Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology
By: edited by G.R. Srinivasan, J. Plummer, D. Antoniadis ; Electronics and Dielectrics and Insulation Divisions.
Contributors: Srinivasan, G. R.; Plummer, J.; Antoniadis, D.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Meeting
Series: Proceedings / Electrochemical Society ;; v. 88-16; Proceedings (Electrochemical Society) ;; v. 88-16.
Publisher: Electrochemical Society
Published: 1988
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 303
Subjects: Semiconductors -- Mathematical models -- Congresses.
Other titles: Process physics and modeling in semiconductor technology.
Notes: Includes bibliographical references.
Spine title: Process physics and modeling in semiconductor technology.
Papers from a symposium held in San Diego, Calif., Oct. 19-24, 1986 and from the general session of the Electrochemical Society's 170th meeting.