Survey on silicon micromachining and microstructures
By: by Richard K. Miller and Terri C. Walker.
Contributors: Walker, Terri C., 1964-
Series: Survey report ;; #17; Survey report (Future Technology Surveys, Inc.) ;; #17.
Publisher: Future Technology Surveys
Published: 1989
Place of publication: Madison, GA
Language: eng
Number of pages: 98
Subjects: Microelectronics industry -- United States.; Microelectronics industry -- Canada.; Market surveys -- United States.; Market surveys -- Canada.; Micromachining.
Notes: Includes bibliographical references.
Includes contributions by other researchers.