Osobennosti abrazivnoĭ i khimicheskoĭ obrabotki poverkhnosti poluprovodnikov
Subtitle: monografii͡a︡
By: V.A. Perevoshchikov, V.D. Skupov.
Contributors: Skupov, V. D.
Publisher: Izd-vo Nizhegorodskogo universiteta
Published: 1992
Place of publication: Nizhniĭ Novgorod
Language: rus
Number of pages: 195
Subjects: Semiconductors -- Etching.
Notes: Includes bibliographical references (p. 189-[196]).
At head of title: Ministerstvo nauki, vyssheĭ shkoly i tekhnicheskoĭ politiki Rossiĭskoĭ Federat͡s︡ii.