Focused ion beam systems
Subtitle: basics and applications
By: edited by Nan Yao
Contributors: Yao, Nan
Publisher: Cambridge University Press
Published: 2007
Place of publication: Cambridge; Hoboken, NJ
Language: eng
Number of pages: 395
ISBN-13: 9780521831994
Subjects: Focused ion beams; Focused ion beams -- Industrial applications
Notes: Includes bibliographical references and index