Silicon Processing for the VLSI Era, Vol. 2
Subtitle: Process Integration
Publisher: Lattice Press
Published: March 1990
Language: eng
Format: Hardcover
Number of pages: 752
ISBN-13: 9780961672140
Subjects: Silicon; Very-Large-Scale Integration (Vlsi); Science/Mathematics; Technology & Industrial Arts; Very large scale integration; Semiconductors; Electronics - General; Engineering - Electrical & Electronic; General; Etching; Integrated circuits