mwirth-epo/epo-nmt-datasets huggingface dataset:
(3)在上述实施方式中，在第一构件10的安装面10e上形成有作为凸部的突起12，在第二构件11的被安装面11c上形成有作为凹部的凹槽13，使得通过将凸部(凸起12)嵌合于凹部(凹槽13)中，将两个构件10、11组合。
(3) In the foregoing embodiments, the protrusion 12 as the convex portion is formed on the attaching surface 10e of the first member 10 and the groove 13 as the concave portion is formed in the attached surface 11c of the second member 11, so that two members 10, 11 are combined by fitting the convex portion (protrusion 12) into the concave portion (groove 13).
以此方式，在根据本发明的折边头中，通过在彼此直接组合在一起的两个构件中的一个构件(前述实施例：第一构件10)上形成凸部，在另一个(上述实施方式：第二构件11)上形成用于嵌合凸部的凹部，能够实现上述效果。
In this way, in the tuck-in head according to the present invention, the above effects can be obtained by forming a convex portion on one of two members (the foregoing embodiment: first member 10), which are to be directly combined with each other, and also forming a concave portion, into which the convex portion is to be fitted, on the other (the foregoing embodiment: second member 11).
另外，凸部嵌合于凹部中的这种用于组合的构造(组合结构)可以自然地应用于图4至图6的示例。
In addition, such a configuration for combining (combining configuration), in which a convex portion is fitted into a concave portion, may naturally be applied to the examples of Figs. 4 to 6.
另一方面，在通过三个或者三个以上构件组合而构成折边式头的情况下，该组合结构可以应用于第一构件和/或第二构件，和与之直接组合的另一构件之间(图6中的例子：第三构件62)。
On the other hand, in the case where the tuck-in head is constructed by combining three or more members, the combining configuration is applied between the first and/or second member and another member, which is to be directly combined therewith (the example of Fig. 6 : third member 62).
而且，在彼此直接组合的一个构件和另一个构件中，可以任意设定哪个构件上形成有凸部或凹部。
Also, which of one member and the other member, which are to be directly combined with each other, a convex portion or a concave portion is formed on may be arbitrarily set.
另外，既可以在所述一个构件上形成凸部和凹部，也可以在所述另一个构件上形成用于嵌合所述一个构件的凸部的凹部，和嵌合在所述一个构件的凹部的凸部。
Further, both a convex portion and a concave portion may be formed on the one member, and also a concave portion, into which the convex portion of the one member is to be fitted, and a convex portion, which is to be fitted into the concave portion of the one member, may be formed on the other member.
(4)关于凸部和凹部，在上述实施方式中，作为凸部的凸起12形成为从其延伸方向(折边头3的宽度方向)观察时呈大致正方形，并且作为凹部的凹槽13形成为从宽度方向上观察时具有大致正方形的形状，从而允许突起12嵌合在其中。
(4) As for the convex portion and the concave portion, the protrusion 12 as the convex portion in the foregoing embodiment is formed to have a substantially square shape as viewed in an extension direction thereof (the width direction of the tuck-in head 3), and the groove 13 as the concave portion is formed to have a substantially square shape as viewed in the width direction, thereby allowing the protrusion 12 to be fitted therein.
然而，当将所述组合结构应用于根据本发明的折边头时，凸部和凹部的形状不限于前述实施方式中的形状，而可以是例如梯形、三角形或半圆形。
However, when the combining configuration is applied to the tuck-in head according to the present invention, the shape of the convex portion and the concave portion is not limited to the shape in the foregoing embodiment, but may be, for example, a trapezoid shape, a triangle shape or a half circle shape.
此外，凹部可以形成为燕尾槽形状，并且凸部可以形成为能被嵌合于该燕尾槽中的形状。
Further, the concave portion may be formed in a dovetail groove shape and the convex portion may be formed in a shape, which is to be fitted into the dovetail groove.
而且，凸部不限于如前述实施例中那样在宽度方向上形成在第一构件10的相对侧表面10a、10a之间，而是可以在宽度方向上部分地形成。
Also, the convex portion is not limited to being formed between opposing side surfaces 10a, 10a of the first member 10 in the width direction as in the foregoing embodiment, but may be formed partially in the width direction.
