An imprint apparatus configured to perform an imprint process of curing a resin on a substrate while a mold having a pattern surface on which a pattern is formed is kept in contact with the resin, and separating the mold from the cured resin, thereby forming the pattern onto the substrate, the apparatus comprising: a deforming unit configured to deform the pattern surface by applying a force to the mold; wherein (a) the apparatus further comprises a holding unit having a holding surface configured to hold the mold and said deforming unit is configured to deform the mold using a pressure in a chamber between the holding surface and a surface of the mold on a side of the holding surface, so that the pattern surface forms a convex surface that bulges toward the substrate, or (b) said deforming unit is configured to deform the mold using an actuator configured to apply a force to a side surface of the mold, so that the pattern surface forms a convex surface that bulges toward the substrate, the apparatus further comprising: an obtaining unit configured to obtain thickness information of the mold; a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by said obtaining unit, so that the pattern surface has a target shape in the imprint process; and a control unit configured to control said deforming unit to apply the force calculated by said calculation unit to the mold in the imprint process. a deforming unit configured to deform the pattern surface by applying a force to the mold; wherein (a) the apparatus further comprises a holding unit having a holding surface configured to hold the mold and said deforming unit is configured to deform the mold using a pressure in a chamber between the holding surface and a surface of the mold on a side of the holding surface, so that the pattern surface forms a convex surface that bulges toward the substrate, or (b) said deforming unit is configured to deform the mold using an actuator configured to apply a force to a side surface of the mold, so that the pattern surface forms a convex surface that bulges toward the substrate, (a) the apparatus further comprises a holding unit having a holding surface configured to hold the mold and said deforming unit is configured to deform the mold using a pressure in a chamber between the holding surface and a surface of the mold on a side of the holding surface, so that the pattern surface forms a convex surface that bulges toward the substrate, or (b) said deforming unit is configured to deform the mold using an actuator configured to apply a force to a side surface of the mold, so that the pattern surface forms a convex surface that bulges toward the substrate, the apparatus further comprising: an obtaining unit configured to obtain thickness information of the mold; a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by said obtaining unit, so that the pattern surface has a target shape in the imprint process; and a control unit configured to control said deforming unit to apply the force calculated by said calculation unit to the mold in the imprint process. an obtaining unit configured to obtain thickness information of the mold; a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by said obtaining unit, so that the pattern surface has a target shape in the imprint process; and a control unit configured to control said deforming unit to apply the force calculated by said calculation unit to the mold in the imprint process. <EOS>