Method for forming environments for reticle carriers with low humidity level , wherein a reticle carrier comprises an outer container and an inner container , wherein a storage chamber is provided for storing a multitude of outer containers and a storage chamber is provided for storing a multitude of protective containers , wherein each protective container is provided for storing a multitude of inner containers , comprising the steps of: measuring a first humidity level inside the storage chamber for storing the multitude of protective containers as a first environment using a first humidity sensor to keep the first environment within a predetermined interval around a first humidity set point or at a first humidity set point ; providing a first purge gas to the first environment until the first humidity level in the first environment reduces to a value within the predetermined interval around the first humidity set point or to the first humidity set point ; measuring a second humidity level inside the multitude of protective containers as a second environment using a second humidity sensor , wherein the second environment is formed in the first environment; providing a second purge gas in the second environment to the protective containers flowing past the inner containers and then recirculated back to the protective containers until the second humidity level in the second environment reduces to a value within a predetermined interval around a second humidity set point or to a second humidity set point ; measuring a third humidity level inside the storage chamber for storing the multitude of outer containers as a third environment using a third humidity sensor to keep the third environment within a predetermined interval around a third humidity set point or at a third humidity set point ; providing a third purge gas to the third environment until the third humidity level reduces to a value within the predetermined interval around the third humidity set point or to the third humidity set point . measuring a first humidity level inside the storage chamber for storing the multitude of protective containers as a first environment using a first humidity sensor to keep the first environment within a predetermined interval around a first humidity set point or at a first humidity set point ; providing a first purge gas to the first environment until the first humidity level in the first environment reduces to a value within the predetermined interval around the first humidity set point or to the first humidity set point ; measuring a second humidity level inside the multitude of protective containers as a second environment using a second humidity sensor , wherein the second environment is formed in the first environment; providing a second purge gas in the second environment to the protective containers flowing past the inner containers and then recirculated back to the protective containers until the second humidity level in the second environment reduces to a value within a predetermined interval around a second humidity set point or to a second humidity set point ; measuring a third humidity level inside the storage chamber for storing the multitude of outer containers as a third environment using a third humidity sensor to keep the third environment within a predetermined interval around a third humidity set point or at a third humidity set point ; providing a third purge gas to the third environment until the third humidity level reduces to a value within the predetermined interval around the third humidity set point or to the third humidity set point . <EOS>