Micro system technologies 96
By: 5th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996 ; Herbert Reichl, Anton Heuberger, editors.
Contributors: Reichl, H.; Heuberger, A.
Publisher: VDE-Verlag
Published: 1996
Place of publication: Berlin
Language: eng
Number of pages: 868
Subjects: Microelectronics -- Congresses.; Electronic circuit design -- Data processing -- Congresses.; Electronic packaging -- Congresses.; Microelectronics -- Materials -- Congresses.; High technology -- Congresses.
Notes: Includes bibliographical references and index.