An angular rate sensor comprising: a substrate ; a sense system (159a; 159b; 160) comprising: a rotating structure 150a; 150b; coupled to the substrate; and first and second transducers (106a-b; 151a-b) for detecting a rotation of the rotating structure, wherein the first transducer (106a-b) is responsive to the rotational oscillation of the rotating structure during a drive mode, and the second transducer which is responsive to angular velocity of the angular rate sensor; and a drive system (110; 110a, 110b) comprising: a drive mass (130; 130a, 130b) coupled to the substrate; and an actuator (109; 109a, 109b) coupled to the drive mass, the actuator driving the drive mass moving in a direction parallel to the substrate in a first direction; and a flexible element (131; 131a, 131b) coupling the drive system to the sense system, wherein the actuator in the drive system is coupled to the rotating structure in the sense system via the drive mass for driving the rotating structure into rotational oscillation around a first axis normal to the substrate. a substrate ; a sense system (159a; 159b; 160) comprising: a rotating structure 150a; 150b; coupled to the substrate; and first and second transducers (106a-b; 151a-b) for detecting a rotation of the rotating structure, wherein the first transducer (106a-b) is responsive to the rotational oscillation of the rotating structure during a drive mode, and the second transducer which is responsive to angular velocity of the angular rate sensor; and a rotating structure 150a; 150b; coupled to the substrate; and first and second transducers (106a-b; 151a-b) for detecting a rotation of the rotating structure, wherein the first transducer (106a-b) is responsive to the rotational oscillation of the rotating structure during a drive mode, and the second transducer which is responsive to angular velocity of the angular rate sensor; and the first transducer (106a-b) is responsive to the rotational oscillation of the rotating structure during a drive mode, and the second transducer which is responsive to angular velocity of the angular rate sensor; and a drive system (110; 110a, 110b) comprising: a drive mass (130; 130a, 130b) coupled to the substrate; and an actuator (109; 109a, 109b) coupled to the drive mass, the actuator driving the drive mass moving in a direction parallel to the substrate in a first direction; and a flexible element (131; 131a, 131b) coupling the drive system to the sense system, wherein the actuator in the drive system is coupled to the rotating structure in the sense system via the drive mass for driving the rotating structure into rotational oscillation around a first axis normal to the substrate. a drive mass (130; 130a, 130b) coupled to the substrate; and an actuator (109; 109a, 109b) coupled to the drive mass, the actuator driving the drive mass moving in a direction parallel to the substrate in a first direction; and a flexible element (131; 131a, 131b) coupling the drive system to the sense system, wherein the actuator in the drive system is coupled to the rotating structure in the sense system via the drive mass for driving the rotating structure into rotational oscillation around a first axis normal to the substrate. <EOS>