Digest of papers microprocesses and nanotechnology 2005
Subtitle: 2005 International Microprocesses and Nanotechnology Conference, October 25-28, 2005, conference (October 25 technical seminar, 26-28 conference), Hotel Bellclassic Tokyo, Japan
By: sponsored by the Japan Society of Applied Physics, technical-cosponsored IEEE Electron Device Society ; cooperation American Vacuum Society  ... [et al.].
Publisher: Japan Society of Applied Physics
Published: 2005
Place of publication: Tokyo, Japan
Language: eng
Number of pages: 295