A probe apparatus of inspecting an electrical characteristic of a power device that is formed on a substrate (W) to be inspected and has electrodes on front and rear surfaces of the substrate, the probe apparatus comprising: a movable chuck top configured to mount and support the substrate (W) thereon; a probe card that is provided above the chuck top to face the chuck top and is configured to support a probe needle having a leading end to be brought into contact with a front surface electrode of the power device exposed at the front surface of the substrate (W) supported on the chuck top ; a first measurement line, having the probe needle, configured to electrically connect the front surface electrode of the power device to a corresponding first terminal of a tester; a mounting surface conductor that serves as a mounting surface on the chuck top and is configured to be brought into contact with a rear surface electrode of the power device exposed at the rear surface of the substrate; a second measurement line, having the mounting surface conductor, configured to electrically connect the rear surface electrode of the power device to a corresponding second terminal of the tester; and an attracting device , having many vertical fine holes which are densely distributed in an attraction region (BE) set on the mounting surface and each of which is vertically extended from a surface of the mounting surface conductor to an inner portion thereof, configured to apply a vacuum attracting force to the rear surface of the substrate (W) through the vertical fine holes , characterized in that in the attraction region (BE), the vertical fine holes satisfy a condition of φ < p ≤ 2φ when φ denotes a diameter of a vertical fine hole and p denotes a pitch therebetween, the vertical fine holes are separated from each other in a region having a preset depth (d) from the surface of the mounting surface conductor , and in an inner deep region exceeding the preset depth (d) in the mounting surface conductor , a communication path is formed between the adjacent vertical fine holes . a movable chuck top configured to mount and support the substrate (W) thereon; a probe card that is provided above the chuck top to face the chuck top and is configured to support a probe needle having a leading end to be brought into contact with a front surface electrode of the power device exposed at the front surface of the substrate (W) supported on the chuck top ; a first measurement line, having the probe needle, configured to electrically connect the front surface electrode of the power device to a corresponding first terminal of a tester; a mounting surface conductor that serves as a mounting surface on the chuck top and is configured to be brought into contact with a rear surface electrode of the power device exposed at the rear surface of the substrate; a second measurement line, having the mounting surface conductor, configured to electrically connect the rear surface electrode of the power device to a corresponding second terminal of the tester; and an attracting device , having many vertical fine holes which are densely distributed in an attraction region (BE) set on the mounting surface and each of which is vertically extended from a surface of the mounting surface conductor to an inner portion thereof, configured to apply a vacuum attracting force to the rear surface of the substrate (W) through the vertical fine holes , characterized in that in the attraction region (BE), the vertical fine holes satisfy a condition of φ < p ≤ 2φ when φ denotes a diameter of a vertical fine hole and p denotes a pitch therebetween, the vertical fine holes are separated from each other in a region having a preset depth (d) from the surface of the mounting surface conductor , and in an inner deep region exceeding the preset depth (d) in the mounting surface conductor , a communication path is formed between the adjacent vertical fine holes . <EOS>