Handbook of semiconductor interconnection technology
By: edited by Geraldine Cogin Schwartz, K.V. Srikrishnan, Arthur Bross.
Contributors: Schwartz, G. C.; Srikrishnan, K. V., 1948-; Bross, Arthur, 1928-
Publisher: Marcel Dekker
Published: 1998
Place of publication: New York
Language: eng
Number of pages: 577
Subjects: Semiconductors -- Design and construction.; Electric contacts.; Semiconductors -- Junctions.
Other titles: Semiconductor interconnection technology
Description: This invaluable reference offers the latest information on the application of interconnection technology to semiconductors - covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects.
Notes: Includes bibliographical references and index.