# Resonant Excitation Analysis of the Absorption Enhancement of L-Shaped Metasurfaces in Midinfrared Band

Authors: Hefa Feng
Journal: Journal of Sensors
 (2022)

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## Abstract

Surface plasmon waveguides have attracted a lot of attention in recent years due to their ability to conduct light in the subwavelength scale. A large number of metallic structures have been used as waveguides and applied in integrated photonic circuits. Among these structures, the metal-insulator-metal surface plasmon waveguide is considered to have unique advantages. Compared to other waveguide forms, it is more compact and thus easier to integrate into optical circuits. For these reasons, we investigated the transmission properties of surface plasmon waves in metal-insulator-metal waveguides and built a MIM absorber consisting of gold and dielectric. We developed an interference model for the MIM absorber and concluded that the interactions between the metal patch and the substrate are not negligible in the near field. In addition, magnetic resonance plays an equally important role in approaching uniform absorption. Absorption spectra with different structural parameters, incidence angles, and polarizations were investigated. A sharp absorption peak was also found to be caused by the Rayleigh anomaly. The study reported in this paper contributes to further understanding of the physical properties of the MIM absorber, and we expect to refine the theoretical model in the future to eliminate the bias caused by near-field coupling.


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## Body

## 1. Introduction

Surface plasmons (SPs) or surface plasmon polaritions (SPPs) [1, 2] are a special form of electromagnetic field localized at the metal-dielectric interface, which propagates along the metal surface and decays exponentially perpendicular to the interface to both sides. Due to the surface propagation properties of surface plasmon waves, SPP-based metal nanostructures are able to confine light to subwavelength scales [3]. The modulation of surface plasmon waves and thus the modulation of incident light waves can also be achieved by adjusting the metal surface structure, and this modifiability and the mutual coupling conversion nature of light wave-surface plasmon waves make it highly promising for new photonics, especially for subwavelength photonic device applications [4, 5]. The introduction of surface plasmon excitations can greatly reduce the size of photonic components and integrated optical circuits, which have promising applications in subwavelength optics [6], optical storage [7], microscopy [8], and biology [9].Plasmonic metasurfaces have been studied with great success in the infrared (IR) spectral range due to the plasmon resonance of metals in the near-IR to IR region. Various plasmonic element surface-based structures are used in the midinfrared band for a large number of applications such as photodetection [10], infrared imaging [11], and energy harvesting [12]. Among these structures, a typical structure is a periodic arrangement of metal-insulator-metal (MIM) plasmonic resonators. MIM resonators typically consist of an array of metal patches at the top and a reflector at the bottom with a dielectric filler in between. In recent years, various applications have been developed using MIM resonators in the near and midinfrared bands. MIM diodes optimized with rectifier antenna technology can be used as rectifiers for energy harvesting [13]. Optimization of metal patch shape can be used in refractive index sensors to achieve ultra-narrow-band absorption in the midinfrared band [14]. Multichannel absorption and broadband absorption can be achieved by mixing resonators of different sizes in the horizontal plane or stacking multiple layers of resonators in the vertical direction [15]. Interference theory suggests that resonant absorption of MIM resonators can be achieved by multiple reflections of incident light in the dielectric layer [16]. However, subsequent studies found that a thickness threshold exists for the spacer layer [17]. The plasmon resonance between the two metal equivalent interfaces excites resonant coupling below the threshold, leading to a significant blue shift in the resonant wavelength of the interference theory calculation results with respect to the simulation results. Because the near-field coupling depends on the structure, different structures have different thresholds. Although interference theory can be used to describe the absorption properties of the MIM element surface, few studies have examined the effect of plasmonic resonance coupling between two equivalent interfaces on the resonant excitation properties.In this study, a perfect absorber is obtained by using a MIM structure. The MIM absorber consists of an L-shaped Au patch array, a metal substrate, and a dielectric spacer layer sandwiched between them. By analyzing the deviation of the interference theory from the simulation results, it was determined that the interlayer coupling and magnetic resonance below the threshold are not negligible. This finding was verified by a further analysis which showed a close agreement between the Fabry-Perot (F-P) cavity and the simulated results obtained under the same conditions. Moreover, the variation of some geometrical parameters has a significant effect on the resonance wavelength, but the absorption always exceeds 85%.


