Transmission electron microscopy of silicon VLSI circuits and structures
By: R.B. Marcus and T.T. Sheng.
Contributors: Sheng, T. T.
Publisher: Wiley
Published: 1983
Place of publication: New York
Language: eng
Number of pages: 217
Subjects: Integrated circuits; Transmission electron microscopy
Notes: Includes bibliographical references and index.
"A Wiley-Interscience publication."