Semiconductor device-based sensors for gas, chemical, and biomedical applications
By: edited by Fan Ren & Stephen J. Pearton
Publisher: CRC
Published: 2011
Place of publication: Boca Raton, Fla
Language: eng
Number of pages: 312
ISBN-13: 9781439813874
Subjects: Biosensors; Chemical detectors
Notes: Includes bibliographical references and index.
Table of contents: title: Machine generated contents note: -- 1.1.; title: Introduction  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.2.; title: A1GaN Field-Effect Sensors  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.; title: Fabrication and Characterization of A1GaN/GaN Sensors  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.1.; title: Growth of the Heterostructure  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.2.; title: Sensor Processing  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.3.; title: Electrical Characterization of the A1GaN/GaN Heterostructure  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.4.; title: Technology Impact on the Surface and Sensor Properties  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.5.; title: Biocompatibility of the Sensor -- M. Gebinoga /-- A. Schober /-- I. Cimalla /-- V. Lebedev /-- V. Cimalla /-- V. Polyakov; title: 1.4.; title: Measurement Conditions  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.1.; title: Buffer Solutions  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.2.; title: Characterization Setup  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.3.; title: Noise and Drift  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.4.; title: Cell-Based Sensor-CPFET  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.5.; title: NG 108-15 Nerve Cell Line  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.6.; title: Neurotransmitters-Acetylcholine  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.7.; title: Neuroinhibitors  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.8.; title: Cell Media  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.5.; title: Cell Coupling to an A1GaN/GaN ISFET -- V. Cimalla /-- I. Cimalla /-- V. Lebedev /-- A. Schober /-- V. Polyakov /-- M. Gebinoga; title: 1.5.1.; title: Sensor Preparation  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.5.2.; title: Sensor Response to pH Changes in Cell Media with/without Cells  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.5.3.; title: Ion Sensitivity of AlGaN/GaN ISFETs  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.5.4.; title: Sensitivity of A1GaN/GaN ISFETs to Inhibitors  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.6.; title: Recording of Extracellular Signal  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.6.1.; title: Response on Single Inhibitors in SCZ Buffer  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.6.2.; title: Response on Single Inhibitors in DMEM  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.6.3.; title: Sensor Response on Different Neurotoxins  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.7.; title: Sensor Signal Simulation -- I. Cimalla /-- M. Gebinoga /-- V. Cimalla /-- V. Polyakov /-- V. Lebedev /-- A. Schober; title: 1.7.1.; title: Self-Consistent Simulation of the Heterostructure Using a Site-Binding Model  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.7.2.; title: Estimation of the Ion Flux in Cleft  -- V. Polyakov / -- V. Lebedev / -- A. Schober / -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla -- 1.8.; title: Summary  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober; title: Acknowledgments  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober; title: References  -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 2.1.; title: Introduction  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.2.; title: Gas Sensing  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.2.1.; title: O2 Sensing  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.2.2.; title: CO2 Sensing  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.2.3.; title: CH4 Sensing  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.3.; title: Sensor Functionalization  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.4.; title: pH Measurement -- B.H. Chu /-- C.Y. Chang /-- F. Ren /-- Jenshan Lin /-- S.J. Pearton; title: 2.5.; title: Exhaled Breath Condensate  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.6.; title: Heavy Metal Detection  -- Jenshan Lin / -- F. Ren / -- S.J. Pearton / -- C.Y. Chang / -- B.H. Chu -- 2.7.; title: Biotoxin Sensors  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.7.1.; title: Botulinum  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.; title: Biomedical Applications  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.1.; title: pH Sensing in Breath Condensate  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.2.; title: