MOEMS and miniaturized systems IX
Subtitle: 25-27 January 2010, San Francisco, California, United States
By: Harald Schenk, Wibool Piyawattanametha, editors ; sponsored and published by SPIE
Contributors: SPIE (Society)
Series: Proceedings of SPIE -- v. 7594; Proceedings of SPIE--the International Society for Optical Engineering -- v. 7594.
Publisher: SPIE
Published: 2010
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819479907
Other titles: MOEMS and miniaturized systems 9; MOEMS and miniaturized systems nine
Notes: Includes bibliographical references and index.