Microelectronic structures and MEMS for optical processing IV
Subtitle: 21-22 September, 1998, Santa Clara, California
By: M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].
Contributors: Motamedi, M. Edward.; Herzig, Hans Peter.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: Proceedings of SPIE,; v. 3513; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 3513.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Washington
Language: eng
Number of pages: 240
Subjects: Microelectronics -- Congresses.; Microelectromechanical systems -- Congresses.; Optoelectronics -- Congresses.
Notes: Includes bibliographical references and index.