A water polishing system (100; 600) comprising: a connection to a source of ultrapure water (UPW) ; an ultrafiltration (UF) module having an inlet and a permeate outlet; a vibration source operatively coupled to the UF module, the vibration source configured to increase particle retention efficiency of a membrane of the UF module by applying vibrations to the UF module during filtration of the UPW; a recirculation conduit communicating the permeate outlet with the inlet and forming a recirculation loop; a recirculation pump disposed along the recirculation conduit upstream from the inlet of the UF module and fluidly coupled to the source of UPW; a supply conduit fluidly coupled to the recirculating conduit and a demand source, the supply conduit positioned downstream from the permeate outlet; a pressure control valve disposed along the recirculation conduit downstream from the supply conduit, the pressure control valve configured to maintain a pressure of the permeate at a predetermined value; a pressure sensor positioned along the recirculation conduit between the supply conduit and the pressure control valve, configured to generate a pressure signal indicative of a pressure of the permeate; a controller operatively coupled to the pressure sensor and configured to control operation of the pressure control valve based on the pressure signal;a UPW make-up conduit fluidly coupled to the source of UPW and the recirculation conduit; and a blending point where the UPW make-up conduit fluidly connects to the recirculation conduit such that the pressure control valve is positioned between the blending point and the pressure sensor, and the controller is configured to operate the pressure control valve such that the pressure of the permeate is maintained at a predetermined pressure value, wherein the recirculation pump is positioned downstream from the blending point such that a fluid including UPW and permeate is delivered to the recirculation pump at the predetermined pressure value. a connection to a source of ultrapure water (UPW) ; an ultrafiltration (UF) module having an inlet and a permeate outlet; a vibration source operatively coupled to the UF module, the vibration source configured to increase particle retention efficiency of a membrane of the UF module by applying vibrations to the UF module during filtration of the UPW; a recirculation conduit communicating the permeate outlet with the inlet and forming a recirculation loop; a recirculation pump disposed along the recirculation conduit upstream from the inlet of the UF module and fluidly coupled to the source of UPW; a supply conduit fluidly coupled to the recirculating conduit and a demand source, the supply conduit positioned downstream from the permeate outlet; a pressure control valve disposed along the recirculation conduit downstream from the supply conduit, the pressure control valve configured to maintain a pressure of the permeate at a predetermined value; a pressure sensor positioned along the recirculation conduit between the supply conduit and the pressure control valve, configured to generate a pressure signal indicative of a pressure of the permeate; a controller operatively coupled to the pressure sensor and configured to control operation of the pressure control valve based on the pressure signal;a UPW make-up conduit fluidly coupled to the source of UPW and the recirculation conduit; and a blending point where the UPW make-up conduit fluidly connects to the recirculation conduit such that the pressure control valve is positioned between the blending point and the pressure sensor, and the controller is configured to operate the pressure control valve such that the pressure of the permeate is maintained at a predetermined pressure value, wherein the recirculation pump is positioned downstream from the blending point such that a fluid including UPW and permeate is delivered to the recirculation pump at the predetermined pressure value. <EOS>