A vacuum gripper , comprising: a main body (31-33); a plurality of first vacuum pads (35a-35h) attached directly or indirectly to the main body (31-33) and configured to suction an uppermost workpiece (W) among a plurality of stacked workpieces (W) in a state in which the first vacuum pads (35a-35h) make contact with positions on a surface of the uppermost workpiece (W); a slider configured to slide in an outward direction of the main body (31-33); and a second vacuum pad attached to the slider ; the vacuum gripper being characterized by further comprising: a sensor attached to the slider and configured to detect an end portion of the uppermost workpiece (W) when the slider slides to protrude in the outward direction of the main body (31-33) while the first vacuum pads (35a-35h) are suctioning the uppermost workpiece (W); wherein the second vacuum pad is configured to hold up the end portion of the uppermost workpiece (W) by suctioning the uppermost workpiece (W) in a state in which the second vacuum pad makes contact with a position outside the positions at which the first vacuum pads (35a-35h) make contact on a same surface of the uppermost workpiece (W) while the sensor detects the end portion of the uppermost workpiece (W) and the slider is stopped. a main body (31-33); a plurality of first vacuum pads (35a-35h) attached directly or indirectly to the main body (31-33) and configured to suction an uppermost workpiece (W) among a plurality of stacked workpieces (W) in a state in which the first vacuum pads (35a-35h) make contact with positions on a surface of the uppermost workpiece (W); a slider configured to slide in an outward direction of the main body (31-33); and a second vacuum pad attached to the slider ; the vacuum gripper being characterized by further comprising: a sensor attached to the slider and configured to detect an end portion of the uppermost workpiece (W) when the slider slides to protrude in the outward direction of the main body (31-33) while the first vacuum pads (35a-35h) are suctioning the uppermost workpiece (W); wherein the second vacuum pad is configured to hold up the end portion of the uppermost workpiece (W) by suctioning the uppermost workpiece (W) in a state in which the second vacuum pad makes contact with a position outside the positions at which the first vacuum pads (35a-35h) make contact on a same surface of the uppermost workpiece (W) while the sensor detects the end portion of the uppermost workpiece (W) and the slider is stopped. a sensor attached to the slider and configured to detect an end portion of the uppermost workpiece (W) when the slider slides to protrude in the outward direction of the main body (31-33) while the first vacuum pads (35a-35h) are suctioning the uppermost workpiece (W); wherein the second vacuum pad is configured to hold up the end portion of the uppermost workpiece (W) by suctioning the uppermost workpiece (W) in a state in which the second vacuum pad makes contact with a position outside the positions at which the first vacuum pads (35a-35h) make contact on a same surface of the uppermost workpiece (W) while the sensor detects the end portion of the uppermost workpiece (W) and the slider is stopped. <EOS>