Methodology for the modeling and simulation of microsystems
By: by Bartlomiej F. Romanowicz.
Series: Microsystems ;; v. 1; Microsystems (Series) ;; v. 1.
Publisher: Kluwer Academic Publishers
Published: 1998
Place of publication: Boston
Language: eng
Number of pages: 136
Subjects: Microelectromechanical systems -- Computer simulation; Computer-aided design
Notes: Includes bibliographical references and index.