An EUV radiation generating device , comprising: a beam source for generating a laser beam , a beam guiding device , comprising: at least one reflective optical element , the reflective optical element comprising: a first, inner surface region for reflecting a first, inner radiation component of a laser beam that is incident on the reflective optical element to form a first reflected laser beam , and at least one second, outer surface region for reflecting at least one second, outer radiation component of the incident laser beam to form at least one second reflected laser beam , characterized in that the second surface region is embodied to reduce a beam cross section (D2) of the second reflected laser beam compared to a beam cross section (D1) of the first reflected laser beam , so that the second reflected laser beam travels along a superposition length (L) completely within the first reflected laser beam , and in that the beam guiding device further comprises: a component in which an opening is formed, wherein the opening of the component is located within the superposition length (L), and wherein the reflective optical element is adapted to the geometry of the opening in such a way that the first reflected laser beam can pass through the opening without being incident on the component. a beam source for generating a laser beam , a beam guiding device , comprising: at least one reflective optical element , the reflective optical element comprising: a first, inner surface region for reflecting a first, inner radiation component of a laser beam that is incident on the reflective optical element to form a first reflected laser beam , and at least one second, outer surface region for reflecting at least one second, outer radiation component of the incident laser beam to form at least one second reflected laser beam , characterized in that the second surface region is embodied to reduce a beam cross section (D2) of the second reflected laser beam compared to a beam cross section (D1) of the first reflected laser beam , so that the second reflected laser beam travels along a superposition length (L) completely within the first reflected laser beam , and in that the beam guiding device further comprises: a component in which an opening is formed, wherein the opening of the component is located within the superposition length (L), and wherein the reflective optical element is adapted to the geometry of the opening in such a way that the first reflected laser beam can pass through the opening without being incident on the component. a first, inner surface region for reflecting a first, inner radiation component of a laser beam that is incident on the reflective optical element to form a first reflected laser beam , and at least one second, outer surface region for reflecting at least one second, outer radiation component of the incident laser beam to form at least one second reflected laser beam , characterized in that the second surface region is embodied to reduce a beam cross section (D2) of the second reflected laser beam compared to a beam cross section (D1) of the first reflected laser beam , so that the second reflected laser beam travels along a superposition length (L) completely within the first reflected laser beam , and in that the beam guiding device further comprises: a component in which an opening is formed, wherein the opening of the component is located within the superposition length (L), and wherein the reflective optical element is adapted to the geometry of the opening in such a way that the first reflected laser beam can pass through the opening without being incident on the component. <EOS>