Hazard assessment and control technology in semiconductor manufacturing II.
Contributors: American Conference of Governmental Industrial Hygienists.; National Conference on Hazard Assessment and Control Technology in Semiconductor Manufacturing (2nd : 1991 : Westborough, Mass.)
Publisher: American Conference of Governmental Industrial Hygenists
Published: 1993
Place of publication: Cincinnati, Ohio
Language: eng
Number of pages: 347
Subjects: Semiconductor industry -- Safety measures -- Congresses.
Other titles: Semiconductor manufacturing, II.; Semiconductor manufacturing, 2.; Semiconductor manufacturing, two.
Notes: Includes bibliographical references.
Papers presented at the Second National Conference on Hazard Assessment and Control Technology in Semiconductor Manufacturing, held in Westboro, Mass., Oct. 1991.
Spine title: Semiconductor manufacturing, II.