Tribology in chemical-mechanical planarization
By: Hong Liang, David Craven.
Contributors: Craven, David R., 1945-
Publisher: Taylor & Francis
Published: 2005
Place of publication: Boca Raton, Fla
Language: eng
Number of pages: 185
Subjects: Tribology.; Grinding and polishing.
Notes: Includes bibliographical references and index.