A control method of a test device , the test device comprising a chuck on which an object to be tested is mounted, a tester configured to supply electric power to the object to be tested to test the object to be tested, and a controller configured to control a temperature of the chuck , characterized in that the control method comprising: when a signal inputted to the controller indicates that an actual temperature of the object to be tested cannot be fed back, by using the controller , estimating a heat amount generated by the object to be tested based on information on the electric power supplied to the object to be tested and estimating a temperature difference between the temperature of the chuck and the temperature of the object to be tested on the basis of the estimated heat amount generated by the object to be tested; correcting a target temperature of the chuck on the basis of a target temperature of the object to be tested and the temperature difference; and controlling the temperature of the chuck on the basis of the corrected target temperature of the chuck and an actual temperature of the chuck , and when a signal inputted to the controller indicates that the actual temperature of the object to be tested can be fed back, by using the controller , calculating the temperature difference between the temperature of the chuck and the temperature of the object to be tested based on the actual temperature of the object to be tested and the actual temperature of the chuck ; correcting the target temperature of the chuck based on the target temperature of the object to be tested and the temperature difference; and controlling the temperature of the chuck based on the corrected target temperature of the chuck and the actual temperature of the chuck . when a signal inputted to the controller indicates that an actual temperature of the object to be tested cannot be fed back, by using the controller , estimating a heat amount generated by the object to be tested based on information on the electric power supplied to the object to be tested and estimating a temperature difference between the temperature of the chuck and the temperature of the object to be tested on the basis of the estimated heat amount generated by the object to be tested; correcting a target temperature of the chuck on the basis of a target temperature of the object to be tested and the temperature difference; and controlling the temperature of the chuck on the basis of the corrected target temperature of the chuck and an actual temperature of the chuck , and when a signal inputted to the controller indicates that the actual temperature of the object to be tested can be fed back, by using the controller , calculating the temperature difference between the temperature of the chuck and the temperature of the object to be tested based on the actual temperature of the object to be tested and the actual temperature of the chuck ; correcting the target temperature of the chuck based on the target temperature of the object to be tested and the temperature difference; and controlling the temperature of the chuck based on the corrected target temperature of the chuck and the actual temperature of the chuck . calculating the temperature difference between the temperature of the chuck and the temperature of the object to be tested based on the actual temperature of the object to be tested and the actual temperature of the chuck ; correcting the target temperature of the chuck based on the target temperature of the object to be tested and the temperature difference; and controlling the temperature of the chuck based on the corrected target temperature of the chuck and the actual temperature of the chuck . <EOS>