A method for calibrating a laser scanning field, comprising: determining a set of pattern position errors between (i) a set of expected pattern positions of a calibration pattern on a laser target situated in a laser processing field of a laser system and produced based on a set of initial scan optic actuation corrections associated with a scan optic of the laser system and (ii) a set of measured pattern positions of the calibration pattern ; curve fitting the set of pattern position errors to a first function that characterizes a scan response of the laser system that includes mechanical tolerances and manufacturing errors at a resolution of the set of measured pattern positions; curve fitting the set of initial scan optic actuation corrections to a differentiable second function; determining a set of scan optic actuation rates from a derivative of the surface function describing the set of initial scan optic actuation corrections; and updating the set of initial scan optic actuation corrections based on the set of scan optic actuation rates and the set of pattern position errors so as to form a set of updated scan optic actuation corrections that is associated with a reduction of at least a portion of the set of pattern position errors, wherein the updating of the set of initial scan optic actuation corrections includes evaluating the surface function derivative at a plurality of positions in the laser processing field and multiplying the respective surface function derivative values by the respective pattern position errors of the first function to define respective products and modifying the respective initial scan optic actuation corrections with the respective products; wherein the first function is a polynomial function of order two or greater and the second function is a polynomial function of order two or greater. determining a set of pattern position errors between (i) a set of expected pattern positions of a calibration pattern on a laser target situated in a laser processing field of a laser system and produced based on a set of initial scan optic actuation corrections associated with a scan optic of the laser system and (ii) a set of measured pattern positions of the calibration pattern ; curve fitting the set of pattern position errors to a first function that characterizes a scan response of the laser system that includes mechanical tolerances and manufacturing errors at a resolution of the set of measured pattern positions; curve fitting the set of initial scan optic actuation corrections to a differentiable second function; determining a set of scan optic actuation rates from a derivative of the surface function describing the set of initial scan optic actuation corrections; and updating the set of initial scan optic actuation corrections based on the set of scan optic actuation rates and the set of pattern position errors so as to form a set of updated scan optic actuation corrections that is associated with a reduction of at least a portion of the set of pattern position errors, wherein the updating of the set of initial scan optic actuation corrections includes evaluating the surface function derivative at a plurality of positions in the laser processing field and multiplying the respective surface function derivative values by the respective pattern position errors of the first function to define respective products and modifying the respective initial scan optic actuation corrections with the respective products; wherein the first function is a polynomial function of order two or greater and the second function is a polynomial function of order two or greater. <EOS>