Technology of proximal probe lithography
By: Christie R. K. Marrian, editor.
Contributors: Marrian, Christie R. K.
Series: SPIE institutes for advanced optical technologies ;; v. IS 10
Publisher: SPIE Optical Engineering Press
Published: 1993
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 413
Subjects: Molecular electronics.; Lithography, Electron beam.; Probes (Electronic instruments); Nanotechnology.
Notes: Includes bibliographical references.