RF-sputtered tetragonal barium titanate films on silicon
By: Janda K. G. Panitz, Surface Metallurgy Division 5834, Sandia Laboratories, Cheng Cheng Hu, University of New Mexico
Contributors: Hu, Cheng Cheng, joint author; Sandia Laboratories. Surface Metallurgy Division 5834; University of New Mexico
Series: SAND ; 78-7059
Publisher: Dept. of Energy, [Office of the Assistant Secretary for Defense Programs], Sandia Laboratories; for sale by the National Technical Information Service
Published: 1978
Place of publication: Albuquerque, N. M; Springfield, Va
Language: eng
Number of pages: 25
Subjects: Barium compounds; Thin films -- Electric properties
Notes: Prepared for the U.S. Dept. of Energy under contract AT(29-1)-789

Aug. 1978

Includes bibliographical references