Micro-opto-electro-mechanical systems
Subtitle: 22-23 May 2000 : Glasgow, Scotland, United Kingdom
By: Richard R.A. Syms, chair/editor ; sponsored by EOS--European Optical Society ... [et al.] ; cooperating organizations, IEE--Institute of Electrical Engineers [and] IMechE--the Institution of Mechanical Engineers (UK).
Contributors: Syms, R. R. A.; Society of Photo-optical Instrumentation Engineers.; European Optical Society.; Institution of Electrical Engineers.; Institution of Mechanical Engineers (Great Britain)
Series: Proceedings EurOpt series; SPIE proceedings series ;; v. 4075; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4075.
Publisher: SPIE
Published: 2000
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 192
Subjects: Microelectromechanical systems -- Congresses.; Optoelectronic devices -- Congresses.; Microfabrication -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.