Papers presented at the European Materials Research Society 1998 Meeting
Subtitle: Symposium I: Rapid Thermal Processing
By: guest editors: A. Slaoui ... [et al.].
Series: Materials science in semiconductor processing -- v. 1, no. 3/4
Publisher: Pergamon
Published: 1999
Place of publication: Kidlington, Oxford, U.K
Language: eng
Number of pages: 350
Subjects: Rapid thermal processing; Congresses; Integrated circuits; Ultra large scale integration; Design and construction; Semiconductor doping
Notes: Held in Strasbourg, France.

Includes bibliographical references.

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