Semiconductor processing
Subtitle: a symposium
By: sponsored by ASTM Committee F-1 on Electronics ... [et al.], San Jose, CA, 7-10 Feb., 1984 ; D.C. Gupta, editor.
Contributors: Gupta, D. C.; ASTM Committee F-1 on Electronics.; Symposium on Semiconductor Processing (3rd : 1984 : San Jose, Calif.)
Series: ASTM special technical publications ;; 850; ASTM special technical publication ;; 850.
Publisher: ASTM
Published: 1984
Place of publication: Philadelphia, PA
Language: eng
Number of pages: 671
Subjects: Semiconductor industry -- Congresses.
Notes: Includes bibliographies and index.
"ASTM publication code number (PCN) 04-850000-46."