Query: Fluid bubble removal apparatus in semiconductor treatment system and bubble removal method thereof

Candidate papers:

abstract: The invention belongs to the field of fluid treatment in a semiconductor treatment system and particularly relates to a fluid bubble removal apparatus in the semiconductor treatment system and a bubble removal method thereof. The fluid bubble removal apparatus includes a liquid container, a liquid pump, a three way joint, a first controller, a second controller, a first on off valve, a second on off valve, a nozzle, a waste liquid recycle barrel and a liquid pump controller. The three way joint is communicated with the liquid pump and the first on off valve and the second on off valve through pipelines. The liquid container is communicated with the liquid pump through pipelines and is used for providing liquid to the bubble removal apparatus. The waste liquid recycle barrel is communicated with the first on off valve through the pipelines and recycles liquid flown out from the first on off valve. The nozzle is communicated with the second on off valve through the pipelines so that liquid flown out from the second on off valve enters the nozzle. In the method, the switches of the on off valves and operation of the liquid pump are controlled by the controllers to remove the bubbles in the fluid. The invention can achieve bubble removal of fluid in micro flow rate, ensures stable flow rate of the fluid at an outlet, is simple in added apparatuses and is convenient to control.
title: Fluid bubble removal apparatus in semiconductor treatment system and bubble removal method thereof
year: 2014

abstract: (52) U.S. Cl. 205/687; 204/227 Correspondence Address: PAUL AND PAUL (57) ABSTRACT 2000 MARKET STREET, SUITE 2900 PHILADELPHIA, PA 19103 (US) An apparatus for the electrolytic treatment of the product L. using a treatment agent is used to make the treatment of a plate shaped product more uniform. This apparatus includes: (73) Assignee: ATOTECH DEUTSCHLAND devices for retaining 40, 42 the product L in the apparatus, GMBH, Berlin (DE) one or a plurality of flow devices 10, which each include at least one nozzle 15 and are disposed situated opposite the (21) Appl. No. 12/602,703 product L, one or a plurality of counter electrodes 30, which are inert relative to the treatment agent and are disposed (22) PCT Filed: Jun. 3, 2008 parallel to at least one treatment Surface, means for generating a relative movement 44 between the product L, on the side, (86) PCT No. PCT/EP2008/OO4616 and the flow devices 10 and/or the counter electrodes 30, on the other side, in at least one direction parallel to a treatment S371 (c)(1) surface. The product L can be immersed into the treatment (2) (4) Date: Jan. 7, 2010 agent during the treatment.
author_names: Xxxxxxxxxxxxxxx Xxxxxxxxxxxxxx

asaka Yasa Yasa Yas
title: APPARATUS AND METHOD FOR THE ELECTROLYTIC TREATMENT OFA PLATE SHAPED PRODUCT FIELD OF THE INVENTION
year: 2017

abstract: Heat pump technologies are perfectly suited to become the hub of a European decarbonised energy system. They integrate renewable and waste heat in a highly efficient manner thus reducing CO2 emissions from heating and cooling, potentially close to zero. The technology is one of the options in the quest to limit global warming to below 1,5degC by 2050 unfortunately, progress is not fast enough, even though both technology recognition with policy makers and annual sales have increased. At the end of 2018 11.8 million residential and light commercial heat pumps were installed in Europe, contributing 128 TWh of renewable energy to Europe's energy system and saving 33 Mt of CO2. At the same time, the stock of heat pumps has reduced import dependency and secured local jobs. However it is mainly residential heat pumps that have received political recognition while a significant lack of understanding exist for the contribution potential of large industrial heat pumps. A simple truth prevails: Heat pumps, large or not, cannot contribute to any target if their potential is not recognized. Clearly, our sector has more work to do make the benefits of the technology known. Heat pumps contribute to the renewable energy target (32% the energy efficiency target (32.5% and the CO2 emission reduction target (40% Since reaching the targets by 2030 is more than uncertain, available solutions should be very welcome to the responsible policy makers. Not only must the technology be recognized, but its deployment must be accelerated, eg. by creating a market framework that allows for a successful competition of heat pumps with the fossil incumbents. In order to achieve that, three major steps have to be taken 1. the external cost of polluting the environment with CO2 must be internalized via a CO2 price, 2. the burden put on electricity via taxes and levies has to be review in order to reduce the electricity price for all sectors, 3. the support of fossil technologies via subsides must be stopped immediately. Supporting action can be an improved energy statistics that distinguishes between energy sources used per industrial sector and temperature level. Additional positive effects are expected from sector integration, which would facilitate a larger share of renewable electricity generation and a more stable electric grid. In conclusion, heat pumping technologies are ready to contribute to the greatest challenge of our times a decarbonised energy system. It is now the responsibility of policy makers to shape a market framework that turns potential into reality fast. 1.1. How can high temperature heat pumps contribute to reach Europe's climate targets, Thomas Nowak, European Heat Pump Association 2 Conference on High Temperature Heat Pumps, 2019 6 of 268 How can high temperature heat pumps contribute to reach Europe's climate targets? Thomas Nowak Secretary General European Heat Pump Association, Brussels, Belgium
author_names: Benjamin Zuhlsdorf

