Process module metrology, control, and clustering, 11-13 September 1991, San Jose, Calif.
By: Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors.
Contributors: Davis, Cecil J.; Herman, Irving P.; Turner, Terry R.
Series: Proceedings / SPIE--The International Society for Optical Engineering -- v. 1594; Proceedings of SPIE--the International Society for Optical Engineering. : -- v. 1594
Publisher: SPIE--International Society for Optical Engineering
Published: 1991
Place of publication: Bellingham, Wash
Language: eng
Number of pages: 419
Subjects: Integrated circuits -- Design and construction -- Congresses; Process control -- Congresses; Real-time control -- Congresses
Notes: "Sponsored by SPIE--The International Society for Optical Engineering".

Includes bibliographical references.