Ban dao ti zhi cheng she bei
Subtitle: Semiconductor processing equipment, edition 4th
By: Zhang Jingyan zhu
Edition: Di 4 ban
Publisher: Wu nan tu shu chu ban gong si
Published: 2009
Place of publication: Taibei Shi
Language: chi
Number of pages: 586
ISBN-13: 9789571152509
Other titles: Semiconductor processing equipment
Notes: Includes bibliographical references and index.