MEMS or NEMS device of sensor or actuator type, provided with a stop stack comprising: - a first planar layer comprising a first planar electrode being at a first electrical potential during operation of the device and a second planar electrode being, during operation of the device, at a second electrical potential differing from the first potential, the first planar electrode being movable relative to the second planar electrode in a first direction (A) parallel to the first planar layer, - a second planar layer superimposed over the first planar layer , electrically isolated from the first planar layer by at least one intermediate layer formed of insulating material, the second planar layer comprising a first planar element mechanically attached to the first planar electrode , and a second planar element mechanically attached to the second planar electrode , - at least one stop element extending from the first planar element or from the second planar element in the first direction (A) and protruding from said planar element in the first direction (A), the stop element and the electrodes being configured so that the stop element comes into contact with the opposing surface and blocks the two planar electrodes from moving towards each other in the first direction (A) when under stress, characterized in that the stop element which extends from one of the planar elements is intended to be at the same potential as an opposing surface belonging to the other of the planar elements . - a first planar layer comprising a first planar electrode being at a first electrical potential during operation of the device and a second planar electrode being, during operation of the device, at a second electrical potential differing from the first potential, the first planar electrode being movable relative to the second planar electrode in a first direction (A) parallel to the first planar layer, - a second planar layer superimposed over the first planar layer , electrically isolated from the first planar layer by at least one intermediate layer formed of insulating material, the second planar layer comprising a first planar element mechanically attached to the first planar electrode , and a second planar element mechanically attached to the second planar electrode , - at least one stop element extending from the first planar element or from the second planar element in the first direction (A) and protruding from said planar element in the first direction (A), the stop element and the electrodes being configured so that the stop element comes into contact with the opposing surface and blocks the two planar electrodes from moving towards each other in the first direction (A) when under stress, characterized in that the stop element which extends from one of the planar elements is intended to be at the same potential as an opposing surface belonging to the other of the planar elements . extending from the first planar element or from the second planar element in the first direction (A) and protruding from said planar element in the first direction (A), the stop element and the electrodes being configured so that the stop element comes into contact with the opposing surface and blocks the two planar electrodes from moving towards each other in the first direction (A) when under stress, characterized in that the stop element which extends from one of the planar elements is intended to be at the same potential as an opposing surface belonging to the other of the planar elements . <EOS>