Cyrstalline Defects and Contamination
Subtitle: Their Impact and Control in Device Manufacturing IV - DECON 2005
Contributors: Bernd O. Kolbesen (Editor); Cor Claeys (Editor); Lazlo Fabry (Editor); Francois Tardif (Editor)
Publisher: Electrochemical Society
Published: September 30, 2005
Language: eng
Format: Hardcover
Number of pages: 189
ISBN-13: 9781566774284
Subjects: General; Science; Science/Mathematics