Integrated microsystems
Subtitle: materials, MEMS, photonics, and bio interfaces
By: editor, Krzysztof Iniewski
Publisher: Taylor & Francis
Published: 2012
Place of publication: Boca Raton
Language: eng
ISBN-13: 9781439836200
Subjects: Microelectromechanical systems; Integrated optics
Notes: "A CRC title."

Includes bibliographical references and index.