A device for measuring and/or modifying surface features and/or sub-surface features on or below a surface of a sample , the device comprising: a sample carrier for supporting the sample for exposing the surface for enabling said measuring and/or modifying, one or more heads including at least one of surface measuring equipment or surface modification equipment, and a support structure for supporting the one or more heads , wherein the support structure comprises a reference surface for providing a positioning reference for enabling positioning of each of said one or more heads at a respective working position, wherein the heads are separate from the sample carrier and the support structure such as to be not connected thereto, and wherein the device further comprises a pick and place manipulator arranged for gripping of respective ones of the heads and positioning thereof onto the reference surface at their respective working positions, wherein the reference surface comprises an optical reference grid, and wherein the manipulator comprises a gripper and an actuator for moving the gripper and the reference surface relative to each other, wherein the actuator is arranged for providing a motion in a direction transverse to the reference surface , and wherein the gripper is arranged for engaging and releasing the respective heads from the transverse motion for placing the heads on the reference surface , wherein the gripper and the heads comprise a mutually cooperating engagement structure forming a kinematic mount, the kinematic mount including at least three structural elements arranged on either one of the gripper or the heads , said at least three structural elements cooperating with at least three slots arranged on another one of the gripper or the heads . a sample carrier for supporting the sample for exposing the surface for enabling said measuring and/or modifying, one or more heads including at least one of surface measuring equipment or surface modification equipment, and a support structure for supporting the one or more heads , wherein the support structure comprises a reference surface for providing a positioning reference for enabling positioning of each of said one or more heads at a respective working position, wherein the heads are separate from the sample carrier and the support structure such as to be not connected thereto, and wherein the device further comprises a pick and place manipulator arranged for gripping of respective ones of the heads and positioning thereof onto the reference surface at their respective working positions, wherein the reference surface comprises an optical reference grid, and wherein the manipulator comprises a gripper and an actuator for moving the gripper and the reference surface relative to each other, wherein the actuator is arranged for providing a motion in a direction transverse to the reference surface , and wherein the gripper is arranged for engaging and releasing the respective heads from the transverse motion for placing the heads on the reference surface , wherein the gripper and the heads comprise a mutually cooperating engagement structure forming a kinematic mount, the kinematic mount including at least three structural elements arranged on either one of the gripper or the heads , said at least three structural elements cooperating with at least three slots arranged on another one of the gripper or the heads . <EOS>