A MEMS microphone (300, 400, 500, 600), the MEMS microphone (300, 400, 500, 600) comprising: a back plate (315, 415, 515, 615) having a first side (317, 417, 517, 617) and a second side (318, 418, 518, 618); a membrane (320, 420, 520, 620) coupled to the back plate (315, 415, 515, 615), and having a first side (322, 422, 522, 622) and a second side (323, 423, 523, 623); a support structure (325, 425, 525, 625) having a first side (327, 427, 527, 627) and a second side (328, 428, 528, 628), the support structure (325, 425, 525, 625) including a support structure opening, wherein the first side (327, 427, 527, 627) of the support structure (325, 425, 525, 625) is coupled to the second side of the back plate (318, 418, 518, 618); a substrate (305, 405, 505, 605) having a first side and a second side, the substrate including a substrate opening, wherein the first side of the substrate (305, 405, 505, 605) is coupled to the second side of the support structure (328, 428, 528, 628); and an overtravel stop not coupled to the membrane (320, 420, 520, 620), wherein the overtravel stop limits a movement of the membrane (320, 420, 520, 620) away from back plate (315, 415, 515, 615) and including at least one of an overtravel stop structure coupled to the substrate, an overtravel stop structure (440, 540) formed as part of a carrier chip (410, 510), and an overtravel stop structure formed as part of the support structure in the support structure opening, wherein the overtravel stop structure having a first side (312, 412, 512, 612) and a second side (313, 413, 513, 613). a back plate (315, 415, 515, 615) having a first side (317, 417, 517, 617) and a second side (318, 418, 518, 618); a membrane (320, 420, 520, 620) coupled to the back plate (315, 415, 515, 615), and having a first side (322, 422, 522, 622) and a second side (323, 423, 523, 623); a support structure (325, 425, 525, 625) having a first side (327, 427, 527, 627) and a second side (328, 428, 528, 628), the support structure (325, 425, 525, 625) including a support structure opening, wherein the first side (327, 427, 527, 627) of the support structure (325, 425, 525, 625) is coupled to the second side of the back plate (318, 418, 518, 618); a substrate (305, 405, 505, 605) having a first side and a second side, the substrate including a substrate opening, wherein the first side of the substrate (305, 405, 505, 605) is coupled to the second side of the support structure (328, 428, 528, 628); and an overtravel stop not coupled to the membrane (320, 420, 520, 620), wherein the overtravel stop limits a movement of the membrane (320, 420, 520, 620) away from back plate (315, 415, 515, 615) and including at least one of an overtravel stop structure coupled to the substrate, an overtravel stop structure (440, 540) formed as part of a carrier chip (410, 510), and an overtravel stop structure formed as part of the support structure in the support structure opening, an overtravel stop structure coupled to the substrate, an overtravel stop structure (440, 540) formed as part of a carrier chip (410, 510), and an overtravel stop structure formed as part of the support structure in the support structure opening, wherein the overtravel stop structure having a first side (312, 412, 512, 612) and a second side (313, 413, 513, 613).