Sputtering by Particle Bombardment (Topics in Applied Physics)
Contributors: R. Behrisch (Editor); Klaus Wittmaack (Editor)
Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. K; Springer
Published: September 1991
Format: Hardcover
Number of pages: 425
ISBN-13: 9783540534280
Subjects: Applied physics & special topics; Materials science