Advances in Resist Technology and Processing XIV (Advances in Resist Technology & Processing XIV)
Contributors: Regine G. Auriol (Editor); Regine G. Tarascon-Auriol (Editor)
Publisher: SPIE-International Society for Optical Engine
Published: July 1997
Language: eng
Format: Hardcover
Number of pages: 1044
ISBN-13: 9780819424631
Subjects: Optics; Science