Characterization of process-related defects in silicon carbide by electron microscopy
By: Per O. Å. Persson
Contributors: Universitetet i Linköping
Series: Linköping studies in science and technology -- dissertation no. 695; Linköping studies in science and technology -- no. 695
Publisher: Thin Film Physics Division, Dept. of Physics and Measurement Technology, Linköpings universitet
Published: 2001
Place of publication: Linköping
Language: eng
Number of pages: 34
Subjects: Silicon carbide; Electron microscopy
Notes: Thesis (doctoral)--Linköpings universitet, 2001.