A temperature control device that controls a temperature of a heated body of a heating system heating the heated body using a heating body in accordance with a control parameter, the temperature control device comprising: a target setting part that sets a target temperature and a target change rate of the temperature with respect to time before the temperature arrives at the target temperature; an upper limit value setting part that sets an upper limit value of power at which the heating body is allowed to operate; a heating processing part that operates the heating body at the upper limit value of power set by the upper limit value setting part such that the temperature of the heated body arrives at the target temperature; and a determination part that executes a determination process of determining whether or not an actual measured change rate is within a predetermined range including the target change rate for every predetermined time, characterized in that the upper limit value setting part sets an initial value set in advance as the upper limit value of power in a case in which the heating processing part starts an operation of the heating body toward the target temperature, and in a case in which the actual measured change rate is determined to be outside the predetermined range before the temperature of the heated body arrives at the target temperature, increases the upper limit value of power by a predetermined amount in a case in which a new measured change rate of the heated body is lower than the target change rate and decreases the upper limit value of power by a predetermined amount in a case in which the new actual measured change rate of the heated body is higher than the target change rate, the temperature control device further comprises: a parameter setting part that sets the upper limit value of power set by the upper limit value setting part when the temperature of the heated body arrives at the target temperature as the control parameter. a target setting part that sets a target temperature and a target change rate of the temperature with respect to time before the temperature arrives at the target temperature; an upper limit value setting part that sets an upper limit value of power at which the heating body is allowed to operate; a heating processing part that operates the heating body at the upper limit value of power set by the upper limit value setting part such that the temperature of the heated body arrives at the target temperature; and a determination part that executes a determination process of determining whether or not an actual measured change rate is within a predetermined range including the target change rate for every predetermined time, characterized in that the upper limit value setting part sets an initial value set in advance as the upper limit value of power in a case in which the heating processing part starts an operation of the heating body toward the target temperature, and in a case in which the actual measured change rate is determined to be outside the predetermined range before the temperature of the heated body arrives at the target temperature, increases the upper limit value of power by a predetermined amount in a case in which a new measured change rate of the heated body is lower than the target change rate and decreases the upper limit value of power by a predetermined amount in a case in which the new actual measured change rate of the heated body is higher than the target change rate, the temperature control device further comprises: a parameter setting part that sets the upper limit value of power set by the upper limit value setting part when the temperature of the heated body arrives at the target temperature as the control parameter. <EOS>