Nanofabrication
Subtitle: Techniques and Principles
By: edited by Maria Stepanova, Steven Dew
Contributors: Dew, Steven; SpringerLink (Online service)
Publisher: Springer-Verlag/Wien
Published: 2012
Place of publication: Vienna
Language: eng
Format: [electronic resource] :
Number of pages: 344
ISBN-13: 9783709104231; 9783709104248
Subjects: Materials science; Engineering; Nanotechnology and Microengineering; Photonics Laser Technology; Nanochemistry; Nanotechnology