A method for producing polycrystalline silicon performed by repeating a plurality of times a precipitation step of polycrystalline silicon by the Siemens method, comprising: after completion of the precipitation step and before a precipitation step for a next batch, a cleaning step of a bell jar used for precipitating the polycrystalline silicon, wherein the cleaning step of the bell jar includes a water washing step of washing the bell jar using water, and a drying step subsequent to the water washing step, the drying step is a step of, after the water washing step, reducing pressure so that air pressure in the bell jar is 1000 Pa or less using a vacuum pump having vacuum reachability of 200 Pa or less, and thus reducing pressure so that an inside of the bell jar has pressure lower than vapor pressure of water at an inner surface temperature to remove moisture, and a time from completion of the water washing step to completion of the drying step is 1.2 hours or less, and further comprising: after the drying step, a step of introducing an inert gas without moisture having a dew point of -40°C or less with reduced moisture into the bell jar to return internal pressure to atmospheric pressure, and wherein the drying step is performed without increasing a temperature of a surface of a bell jar to remove moisture, and in the drying step, the reducing pressure process is maintained for 10 minutes or more after the internal pressure of the bell jar reaches 1000 Pa or less. after completion of the precipitation step and before a precipitation step for a next batch, a cleaning step of a bell jar used for precipitating the polycrystalline silicon, wherein the cleaning step of the bell jar includes a water washing step of washing the bell jar using water, and a drying step subsequent to the water washing step, the drying step is a step of, after the water washing step, reducing pressure so that air pressure in the bell jar is 1000 Pa or less using a vacuum pump having vacuum reachability of 200 Pa or less, and thus reducing pressure so that an inside of the bell jar has pressure lower than vapor pressure of water at an inner surface temperature to remove moisture, and a time from completion of the water washing step to completion of the drying step is 1.2 hours or less, and further comprising: after the drying step, a step of introducing an inert gas without moisture having a dew point of -40°C or less with reduced moisture into the bell jar to return internal pressure to atmospheric pressure, and wherein the drying step is performed without increasing a temperature of a surface of a bell jar to remove moisture, and in the drying step, the reducing pressure process is maintained for 10 minutes or more after the internal pressure of the bell jar reaches 1000 Pa or less. after the drying step, a step of introducing an inert gas without moisture having a dew point of -40°C or less with reduced moisture into the bell jar to return internal pressure to atmospheric pressure, and wherein the drying step is performed without increasing a temperature of a surface of a bell jar to remove moisture, and in the drying step, the reducing pressure process is maintained for 10 minutes or more after the internal pressure of the bell jar reaches 1000 Pa or less. <EOS>