Just contact us and we will assist you quickly and professionally with the most appropriate service solution. To ensure a smooth handling of repair/overhaul matters, please follow these 3 simple steps: 1. BEFORE sending the units, please fill in, sign, stamp and send us the "Contamination Declaration" Please prepare a separate decosheet for every device (ONE for EACH) and send by mail to the following address service@ulvac.de You will get information, where to send the unit 2. All device shall be packed safe for transport to avoid any transport damages and handled in accordance with applicable laws. For devices with vacuum inlets/outlets (e.g. vacuum pumps): These need to be professionally sealed in order to avoid any degassing. For contaminated equipment use blanking flanges, alternatively for uncontaminated product use heavy gauge tape. 3. Please make sure EACH box has the transport documents / delivery note / Contamination Declaration attached with a pouch like shown here on the outside. Documents should show serial numbers, sender, reason. 4. Send the units with all relevant document to the address given in the response mail.