Nondestructive tests used to insure the integrity of semiconductor devices with emphasis on acoustic emission techniques
By: George G. Harman ; sponsored in part by the Defense Advanced Research Projects Agency.
Contributors: United States. Defense Advanced Research Projects Agency.
Series: Semiconductor measurement technology; NBS special publication ; 400-59; NBS special publication ;; 400-59.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Published: 1979
Place of publication: Washington, D.C
Language: eng
Number of pages: 66
Subjects: Semiconductors -- Testing.; Semiconductor industry -- Quality control.; Nondestructive testing.; Acoustic emission testing.
Notes: Includes bibliographical references.