Fundamental Principles of Optical Lithography
Subtitle: The Science of Microfabrication
Publisher: Wiley
Published: January 18, 2008
Language: eng
Format: Paperback
Number of pages: 534
ISBN-13: 9780470727300
Subjects: Circuits & components; Technology & Engineering; Technology & Industrial Arts; Science/Mathematics; Electronics - Circuits - General; Material Science; Technology / Material Science; Design and construction; Industrial applications; Integrated circuits; Microlithography