CMOS-MEMS
Subtitle: Advanced Micro and Nanosystems
Contributors: Henry Baltes (Editor); Oliver Brand (Editor); Gary K. Fedder (Editor); Christofer Hierold (Editor); Jan G. Korvink (Editor); Osamu Tabata (Editor)
Publisher: Wiley-VCH
Published: May 6, 2005
Language: eng
Format: Hardcover
Number of pages: 608
ISBN-13: 9783527310807
Subjects: Nanotechnology; Science/Mathematics; Technology; Technology & Industrial Arts; Electronics - Microelectronics; Technology / Electronics / Microelectronics