Advanced Metallization & Interconnect Systems for Ulsi Applications in 1996
Subtitle: Materials Research Society Conference Proceedings (Mrs Conference Proceedings, Vol 12)
Contributors: Berkeley Continuing Education in engineering University of California (Corporate Author); Robert Havemann (Editor); J. Schmitz (Editor); H. Komiyama (Editor); K. Tsubouchi (Editor)
Publisher: Materials Research Society
Published: May 1997
Language: eng
Format: Hardcover
Number of pages: 608
ISBN-13: 9781558993853
Subjects: Logic Design; Technology; Electrochemical metallizing; Ultra large scale integration; Technology & Industrial Arts; Science/Mathematics; Metallurgy; Integrated circuits; Vapor-plating; Congresses; Design and construction