Rapid thermal and related processing techniques
Subtitle: 2-3 October 1990, Santa Clara, California
By: Rajendra Singh, Mehrdad M. Moslehi, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Singh, Rajendra, 1946-; Moslehi, Mehrdad M.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings / SPIE--the International Society for Optical Engineering ;; v. 1393; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 1393.
Publisher: SPIE
Published: 1991
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 422
Subjects: Semiconductors -- Heat treatment -- Congresses.; Semiconductor doping -- Congresses.; Vapor plating -- Congresses.; Rapid thermal processing -- Congresses.
Notes: Includes bibliographical references and index.
Papers presented at the SPIE Conference on Rapid Thermal and Related Processing Techniques.