mwirth-epo/epo-nmt-datasets huggingface dataset:
已知提供一种电力辅助转向设备，其中，对转向施加摩擦补偿转矩以补偿静摩擦和动摩擦二者。
It is known to provide an electric power assisted steering apparatus in which a friction compensating torque is applied to the steering to compensate for both static and kinetic friction.
该设备基于在转向设备的设计或调试期间对转向机构中存在的静摩擦水平进行的假设来产生摩擦补偿转矩。
The apparatus generates the friction compensating torque based on assumptions of the level of static friction present in the steering mechanism made during the design or commission of the steering apparatus.
本发明的目的是提供一种操作转向设备的方法，该转向设备提供了改善的转向感觉，其中，至少部分地克服了静摩擦和动摩擦的影响，并且目的是提供一种改善的转向设备。
An object of the present disclosure is to provide a method of operating a steering apparatus which provides an improved steering feel where the effects of static friction and kinetic friction are at least partially overcome, and to an improved steering apparatus.
信号处理单元，所述信号处理单元被适配为接收所述柱转矩信号和所述柱角度信号，并且从中产生表示要由所述马达向所述转向机构施加的转矩的转矩需求信号，其中，所述信号处理单元包括：
According to a first aspect, the disclosure provides an electric power steering apparatus of the kind comprising: a steering mechanism which operatively connects a steering wheel to the road wheels of the vehicle; an electric motor operatively connected to the steering mechanism; a torque signal generator adapted to produce a torque signal indicative of the torque carried by a portion of the steering mechanism; a column angular position signal generator for producing a column angle signal indicative of the angular position of the steering wheel or steering column; and a signal processing unit adapted to receive the column torque signal and the column angle signal and to produce therefrom a torque demand signal representative of a torque to be applied to the steering mechanism by the motor.
转矩需求信号发生电路，所述转矩需求信号发生电路被适配为根据所述摩擦补偿转矩信号和所述辅助转矩信号二者来产生转矩需求信号；并且
The signal processing means includes: a first signal processing circuit which receives an input signal dependent on the column torque signal and outputs an assistance torque signal, the relationship between the input and the output of the first signal processing circuit being defined by a boost curve; a second signal processing circuit which generates a friction compensating torque signal, the value of the friction compensating torque signal being derived from observations of both the column torque signal and the column angle signal over time; and a torque demand signal generating circuit adapted to produce the torque demand signal as a function of both the friction compensating torque signal and the assistance torque signal; and in which the friction compensating torque signal at least partially assists the driver in overcoming the effects of static and/or kinetic friction in the steering mechanism.
摩擦估计器，所述摩擦估计器产生对所述转向机构中的静摩擦的估计；并且
The apparatus may further comprise: a friction estimator which generates an estimate of the static friction in the steering mechanism; and in which the friction compensating torque signal generated by the second signal processing circuit is adapted as a function of the estimate of friction.
通过根据估计的摩擦来适配摩擦补偿转矩信号，该设备可以动态地补偿在该设备的使用期间以及随时间的摩擦变化。
By adapting the friction compensating torque signal as a function of the estimated friction, the apparatus can compensate dynamically for changes in that friction during use of the apparatus and over time.
所述第二信号处理电路通过产生无量纲的摩擦补偿因子并且将该因子乘以摩擦补偿转矩水平可以产生所述摩擦补偿转矩信号，所述摩擦补偿转矩水平是根据所估计的摩擦而被适配的。
The second signal processing circuit may generate the friction compensating torque signal by generating a dimensionless friction compensation factor and multiplying that factor by a friction compensation torque level that is adapted as a function of the estimated friction.
因此，第二信号处理电路可以应用经适配的增益水平作为用于适配摩擦补偿转矩信号的机构，从而分别随着增益的增大或减小而增大或减小补偿转矩。
The second signal processing circuit may therefore apply and adapted gain level as the mechanism for adapting the friction compensating torque signal, increasing or decreasing the compensation torque as the gain increases or decreases respectively.
