Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics
Subtitle: Proceedings of Symposium Helt April 23-27, 2000, San Francisco, California U.S.A.
Contributors: G. S. Oehrlein (Editor); K. Maex (Editor); Y. C. Joo (Editor); S. Ogawa (Editor); Jeffrey T. Wetzel (Editor)
Publisher: Materials Research Society
Published: May 2001
Language: eng
Format: Hardcover
Number of pages: 591
ISBN-13: 9781558995208
Subjects: General; Material Science; Technology; Technology & Industrial Arts; Science/Mathematics