A suction method of performing suction of a Fabry-Perot interference filter including a substrate and a laminated structure that is provided on the substrate and that includes a main surface facing a side opposite to the substrate , by using a suction collet , the method comprising: a first step of arranging the suction collet so as to face the main surface ; a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step; and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step, wherein the suction collet includes: a main body having a surface ; and a contact portion that is provided on the surface so as to protrude from the surface and that includes a pair of first contact surfaces each provided with an opening for air intake, the laminated structure includes: a membrane structure (M) including a first mirror portion and a second mirror portion facing each other via a gap and in which a distance from each other is variable, and including a portion of the main surface ; and a pair of first electrode terminals disposed so as to face each other via the membrane structure (M) when viewed in a direction intersecting the main surface , in the first step, the suction collet is disposed such that the surface faces the main surface and each of the first contact surfaces faces a corresponding first electrode terminal of the pair of first electrode terminals , in the second step, each of the first contact surfaces is brought into contact with the corresponding first electrode terminal of the pair of first electrode terminals , and in the third step, each of the first electrode terminals is suctioned to a corresponding first contact surface of the pair of first contact surfaces by air intake through the opening provided on the corresponding first contact surface . a first step of arranging the suction collet so as to face the main surface ; a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step; and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step, wherein the suction collet includes: a main body having a surface ; and a contact portion that is provided on the surface so as to protrude from the surface and that includes a pair of first contact surfaces each provided with an opening for air intake, the laminated structure includes: a membrane structure (M) including a first mirror portion and a second mirror portion facing each other via a gap and in which a distance from each other is variable, and including a portion of the main surface ; and a pair of first electrode terminals disposed so as to face each other via the membrane structure (M) when viewed in a direction intersecting the main surface , in the first step, the suction collet is disposed such that the surface faces the main surface and each of the first contact surfaces faces a corresponding first electrode terminal of the pair of first electrode terminals , in the second step, each of the first contact surfaces is brought into contact with the corresponding first electrode terminal of the pair of first electrode terminals , and in the third step, each of the first electrode terminals is suctioned to a corresponding first contact surface of the pair of first contact surfaces by air intake through the opening provided on the corresponding first contact surface . <EOS>