MOEMS and miniaturized systems VIII
Subtitle: 27-28 January 2009, San Jose, California, United States
By: David L. Dickensheets, Harald Schenk, Wibool Piyawattanametha, editors ; sponsored and published by SPIE ; symposium cosponsors, Texas Instruments Inc. (United States) ... [et al.].
Contributors: SPIE (Society); Texas Instruments Incorporated
Series: Proceedings of SPIE -- v. 7208; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7208.
Publisher: SPIE
Published: 2009
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819474544
Other titles: MOEMS and miniaturized systems 8; MOEMS and miniaturized systems eight
Notes: Includes bibliographical references and index.