Book of SEMI standards, 1980.
Publisher: Semiconductor Equipment and Materials Institute
Published: 1980
Place of publication: Mt. View, CA
Language: eng
Subjects: Semiconductors -- Standards -- United States.; Microelectronics -- Standards -- United States.
Notes: Includes bibliographical references.
Table of contents: title: v. 1. Chemicals, equipment, materials, packages, photomask.; title: v. 2. Test methods.