Phenomenology of silicon wafer bonding
By: Karin Ljungberg
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 166
Publisher: Acta Universitatis Upsaliensis
Published: 1995
Place of publication: Uppsala
Language: eng
Number of pages: 59
ISBN-13: 9789155436339
Subjects: Silicon-on-insulator technology; Semiconductor wafers; Design and construction; Silicon
Notes: Thesis (doctoral)--Universitas Upsaliensis, 1995.

Includes bibliographical references (p. 53-59)