所述摩擦补偿因子的值可以在+1到-1的范围内，并且可以在一种布置中使用以下形式的方程被确定：
The friction compensation factor may have a value in the range +1 to −1 and may in one arrangement be determined using an equation of the form:
摩擦补偿因子＝X*累积柱角度+Y*累积柱转矩
Friction compensation factor= X*Accumulated column angle+ Y*Accumulated column torque
其中，X和Y自身是缩放因子。
where X and Y are themselves scaling factors.
所述第二信号处理电路可以产生摩擦补偿因子，所述摩擦补偿因子包括从对所述柱转矩信号随时间的观察中推导出的第一分量以及从对所述柱角度信号随时间的观察中推导出的第二分量。
The second signal processing circuit may generate a friction compensation factor that comprises a first component derived from observations of the column torque signal over time and a second component which is derived from observations of the column angle signal over time.
所述两个分量可以彼此独立，使得一个分量的值独立于另一个分量的值。
The two components may be independent of each other such that the value of one is independent of the value of the other.
第二信号处理电路可以被适配为根据两个独立分量的总和来产生摩擦补偿转矩信号。
The second signal processing circuit may be adapted to generate the friction compensating torque signal as a function of the sum of the two independent components.
这确保了即使分量值之一保持为零，静摩擦补偿转矩信号也可以变化。
This ensures that the static friction compensating torque signal may vary even when one of the component values remains zero.
例如，如果观察到转矩在转向移动之前增大，则一些补偿将逐步引入。
For example, if the torque is observed to increase prior to the steering moving, some compensation will be phased in.
在此清楚的是，侧地板15沿水平方向突出超过主地板14的侧向外边缘19并且沿水平方向以距离A1突出超过主地板。
It can be seen that the side floor plate 15 protrudes in a horizontal direction beyond the lateral outer edge 19 of the main floor plate 14 and projects beyond the latter in a horizontal direction by the distance A 1.
但在收起位置中，沿竖直方向位于侧地板15上方的主地板14则完全覆盖侧地板15。
In the stowed position, on the other hand, the main floor plate 14 is positioned above the side floor plate 15 and completely overlaps the side floor plate 15.
这在图2B中进一步示出，其示出沿图2A的箭头I的侧视图。
This is illustrated further in FIG. 2B, which shows a side view along arrow I of FIG. 2A.
图2A的视向在图2B中通过箭头II示出。
The viewing direction of FIG. 2A is illustrated by arrow II in FIG. 2B.
在图2B中也以实线表示处于伸出位置的侧地板15并且以虚线表示处于转入位置的侧地板。
In FIG. 2B, the side floor plate 15 is again illustrated by solid lines in the deployed position and by dotted lines in the pivoted-in position.
在伸出位置中，侧地板15以距离A1沿水平方向突出超过主地板14。
In the deployed position, the side floor plate 15 protrudes horizontally beyond the main floor plate 14 by the distance A 1.
因此，在图2B中，位于驾驶台5上的驾驶员站在主地板14上并且如果可能也站在侧地板15上。
In FIG. 2B, the driver on the operator platform 5 thus stands on the main floor plate 14 and, if possible, on the side floor plate 15.
结合两个图2A和2B可以看出，通过处于伸出位置中的侧地板15可增大该支承区域。
The combination of the two FIGS. 2A and 2B thus shows that this standing area can be increased by the side floor plate 15 when in the deployed position.
另一方面，当侧地板15枢转出时，驾驶台5或其提供给位于驾驶台5中的驾驶员的站立面水平地并且横向于机器纵向中心M(图3A和3B)加宽距离A1。
On the other hand, the operator platform 4, or its standing area for the operator on the operator platform, widens horizontally and transversely to the longitudinal center line M (FIGS. 3A and 3B ) of the machine by the distance A 1 when the side floor plate 15 is pivoted out.
相反，在收起位置中，侧地板15完全消失在主地板14下方，因而在此情况下不加宽驾驶台5的支承区域。
In the stowed position, however, the side floor plate 15 completely disappears below the main floor plate 14, so that the standing area of the operator platform 4 is not widened in this case.
图2A还示出侧地板15在伸出位置和收起位置中的相应端部位置。
FIG. 2A further shows the respective end positions of the side floor plate 15 in the deployed position and in the stowed position.
