Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II
By: edited by R. Novak... [et al.].
Contributors: Novak, Richard E.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectric Science and Technology Division.
Series: Proceedings ;; v. 94-3; Proceedings (Electrochemical Society) ;; v. 94-3.
Publisher: Electrochemical Society
Published: 1994
Place of publication: Pennington, N.J
Language: eng
Number of pages: 353
Subjects: Semiconductors -- Design and construction -- Congresses.; Semiconductors -- Defects -- Congresses.
Other titles: Contamination control and defect reduction in semiconductor manufacturing II.
Notes: Includes bibliographical references and indexes.
"Electronics and Dielectric Science and Technology Divisions."
Spine title: Contamination control and defect reduction in semiconductor manufacturing II.