Capacitance cell measurement of the out-of-plane expansion of thin films
By: Chad R. Snyder, Frederick I. Mopsik
Contributors: Mopsik, Frederick I.; National Institute of Standards and Technology (U.S.)
Series: NIST special publication -- no. 960-7; NIST recommended practice guide; NIST recommended practice guide; NIST special publication -- no. 960-7.
Publisher: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Published: 2001
Place of publication: Gaithersburg, Md.]
Language: eng
Format: [electronic resource] /
Number of pages: 32
Subjects: Thin-film circuits; Thin films; Thermal properties; Expansion (Heat); Measurement
Notes: Title from title screen (viewed Apr. 19, 2011).

"November 2001."

"CODEN: NSPUE2."

Includes bibliographical references (p. 31-32).