A foreign object inspection device for inspecting foreign objects at inspection spots of a workpiece , the device comprising: a nozzle including a suction port configured to suck a foreign object; an exhauster ; a suction channel connecting the nozzle to the exhauster ; a detector installed on the suction channel , and configured to detect foreign object information about a shape of the foreign object sucked through the suction port ; and a controller including a storage configured to store the foreign object information in a manner associated with an inspection spot; wherein the detector includes a housing containing a cylindrical capture chamber , a suction path connection port in a side surface of the capture chamber , the suction path connection port connecting to the suction channel , a filter configured to capture a foreign object entering the capture chamber , a support supporting the filter , and configured to allow a gas to flow through the support, a window in the capture chamber, and an imaging device configured to form an image of the foreign object captured on the filter , and the storage includes a filter image storage configured to store a filter image for each inspection spot, and a foreign object image storage configured to store a foreign object image, and the controller includes an extractor configured to extract the foreign object image from the filter image, and a matching unit configured to match a foreign object image extracted from a filter image for a target inspection spot to a foreign object image extracted from a filter image for an inspection spot preceding the target inspection spot, and determine an unmatching foreign object image as a foreign object image for the target inspection spot. a nozzle including a suction port configured to suck a foreign object; an exhauster ; a suction channel connecting the nozzle to the exhauster ; a detector installed on the suction channel , and configured to detect foreign object information about a shape of the foreign object sucked through the suction port ; and a controller including a storage configured to store the foreign object information in a manner associated with an inspection spot; wherein the detector includes a housing containing a cylindrical capture chamber , a suction path connection port in a side surface of the capture chamber , the suction path connection port connecting to the suction channel , a filter configured to capture a foreign object entering the capture chamber , a support supporting the filter , and configured to allow a gas to flow through the support, a window in the capture chamber, and an imaging device configured to form an image of the foreign object captured on the filter , and the storage includes a filter image storage configured to store a filter image for each inspection spot, and a foreign object image storage configured to store a foreign object image, and the controller includes an extractor configured to extract the foreign object image from the filter image, and a matching unit configured to match a foreign object image extracted from a filter image for a target inspection spot to a foreign object image extracted from a filter image for an inspection spot preceding the target inspection spot, and determine an unmatching foreign object image as a foreign object image for the target inspection spot. <EOS>