A laser processing device comprising: an optical arrangement ; at least one movable mirror and an actuator arrangement for controlling the at least one movable mirror ; wherein the optical arrangement comprises an input for receiving a laser beam ; wherein the at least one movable mirror is arranged to change a state of the laser beam at the input ; and wherein the optical arrangement comprises a beam splitter which splits the laser beam into at least two partial beams ; and wherein the optical arrangement recombines the partial beams into a laser spot for generating an interference pattern in the laser spot ; wherein a change of an angle of incidence of the laser beam with respect to the input and optionally additionally a change of a position of the laser beam at the input causes at least one of the following: (i) a distance change DP of a distance between a center of the laser spot and an interference maximum of the interference pattern nearest in a predetermined direction , (ii) a position change DS of a position of the center of the laser spot ; wherein the optical arrangement is configured such that a condition DS + DP = n * L is valid for a continuous position change DS, and wherein n is a natural number; wherein L is a distance between two adjacent interference maxima of the interference pattern in the predetermined direction , including a tolerance range of ± 5%; and wherein the distance change DP is defined by a difference of a first distance and a second distance ; and wherein each of the first distance and the second distance is defined in the predetermined direction . an optical arrangement ; at least one movable mirror and an actuator arrangement for controlling the at least one movable mirror ; wherein the optical arrangement comprises an input for receiving a laser beam ; wherein the at least one movable mirror is arranged to change a state of the laser beam at the input ; and wherein the optical arrangement comprises a beam splitter which splits the laser beam into at least two partial beams ; and wherein the optical arrangement recombines the partial beams into a laser spot for generating an interference pattern in the laser spot ; wherein a change of an angle of incidence of the laser beam with respect to the input and optionally additionally a change of a position of the laser beam at the input causes at least one of the following: (i) a distance change DP of a distance between a center of the laser spot and an interference maximum of the interference pattern nearest in a predetermined direction , (ii) a position change DS of a position of the center of the laser spot ; (i) a distance change DP of a distance between a center of the laser spot and an interference maximum of the interference pattern nearest in a predetermined direction , (ii) a position change DS of a position of the center of the laser spot ; wherein the optical arrangement is configured such that a condition DS + DP = n * L is valid for a continuous position change DS, and wherein n is a natural number; wherein L is a distance between two adjacent interference maxima of the interference pattern in the predetermined direction , including a tolerance range of ± 5%; and wherein the distance change DP is defined by a difference of a first distance and a second distance ; and wherein each of the first distance and the second distance is defined in the predetermined direction . <EOS>