A triaxial accelerometer, characterized in that the triaxial accelerometer comprises two structurally symmetric inertial measurements modules, and comprises a connecting beam for connecting the mass blocks in the two inertial measurements modules, wherein each one of the two inertial measurement modules, comprises: a substrate; a first pole piece , as a lower electrode, located on the substrate; a mass block suspended above the substrate, an upper electrode for forming a Z-axis detection capacitor with the first pole piece being arranged on the mass block , the mass block is further provided with a first movable electrode and a second movable electrode in the Y-axis and X-axis directions, respectively; and the substrate is provided with a first fixed electrode configured to form a Y-axis detection capacitor with the first movable electrode , and a second fixed electrode configured to form an X-axis detection capacitor with the second movable electrode ; and elastic beams configured to connect the substrate with the mass block ; the elastic beams comprise a first elastic beam located in the X-axis direction and a second elastic beam located in the Y-axis direction and fixed together with the first elastic beam in a crossed manner; two ends of the second elastic beam are connected with anchor points on the substrate and two ends of the first elastic beam are connected with the mass block , or the two ends of the first elastic beam are connected with the anchor points on the substrate and the two ends of the second elastic beam are connected with the mass block ; the center(s) of the first elastic beam and/or the second elastic beam are/is deviated from the gravity center of the mass block ; wherein there is one first elastic beam located on the center line in the X-axis direction of the mass block , and the second elastic beam is deviated from the center line in the Y-axis direction of the mass block ; or there are two first elastic beams symmetrically distributed along the center line in the X-axis direction of the mass block , and the second elastic beams are deviated from the center line in the Y-axis direction of the mass block . a substrate; a first pole piece , as a lower electrode, located on the substrate; a mass block suspended above the substrate, an upper electrode for forming a Z-axis detection capacitor with the first pole piece being arranged on the mass block , the mass block is further provided with a first movable electrode and a second movable electrode in the Y-axis and X-axis directions, respectively; and the substrate is provided with a first fixed electrode configured to form a Y-axis detection capacitor with the first movable electrode , and a second fixed electrode configured to form an X-axis detection capacitor with the second movable electrode ; and elastic beams configured to connect the substrate with the mass block ; the elastic beams comprise a first elastic beam located in the X-axis direction and a second elastic beam located in the Y-axis direction and fixed together with the first elastic beam in a crossed manner; two ends of the second elastic beam are connected with anchor points on the substrate and two ends of the first elastic beam are connected with the mass block , or the two ends of the first elastic beam are connected with the anchor points on the substrate and the two ends of the second elastic beam are connected with the mass block ; the center(s) of the first elastic beam and/or the second elastic beam are/is deviated from the gravity center of the mass block ; <EOS>