而且，如果以这种方式形成凸部，则凹部可以像凸部一样在宽度方向上部分地形成，或者如上述实施例，可以形成在宽度方向上的相对的侧面之间(上述实施例：第二构件11的相对的侧面11a、11a)。
Also, if the convex portion is formed in such a manner, the concave portion may be formed partially in the width direction like the convex portion, or may be formed between opposing side surfaces (the foregoing embodiment: opposing side surfaces 11a, 11a of the second member 11) in the width direction as in the foregoing embodiment.
另外，凸部不限于具有如上所述的形状，而是可以形成为棒状。
In addition, the convex portion is not limited to having the shapes as described above, but may be formed in a rod shape.
在这种情况下，凹部是孔，棒状凸部能够安装在该孔中。
In this case, the concave portion is a hole, into which the rod-shaped convex portion can be fitted.
而且，上述示例中的凸部不限于通过加工要在其上设置凸部的构件(前述实施例：第一构件10)的一部分而形成，而是可以形成与构件分离的组件，然后该组件与构件连接并集成。
Also, the convex portion in the examples described above is not limited to being formed by machining a part of a member, on which the convex portion is to be provided (the foregoing embodiment: first member 10), but may be formed by forming a component separate from the member and then attaching and integrating the component to the member.
此外，设置在构件上的凸部的数量不限于前述实施例中的一个，而可以是多个。
Further, the number of the convex portion provided on the member is not limited to one as in the foregoing embodiment, but may be plural.
另外，如果设置多个凸部，则可以根据凸部的数量和布置，适当地形成要与该构件组合的另一构件上的凹部。
In addition, if a plurality of convex portions are provided, concave portions on the other member to be combined with the member may be properly formed in accordance with the number and arrangement of the convex portions.
同时，在根据本发明的折边式头中，如上所述的采用凸部和凹部的组合结构不是必须的。
Meanwhile, in the tuck-in head according to the present invention, the combining configuration employing the convex portion and the concave portion as described above is not essential.
因此，彼此组合的两个构件的安装面和被安装面可以形成没有如上所述的不平坦的表面。
Accordingly, an attaching surface and an attached surface on two members to be combined with each other may be surfaces, on which no unevenness as described above is formed.
在这种情况下，考虑到易于加工，安装面和被安装面优选地是平坦表面，但是也可以是例如圆弧表面。
In this case, the attaching surface and the attached surface are preferably flat surfaces in consideration of ease of machining, but may be, for example, circular arc surfaces.
(5)在上述实施方式中，是将本发明应用于纱线供给侧及相反侧的折边头3的例子。
(5) The foregoing embodiment corresponds to an example in which the present invention is applied to tuck-in heads 3 on the yarn supplying side and the opposite side.
但是，本发明还能够应用于折边头，该折边头用于形成布置在多折边织机中的机织织物之间的中央织边，该多折边织机同时编织多个分离的机织织物。
However, the present invention can also be applied to a tuck-in head for forming a center selvedge arranged between woven fabrics in a multiple-tucking loom which simultaneously weaves a plurality of separated woven fabrics.
此外，本发明不限于如上所述的实施例和变形，并且能够在不脱离本发明的精神和范围的情况下对其进行各种修改。
Further, the present invention is not limited to the embodiment and variants as described above, and various modifications thereof can be made without departing from the spirit and scope of the present invention.
而且，磁阻机构50的磁阻大小通过改变磁铁55A、55B的起磁力及磁铁55A、55B的轴向上的尺寸(全长)等而可以容易地进行调整。
Moreover, the magnitude of the magnetic resistance of the magnetoresistive mechanism 50 can be easily adjusted by changing the magnetizing forces of the magnets 55A and 55B and the axial dimensions (total length) of the magnets 55A and 55B.
因此，可以对主轴34稳定地施加确定的负载。
Therefore, it is possible to apply a predetermined load stably to the spindle 34.
