A radio frequency (RF) generation module , comprising: a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state; a frequency control module that receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints; and a pulse shaping module that receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and that transitions an output signal from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication; characterised in that: the input power setpoints include a first power setpoint corresponding to the first state, a second power setpoint corresponding to the second state, and at least one of a step size, a number of steps, a step time, and a ramp time for transitioning between the first power setpoint and the second power setpoint; and the frequency setpoints include a first frequency setpoint corresponding to the first state, a second frequency setpoint corresponding to the second state, and at least one of a step size, a number of steps, a step time, and a ramp time for transitioning between the first frequency setpoint and the second frequency setpoint. a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state; a frequency control module that receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints; and a pulse shaping module that receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and that transitions an output signal from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication; characterised in that: the input power setpoints include a first power setpoint corresponding to the first state, a second power setpoint corresponding to the second state, and at least one of a step size, a number of steps, a step time, and a ramp time for transitioning between the first power setpoint and the second power setpoint; and the frequency setpoints include a first frequency setpoint corresponding to the first state, a second frequency setpoint corresponding to the second state, and at least one of a step size, a number of steps, a step time, and a ramp time for transitioning between the first frequency setpoint and the second frequency setpoint. the input power setpoints include a first power setpoint corresponding to the first state, a second power setpoint corresponding to the second state, and at least one of a step size, a number of steps, a step time, and a ramp time for transitioning between the first power setpoint and the second power setpoint; and the frequency setpoints include a first frequency setpoint corresponding to the first state, a second frequency setpoint corresponding to the second state, and at least one of a step size, a number of steps, a step time, and a ramp time for transitioning between the first frequency setpoint and the second frequency setpoint. <EOS>