Method of determining crystallographic properties of a sample, the method comprising: - generating a first electron beam of electrons having a first mean kinetic energy (S1), - detecting, for each of first locations of a region of the sample, a two-dimensional spatial distribution of electrons emerging from the sample and being incident onto a detection area while directing the first electron beam onto the first locations (S2), - generating, for each of the first locations, first data representing the two-dimensional spatial distribution (S3); - generating a second electron beam of electrons having a second mean kinetic energy different from the first mean kinetic energy (S4), - detecting, for each of second locations of the region of the sample, a two-dimensional spatial distribution of electrons emerging from the sample and being incident onto the detection area while directing the second electron beam onto the second locations (S5), - generating, for each of the second locations, second data representing the two-dimensional spatial distribution (S6); and - determining the crystallographic properties for target locations of the region based on the first data of the first locations and the second data of the second locations (S7); and - generating an image representation of the crystallographic properties of the target locations, characterised in that the image representation comprises first pixels corresponding to a first set of the target locations and second pixels corresponding to a second set of the target locations, wherein values at the first pixels represent the crystallographic property and are determined based on the first data and values at the second pixels represent the crystallographic property and are determined based on the second data (S8). - generating a first electron beam of electrons having a first mean kinetic energy (S1), - detecting, for each of first locations of a region of the sample, a two-dimensional spatial distribution of electrons emerging from the sample and being incident onto a detection area while directing the first electron beam onto the first locations (S2), - generating, for each of the first locations, first data representing the two-dimensional spatial distribution (S3); - generating a second electron beam of electrons having a second mean kinetic energy different from the first mean kinetic energy (S4), - detecting, for each of second locations of the region of the sample, a two-dimensional spatial distribution of electrons emerging from the sample and being incident onto the detection area while directing the second electron beam onto the second locations (S5), - generating, for each of the second locations, second data representing the two-dimensional spatial distribution (S6); and - determining the crystallographic properties for target locations of the region based on the first data of the first locations and the second data of the second locations (S7); and - generating an image representation of the crystallographic properties of the target locations, characterised in that the image representation comprises first pixels corresponding to a first set of the target locations and second pixels corresponding to a second set of the target locations, <EOS>