Materials and failures in MEMS and NEMS
By: edited by Atul Tiwari and Baldev Raj
Publisher: John Wiley & Sons; Scrivener Publishing
Published: 2015
Place of publication: Hoboken, New Jersey; Salem, Massachusetts
Language: eng
ISBN-13: 9781119083603
Subjects: Nanoelectromechanical systems; Microelectromechanical systems; Design and construction
Notes: Includes bibliographical references and index.