A MEMS device, comprising: a layer stack having at least one second layer formed between a first layer and a third layer , wherein a cavity is formed in the second layer ; two laterally deflectable elements arranged laterally spaced apart in the cavity , each of the two laterally deflectable elements each having an end connected to a sidewall of the cavity ; a connecting element connected to the two laterally deflectable elements to couple the movement of the two laterally deflectable elements ; a plurality of first fingers (150-1, ..., 150-6) arranged discretely spaced apart between the two laterally deflectable elements on the sidewall of the cavity ; a plurality of second fingers (160-1, ..., 160-5) arranged discretely spaced apart between the two laterally deflectable elements on the connecting element and engaging with the plurality of first fingers (150-1, ..., 150-6), wherein the plurality of second fingers (160-1, ..., 160-5) is laterally displaceable relative to the plurality of first fingers (150-1, ..., 150-6) upon deformation of the two laterally deflectable elements , so that the plurality of first fingers (150-1, ..., 150-6) and the plurality of second fingers (160-1, ..., 160-5) define a plurality of volume-variable sub-cavities (116-1, ..., 116-10) within the cavity , wherein each of the plurality of sub-cavities (116-1, ..., 116-10) is in contact with an ambient fluid of the MEMS device via a respective opening (170-1, ..., 170-5, 180-1, ..., 180-5), and wherein, in the case of adjacent sub-cavities of the plurality of sub-cavities (116-1, ..., 116-10), the opening (170-1, ..., 170-5) of the one sub-cavity of the adjacent sub-cavities is respectively formed in a different layer of the first layer , the second layer , and the third layer than the opening (180-1, ..., 180-5) of the other sub-cavity of the adjacent sub-cavities. a layer stack having at least one second layer formed between a first layer and a third layer , wherein a cavity is formed in the second layer ; two laterally deflectable elements arranged laterally spaced apart in the cavity , each of the two laterally deflectable elements each having an end connected to a sidewall of the cavity ; a connecting element connected to the two laterally deflectable elements to couple the movement of the two laterally deflectable elements ; a plurality of first fingers (150-1, ..., 150-6) arranged discretely spaced apart between the two laterally deflectable elements on the sidewall of the cavity ; a plurality of second fingers (160-1, ..., 160-5) arranged discretely spaced apart between the two laterally deflectable elements on the connecting element and engaging with the plurality of first fingers (150-1, ..., 150-6), wherein the plurality of second fingers (160-1, ..., 160-5) is laterally displaceable relative to the plurality of first fingers (150-1, ..., 150-6) upon deformation of the two laterally deflectable elements , so that the plurality of first fingers (150-1, ..., 150-6) and the plurality of second fingers (160-1, ..., 160-5) define a plurality of volume-variable sub-cavities (116-1, ..., 116-10) within the cavity , wherein each of the plurality of sub-cavities (116-1, ..., 116-10) is in contact with an ambient fluid of the MEMS device via a respective opening (170-1, ..., 170-5, 180-1, ..., 180-5), and wherein, in the case of adjacent sub-cavities of the plurality of sub-cavities (116-1, ..., 116-10), the opening (170-1, ..., 170-5) of the one sub-cavity of the adjacent sub-cavities is respectively formed in a different layer of the first layer , the second layer , and the third layer than the opening (180-1, ..., 180-5) of the other sub-cavity of the adjacent sub-cavities. <EOS>