Silicide Thin Films-Fabrication, Properties, and Applications
Subtitle: Symposium Held November 27-30, 1995, Boston, Massachusetts, U.S.A. (Materials Research Society Symposia Proceedings, V. 402.)
Contributors: Raymond T. Tung (Editor); Karen Maex (Editor); Paul W. Pellegrini (Editor); Leslie H. Allen (Editor)
Publisher: Materials Research Society
Published: April 1996
Language: eng
Format: Hardcover
Number of pages: 648
ISBN-13: 9781558993051
Subjects: Technology; Thin film devices; Science/Mathematics; Thin Films Physics; Technology & Industrial Arts; Silicides; Electronics - Semiconductors; Thin films; Reference; Congresses