Solid modeling applied to three-dimensional semiconductor process simulation
By: Marc Westermann.
Edition: 1. Aufl.
Series: Series in microelectronics,; v. 48
Publisher: Hartung-Gorre
Published: 1995
Place of publication: Konstanz
Language: eng
Number of pages: 125
Subjects: Semiconductors -- Design and construction -- Computer simulation.; Integrated circuits -- Very large scale integration -- Computer simulation.
Notes: Abstract also in German.
Includes bibliographical references (p. 119-124)
Thesis (doctoral)--Eidgenössische Technischen Hochschule Zürich, 1995.