Query: Piezoelectric materials for acoustic wave  applications

Candidate papers:

abstract: Piezoelectric materials for acoustic wave applications have changed markedly over the past 20 years in terms of both the types of materials available and the quality of individual samples. The total family of acoustic wave materials now includes piezoelectric glass ceramics having crystallographic and polar orientation and crystals having symmetry classes mm2, 32, 3m, 4mm, 6mm, and 4/spl macr/3m. The symmetry classes 6mm and 4/spl macr/3m also occur frequently in piezoelectric semiconductor materials that are now available in both bulk and thin film configurations. In this paper, we bring together and extract the various reported values of the material constants mainly of interest for surface acoustic wave (SAW) device applications. We identify for the user community those sets of constants from which SAW design calculations can reliably be made, and discuss the constants and their reliability for langasite, lithium niobate/lithium tantalate, and dilithium tetraborate. The relevant material constants include: mass density /spl rho/ elastic stiffness c/sub ij/ piezoelectric stress e/sub ij/ dielectric permittivity /spl epsiv//sub ii/ and the thermal expansion coefficients /spl alpha//sub ii/ Except for the semiconductor materials, only data published after 1978 are included, since the reference literature (Landolt Bornstein) amply covers those years prior to 1978.<ETX>
author_names: John G Gualtieri

John A Kosinski

Arthur D Ballato
title: Piezoelectric materials for acoustic wave applications
venue: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
year: 1994

abstract: In this paper, we analyze acoustic wave propagation in anisotropic fluids and solids. By formulating the acoustic system as an evolution equation over a Hilbert space, we obtain global in time solu.
author_names: E Stachura
title: Acoustic wave propagation in anisotropic media with applications to piezoelectric materials
year: 2020

abstract: This paper presents the scalability of piezoelectricity in silicon doped hafnium oxide (Si: HfO2) Different thicknesses from 10 nm to 50 nm were deposited via atomic layer deposition (ALD) The piezoelectric coefficient d33,f was measured trough double beam laser interferometry (DBLI) and values between 20 pm/V and 10 pm/V were obtained. During the cycling procedure to form the ferroelectric state, a decreasing piezoelectric coefficient d33,fcan be observed depending on the total number of cycles. Thus a specific piezoelectric condition can be set appropriating for the desired application.
author_names: Sven Kirbach

Kati Kuhnel

Wenke Weinreich
title: Scalable Piezoelectric Effect in Silicon Doped Hafnium Oxide for Acoustic Wave Applications
venue: 2019 Thirteenth International Congress on Artificial Materials for Novel Wave Phenomena (Metamaterials)
year: 2019

abstract: Abstract Surface acoustic waves (SAW) or Rayleigh waves, bound to the surfaces of piezoelectric materials are becoming rapidly significant in electronic device applications, particularly as VHF UHF frequency filters and versatile time domain processors. The majority of available devices utilize either signle crystalline quartz or lithium niobate as the piezoelectric medium. This paper describes briefly the growth and critical evaluation of SAW impedance and propagation properties for certain new single crystal piezoelectric materials. Crystals discussed are Czochralski grown bismuth germanium oxide, films of zinc oxide and aluminum nitride both epitaxially grown on single crystal sapphire, and flux grown beryllium oxide. It is concluded that bismuth germanium oxide may prove an important cost effective alternative to both quartz and lithium niobate, and that either zinc oxide or aluminum nitride is destined to prove invaluable in the realization of monolithic circuits such as programmable tapped delay lines, in which SAW will be interfaced with metal oxide semiconductor (large scale integrated) technology, and active SAW elements employing functional integration.
author_names: J H Collins

P J Hagon

George R Pulliam
title: Evaluation of new single crystal piezoelectric materials for surface acoustic wave applications
year: 1970

abstract: In this review paper, nine different types of high temperature piezoelectric crystals and their sensor applications are overviewed. The important materials' properties of these piezoelectric crystals including dielectric constant, elastic coefficients, piezoelectric coefficients, electromechanical coupling coefficients, and mechanical quality factor are discussed in detail. The determination methods of these physical properties are also presented. Moreover, the growth methods, structures, and properties of these piezoelectric crystals are summarized and compared. Of particular interest are langasite and oxyborate crystals, which exhibit no phase transitions prior to their melting points ~1500 degC and possess high electrical resistivity, piezoelectric coefficients, and mechanical quality factor at ultrahigh temperature ~1000 degC) Finally, some research results on surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors developed using this high temperature piezoelectric crystals are discussed.
author_names: Hongfei Zu

