Precision 5000 Semiconductor Chip Fabrication System
date: label: date made
content: 1988
name: label: maker
content: Applied Materials, Inc.
notes: label: Description
content: This system for making semiconductor chips has a metal frame with a plastic window, and three metal processing chambers around a robot arm in the central metal container. There also is a monitor covered in plastic.
label: Description
content: According to documentation received with the acquisition, the object was designed for low-pressure reactive ion etching of submicron features onto bases made from diverse materials. It allowed simultaneous etching of individual wafers in multiple chambers; individual wafers could be up to 20 cm. in diameter.
label: Location
content: Currently not on view
place: label: place made
content: United States: California, Santa Clara
setName: label: See more items in
content: Medicine and Science: Computers
creditLine: label: Credit Line
content: Applied Materials, Inc.
dataSource: label: Data Source
content: National Museum of American History
identifier: label: ID Number
content: 1992.0449.01
label: catalog number
content: 1992.0449.01
label: accession number
content: 1992.0449
objectType: label: Object Name
content: semiconductor fabrication system
physicalDescription: label: Physical Description
content: manufactured (overall production method/technique)
label: Measurements
content: main portion: 190.2 cm x 103 cm x 165.5 cm; 74 7/8 in x 40 9/16 in x 65 5/32 in
label: Measurements
content: monitor: 48 cm x 34.5 cm x 44.5 cm; 18 29/32 in x 13 19/32 in x 17 17/32 in