Plasma processing
By: edited by Toshiaki Makabe ... [et al.].
Contributors: Makabe, Toshiaki.; International Conference on Reactive Plasma, (2nd : 1994 : Yokohama)
Series: Japanese journalof applied physics -- vol.33 (7B)
Publisher: Japanese Journal of Applied Physics
Published: 1994
Place of publication: Tokyo
Language: eng
Notes: Special issue. Contains papers presented at the 2nd International Conference on Reactive Plasma, Yokohama, 1994.