A plasma generation apparatus comprising: an electrode cell ; a power source part configured to apply an AC voltage to said electrode cell; a housing that encloses said electrode cell; and a source gas supply part configured to supply a source gas from the outside of said housing into said housing, said electrode cell including: a first electrode ; a second electrode facing said first electrode so as to form a discharge space ; a dielectric arranged on at least either one of a main surface of said first electrode facing said discharge space and a main surface of said second electrode facing said discharge space; and a pass-through (PH) formed in a central portion of said electrode cell in a plan view, said pass-through penetrating said electrode cell with respect to a facing direction in which said first electrode and said second electrode face each other, said plasma generation apparatus further comprising: an insulating tube having a cylindrical shape and arranged in said pass-through, said insulating tube including an ejection hole that is formed in a side surface of said cylindrical shape; and a precursor supply part connected to a hollow portion of said insulating tube from the outside of said housing and configured to supply a metal precursor. an electrode cell ; a power source part configured to apply an AC voltage to said electrode cell; a housing that encloses said electrode cell; and a source gas supply part configured to supply a source gas from the outside of said housing into said housing, said electrode cell including: a first electrode ; a second electrode facing said first electrode so as to form a discharge space ; a dielectric arranged on at least either one of a main surface of said first electrode facing said discharge space and a main surface of said second electrode facing said discharge space; and a pass-through (PH) formed in a central portion of said electrode cell in a plan view, said pass-through penetrating said electrode cell with respect to a facing direction in which said first electrode and said second electrode face each other, a first electrode ; a second electrode facing said first electrode so as to form a discharge space ; a dielectric arranged on at least either one of a main surface of said first electrode facing said discharge space and a main surface of said second electrode facing said discharge space; and a pass-through (PH) formed in a central portion of said electrode cell in a plan view, said pass-through penetrating said electrode cell with respect to a facing direction in which said first electrode and said second electrode face each other, said plasma generation apparatus further comprising: an insulating tube having a cylindrical shape and arranged in said pass-through, said insulating tube including an ejection hole that is formed in a side surface of said cylindrical shape; and a precursor supply part connected to a hollow portion of said insulating tube from the outside of said housing and configured to supply a metal precursor. an insulating tube having a cylindrical shape and arranged in said pass-through, said insulating tube including an ejection hole that is formed in a side surface of said cylindrical shape; and a precursor supply part connected to a hollow portion of said insulating tube from the outside of said housing and configured to supply a metal precursor. <EOS>