An interferometric microscopy arrangement for inspecting a sample placed at a sample plane by shining a light beam from an illumination source onto the sample and detecting an interference pattern at an optical detector , the interferometric microscopy arrangement comprising: - an objective lens configured to receive the light beam after the light beam has interacted with the sample; - a beam splitter unit positioned at a focal length of the objective lens and configured to receive the light beam from the objective lens , wherein the beam splitter unit comprises a transparent substrate and a point-like beam splitting layer wherein the point-like beam splitting layer is configured to split a part of the light beam into a reference beam resulting from reflection at the point-like beam splitting layer and an object beam resulting from transmission through the point-like beam splitting layer , wherein the point-like beam splitting layer is configured to spatially filter a part of the light beam to remove at least a part of an object information from the reference beam so created; - a reference beam tube lens configured to receive the reference beam from the beam splitter unit ; - an object beam tube lens configured to receive the object beam from the beam splitter unit ; - an optical detector ; - a beam combiner unit comprising a transparent substrate and a beam combiner layer , the beam combiner unit configured to receive the reference beam from the reference beam tube lens and to receive the object beam from the object beam tube lens , and to combine the reference beam and the object beam to form a pattern generating beam and to direct the pattern generating beam towards the optical detector to form the interference pattern at the optical detector ; - a reference beam reflector that reflects the reference beam coming from the reference beam tube lens towards the beam combiner unit ; and - an object beam reflector that reflects the object beam coming from the object beam tube lens towards the beam combiner unit . - an objective lens configured to receive the light beam after the light beam has interacted with the sample; - a beam splitter unit positioned at a focal length of the objective lens and configured to receive the light beam from the objective lens , wherein the beam splitter unit comprises a transparent substrate and a point-like beam splitting layer wherein the point-like beam splitting layer is configured to split a part of the light beam into a reference beam resulting from reflection at the point-like beam splitting layer and an object beam resulting from transmission through the point-like beam splitting layer , wherein the point-like beam splitting layer is configured to spatially filter a part of the light beam to remove at least a part of an object information from the reference beam so created; - a reference beam tube lens configured to receive the reference beam from the beam splitter unit ; - an object beam tube lens configured to receive the object beam from the beam splitter unit ; - an optical detector ; - a beam combiner unit comprising a transparent substrate and a beam combiner layer , the beam combiner unit configured to receive the reference beam from the reference beam tube lens and to receive the object beam from the object beam tube lens , and to combine the reference beam and the object beam to form a pattern generating beam and to direct the pattern generating beam towards the optical detector to form the interference pattern at the optical detector ; - a reference beam reflector that reflects the reference beam coming from the reference beam tube lens towards the beam combiner unit ; and - an object beam reflector that reflects the object beam coming from the object beam tube lens towards the beam combiner unit . <EOS>