Substrate treatment system with at least one substrate carrier (2, 2a-k) carrying at least one plate-like substrate and comprising at least one dielectric region , wherein a front side of the dielectric region is opposite to a back side of the substrate , and with an electrically conductive electrode provided on the back side of the substrate carrier (2, 2a-k) or being formed by the substrate carrier (2, 2a-k), characterized in that the substrate carrier (2, 2a-k) carries at least two of the substrates and comprises at least two of the dielectric regions being spaced and electrically disconnected from each other by a base material of the substrate carrier (2, 2a-k) and being allocated to at least two of the substrates , respectively, wherein the substrate carrier (2, 2a-k) is movable along a transport direction (A) in order to transport the at least two substrates into or out off a PECVD system , and wherein - a distance (d) between the respective back side of each of the at least two substrates and a respective back side of each of the at least two dielectric regions varies over the width (w) of the respective dielectric region and/or varies from one of the dielectric regions to another of the dielectric regions , and/or the electrically conductive electrode comprises at least two additional dielectric regions being allocated to the at least two dielectric regions , respectively, and a distance (d a ) between the respective back side of each of the at least two substrates and a respective back side of each of the at least two additional dielectric regions varies over the width (w a ) of the respective additional dielectric region and/or varies from one of the additional dielectric regions to another of the additional dielectric regions . the substrate carrier (2, 2a-k) carries at least two of the substrates and comprises at least two of the dielectric regions being spaced and electrically disconnected from each other by a base material of the substrate carrier (2, 2a-k) and being allocated to at least two of the substrates , respectively, wherein the substrate carrier (2, 2a-k) is movable along a transport direction (A) in order to transport the at least two substrates into or out off a PECVD system , and wherein - a distance (d) between the respective back side of each of the at least two substrates and a respective back side of each of the at least two dielectric regions varies over the width (w) of the respective dielectric region and/or varies from one of the dielectric regions to another of the dielectric regions , and/or - a distance (d) between the respective back side of each of the at least two substrates and a respective back side of each of the at least two dielectric regions varies over the width (w) of the respective dielectric region and/or varies from one of the dielectric regions to another of the dielectric regions , and/or the electrically conductive electrode comprises at least two additional dielectric regions being allocated to the at least two dielectric regions , respectively, and a distance (d a ) between the respective back side of each of the at least two substrates and a respective back side of each of the at least two additional dielectric regions varies over the width (w a ) of the respective additional dielectric region and/or varies from one of the additional dielectric regions to another of the additional dielectric regions . <EOS>