A computer-implemented method of analyzing a shape of a wafer (W), the method comprising: acquiring a sectional image showing a wafer (W) to be analyzed ; finding a series of coordinates of a surface contour of the wafer (W) in the sectional image ; and obtaining shape analysis data including information on a shape of the wafer (W) using the series of coordinates , wherein the finding of the series of coordinates of the surface contour comprises: obtaining a luminance of each pixel in the sectional image ; obtaining luminance differences between adjacent pixels ; determining temporary contour pixels using the luminance differences ; determining whether modification of a temporary surface contour formed by the determined temporary contour pixels is required, wherein the temporary contour pixels are re-determined by proceeding to the step of determining the temporary contour pixels when the modification of the temporary surface contour is required (34; 35); determining an array of the temporary contour pixels as the series of coordinates of the surface contour when the modification of the temporary surface contour is not required ; and converting the series of coordinates of the surface contour into a series of coordinates having a form of Cartesian coordinates , wherein the shape analysis data is obtained by using the converted series of coordinates . acquiring a sectional image showing a wafer (W) to be analyzed ; finding a series of coordinates of a surface contour of the wafer (W) in the sectional image ; and obtaining shape analysis data including information on a shape of the wafer (W) using the series of coordinates , wherein the finding of the series of coordinates of the surface contour comprises: obtaining a luminance of each pixel in the sectional image ; obtaining luminance differences between adjacent pixels ; determining temporary contour pixels using the luminance differences ; determining whether modification of a temporary surface contour formed by the determined temporary contour pixels is required, wherein the temporary contour pixels are re-determined by proceeding to the step of determining the temporary contour pixels when the modification of the temporary surface contour is required (34; 35); determining an array of the temporary contour pixels as the series of coordinates of the surface contour when the modification of the temporary surface contour is not required ; and converting the series of coordinates of the surface contour into a series of coordinates having a form of Cartesian coordinates , obtaining a luminance of each pixel in the sectional image ; obtaining luminance differences between adjacent pixels ; determining temporary contour pixels using the luminance differences ; determining whether modification of a temporary surface contour formed by the determined temporary contour pixels is required, wherein the temporary contour pixels are re-determined by proceeding to the step of determining the temporary contour pixels when the modification of the temporary surface contour is required (34; 35); determining an array of the temporary contour pixels as the series of coordinates of the surface contour when the modification of the temporary surface contour is not required ; and converting the series of coordinates of the surface contour into a series of coordinates having a form of Cartesian coordinates , wherein the shape analysis data is obtained by using the converted series of coordinates . <EOS>