An integrated circuit comprising: a plurality of sensors implemented in corresponding ones of one or more functional circuit blocks ; a metrology control circuit including: an analog process monitoring circuit ; a reference sensor , wherein the reference sensor is implemented using a circuit topology identical to each of the plurality of sensors and has substantially same operating characteristics as each of the plurality of sensors ; a precision voltage generation circuit configured to provide a known voltage value to the reference sensor ; a precision temperature sensing circuit in close proximity to the reference sensor ; and a processing circuit configured to correlate readings received from the reference sensor to a voltage received from the precision voltage generation circuit and the precision temperature sensing circuit, and further configured to calibrate each of the plurality of sensors based on the correlated readings; characterized in that the analog process monitoring circuit is configured to determine operating characteristics of each transistor of at least a subset of a plurality of transistors implemented on the integrated circuit . a plurality of sensors implemented in corresponding ones of one or more functional circuit blocks ; a metrology control circuit including: an analog process monitoring circuit ; a reference sensor , wherein the reference sensor is implemented using a circuit topology identical to each of the plurality of sensors and has substantially same operating characteristics as each of the plurality of sensors ; a precision voltage generation circuit configured to provide a known voltage value to the reference sensor ; a precision temperature sensing circuit in close proximity to the reference sensor ; and a processing circuit configured to correlate readings received from the reference sensor to a voltage received from the precision voltage generation circuit and the precision temperature sensing circuit, and further configured to calibrate each of the plurality of sensors based on the correlated readings; characterized in that the analog process monitoring circuit is configured to determine operating characteristics of each transistor of at least a subset of a plurality of transistors implemented on the integrated circuit . an analog process monitoring circuit ; a reference sensor , wherein the reference sensor is implemented using a circuit topology identical to each of the plurality of sensors and has substantially same operating characteristics as each of the plurality of sensors ; a precision voltage generation circuit configured to provide a known voltage value to the reference sensor ; a precision temperature sensing circuit in close proximity to the reference sensor ; and a processing circuit configured to correlate readings received from the reference sensor to a voltage received from the precision voltage generation circuit and the precision temperature sensing circuit, and further configured to calibrate each of the plurality of sensors based on the correlated readings; characterized in that the analog process monitoring circuit is configured to determine operating characteristics of each transistor of at least a subset of a plurality of transistors implemented on the integrated circuit . <EOS>