Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Subtitle: 22-24 January 2007, San Jose, California, USA
Publisher: SPIE
Published: 2007
Language: eng
Number of pages: 370
ISBN-13: 9780819465757
Subjects: Machining; Integrated optics; Miniature electronic equipment; Optoelectronic devices; Microelectromechanical systems