Defect control in semiconductors
Subtitle: proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989
By: edited by K. Sumino.
Contributors: Sumino, K. 1931-
Publisher: North-Holland; Distributors for the U.S. and Canada, Elsevier Science Pub. Co.
Published: 1990
Place of publication: Amsterdam; New York; New York, N.Y., U.S.A
Language: eng
Subjects: Semiconductors -- Defects -- Congresses.; Materials -- Defects -- Congresses.
Notes: Includes bibliographical references and indexes.