Realization of silicon based ultrasound micro-systems
By: Christoph Kuratli.
Edition: 1. Aufl.
Series: Series in microelectronics,; v. 86
Publisher: Hartung-Gorre
Published: 1999
Place of publication: Konstanz
Language: eng
Number of pages: 162
Subjects: Miniature electronic equipment.; Microelectronics.
Notes: Includes bibliographical references (p. 153-157).
Originally presented as the author's thesis (Swiss Federal Institute of Technology), Diss. ETH No. 13202.
Summary in German.