Electronics and structures for MEMS II
Subtitle: 17-19 December, 2001, Adelaide, Australia
By: Neil W. Bergmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section.
Contributors: Bergmann, Neil W.; Society of Photo-optical Instrumentation Engineers.; United States. Air Force. Asian Office of Aerospace Research and Development.; Institute of Electrical and Electronics Engineers. South Australia Section.
Series: SPIE proceedings series,; v. 4591; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4591.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 392
Subjects: Microelectromechanical systems -- Congresses.; Smart structures -- Congresses.; Microelectronics -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.