Pupil facet mirror for an illumination optical unit of a projection exposure apparatus , - wherein, in addition to the pupil facet mirror , the illumination optical unit comprises a field facet mirror with a plurality of switchable field facets , - wherein an illumination channel is specified by means of one respective field facet of the field facet mirror and one respective pupil facet of the pupil facet mirror , illumination light being guided by means of said illumination channel to an object field in an object plane of the projection exposure apparatus via the field facet and the pupil facet , with images of the field facets being imaged in overlaid fashion into the object field via the pupil facets , - wherein a plurality of tiltable pupil facets belong to the pupil facets of the pupil facet mirror , - wherein each of the tiltable pupil facets interacts with a tilt actuator system of the pupil facet mirror , said tilt actuator system comprising: -- a coarse actuator system mode of operation for specifying a coarse tilt angle of the tiltable pupil facet as a result of an illumination channel assignment of this tiltable pupil facet to a field facet , -- a fine actuator system mode of operation for specifying a fine tilt angle of the tiltable pupil facet for specifying a relative position of the field facet image of the illumination channel of the tiltable pupil facet relative to the object field . - wherein, in addition to the pupil facet mirror , the illumination optical unit comprises a field facet mirror with a plurality of switchable field facets , - wherein an illumination channel is specified by means of one respective field facet of the field facet mirror and one respective pupil facet of the pupil facet mirror , illumination light being guided by means of said illumination channel to an object field in an object plane of the projection exposure apparatus via the field facet and the pupil facet , with images of the field facets being imaged in overlaid fashion into the object field via the pupil facets , - wherein a plurality of tiltable pupil facets belong to the pupil facets of the pupil facet mirror , - wherein each of the tiltable pupil facets interacts with a tilt actuator system of the pupil facet mirror , said tilt actuator system comprising: -- a coarse actuator system mode of operation for specifying a coarse tilt angle of the tiltable pupil facet as a result of an illumination channel assignment of this tiltable pupil facet to a field facet , -- a fine actuator system mode of operation for specifying a fine tilt angle of the tiltable pupil facet for specifying a relative position of the field facet image of the illumination channel of the tiltable pupil facet relative to the object field . -- a coarse actuator system mode of operation for specifying a coarse tilt angle of the tiltable pupil facet as a result of an illumination channel assignment of this tiltable pupil facet to a field facet , -- a fine actuator system mode of operation for specifying a fine tilt angle of the tiltable pupil facet for specifying a relative position of the field facet image of the illumination channel of the tiltable pupil facet relative to the object field . <EOS>