Proceedings of the Symposium on Etching for Pattern Definition
By: edited by Henry G. Hughes, Myron J. Rand.
Contributors: Hughes, Henry G.; Rand, Myron J.; Electrochemical Society.
Publisher: Dielectrics and Insulation and Electronics Divisions, Electrochemical Society
Published: 1976
Place of publication: Princeton, N.J
Language: eng
Number of pages: 203
Subjects: Semiconductors -- Etching -- Congresses.; Integrated circuits -- Congresses.; Metals -- Etching -- Congresses.
Notes: Includes bibliographical references and index.
Held at the spring, 1976, meeting of the Electrochemical Society.