Scaling issues and design of microelectromechanical systems
By: Salvatore Baglio, Salvatore Castorina, Nicol Savalli.
Contributors: Castorina, Salvatore.; Savalli, Nicol.
Publisher: John Wiley & Sons
Published: 2007
Place of publication: Chichester, England
Language: eng
ISBN-13: 9780470016992
Subjects: Microelectromechanical systems -- Design and construction.
Notes: Includes bibliographical references and index.