An arrangement for determining properties and/or parameters of a sample and/or at least one layer formed on a surface of a sample, in which a plurality of detectors, which are designed for the spatially resolved spectral analysis of electromagnetic radiation within a wavelength interval, are arranged in a row or a row and column arrangement and the detectors are connected to an electronic evaluation unit and arranged such that electromagnetic radiation emitted by a broadband radiation source impinges on the detectors either after reflection at the surface of the sample, a layer formed on the sample, or at the surface of a layer within the sample and/or after passing through a sample that is transparent to electromagnetic radiation, characterized in that the irradiation takes place such that a homogeneous intensity of the electromagnetic radiation is maintained on a surface from which the electromagnetic radiation is reflected or transmitted through the surface and the electronic evaluation unit is designed such that that the spatially and wavelength-resolved measurement signals of the detectors are simultaneously compared within a wavelength interval with a theoretical wavelength-dependent profile of the respective radiation intensities obtained by simulation or a profile obtained by a calibration on at least one known sample, in order to obtain a statement on the determination of at least one property or at least one parameter of the sample or at least one layer formed on or at the sample for the recorded measurement positions and thus the spatially resolved distribution of at least one property or at least one parameter of the sample or at least one layer formed on or at the sample. a plurality of detectors, which are designed for the spatially resolved spectral analysis of electromagnetic radiation within a wavelength interval, are arranged in a row or a row and column arrangement and the detectors are connected to an electronic evaluation unit and arranged such that electromagnetic radiation emitted by a broadband radiation source impinges on the detectors either after reflection at the surface of the sample, a layer formed on the sample, or at the surface of a layer within the sample and/or after passing through a sample that is transparent to electromagnetic radiation, either after reflection at the surface of the sample, a layer formed on the sample, or at the surface of a layer within the sample and/or after passing through a sample that is transparent to electromagnetic radiation, characterized in that the irradiation takes place such that a homogeneous intensity of the electromagnetic radiation is maintained on a surface from which the electromagnetic radiation is reflected or transmitted through the surface and the electronic evaluation unit is designed such that that the spatially and wavelength-resolved measurement signals of the detectors are simultaneously compared within a wavelength interval with a theoretical wavelength-dependent profile of the respective radiation intensities obtained by simulation or a profile obtained by a calibration on at least one known sample, a theoretical wavelength-dependent profile of the respective radiation intensities obtained by simulation or a profile obtained by a calibration on at least one known sample, in order to obtain a statement on the determination of at least one property or at least one parameter of the sample or at least one layer formed on or at the sample for the recorded measurement positions and thus the spatially resolved distribution of at least one property or at least one parameter of the sample or at least one layer formed on or at the sample. <EOS>