A photosensitive resin composition comprising (A) a silicone resin containing an epoxy and/or phenolic hydroxyl group, (B) a photoacid generator, and (C) at least one cure promoter selected from diazabicycloundecene, diazabicyclononene, an organic salt having a diazabicycloundecene derivative as a cation species, and an organic salt having a diazabicyclononene derivative as a cation species, wherein the silicone resin (A) comprises recurring units having the formulae (a1) to (a4) and (b1) to (b4): wherein R 1 to R 4 are each independently a C 1 -C 8 monovalent hydrocarbon group, m is an integer of 1 to 600, a 1 to a 4 and b 1 to b 4 are numbers in the range: 0 ≤ a 1 < 1, 0 ≤ a 2 < 1, 0 ≤ a' < 1, 0 ≤ a 4 < 1, 0 ≤ b 1 < 1, 0 ≤ b 2 < 1, 0 ≤ b 3 < 1, 0 ≤ b 4 < 1, 0 < a 1 +a 2 +a 3 < 1, 0 < b 1 +b 2 +b 3 < 1, and a 1 +a 2 +a 3 +a 4 +b 1 +b 2 +b 3 +b 4 =1, X 1 is a divalent group having the formula (X1): wherein Y 1 is a single bond, methylene, propane-2,2-diyl, 1,1,1,3,3,3-hexafluoropropane-2,2-diyl or fluorene-9,9-diyl, R 11 and R 12 are each independently hydrogen or methyl, R 13 and R 14 are each independently C 1 -C 4 alkyl or C 1 -C 4 alkoxy, p 1 and p 2 are each independently an integer of 0 to 7, q 1 and q 2 are each independently an integer of 0 to 2, X 2 is a divalent group having the formula (X2): wherein Y 2 is a single bond, methylene, propane-2,2-diyl, 1,1,1,3,3,3-hexafluoropropane-2,2-diyl or fluorene-9,9-diyl, R 21 and R 22 are each independently hydrogen or methyl, R 23 and R 24 are each independently C 1 -C 4 alkyl or C 1 -C 4 alkoxy, r 1 and r 2 are each independently an integer of 0 to 7, s 1 and s 2 are each independently an integer of 0 to 2, X 3 is a divalent group having the formula (X3): wherein R 31 and R 32 are each independently hydrogen or methyl, t 1 and t 2 are each independently an integer of 0 to 7, X 4 is a divalent group having the formula (X4): wherein R 41 and R 42 are each independently hydrogen or methyl, R 43 and R 44 are each independently a C 1 -C 8 monovalent hydrocarbon group, u 1 and u 2 are each independently an integer of 0 to 7, v is an integer of 0 to 600. X 1 is a divalent group having the formula (X1): wherein Y 1 is a single bond, methylene, propane-2,2-diyl, 1,1,1,3,3,3-hexafluoropropane-2,2-diyl or fluorene-9,9-diyl, R 11 and R 12 are each independently hydrogen or methyl, R 13 and R 14 are each independently C 1 -C 4 alkyl or C 1 -C 4 alkoxy, p 1 and p 2 are each independently an integer of 0 to 7, q 1 and q 2 are each independently an integer of 0 to 2, X 2 is a divalent group having the formula (X2): wherein Y 2 is a single bond, methylene, propane-2,2-diyl, 1,1,1,3,3,3-hexafluoropropane-2,2-diyl or fluorene-9,9-diyl, R 21 and R 22 are each independently hydrogen or methyl, R 23 and R 24 are each independently C 1 -C 4 alkyl or C 1 -C 4 alkoxy, r 1 and r 2 are each independently an integer of 0 to 7, s 1 and s 2 are each independently an integer of 0 to 2, X 3 is a divalent group having the formula (X3): wherein R 31 and R 32 are each independently hydrogen or methyl, t 1 and t 2 are each independently an integer of 0 to 7, X 4 is a divalent group having the formula (X4): wherein R 41 and R 42 are each independently hydrogen or methyl, R 43 and R 44 are each independently a C 1 -C 8 monovalent hydrocarbon group, u 1 and u 2 are each independently an integer of 0 to 7, v is an integer of 0 to 600. <EOS>