## 2. Materials and Methods

The MIM absorber is composed of an L-shaped Au patch array, a dielectric layer, and a Au substrate, as shown in Figure1. The permittivity of metals is derived from Palik [18]. The refractive index of the dielectric between the metals is 1.57. The polarization angle of the electromagnetic wave is defined as φ, and the angle of incidence as θ. Here, φ is set to 45° to ensure the symmetry of the structure and electromagnetic waves. The period of the unit cell is P=3.2 μm. The length and width of the L-shaped Au array are w=1.7 μm and l=0.3 μm, respectively. The height of the array is h=0.1 μm, and the thickness of the dielectric layer is d=0.15 μm.Figure 1
(a) Schematic diagram. (b, c) Side views of the metal–insulator–metal (MIM) absorber.
(a)(b)(c)For periodic structures illuminated by plane waves, the following conditions should be satisfied [19, 20]:
(1)n0sinθmncosϕmn=sinθcosϕ+mλP,(2)n0sinθmnsinϕmn=sinθcosϕ+nλP,where θmn and ϕmn denote the incident angle and azimuth angle of the (m,n) diffraction order, respectively, and n0 is the refractive index of air (n0=1).To ensure the subwavelength structure, the equation for the periodP of the structure and wavelength λ can be simplified as follows:
(3)m2+n2<Pλ.In the simulations, the absorption spectra of the metasurface are calculated using a three-dimensional finite-difference time-domain (FDTD) method. Periodic boundary conditions are set in thex and y directions, and a perfectly matched layer is used in the z direction. The absorption at the metasurface can be calculated as A=1−R−T, where R is reflection and T is transmission. Since the metallic substrate can be considered as a semi-infinite space, the incident wave cannot penetrate the substrate. Therefore, the absorption can be simplified to A=1−R.


## 3. Results and Discussion

### 3.1. Ability and Limitation of the Interference Theory

According to interference theory, the total reflection of the MIM absorber can be considered as a superposition of multiple reflections between the dielectric layer and the metallic substrate [10]. As shown in Figure 2(a), we present an interference model of the MIM absorber. Our cell model does not include the metal substrate in the actual numerical simulation. In the interference theory, the Au patch is considered as a two-dimensional structure with zero thickness. Therefore, when the thickness of the patch array is close to the thickness of the dielectric layer, the application of the interference theory will lead to a large deviation. The limitations of the interference theory will be discussed in detail in the next section. The MIM absorber can be simplified to three regions: air, dielectric with two-dimensional Au patches, and substrate. We consider the case of plane wave incident from air to the Au patch array. These waves are partially reflected directly back into the air with a reflection coefficient r~12. The second part is transmitted to the dielectric with a transmission coefficient t~12. Subsequently, when the transmitted wave is irradiated into the Au substrate, it is completely reflected back into the dielectric layer. Hence, the reflection coefficient r~23=−1. The reflected plane wave also undergoes partial reflection and transmission in the dielectric layer, and the corresponding reflection and transmission coefficients are r~21 and t~21, respectively. Reflection and transmission coefficients are defined as follows:
(4)r~ij=rijeiϕij,t~ij=tijeiθij,where rij and tij are the amplitudes of the reflection and transmission coefficients, respectively, and ϕij and θij are the phase shifts of the reflection and transmission coefficients, respectively. Thus, the total reflection coefficient can be written as shown below:
(5)r~=r~12−t~12t~21r~21+exp−i2β,where β=nkd is the propagation phase in the dielectric layer and n is the refractive index of the dielectric; k is the wave number in free space, and d is the thickness of the dielectric. Because the transmission of the Au substrate is 0, the absorption can be simplified to A=1−r~2.Figure 2
(a) Interference model for the proposed MIM metasurface. (b) The amplitude and (c) the phase spectra ofr~ij and t~ij. (d) Absorption spectra obtained by interference theory and finite-difference time-domain (FDTD) simulation. Thickness of the dielectric d=300 nm. The other parameters are the same as those shown in Figure 1.
(a)(b)(c)(d)In order to validate the interference model and to be able to compare it with the simulation results, we chose a dielectric layer thicknessd=0.3 μm, as shown in Figure 2(d). In fact, an important prerequisite for applying the interference theory is that the near-field coupling between the two equivalent interfaces should be negligible. However, when the thickness of the dielectric layer is small enough, the near-field coupling has a nonnegligible effect on the resonance peak, as shown in Figure 3.Figure 3
(a) Absorption spectra calculated by the FDTD simulation. (b) Absorption spectra calculated using the interference theory. (c) Absorption and dielectric layer thickness (d) from FDTD simulations and theoretical calculations. (d) Resonance peaks and dielectric layer thickness from FDTD simulations and theoretical calculations.
(a)(b)(c)(d)We scanned the absorption spectra of the absorber at different spacer thicknesses and plotted them in Figure3(a). As in the analysis above, when the thickness of the spacer layer d<0.3 μm, the theoretical results differ significantly from the simulation results. The spacer layer thickness d should satisfy the condition d>P/2πn [21, 22]. Otherwise, the first-order evanescent wave of transmitted light will not vanish before reaching the substrate. According to our simulations, this near-field coupling only disappears when the dielectric layer thickness exceeds 0.35 μm, as shown in Figures 3(c) and 3(d).To investigate the physical origin of the resonant peak, we studied the magnetic field distribution atd=0.15 μm (Figures 4(a) and 4(b)) and d=0.5 μm (Figures 4(c) and 4(d)). Figures 4(a) and 4(c) show the magnetic field profile and the current distribution along the x-z plane at the resonant wavelength (λres) of y=750 nm for different spacer layer thicknesses. The contours show the normalized magnetic field strength, and the arrow indicates the electric field vector, representing the direction and strength of the induced conduction current. Figure 4(a) shows that highly localized magnetic field enhancement occurs within the dielectric spacer. Further analysis shows that the currents in the MIM structure form a closed loop [23]. Hence, the magnetic field in the dielectric layer is highly excited [24]. Figures 4(b) and 4(d) illustrate the magnetic field section at the center of the dielectric layer under identical conditions in the x–y plane. Apparently, the electromagnetic energy is confined in the dielectric layer between the top gold patch and the bottom gold substrate. Figure 4(c) shows the low localization enhancement of the magnetic field. Thus, near-field interactions and magnetic resonance can be neglected when the thickness of the spacer layer is large enough. In this case, the absorption at the metasurface can be attributed to the multiple reflection coupling between the two metallic layers of the structure [10]. This is also a prerequisite for the application of interference theory.Figure 4
(a) Magnetic field profile in thex–z plane at the resonant wavelength (d=150 nm). (b) Magnetic field profile in the x–y plane at the resonant wavelength (d=150 nm). (c) Magnetic field profile in the x–z plane at the resonant wavelength (d=500 nm). (d) Magnetic field profile in the x–y plane at the resonant wavelength (d=500 nm).