容纳部21包括由比磁阻机构50的轴向上的尺寸大的空间形成的配置部21c，在该配置部21c中配置有间隔件60，从而能够在容纳部21内无晃动地容纳齿轮机构44。
The accommodating portion 21 includes the arrangement portion 21 ehaving the space wider than the axial dimension of the magnetoresistive mechanism 50, and the spacer 60 is arranged in the arrangement portion 21 c, and thus, the gear mechanism 44 can be accommodated in the accommodating portion 21 without rattling.
另外，在间隔件60设置磁阻机构50的安装部60f，从而即使是由大于磁阻机构50的空间形成的配置部21c，也能够可靠地安装磁阻机构50。
Since the spacer 60 is provided with the mounting portion 60 fof the magnetoresistive mechanism 50, the magnetoresistive mechanism 50 can be reliably mounted even, on the arrangement portion 21 chaving the space larger than the magnetoresistive mechanism 50.
图8和图9示出使用在第二实施方式的门支承装置10中的支承部件15B。
FIGS. 8 and 9 illustrate the support member 15B used for the door support device 10 according to a second embodiment.
在第二实施方式的门支承装置10中，在图1中左侧使用与第一实施方式相同的支承部件(第一支承部件)15A，在图1中右侧使用图8示出的支承部件(第二支承部件)15B。
In the door support device 10 according to the second embodiment, the same support member (first support member) 15 as that in the first embodiment is used on the left side in FIG. 1, and the support member (second support member) 15B illustrated in FIG. 8 is used on the right side in FIG. 1.
参照图8，支承部件15B包括电动机70，不仅是基于车门3的开闭的从动，还是通过电动机70的驱动而能够伸缩的电动式。
Referring to FIG. 8, the support member 15B includes the electric motor 70, and is an electric type that can be extended and contracted by driving the electric motor 70 as well as being driven by opening and closing the door 3.
使用从动式的支承部件15A和电动式的支承部件15B的第二实施方式的门支承装置10构成车门3能够自动开闭的门开闭装置。
The door support device 10 according to the second embodiment using the driven support member 15A and the electric support member 15B constitutes a door opening and closing device capable of automatically opening and closing the door 3.
如图8所示，支承部件15B包括第一壳体20、第二壳体25、伸缩机构30以及齿轮机构44。
As illustrated in FIG. 8, the support member 15B includes the first housing 20, the second housing 25, the telescopic mechanism 30, and the gear mechanism 44.
结合图2进行参照，它们是在从动式的支承部件15A中也被使用的公共元件。
Referring also to FIG. 2, the first housing 20, the second housing 25, the telescopic mechanism 30, and the gear mechanism 44 are common components which are also used for the driven support member 15A.
也就是说，从动式的支承部件15A和电动式的支承部件15B的基本结构是相同的。
That is, the driven support member 15A and the electric support member 15B have the same basic configuration.
但是，在齿轮机构44中，使用与盒48A不同的盒48B。
However, a case 48B different from the case 48A is used for the gear mechanism 44.
如图8和图9所示，在支承部件15B的容纳部21，形成有与支承部件15A相同的配置部21c。
As illustrated in FIGS. 8 and 9, the same arrangement portion 21 cas that of the support member 15A is formed in the accommodating portion 21 of the support member 15B.
在该配置部21c中，除电动机70之外，配置有夹具71、齿轮箱64B、减震器66A、66B以及护环68B。
In addition to the electric motor 70, a clamp 71, a gear box 64B, the dampers 66A and 66B, and a grommet 68B are arranged in the arrangement portion 21 c. Among them, the dampers 66A and 66B are components common to the driven support member 15A.
电动机70是可以正转及逆转的驱动单元，被电连接于车辆1的ECU(ElectronicControl Unit：电子控制单元)。
The electric motor 70 is a drive unit capable of forward rotation and reverse rotation, and is electrically connected to an electronic control unit (ECU) of the vehicle 1.
电动机70包括从电动机壳体的轴向上的一端突出的输出轴70a。
The electric motor 70 includes an output shaft 70 aprotruding from one end of a motor case in the axial direction.
输出轴70a被机械性地连接于齿轮机构44的第二连接部45B。
The output shaft 70 ais mechanically connected to the second connecting portion 45B of the gear mechanism 44.
夹具71为金属制，为将电动机70连结于齿轮机构44而设置。
The clamp 71 is made of metal and is provided to connect the electric motor 70 with the gear mechanism 44.
