Micro system technologies 90
Subtitle: 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components, Berlin, 10-13 September 1990
By: Herbert Reichl, editor.
Contributors: Reichl, H.
Publisher: Springer-Verlag
Published: 1990
Place of publication: Berlin; New York
Language: eng
Number of pages: 858
Subjects: Microelectronics -- Congresses.; Electronic circuit design -- Data processing -- Congresses.; Computer-aided design -- Congresses.; Microelectronics -- Materials -- Congresses.
Other titles: Microsystem technologies 90.
Notes: Includes bibliographical references and index.
Proceedings of an international meeting, held at the Berlin International Congress Center.