Micromachining technology for micro-optics and nano-optics II
Subtitle: 27-29 January 2004, San Jose, California, USA
By: Eric G. Johnson, Gregory P. Nordin, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Contributors: Johnson, Eric G.; Nordin, Gregory P.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Washington, USA
Language: eng
Number of pages: 288
Subjects: Integrated optics -- Congresses.; Miniature electronic equipment -- Design and construction -- Congresses.; Optoelectronic devices -- Design and construction -- Congresses.; Micromachining -- Congresses.; Microelectromechanical systems -- Congresses.; Nanotechnology -- Congresses.
Genres: Congresses.
Other titles: Micromachining technology for micro-optics.
Notes: Includes bibliographical references and author index.
Earlier conference has title: Micromachining technology for micro-optics.