Container for vaporizing a precursor material and delivering the vaporized precursor material, comprising: - a receiving part bounding an inner volume; and - a number of subcarrier trays arranged on top of each other within the inner volume, - wherein each subcarrier tray forms a gas flow channel, wherein at least one of the subcarrier trays comprises ∘ a subcarrier holder configured to store the precursor material, and ∘ a holder lid configured to seal the subcarrier holder wherein the holder lid is provided with one or more fins protruding from the lower side of the holder lid towards the subcarrier holder into the precursor material surface to form an unbranched gas flow channel (C) between a first tray port and a second tray port covering at least 90% of the surface of the precursor material in the subcarrier tray , and ∘ the holder lid is configured to at least partly form a lid sidewall of the subcarrier tray which abuts to the inner wall of the cylindrical volume of the container , thereby encompassing a portion of the sidewall of the subcarrier holder , wherein the lid sidewall perpendicularly protrudes from a main lid surface S towards the subcarrier, wherein a shape and extension of the lid sidewall of the holder lid and of the sidewall of the subcarrier holder are configured to form a further gas flow channel (G) together with a portion of the wall of the inner volume. - a receiving part bounding an inner volume; and - a number of subcarrier trays arranged on top of each other within the inner volume, - wherein each subcarrier tray forms a gas flow channel, wherein at least one of the subcarrier trays comprises ∘ a subcarrier holder configured to store the precursor material, and ∘ a holder lid configured to seal the subcarrier holder wherein the holder lid is provided with one or more fins protruding from the lower side of the holder lid towards the subcarrier holder into the precursor material surface to form an unbranched gas flow channel (C) between a first tray port and a second tray port covering at least 90% of the surface of the precursor material in the subcarrier tray , and ∘ the holder lid is configured to at least partly form a lid sidewall of the subcarrier tray which abuts to the inner wall of the cylindrical volume of the container , thereby encompassing a portion of the sidewall of the subcarrier holder , wherein the lid sidewall perpendicularly protrudes from a main lid surface S towards the subcarrier, wherein a shape and extension of the lid sidewall of the holder lid and of the sidewall of the subcarrier holder are configured to form a further gas flow channel (G) together with a portion of the wall of the inner volume. ∘ a subcarrier holder configured to store the precursor material, and ∘ a holder lid configured to seal the subcarrier holder wherein the holder lid is provided with one or more fins protruding from the lower side of the holder lid towards the subcarrier holder into the precursor material surface to form an unbranched gas flow channel (C) between a first tray port and a second tray port covering at least 90% of the surface of the precursor material in the subcarrier tray , and ∘ the holder lid is configured to at least partly form a lid sidewall of the subcarrier tray which abuts to the inner wall of the cylindrical volume of the container , thereby encompassing a portion of the sidewall of the subcarrier holder , wherein the lid sidewall perpendicularly protrudes from a main lid surface S towards the subcarrier, wherein a shape and extension of the lid sidewall of the holder lid and of the sidewall of the subcarrier holder are configured to form a further gas flow channel (G) together with a portion of the wall of the inner volume. <EOS>