Proceedings of the Symposium on Laser Processes for Microelectronic Applications
By: edited by J.J. Ritsko, D.J. Ehrlich, M. Kashiwagi.
Contributors: Ritsko, J. J.; Ehrlich, Daniel J.; Kashiwagi, M.; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Electronics Division.
Series: Proceedings / Electrochemical Society ;; v. 88-10; Proceedings (Electrochemical Society) ;; v. 88-10.
Publisher: Electrochemical Society
Published: 1988
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 251
Subjects: Microelectronics -- Congresses.; Lasers -- Industrial applications -- Congresses.
Other titles: Laser processes for microelectronic applications.
Notes: Includes bibliographies and index.
Spine title: Laser processes for microelectronic applications.
"Dielectrics and Insulation and Electronics Divisions."