这两个位置之间的枢转角度在图2A中以角度α表示。
The pivoting angle between these two positions is indicated in FIG. 2A by the angle α.
该角度在本实施例中大约为45°。
In the present embodiment example, this angle is about 45°.
图2B还示出防绊倒装置20，其呈从主地板14外边缘19沿水平方向突出的橡胶唇21形式，该橡胶唇从上方部分地靠置在侧地板15上。
FIG. 2B also shows a trip protection device 20 in the form of a rubber lip 21 projecting from the outer edge 19 of the main floor plate 14 in a horizontal direction and, coming from above, partially resting on the side floor plate 15.
橡胶唇包括补偿斜面22，该补偿斜面均匀下降地补偿由侧地板15和主地板14形成的站立面之间的竖直错开。
It comprises a compensation slope 22 which compensates the vertical offset between the standing area formed by the side floor plate 15 and the main floor plate 14 in a uniformly sloping manner.
由此降低了主地板14和侧地板15之间的过渡区域中的绊倒危险。
This reduces the risk of tripping in the step-over region between the main floor plate 14 and the side floor plate 15.
橡胶唇21还包括一个从主地板14的站立面沿竖直方向向上突起或突出的标记凸起23。
The rubber lip 21 further comprises a marking bump 23 projecting or protruding vertically upwards from the standing area of the main floor plate 14.
该标记凸起23允许位于驾驶台5上的驾驶员能够用脚早点感觉到主地板14与侧地板15之间的过渡区域，这也降低了绊倒危险。
This enables the driver on the operator platform 4 to sense the step-over zone between the main floor plate 14 and the side floor plate 15 with his foot early on, which also reduces the risk of tripping.
图3A、3B、4A、4B和5现在示出相应于图1的地面铣刨机1，其中，排料输送带8和驾驶台顶棚12已被拆除。
FIGS. 3A, 3B, 4A, 4B and 5 now show a ground milling machine 1 comparable to that of FIG. 1, with the loading conveyor 8 and the operator platform roof 12 removed.
地面铣刨机1不仅在相对于主作业方向A的右侧上(在其上在图3A和3B中不可见的铣刨装置基本上与机器侧面齐平，因此该侧也称为零侧)而且也在左侧上分别具有一个侧地板15，其可在图3A/4A/5所示的伸出位置和图3B/4B所示的收起位置之间进行调节。
Both on the right-hand side with respect to the main working direction A, where the milling device, which is not visible in FIGS. 3A and 3B, is essentially flush with the machine side, so that this side is also referred to as the zero side, and also on the left side, the ground milling machine 1 comprises in each case a respective side floor plate 15 which is adjustable between the deployed position shown in FIG. 3A / 4A/ 5 and the stowed position shown in FIG. 3B / 4B.
在图3A中对于左侧地板15示例性以α示出枢转角度。
By way of example, the pivot angle for the left side floor plate 15 is indicated by α in FIG. 3A.
图3A和3B示出从上方看的机器俯视图，图4A和4B示出逆着作业方向A的正视图并且图5示出从右上方看的透视斜视图。
FIGS. 3A and 3B are top views of the machine, FIGS. 4A and 4B are front views against the working direction A, and FIG. 5 is an oblique perspective view from the upper right.
图3A至5尤其是示出通过可转出的侧地板15横向于作业方向A在水平面中加宽机器宽度并且尤其是在该方向上增大驾驶台5的站立面。
FIGS. 3A to 5 illustrate in particular that the pivoted-out side floor plates 15 widen the machine width transversely to the working direction A in the horizontal plane and increase the standing area of the operator platform 5 especially in this direction.
为了更加清楚，在图3A和4A中标出距离A1，该距离表示通过将相应侧地板15从转入位置枢转到转出位置中实现的站立面在水平面中且横向于作业方向A的加宽。
For further illustration, FIGS. 3A and 4A indicate the distance A 1, which denotes the widening of the floor standing area in the horizontal plane and transverse to the working direction A, which is achieved by pivoting the respective side floor plate 15 from the pivoted-in position to the pivoted-out position.
由此为位于驾驶台5上的操作者提供更多的站立面。
This provides a larger standing area for the operator on the operator platform 5.
