Optical inspection and metrology for non-optics industries
Subtitle: 3-4 August 2009, San Diego, California, United States
By: Peisen S. Huang, Toru Yoshizawa, Kevin G. Harding, editors ; sponsored and published by by SPIE
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 7432; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7432.
Publisher: SPIE
Published: 2009
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819477224
Notes: Includes bibliographical references and author index.