CleanRooms '96 West
Subtitle: the Conference on Advanced Microcontamination Control and Ultrapure Manufacturing : conference, October 28-30, exhibits, October 29-30, Santa Clara Convention Center, Santa Clara, CA : proceedings.
Publisher: PennWell Pub. Co.
Published: 1996
Place of publication: Nashua, NH
Language: eng
Number of pages: 367
Subjects: Clean rooms -- Congresses.; Contamination (Technology) -- Congresses.
Notes: Includes bibliographical references and index.