Spectroscopic characterization techniques for semiconductor technology IV
Subtitle: 25-26 March 1992, Somerset, New Jersey
By: Orest J. Glembocki chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Glembocki, O. J.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering -- v. 1678; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1678.
Publisher: SPIE
Published: 1992
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 308
Subjects: Semiconductors -- Testing -- Congresses.; Spectrum analysis -- Congresses.
Notes: Includes bibliographies and index.