Vlsi Metallization
Subtitle: Physics and Technologies (Artech House Materials Science Library)
Publisher: Artech House Publishers
Published: January 1991
Language: eng
Format: Paperback
Number of pages: 529
ISBN-13: 9780890065013
Subjects: Very-Large-Scale Integration (Vlsi); Technology & Industrial Arts; Science/Mathematics; Electronics - Semiconductors; Circuits & components; Materials science; Metals technology / metallurgy; Metallizing; Electric contacts; Semiconductor-metal boundaries
First sentence: We shall present a brief overview of the historic developments that culminated in the current state of microelectronic metallization.