Rapid Thermal Processing
Subtitle: Science and Technology
Publisher: Academic Press
Published: April 15, 1993
Language: eng
Format: Hardcover
Number of pages: 430
ISBN-13: 9780122476907
Subjects: Circuits & components; Engineering thermodynamics; Science/Mathematics; Semiconductors; Science; Semiconductor doping; Electronics - Semiconductors; Engineering - Electrical & Electronic; Life Sciences - Zoology - General; Technology / Electronics / Microelectronics; Heat treatment; Rapid thermal processing
First sentence: The cost of manufacturing submicron, ultralarge scale integration (ULSI) chips is scaling upwards in at least inverse proportion to the downward scaling of device feature sizes.