Integrated circuit metrology
Subtitle: May 4-5, 1982, Arlington, Virginia
By: Diana Nyyssonen, chairman/editor ; cooperating organization, National Bureau of Standards.
Contributors: Nyyssonen, Diana.; United States. National Bureau of Standards.
Series: Proceedings of SPIE--the International Society for Optical Engineering ;; v. 342
Publisher: SPIE--the International Society for Optical Engineering
Published: 1982
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 132
Subjects: Integrated circuits -- Congresses; Mensuration -- Congresses
Notes: Includes bibliographical references and indexes.