Microelectronic materials and processes
Subtitle: [proceedings of the NATO Aadvanced Study Institute on Microelectronic Materials and Processes, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986]
By: edited by R. A. Levy.
Contributors: Levy, Roland A. 1944-; North Atlantic Treaty Organization.
Series: NATO ASI series. Series E, Applied sciences ;; vol. 164; NATO ASI series.; no. 164.
Publisher: Kluwer Academic
Published: 1989
Place of publication: Dordrecht; Boston
Language: eng
Number of pages: 985
Subjects: Microelectronics -- Materials -- Congresses.; Integrated circuits -- Very large scale integration -- Design and construction -- Congresses.
Notes: Includes bibliographies.