### 3.2. Structural Parameters

To further assess the result of structural parameters on the absorption performance, the parametersl, w, h, and P were varied sequentially, as shown in Figure 5. Figure 5(a) shows the absorption spectra of the MIM absorbent material as a function of the width of the L-shaped Au patch l. As shown in Figure 5(a), the resonant wavelength underwent stepwise red shift when l increased. Apparently, although the absorption was above 85%, near-perfect absorption was achieved only at l=300 nm. Figure 5(b) shows the absorption spectra as a function of the length w of the Au patch. Similar to Figure 5(a), the absorption peak redshifts with increasing w, and it is the maximum at w=1.7 μm. When the width of the Au patch increases, coupling also exists between adjacent patches, resulting in lower absorption. Figure 5(c) shows the absorption spectra of the MIM absorber as a function of the height of the Au patch h. As the thickness of the patch increases, the electromagnetic energy is greatly restricted within the top metal layer and cannot enter the dielectric to excite magnetic resonance. Hence, there is a reduction in the absorption rate. Figure 5(d) shows the absorption spectra of the MIM absorber with changing period of the structure P. As can be seen in Figure 5(d), the absorption is robust to variation of the period P. In summary, the structural parameters mentioned above enable maximization of the absorption.Figure 5
Absorption spectra of the MIM absorber as a function of (a) width of the Au patchl, (b) length of the Au patch w, (c) height of the Au patch h, and (d) period P. The other parameters are identical to those shown in Figure 1.
(a)(b)(c)(d)Figure6 illustrates the influence of the material of the dielectric spacer on the absorption performance of the absorber. In effect, the interference model established in Figure 2(a) can also be regarded as a F-P cavity [25]. In this study, the dielectric spacer was used as the cavity, and Au was used as the reflective coating. The resonant wavelength of the F-P cavity can be described as shown below [26]:
(6)λres=4πnd2mπ−ϕ21−ϕ23,where m is the mode number, which is a positive integer. Therefore, the resonant wavelength varies depending on the refractive index n and the thickness of the spacer layer d.Figure 6
(a) Absorption spectra of the MIM absorber as a function of the refractive index of dielectric layern. (b) Location of resonant wavelength as a function of refractive index n in FDTD results and theoretical results.
(a)(b)We chose five dielectric materials: SiO2 (n=1.35), Al2O3 (n=1.57), HfO2 (n=1.88), TiO2 (n=2.24), and Fe2O3 (n=2.59), as the spacer layers. As seen in Figure 6(a), the absorption potency often diminished because the refractive index was high, and this was accompanied by shifting of the absorption peak to the longer wavelength side. The resonant wavelength λres and refractive index n are linearly related, and the simulation results fit well with the theoretical results.


