Reliability, testing, and characterization of MEMS/MOEMS III
Subtitle: 24-28 January 2004, San Jose, California, USA
By: Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, WA
Language: eng
Number of pages: 312