Low-dielectric constant materials-- synthesis and applications in microelectronics
Subtitle: symposium held April 17-19, 1995, San Francisco, California, U.S.A.
By: editors, T.-M. Lu ... [et al.].
Contributors: Lu, T.-M. 1945-
Series: Materials Research Society symposium proceedings ; v. 381; Materials Research Society symposia proceedings ;; v. 381.
Publisher: Materials Research Society
Published: 1995
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 288
Subjects: Electronics -- Materials -- Congresses.; Electric insulators and insulation -- Congresses.; Materials -- Electric properties -- Congresses.
Notes: Includes bibliographical references and indexes.