Generatory izobrazheniĭ v proizvodstve integralʹnykh mikroskhem
By: I.M. Glazkov, I͡A.A. Raĭkhman ; Red. Ė.I. Tochit͡skiĭ.
Contributors: Raĭkhman, I͡A. A.; Tochit͡skiĭ, Ėduard Ivanovich.
Publisher: "Nauka i tekhnika"
Published: 1981
Place of publication: Minsk
Language: rus
Number of pages: 144
Subjects: Masks (Electronics); Photolithography.; Microelectronics.
Notes: Bibliography: p. [142]-143.