因此，通过枢转出的侧地板15沿主作业方向A在前面获得的空间对于位于驾驶台5上的操作者而言特别大。
The pivot axes S of the two side floor plates 15 are further arranged in the rear region of the respective side floor plate 15 as seen in the main working direction A. As a result, the space gained by the pivoted-out side floor plate 15 in the main working direction A at the front is particularly large for the operator on the operator platform 5.
这使得他尤其是可从该区域例如沿机器侧面在主作业方向A上进行观察。
This enables him, for example, to look along the side of the machine in the main working direction A in particular from this region.
图3A和3B或4A和4B之间的比较进一步表明，具有处于伸出位置的侧地板15的驾驶台5部分地相对于相应机器侧面的其余部分向侧面突出。
A comparison of FIGS. 3A and 3B or 4A and 4B further shows that the operator platform 5 partially protrudes laterally beyond the rest of the respective machine side when the side floor plates 15 are in the deployed position.
为了更加清楚，图4A示出机架侧壁W，该机架侧壁沿水平方向构成机器在该侧的最大延伸。
In FIG. 4A, this is further illustrated by an indication of the lateral machine frame wall W, which constitutes the maximum horizontal extension of the machine to this side (the further provided step-up aid 18 can be folded in and is thus not considered for the machine width in this region).
相反，如果侧地板15如图3B所示处于收起位置中，则驾驶台5在高度W上基本上与地面铣刨机1的其余后侧壁齐平(图4B)。
If, on the other hand, the side floor plates 15 are in the stowed position, as is shown in FIG. 3B, the operator platform 5 terminates essentially flush with the rest of the rear sidewall of the ground milling machine 1 at the level W (FIG. 4B ).
换句话说，在侧地板15处于收起位置时驾驶台5的宽度位于地面铣刨机1其余部分的最大宽度之内。
In other words, when the side floor plates 15 are in the stowed position, the width of the operator platform 5 is within the maximum width of the rest of the ground milling machine.
这在运输地面铣刨机1时是有利的。
This is particularly advantageous during the transport of the ground milling machine 1.
为了更加清楚，在图4A中示出在两侧侧地板均处于转出位置时的最大机器宽度Bmax并且在图4B中示出在两侧侧地板均处于转入位置时的明显更小的最小机器宽度Bmin(同样不计入可单独合起的上车辅助装置18)。
For further clarification, FIG. 4A shows the maximum machine width Bmax with side floor plates on both sides in pivoted-out position, while FIG. 4B shows the considerably smaller minimum machine width Bmin with side floor plates on both sides in pivoted-in position (again, the separately foldable step-up aid 18 is not included).
图3A、3B和5还示出，在驾驶台5中成对地设置右侧操作装置17和驾驶员座椅16对以及左侧操作装置17和驾驶员座椅16对。
FIGS. 3A, 3B and 5 further show that on the operator platform 5 there are, arranged in respective pairs, a right pair of an operating device 17 and a driver's seat 16 and a right pair of an operating device 17 and a driver's seat 16.
它们在本实施例中可沿水平方向调节、尤其是从图3A和3B所示的位置水平调节到地面铣刨机的外侧。
In the present embodiment example, these are adjustable in the horizontal direction, in particular adjustable horizontally from the position shown in FIGS. 3A and 3B towards the outside of the ground milling machine.
调节范围可如此之大，使得相应驾驶员座椅16和/或相应操作装置17沿竖直方向看可以至少部分地与相应侧地板15重叠。
The adjustment may be to such an extent that the respective driver's seat 16 and/or the respective operating device 17 can be adjusted so as to at least partially overlap the respective side floor plate 15 in the vertical direction.
在根据图3A/4A、3B/4B和5的实施例中还规定，设置以沿竖直方向从侧地板15向上突出的栏杆形式的防坠落装置23。
In the embodiment example according to FIGS. 3A / 4A, 3B/ 4B and 5, a fall protection device is further provided in the form of a railing protruding vertically upwards from the side floor plate 15.
它位置固定地与侧地板15连接并且与其一起在收起位置和伸出位置之间枢转。
Said railing is connected to the side floor plate 15 in a stationary manner and pivots together with the latter between the stowed position and the deployed position.
