Proceedings of the Symposium on Dry Process
By: edited by Jun-ichi Nishizawa ... [et al.].
Contributors: Nishizawa, Jun'ichi, 1926-; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Series: Proceedings / Electrochemical Society ;; v. 88-7; Proceedings (Electrochemical Society) ;; v. 88-7.
Publisher: Electrochemical Society
Published: 1988
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 347
Subjects: Semiconductors -- Design and construction -- Congresses.; Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.; Plasma etching -- Congresses.; Vapor-plating -- Congresses.
Notes: Includes bibliographies and index.
Held within meetings of the Electronics and Dielectrics and Insulation Divisions of the Electrochemical Society in Honolulu, Oct. 22-23, 1987.