Huiyan Wu

Qing-Ming Wang
title: High Temperature Piezoelectric Crystals for Acoustic Wave Sensor Applications
venue: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
year: 2016

author_names: J H Collins

P J Hagon

George R Pulliam
title: Evaluation of New Single Crystal Piezoelectric Materials for Surface Acoustic Wave Applications
year: 1970

abstract: This paper is aimed at making it clear why we device engineers are keen to have high quality and highly piezoelectric materials for sophisticated radio frequency (RF) surface and bulk acoustic wave (SAW/BAW) devices to be used in future communication systems. First, RF SAW/BAW resonators and their filter application are introduced, and it is shown how the resonator properties directly reflect to achievable filter performances. Discussions are also provided on how the acoustic and piezoelectric properties of base materials influence the total device performances. An emphasis is given to the fact that use of high quality and highly piezoelectric materials is essential for the applications. It is also demonstrated how high performance devices are achievable by the use of high coupling materials such as a single crystalline LiNbO3 substrate with specific crystallographic orientation with extremely large electromechanical coupling. Further discussions are given on new applications of extremely wideband SAW/BAW resonators employing ferroelectric materials with extremely large electromechanical coupling.
author_names: Ken-ya Hashimoto
title: Demands of highly piezoelectric materials for radio frequency acoustic wave devices
year: 2011

abstract: Gallium nitride (GaN) is a compound semiconductor which has advantages to generate new functionalities and applications due to its piezoelectric, pyroelectric, and piezo resistive properties. Recently, surface acoustic wave (SAW) based acoustic tweezers were developed as an efficient and versatile tool to manipulate nano and microparticles aiming for patterning, separating, and mixing biological and chemical components. Conventional piezoelectric materials to fabricate SAW devices such as lithium niobate suffer from its low thermal conductivity and incapability of fabricating multiphysical and integrated devices. This article piloted the development of a GaN based acoustic tweezer (GaNAT) and its application in manipulating microparticles and biological cells. For the first time, the GaN SAW device was integrated with a microfluidic channel to form an acoustofluidic chip for biological applications. The GaNAT demonstrated its ability to work on high power (up to 10 W) with minimal cooling requirement while maintaining the device temperature below 32degC. Acoustofluidic modeling was successfully applied to numerically study and predict acoustic pressure field and particle trajectories within the GaNAT, which agree well with the experimental results on patterning polystyrene microspheres and two types of biological cells including fibroblast and renal tumor cells. The GaNAT allowed both cell types to maintain high viabilities of 84.5% and 92.1% respectively.
author_names: Chao Sun

Fangda Wu

David J Wallis

Ming Hong Shen

Fan Yuan

Jian Yang

Jianzhong Wu

Zhihua Xie

Dongfang Liang

Hanlin Wang

Rowan Tickle

Roman Mikhaylov

Aled Clayton

You Zhou

Zhen-Lin Wu

Yongqing Fu

Wenpeng Xun

Xin-rong Yang
title: Gallium Nitride: A Versatile Compound Semiconductor as Novel Piezoelectric Film for Acoustic Tweezer in Manipulation of Cancer Cells
venue: IEEE Transactions on Electron Devices
year: 2020

author_names: G Shapiro

Kamal El-Assal

Michael Sayer

C K Jen
title: Piezoelectric Ceramic Materials For Surface Acoustic Wave Applications
venue: Sixth IEEE International Symposium on Applications of Ferroelectrics
year: 1986

abstract: Surface acoustic wave (SAW) sensors offer overwhelming advantages over other competitive sensing technologies due to its small size, cost effectiveness, fast response time, passive and wireless capabilities. Development of SAW sensors allows investigation of their potential not only for measuring less time dependent parameters, such as pressure and temperature, but also dynamic parameters like mechanical strains. The concept behind this work is to develop a passive flexible SAW sensor with optimized materials selection that can be used in harsh environments to measure mechanical strains occurring in aerospace applications. A flat 0 3 composite thin substrate is fabricated using a hot press, an interdigital transducer (IDT) finger deposition is made through additive manufacturing. The sensor substrate comprises polyvinylidene fluoride as a polymer matrix, lead zirconate titanate powders as well as carbon nanotubes as nanoparticle fillers, exhibiting favorable flexibility and piezoelectric properties. The electromechanical property is enhanced using a non contact corona poling technique with high electric field. IDT fingers are printed using direct printing additive manufacturing technique of conductive paste. Design parameters of SAW IDTs are optimized using a second order transmission matrix approach. Rayleigh waves, generated on the fabricated substrate by an RF excitation signal, travel through the substrate and can provide useful information for desired parameters. In this work the sensing mechanism is based on the radio frequency scattering parameters response of the device. Results show a correlation between the amplitude and phase frequency response of the scattering parameters, and the mechanical strain. Experimental study on SAW substrate fabrication and analysis of sensed results with phase shift in wave speed due to strains are discussed.
author_names: Rishikesh Srinivasaraghavan Govindarajan

Eduardo A Rojas-Nastrucci

Daewon Kim
title: Strain sensing using flexible surface acoustic wave sensor
venue: Smart Structures and Materials Nondestructive Evaluation and Health Monitoring
year: 2020