1999 IEEE International Symposium on Semiconductor Manufacturing conference proceedings
Subtitle: October 11-13, 1999, Santa Clara, California.
Contributors: Institute of Electrical and Electronics Engineers.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1999
Place of publication: Piscataway, N.J
Language: eng
Number of pages: 469
Subjects: Electronic industries -- Congresses.; Semiconductors -- Design and construction -- Congresses.; Computer integrated manufacturing systems -- Congresses.
Genres: Congresses.
Other titles: International Symposium on Semiconductor Manufacturing.; ISSM '99.; Semiconductor Manufacturing Conference proceedings, 1999 IEEE International Symposium on.
Notes: "IEEE catalog number 99CH36314"--T.p. verso.

Includes bibliographical references and author index.

Also available via the World Wide Web with additional title: Semiconductor Manufacturing Conference proceedings, 1999 IEEE International Symposium on.