Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry
By: A.R. Heyd, S.A. Alterovitz, E.T. Croke.
Contributors: Alterovitz, S. A.; Croke, E. T.; United States. National Aeronautics and Space Administration.
Series: NASA-TM -- 112114.; NASA technical memorandum -- 112114.
Publisher: National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1995
Place of publication: [Washington, D.C; Springfield, Va
Language: eng
Format: Microform
Subjects: Algorithms.; Substrates.; Silicon compounds.; Germanium.; Ellipsometry.; Dielectrics.
Notes: Shipping list no.: 97-0960-M.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1995] 1 microfiche.