Micro system technologies 91
Subtitle: 2nd International Conference on Micro Electro, Opto, Mechanic Systems and Components, Berlin, October 29-November 1, 1991
By: Rudolf Krahn, Herbert Reichl (editors).
Contributors: Krahn, Rudolf; Reichl, H.
Publisher: vde-verlag
Published: 1991
Place of publication: Berlin; Offenbach
Language: eng
Number of pages: 552
Subjects: Microelectronics -- Congresses; Electronic circuit design -- Data processing -- Congresses; Computer-aided design -- Congresses; Microelectronics -- Materials -- Congresses
Notes: Includes bibliographical references.