A method of using a sub-atmospheric storage and delivery vessel filled with antimony-containing material, comprising: operably connecting the vessel to a downstream ion implant tool ; establishing a pressure downstream of the sub-atmospheric storage and delivery vessel that is less than the vapor pressure of a high purity, vapor phase of the antimony-containing material occupying a predetermined headspace volume (335; 336) of the vessel; actuating a valve into the open position; dispensing the antimony-containing material from the predetermined headspace volume (335; 336) of the vessel at ambient conditions in an absence of heating, said antimony-containing material dispensed as a high purity, vapor phase at a flowrate in an absence of a carrier gas; flowing the high purity, vapor phase of the antimony-containing material in an absence of the carrier gas at the flowrate towards the ion implant tool, said vapor phase of the antimony-containing material having a purity of 95 vol% or greater based on the predetermined headspace volume; and evaporating additional antimony-containing material from a corresponding liquid phase in the vessel in the absence of heating at an evaporation rate that is equal to or greater than the flowrate of the high purity, vapor phase of the antimony-containing material being dispensed to supply the flowrate of the high purity, vapor phase of the antimony-containing material; wherein said storage and delivery vessel comprises multiple walls having sufficient surface area contact with the liquid phase, and further wherein said multiple walls exhibit a thermal conductivity to enhance heat conduction into the liquid at the ambient conditions. operably connecting the vessel to a downstream ion implant tool ; establishing a pressure downstream of the sub-atmospheric storage and delivery vessel that is less than the vapor pressure of a high purity, vapor phase of the antimony-containing material occupying a predetermined headspace volume (335; 336) of the vessel; actuating a valve into the open position; dispensing the antimony-containing material from the predetermined headspace volume (335; 336) of the vessel at ambient conditions in an absence of heating, said antimony-containing material dispensed as a high purity, vapor phase at a flowrate in an absence of a carrier gas; flowing the high purity, vapor phase of the antimony-containing material in an absence of the carrier gas at the flowrate towards the ion implant tool, said vapor phase of the antimony-containing material having a purity of 95 vol% or greater based on the predetermined headspace volume; and evaporating additional antimony-containing material from a corresponding liquid phase in the vessel in the absence of heating at an evaporation rate that is equal to or greater than the flowrate of the high purity, vapor phase of the antimony-containing material being dispensed to supply the flowrate of the high purity, vapor phase of the antimony-containing material; wherein said storage and delivery vessel comprises multiple walls having sufficient surface area contact with the liquid phase, and further wherein said multiple walls exhibit a thermal conductivity to enhance heat conduction into the liquid at the ambient conditions. <EOS>