Methodology for the modeling and simulation of microsystems
By: by Bartlomiej F. Romanowicz
Series: Microsystems (series) -- 1
Publisher: Springer Science
Published: 1998
Place of publication: New York
Language: eng
Format: [electronic resource] /
Number of pages: 136
ISBN-13: 9781461375722; 9781461556213
Subjects: Microelectromechanical systems; Computer simulation; Computer-aided design
Notes: Includes bibliographical references and index.