Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
By: Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
Contributors: Varner, Ruth N.; Potzick, James E.; National Institute of Standards and Technology (U.S.)
Series: Standard reference materials; NIST special publication -- 260-117.
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; Order from National Technical Information Service]
Published: 1992
Place of publication: Gaithersburg, MD; [Springfield, VA
Language: eng
Format: Microform
Number of pages: 37
Subjects: Integrated circuits -- Calibration -- Standards.; Microscopes -- Calibration -- Standards.; Optical measurements -- Standards.
Other titles: Antireflecting chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems.
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 92-2096-M.

Paper version no longer for sale by the Supt. of Docs.

"Issued January 1992."

Includes bibliographical references.

Final.

Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1992] 1 microfiche : negative.