98/1 Reactive sputtering
By: guest editor, William D. Westwood.
Contributors: Westwood, William D. 1937-
Publisher: Institute of Physics Pub.
Published: 1998
Place of publication: Bristol; Philadelphia
Language: eng
Subjects: Thin films -- Handbooks, manuals, etc.; Surfaces (Technology) -- Handbooks, manuals, etc.
Genres: Handbooks, manuals, etc.
Other titles: Reactive sputtering; Handbook of thin film process technology.
Notes: To accompany Handbook of thin film process technology / editors, David A. Glocker, S. Ismat Shah.

Includes bibliographical references and index.