操作者因此可从驾驶台5通过移动防坠落装置23同时也使侧地板15在收起位置和伸出位置之间运动。
From the operator platform 5, the operator can thus simultaneously move the side floor plate 15 between the stowed position and the deployed position by displacing the fall protection device 23.
此外，防坠落保护装置23的一部分也是补偿件24，其可变地补偿通过固定的栏杆部分从收起位置到伸出位置的运动产生的到机器其余部分的空隙。
Part of the fall protection device 23 is also a compensation member 24 which variably compensates the free space relative to the rest of the machine created by the movement of the fixed railing part from the stowed position into the deployed position.
补偿件例如可以是链条或可伸缩栏杆中间件。
Said compensation member may be, for example, a chain or a telescopic intermediate railing member.
尤其是图5示出通过处于伸出位置的侧地板15改善的、从驾驶台到对于操作机器尤为重要的、铣刨鼓前方的地面区域的视野。
FIG. 5 in particular illustrates that the visibility from the operator platform to the ground region ahead of the milling drum, which is particularly relevant for the operation of the machine, is improved due to the side floor plate 15 in the deployed position.
侧地板15沿竖直方向定位在铣刨装置上方。
The side floor plates 15 are positioned vertically above the milling device.
因此，在伸出位置中位于驾驶台上的操作者在铣刨装置上方获得一个类似阳台的结构，通过该结构他可直接看到沿作业方向A位于铣刨鼓相应边缘侧面前方的地面区域。
In the deployed position, the operator on the operator platform thus obtains a balcony-like structure above the milling device from which he can look directly to the ground region lying in the working direction A ahead of the respective edge of the milling drum.
图6最后示出本发明基本思想的其它扩展方案。
FIG. 6 finally illustrates further modifications of the basic idea of the invention.
图6示出图1的机器的局部图，因此，图6的地面铣刨机1包括运输锁定装置25，其在当前情况下大致可在驾驶台地板13的高度上从地面铣刨机1的外部进行操作。
As is shown, the ground milling machine 1 of FIG. 6 comprises a transport lock 25 which in the present case is arranged approximately at the level of the operator platform floor 13 for operation from outside the ground milling machine 1.
借助该运输锁定装置25可将侧地板15锁止在其收起位置中。
With the aid of the transport lock 25, the side floor plate 15 can be locked in its stowed position.
此外，补充或替代地设置驱动装置26，该驱动装置至少辅助纯手动操作地驱动侧地板在收起位置和伸出位置之间的调节。
Furthermore, additionally or alternatively, a drive device 26 is provided which, at least in addition to purely manual operation, drives the adjustment of the side floor plate between the stowed position and the deployed position.
这可以是机械作用的驱动装置26、如气压弹簧或机械弹簧，或者也可以是驱动马达。
This may be a mechanically acting drive device 26, such as a gas pressure spring or a mechanical spring, or also a drive motor.
它可由位于驾驶台5中的操作者通过设置在驾驶台5中的、经由信号导线28与驱动装置26连接的操作装置27来操作，以便调节侧地板15。
It may be actuated by an operator on the operator platform 5 from an actuating device 27, which is connected to the drive device 26 via a signal line 28, to adjust the side floor plate 15.
此外，可设置锁止装置29、在当前情况下为可从驾驶台5操作的脚踏板，借助其可从驾驶台5将侧地板15锁止在伸出位置和/或收起位置中。
Furthermore, a locking device 29 may be provided, in the present case in the form of a foot pedal operated from the operator platform 5, by means of which the side floor plate 15 can be locked in the deployed position and/or the stowed position from the operator platform 5.
在此尤其是涉及适合的形锁合装置，其将侧地板15围绕其枢转轴线S的枢转运动锁止在其相应的锁定位置中。
This is in particular a suitable positive locking device which blocks the pivot movement of the side floor plate 15 about its pivot axis S in its respective locking position.
在此可这样构造锁止装置29，使得其仅将侧地板15锁止在收起位置和/或一个唯一的伸出位置、通常是最大伸出位置中。
The locking device 29 may in this case be configured such that it locks the side floor plate 15 only in the stowed position and/or in a single deployed position, usually the maximally deployed position.
