Photon stimulated CVD of amorphous carbon thin films
By: Mikael Lindstam
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 554
Publisher: Acta Universitatis Upsaliensis
Published: 2000
Place of publication: Uppsala
Language: eng
Number of pages: 39
ISBN-13: 9789155447557
Subjects: Carbon; Amorphous substances; Chemical vapor deposition; Thin films
Notes: Thesis (doctoral)--Uppsala University, 2000.

Includes bibliographical references.