ULSI process integration III
Subtitle: proceedings of the international symposium
By: editors, C.L. Claeys ... [et al.] ; sponsoring division, Electronics.
Contributors: Claeys, Cor L.; Electrochemical Society. Electronics Division.; Electrochemical Society. Meeting; International Symposium on ULSI Process Integration (3rd : 2003 : Paris, France)
Series: Proceedings ;; v. 2003-06; Proceedings (Electrochemical Society) ;; v. 2003-06.
Publisher: Electrochemical Society
Published: 2003
Place of publication: Pennington, NJ
Language: eng
Number of pages: 598
Subjects: Integrated circuits -- Ultra large scale integration -- Congresses.
Genres: Congresses.
Other titles: ULSI process integration three
Notes: Includes bibliographical references and indexes.
"Includes papers that were presented at the Third Symposium on ULSI Process Integration held in Paris, France at the 203rd Meeting of the Electrochemical Society, April 28-May 2, 2003"--Pref.