Primenenie nizkotemperaturnoĭ plazmy dli͡a︡ nanesenii͡a︡ tonkikh plenok
By: B.S. Danilin.
Publisher: Ėnergoatomizdat
Published: 1989
Place of publication: Moskva
Language: rus
Number of pages: 326
Subjects: Integrated circuits.; Plasma (Ionized gases)
Notes: Includes bibliographical references (p. 316-[324]).
"Nauchnoe izdanie"--Colophon.