Ion implantation techniques
Subtitle: lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982
By: editors, H. Ryssel and H. Glawischnig.
Contributors: Ryssel, Heiner, 1941-; Glawischnig, H. 1939-; International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden, Germany)
Series: Springer series in electrophysics ;; v. 10
Publisher: Springer-Verlag
Published: 1982
Place of publication: Berlin; New York
Language: eng
Number of pages: 372
Subjects: Ion implantation.; Semiconductor doping.
Notes: Includes bibliographies and index.