Copper-fundamental mechanisms for microelectronic applications
By: Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann
Contributors: Verner, Igor V., 1955-; Gutmann, Ronald J
Publisher: John Wiley
Published: 2000
Place of publication: New York
Language: eng
Number of pages: 337
Subjects: Semiconductors -- Materials; Copper; Metallizing; Semiconductors -- Junctions; Microelectronics
Notes: Includes bibliographical references and index