A measurement system , comprising: a control device ; a measurement device , having a buffer, adapted to measure a measurement object (W) in a first period (Tb) to obtain measurement values and to temporarily store the measurement values in the buffer, wherein the measurement device is adapted to transmit the measurement values temporarily stored in the buffer and first additional information including information of the number of the measurement values temporarily stored in the buffer to the control device by using first frames (#K1, #K2, #K3,...), wherein the measurement device is adapted to transmit each of the first frame in a second period (Ta) that is longer than the first period (Tb), wherein the first period (Tb) during which each of the measurement values is measured is not a divisor of the second period (Ta) during which each of the first frames is transmitted, and the control device is adapted to use the first additional information to generate first time series data in which the measurement values are arranged in time series; and a drive device , adapted to change a relative position relation between the measurement device and the measurement object (W), wherein the drive device is adapted to acquire an operation state of the drive device in a third period to obtain state values and to temporarily store the state values in a buffer of the drive device , wherein the drive device is adapted to use second frames (#D1, #D2, #D3, ...) that are transmitted in a fourth period longer than the third period to transmit the state values temporarily stored in a buffer of the drive device and second additional information including information of the number of the state values temporarily stored in a buffer of the drive device to the control device , and the control device is adapted to use the second additional information to generate second time series data in which the state values are arranged in time series. a control device ; a measurement device , having a buffer, adapted to measure a measurement object (W) in a first period (Tb) to obtain measurement values and to temporarily store the measurement values in the buffer, wherein the measurement device is adapted to transmit the measurement values temporarily stored in the buffer and first additional information including information of the number of the measurement values temporarily stored in the buffer to the control device by using first frames (#K1, #K2, #K3,...), wherein the measurement device is adapted to transmit each of the first frame in a second period (Ta) that is longer than the first period (Tb), wherein the first period (Tb) during which each of the measurement values is measured is not a divisor of the second period (Ta) during which each of the first frames is transmitted, and the control device is adapted to use the first additional information to generate first time series data in which the measurement values are arranged in time series; and a drive device , adapted to change a relative position relation between the measurement device and the measurement object (W), wherein the drive device is adapted to acquire an operation state of the drive device in a third period to obtain state values and to temporarily store the state values in a buffer of the drive device , wherein the drive device is adapted to use second frames (#D1, #D2, #D3, ...) that are transmitted in a fourth period longer than the third period to transmit the state values temporarily stored in a buffer of the drive device and second additional information including information of the number of the state values temporarily stored in a buffer of the drive device to the control device , and the control device is adapted to use the second additional information to generate second time series data in which the state values are arranged in time series. <EOS>