Semiconductor manufacturing technology
By: Chue San Yoo.
Series: Advanced series in electrical and computer engineering -- v. 13
Publisher: World Scientific
Published: 2008
Place of publication: Hackensack, N.J; London
Language: eng
Number of pages: 470
ISBN-13: 9789812568236
Subjects: Semiconductors -- Design and construction.; Semiconductor industry.
Notes: Includes bibliographical references and index.