Stress Induced Phenomena in Metallization
Subtitle: Fourth International Workshop (Aip Conference Proceedings)
Contributors: International Workshop on Stress-Induced Phenomena in Metallization 19 (Corporate Author); Hidekazu Okabayashi (Editor); Shoso Shingubara (Editor); P. S. Ho (Editor)
Publisher: American Institute of Physics
Published: October 1998
Language: eng
Format: Hardcover
Number of pages: 480
ISBN-13: 9781563966828
Subjects: Metals technology / metallurgy; Thin film devices; Physics; Electronics - Circuits - General; Microelectronics; Semiconductors; Science/Mathematics; Science; Technology & Industrial Arts; Integrated circuits; Electronics - Microelectronics; Engineering - General; Congresses; Defects; Electrodiffusion