Advances in metrology for x-ray and EUV optics III
Subtitle: 1-2 August 2010, San Diego, California, United States
By: Lahsen Assoufid, Peter Z. Takacs, Anand Krishna Asundi, editors ; sponsored and published by SPIE
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- 7801.; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7801.
Publisher: SPIE
Published: 2010
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819482976
Subjects: Measuring instruments; Congresses; Measurement; Laser interferometers; Optical measurements; Optical instruments; Design and construction
Notes: Includes bibliographical references.