Ion implantation, sputtering and their applications
By: by P. D. Townsend, J. C. Kelly, N. E. W. Hartley.
Contributors: Kelly, J. C. joint author.; Hartley, N. E. W., joint author.
Publisher: Academic Press
Published: 1976
Place of publication: London; New York
Language: eng
Number of pages: 333
Subjects: Ion implantation.; Sputtering (Physics)
Notes: Includes bibliographies and index.