Handbook of chemical vapor deposition (CVD)
Subtitle: principles, technology, and applications
By: by Hugh O. Pierson.
Publisher: Noyes Publications
Published: 1992
Place of publication: Park Ridge, N.J., U.S.A
Language: eng
Number of pages: 436
Subjects: Vapor-plating -- Handbooks, manuals, etc.
Other titles: Chemical vapor deposition.
Notes: Includes bibliographical references and index.