Integrated circuit metrology, inspection, and process control II
Subtitle: 29 February-1 March 1988, Santa Clara, California
By: Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Contributors: Monahan, Kevin M.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE--the International Society for Optical Engineering -- v. 921
Publisher: SPIE
Published: 1988
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 458
Subjects: Integrated circuits -- Inspection -- Congresses.; Integrated circuits -- Measurement -- Congresses.
Other titles: Integrated circuit metrology, inspection, and process control 2.; Integrated circuit metrology, inspection, and process control two.
Notes: Includes bibliographies and index.