### 3.3. Polarization and Incident Angle

As shown in Figures7(a) and 7(b), the resonant wavelength is unaffected by the increase in the polarization angle, but the absorption is maximum at φ=45°. This is because the polarization direction can be vectorially decomposed into mutually perpendicular x and y components (i.e., Ex=EcosφandEy=Esinφ). When the electric field strength is constant, for φ=45°, the vector is an isosceles right triangle and, therefore, the absorption efficiency is the highest. This explains why the spectrogram in Figure 7(a) is symmetric about 45°.Figure 7
Absorption of the MIM absorber as a function of (a, b) the polarization angle and (c) incidence angle. (d) The resonant wavelengths for different incidence angles obtained from FDTD simulation and theoretical calculation.
(a)(b)(c)(d)Then, we change the angle of incidence (θ) to observe the change in the absorption spectrum. As shown in Figures 7(a) and 7(c), sharp absorption peak appears in addition to the one before our analysis. This phenomenon is caused by the Rayleigh anomaly (RA) [27, 28]. At oblique incidence, according to Equations (1) and (2), as the evanescent (−1,0) diffraction order propagates at the grazing angle, the relationship between the sharp absorption resonant wavelength λRA and the angle of incidence θ can be described as λRA=P1+sinθ. The sharp absorption peaks of the FDTD simulation match almost exactly with the theoretical peaks, as shown in Figure 7(d). Interestingly, the presence of RA reduced the absorption of magnetic resonance at the resonant wavelength λres when φ>45°.


