IEEE Micro Electro Mechanical Systems: Proceedings : An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots 
Subtitle: Travemunde, Ger
Contributors: H. C. Petzold (Editor)
Publisher: Institute of Electrical & Electronics Enginee
Published: April 1992
Language: eng
Format: Paperback
Number of pages: 240
ISBN-13: 9780780304970
Subjects: Electronics engineering; Nanotechnology; Electrical Engineering (Specific Aspects); Technology & Industrial Arts; Science/Mathematics; Robotics; Congresses; Actuators; Detectors; Microelectromechanical systems