Advanced short-time thermal processing for Si-based CMOS devices II
Subtitle: proceedings of the international symposium
By: editors, Mehmet C. Öztürk, F. Roozeboom ... [et al.].
Contributors: Öztürk, Mehmet C.; Roozeboom, Fred.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. High Temperature Materials Division.; Electrochemical Society. Meeting
Series: Proceedings ;; v. PV 2004-01; Proceedings (Electrochemical Society) ;; v. 2004-01.
Publisher: Electrochemical Society
Published: 2004
Place of publication: Pennington, NJ
Language: eng
Number of pages: 428
Subjects: Semiconductors -- Heat treatment.; Rapid thermal processing.
Other titles: Advanced short-time thermal processing for Si-based CMOS devices 2; Advanced short-time thermal processing for Si-based CMOS devices two
Notes: Includes bibliographical references and indexes.
"Electronics, Dielectric Science and Technology, High Temperature Materials" divisions.