A photosensitive resin composition comprising (A) a silicone resin comprising recurring units having the formula (a1) and recurring units having the formula (b1), and recurring units having the formula (a3) and recurring units having the formula (b3) or recurring units having the formula (a4) and recurring units having the formula (b4), (B) a filler, and (C) a photoacid generator, wherein R 1 to R 4 are each independently a C 1 -C 8 monovalent hydrocarbon group, m and n are each independently an integer of 0 to 300, X 1 is a divalent group having the formula : wherein Y 1 is a single bond or a divalent organic group selected from the following: R 11 is each independently hydrogen or methyl, R 12 and R 13 are each independently a C 1 -C 4 straight, branched or cyclic alkyl group or C 1 -C 4 straight, branched or cyclic alkoxy group, a is each independently an integer of 0 to 7, b and c are each independently an integer of 0 to 2, wherein R 1 to R 4 , m and n are as defined above, X 3 is a divalent group having the formula : wherein R 31 is each independently hydrogen or methyl, and g is each independently an integer of 0 to 7, wherein R 1 to R 4 , m and n are as defined above, X 4 is a divalent group having the formula : wherein Z 1 is a divalent organic group, R 41 is each independently hydrogen or a C 1 -C 8 monovalent hydrocarbon group in which at least one hydrogen may be substituted by halogen, R 42 is each independently a C 1 -C 8 straight, branched or cyclic alkylene group, R X is each independently a single bond or a group capable of bonding with R XX to form a ring structure, R XX is each independently hydrogen or a C 1 -C 8 monovalent hydrocarbon group, or R XX is a single bond or C 1 -C 10 divalent hydrocarbon group when it bonds with R X to form a ring structure. wherein R 1 to R 4 are each independently a C 1 -C 8 monovalent hydrocarbon group, m and n are each independently an integer of 0 to 300, X 1 is a divalent group having the formula : wherein Y 1 is a single bond or a divalent organic group selected from the following: R 11 is each independently hydrogen or methyl, R 12 and R 13 are each independently a C 1 -C 4 straight, branched or cyclic alkyl group or C 1 -C 4 straight, branched or cyclic alkoxy group, a is each independently an integer of 0 to 7, b and c are each independently an integer of 0 to 2, wherein R 1 to R 4 , m and n are as defined above, X 3 is a divalent group having the formula : wherein R 31 is each independently hydrogen or methyl, and g is each independently an integer of 0 to 7, wherein R 1 to R 4 , m and n are as defined above, X 4 is a divalent group having the formula : wherein Z 1 is a divalent organic group, R 41 is each independently hydrogen or a C 1 -C 8 monovalent hydrocarbon group in which at least one hydrogen may be substituted by halogen, R 42 is each independently a C 1 -C 8 straight, branched or cyclic alkylene group, R X is each independently a single bond or a group capable of bonding with R XX to form a ring structure, R XX is each independently hydrogen or a C 1 -C 8 monovalent hydrocarbon group, or R XX is a single bond or C 1 -C 10 divalent hydrocarbon group when it bonds with R X to form a ring structure. <EOS>