Plasma etching
Subtitle: an introduction
By: edited by Dennis M. Manos, Daniel L. Flamm.
Contributors: Manos, Dennis M.; Flamm, Daniel L.
Series: Plasma -- materials interactions
Publisher: Academic Press
Published: 1989
Place of publication: Boston
Language: eng
Number of pages: 476
Subjects: Plasma etching.
Notes: Includes bibliographical references and index.