Proceedings of the 32nd International Symposium on Electron, Ion, and Photon Beams, 31 May-3 June 1988, The Marriott Harbor Beach, Fort Lauderdale, Florida
By: Special editor ... Evelyn L. Hu.
Contributors: Hu, Evelyn L.
Series: Journal of vacuum science & technology B -- vol. 6, no. 6
Publisher: American Institute of Physics for the American Vacuum Society
Published: 1988
Place of publication: New York
Language: eng
Number of pages: 1989