Characterization and metrology for ULSI technology
Subtitle: 1998 international conference, Gaithersburg, Maryland, March 1998
By: editors, David G. Seiler ... [et al.].
Contributors: Seiler, David G.; International Conference on Characterization and Metrology for ULSI Technology (1998 : Gaithersburg, Md.)
Series: AIP conference proceedings,; 449; AIP conference proceedings ;; no. 449.
Publisher: American Institute of Physics
Published: 1998
Place of publication: Woodbury, NY
Language: eng
Number of pages: 960
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses.; Integrated circuits -- Ultra large scale integration -- Congresses -- Software.
Genres: Congresses.; Congresses; Software.
Notes: Includes bibliographical references and indexes.
"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Pref.
Accompanying computer disc contains full text from the book.
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