Chemical dry etching of GaAs(100) with Cl₂ and HCl
Subtitle: molecular beam scattering and electron spectroscopy studies
By: Chaochin Su
Published: 1993
Language: eng
Number of pages: 209
Notes: Department: Chemistry.

Thesis (Ph. D.)--Columbia University, 1993.

Includes bibliographical references.

Microfilm. Ann Arbor, Mich. : University Microfilms International, 1994. 1 microfilm reel ; 35 mm. 94-12847.