A method of manufacturing a semiconductor device comprising: a first process in which a first wiring is provided on a first surface of a semiconductor substrate including the first surface and a second surface opposite to each other; a second process in which a support substrate is attached to the first surface after the first process; a third process in which a portion of the semiconductor substrate on the second surface side is removed and thus the semiconductor substrate is thinned so that the thickness of the semiconductor substrate is smaller than the thickness of the support substrate after the second process; a fourth process in which a through hole to extend from the first surface to the second surface is formed in the semiconductor substrate , and a part of the first wiring is exposed to a first opening of the through hole on the first surface side after the third process; a fifth process in which a dip coating method is performed using a first resin material and thus a resin insulating layer that is continuous through a second opening of the through hole on the second surface side is provided on an inner surface of the through hole and the second surface after the fourth process; a sixth process in which a contact hole is formed in the resin insulating layer , and the part of the first wiring is exposed to an opening of the contact hole on the first surface side after the fifth process; and a seventh process in which a second wiring is provided on a surface of the resin insulating layer , and the first wiring and the second wiring are electrically connected in the opening of the contact hole on the first surface side after the sixth process. a first process in which a first wiring is provided on a first surface of a semiconductor substrate including the first surface and a second surface opposite to each other; a second process in which a support substrate is attached to the first surface after the first process; a third process in which a portion of the semiconductor substrate on the second surface side is removed and thus the semiconductor substrate is thinned so that the thickness of the semiconductor substrate is smaller than the thickness of the support substrate after the second process; a fourth process in which a through hole to extend from the first surface to the second surface is formed in the semiconductor substrate , and a part of the first wiring is exposed to a first opening of the through hole on the first surface side after the third process; a fifth process in which a dip coating method is performed using a first resin material and thus a resin insulating layer that is continuous through a second opening of the through hole on the second surface side is provided on an inner surface of the through hole and the second surface after the fourth process; a sixth process in which a contact hole is formed in the resin insulating layer , and the part of the first wiring is exposed to an opening of the contact hole on the first surface side after the fifth process; and a seventh process in which a second wiring is provided on a surface of the resin insulating layer , and the first wiring and the second wiring are electrically connected in the opening of the contact hole on the first surface side after the sixth process. <EOS>