MEMS Materials and Processes Handbook
By: edited by Reza Ghodssi, Pinyen Lin
Contributors: Lin, Pinyen; SpringerLink (Online service)
Series: MEMS Reference Shelf
Publisher: Springer Science+Business Media, LLC
Published: 2011
Place of publication: Boston, MA
Language: eng
Format: [electronic resource] /
ISBN-13: 9780387473161; 9780387473185
Subjects: Systems engineering; Surfaces (Physics); Materials; Engineering; Electronics