Micro- and nanotechnology
Subtitle: materials, processes, packaging, and systems IV : 10-12 December 2008, Melbourne, Australia
By: Jung-Chih Chiao ... [et al.], editors ; sponsored [and] published by SPIE ; cosponsored by RMIT University (Australia)
Contributors: SPIE (Society); RMIT University
Series: Proceedings of SPIE -- v. 7269; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7269.
Publisher: SPIE
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819475213
Other titles: Materials, processes, packaging, and systems IV
Notes: Includes bibliographical references and index.