Semiconductor fabrication
Subtitle: technology and metrology
By: Dinesh C. Gupta, editor.
Contributors: Gupta, D. C.; ASTM Committee F-1 on Electronics.; Semiconductor Equipment and Materials Institute.; Symposium on Semiconductor Processing (5th : 1988 : Santa Clara, Calif.)
Series: STP ;; 990; ASTM special technical publication ;; 990.
Publisher: ASTM
Published: 1989
Place of publication: Philadelphia, PA
Language: eng
Number of pages: 476
Subjects: Semiconductors -- Design and construction -- Congresses.
Notes: Includes bibliographical references and indexes.
Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute.
"ASTM publication code number (PCN) 04-990000-46"--T.p. verso.