Cvd and Ald of Group IV - & V-Oxides for Dielectric Applications
Series: Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science & Technology, 665
Publisher: Uppsala Universitet
Published: November 2001
Language: eng
Format: Paperback
Number of pages: 55
ISBN-13: 9789155451431
Subjects: Chemistry - Inorganic; Science; Science/Mathematics