## 3.1. Ability and Limitation of the Interference Theory

According to interference theory, the total reflection of the MIM absorber can be considered as a superposition of multiple reflections between the dielectric layer and the metallic substrate [10]. As shown in Figure 2(a), we present an interference model of the MIM absorber. Our cell model does not include the metal substrate in the actual numerical simulation. In the interference theory, the Au patch is considered as a two-dimensional structure with zero thickness. Therefore, when the thickness of the patch array is close to the thickness of the dielectric layer, the application of the interference theory will lead to a large deviation. The limitations of the interference theory will be discussed in detail in the next section. The MIM absorber can be simplified to three regions: air, dielectric with two-dimensional Au patches, and substrate. We consider the case of plane wave incident from air to the Au patch array. These waves are partially reflected directly back into the air with a reflection coefficient r~12. The second part is transmitted to the dielectric with a transmission coefficient t~12. Subsequently, when the transmitted wave is irradiated into the Au substrate, it is completely reflected back into the dielectric layer. Hence, the reflection coefficient r~23=−1. The reflected plane wave also undergoes partial reflection and transmission in the dielectric layer, and the corresponding reflection and transmission coefficients are r~21 and t~21, respectively. Reflection and transmission coefficients are defined as follows:
(4)r~ij=rijeiϕij,t~ij=tijeiθij,where rij and tij are the amplitudes of the reflection and transmission coefficients, respectively, and ϕij and θij are the phase shifts of the reflection and transmission coefficients, respectively. Thus, the total reflection coefficient can be written as shown below:
(5)r~=r~12−t~12t~21r~21+exp−i2β,where β=nkd is the propagation phase in the dielectric layer and n is the refractive index of the dielectric; k is the wave number in free space, and d is the thickness of the dielectric. Because the transmission of the Au substrate is 0, the absorption can be simplified to A=1−r~2.Figure 2
(a) Interference model for the proposed MIM metasurface. (b) The amplitude and (c) the phase spectra ofr~ij and t~ij. (d) Absorption spectra obtained by interference theory and finite-difference time-domain (FDTD) simulation. Thickness of the dielectric d=300 nm. The other parameters are the same as those shown in Figure 1.
(a)(b)(c)(d)In order to validate the interference model and to be able to compare it with the simulation results, we chose a dielectric layer thicknessd=0.3 μm, as shown in Figure 2(d). In fact, an important prerequisite for applying the interference theory is that the near-field coupling between the two equivalent interfaces should be negligible. However, when the thickness of the dielectric layer is small enough, the near-field coupling has a nonnegligible effect on the resonance peak, as shown in Figure 3.Figure 3
(a) Absorption spectra calculated by the FDTD simulation. (b) Absorption spectra calculated using the interference theory. (c) Absorption and dielectric layer thickness (d) from FDTD simulations and theoretical calculations. (d) Resonance peaks and dielectric layer thickness from FDTD simulations and theoretical calculations.
(a)(b)(c)(d)We scanned the absorption spectra of the absorber at different spacer thicknesses and plotted them in Figure3(a). As in the analysis above, when the thickness of the spacer layer d<0.3 μm, the theoretical results differ significantly from the simulation results. The spacer layer thickness d should satisfy the condition d>P/2πn [21, 22]. Otherwise, the first-order evanescent wave of transmitted light will not vanish before reaching the substrate. According to our simulations, this near-field coupling only disappears when the dielectric layer thickness exceeds 0.35 μm, as shown in Figures 3(c) and 3(d).To investigate the physical origin of the resonant peak, we studied the magnetic field distribution atd=0.15 μm (Figures 4(a) and 4(b)) and d=0.5 μm (Figures 4(c) and 4(d)). Figures 4(a) and 4(c) show the magnetic field profile and the current distribution along the x-z plane at the resonant wavelength (λres) of y=750 nm for different spacer layer thicknesses. The contours show the normalized magnetic field strength, and the arrow indicates the electric field vector, representing the direction and strength of the induced conduction current. Figure 4(a) shows that highly localized magnetic field enhancement occurs within the dielectric spacer. Further analysis shows that the currents in the MIM structure form a closed loop [23]. Hence, the magnetic field in the dielectric layer is highly excited [24]. Figures 4(b) and 4(d) illustrate the magnetic field section at the center of the dielectric layer under identical conditions in the x–y plane. Apparently, the electromagnetic energy is confined in the dielectric layer between the top gold patch and the bottom gold substrate. Figure 4(c) shows the low localization enhancement of the magnetic field. Thus, near-field interactions and magnetic resonance can be neglected when the thickness of the spacer layer is large enough. In this case, the absorption at the metasurface can be attributed to the multiple reflection coupling between the two metallic layers of the structure [10]. This is also a prerequisite for the application of interference theory.Figure 4
(a) Magnetic field profile in thex–z plane at the resonant wavelength (d=150 nm). (b) Magnetic field profile in the x–y plane at the resonant wavelength (d=150 nm). (c) Magnetic field profile in the x–z plane at the resonant wavelength (d=500 nm). (d) Magnetic field profile in the x–y plane at the resonant wavelength (d=500 nm).


