Tungsten and other refractory metals for VLSI applications II
Subtitle: proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A.
By: sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley ; editor, Eliot K. Broadbent ; associate editors, Robert S. Blewer ... [et al.].
Contributors: Broadbent, Eliot K.; Blewer, R. S.; University of California, Berkeley. Continuing Education in Engineering.; Workshop on Tungsten and Other Refractory Metals for VLSI Applications (3rd : 1986 : Palo Alto, Calif.)
Series: Materials Research Society conference proceedings
Publisher: Materials Research Society
Published: 1987
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 426
Subjects: Integrated circuits -- Very large scale integration -- Materials -- Congresses.; Tungsten -- Congresses.; Heat resistant alloys -- Congresses.
Genres: Congresses.
Notes: "Papers presented at the Third Workshop on Tungsten and Other Refractory Metals for VLSI Applications."--Pref.

Includes bibliographies and indexes.