Si front-end processing
Subtitle: physics and technology of dopant-defect interactions II : Symposium held April 24-27, 2000, San Francisco, California, USA
By: editors, Aditya Agarwal ... [et al.].
Contributors: Agarwal, Aditya.
Series: Materials Research Society symposium proceedings -- v. 610; Materials Research Society symposia proceedings -- v. 568
Publisher: Materials Research Society
Published: 2001
Place of publication: Warrendale, Pa
Language: eng
Subjects: Semiconductors -- Design and construction -- Congresses; Semiconductor doping -- Congresses; Silicon -- Congresses; Semiconductors -- Defects -- Congresses
Genres: Congresses.
Notes: Includes bibliographical references and index.