MEMS/MOEMS technologies and applications III
Subtitle: 12-14 November 2007, Beijing, China
By: Jung-Chih Chiao ... [et al.], editors ; sponsored by SPIE [and] COS--Chinese Optical Society ; cooperating organizations, OSJ--Optical Society of Japan ... [et al.] ; supporting organizations, CAST--China Association for Science and Technology (China), NNSF--National Nature Science Foundation (China), [and] the Ministry of Science and Technology (China)
Contributors: Society of Photo-optical Instrumentation Engineers; Zhongguo guang xue xue hui; Nihon Kōgakkai (Ōyō Butsuri Gakkai); Zhongguo ke xue ji shu xie hui; Guo jia zi ran ke xue ji jin wei yuan hui (China); China. Guo jia ke xue ji shu bu
Series: Proceedings of  SPIE -- v. 6836; Proceedings of SPIE--the International Society for Optical Engineering -- v. 6836.
Publisher: SPIE
Published: 2008
Place of publication: Bellingham, Wash
Language: eng
ISBN-13: 9780819470119
Other titles: MOEMS technologies and applications III
Notes: Includes bibliographical references and author index.