Testing, reliability, and application of micro- and nano-material systems
Subtitle: 3-5 March, 2003, San Diego, California, USA
By: Norbert Meyendorf, George Y. Baaklini, Bernd Michel, chairs/editors ; cosponsored by National Institute of Standards and Technology (USA) ... [et al.] ; cooperating organizations, Institute of Acostic Microscopy (USA) ... [et al.] ; published by SPIE--the International Society for Optical Engineering.
Contributors: Meyendorf, Norbert.; Baaklini, George Y.; Michel, Bernd, 1949-; National Institute of Standards and Technology (U.S.); Institute of Acoustic Microscopy (U.S.); Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series,; v. 5045; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5045.
Publisher: SPIE
Published: 2003
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 276
Subjects: Electrooptical devices -- Materials -- Testing -- Congresses.; Photonics -- Materials -- Testing -- Congresses.; Nanostructured materials -- Testing -- Congresses.; Microelectromechanical systems -- Testing -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and author index.