Optical imaging in projection microlithography
By: Alfred Kwok-Kit Wong.
Series: Tutorial texts in optical engineering -- v. TT 66
Publisher: SPIE Press
Published: 2005
Place of publication: Bellingham, WA
Language: eng
Number of pages: 254
Subjects: Microlithography.; Imaging systems.
Notes: Includes bibliographical references (p. 219-229) and index.