Silicon-on-insulator
Subtitle: its technology and applications
By: edited by S. Furukawa.
Contributors: Furukawa, S. 1934-; National Science Foundation (U.S.); Nihon Gakujutsu Shinkōkai.; US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics" (1983 : Ōiso-machi, Japan)
Publisher: KTK Scientific Publishers; D. Reidel; Sold and distributed in the U.S.A. and Canada by Kluwer Academic Publishers
Published: 1985
Place of publication: Tokyo; Boston; Hingham, MA
Language: eng
Number of pages: 295
Subjects: Solid state electronics -- Congresses.; Integrated circuits -- Design and construction -- Congresses.; Silicon -- Congresses.; Epitaxy -- Congresses.; Silicon-on-insulator technology.
Other titles: Layered structures and interface kinetics.
Notes: Includes bibliographies and index.
"Papers presented during the US-Japan Seminar on 'Solid Phase Epitaxy and Interface Kinetics' held in Oiso, Japan, June 20-24, 1983 ... co-sponsored by National Science Foundation and Japan Society for the Promotion of Science"--P. 5.
Companion volume containing the other papers presented at seminar published under title: Layered structures and interface kinetics.
"ASST, advances in solid state technology"--Cover.