Micromachining and microfabrication process technology II
Subtitle: 14-15 October, 1996, Austin, Texas
By: Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories.
Contributors: Pang, Stella W.; Chang, Shih-Chia.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.; National Institute of Standards and Technology (U.S.)
Series: Proceedings / SPIE--the International Society of Optical Engineering ;; v. 2879; Proceedings of SPIE--the International Society of Optical Engineering ;; v. 2879.
Publisher: SPIE--The International Society of Optical Engineering
Published: 1996
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 366
Subjects: Micromachining -- Congresses; Microfabrication -- Congresses; Electromechanical devices -- Design and construction -- Congresses