JTEC panel on x-ray lithography in Japan
Subtitle: final report
By: James T. Clemens ... [et al.].
Contributors: Japanese Technology Evaluation Center (Loyola College in Maryland)
Publisher: Loyola College
Published: 1991
Place of publication: Baltimore
Language: eng
Number of pages: 188
Subjects: X-ray lithography; Research
Other titles: X-ray lithogrpahy in Japan
Notes: Includes bibliographical references.