Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing
By: edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller.
Contributors: Anthony, Joseph B.; Electrochemical Society. Electronics Division.; Electrochemical Society. Dielectrics and Insulation Division.
Series: Proceedings / Electrochemical Society ;; v. 88-13; Proceedings (Electrochemical Society) ;; v. 88-13.
Publisher: Electrochemical Society
Published: 1988
Place of publication: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
Language: eng
Number of pages: 484
Subjects: Integrated circuits -- Design and construction -- Data processing -- Congresses.
Other titles: Automated integrated circuits manufacturing.
Notes: Includes bibliographies and indexes.
Spine title: Automated integrated circuits manufacturing.
Co-sponsored by the Electronics and Dielectrics and Insulation Divisions.