A micro-electromechanical system (MEMS) switch comprising: a substrate ; and a switch structure formed on the substrate , the switch structure comprising: a conductive contact formed on the substrate ; a self-compensating anchor structure coupled to the substrate ; and a beam comprising a first end and a second end, the beam integrated with the self-compensating anchor structure at the first end and extending out orthogonally from the self-compensating anchor structure and suspended over the substrate such that the second end comprises a cantilevered portion positioned above the conductive contact ; wherein the cantilevered portion of the beam undergoes deformation during periods of strain mismatch between the substrate and the switch structure so as to have a takeoff angle relative to the substrate ; wherein the self-compensating anchor structure directs a portion of the strain mismatch orthogonally to the cantilevered portion so as to warp the anchor and compensate for the takeoff angle of the cantilevered portion ; and wherein the self-compensating anchor structure comprises a shaped anchor connection that mechanically connects the beam to the substrate , characterized in that the beam comprises a first beam that extends out from the self-compensating anchor structure in a first direction; and wherein the switch structure further comprises a second beam integrated with the self-compensating anchor structure , the second beam extending out from the self-compensating anchor structure in a second direction opposite the first direction in which the first beam extends. a substrate ; and a switch structure formed on the substrate , the switch structure comprising: a conductive contact formed on the substrate ; a self-compensating anchor structure coupled to the substrate ; and a beam comprising a first end and a second end, the beam integrated with the self-compensating anchor structure at the first end and extending out orthogonally from the self-compensating anchor structure and suspended over the substrate such that the second end comprises a cantilevered portion positioned above the conductive contact ; a conductive contact formed on the substrate ; a self-compensating anchor structure coupled to the substrate ; and a beam comprising a first end and a second end, the beam integrated with the self-compensating anchor structure at the first end and extending out orthogonally from the self-compensating anchor structure and suspended over the substrate such that the second end comprises a cantilevered portion positioned above the conductive contact ; wherein the cantilevered portion of the beam undergoes deformation during periods of strain mismatch between the substrate and the switch structure so as to have a takeoff angle relative to the substrate ; wherein the self-compensating anchor structure directs a portion of the strain mismatch orthogonally to the cantilevered portion so as to warp the anchor and compensate for the takeoff angle of the cantilevered portion ; and wherein the self-compensating anchor structure comprises a shaped anchor connection that mechanically connects the beam to the substrate , characterized in that the beam comprises a first beam that extends out from the self-compensating anchor structure in a first direction; and wherein the switch structure further comprises a second beam integrated with the self-compensating anchor structure , the second beam extending out from the self-compensating anchor structure in a second direction opposite the first direction in which the first beam extends. <EOS>