Methods and Materials in Microelectronic Technology
Edition: 1 edition
Series: Ibm Research Symposia Series
Publisher: Springer
Published: November 30, 1984
Language: eng
Format: Hardcover
Number of pages: 376
ISBN-13: 9780306418037
Subjects: Chemistry - Physical & Theoretical; Electronics - General; Science / Chemistry / Physical & Theoretical; Semiconductors; Very-Large-Scale Integration (Vlsi); Technology & Industrial Arts; Congresses; Design and construction; Integrated circuits; Ion beam lithography; Photolithography; Very large scale integration