Mechanical Properties of MEMS Structures
Contributors: Winston O. Soboyejo (Editor); Robert Ballarini (Editor); Seyed Allameh (Editor)
Edition: 1 edition
Publisher: Springer
Published: November 2003
Language: eng
Format: Hardcover
ISBN-13: 9781402075254
Subjects: Science / Mechanics; Electronics - General; Technology; Technology & Industrial Arts; Materials; Microelectromechanical systems; Microelectronics; Science/Mathematics