Advances and challenges in chemical mechanical planarization
Subtitle: symposium held April 10-12, 2007, San Francisco, California, U.S.A.
By: editors, Gerfried Zwicker ... [et al.].
Contributors: Zwicker, Gerfried
Series: Materials Research Society symposium proceedings -- v. 991; Materials Research Society symposia proceedings -- v. 991.
Publisher: Materials Research Society, c2007.
Published: 2007
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 371
ISBN-13: 9781558999510
Subjects: Surfaces; Chemical mechanical planarization; Semiconductors; Congrès; Semiconducteurs; Materials; Congresses; Chimie des surfaces; Défauts
Notes: "Proceedings ... presented at Symposium C, 'Advances and Challenges in Chemical Mechanical Planarization,' held April 10-12 at the 2007 MRS Spring Meeting"--Pref.

Includes bibliographical references and indexes.