Glucose Sensing  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.3.; title: Prostate Cancer Detection  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.4.; title: Kidney Injury Molecule Detection  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.5.; title: Breast Cancer  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.6.; title: Lactic Acid  -- B.H. Chu / -- C.Y. Chang / -- S.J. Pearton / -- Jenshan Lin / -- F. Ren -- 2.8.7.; title: Chloride Ion Detection -- B.H. Chu /-- C.Y. Chang /-- F. Ren /-- Jenshan Lin /-- S.J. Pearton; title: 2.8.7.1.; title: HEMT Functionalized with Ag/AgC1  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.7.2.; title: HEMT Functionalized with InN  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.8.; title: Pressure Sensing  -- S.J. Pearton / -- Jenshan Lin / -- C.Y. Chang / -- B.H. Chu / -- F. Ren -- 2.8.9.; title: Traumatic Brain Injury  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.9.; title: Endocrine Disrupter Exposure Level Measurement  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.10.; title: Wireless Sensors  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.11.; title: Summary and Conclusions  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton; title: Acknowledgments  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton; title: References  -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 3.1.; title: Introduction  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.; title: A1GaN/GaN HEMT Schottky-Diode-Based Hydrogen Sensor -- Travis J. Anderson /-- Byung Hwan Chu /-- Fan Ren /-- Stephen J. Pearton /-- Jenshan Lin /-- Yu-Lin Wang; title: 3.2.1.; title: Basic Schottky Diode Hydrogen Sensor  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.1.1.; title: Device Structure and Fabrication  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.1.2.; title: Testing Procedure  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.1.3.; title: Experimental Results  -- Byung Hwan Chu / -- Yu-Lin Wang / -- Travis J. Anderson / -- Jenshan Lin / -- Fan Ren / -- Stephen J. Pearton -- 3.2.2.; title: TiB2 Ohmic Contacts  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.3.; title: Effect of Humidity on Hydrogen Sensors  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.4.; title: Differential Sensor  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.3.; title: GaN Schottky Diode Sensor  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.3.1.; title: N-face and Ga-face Comparison -- Travis J. Anderson /-- Byung Hwan Chu /-- Fan Ren /-- Stephen J. Pearton /-- Jenshan Lin /-- Yu-Lin Wang; title: 3.3.1.1.; title: Device Structure and Fabrication  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.3.1.2.; title: Experimental Results  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.3.2.; title: W/Pt-Contacted GaN Schottky Diodes  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.4.; title: Nanostructured Wide-Bandgap Materials  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.4.1.; title: Hydrogen Sensors Based on ZnO Nanorods  -- Fan Ren / -- Travis J. Anderson / -- Jenshan Lin / -- Yu-Lin Wang / -- Stephen J. Pearton / -- Byung Hwan Chu -- 3.4.1.1.; title: Device Structure and Fabrication  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.4.1.2.; title: Experimental Results  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.4.2.; title: GaN Nanowires -- Travis J. Anderson /-- Byung Hwan Chu /-- Fan Ren /-- Stephen J. Pearton /-- Jenshan Lin /-- Yu-Lin Wang; title: 3.4.3.; title: InN Nanobelts  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.4.4.; title: Single ZnO Nanowire -- Travis J. Anderson /-- Byung Hwan Chu /-- Fan Ren /-- Stephen J. Pearton /-- Jenshan Lin /-- Yu-Lin Wang; title: Note continued: -- 3.5.; title: SiC Schottky Diode Hydrogen Sensor  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.6.; title: Wireless Sensor Network Development  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.6.1.; title: Sensor Module  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.6.1.1.; title: Description of Wireless Transceiver  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.6.1.2.; title: Description of Web Server  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.6.2.; title: Field Test  -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang / -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren -- 3.6.2.1.; title: Initial Field Test Results -- Travis J. Anderson /-- Byung Hwan Chu /-- Fan Ren /-- Stephen J. Pearton /-- Jenshan Lin /-- Yu-Lin Wang; title: 3.6.2.2.; title: Improved Field Test Results  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.7.; title: Summary  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang; title: Acknowledgments  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang; title: References  -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 4.1.; title: Introduction  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.2.; title: Surface Properties of InN  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.2.1.; title: Electronic Properties  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.2.2.; title: Chemical Sensing Properties -- Yuh-Hwa Chang /-- Yen-Sheng Lu /-- J. Andrew Yeh /-- Yu-Liang Hong /-- Hong-Mao Lee /-- Shangjr Gwo; title: 4.3.; title: InN-Based Chemical Sensors Development  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.3.1.; title: Ion-Selective Electrode (ISE)  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.3.1.1.; title: Device Fabrication  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.3.1.2.; title: Testing Procedure and Results  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.3.2.; title: Ion-Sensitive Field-Effect Transistor (ISFET)  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.3.2.1.; title: Device Fabrication  -- Hong-Mao Lee / -- Shangjr Gwo / -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong -- 4.3.2.2.; title: Testing Procedure and Results  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.4.; title: Summary -- Yuh-Hwa Chang /-- Yen-Sheng Lu /-- J. Andrew Yeh /-- Yu-Liang Hong /-- Hong-Mao Lee /-- Shangjr Gwo; title: Acknowledgments  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo; title: References  -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 5.1.; title: Introduction  -- Y.W. Heo / -- S.J. Pearton / -- D.P. Norton / -- F. Ren -- 5.2.; title: Basic Properties of ZnO  -- F. Ren / -- D.P. Norton / -- Y.W. Heo / -- S.J. Pearton -- 5.3.; title: Dopants in ZnO  -- F. Ren / -- D.P. Norton / -- S.J. Pearton / -- Y.W. Heo -- 5.4.; title: Ion Implantation  -- S.J. Pearton / -- F. Ren / -- D.P. Norton / -- Y.W. Heo -- 5.5.; title: Etching of ZnO  -- D.P. Norton / -- F. Ren / -- S.J. Pearton / -- Y.W. Heo -- 5.6.; title: Ohmic Contacts  -- S.J. Pearton / -- F. Ren / -- D.P. Norton / -- Y.W. Heo -- 5.7.; title: Schottky Contact  -- D.P. Norton / -- F. Ren / -- S.J. Pearton / -- Y.W. Heo -- 5.8.; title: Properties of Hydrogen in ZnO  -- S.J. Pearton / -- F. Ren / -- D.P. Norton / -- Y.W. Heo -- 5.8.1.; title: Proton Implantation  -- D.P. Norton / -- F. Ren / -- S.J. Pearton / -- Y.W. Heo -- 5.8.2.; title: Hydrogen Plasma Exposure  -- S.J. Pearton / -- D.P. Norton / -- F. Ren / -- Y.W. Heo -- 5.9.; title: Ferromagnetism in ZnO -- S.J. Pearton /-- Y.W. Heo /-- D.P. Norton /-- F. Ren; title: 5.9.1.; title: Ferromagnetism in Semiconductors  -- Y.W. Heo / -- S.J. Pearton / -- D.P. Norton / -- F. Ren -- 5.9.2.; title: Spin Polarization in ZnO  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.9.3.; title: Nanorods  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.9.4.; title: Properties of Mn- and Co-Implanted Bulk ZnO  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.10.; title: Gas Sensing Using ZnO Thin Film  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.10.1.; title: Ethylene Sensing  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.10.2.; title: CO Sensing  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.11.; title: Transport in ZnO Nanowires  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.12.; title: ZnO Nanowire Schottky Diodes  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.13.; title: ZnO Nanowire MOSFET  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.14.; title: UV Nanowire Photodetectors  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.15.; title: Gas and Chemical Sensing  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.15.1.; title: Hydrogen Sensing with ZnO nanowires -- Y.W. Heo /-- F. Ren /-- D.P. Norton /-- S.J. Pearton; title: 5.15.2.; title: Ozone Sensing  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.15.3.; title: pH Response  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.; title: Biological Sensing  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.1.; title: Surface Modification of ZnO  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.2.; title: Using Protein Immobilization for Ultrasensitive Detection of Proteins and Single Viruses  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.3.; title: Immobilization of Nucleic Acids on Nanowires for Biosensors for Genes and mRNA  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.4.; title: Direct Immobilization of Aptamers for Ultrasensitive Detection of Proteins and Drug Molecules  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.5.; title: ZnO Nanowires with Various Doping and Surface Chemistry Terminations  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.6.; title: A 3D Self-Consistent Simulator for a Biological Sensor  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.17.; title: Summary  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton; title: