Optical micro- and nanometrology in manufacturing technology
Subtitle: 29-30 April, 2004, Strasbourg, France
By: Christophe Gorecki, Anand K. Asundi, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Contributors: Gorecki, Christophe.; Asundi, Anand.; Society of Photo-optical Instrumentation Engineers.
Series: Proceedings of SPIE,; v. 5458; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 5458.
Publisher: SPIE
Published: 2004
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 300
Subjects: Optical measurements -- Industrial applications -- Congresses.
Genres: Congresses.