Microlithography
Subtitle: process technology for IC fabrication
By: David J. Elliott.
Publisher: McGraw-Hill
Published: 1986
Place of publication: New York
Language: eng
Number of pages: 378
Subjects: Integrated circuits -- Very large scale integration -- Design and construction.; Microlithography.; Photoresists.
Description: xix, 378 pages : 24 cm
Notes: Includes bibliographies and index.