An SACP method comprising: directing a beam of charged particles onto an object surface of an object using a particle optical system; and detecting intensities of particles emanating from the object; wherein the particle optical system comprises: an objective lens for focusing the beam, a first beam deflector located upstream of the objective lens in a beam path of the beam, an aberration corrector located between the first beam deflector and the objective lens in the beam path and a second beam deflector located downstream of the aberration corrector in the beam path; wherein the method further comprises: adjusting an excitation of the second beam deflector for adjusting an impingement location of the beam on the object surface; adjusting an excitation of the first beam deflector for adjusting an angle of incidence of the beam on the object surface without changing the impingement location and detecting the intensity; and repeating the adjusting of the excitation of the first beam deflector for adjusting the angle of incidence (Ψ) without changing the impingement location such that a corresponding intensity is detected for each of at least 100 different angles of incidence at the same impingement location; and wherein the particle optical system further comprises a first controller which is configured to excite the first beam deflector and to transmit first excitation signals to the first beam deflector wherein each of the first excitation signals have a period of less than 1/100 s, in particular of less than 1/1,000 s. directing a beam of charged particles onto an object surface of an object using a particle optical system; and detecting intensities of particles emanating from the object; wherein the particle optical system comprises: an objective lens for focusing the beam, a first beam deflector located upstream of the objective lens in a beam path of the beam, an aberration corrector located between the first beam deflector and the objective lens in the beam path and a second beam deflector located downstream of the aberration corrector in the beam path; wherein the method further comprises: adjusting an excitation of the second beam deflector for adjusting an impingement location of the beam on the object surface; adjusting an excitation of the first beam deflector for adjusting an angle of incidence of the beam on the object surface without changing the impingement location and detecting the intensity; and repeating the adjusting of the excitation of the first beam deflector for adjusting the angle of incidence (Ψ) without changing the impingement location such that a corresponding intensity is detected for each of at least 100 different angles of incidence at the same impingement location; and adjusting an excitation of the second beam deflector for adjusting an impingement location of the beam on the object surface; adjusting an excitation of the first beam deflector for adjusting an angle of incidence of the beam on the object surface without changing the impingement location and detecting the intensity; and repeating the adjusting of the excitation of the first beam deflector for adjusting the angle of incidence (Ψ) without changing the impingement location such that a corresponding intensity is detected for each of at least 100 different angles of incidence at the same impingement location; and wherein the particle optical system further comprises a first controller which is configured to excite the first beam deflector and to transmit first excitation signals to the first beam deflector wherein each of the first excitation signals have a period of less than 1/100 s, in particular of less than 1/1,000 s.