A chip, comprising: a base , wherein a through hole penetrating through the base is provided in the base , and a conductive column is provided in the through hole ; a first surface of the base is provided with a first annular groove which surrounds the conductive column ; and a first isolator is provided in the first annular groove , and a first air gap extending along a circumferential direction of the first annular groove is formed in the first isolator ; wherein the first surface of the base is further provided with a second annular groove and a third annular groove ; the second annular groove is provided around outside of the first annular groove , and a second isolator is filled in the second annular groove ; and the third annular groove is provided around outside of the second annular groove , and a third isolator is filled in the third annular groove ; wherein the first annular groove , the second annular groove , and the third annular groove are arranged at equal distances, or, a distance between the first annular groove and the second annular groove is greater than a distance between the second annular groove and the third annular groove ; wherein a second air gap extending along a circumferential direction of the second annular groove is formed in the second isolator ; and a third air gap extending along a circumferential direction of the third annular groove is formed in the third isolator ; characterized in that , a width of the first annular groove is greater than a width of the second annular groove and a width of the third annular groove along a radial direction of the through hole ; wherein when taking a plane perpendicular to a center line of the through hole as a cross section, the cross section of each of the first annular groove , the second annular groove and the third annular groove is in a shape of a regular polygon with eight or more sides. a first surface of the base is provided with a first annular groove which surrounds the conductive column ; and a first isolator is provided in the first annular groove , and a first air gap extending along a circumferential direction of the first annular groove is formed in the first isolator ; wherein the first surface of the base is further provided with a second annular groove and a third annular groove ; the second annular groove is provided around outside of the first annular groove , and a second isolator is filled in the second annular groove ; and the third annular groove is provided around outside of the second annular groove , and a third isolator is filled in the third annular groove ; wherein the first annular groove , the second annular groove , and the third annular groove are arranged at equal distances, or, a distance between the first annular groove and the second annular groove is greater than a distance between the second annular groove and the third annular groove ; wherein a second air gap extending along a circumferential direction of the second annular groove is formed in the second isolator ; and a third air gap extending along a circumferential direction of the third annular groove is formed in the third isolator ; characterized in that , a width of the first annular groove is greater than a width of the second annular groove and a width of the third annular groove along a radial direction of the through hole ; wherein when taking a plane perpendicular to a center line of the through hole as a cross section, the cross section of each of the first annular groove , the second annular groove and the third annular groove is in a shape of a regular polygon with eight or more sides. <EOS>