IEEE/SEMI International Manufacturing science Science Symposium
Subtitle: theme: "Semiconductor manufacturing" : May 19-22, 1991, Hyatt Regency Hotel, Burlingame, CA, USA.
Contributors: Institute of Electrical and Electronics Engineers.; IEEE Components, Hybrids, and Manufacturing Technology Society.; IEEE Electron Devices Society.; Semiconductor Equipment and Materials Institute.; Semiconductor Research Corporation.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1991
Place of publication: New York, N.Y
Language: eng
Number of pages: 164
Subjects: Semiconductors -- Design and construction -- Congresses.
Other titles: International Semiconductor Manufacturing Science Symposium.; Semiconductor manufacturing.; ISMSS.; 1991 IEEE/Semi International Semiconductor Manufacturing Science Symposium.; Semiconductor manufacturing science.
Notes: "Third ISMSS."

On spine and cover: 1991 IEEE/Semi International Semiconductor Manufacturing Science Symposium.

"91CH2993-4."

"1991 Proceedings, International Semiconductor Manufacturing Science Symposium (ISMSS)."--t.p. verso.

Co-sponsored by the SEMI, the IEEE Components Hybrids, & Manufacturing Technology Society (CHMT), the IEEE Electron Devices Society (EDS), and the Semiconductor Research Corporation (SRC)

Includes bibliographical references.