夹具71包括圆环状的基板部71a，该基板部71a通过螺钉72被固定于电动机70的输出轴70a侧的端面。
The clamp 71 includes an annular substrate 71 a, and the substrate 71 ais fixed to an end face of the electric motor 70 on the output shaft 70 aside by a screw 72.
在基板部71a的外周，在周向上隔开间隔设置多个(8个)在轴向上突出、径向上可弹性变形的弹性片71b。
A plurality of (eight) elastic pieces 71 b, which protrude in the axial direction and can be elastically deformed in the radial direction, are provided on the outer periphery of the substrate 71 aat intervals in the circumferential direction.
在这些弹性片71b上，交替设置有被设置在齿轮机构44的盒48B的卡止爪48b卡止的卡止孔71c和嵌合于盒48B的定位凸部48c的定位槽71d。
On the elastic pieces 71 b, a locking hole 71 cwith which a locking claw 48 bprovided on the case 48B of the gear mechanism 44 is locked and a positioning grooves 71 dwhich fit into a positioning convex portion 48 cof the case 48B are alternately provided.
通过将螺丝紧固了夹具71的电动机70配置在齿轮机构44的第二连接部45B侧，在盒48B的外侧嵌入夹具71，可以实现电动机70和齿轮机构44一体化。
The electric motor 70 and the gear mechanism 44 can be integrated by arranging the electric motor 70 to which the clamp 71 is fixed with the screw on the second connecting portion 45B side of the gear mechanism 44 to fit the clamp 71 into the outside of the case 48B.
齿轮箱64B的轴向上的尺寸短于齿轮箱64A的轴向上的尺寸。
An axial dimension of the gear box 64B is shorter than an axial dimension of the gear box 64A.
具体而言，齿轮箱64B的轴向上的尺寸为在齿轮机构44的第一连接部45A至盒48B的中间部分为止能够覆盖外周的大小。
Specifically, the axial dimension of the gear box 64B is large enough to cover the outer periphery from the first connecting portion 45A of the gear mechanism 44 to an intermediate portion of the case 48B.
齿轮箱64B与齿轮箱64A同样地，包括贯通孔64a、狭缝64b、舌片64c以及卡止孔64d，但与齿轮箱64A不同之处在于被设置于盒48B的卡止爪48d卡止于卡止孔64d。
The gear box 64B includes the through-hole 64 a, the slit 64 b, the tongue piece 64 c,and the locking hole 64 dsimilarly to the gear box 64A, but is different from the gear box 64A in terms that a locking claw 48 dprovided on the case 48B is locked with the locking hole 64 d.
减震器66A被配置在齿轮箱64B，减震器66B被配置在电动机70的连接端20a侧的一端。
The damper 66A is arranged on the gear box 64B, and the damper 66B is arranged at an end of the electric motor 70 on the connection end 20 aside.
减震器66A、66B将一体化的齿轮机构44及电动机70相对于容纳部21保持在非接触状态。
The dampers 66A and 66B hold the integrated gear mechanism 44 and electric motor 70 in a non-contact state with respect to the accommodating portion 21.
与护环68A的不同之处在于，护环68B包括水密地导出被连接于电动机70的导线的筒状的导出部68b。
The grommet 68B is different from the grommet 68A in terms of including a cylindrical lead-out portion 68 bthat leads out a lead wire connected to the electric motor 70 in a watertight manner.
此外，与支承部件15A中所使用的轴端部件23A的不同之处在于，支承部件15B中所使用的轴端部件23B包括与导出部68b对应的孔(未图示)。
Note that a shaft end member 2313 used for the support member 15B is different from the shaft end member 23A used for the support member 15A in terms of including a hole (not illustrated) corresponding to the lead-out portion 68 b.
这样构成的支承部件15B的电动机70通过ECU的指令而被驱动。
The electric motor 70 of the support member 15B configured in this manner is driven by a command from the ECU.
开驱动电动机70时，通过齿轮机构44而被减速，主轴34正转，第二壳体25经由旋转机构37而相对于第一壳体20进入。
When the electric motor 70 is driven for opening, the speed is reduced by the gear mechanism 44, the spindle 34 rotates forward, and the second housing 25 advances with respect to the first housing 20 via the rotation mechanism 37.
