Metal Impurities in Silicon- and Germanium-Based Technologies
Subtitle: Origin, Characterization, Control, and Device Impact
Publisher: Springer
Published: Aug 14, 2018
Format: hardcover
Number of pages: 438
ISBN-13: 9783319939247
Notes: Source title: Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (Springer Series in Materials Science)