A measurement processing device for an x-ray inspection apparatus configured to detect an x-ray of an x-ray beam passing through a three-dimensional region to be inspected of a specimen (S) placed on a placement unit to perform an inspection on the shape of the specimen in the region to be inspected by displacing, in a measurement direction, a sliced plane relative to the specimen, the sliced plane being a plane in which the x-ray beam detectably overlaps with the specimen, the measurement processing device comprising: a setting unit configured to set the region to be inspected on the specimen; and a slice selection unit configured to: set a plurality of sliced plane candidates for the region to be inspected, each sliced plane candidate being a candidate to be a sliced plane used in the inspection of the region to be inspected; calculate, for each of the plurality of sliced plane candidates, an amount of displacement of the sliced plane candidate through a predetermined region of the specimen that is required to perform the inspection of the region to be inspected by a displacement of the sliced plane candidate through the predetermined region in the case that the sliced plane candidate would be used as the sliced plane for the inspection; and select as the sliced plane for the inspection a sliced plane candidate from among the plurality of sliced plane candidates on the basis of each of the calculated amounts of displacement such that a time to perform the inspection is the shortest among the candidates. a setting unit configured to set the region to be inspected on the specimen; and a slice selection unit configured to: set a plurality of sliced plane candidates for the region to be inspected, each sliced plane candidate being a candidate to be a sliced plane used in the inspection of the region to be inspected; calculate, for each of the plurality of sliced plane candidates, an amount of displacement of the sliced plane candidate through a predetermined region of the specimen that is required to perform the inspection of the region to be inspected by a displacement of the sliced plane candidate through the predetermined region in the case that the sliced plane candidate would be used as the sliced plane for the inspection; and select as the sliced plane for the inspection a sliced plane candidate from among the plurality of sliced plane candidates on the basis of each of the calculated amounts of displacement such that a time to perform the inspection is the shortest among the candidates. set a plurality of sliced plane candidates for the region to be inspected, each sliced plane candidate being a candidate to be a sliced plane used in the inspection of the region to be inspected; calculate, for each of the plurality of sliced plane candidates, an amount of displacement of the sliced plane candidate through a predetermined region of the specimen that is required to perform the inspection of the region to be inspected by a displacement of the sliced plane candidate through the predetermined region in the case that the sliced plane candidate would be used as the sliced plane for the inspection; and select as the sliced plane for the inspection a sliced plane candidate from among the plurality of sliced plane candidates on the basis of each of the calculated amounts of displacement such that a time to perform the inspection is the shortest among the candidates. <EOS>