IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems
Subtitle: an investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996
By: sponsored by the IEEE Robotics and Automation Society.
Contributors: IEEE Robotics and Automation Society.
Publisher: Institute of Electrical and Electronics Engineers
Published: 1996
Place of publication: [New York]
Language: eng
Number of pages: 530
Subjects: Electromechanical devices -- Congresses.; Microelectronics -- Congresses.; Detectors -- Congresses.; Actuators -- Congresses.
Other titles: Micro electro mechanical systems workshop.
Notes: Includes bibliographical references.
"IEEE catalog number 96CH35856."