Kinetics of polycrystalline tungsten and silicon CVD
By: Jisk Holleman
Contributors: Universiteit Twente
Publisher: [s.n.]
Published: 1993
Place of publication: [s.l.]
Language: eng
Number of pages: 114
Notes: Thesis (doctoral)--Universiteit Twente, 1993.

Met lit. opg., samenvatting in het Nederlands.