Single chamber processing
Subtitle: proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992
By: edited by Yves I. Nissim, Avishay Katz.
Contributors: Nissim, Yves I., 1953-; Katz, Avishay.
Series: European Materials Research Society symposia proceedings ;; v. 37
Publisher: North-Holland
Published: 1993
Place of publication: Amsterdam; New York
Language: eng
Number of pages: 162
Subjects: Semiconductors -- Design and construction -- Congresses.; Vacuum technology -- Congresses.
Notes: Includes bibliographical references.