但也可这样构造锁止装置29，使得其能够以多个中间级分级地或无级地在收起位置和最大伸出位置之间锁定侧地板15。
It is, however, also possible to configure the locking device 29 such that it enables the side floor plate 15 to be locked in a stepped manner with several intermediate steps or steplessly between the stowed position and a maximally deployed position.
一种上述枢转方案的替代和/或补充方案在于：侧地板可沿水平轴线、尤其是横向于且特别是垂直于作业方向A移动地、尤其是可线性移动地在收起位置和伸出位置之间调节。
According to an alternative and/or supplement to the pivot variant described above, the side floor plate is displaceable along a horizontal axis, in particular transversely and more particularly perpendicularly to the working direction A, in particular linearly, between the stowed position and the deployed position.
这例如在图3A中示例性以借助虚线表示的、处于伸出位置中的侧地板15'示出。
This is illustrated as an example in FIG. 3A with the side floor plate 15′ shown in the deployed position using dashed lines.
为了到达收起位置，侧地板15'沿水平轴线H线性朝向机器的其余部分移动，直到它到达上述收起位置。
To reach the stowed position, the side floor plate 15′ is displaced linearly along the horizontal axis H towards the rest of the machine until it has reached the stowed position already described above.
为此参见前面的公开内容。
Reference is made in this regard to the above disclosure.
沿一条轴线的枢转运动和移动运动之间的组合也是可能的。
Combinations between pivot and displacement movements along one axis are also possible.
本发明涉及传感器和其制造方法。
The present invention relates to a sensor and a production method for the same.
一般，传感器是将检测膜的由外部刺激所引起的物性的变化作为电信号进行读取，根据作为测定对象的物质而使用各种种类的检测膜。
Generally, a sensor is a device that reads a change in a physical property caused by an external stimulus on a detection film as an electric signal.
例如，在湿度传感器等中，已知读取由湿度的变化所引起的静电电容的变化的湿度传感器。
For example, it is known that humidity sensors read a change in capacitance caused by a change in humidity.
作为这样的湿度传感器，已知具备由树脂组合物形成的感湿膜的静电电容式的湿度传感器等。
As such a humidity sensor, a capacitance type humidity sensor including a moisture-sensitive film formed from a resin composition is known.
例如，专利文献1(日本特开2001－249099号公报)中公开了具备使用具有亲水基团的有机化合物的感湿膜的静电电容式的湿度传感器。
For example, Patent Literature 1 (Japanese Patent Laid-Open No. 2001-249099) discloses a capacitance type humidity sensor including a moisture-sensitive film that uses an organic compound having a hydrophilic group.
由树脂组合物形成的感湿膜能够对周围气氛中所含的水分进行吸附解吸。
A moisture-sensitive film formed from a resin composition can adsorb and desorb moisture included in an ambient atmosphere.
在静电电容式的湿度传感器中，通过对配置于感湿膜的两面的二个电极间施加电压来测定感湿膜的静电电容，基于该测定值算出感湿膜所吸附的水分量，算出周围气氛的湿度。
In a capacitance type humidity sensor, the capacitance of the moisture-sensitive film is measured by applying a voltage between two electrodes arranged on either side of the moisture-sensitive film, the amount of moisture adsorbed by the moisture-sensitive film is calculated based on the measured value, and the humidity of the ambient atmosphere is calculated.
专利文献1：日本特开2001－249099号公报
Patent Literature 1: Japanese Patent Laid-Open No. 2001-249099
为了进行稳定的感测，重要的是在传感器中能够始终稳定地读取检测膜的物性变化所产生的电信号，要求即使在长期间使用的情况下，测定精度也不降低，即良好的耐久性。
For a sensor to carry out stable sensing, it is important for the sensor to always be able to stably read an electric signal produced by a change in a physical property of the detection film.
例如，如果以电信号的形式读取静电电容的变化，则要求即使长时间使用，其静电电容的经时变化也小。
For example, if a change in capacitance is read as an electric signal, it is required that the change in capacitance over time be small even when used for a prolonged period of time.
