A filter cleaning device comprising a mesh electrode group having at least one mesh electrode pair composed of a pair of mesh electrodes (200-1, 200-2, 200-3) disposed so as to sandwich at least two of the plurality of regions inside a filter that captures particles or molecules; an energization unit capable of selectively applying a voltage between facing electrode regions of the pair of mesh electrodes; a measuring unit that measures a current flowing in each of the plurality of regions of the filter or an electrical resistance of the region when the energization unit performs first energization of applying a voltage between all the electrode regions of the mesh electrode pair; and a determining unit (30-1) that determines a contaminated region from the plurality of regions of the filter; and an energization control unit (30-2) that supplies energy for reducing a contamination level to some of the plurality of regions determined as the contaminated region; wherein the energization unit performs second energization of applying a voltage between the electrode regions corresponding to the region determined as the contaminated region by the determining unit among all the electrode regions of the mesh electrode pair, and wherein, either the voltage applied between the electrode regions corresponding to the contaminated region during the second energization is larger and an application time of the voltage is not shorter than those during the first energization, or the voltage applied between the electrode regions corresponding to the contaminated region during the second energization is not smaller and an application time of the voltage is longer than those during the first energization. a mesh electrode group having at least one mesh electrode pair composed of a pair of mesh electrodes (200-1, 200-2, 200-3) disposed so as to sandwich at least two of the plurality of regions inside a filter that captures particles or molecules; an energization unit capable of selectively applying a voltage between facing electrode regions of the pair of mesh electrodes; a measuring unit that measures a current flowing in each of the plurality of regions of the filter or an electrical resistance of the region when the energization unit performs first energization of applying a voltage between all the electrode regions of the mesh electrode pair; and a determining unit (30-1) that determines a contaminated region from the plurality of regions of the filter; and an energization control unit (30-2) that supplies energy for reducing a contamination level to some of the plurality of regions determined as the contaminated region; wherein the energization unit performs second energization of applying a voltage between the electrode regions corresponding to the region determined as the contaminated region by the determining unit among all the electrode regions of the mesh electrode pair, and wherein, either the voltage applied between the electrode regions corresponding to the contaminated region during the second energization is larger and an application time of the voltage is not shorter than those during the first energization, or the voltage applied between the electrode regions corresponding to the contaminated region during the second energization is not smaller and an application time of the voltage is longer than those during the first energization. the voltage applied between the electrode regions corresponding to the contaminated region during the second energization is larger and an application time of the voltage is not shorter than those during the first energization, or the voltage applied between the electrode regions corresponding to the contaminated region during the second energization is not smaller and an application time of the voltage is longer than those during the first energization. <EOS>