Plasma processing
Subtitle: proceedings of the third Symposium on Plasma Processing
By: edited by J. Dieleman, R.G. Frieser, G.S. Mathad ; (sponsored by) Dielectrics and Insulation and Electronics Divisions.
Contributors: Dieleman, J.; Frieser, R. G.; Mathad, G. S.; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Electronics Division.
Series: Proceedings / The Electrochemical Society -- v. 82-6; Proceedings (Electrochemical Society) -- v. 82-6.
Publisher: Electrochemical Society
Published: 1982
Place of publication: Pennington, N.J. (10 S. Main St., Pennington 08534)
Language: eng
Number of pages: 516
Subjects: Plasma engineering -- Congresses.
Notes: Includes bibliographical references and indexes.