A platform apparatus for post exposure processing, comprising: a factory interface ; a plumbing module ; and a process module disposed between the factory interface and the plumbing module, wherein the process module comprises: a central region having a robot disposed therein; and a plurality of process stations disposed about the central region, whereby each process station includes a process chamber and a post process chamber in a stacked arrangement, wherein the process chamber comprises: a chamber body defining a process volume, wherein a major axis of the process volume is oriented vertically and a minor axis of the process volume is oriented horizontally; a moveable door coupled to the chamber body; a first electrode coupled to the door, the first electrode configured to support a substrate thereon; a second electrode at least partially defining the process volume; a first plurality of fluid ports formed in a sidewall of the chamber body adjacent the process volume; a second plurality of fluid ports formed in the sidewall of the chamber body adjacent the process volume opposite the first plurality of fluid ports. a factory interface ; a plumbing module ; and a process module disposed between the factory interface and the plumbing module, wherein the process module comprises: a central region having a robot disposed therein; and a plurality of process stations disposed about the central region, whereby each process station includes a process chamber and a post process chamber in a stacked arrangement, wherein the process chamber comprises: a chamber body defining a process volume, wherein a major axis of the process volume is oriented vertically and a minor axis of the process volume is oriented horizontally; a moveable door coupled to the chamber body; a first electrode coupled to the door, the first electrode configured to support a substrate thereon; a second electrode at least partially defining the process volume; a first plurality of fluid ports formed in a sidewall of the chamber body adjacent the process volume; a second plurality of fluid ports formed in the sidewall of the chamber body adjacent the process volume opposite the first plurality of fluid ports. a central region having a robot disposed therein; and a plurality of process stations disposed about the central region, whereby each process station includes a process chamber and a post process chamber in a stacked arrangement, wherein the process chamber comprises: a chamber body defining a process volume, wherein a major axis of the process volume is oriented vertically and a minor axis of the process volume is oriented horizontally; a moveable door coupled to the chamber body; a first electrode coupled to the door, the first electrode configured to support a substrate thereon; a second electrode at least partially defining the process volume; a first plurality of fluid ports formed in a sidewall of the chamber body adjacent the process volume; a second plurality of fluid ports formed in the sidewall of the chamber body adjacent the process volume opposite the first plurality of fluid ports. a chamber body defining a process volume, wherein a major axis of the process volume is oriented vertically and a minor axis of the process volume is oriented horizontally; a moveable door coupled to the chamber body; a first electrode coupled to the door, the first electrode configured to support a substrate thereon; a second electrode at least partially defining the process volume; a first plurality of fluid ports formed in a sidewall of the chamber body adjacent the process volume; a second plurality of fluid ports formed in the sidewall of the chamber body adjacent the process volume opposite the first plurality of fluid ports. <EOS>