Design, Test, and Microfabrication of Mems and Moems
Subtitle: 30 March-1 April 1999, Paris, France (Proceedings of Spie--the International Society for Optical Engineering, V. 3680.)
Contributors: Bernard Bourtois (Editor); Selden B. Crary (Editor); Wolfgang Ehrfeld (Editor); Hiroyuki Fujita (Editor); Jean-Michel Karam (Editor); Karen W. Markus (Editor); Bernard Courtois (Editor)
Edition: 2-Volume Set edition
Publisher: SPIE-International Society for Optical Engine; SPIE
Published: March 1999
Language: eng
Format: Paperback
Number of pages: 1192
ISBN-13: 9780819431547
Subjects: Applied optics; Circuits & components; Technology; Technology & Industrial Arts; Science/Mathematics; Electronics - General; Electronics - Microelectronics; Electronics - Optoelectronics; Congresses; Microelectromechanical systems