Run-to-run control in semiconductor manufacturing
By: edited by James Moyne, Enrique del Castillo, Arnon Max Hurwitz
Contributors: Moyne, James; Del Castillo, Enrique; Hurwitz, Arnon Max
Publisher: CRC Press
Published: 2001
Place of publication: Boca Raton
Language: eng
Number of pages: 348
Subjects: Semiconductors -- Design and construction; Semiconductor industry -- Production control; Electronic packaging; Production management
Notes: Includes bibliographical references and index