Handbook of thin-film deposition processes and techniques
Subtitle: principles, methods, equipment and applications
By: edited by Krishna Seshan.
Contributors: Seshan, Krishna.
Edition: 2nd ed.
Series: Materials science and process technology series
Publisher: Noyes Publications/William Andrew Pub.
Published: 2002
Place of publication: Norwich, N.Y
Language: eng
Number of pages: 629
Subjects: Thin film devices -- Design and construction -- Handbooks, manuals, etc; Thin films -- Handbooks, manuals, etc; Chemical vapor deposition -- Handbooks, manuals, etc
Genres: Handbooks, manuals, etc.
Other titles: Handbook of thin film deposition processes and techniques
Notes: Includes bibliographical references and index.