Chemical-mechanical polishing, fundamentals and challenges
Subtitle: symposium held April 5-7, 1999, San Francisco, California, U.S.A. / c editors, S.V. Babu ... [et al.].
Contributors: Babu, S. V.
Series: Materials Research Society symposium proceedings -- v. 566; Materials Research Society symposia proceedings -- v. 566.
Publisher: Materials Research Society
Published: 1999
Place of publication: Warrendale, Pa
Language: eng
Number of pages: 281
Subjects: Electrolytic polishing -- Congresses.; Grinding and polishing -- Congresses.
Genres: Congresses.
Notes: Includes bibliographical references and index.