Michael Bantle

Brian Elmegaard
title: Book of presentations of the 2nd Symposium on High Temperature Heat Pumps
year: 2019

abstract: xxii INTRODUCTION 1 2.1. Background 1 2.2. Objectives 2 1.2.1. Understanding fouling and its effect on MD 3 1.2.2. Altering module orientation and channel geometry to improve the MD process .4 1.2.3. MD hybridized with heat pump for water treatment and space cooling .5 1.2.4. Designing and synthesizing nanomaterials with multifunctional properties for coating on hydrophobic PVDF membranes 6 1.2.4.1. LC NPs 7 1.2.4.2. MXene 8 1.2.4.3. Coating of synthesized materials on membrane 9 1.2.5. Localized heating in MD 12 1.2.6. Photothermal materials on membrane and metallic spacers 14 References 15 UNDERSTANDING FOULING AND ITS EFFECT ON MD 20 2.
author_names: Yong Zen Tan
title: Material and flow engineering approach in improving the membrane distillation process
year: 2019

abstract: Greenhouse gas emissions from anthropogenic sources are believed to be the main cause of global warming and climate change. Furthermore, fossil fuels are forecasted to remain the dominant source of energy in the near future. Therefore, capture and sequestration of greenhouse gases and in particular carbon dioxide is likely to be a major pathway toward environmental protection and energy sustainability. Such clarity has stimulated an intense and diverse range of research into various capture and mitigation technologies, which race with global warming in real time. Quantification of the performance improvement rates of these technologies can inform decision makers' long term investment strategies, and help researchers to identify technical bottlenecks and research potential. The present research estimates the yearly performance improvement rate of CO2 capture, non CO2 GHG capture, and GHG mitigation technologies, using a novel method based on patent data and the corresponding citation network. Our findings suggest that membrane based, condensation/rectification based, and adsorption based carbon capture are the most promising technologies. Furthermore, the average CO2 capture technologies are likely to improve slightly faster than solar, wind, and battery technologies, indicating their important role in future electrical grids. Unfortunately, subterranean or submarine CO2 storage was identified as a slow growing technological domain and potentially a bottleneck in the future sustainable carbon chain, which requires further efforts.
author_names: Mahdi Sharifzadeh

Giorgio Triulzi

Christopher L Magee
title: Quantification of technological progress in greenhouse gas (GHG) capture and mitigation using patent data
year: 2019

abstract: Through the comparison of flow structures, velocity contours, turbulence statistics, and additional flow quantities, the error sources of RANS are qualitatively described. The findings in this work will help gas turbine design engineers to tweak their turbulence models and give guidance on the interpretation of their results. The novelty is the application of the transient TLC method on this type of geometry as well as the near wall PIV measurements. The advancements in additive manufacturing disrupt the classic turbine cooling development for casted airfoils. More and more complicated shapes and cooling schemes are possible. Nonetheless, a detailed physical understanding of fundamental cases as provided in this study is required for physics based optimization of cooling designs.
author_names: Marcel Otto
title: Improving Turbine Performance: A Contribution to the Understanding of Heat Transfer and Vortical Structures in Staggered Pin Fin Arrays
year: 2019

abstract: Polymeric membranes are an energy efficient means of purifying water, but they suffer from fouling during filtration. Modification of the membrane surface is one route to mitigating membrane fouling, as it helps to maintain high levels of water productivity. Here, a series of common techniques for modification of the membrane surface are reviewed, including surface coating, grafting, and various treatment techniques such as chemical treatment, UV irradiation, and plasma treatment. Historical background on membrane development and surface modification is also provided. Finally, polydopamine, an emerging material that can be easily deposited onto a wide variety of substrates, is discussed within the context of membrane modification. A brief summary of the chemistry of polydopamine, particularly as it may pertain to membrane development, is also described.
author_names: Daniel J Miller

Daniel R Dreyer

Christopher W Bielawski

Donald R Paul

Benny D Freeman
title: Surface Modification of Water Purification Membranes.
venue: Angewandte Chemie
year: 2017

abstract: Solar powered electrochemical production of hydrogen through water electrolysis is an active and important research endeavor. However, technologies and roadmaps for implementation of this process do not exist. In this perspective paper, we describe potential pathways for solar hydrogen technologies into the marketplace in the form of photoelectrochemical or photovoltaic driven electrolysis devices and systems. We detail technical approaches for device and system architectures, economic drivers, societal perceptions, political impacts, technological challenges, and research opportunities. Implementation scenarios are broken down into short term and long term markets, and a specific technology roadmap is defined. In the short term, the only plausible economical option will be photovoltaic driven electrolysis systems for niche applications. In the long term, electrochemical solar hydrogen technologies could be deployed more broadly in energy markets but will require advances in the technology, significant cost reductions, and/or policy changes. Ultimately, a transition to a society that significantly relies on solar hydrogen technologies will benefit from continued creativity and influence from the scientific community.
author_names: Shane Ardo

