Investigation of silicon surface passivation by silicon nitride film deposition
Subtitle: annual report, 9/1/83 - 8/31/84, JPL contract no. 956614
By: by Larry C. Olsen.
Contributors: United States. National Aeronautics and Space Administration.
Series: NASA contractor report -- 175693.; NASA contractor report -- NASA CR-175693.
Publisher: Joint Center for Graduate Study, University of Washington; [Washington, D.C.?; National Aeronautics and Space Administration; National Technical Information Service, distributor
Published: 1984
Place of publication: Richland, Wash; Springfield, Va
Language: eng
Format: Microform
Subjects: Silicon nitride.
Notes: Distributed to depository libraries in microfiche.

Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1984] 1 microfiche.