A process of producing a patterned polymeric substrate comprising: etching one or more ordered patterns onto a hard substrate, the ordered patterns comprising ordered arrays of nano-scale elements having cross-sectional dimensions in a range of from 10 nm to 1000 nm, the arrays having a spacing distance between their respective elements where cross-sectional dimension to spacing distance ratio is greater than 0.2; micro-patterning a polymeric film to form a membrane comprising a first surface bearing a pattern of micro-scale and/or meso-scale features for defining one or more channels and/or chambers, one or more of the micro-scale and/or meso-scale features comprising through-holes and one or more of the micro-scale and/or mesa-scale features not being through-holes; placing the membrane on the hard substrate with a surface opposite the first surface against the hard substrate, the through-holes aligned to expose the one or more ordered patterns, and applying pressure sufficient to seal lips of the membrane surrounding the through-holes against the hard substrate; placing a settable liquid polymer or metal in the through-holes and over the first surface and setting the settable liquid polymer or metal to form a stamp, the stamp comprising micro-scale and/or meso-scale reliefs for defining one or more channels and/or microfluidic chambers and further comprising one or more nano-scale relief patterns on the micro-scale and/or meso-scale reliefs that complement the one or more ordered patterns; patterning a polymeric substrate by stamping the polymeric substrate with the stamp to form the one or more channels and/or microfluidic chambers in the polymeric substrate and to form, in one or more surfaces of the polymeric substrate, one or more ordered patterns of nano-scale elements that are substantially identical to the one or more ordered patterns etched onto the hard substrate; and metallizing the nano-scale elements on the one or more surfaces of the polymeric substrate for plasmonic resonance reading. etching one or more ordered patterns onto a hard substrate, the ordered patterns comprising ordered arrays of nano-scale elements having cross-sectional dimensions in a range of from 10 nm to 1000 nm, the arrays having a spacing distance between their respective elements where cross-sectional dimension to spacing distance ratio is greater than 0.2; micro-patterning a polymeric film to form a membrane comprising a first surface bearing a pattern of micro-scale and/or meso-scale features for defining one or more channels and/or chambers, one or more of the micro-scale and/or meso-scale features comprising through-holes and one or more of the micro-scale and/or mesa-scale features not being through-holes; placing the membrane on the hard substrate with a surface opposite the first surface against the hard substrate, the through-holes aligned to expose the one or more ordered patterns, and applying pressure sufficient to seal lips of the membrane surrounding the through-holes against the hard substrate; placing a settable liquid polymer or metal in the through-holes and over the first surface and setting the settable liquid polymer or metal to form a stamp, the stamp comprising micro-scale and/or meso-scale reliefs for defining one or more channels and/or microfluidic chambers and further comprising one or more nano-scale relief patterns on the micro-scale and/or meso-scale reliefs that complement the one or more ordered patterns; patterning a polymeric substrate by stamping the polymeric substrate with the stamp to form the one or more channels and/or microfluidic chambers in the polymeric substrate and to form, in one or more surfaces of the polymeric substrate, one or more ordered patterns of nano-scale elements that are substantially identical to the one or more ordered patterns etched onto the hard substrate; and metallizing the nano-scale elements on the one or more surfaces of the polymeric substrate for plasmonic resonance reading.