A system for laser processing of a workpiece , the system comprising - a laser source for generating a working beam , wherein the laser source is further configured for generating a measurement beam or wherein the system comprises a further optical source for generating a measurement beam , - a laser scanning system defining a center beam axis and being both configured for scanning the working beam over the workpiece and for scanning the measurement beam over the workpiece, - a camera which is inclined to the center beam axis , spaced from the center beam axis and arranged in a fixed relation to the laser scanning system , - a robot configured for moving the laser scanning system , - a processing unit configured - to determine a relation between a setting of the system and a resulting position of a focus of the working beam or of a projection of the working beam relative to the workpiece for that setting, based on a spatial relation between the working beam and the measurement beam and based on a camera image of the workpiece taken when the workpiece is scanned by the measurement beam , and - to generate path data based on said determined relation and based on predefined criteria, - a control unit configured to - control the setting of the system for scanning the working beam over the workpiece according to the path data for processing the material of the workpiece. - a laser source for generating a working beam , wherein the laser source is further configured for generating a measurement beam or wherein the system comprises a further optical source for generating a measurement beam , - a laser scanning system defining a center beam axis and being both configured for scanning the working beam over the workpiece and for scanning the measurement beam over the workpiece, - a camera which is inclined to the center beam axis , spaced from the center beam axis and arranged in a fixed relation to the laser scanning system , inclined to the center beam axis , spaced from the center beam axis and arranged in a fixed relation to the laser scanning system , - a robot configured for moving the laser scanning system , - a processing unit configured - to determine a relation between a setting of the system and a resulting position of a focus of the working beam or of a projection of the working beam relative to the workpiece for that setting, based on a spatial relation between the working beam and the measurement beam and based on a camera image of the workpiece taken when the workpiece is scanned by the measurement beam , and - to generate path data based on said determined relation and based on predefined criteria, - to determine a relation between a setting of the system and a resulting position of a focus of the working beam or of a projection of the working beam relative to the workpiece for that setting, based on a spatial relation between the working beam and the measurement beam and based on a camera image of the workpiece taken when the workpiece is scanned by the measurement beam , and - to generate path data based on said determined relation and based on predefined criteria, - a control unit configured to - control the setting of the system for scanning the working beam over the workpiece according to the path data for processing the material of the workpiece. - control the setting of the system for scanning the working beam over the workpiece according to the path data for processing the material of the workpiece. <EOS>