Illumination optical unit for projection lithography for illuminating an illumination field with illumination light of a primary light source - having at least one raster arrangement having raster elements arranged in raster rows and raster columns, said raster elements influencing the illumination light for predefining a shape of the illumination field , - having a transfer optical unit for the superimposing transfer of the illumination light from the raster elements towards the illumination field , in which an object displaceable in an object displacement direction (y) is arrangeable, - having an illumination angle variation device (14, 14'; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113), which deflects the illumination light incident on the illumination angle variation device (14; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113) in a deflection plane (xz) perpendicular to the object displacement direction (y) in a spatially dependent manner with different deflection angles, - wherein the illumination angle variation device (14, 14'; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113) has at least: -- one illumination angle variation unit (14b, 14b'; 34b; 45, 46; 51; 64, 65; 73, 74; 76, 77; 89; 96; 99; 106; 112; 116; 117), displaceable overall relative to the raster arrangement , for generating a deflection angle for the illumination light in the deflection plane (xz) perpendicular to the object displacement direction (y), - wherein the displaceability of the overall displaceable illumination angle variation unit (14b, 14b'; 34b; 45, 46; 51; 64, 65; 73, 74; 76, 77; 89; 96; 99; 106; 112; 116; 117) relative to the raster arrangement serves for influencing a magnitude of the deflection angle in the deflection plane (xz) perpendicular to the object displacement direction (y). - having at least one raster arrangement having raster elements arranged in raster rows and raster columns, said raster elements influencing the illumination light for predefining a shape of the illumination field , - having a transfer optical unit for the superimposing transfer of the illumination light from the raster elements towards the illumination field , in which an object displaceable in an object displacement direction (y) is arrangeable, - having an illumination angle variation device (14, 14'; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113), which deflects the illumination light incident on the illumination angle variation device (14; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113) in a deflection plane (xz) perpendicular to the object displacement direction (y) in a spatially dependent manner with different deflection angles, - wherein the illumination angle variation device (14, 14'; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113) has at least: -- one illumination angle variation unit (14b, 14b'; 34b; 45, 46; 51; 64, 65; 73, 74; 76, 77; 89; 96; 99; 106; 112; 116; 117), displaceable overall relative to the raster arrangement , for generating a deflection angle for the illumination light in the deflection plane (xz) perpendicular to the object displacement direction (y), -- one illumination angle variation unit (14b, 14b'; 34b; 45, 46; 51; 64, 65; 73, 74; 76, 77; 89; 96; 99; 106; 112; 116; 117), displaceable overall relative to the raster arrangement , for generating a deflection angle for the illumination light in the deflection plane (xz) perpendicular to the object displacement direction (y), - wherein the displaceability of the overall displaceable illumination angle variation unit (14b, 14b'; 34b; 45, 46; 51; 64, 65; 73, 74; 76, 77; 89; 96; 99; 106; 112; 116; 117) relative to the raster arrangement serves for influencing a magnitude of the deflection angle in the deflection plane (xz) perpendicular to the object displacement direction (y). <EOS>