Method for producing an electrically tunable Fabry-Perot interferometer, wherein - a substrate is provided, - a first mirror structure (101-105, 108) is provided on the substrate, - a second, movable mirror structure (113, 116-120) is provided, whereby the first and second mirror structures comprise first and second mirrors which are substantially parallel, - a Fabry-Perot cavity is provided between the first and second mirrors, whereby providing the cavity comprises providing a sacrificial layer by using polymer material being applied as the sacrificial layer , on the first mirror structure, and part of the sacrificial layer is removed after providing the second mirror structure, - providing electrodes for electrical control of the distance between the mirrors, - a support is provided to a second, movable mirror by the part of the polymer layer that is not removed from the edges of the polymer layer, so that the remaining polymer layer between the edges of the second, movable mirror and the first mirror serves as the support, characterised in that one of the electrodes , is formed as an electrically floating electrode and is an electrode of one of the first and second mirrors , wherein there is provided a first contact and a first electrode , wherein the first contact is lead to the first electrode , the first electrode forming a fixed capacitance with the floating electrode of the one mirror, wherein there is provided a second contact and a second electrode , wherein the second contact is lead to the second electrode of the other of the first and second mirrors, forming a control capacitance between the second electrode and the floating electrode , such that the fixed capacitance and the control capacitance are connected in series and such that a voltage between the second electrode and the floating electrode determines the distance between the first and second mirrors , the voltage being controllable by controlling the amplitude of an AC signal applied between the first and second contacts . - a substrate is provided, - a first mirror structure (101-105, 108) is provided on the substrate, - a second, movable mirror structure (113, 116-120) is provided, whereby the first and second mirror structures comprise first and second mirrors which are substantially parallel, - a Fabry-Perot cavity is provided between the first and second mirrors, whereby providing the cavity comprises providing a sacrificial layer by using polymer material being applied as the sacrificial layer , on the first mirror structure, and part of the sacrificial layer is removed after providing the second mirror structure, - providing electrodes for electrical control of the distance between the mirrors, - a support is provided to a second, movable mirror by the part of the polymer layer that is not removed from the edges of the polymer layer, so that the remaining polymer layer between the edges of the second, movable mirror and the first mirror serves as the support, characterised in that one of the electrodes , is formed as an electrically floating electrode and is an electrode of one of the first and second mirrors , wherein there is provided a first contact and a first electrode , wherein the first contact is lead to the first electrode , the first electrode forming a fixed capacitance with the floating electrode of the one mirror, wherein there is provided a second contact and a second electrode , wherein the second contact is lead to the second electrode of the other of the first and second mirrors, forming a control capacitance between the second electrode and the floating electrode , such that the fixed capacitance and the control capacitance are connected in series and such that a voltage between the second electrode and the floating electrode determines the distance between the first and second mirrors , the voltage being controllable by controlling the amplitude of an AC signal applied between the first and second contacts . <EOS>