## 3.2. Structural Parameters

To further assess the result of structural parameters on the absorption performance, the parametersl, w, h, and P were varied sequentially, as shown in Figure 5. Figure 5(a) shows the absorption spectra of the MIM absorbent material as a function of the width of the L-shaped Au patch l. As shown in Figure 5(a), the resonant wavelength underwent stepwise red shift when l increased. Apparently, although the absorption was above 85%, near-perfect absorption was achieved only at l=300 nm. Figure 5(b) shows the absorption spectra as a function of the length w of the Au patch. Similar to Figure 5(a), the absorption peak redshifts with increasing w, and it is the maximum at w=1.7 μm. When the width of the Au patch increases, coupling also exists between adjacent patches, resulting in lower absorption. Figure 5(c) shows the absorption spectra of the MIM absorber as a function of the height of the Au patch h. As the thickness of the patch increases, the electromagnetic energy is greatly restricted within the top metal layer and cannot enter the dielectric to excite magnetic resonance. Hence, there is a reduction in the absorption rate. Figure 5(d) shows the absorption spectra of the MIM absorber with changing period of the structure P. As can be seen in Figure 5(d), the absorption is robust to variation of the period P. In summary, the structural parameters mentioned above enable maximization of the absorption.Figure 5
Absorption spectra of the MIM absorber as a function of (a) width of the Au patchl, (b) length of the Au patch w, (c) height of the Au patch h, and (d) period P. The other parameters are identical to those shown in Figure 1.
(a)(b)(c)(d)Figure6 illustrates the influence of the material of the dielectric spacer on the absorption performance of the absorber. In effect, the interference model established in Figure 2(a) can also be regarded as a F-P cavity [25]. In this study, the dielectric spacer was used as the cavity, and Au was used as the reflective coating. The resonant wavelength of the F-P cavity can be described as shown below [26]:
(6)λres=4πnd2mπ−ϕ21−ϕ23,where m is the mode number, which is a positive integer. Therefore, the resonant wavelength varies depending on the refractive index n and the thickness of the spacer layer d.Figure 6
(a) Absorption spectra of the MIM absorber as a function of the refractive index of dielectric layern. (b) Location of resonant wavelength as a function of refractive index n in FDTD results and theoretical results.
(a)(b)We chose five dielectric materials: SiO2 (n=1.35), Al2O3 (n=1.57), HfO2 (n=1.88), TiO2 (n=2.24), and Fe2O3 (n=2.59), as the spacer layers. As seen in Figure 6(a), the absorption potency often diminished because the refractive index was high, and this was accompanied by shifting of the absorption peak to the longer wavelength side. The resonant wavelength λres and refractive index n are linearly related, and the simulation results fit well with the theoretical results.


## 3.3. Polarization and Incident Angle

As shown in Figures7(a) and 7(b), the resonant wavelength is unaffected by the increase in the polarization angle, but the absorption is maximum at φ=45°. This is because the polarization direction can be vectorially decomposed into mutually perpendicular x and y components (i.e., Ex=EcosφandEy=Esinφ). When the electric field strength is constant, for φ=45°, the vector is an isosceles right triangle and, therefore, the absorption efficiency is the highest. This explains why the spectrogram in Figure 7(a) is symmetric about 45°.Figure 7
Absorption of the MIM absorber as a function of (a, b) the polarization angle and (c) incidence angle. (d) The resonant wavelengths for different incidence angles obtained from FDTD simulation and theoretical calculation.
(a)(b)(c)(d)Then, we change the angle of incidence (θ) to observe the change in the absorption spectrum. As shown in Figures 7(a) and 7(c), sharp absorption peak appears in addition to the one before our analysis. This phenomenon is caused by the Rayleigh anomaly (RA) [27, 28]. At oblique incidence, according to Equations (1) and (2), as the evanescent (−1,0) diffraction order propagates at the grazing angle, the relationship between the sharp absorption resonant wavelength λRA and the angle of incidence θ can be described as λRA=P1+sinθ. The sharp absorption peaks of the FDTD simulation match almost exactly with the theoretical peaks, as shown in Figure 7(d). Interestingly, the presence of RA reduced the absorption of magnetic resonance at the resonant wavelength λres when φ>45°.


## 4. Conclusions

In conclusion, the resonant excitation of the MIM absorber is analyzed by using the interference theory and the magnetic resonance method. We show that the interference theory is valid only when the thickness of the dielectric spacer layer is large enough. If the thickness of the spacer layer does not satisfy this condition, then near-field coupling is generated between the upper and lower metallic layers. Meanwhile, magnetic resonance cannot be neglected because it confines the electromagnetic energy to the spacer layer, thus enhancing the absorption. The interference model proposes multiple reflections of electromagnetic waves in the spacer layer, producing destructive interference. On the contrary, from the theory of F-P cavity, the spacer layer is considered as a cavity for propagating electromagnetic waves. Therefore, unlike the interference model, the F-P cavity model takes into account the energy loss when the electromagnetic wave is incident on the metal substrate. The resonant wavelength of the MIM absorber is very sensitive to changes in the structural parameters of the gold patch; however, in most cases, the absorption rate can exceed 80%. This property can be used in the future to further develop multiple patches of different sizes to achieve broadband absorption. In the case of oblique incidence, a sharp absorption peak is generated in addition to the absorption peak discussed earlier. This sharp absorption peak is named RA, and it is expected to facilitate the use of MIM absorbers in refractive index sensors.



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*Source: 1571023-2022-08-11.xml*