闭驱动电动机70时，通过齿轮机构44而被减速，主轴34逆转，第二壳体25经由旋转机构37而相对于第一壳体20后退。
When the electric motor 70 is driven for closing, the speed is reduced by the gear mechanism 44, the spindle 34 reversely rotates, and the second housing 25 retracts with respect to the first housing 20 via the rotation mechanism 37.
其结果，车门3相对于车体2开闭。
As a result, the door 3 is open and closed with respect to the vehicle body 2.
在通过门闩锁装置的操作而解除车门3的卡止的情况，或者通过手动关闭开位置的车门3的情况下，与支承部件15A同样地，主轴34因车门3的开闭而旋转，电动机70经由齿轮机构44而从动旋转。
When the door 3 is unlocked by the operation of the door latch device or when the door 3 at the open position is manually closed, the opening and closing of the door 3 causes the spindle 34 to rotate, and the electric motor 70 is driven to rotate via the gear mechanism 44, which is similarly to the support member 15A.
由此，电动机70成为旋转阻力，经由齿轮机构44向主轴34施加负载，可以降低主轴34的旋转速度。
As a result, the electric motor 70 form a rotational resistance, applies a load to the spindle 34 via the gear mechanism 44, and can reduce the rotational speed of the spindle 34.
因此，能够防止第二壳体25相对于第一壳体20的急剧的进退，从而可以防止车门3相对于车体2的急剧的开闭。
Since the second housing 25 can be prevented from suddenly advancing and retracting with respect to the first housing 20, the door 3 can be prevented from being suddenly open and closed with respect to the vehicle body 2.
从动式的支承部件15A和电动式的支承部件15B包括公共的第一壳体20、第二壳体25、齿轮机构44、主轴34、旋转机构37以及螺旋弹簧32。
The driven support member 15A and the electric support member 15B include the common first housing 20, second housing 25, gear mechanism 44, spindle 34, rotation mechanism 37, and coil spring 32.
而且，在第一壳体20的配置部21c，可以选择配置磁阻机构50和电动机70。
The magnetoresistive mechanism 50 and the electric motor 70 can be selectively arranged in the arrangement portion 21 cof the first housing 20.
也就是说，通过是否使用磁阻机构50及电动机62的任一方，就可以设定为能够仅支承车门3的从动式以及车门3能够自动开闭的电动式的任一方。
That is, either the driven type capable of only supporting the door 3 or the electric type capable of automatically opening and closing the door 3 can be set depending on which of the magnetoresistive mechanism 50 and the electric motor 62 is used.
从动式的支承部件15A和电动式的支承部件15B的基本构成元件是共通的，因此与使用不同的元件的情况相比较，能够降低制造成本。
Since the basic components of the driven support member 15A and the electric support member 15B are common, the manufacturing cost can be reduced as compared with a case where different components are used.
而且，两个支承部件中，在将一方作为从动式的支承部件15A、将另一方作为电动式的支承部件15B的情况下，由于它们的基本构成元件是共通的，因此在开闭控制车门3时容易进行平衡调整。
Moreover, when one of the two support members is the driven support member 15A and the other is the electric support member 15B, the basic components of the both are common, and thus, it is easy to adjust the balance at the time of controlling the opening and closing of the door 3.
更具体而言，支承部件15A、15B包括内置相同螺旋弹簧32的共通的第二壳体25，在支承部件15A、15B双方能够以大致相同的荷重保持车门3，从而能够防止车门3的变形。
More specifically, the support members 15A and 15B include the common second housing 25 having the same built-in coil spring 32, and the door 3 can be held with substantially the same load by both the support members 15A and 15B, and thus, the deformation of the door 3 can be prevented.
而且，通过将由从动式支承部件15A的磁阻机构50产生的阻力设定为与由电动式支承部件15B的电动机70的齿槽转矩产生的阻力相同，在支承部件15A、15B双方能够以大致相同的荷重保持车门3，从而可以有效地防止车门3的变形。
Moreover, the door 3 can be held with substantially the same load by both the support members 15A and 15B by setting the resistance generated by the driven support member 15A of the magnetoresistive mechanism 50 to be equal to the resistance generated by a cogging torque of the motor 70 of the electric support member 15B, and thus, the deformation of the door 3 can be effectively prevented.
