Nanotekunorojī to rejisuto zairyō
Subtitle: Nano technology and polymer resist
By: kanshū Yamaoka Tsuguo.
Contributors: Yamaoka. Tsuguo, 1939-
Edition: Fukyūban
Series: CMC tekunikaru raiburarī -- 256
Publisher: Shīemushī Shuppan
Published: 2007
Place of publication: Tōkyō
Language: jpn
Number of pages: 253
ISBN-13: 9784882319214
Subjects: Photopolymers.; Nanostructured materials.; Photolithography -- Industrial applications.
Other titles: Nano technology and polymer resist
Work titles: Atarashii rejisuto zairyō to nanotekunorojī.
Notes: Previously published as: Atarashii rejisuto zairyō to nanotekunorojī. 2002.

Includes bibliographical references.

In Japanese.