Interfacial Compatibility in Microelectronics
Subtitle: Moving Away from the Trial and Error Approach
By: by Tomi Laurila, Vesa Vuorinen, Mervi Paulasto-Kröckel, Markus Turunen, Toni T. Mattila, Jorma Kivilahti
Contributors: Vuorinen, Vesa; Paulasto-Kröckel, Mervi; Turunen, Markus; Mattila, Toni T.; Kivilahti, Jorma; SpringerLink (Online service)
Series: Microsystems
Publisher: Springer London
Published: 2012
Place of publication: London
Language: eng
Format: [electronic resource] :
ISBN-13: 9781447124702
Subjects: Engineering; Nanotechnology and Microengineering; Thin Films Surfaces and Interfaces; Surfaces (Physics); Optical and Electronic Materials; Optical materials