Ion implantation in semiconductors
Subtitle: proceedings.
By: Edited by I. Ruge and J. Graul.
Contributors: Ruge, I., ed.; Graul, J., ed.
Publisher: Springer-Verlag
Published: 1971
Place of publication: Berlin; New York
Language: eng
Number of pages: 506
Subjects: Ion implantation -- Congresses.; Semiconductors -- Congresses.
Notes: Includes bibliographical references.