Introduction to semiconductor technology
By: Hong Xiao
Edition: 2nd ed.
Publisher: SPIE
Published: 2012
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 664
ISBN-13: 9780819490926
Subjects: Semiconductors; Semiconductor industry; Design and construction
Description: Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations.
Notes: Includes bibliographical references and index.