此外，本发明的车辆用门支承装置10并不限定于所述实施方式的构成，可以进行各种变更。
The vehicle door support device 10 of the present invention is not limited to the configuration of the above embodiments, and various modifications can be made.
例如，如图10所示，构成磁阻机构50的磁铁55A和磁铁55B可以为六个，其数量可以根据需要而变更。
For example, as illustrated in FIG. 10, the number of magnets 55A and magnets 55B constituting the magnetoresistive mechanism 50 may be six, and the number can be changed as needed.
但是，磁铁55A和磁铁55B的数量优选设为2以上的偶数。
However, it is preferable that the number of the magnets 55A and 55B be an even number of two or more.
另外，磁铁55A和磁铁55B也可以在芯材53的周向上隔开间隔配置。
In addition, the magnet 55A and the magnet 55B may be arranged at intervals in the circumferential direction of the core material 53.
接着，如图10所示，磁阻机构50的固定部件57可以将外表面设为多边形状(图示中为六边形)，其外表面形状可以根据需要而改变。
As illustrated in FIG. 10, the fixed member 57 of the magnetoresistive mechanism 50 may have a polygonal (hexagonal shape in the drawing) outer surface, and the outer surface shape can be changed as needed.
另外，芯材53的外表面形状和磁铁55A、55B的内表面形状也可以根据需要而改变。
In addition, an outer surface shape of the core material 53 and inner surface shapes of the magnets 55A and 55B can be changed as necessary.
固定部件57通过磁性材料(磁性体)形成整体，但也可以是，至少外周部通过非磁性材料(非磁性体)形成。
The fixed member 57 is entirely formed using the magnetic material (magnetic body), but may be formed using a non-magnetic material (non-magnetic body) at least at the outer peripheral portion.
另外，磁阻机构50也可以使用电磁铁。
In addition, an electromagnet may be used for the magnetoresistive mechanism 50.
如图11所示，可以将磁阻机构50设为：固定部件57包括磁铁55A、55B，旋转部件52包括磁性体。
As illustrated in FIG. 11, the fixed member 57 may include the magnets 55A and 55B, and the rotating member 52 may include the magnetic body, in the magnetoresistive mechanism 50.
如图12所示，旋转部件52也可以构成为：通过注入成型一体地设置芯材53、轴部件54、及磁铁55A、55B。
As illustrated in FIG. 12, the rotating member 52 may be configured such that the core material 53, the shaft member 54, and the magnets 55A and 55B are integrally provided by insert-molding.
掩膜层107用于保护栅极结构106。
The mask layer 107 is used for protecting the gate structure 106.
具体的，掩膜层107的材料包括氮化硅、碳化硅、碳氮化硅、碳氮氧化硅、氮氧化硅、氮化硼和碳氮化硼中的一种或多种。
Specifically, the material of the mask layer 107 includes at least one of silicon nitride, silicon carbide, silicon carbonitride, silicon carboxynitride, silicon oxynitride, boron nitride or boron carbonitride.
所述接触孔插塞113位于所述源漏掺杂区103中，所述源漏掺杂区103覆盖所述接触孔插塞113的部分侧壁。
The contact hole plug 113 is located in the source-drain doped region 103, and the source-drain doped region 103 covers part of the sidewall of the contact hole plug 113.
所述接触孔插塞113用于实现半导体结构内器件的电连接，还用于实现半导体结构与半导体结构之间的电连接。
The contact hole plug 113 is used for realizing the electrical connection of devices in the semiconductor structure, and is also used for realizing the electrical connection between the semiconductor structure and another identical semiconductor structure.
在其他实施例中，所述接触孔插塞的材料还可以是Al、Cu、Ag或Au等。
In some implementations, the material of the contact hole plug 113 is W. In other implementations, the material of the contact hole plug may be Al, Cu, Ag, Au or the like.
接触孔插塞113形成在开口108(如图9所示)和沟槽112(如图9所示)中。
The contact hole plug 113 is formed in the opening 108 (as illustrated in FIG. 9 ) and the groove 112 (as illustrated in FIG. 9 ).
