A radiation sensitive composition comprising: as a silane, a hydrolyzable silane, a hydrolysis product thereof, or a hydrolysis-condensation product thereof; a photoacid generator; and a quencher, in which the hydrolyzable silane includes a hydrolyzable silane of Formula and a hydrolyzable silane of Formula , wherein R 1 is an organic group of Formula (1-2): wherein R 4 is a hydrogen atom, a C 1-10 alkyl group, or an acyl group; R 5 is a hydrogen atom, a C 1-10 alkyl group, or a C 1-10 alkyl group having a C 1-10 alkoxy group; R 6 is a C 1-10 alkyl group; n1 is an integer of 0 to 10; n2 is an integer of 0 or 1; n3 is an integer satisfying 1 ≤ n3 ≤ 5; n4 is an integer satisfying 0 ≤ n4 ≤ 4; n5 is an integer satisfying 0 ≤ n5 ≤ 4; n3 + n4 + n5 is an integer satisfying 1 ≤ n3 + n4 + n5 ≤ 5; k1 is an end bonded to a silicon atom when n1 is an integer of 1 to 10; k2 is an end bonded to a silicon atom when n1 is 0 and n2 is 1; and k3 is an end bonded to a silicon atom when n1 and n2 are each 0, and is bonded to a silicon atom through a Si-C bond or a Si-O bond; R 2 is an alkyl group, an aryl group, a halogenated alkyl group, a halogenated aryl group, an alkoxy aryl group, an alkenyl group, or an organic group having an epoxy group, an acryloyl group, a methacryloyl group, a mercapto group, an amino group, or a cyano group, or a combination of these groups, and is bonded to a silicon atom through a Si-C bond; R 3 is an alkoxy group, an acyloxy group, or a halogen group; a is an integer of 1; b is an integer of 0 to 2; and a + b is an integer of 1 to 3, wherein R 7 is an organic group of Formula (2-1) or Formula (2-2): in Formula (2-1), R 10 is a C 1-10 alkyl group; R 11 is a hydrogen atom, a C 1-10 alkyl group, or a C 1-10 alkyl group having a C 1-10 alkoxy group; n6 is an integer satisfying 0 ≤ n6 ≤ 3; n7 is an integer satisfying 1 ≤ n7 ≤ 3; n6 + n7 is an integer satisfying 1 ≤ n6 + n7 ≤ 4; n8 is an integer satisfying 0 ≤ n8 ≤ 10; n9 is an integer of 0 or 1; k4 is an end bonded to a silicon atom when n8 is an integer of 1 to 10; k5 is an end bonded to a silicon atom when n8 is 0 and n9 is 1; and k6 is an end bonded to a silicon atom when n8 and n9 are each 0, and in Formula (2-2), R 112 is a hydroxy group, a halogen atom, an epoxy group, an oxetane group, an acyloxy group, a (meth)acryloyl group, a silyl group, a C 1-10 alkoxy group, a C 1-10 alkoxy group having a C 1-10 alkoxy group, or a combination of these groups; R 113 is a C 1-10 alkylene group or a C 6-40 arylene group, optionally containing an oxygen atom; n10 is an integer of 1 to 4; and k7 is an end bonded to a silicon atom, and is bonded to a silicon atom through a Si-C bond; R 8 is an alkyl group, an aryl group, a halogenated alkyl group, a halogenated aryl group, an alkoxy aryl group, an alkenyl group, or an organic group having an epoxy group, an acryloyl group, a methacryloyl group, a mercapto group, an amino group, or a cyano group, or a combination of these groups, and is bonded to a silicon atom through a Si-C bond; R 9 is an alkoxy group, an acyloxy group, or a halogen group; c is an integer of 1; d is an integer of 0 to 2; and c + d is an integer of 1 to 3. as a silane, a hydrolyzable silane, a hydrolysis product thereof, or a hydrolysis-condensation product thereof; a photoacid generator; and a quencher, in which the hydrolyzable silane includes a hydrolyzable silane of Formula and a hydrolyzable silane of Formula , <EOS>