EMC 2003
Subtitle: 19th European Mask Conference on Mask Technology for Integrated Circuits and Micro-components : lectures held at the GMM-Conference, January 13-15, 2003 in Sonthofen, Germany
By: conference chairperson, Uwe Behringer ; organizer, VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) ; in cooperation with Semiconductor Equipment and Materials International ... [et al.].
Contributors: Behringer, Uwe F. W.; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.; Semiconductor Equipment and Materials International.
Series: GMM-Fachbericht -- 39
Publisher: VDE-Verlag
Published: 2003
Place of publication: Berlin
Language: eng
Number of pages: 310
Subjects: Integrated circuits -- Masks -- Congresses.; Microlithography -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references.