A method for light induced selective transfer of components, the method comprising - providing a donor substrate with a plurality of components divided in different subsets including at least o a first subset of components selected for transfer during a first transfer step and arranged according to a first component layout (A); and o a second subset of components selected to remain on the donor substrate during the first transfer step and arranged according to a second component layout (B); - providing a target substrate comprising recesses disposed at least at relative positions (A') corresponding to the first component layout (A), and protrusions formed by non-recessed areas of the target substrate disposed at least at relative positions (B') corresponding to the second component layout (B); - aligning the donor and target substrates wherein ∘ the first subset of components is suspended over the corresponding recesses without contacting the target substrate , and ∘ the second subset of components is in contact with the corresponding protrusions of the target substrate ; and - in the first transfer step, projecting light (L) onto at least the first component layout (A) on the donor substrate to transfer the first subset of components across and into the corresponding recesses while the second subset of components remains attached to the donor substrate . - providing a donor substrate with a plurality of components divided in different subsets including at least o a first subset of components selected for transfer during a first transfer step and arranged according to a first component layout (A); and o a second subset of components selected to remain on the donor substrate during the first transfer step and arranged according to a second component layout (B); o a first subset of components selected for transfer during a first transfer step and arranged according to a first component layout (A); and o a second subset of components selected to remain on the donor substrate during the first transfer step and arranged according to a second component layout (B); - providing a target substrate comprising recesses disposed at least at relative positions (A') corresponding to the first component layout (A), and protrusions formed by non-recessed areas of the target substrate disposed at least at relative positions (B') corresponding to the second component layout (B); - aligning the donor and target substrates wherein ∘ the first subset of components is suspended over the corresponding recesses without contacting the target substrate , and ∘ the second subset of components is in contact with the corresponding protrusions of the target substrate ; and ∘ the first subset of components is suspended over the corresponding recesses without contacting the target substrate , and ∘ the second subset of components is in contact with the corresponding protrusions of the target substrate ; and - in the first transfer step, projecting light (L) onto at least the first component layout (A) on the donor substrate to transfer the first subset of components across and into the corresponding recesses while the second subset of components remains attached to the donor substrate . <EOS>