An optical probe system for measuring physical and geometrical data from an object comprising: a light source configured to generate light emission over a wavelength range; a measurement probe configured to deliver a portion of the light emission from the light source as an optical beam to measure the object , and collect the light from the object , the measurement probe having a beam focusing control mechanism ; a reference light generator configured to receive a portion of the light emission from the light source to generate a reference light, the reference light generator having an optical path with adjustable optical delay; an optical interferometer configured to receive the light from the object collected by the measurement probe and the reference light, and generate interference fringe signals recorded by a detection system ; a signal processor configured to process the interference fringe signals to obtain an optical delay difference between the light from the object and the reference light, and to obtain an approximate height of the object in low resolution mode; a first control loop configured to control the optical beam focusing conditions in the measurement probe based on the optical delay difference and the height of the object obtained by the signal processor , causing the optical beam to be focused on the object by the beam focusing control mechanism ; and a second control loop configured to control the adjustment of optical delay in the reference light generator based on the approximate height of the object obtained by the signal processor , and the optical delay is adjusted to change an electronic frequency of the detected interference fringe signals to be within an optimal electronic frequency detection range of the detection system, and for the signal processor to process the optimized interference fringe signals to obtain the height of the object in high resolution mode with improved accuracy. a light source configured to generate light emission over a wavelength range; a measurement probe configured to deliver a portion of the light emission from the light source as an optical beam to measure the object , and collect the light from the object , the measurement probe having a beam focusing control mechanism ; a reference light generator configured to receive a portion of the light emission from the light source to generate a reference light, the reference light generator having an optical path with adjustable optical delay; an optical interferometer configured to receive the light from the object collected by the measurement probe and the reference light, and generate interference fringe signals recorded by a detection system ; a signal processor configured to process the interference fringe signals to obtain an optical delay difference between the light from the object and the reference light, and to obtain an approximate height of the object in low resolution mode; a first control loop configured to control the optical beam focusing conditions in the measurement probe based on the optical delay difference and the height of the object obtained by the signal processor , causing the optical beam to be focused on the object by the beam focusing control mechanism ; and a second control loop configured to control the adjustment of optical delay in the reference light generator based on the approximate height of the object obtained by the signal processor , and the optical delay is adjusted to change an electronic frequency of the detected interference fringe signals to be within an optimal electronic frequency detection range of the detection system, and for the signal processor to process the optimized interference fringe signals to obtain the height of the object in high resolution mode with improved accuracy. <EOS>