Plasma Processes for Semiconductor Fabrication (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)
Edition: New Ed edition
Publisher: Cambridge University Press
Published: September 29, 2005
Language: eng
Format: Paperback
Number of pages: 231
ISBN-13: 9780521018005
Subjects: Semi-conductors & super-conductors; Science/Mathematics; Technology; Technology & Industrial Arts; Electronics - Circuits - General; Engineering - Electrical & Electronic; Semiconductors--Etching; Semiconductors--Etching Semiconductors--Etchi; Technology / Engineering / Electrical; Technology-Electronics - Circuits - General
First sentence: This book is intended to introduce plasma processing and technology, so that the reader can readily understand the issues involved in processing and can immediately access the state-of-the-art literature.