六甲基环三硅氮烷

六甲基环三硅氮烷，简称HMCTS或HMCTSZN，是一种有机化合物，化学式  或。这个分子里面有由三个硅原子和三个氮原子交替排列而成的六元环，每个硅原子都连接两个甲基，氮原子则连接氢原子。它也可以看作是假想化合物环三硅氮烷 的衍生物，或是假想化合物二甲基硅氮烷 的三聚体。

六甲基环三硅氮烷在室温下是无色清澈液体。

由于其在半导体工业中的应用，六甲基环三硅氮烷作为氮化硅和碳氮化硅沉积的前体已被广泛研究，并作为光刻胶中的添加剂。也有人建议将其作为二氧化硅的添加剂，用于色谱法。

结构
六甲基环三硅氮烷的环几乎是一个平面。这个分子内的键长为 Si-N = 1.728 Å、Si-C = 1.871 Å、C-H = 1.124 Å。它的键角则为 N-Si-N ≈ 108°、Si-N-Si ≈ 127°、 C-Si-C ≈ 109°、H-C-H ≈ 112°。

制备
六甲基环三硅氮烷是在1948年由 Brewer 和 Haber 通过二甲基二氯硅烷 和液氨 反应，然后用苯萃取沉淀首次合成的。反应会产生多种产物，主要是三聚体和四聚体八甲基环四硅氮烷。三聚体可以通过分馏与其他产物分离。

通过在合适的催化剂存在下与氢气反应转化四聚体，可以提高产率。

参见
 三聚硫代丙酮

参考资料
Stuart D. Brewer and Charles P. Haber (1948): "Alkylsilazanes and Some Related Compounds". Journal of the American Chemical Society, volume 70, issue 11, pages 3888-3891. 

FAR Chemical (2020): "Product 654201: Hexamethylcyclotrisilazane ".  Catalog page. Accessed on 2020-01-04.

Beilstein 4 III 1887.

Hiromi Ohsaki, Yoshihumi Takeda, Toshinobu Ishihara, and Akira Hayashida (1991) "Method for preparing hexamethyl cyclotrisilazane ". United States Patent 5075474A

Barry C. Arkles and Burrell N. Hamon (1985): "Method of preparing hexamethylcyclotrisilazane " United States Patent 4577039A.

Dennis W. Hess and Todd A. Brooks (1987): "Plasma enhanced chemical vapor deposition of thin films of silicon nitride from cyclic organosilicon nitrogen ". United States Patent 4863755A.

T. A. Brooks and D. W. Hess (1988): "Deposition chemistry and structure of plasma‐deposited silicon nitride films from 1,1,3,3,5,5‐hexamethylcyclotrisilazane". Journal of Applied Physics, volume 64, page 841. 

T. A. Brooks and D. W. Hess (1987): "Plasma-enhanced chemical vapor deposition of silicon nitride from 1,1,3,3,5,5-hexamethylcyclotrisilazane and ammonia". Thin Solid Films, volume 153, issues 1–3, pages 521-529. 

NCBI, U.S. National Institutes of Health (2020): "2,2,4,4,6,6-Hexamethylcyclotrisilazane".  Compound data sheet, PubChem online database. Accessed on 2020-01-04.

J. Nawrocki (1985): "Modification of silica with mixtures of hexamethylcyclotrisilazane and hexamethyldisilazane". ''Chromatographia´ volume 20, pages 308–312. 

N. I. Fainer, A. N. Golubenko, Yu. M. Rumyantsev, and E. A. Maximovskii (2009): "Use of hexamethylcyclotrisilazane for preparation of transparent films of complex compositions". Glass Physics and Chemistry, volume 35, issue 3, pages 274–283. 

Béla Rozsondai, István Hargittai, Aleksei V. Golubinskii, Lev V.Vilkov, and Vladimir S.Mastryukov (1975): "Electron diffraction study on the molecular structure of hexamethylcyclotrisilazane, ". Journal of Molecular Structure, volume 28, issue 2, pages 339-348. 

D. M. Adams  and  W. S. Fernando (1973): "The vibrational spectra of hexamethylcyclotrisiloxane and hexamethylcyclotrisilazane". Journal of the Chemical Society, Dalton Transactions, issue 4, pages 410-413.

Category:含氮杂环
Category:含硅杂环
Category:1940年代发现的物质