Smart sensors and MEMS
By: edited by Sergey Y. Yurish and Maria Teresa S.R. Gomes.
Contributors: Yurish, Sergey Y.; Gomes, Maria Teresa S. R.; North Atlantic Treaty Organization. Scientific Affairs Division.
Series: NATO science series -- v. 181.
Publisher: Kluwer Academic in cooperation with NATO Scientific Affairs Division
Published: 2004
Place of publication: Dordrecht; London
Language: eng
Number of pages: 480
Subjects: Detectors -- Congresses; Microelectromechanical systems -- Congresses; Scanning systems -- Congresses
Genres: Congresses.
Notes: Papers from the NATO Advanced Study Institute on Smart Sensors and MEMS.

Includes bibliographical references and index.