IEEE micro electro mechanical systems
Subtitle: an investigation of micro structures, sensors, actuators, machines, and robots : proceedings, Nara, Japan, 30 January-2 February 1991
By: sponsored by the IEEE Robotics and Automation Society and in cooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division.
Contributors: IEEE Robotics and Automation Society.; Denki Gakkai (1888); American Society of Mechanical Engineers. Dynamic Systems and Control Division.; IEEE Workshop on Micro Electro Mechanical Systems (4th : 1991 : Nara-shi, Japan)
Publisher: Institute of Electrical and Electronics Engineers
Published: 1991
Place of publication: New York
Language: eng
Number of pages: 288
Subjects: Microelectromechanical systems -- Congresses.; Miniature objects -- Congresses.; Robotics -- Congresses.
Genres: Congresses.
Other titles: IEEE micro electro mechanical systems, 1991.
Notes: Includes bibliographical references and indexes.
"The Fourth IEEE Workshop on Micro Electro Mechanical Systems (MEMS '91)"--P. iii.
Cover title: IEEE micro electro mechanical systems, 1991.
"IEEE catalog number: 91CH2957-9"--Label on verso of t.p.