A piezoelectric element comprising: a substrate having a plurality of openings penetrating therethrough and wall portions provided between the plurality of openings ; a thin film provided on the substrate , the thin film having a first region closing one of the openings of the substrate and a second region on one of the wall portions of the substrate ; and a piezoelectric film provided on the thin film in the first region and the second region thereof, wherein a film thickness (t2) of the piezoelectric film provided on the thin film in the second region thereof is smaller than a film thickness (t1) of the piezoelectric film provided on the thin film in the first region thereof, the piezoelectric element further comprising: a first electrode provided between the piezoelectric film and the thin film , from the first region to the second region of the thin film ; and a second electrode provided on the piezoelectric film , wherein a part of the second electrode located in the second region of the thin film does not overlap with the first electrode in a plan view from a thickness direction of the thin film , characterized in that the piezoelectric film on the second region of the thin film includes a recess portion in which a region of the piezoelectric film overlapping with the first electrode is a bottom section of the recess portion in the plan view from the thickness direction of the thin film , and an area of the bottom section is larger than an area of the first electrode on the second region of the thin film . a substrate having a plurality of openings penetrating therethrough and wall portions provided between the plurality of openings ; a thin film provided on the substrate , the thin film having a first region closing one of the openings of the substrate and a second region on one of the wall portions of the substrate ; and a piezoelectric film provided on the thin film in the first region and the second region thereof, wherein a film thickness (t2) of the piezoelectric film provided on the thin film in the second region thereof is smaller than a film thickness (t1) of the piezoelectric film provided on the thin film in the first region thereof, the piezoelectric element further comprising: a first electrode provided between the piezoelectric film and the thin film , from the first region to the second region of the thin film ; and a second electrode provided on the piezoelectric film , a first electrode provided between the piezoelectric film and the thin film , from the first region to the second region of the thin film ; and a second electrode provided on the piezoelectric film , wherein a part of the second electrode located in the second region of the thin film does not overlap with the first electrode in a plan view from a thickness direction of the thin film , characterized in that the piezoelectric film on the second region of the thin film includes a recess portion in which a region of the piezoelectric film overlapping with the first electrode is a bottom section of the recess portion in the plan view from the thickness direction of the thin film , and an area of the bottom section is larger than an area of the first electrode on the second region of the thin film . <EOS>