Laser-Assisted Microtechnology
By: by Simeon M. Metev, Vadim P. Veiko
Contributors: Veiko, Vadim P.
Edition: Second, Updated Edition.
Series: Springer Series in Materials Science -- 19; Springer Series in Materials Science -- 19
Publisher: Springer Berlin Heidelberg
Published: 1998
Place of publication: Berlin, Heidelberg
Language: eng
Format: [electronic resource] /
Number of pages: 270
ISBN-13: 9783642872730; 9783642872716
Subjects: Nanotechnology; Structural control (Engineering); Surfaces (Physics)
Description: Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications.
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Table of contents: title: Introduction; title: Laser-Based Equipment for Microtechnology; title: Laser Micromachining of Thin Films; title: Local Laser-Induced Heat Treatment; title: Laser Melting and Microwelding; title: Laser Microshaping; title: Maskless Laser Micropatterning; title: Pulsed Laser-Plasma Deposition of Thin Films and Film Structures.