Photodeposition of nitride insulators on III-V substrates
Subtitle: annual report
By: George J. Collins.
Contributors: Research Institute of Colorado.; United States. National Aeronautics and Space Administration.
Series: NASA CR -- 173393.; NASA contractor report -- NASA CR-173393.
Publisher: Research Institiute of Colorado; National Aeronautics and Space Administration
Published: 1984
Place of publication: Fort Collins, Colo; [Washington, D.C
Language: eng
Format: Microform
Subjects: Nitrides.; Silicon-on-insulator technology.; Laser applications.; Long term effects.; Storage stability.; Thin films.; Vapor deposition.
Notes: Microfiche. [Washington, D.C. : National Aeronautics and Space Administration], 1984. 1 microfiche.