MOEMS and miniaturized systems II
Subtitle: 22-24 October, 2001, San Francisco, USA
By: M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.].
Contributors: Motamedi, M. Edward.; Göring, Rolf.; Society of Photo-optical Instrumentation Engineers.; Semiconductor Equipment and Materials International.
Series: SPIE proceedings series ;; v. 4561; Proceedings of SPIE--the International Society for Optical Engineering ;; v. 4561.
Publisher: SPIE
Published: 2001
Place of publication: Bellingham, Wash., USA
Language: eng
Number of pages: 350
Subjects: Microelectromechanical systems -- Congresses.; Miniature electronic equipment -- Congresses.; Micromechanics -- Congresses.; Optical scanners -- Congresses.
Genres: Congresses.
Notes: Includes bibliographic references and author index.