A MEMS device comprising at least one comb capacitor, the comb capacitor comprising: a moveable electrode , the moveable electrode being moveable relative to fixed components of the MEMS device, the moveable electrode comprising a plurality of comb fingers; a fixed electrode , the fixed electrode being fixed relative to other fixed components of the MEMS device, the fixed electrode comprising a plurality of comb fingers, wherein the comb fingers of the moveable electrode are interdigitated with the comb fingers of the fixed electrode ; and a handle wafer and a cap wafer, the handle wafer and the cap wafer being located on opposite sides of the moveable and fixed electrodes and extending parallel to the comb fingers of the moveable and fixed electrodes ; wherein a gap between the moveable and fixed electrodes and the handle wafer is a first gap, and a gap between the moveable and fixed electrodes and the cap wafer is a second gap; wherein one of the first and second gaps is smaller than the other one; characterised in that one or both of: a) sides of the comb fingers of the moveable and fixed electrodes opposite one of the cap wafer or the handle wafer with a smaller gap include similar recesses positioned on every comb finger of the comb capacitor such the recesses overlap a common axis; and b) one of the cap wafer or handle wafer with a smaller gap includes at least one recess opposite the comb fingers of the movable and fixed electrodes ; wherein the recess or recesses provide a channel through which gas can move into or out of the space between the moveable electrode and the fixed electrode and to or from the interior space of the MEMS device surrounding the comb capacitor. a moveable electrode , the moveable electrode being moveable relative to fixed components of the MEMS device, the moveable electrode comprising a plurality of comb fingers; a fixed electrode , the fixed electrode being fixed relative to other fixed components of the MEMS device, the fixed electrode comprising a plurality of comb fingers, wherein the comb fingers of the moveable electrode are interdigitated with the comb fingers of the fixed electrode ; and a handle wafer and a cap wafer, the handle wafer and the cap wafer being located on opposite sides of the moveable and fixed electrodes and extending parallel to the comb fingers of the moveable and fixed electrodes ; wherein a gap between the moveable and fixed electrodes and the handle wafer is a first gap, and a gap between the moveable and fixed electrodes and the cap wafer is a second gap; wherein one of the first and second gaps is smaller than the other one; characterised in that one or both of: a) sides of the comb fingers of the moveable and fixed electrodes opposite one of the cap wafer or the handle wafer with a smaller gap include similar recesses positioned on every comb finger of the comb capacitor such the recesses overlap a common axis; and b) one of the cap wafer or handle wafer with a smaller gap includes at least one recess opposite the comb fingers of the movable and fixed electrodes ; a) sides of the comb fingers of the moveable and fixed electrodes opposite one of the cap wafer or the handle wafer with a smaller gap include similar recesses positioned on every comb finger of the comb capacitor such the recesses overlap a common axis; and b) one of the cap wafer or handle wafer with a smaller gap includes at least one recess opposite the comb fingers of the movable and fixed electrodes ; wherein the recess or recesses provide a channel through which gas can move into or out of the space between the moveable electrode and the fixed electrode and to or from the interior space of the MEMS device surrounding the comb capacitor. <EOS>