所述开口108和沟槽112是通过刻蚀层间介质层104和源漏掺杂区103形成的，在刻蚀层间介质层104和源漏掺杂区103的过程中，刻蚀产生的聚合物杂质积累在开口108或沟槽112的底部，导致底部的层间介质层104或源漏掺杂区103不易被刻蚀，进而在垂直于栅极结构106的延伸方向上，所述开口108和沟槽112顶部尺寸大于所述开口108和沟槽112底部的尺寸，所述开口108和沟槽112均呈倒梯形，相应的，所述接触孔插塞113呈倒梯形。
In the process of etching the interlayer dielectric layer 104 and the source-drain doped region 103, polymer impurities produced by etching accumulate at the bottom of the opening 108 or the groove 112, resulting in that the interlayer dielectric layer 104 or the source-drain doped region 103 at the bottom is not easily etched, further, in the extension direction perpendicular to the gate structure 106, the size of the top of each of the opening 108 and the groove 112 is larger than the size of the bottom of each of the opening 108 and the groove 112, the opening 108 and the groove 112 are in the shape of an inverted trapezoid, and correspondingly, the contact hole plug 113 is in the shape of an inverted trapezoid.
所述半导体结构还包括：介电层111，位于所述栅极结构106和层间介质层104上，且所述介电层111覆盖所述接触孔插塞113的部分侧壁。
The semiconductor structure further includes a dielectric layer 111 over the gate structure 106 and the interlayer dielectric layer 104, where the dielectric layer 111 covers part of the sidewall of the contact hole plug 113.
所述介电层111用于实现相邻器件之间的电隔离，所述介电层111的材料为绝缘材料。
The dielectric layer 111 is used for realizing electrical isolation between adjacent devices, where the material of the dielectric layer 111 is an insulating material.
第一掺杂区109的掺杂离子与源漏掺杂区103的掺杂离子类型相同，且第一掺杂区109的中掺杂离子浓度高于源漏掺杂区103的中掺杂离子浓度。
The doping ion type of the first doped region 109 is the same as the doping ion type of the source-drain doped region 103, and the ion doping concentration of the first doped region 109 is higher than the ion doping concentration of the source-drain doped region 103.
所述第一掺杂区109用于减少接触孔插塞113与源漏掺杂区103之间的接触电阻。
The first doped region 109 is used for reducing the contact resistance between the contact hole plug 113 and the source-drain doped region 103.
本实施例中，所述半导体结构为PMOS，所述第一掺杂区109的掺杂离子包括：硼、镓和铟中的一种或多种。
In some implementations, the semiconductor structure is a PMOS, and the doping ions of the first doped region 109 include one or more of boron, gallium and indium.
第一掺杂区109的离子掺杂浓度不宜过高也不宜过低。
The ion doping concentration of the first doped region 109 should not be too high or too low.
若所述离子的掺杂浓度过高，易导致形成的第一掺杂区109的离子掺杂浓度过大，所述掺杂离子易扩散至所述鳍部101中的沟道区中，在半导体结构工作时，源漏掺杂区103源极和漏极的耗尽层扩展，导致短沟道效应较严重。
If the ion doping concentration is too high, the ion doping concentration of the formed first doped region 109 is too high, and the doping ions are easy to diffuse into the channel region in the fin 101, and when the semiconductor structure works, the source and drain depletion layers of the source-drain doped region 103 are expanded, resulting in serious short-channel effects.
若所述第一掺杂区109的离子掺杂浓度过低，形成的第一掺杂区109的离子掺杂浓度较小，不易降低接触孔插塞113与源漏掺杂区103的接触电阻。
If the ion doping concentration of the first doped region 109 is too low, the ion doping concentration of the first doped region 109 is too low to reduce the contact resistance between the contact hole plug 113 and the source-drain doped region 103.
本实施例中，第一掺杂区109的掺杂浓度均为1E20原子每立方厘米至3E20原子每立方厘米。
In some implementations, the doping concentration of the first doped region 109 is 1E20 atoms per cubic centimeter to 3E20 atoms per cubic centimeter.