Tungsten and other refractory metals for VLSI applications
Subtitle: proceedings of the 1985 workshop held October 7, 1985, Albuquerque, New Mexico, U.S.A. and the 1984 workshop held November 12-13, 1984, Albuquerque, New Mexico, U.S.A.
By: editor, R.S. Blewer ; associate editors: Eliot K. Broadbent ... [et al.].
Contributors: Blewer, R. S.; Materials Research Society.; Workshop on Tungsten and Other Refractory Metals for VLSI Applications. (1985 : Albuquerque, N.M.)
Publisher: Materials Research Society
Published: 1986
Place of publication: Pittsburgh, Pa
Language: eng
Number of pages: 571
Subjects: Integrated circuits -- Very large scale integration -- Materials -- Congresses.; Tungsten -- Congresses.; Heat resistant alloys -- Congresses.
Notes: "1985 Workshop on Tungsten and Other Refractory Metals for VLSI Applications"--P. v.

Includes bibliographies and indexes.