Micromachining technology for micro-optics
Subtitle: 20 September 2000, Santa Clara, USA
By: Sing H. Lee, Eric G. Johnson, chairs/editors ; sponsored by SPIE-the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
Contributors: Lee, S. H. 1939-; Johnson, Eric Gunnar, 1936-; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.
Series: SPIE proceedings series ;; v. 4179; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4179.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 180
Subjects: Integrated optics -- Congresses.; Optoelectronic devices -- Industrial applications -- Congresses.; Miniature electronic equipment -- Industrial applications -- Congresses.; Microelectromechanical systems -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.