A conveyance method comprising: conveying and loading a target object held by an end section of a robot to a specified target position, the end section of the robot being able to move in a first direction (X, Y) and a second direction (Z); acquiring a first target position that is a target position in the first direction (X, Y), and a second target position that is a target position in the second direction (Z), as the specified target positions; performing first direction movement control on the robot such that the position of the robot in the first direction (X, Y) matches the first target position; measuring or predicting a vibration waveform of the end section in the first direction (X, Y) after performing first direction movement control; and performing second direction movement control to load the target object by controlling the robot such that the position of the end section in the second direction (Z) matches the second target position at a specified timing during vibration, based on the measured or predicted vibration waveform of the end section in the first direction (X, Y) characterized in that: the first direction movement control controls the robot such that after the target position in the first direction (X, Y) is reached, the position of the end section in the first direction (X, Y) matches a position deviated from the first target position by the amplitude of the vibration waveform that was predicted or measured, and the second direction movement control controls the robot such that the position of the end section in the second direction (Z) matches the second target position when the displacement of the end section in the first direction (X, Y) becomes an antinode of the vibration waveform at the specified timing during vibration. conveying and loading a target object held by an end section of a robot to a specified target position, the end section of the robot being able to move in a first direction (X, Y) and a second direction (Z); acquiring a first target position that is a target position in the first direction (X, Y), and a second target position that is a target position in the second direction (Z), as the specified target positions; performing first direction movement control on the robot such that the position of the robot in the first direction (X, Y) matches the first target position; measuring or predicting a vibration waveform of the end section in the first direction (X, Y) after performing first direction movement control; and performing second direction movement control to load the target object by controlling the robot such that the position of the end section in the second direction (Z) matches the second target position at a specified timing during vibration, based on the measured or predicted vibration waveform of the end section in the first direction (X, Y) the first direction movement control controls the robot such that after the target position in the first direction (X, Y) is reached, the position of the end section in the first direction (X, Y) matches a position deviated from the first target position by the amplitude of the vibration waveform that was predicted or measured, and the second direction movement control controls the robot such that the position of the end section in the second direction (Z) matches the second target position when the displacement of the end section in the first direction (X, Y) becomes an antinode of the vibration waveform at the specified timing during vibration. <EOS>