Micromachining of elements with optical and other submicrometer dimensional and surface specifications
Subtitle: 2-3 April, 1987, The Hague, The Netherlands
By: M. Weck, chair/editor ; organized by ANRT--Association nationale de la recherche technique, SPIE--the International Society for Optical Engineering ; cooperating sponsors, Comité belge d'optique ... [et al.].
Contributors: Weck, Manfred, 1937-; Association nationale de la recherche technique.; Society of Photo-optical Instrumentation Engineers.; International Symposium on Optical and Optoelectronic Applied Sciences and Engineering (4th : 1987 : Hague, Netherlands)
Series: Proceedings / SPIE ;; v. 803; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 803.
Publisher: SPIE
Published: 1987
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 159
Subjects: Micromachining -- Congresses.; Optical instruments -- Design and construction -- Congresses.
Notes: Includes bibliographical references and index.
Papers delivered at a meeting held within the framework of the Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, Hague, 30 Mar. to 3 Apr., 1987.