Chemical perspectives of microelectronic materials
Subtitle: symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.
By: editors, Míhal E. Gross, Joseph M. Jasinski, John T. Yates, Jr.
Contributors: Gross, Mihal E.; Jasinski, Joseph M.; Yates, John T., 1935-
Series: Materials Research Society symposium proceedings,; v. 131; Materials Research Society symposia proceedings ;; v. 131.
Publisher: Materials Research Society
Published: 1989
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 642
Subjects: Microelectronics -- Materials -- Congresses.; Semiconductors -- Congresses.; Surface chemistry -- Congresses.
Notes: Includes bibliographical references and indexes.