Reactive sputtering applied to microelectronic devices
By: by Torbjörn Larsson
Contributors: Uppsala universitet
Series: Acta Universitatis Upsaliensis -- 143
Publisher: Uppsala Universitet; Distributor, Almqvist & Wiksell International
Published: 1988
Place of publication: Uppsala; Stockholm, Sweden
Language: eng
Number of pages: 20
Subjects: Sputtering (Physics); Microelectronics
Notes: Thesis (doctoral)--Uppsala University, 1988.

Bibliography: p. 20.