David Fernandez Rivas

Miguel A Modestino

Verena Schulze Greiving

Fatwa Firdaus Abdi

Esther Alarcon Llado

Vincent Artero

Katherine E Ayers

Corsin Battaglia

Jan-Philipp Becker

Dmytro Bederak

Alan Berger

Francesco Buda

Enrico Chinello

Bernard Dam

V Di Palma

Tomas Edvinsson

Katsushi Fujii

Han Gardeniers

Hans Geerlings

S Mohammad H Hashemi

Sophia Haussener

Frances A Houle

Jurriaan Huskens

Brian David James

Kornelia Konrad

Akihiko Kudo

Pramod Patil Kunturu

Detlef Lohse

Bastian T Mei

Eric L Miller

Gary F Moore

Jiri Muller

Katherine L Orchard

Timothy E Rosser

Fadl H Saadi

Jan-Willem Schuttauf

Brian Seger

Stafford W Sheehan

Wilson A Smith

Joshua M Spurgeon

Maureen H Tang

Roel Krol

Peter C K Vesborg

Pieter Westerik
title: Pathways to electrochemical solar hydrogen technologies
year: 2018

abstract: Monoclonal antibody (mAb) therapy is a form of immunotherapy that uses mAbs to bind mono specifically to certain cells or proteins. This may then stimulate the patient's immune system to attack those cells. MAbs are currently used to treat medical conditions such as cancer, diabetes, arthritis, psoriasis, and Crohn's Disease, but have the potential to treat countless diseases and disorders. In 2015, the mAb market was valued at $85.4 billion, and is expected to reach $138.6 billion by 2024.1 In manufacturing, mAbs are typically produced in suspension in a series of fed batch bioreactors using genetically engineered cells originally obtained from Chinese Hamster Ovaries (CHO).2 In this proposal, two upstream bioreactor designs were analyzed for economic comparison given an annual production goal of 100 kg of mAb, with the first design culminating in a 20,000 L volume at low mAb titer and the second design culminating with a 2,000 L volume at high mAb titer. Following upstream mAb production, the protein was purified to meet clinical FDA standards using a series of downstream purification techniques, including centrifugation, filtration, and chromatography. The two designs can be modeled for both an on patent and off patent mAb in order to ensure long term economic viability. In this project, the drug was modeled based on Ocrevus (ocrelizumab) a humanized therapeutic mAb brought to market in 2017 that targets a CD20 positive B cell to treat the symptoms of both primary progressive and relapsing Multiple Sclerosis.3 For an off patent drug, it is recommended that the mAb be priced at $35,000 per 1200 mg annual treatment in order to earn a 15% Internal Rate of Return (IRR) within 5 years of market uptake. For an on patent drug, a price of $65,000 per 1200 mg treatment should be used to recover the R&D costs of developing a new drug and sunk cost of past unsuccessful drugs. After analyzing both designs, it was concluded that the second, smaller design scheme is more scalable, less risky, and more cost effective for the production of both the onand off patent drugs. Disciplines Biochemical and Biomolecular Engineering Chemical Engineering Engineering This working paper is available at ScholarlyCommons: https:/repository.upenn.edu/cbe_sdr/104 Monoclonal Antibody Production and Purification Hope McMahon Jessica Schwartz Shritama Ray Proposed by: Dr. Jeffrey Cohen Project Advisor: Dr. John Crocker University of Pennsylvania School of Engineering Department of Chemical and Biomolecular Engineering April 17, 2018
author_names: H E McMahon

Jessica Schwartz

S Ray
title: Monoclonal Antibody Production and Purification
year: 2018

abstract: Essentially, the term aerogel describes a special geometric structure of matter. It is neither limited to any material nor to any synthesis procedure. Hence, the possible variety of materials and therefore the multitude of their applications are almost unbounded. In fact, the same applies for nanoparticles. These are also just defined by their geometrical properties. In the past few decades nano sized materials have been intensively studied and possible applications appeared in nearly all areas of natural sciences. To date a large variety of metal, semiconductor, oxide, and other nanoparticles are available from colloidal synthesis. However, for many applications of these materials an assembly into macroscopic structures is needed. Here we present a comprehensive picture of the developments that enabled the fusion of the colloidal nanoparticle and the aerogel world. This became possible by the controlled destabilization of pre formed nanoparticles, which leads to their assembly into three dimensional macroscopic networks. This revolutionary approach makes it possible to use precisely controlled nanoparticles as building blocks for macroscopic porous structures with programmable properties.
author_names: C Ziegler

Andreas Wolf

Wenhui Liu

Anne-Kristin Herrmann

Nikolai Gaponik

Alexander Eychmuller
title: Modern Inorganic Aerogels.
venue: Angewandte Chemie
year: 2017