Method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system, the system including at least one probe head , the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to an image plane, the method comprising: positioning the at least one probe head relative to the substrate surface ; moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip ; and determining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface ; wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface ; wherein placing of the at least one probe head is performed by a positioning structure , and wherein the or each probe head comprises a carrier cooperating with the positioning structure , said carrier or carriers comprising an upper part and a base which are connected to each other such as to be arranged remote from each other, wherein the positioning structure comprises a support surface arranged between the base and the upper part , the upper part comprising three engagement elements extending towards the support surface , wherein the base comprises three landing elements at a side of the base facing the static carrier surface in use after placement, each landing element being associated with a respective one of the three engagement elements , and wherein prior to placement the three engagement elements rest on a plurality of sockets forming a kinematic mount on the support surface , wherein during placement of the or each probe head the landing elements are consecutively placed onto the static carrier surface such that each one of the engagement elements is released from the kinematic mount upon touch down of its associated landing element . positioning the at least one probe head relative to the substrate surface ; moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip ; and determining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface ; wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface ; wherein placing of the at least one probe head is performed by a positioning structure , and wherein the or each probe head comprises a carrier cooperating with the positioning structure , said carrier or carriers comprising an upper part and a base which are connected to each other such as to be arranged remote from each other, wherein the positioning structure comprises a support surface arranged between the base and the upper part , the upper part comprising three engagement elements extending towards the support surface , wherein the base comprises three landing elements at a side of the base facing the static carrier surface in use after placement, each landing element being associated with a respective one of the three engagement elements , and wherein prior to placement the three engagement elements rest on a plurality of sockets forming a kinematic mount on the support surface , wherein during placement of the or each probe head the landing elements are consecutively placed onto the static carrier surface such that each one of the engagement elements is released from the kinematic mount upon touch down of its associated landing element . <EOS>