IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems 1993 : Proceedings 
Subtitle: Fort Laud
Publisher: Ieee
Published: February 1993
Language: eng
Format: Paperback
Number of pages: 382
ISBN-13: 9780780309579
Subjects: Electronics engineering; Technology: General Issues; Microelectronics; Control Engineering; Electrical Engineering (Specific Aspects); Science/Mathematics; Congresses; Actuators; Detectors; Electromechanical devices