The design of plasma etchants
By: Daniel L. Flamm and Vincent M. Donnelly.
Contributors: Donnelly, Vincent M.
Publisher: [s.n.]
Published: 1981
Place of publication: [S.l.]
Number of pages: 363
Subjects: Plasma etching
Notes: Bibliography: p.359-363.

Source: Plasma chemistry and plasma processing, v.1, no.4, 1981