Thin Film Processing 110388
name: label: Collection Creator
content: Integrated Circuit Engineering Corporation.
setName: label: See more items in
content: I.C.E. Integrated Circuit Collection
label: See more items in
content: I.C.E. Integrated Circuit Collection / Series 5: Information Reports / Box 2 (9)
container: label: Container
content: Box 2 (Series 5)
dataSource: label: Archival Repository
content: Archives Center, National Museum of American History
objectType: label: Type
content: Archival materials
scopecontent: label: Scope and Contents note
content: Contents: "Volume III Integrated Circuit Thin-Film Processing-A Compendium on BIPOLAR and MOS Wafer Processing"