Konzeption, Entwicklung und Realisierung einer Mikromembranpumpe in LIGA-Technik
By: R. Rapp, W.K. Schomburg, P. Bley
Contributors: Schomburg, W. K.; Bley, P.; Kernforschungszentrum Karlsruhe. Institut für Mikrostrukturtechnik; Universität Karlsruhe
Series: KfK (Series) -- 5251
Publisher: Kernforschungszentrum Karlsruhe
Published: 1993
Place of publication: Karlsruhe [Germany]
Language: ger
Number of pages: 98
Other titles: Conceptual design, development and manufacture of a micromembrane pump by the LIGA technique.
Notes: Summary in English.

Thesis (doctoral)--Universität Fridericiana zu Karlsruhe, 1993.