Lithography
Subtitle: main techniques
By: edited by Stefan Landis
Publisher: ISTE; Wiley
Published: 2011
Place of publication: London; Hoboken, NJ
Language: eng
Number of pages: 377
ISBN-13: 9781848212022
Subjects: Microlithography
Description: "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
Notes: Includes bibliographical references and index.