Standards relevant for materials testing in cleanroom environments are ISO 14644 1:2016-06 Cleanrooms and associated controlled environments - Part 1:Classification of air cleanliness by particle concentration , ISO 14644-14 Cleanrooms and associated controlled environments - Part 14:Assessment of suitability for use of equipment by airborne particle concentration as well as guideline VDI 2083 Page 9.1 "Cleanroom technology - Compatibility with required cleanliness and surface cleanliness.