MicroProcess 90
Subtitle: proceedings of the 1990 International MicroProcess Conference, July 16-19, 1990, Chiba, Japan
By: edited by S. Namba, T. Kitayama ; sponsored by the Japan Society of Applied Physics (JSAP).
Contributors: Namba, Susumu, 1928-; Kitayama, T. (Toyoki); Ōyō Butsuri Gakkai.
Series: JJAP series,; 4
Publisher: Publication Office, Japanese Journal of Applied Physics
Published: 1991
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 325
Subjects: Microelectronics -- Congresses.; Microlithography -- Congresses.; Plasma engineering -- Congresses.; Lasers -- Industrial applications -- Congresses.
Notes: Includes bibliographical references and index.