Silicon-on-Insulator Technology: Materials to VLSI
By: by Jean-Pierre Colinge
Edition: 3rd Edition.
Publisher: Springer US
Published: 2004
Place of publication: Boston, MA
Language: eng
Format: [electronic resource] /
Number of pages: 366
ISBN-13: 9781461347958; 9781441991065
Subjects: Systems engineering; Computer engineering; Electronics; Chemistry; Engineering; Optical materials
Description: Silicon-on-Insulator Technology: Materials to VLSI, Third Edition, retraces the evolution of SOI materials, devices and circuits over a period of roughly twenty years. Twenty years of progress, research and development during which SOI material fabrication techniques have been born and abandoned, devices have been invented and forgotten, but, most importantly, twenty years during which SOI Technology has little by little proven it could outperform bulk silicon in every possible way. The turn of the century turned out to be a milestone for the semiconductor industry, as high-quality SOI wafers suddenly became available in large quantities. From then on, it took only a few years to witness the use of SOI technology in a wealth of applications ranging from audio amplifiers and wristwatches to 64-bit microprocessors. This book presents a complete and state-of-the-art review of SOI materials, devices and circuits. SOI fabrication and characterization techniques, SOI CMOS processing, and the physics of the SOI MOSFET receive an in-depth analysis.
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