Modelirovanie gidromekhanicheskikh prot͡s︡essov v tekhnologii izgotovlenii͡a︡ poluprovodnikovykh priborov i mikroskhem
By: I.A. Belov, V.A. Shelenshkevich, L.I. Shub.
Contributors: Shelenshkevich, V. A.; Shub, L. I.
Publisher: "Politekhnika"
Published: 1991
Place of publication: Moskva
Language: rus
Number of pages: 287
Subjects: Semiconductors.; Integrated circuits.
Notes: Includes bibliographical references (p. 283-[286]).
"Nauchnoe izdanie"--Colophon.