Issledovanie metodami IK-spektroskopii i rezerfordovskogo obratnogo rassei͡anii͡a plenok i prot͡sessov ikh obrazovanii͡a ...
Subtitle: preprint
By: N.N. Gonchakova, N.A. Kislov
Contributors: Kislov, N. A.; Institut problem tekhnologii mikroėlektroniki i osobochistykh materialov (Akademii͡a nauk SSSR)
Published: 1988
Place of publication: Chernogolovka
Language: rus
Number of pages: 20
Notes: Cover title.

At head of title: Akademii͡a nauk SSSR. Institut problem teknologii mikroėlektroniki i osobochistykh materialov.

Includes bibliographical references (p. 20)