Optical micro- and nanometrology in microsystems technology II
Subtitle: 8-10 April 2008, Strasbourg, France
By: Christophe Gorecki, Anand K. Asundi, Wolfgang Osten, editors ; sponsored by SPIE Europe ; cosponsored by Alsace international (France) ... [et al.] ; cooperating organizations, AFOP--Association française des industries de l'optique et de la photonique (France) ... [et al.].
Contributors: SPIE Europe; Alsace international; Association française des industries de l'optique et de la photonique; Society of Photo-optical Instrumentation Engineers
Series: Proceedings of SPIE -- v. 6995; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6995.
Publisher: SPIE
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819471932
Notes: Includes bibliographical references and author index.