Pvd for Microelectronics
Subtitle: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)
Edition: 1st edition
Publisher: Academic Press
Published: November 15, 1998
Language: eng
Format: Hardcover
Number of pages: 419
ISBN-13: 9780125330268
Subjects: Condensed matter physics (liquids & solids); Electrochemistry & magnetochemistry; Materials science; Thin Films Physics; Science; Technology & Industrial Arts; Science/Mathematics; Chemistry - Physical & Theoretical; Electronics - Semiconductors; Engineering - Electrical & Electronic; Science / Chemistry / Physical & Theoretical; Life Sciences - Biology - General; Physics; Design and construction; Thin film devices; Thin films; Vapor-plating
First sentence: The physical process tat we now call sputtering was first reported in 1852 by Sir William Robert Grove [1.1], who described the effect as "cathodic disintegration."