A substrate handling system comprising - a substrate holder comprising a main body with a main body surface, and a plurality of burls projecting from the main body surface to support the substrate spaced apart from the main body surface, - clamping means, the clamping means being configured to clamp and/or unclamp the substrate onto the substrate holder, and - conveying means, the conveying means being configured to load and/or unload the substrate onto the substrate holder, wherein the conveying means is further configured to physically contact the substrate during the unclamping from the substrate holder, wherein the conveying means is further configured to position the substrate in a vibration position during the unclamping, wherein in said vibration position the substrate is located separately from the plurality of burls, wherein the conveying means comprises: - force feedback sensor means wherein the conveying means is configured to position the substrate in the vibration position when the force feedback sensor means detects a force caused by the unclamping; and/or - a conveying means controller wherein the conveying means is configured to position the substrate in the vibration position when the conveying means controller detects a force caused by the unclamping. - a substrate holder comprising a main body with a main body surface, and a plurality of burls projecting from the main body surface to support the substrate spaced apart from the main body surface, - clamping means, the clamping means being configured to clamp and/or unclamp the substrate onto the substrate holder, and - conveying means, the conveying means being configured to load and/or unload the substrate onto the substrate holder, wherein the conveying means is further configured to physically contact the substrate during the unclamping from the substrate holder, wherein the conveying means is further configured to position the substrate in a vibration position during the unclamping, wherein in said vibration position the substrate is located separately from the plurality of burls, wherein the conveying means comprises: - force feedback sensor means wherein the conveying means is configured to position the substrate in the vibration position when the force feedback sensor means detects a force caused by the unclamping; and/or - a conveying means controller wherein the conveying means is configured to position the substrate in the vibration position when the conveying means controller detects a force caused by the unclamping. wherein the conveying means is further configured to physically contact the substrate during the unclamping from the substrate holder, wherein the conveying means is further configured to position the substrate in a vibration position during the unclamping, wherein in said vibration position the substrate is located separately from the plurality of burls, wherein the conveying means comprises: - force feedback sensor means wherein the conveying means is configured to position the substrate in the vibration position when the force feedback sensor means detects a force caused by the unclamping; and/or - a conveying means controller wherein the conveying means is configured to position the substrate in the vibration position when the conveying means controller detects a force caused by the unclamping. - force feedback sensor means wherein the conveying means is configured to position the substrate in the vibration position when the force feedback sensor means detects a force caused by the unclamping; and/or - a conveying means controller wherein the conveying means is configured to position the substrate in the vibration position when the conveying means controller detects a force caused by the unclamping. <EOS>