Advances in mirror technology for X-ray, EUV lithography, laser, and other applications
Subtitle: 7-8 August 2003, San Diego, California, USA
By: Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Publisher: SPIE
Place of publication: Bellingham, WA
Number of pages: 222