A new formula of the energy spectrum of sputtered atoms from a target material bombarded with light ions at normal incidence
By: T. Kenmotsu ... [et al.].
Series: Research report NIFS-DATA series -- 65
Publisher: National Institute for Fusion Science
Published: 2001
Place of publication: Toki, Gifu, Japan
Language: eng
Subjects: Sputtering (Physics); Mathematical models; Spectral energy distribution
Notes: "May 2001"--Cover.

Includes bibliographical references (p. 8).