Nano- and microelectromechanical systems
Subtitle: fundamentals of nano- and microenginering
By: Sergey Edward Lyshevski.
Series: Nano- and microscience, engineering, technology, and medicine series
Publisher: CRC Press
Published: 2000
Place of publication: Boca Raton, FL
Language: eng
Number of pages: 338
Subjects: Microelectromechanical systems.
Notes: Includes index.

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