Plasma deposited "diamondlike" carbon on GaAs and InP
By: J.D. Warner ... [et al.] ; prepared for the Thirty-first National Symposium of the American Vacuum Society, Reno, Nevada, December 3-7, 1984.
Contributors: Warner, J. D.; United States. National Aeronautics and Space Administration.
Series: NASA technical memorandum -- 86870.
Publisher: National Aeronautics and Space Administration
Published: 1984
Place of publication: [Washington, D.C.?
Language: eng
Format: Microform
Subjects: Hydrocarbons -- Research -- United States.; Plasma (Ionized gases)
Notes: "N85-10844"--Microfiche header.

Bibliography: p. 8.

Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1984. 1 microfiche ; 11 x 15 cm.