本发明的目的在于提供具有良好的耐久性的传感器和其制造方法。
It is an object of the present invention to provide a sensor having good durability and a method for producing the sensor.
本发明提供以下的传感器和其制造方法。
The present invention provides the following sensors and methods for producing the sensors.
〔1〕一种传感器，具备由树脂组合物形成的检测膜、设置于上述检测膜的第1表面上的第1电极和设置于上述检测膜的第2表面上的第2电极，
a second electrode provided on a second surface of the detection film,
上述检测膜的上述第1表面包含在与上述第1电极接触的部分具有均方根粗糙度(Sq)为0.3μm～3.0μm的微小凹凸的粗糙面。
wherein the first surface of the detection film includes a rough surface having fine irregularities with a root mean square roughness (Sq) of 0.3 μm to 3.0 μm in a portion that is in contact with the first electrode.
〔2〕一种传感器，包含传感器元件，所述传感器元件具备由树脂组合物形成的检测膜、设置于上述检测膜的第1表面上的第1电极和设置于上述检测膜的第2表面上的第2电极，
[2] A sensor comprising a sensor element, the sensor element including:
上述传感器元件的具有上述第1电极的表面包含具有均方根粗糙度(Sq)为0.3μm～3.0μm的微小凹凸的粗糙面。
wherein a surface having the first electrode of the sensor element includes a rough surface having fine irregularities with a root mean square roughness (Sq) of 0.3 μm to 3.0 μm.
〔3〕根据〔1〕或〔2〕所述的传感器，其中，上述第1电极和上述第2电极中的至少一者为镀膜。
[3] The sensor according to [1] or [2], wherein at least one of the first electrode and the second electrode is a plated film.
〔4〕根据〔1〕～〔3〕中任一项所述的传感器，其中，上述检测膜的上述第1表面包含不与上述第1电极接触的部分。
[4] The sensor according to any one of [1] to [3], wherein the first surface of the detection film includes a portion that is not in contact with the first electrode.
〔5〕根据〔1〕～〔4〕中任一项所述的传感器，其中，上述检测膜的平均厚度为0.3μm～10μm。
[5] The sensor according to any one of [1] to [4]wherein the detection film has an average thickness of μμm to 10 μm.
〔6〕根据〔1〕～〔5〕中任一项所述的传感器，其中，上述检测膜的上述第2表面包含在与上述第2电极接触的部分具有均方根粗糙度(Sq)为0.3μm～3.0μm的微小凹凸的粗糙面。
[6] The sensor according to any one of [1] to [5:], wherein the second surface of the detection film includes a rough surface having fine irregularities with a root mean square roughness (Sq) of 0.3 μm to 3.0 μm in a portion that is in contact with the second electrode.
〔7〕根据〔1〕～〔6〕中任一项所述的传感器，其中，进一步具备基板，
[7] The sensor according to any one of [1] to [6], further comprising a substrate, wherein the substrate, the second electrode, the detection film, and the first electrode are laminated in that order.
〔8〕根据〔1〕～〔7〕中任一项所述的传感器，其具有挠性。
[8] The sensor according to any one of [1] to [7], wherein the sensor has flexibility.
〔9〕根据〔1〕～〔8〕中任一项所述的传感器，其中，上述检测膜为感湿膜。
[9] The sensor according to any one of [1] to [8], wherein the detection film is a moisture-sensitive film.
〔10〕根据〔9〕所述的传感器，其中，上述感湿膜由含有聚酰亚胺树脂成分的树脂组合物形成。
[10] The sensor according to [9], wherein the moisture-sensitive film is formed from a resin composition containing a polyimide resin component.
〔11〕一种传感器的制造方法，具有如下工序：
[11] A method for producing a sensor, the method comprising:
在上述基板上形成第2电极的工序，
a step of forming a second electrode on the substrate;
在第2电极上形成以树脂为主成分的检测膜的工序，
a step of forming on the second electrode a detection film having a resin as a main component;
将上述检测膜的与第2电极相反的一侧的表面的至少一部分粗糙化而制成粗糙面的工序，以及
a step of roughening at least a part of the surface of the detection film opposite to the second electrode to form a rough surface; and