Silicon nitride, silicon dioxide, and emerging dielectrics 9
By: editors R. Ekwal Sah ... [et al.].
Contributors: Sah, R. E.; Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Meeting
Series: ECS transactions -- vol. 6, no. 3
Publisher: Electrochemical Society
Published: 2007
Place of publication: Pennington, N.J
Language: eng
Number of pages: 847
ISBN-13: 9781566775526
Subjects: Thin film devices -- Congresses; Silicon nitride -- Congresses; Silicon dioxide -- Congresses; Silica -- Congresses; Dielectric films -- Congresses; Electric insulators and insulation -- Thin films -- Congresses; Electric insulators and insulation -- Silicon nitride -- Congresses
Genres: Congresses
Notes: "Proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics ... held May 6-11, 2007 in Chicago as a part of the 211th meeting of the Electrochemical Society (ECS)"--P. v.

Sponsoring divisions, Dielectric Science and Technology and Electronics.

Includes bibliographical references and index.