MEMS mechanical sensors
By: Stephen Beeby ... [et al.]
Contributors: Beeby, Stephen
Series: Artech House microelectromechanical systems (MEMS) series; Microelectromechanical systems series
Publisher: Artech House
Published: 2004
Place of publication: Boston
Language: eng
Number of pages: 269
Subjects: Microelectromechanical systems; Detectors
Notes: Includes bibliographical references and index