IEEE micro electro mechanical systems
Subtitle: an investigation of micro structures, sensors, actuators, machines and robots : proceedings, Travemünde, Germany, 4 February-7 February 1992
By: W. Benecke, H.-C. Petzold, eds. ; sponsored by the IEEE Robotics and Automation Society and in cooperation with the German IEEE Section.
Contributors: Benecke, W.; Petzold, H.-C.; IEEE Robotics and Automation Society.; Institute of Electrical and Electronics Engineers. German Section.; IEEE Workshop on Micro Electro Mechanical Systems (1992 : Travemünde, Lübeck, Germany)
Publisher: Institute of Electrical and Electronics Engineers
Published: 1992
Place of publication: [New York]
Language: eng
Number of pages: 240
Subjects: Microelectromechanical systems -- Congresses.; Robotics -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.
Notes: Includes bibliographical references.
"IEEE Micro Electro Mechanical Systems Workshop"--Spine.
"IEEE catalog number 92CH3093-2."