Micromachining and microfabrication process technology III
Subtitle: 29-30 September, 1997, Austin, Texas
By: Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology.
Contributors: Pang, Stella W.; Chang, Shih-Chia.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; National Institute of Standards and Technology (U.S.)
Series: SPIE proceedings series ;; v. 3223; Proceedings of SPIE--the International Society of Optical Engineering ;; v. 3223.
Publisher: SPIE
Published: 1997
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 310
Subjects: Micromachining -- Congresses; Microfabrication -- Congresses; Electromechanical devices -- Design and construction -- Congresses
Notes: Includes bibliographical references and index.