Advances in Chemical-Mechanical Polishing
Subtitle: Symposium Held April 13-15, 2004, San Francisco, California, U.S.A.
Publisher: Materials Research Society
Published: January 2004
Language: eng
Format: Hardcover
Number of pages: 292
ISBN-13: 9781558997660
Subjects: Technical & Manufacturing Industries & Trades; Technology & Industrial Arts; Technical & Manufacturing Trades