Surface and interface effects in VLSI
By: edited by Norman G. Einspruch, Robert S. Bauer.
Contributors: Einspruch, Norman G.; Bauer, Robert S.
Series: VLSI electronics ;; v. 10
Publisher: Academic Press
Published: 1985
Place of publication: Orlando
Language: eng
Number of pages: 383
Subjects: Integrated circuits -- Very large scale integration.; Semiconductors -- Surfaces.
Notes: Includes bibliographies and index.