Device and process technologies for MEMS and microelectronics II
Subtitle: 17-19 December, 2001, Adelaide, Australia
By: Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section.
Contributors: Chiao, Jung-Chih.; Society of Photo-optical Instrumentation Engineers.; United States. Air Force. Asian Office of Aerospace Research and Development.; Institute of Electrical and Electronics Engineers. South Australia Section.
Series: SPIE proceedings series ;; v. 4592; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4592.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 538
Subjects: Microelectromechanical systems -- Congresses.; Photon detectors -- Design and construction -- Congresses.; Photomechanical processes -- Congresses.; Photolithography -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.