Integrated circuit metrology, inspection, and process control IV
Subtitle: 5-6 March 1990, San Jose, California
By: William H. Arnold, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering.
Contributors: Arnold, William H.; Society of Photo-optical Instrumentation Engineers.
Series: SPIE proceedings series -- v. 1261.; Proceedings of SPIE--the International Society for Optical Engineering -- v. 1261.
Publisher: SPIE
Published: 1990
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 528
ISBN-13: 9780819403087
Subjects: Integrated circuits -- Inspection -- Congresses; Integrated circuits -- Measurement -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.