Micromachining and microfabrication process technology IV
Subtitle: 21-22 September, 1998, Santa Clara, California
By: James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].
Contributors: Smith, James H.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: SPIE proceedings series ;; v. 3511; Proceedings of SPIE--the International Society of Optical Engineering ;; v. 3511.
Publisher: SPIE
Published: 1998
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 402
Subjects: Micromachining -- Congresses; Microfabrication -- Congresses; Electromechanical devices -- Design and construction -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and author index.