MEMS
Subtitle: background and fundamentals
By: edited by Mohamed Gad-El-Hak.
Contributors: Gad-el-Hak, Mohamed, 1945-
Series: Mechanical engineering series; Mechanical engineering series (Boca Raton, Fla.)
Publisher: CRC Press/Taylor & Francis Group
Published: 2005
Place of publication: Boca Raton, FL
Language: eng
Subjects: Microelectromechanical systems.; Microelectronics.; Nanotechnology.
Notes: Includes bibliographical references and index.