Modeling of stresses in sputter-deposited thin films
By: Chinchih  Fang
Published: 1993
Language: eng
Number of pages: 117
Notes: Department: Chemical Engineering.

Thesis (Ph. D.)--Columbia University, 1993.

Includes bibliographical references (leaves 110-114).

Microfilm. Ann Arbor, Mich. : University Microfilms International, 1993. 1 microfilm reel ; 35 mm. 93-33,759