Materials for Microlithography
Subtitle: Radiation-Sensitive Polymers (Acs Symposium Series)
Contributors: Jean M. J. Frechet (Editor)
Publisher: Amer Chemical Society
Published: July 1985
Language: eng
Format: Hardcover
Number of pages: 494
ISBN-13: 9780841208711
Subjects: Polymers; Polymer Engineering; Congresses; Materials; Microlithography; Photoresists