language: eng
Format: Microform
Number of pages: 84
Subjects: Silicon; Silicon -- Electric properties
Other titles: Certification of one hundred mm diameter silicon resistivity SRMs ..
Notes: Shipping list no.: 98-0569-M

"August 1997."

Includes bibliographical references

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1998] 2 microfiches : negative

s 1998 dcu n b