Infrared Ellipsometry on Semiconductor Layer Structures
Subtitle: Phonons, Plasmons, and Polaritons (Springer Tracts in Modern Physics)
Edition: 1 edition
Publisher: Springer
Published: January 12, 2005
Language: eng
Format: Hardcover
Number of pages: 193
ISBN-13: 9783540232490
Subjects: Optics (light); Science; Material Science; Science/Mathematics; Optics; Physics; Technology / Material Science; Layer structure (Solids); Electronics - General; Ellipsometry
First sentence: Semiconductor device structures consist of stacked layer systems with layers of different alloy compositions, individual dopant incorporation, free-charge-carrier properties, and possibly with hundreds of interfaces.