Acknowledgments  -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton; title: References -- Y.W. Heo /-- F. Ren /-- D.P. Norton /-- S.J. Pearton; title: 6.1.; title: Introduction  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.; title: Models of BioFET Device Operation  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.1.; title: FET Operation  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.1.1.; title: Charge in a MOSFET  -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski / -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen -- 6.2.1.2.; title: Charge Sheet Models for MOSFETs  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.1.3.; title: Capacitance  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.1.4.; title: Operation of the BioFET  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.1.5.; title: Monitoring the Threshold Voltage -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski; title: 6.2.2.; title: The Oxide Surface and the Electrolyte  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.2.1.; title: The Electrolyte and Double Layer  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.2.2.; title: The Oxide Surface in an Electrolyte  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.2.3.; title: Other Insulators  -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski / -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen -- 6.2.3.; title: Molecules on the Oxide Surface  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.3.1.; title: Linker Layer  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- G. Lopinski / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- M.J. Deen -- 6.2.3.2.; title: Charged Membrane-Especially Oligonucleotides -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski; title: 6.2.3.3.; title: Electrostatics of Brushes and the Donnan Potential  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.4.; title: Membrane Model and Poisson-Boltzmann Analysis  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.4.1.; title: Donnan Potential  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.4.2.; title: Change with Hybridization  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.; title: Small-Signal Analysis and Sensitivities -- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski /-- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen; title: Note continued: -- 6.2.5.1.; title: Effects of pH and Hydroxyl Density  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.2.; title: Ion Sensitivity versus Charge Sensitivity  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.3.; title: Complexation  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.4.; title: Impermeable Linking Layer  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.5.; title: Permeable Linking Layer  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.6.; title: Transient Effects due to Mixing -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski; title: 6.2.5.7.; title: Size of the Signal  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.6.; title: Large-Signal Models of the BioFET  -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski / -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen -- 6.2.7.; title: Limitations of the 1-D Model  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.7.1.; title: Manning Condensation  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.7.2.; title: Other Mechanisms for the Signal in a BioFET  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.7.3.; title: The Mystery of High Signals  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.8.; title: Comparison with Measurements -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski; title: 6.2.9.; title: BioFET Simulations in 3-D  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.; title: Impedance Measurements on BioFETs  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.1.; title: Impedance of ISFETs, REFETs, and the First Biomembranes  -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski / -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen -- 6.3.1.1.; title: ISFETs  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.1.2.; title: REFETs  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.1.3.; title: Measurement of Differential Output with ISFFET/REFET Pairs  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.1.4.; title: First Impedance Studies of Protein Membranes -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski; title: 6.3.1.5.; title: Series Resistance of the Electrolyte  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.2.; title: Membrane Sensors  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.2.1.; title: Ion-Selective Surfaces  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.2.2.; title: Antigen[-]Antibody Conjugation  -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski / -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen -- 6.3.2.3.; title: Electrochemical (Faradaic) Impedance Spectroscopy  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.2.4.; title: EnFETs  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.3.; title: Detection of DNA Hybridization -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski; title: 6.3.3.1.; title: SNP Detection in Prehybridized DNA  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.3.2.; title: SNP Detection for In Situ Hybridization  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- G. Lopinski / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- M.J. Deen -- 6.4.; title: MOS Nanowire BioFETs  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.1.; title: Bioaffinity Sensing with SiNWs  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.1.1.; title: Probe Target Binding and the Langmuir Model  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.1.2.; title: History  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.2.; title: SiNWs Grown by the VLS Method -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski; title: 6.4.3.; title: Planar MOS Nanowires-No Gating  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.4.; title: Back-Gated Planar Sensors  -- M.W. Shinwari / -- M.J. Deen / -- D. Landheer / -- N.G. Tarr / -- W.H. Jiang / -- G. Lopinski / -- G. Dubey / -- W.R. McKinnon -- 6.4.4.1.; title: Attomolar Detection of Proteins  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.4.2.; title: Demonstrations of Back-Gated SiNW Bioaffinity Sensor Performance  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.4.3.; title: Nanoribbons  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.5.; title: Eliminating the Oxide Layer  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.6.; title: Alternate Nanowire Fabrication Methods -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski; title: 6.4.7.; title: Nanowire Electrical Models  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.7.1.; title: Cylindrical Membranes  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.7.2.; title: Determination of Nanowire Capacitance and Surface Potential  -- M.W. Shinwari / -- M.J. Deen / -- D. Landheer / -- N.G. Tarr / -- W.H. Jiang / -- G. Lopinski / -- G. Dubey / -- W.R. McKinnon -- 6.4.7.3.; title: 3-D Models  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.8.; title: Slow Response due to Diffusion  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.9.; title: Conclusions  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski; title: References  -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- G. Lopinski / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- M.J. Deen -- 7.1.; title: MEMS Introduction  -- Z.M. Qi / -- H. Xie -- 7.1.1.; title: MEMS Overview -- Z.M. Qi /-- H. Xie; title: 7.1.2.; title: MEMS Fabrication  -- Z.M. Qi / -- H. Xie -- 7.1.3.; title: Chapter Outline  -- Z.M. Qi / -- H. Xie -- 7.2.; title: Optical Sensing Principles  -- Z.M. Qi / -- H. Xie -- 7.3.; title: MEMS-Based Fourier Transform Spectroscopy for Chemical Sensing  -- Z.M. Qi / -- H. Xie -- 7.3.1.; title: Quantized States in Molecules  -- Z.M. Qi / -- H. Xie -- 7.3.2.; title: Optical Spectroscopy  -- Z.M. Qi / -- H. Xie -- 7.3.3.; title: Fourier Transform Spectroscopy  -- Z.M. Qi / -- H. Xie -- 7.3.4.; title: Fourier Transform Infrared Spectroscopy  -- Z.M. Qi / -- H. Xie -- 7.3.5.; title: MEMS FTIR  -- Z.M. Qi / -- H. Xie -- 7.3.5.1.; title: MEMS Actuators  -- Z.M. Qi / -- H. Xie -- 7.3.5.2.; title: Miniature FTIR Based on Electrostatic Micromirrors  -- Z.M. Qi / -- H. Xie -- 7.3.5.3.; title: Miniature FTIR Based on Electromagnetic Micromirrors  -- Z.M. Qi / -- H. Xie -- 7.3.5.4.; title: Miniature FTIR Based on Electrothermal Micromirrors  -- Z.M. Qi / -- H. Xie -- 7.3.5.5.; title: A Mirror-Tilt-Insensitive (MTI) Fourier Transform Spectrometer  -- Z.M. Qi / -- H. Xie -- 7.3.6.; title: Summary  -- Z.M. Qi / -- H. Xie -- 7.4.; title: Interferometric MEMS Chemical and Biochemical Sensors  -- Z.M. Qi / -- H. Xie -- 7.4.1.; title: Introduction -- Z.M. Qi /-- H. Xie; title: 7.4.2.; title: Integrated Optical Mach-Zehnder Interferometer (MZI) Sensors  -- Z.M. Qi / -- H. Xie -- 7.4.3.; title: Composite Waveguide-Based Polarimetric Interferometer (PI) Sensors  -- Z.M. Qi / -- H. Xie -- 7.4.4.; title: Integrated Optical Young Interferometer (YI) Sensors  -- Z.M. Qi / -- H. Xie -- 7.4.4.1.; title: Sensing Principle of Integrated Optical YI  -- Z.M. Qi / -- H. Xie -- 7.4.4.2.; title: Slab-Type YI Sensors  -- Z.M. Qi / -- H. Xie -- 7.4.4.3.; title: Stripe-Type YI Sensors  -- Z.M. Qi / -- H. Xie -- 7.4.5.; title: Integrated Optical Fabry-Perot Interferometer (FPI) Sensor  -- Z.M. Qi / -- H. Xie -- 7.4.6.; title: Conclusion  -- Z.M. Qi / -- H. Xie; title: References -- Z.M. Qi /-- H. Xie.