High resolution focused ion beams
Subtitle: FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology
By: Jon Orloff, Mark Utlaut, and Lynwood Swanson
Contributors: Swanson, Lynwood, 1934-; Utlaut, Mark William, 1949-
Publisher: Kluwer Academic/Plenum Publishers; Springer
Published: 2003
Place of publication: New York
Language: eng
Number of pages: 303
Subjects: Ion bombardment -- Industrial applications
Notes: Includes bibliographical references and index