A transfer apparatus comprising: a head unit configured to perform a process on an object to be transferred; a first support member (R1 to R4) disposed upstream in a transfer direction of the object with respect to a process position at which the transferred object is processed by the head unit , and configured to support the transferred object; a second support member (R2 to R5) disposed downstream in the transfer direction with respect to the process position, and configured to support the transferred object; a surface detector (SE1 to SE4) disposed between the first support member (R1 to R4) and the second support member (R2 to R5) and configured to detect first surface information of the transferred object; an upstream surface detector (SEO) disposed upstream in the transfer direction with respect to the surface detector (SE1 to SE4), and configured to detect second surface information of the transferred object; characterized by : an edge detector (ESO) disposed at a position closer to the upstream surface detector (SEO) than the surface detector (SE1 to SE4) in the transfer direction, and configured to detect an edge in a width direction of the transferred object; and a controller configured to move the head unit based on respective detection results of the surface detector (SE1 to SE4) and the upstream surface detector (SEO) and a detection result of the edge detector (ESO). a head unit configured to perform a process on an object to be transferred; a first support member (R1 to R4) disposed upstream in a transfer direction of the object with respect to a process position at which the transferred object is processed by the head unit , and configured to support the transferred object; a second support member (R2 to R5) disposed downstream in the transfer direction with respect to the process position, and configured to support the transferred object; a surface detector (SE1 to SE4) disposed between the first support member (R1 to R4) and the second support member (R2 to R5) and configured to detect first surface information of the transferred object; an upstream surface detector (SEO) disposed upstream in the transfer direction with respect to the surface detector (SE1 to SE4), and configured to detect second surface information of the transferred object; characterized by : an edge detector (ESO) disposed at a position closer to the upstream surface detector (SEO) than the surface detector (SE1 to SE4) in the transfer direction, and configured to detect an edge in a width direction of the transferred object; and a controller configured to move the head unit based on respective detection results of the surface detector (SE1 to SE4) and the upstream surface detector (SEO) and a detection result of the edge detector (ESO). an edge detector (ESO) disposed at a position closer to the upstream surface detector (SEO) than the surface detector (SE1 to SE4) in the transfer direction, and configured to detect an edge in a width direction of the transferred object; and a controller configured to move the head unit based on respective detection results of the surface detector (SE1 to SE4) and the upstream surface detector (SEO) and a detection result of the edge detector (ESO). <EOS>