Proceedings, 3rd International Conference and Poster Exhibition
Subtitle: micro materials : April 17-19, 2000, Berlin, Germany
By: editors, B. Michel ... [et al.] ; organizers, IZM, Fraunhofer Institute for Reliability and Microintegration, Berlin, DVM, Deutscher Verband für Materialforschung und -prüfung e.V., Berlin.
Contributors: Michel, B., Dr.; Deutscher Verband für Materialforschung und -prüfung e.V.; Fraunhofer Institut Zuverlässigkeit und Mikrointegration.
Publisher: ddp Goldenbogen
Published: 2000
Place of publication: Dresden
Language: eng
Number of pages: 1309
Subjects: Microelectronics -- Materials -- Congresses.; Microelectronics -- Materials -- Testing -- Congresses.; Materials -- Research -- Congresses.; Microelectromechanical systems -- Congresses.
Genres: Congresses.
Other titles: Micro materials; 3rd International Conference and Poster Exhibition, Micro Materials; Proceedings, micro materials
Notes: Includes bibliographicals references and index.