Excimer laser materials processing and beam delivery systems
Subtitle: 8-9 November 1990, Boston, Massachusetts
By: Bernhard P. Piwczyk, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Piwczyk, Bernhard P.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1377; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1377.
Publisher: SPIE
Published: 1991
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 135
Subjects: Excimer lasers -- Congresses.
Notes: Includes bibliographical references and index.