Semiconductor measurement technology
Subtitle: evolution of silicon materials characterization : lessons learned for improved manufacturing
By: W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology"
Contributors: National Institute of Standards and Technology (U.S.). Semiconductor Electronics Division.
Series: NIST special publication -- 400-92.
Publisher: U.S. Dept. of Commerce, National Institute of Standards and Technology; For sale by the Supt. of Docs., U.S. G.P.O.
Published: 1993
Place of publication: Gaithersburg, MD; Washington, D.C
Language: eng
Format: Microform
Number of pages: 211
Subjects: Semiconductors.; Semiconductor wafers.; Integrated circuits -- Wafer-scale integration -- United States.
Other titles: Evolution of silicon materials characteristics, lessons learned for improved manufacturing.
Notes: Distributed to depository libraries in microfiche.

Shipping list no.: 94-0057-P.

Paper version no longer for sale by the Supt. of Docs.

"July 1993."

Includes bibliographical references (p. 23-25).

Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1994] 1 microfiche : negative.