Maskentechnik für Mikroelektronik-Bausteine
Subtitle: Tagung München, 10. Nov. 1987
By: VDI/VDE-Gesellschaft Feinwerktechnik.
Contributors: VDI/VDE-Gesellschaft Feinwerktechnik.
Series: VDI Berichte,; 666; VDI-Berichte ;; 666.
Publisher: VDI Verlag
Published: 1987
Place of publication: Düsseldorf
Language: ger
Number of pages: 206
Subjects: Integrated circuits -- Masks -- Congresses.
Notes: Includes bibliographies.
Papers of the conference.