Cleaning technology in semiconductor device manufacturing IX
By: editors, J. Ruzyllo ... [et al.] ; sponsoring Divisions: Electronics and Photonics, Dielectrics Science and Technology
Contributors: Electrochemical Society. Electronics and Photonics Division; Electrochemical Society. Dielectric Science and Technology Division; Electrochemical Society. Meeting; International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (9th : 2005 : Los Angeles, Calif..)
Series: ECS transactions -- v. 1 no. 3
Publisher: Electrochemical Society
Published: 2005
Place of publication: Pennington, N.J
Language: eng
Number of pages: 379
ISBN-13: 9781566774291
Subjects: Semiconductor wafers; Congresses; Cleaning
Notes: "The Ninth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing was held during the Fall Meeting of the Electrochemical Society in Los Angeles, California in October 2005"--Preface.

Includes bibliographical references and indexes.