A device for cleaning a surface of an object (O), comprising: a substrate configured to be provided on the surface of the object (O); a plurality of electrodes provided on the substrate ; a dielectric layer provided on the substrate to cover the electrodes ; and a control device configured to: supply an alternating-current, AC, power to the electrodes , detect a resonant frequency of a liquid droplet (D) on the surface of the object (O) while providing a preliminary AC power to the electrodes , before supplying a first AC power to the electrodes , supply the first AC power having a predetermined first frequency and a predetermined first voltage to the electrodes during a first time period to vibrate the liquid droplet (D) on the surface of the object (O) by a periodic change of an electrostatic force generated at the electrodes , wherein the first frequency is set as the resonant frequency of the liquid droplet (D), supply a second AC power having a second voltage greater than the first voltage to the electrodes during a second time period after providing the first AC power during the first time period, reduce the second voltage to a third voltage less than the second voltage, increase the third voltage to the second voltage, and repeat increasing the third voltage to the second voltage and reducing the second voltage to the third voltage. a substrate configured to be provided on the surface of the object (O); a plurality of electrodes provided on the substrate ; a dielectric layer provided on the substrate to cover the electrodes ; and a control device configured to: supply an alternating-current, AC, power to the electrodes , detect a resonant frequency of a liquid droplet (D) on the surface of the object (O) while providing a preliminary AC power to the electrodes , before supplying a first AC power to the electrodes , supply the first AC power having a predetermined first frequency and a predetermined first voltage to the electrodes during a first time period to vibrate the liquid droplet (D) on the surface of the object (O) by a periodic change of an electrostatic force generated at the electrodes , wherein the first frequency is set as the resonant frequency of the liquid droplet (D), supply a second AC power having a second voltage greater than the first voltage to the electrodes during a second time period after providing the first AC power during the first time period, reduce the second voltage to a third voltage less than the second voltage, increase the third voltage to the second voltage, and repeat increasing the third voltage to the second voltage and reducing the second voltage to the third voltage. supply an alternating-current, AC, power to the electrodes , detect a resonant frequency of a liquid droplet (D) on the surface of the object (O) while providing a preliminary AC power to the electrodes , before supplying a first AC power to the electrodes , supply the first AC power having a predetermined first frequency and a predetermined first voltage to the electrodes during a first time period to vibrate the liquid droplet (D) on the surface of the object (O) by a periodic change of an electrostatic force generated at the electrodes , wherein the first frequency is set as the resonant frequency of the liquid droplet (D), supply a second AC power having a second voltage greater than the first voltage to the electrodes during a second time period after providing the first AC power during the first time period, reduce the second voltage to a third voltage less than the second voltage, increase the third voltage to the second voltage, and repeat increasing the third voltage to the second voltage and reducing the second voltage to the third voltage. <EOS>