Materials, technology, and reliability for advanced interconnects and low-k dielectrics--2004
Subtitle: symposium held April 13-15, 2004, San Francisco, California, U.S.A
By: editors, R.J. Carter ... [et al.].
Contributors: Carter, R. J. 1948-; Materials Research Society. Meeting; Symposim on Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics (2004 : San Francisco, Calif.)
Series: Materials Research Society symposium proceedings ;; v. 812; Materials Research Society symposia proceedings ;; v. 812.
Publisher: Materials Research Society
Published: 2004
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 402
Subjects: Semiconductors -- Materials -- Congresses.; Semiconductors -- Junctions -- Congresses.; Dielectric films -- Congresses.; Integrated circuits -- Materials -- Congresses.; Integrated circuits -- Reliability -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and indexes.
"This proceedings volume contains 60 papers presented at Symposium F, 'Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, ' which was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--P. xiii.