Advanced techniques for integrated circuit processing
By: James Bondur, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Bondur, James.; Turner, Terry R.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1392, <1803  >; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1392, etc.
Publisher: SPIE
Published: 1991
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 690
Subjects: Integrated circuits -- Design and construction -- Congresses.
Notes: Includes bibliographical references and indexes.
"1-5 October 1990, Santa Clara, California"--Vol. 1, t.p.
"21-23 September 1992, San Jose, California"--Vol. 2, t.p.