MEMS device comprising: a first electrode structure and a second electrode structure forming a capacitive sensing arrangement ; a plurality of anti-stiction bumps arranged between the first electrode structure and the second electrode structure at a corresponding plurality of locations ; wherein the plurality of locations being projected into a main surface of the second electrode structure is distributed so as to comprise a first distribution density (26 1 ) in a first main surface region (28 1 ) of the main surface and so as to comprise a second, different distribution density (26 2 ) in a second main surface region (28 2 ) of the main surface , the second main surface region (28 2 ) being delimited from the first main surface region (28 1 ); wherein the second distribution density (26 2 ) is zero; wherein the second main surface region (28 2 ) is encircled by the first main surface region (28 1 ), characterized in that the first electrode structure and/or the second electrode structure comprises an opening that completely forms the second main surface region (28 2 ), and in that the MEMS device further comprises a housing, the housing comprising an opening between an inner volume of the MEMS device and an outside of the housing of the MEMS device, wherein the opening is arranged such that a location of the opening of the housing projected into the main surface on the one hand and the second main surface region (28 2 ) on the other hand overlap at least partially, wherein a location of the second main surface region (28 2 ) and the location of the opening of the housing correspond to each other within a tolerance range of ± 20% and/or wherein a size of the second main surface region (28 2 ) and a size of the opening of the housing correspond to each other within a tolerance range of ± 20%. a first electrode structure and a second electrode structure forming a capacitive sensing arrangement ; a plurality of anti-stiction bumps arranged between the first electrode structure and the second electrode structure at a corresponding plurality of locations ; wherein the plurality of locations being projected into a main surface of the second electrode structure is distributed so as to comprise a first distribution density (26 1 ) in a first main surface region (28 1 ) of the main surface and so as to comprise a second, different distribution density (26 2 ) in a second main surface region (28 2 ) of the main surface , the second main surface region (28 2 ) being delimited from the first main surface region (28 1 ); wherein the second distribution density (26 2 ) is zero; wherein the second main surface region (28 2 ) is encircled by the first main surface region (28 1 ), characterized in that the first electrode structure and/or the second electrode structure comprises an opening that completely forms the second main surface region (28 2 ), and in that the MEMS device further comprises a housing, the housing comprising an opening between an inner volume of the MEMS device and an outside of the housing of the MEMS device, wherein the opening is arranged such that a location of the opening of the housing projected into the main surface on the one hand and the second main surface region (28 2 ) on the other hand overlap at least partially, wherein a location of the second main surface region (28 2 ) and the location of the opening of the housing correspond to each other within a tolerance range of ± 20% and/or wherein a size of the second main surface region (28 2 ) and a size of the opening of the housing correspond to each other within a tolerance range of ± 20%. <EOS>