A scanning device, comprising: a base containing a pair of rotational bearings disposed at opposing ends of a gimbal axis; a gimbal, comprising a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base; a mirror assembly, comprising a semiconductor substrate, which has a planar surface that has been etched and coated to define: a support, which is mounted in the gimbal along the edges of the support so that the gimbal axis is parallel to the surface of the substrate; at least one mirror, contained within the support; and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, perpendicular to the gimbal axis about which the at least one mirror rotates relative to the support, and a drive, comprising: a mirror drive assembly, which comprises at least one rotor comprising one or more permanent magnets, which are fixed to the at least one mirror, and a stator comprising at least one core, which is positioned in proximity to the at least one mirror and wound with one or more coils; a gimbal drive assembly (34, 36, 38), which is configured to rotate the gimbal about the gimbal axis; and drive circuitry, which is coupled to apply electrical currents to the gimbal drive assembly and to the one or more coils of the mirror drive assembly so as to cause the gimbal and the at least one mirror to rotate about the gimbal axis and the at least one mirror axis, respectively. a base containing a pair of rotational bearings disposed at opposing ends of a gimbal axis; a gimbal, comprising a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base; a mirror assembly, comprising a semiconductor substrate, which has a planar surface that has been etched and coated to define: a support, which is mounted in the gimbal along the edges of the support so that the gimbal axis is parallel to the surface of the substrate; at least one mirror, contained within the support; and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, perpendicular to the gimbal axis about which the at least one mirror rotates relative to the support, and a drive, comprising: a mirror drive assembly, which comprises at least one rotor comprising one or more permanent magnets, which are fixed to the at least one mirror, and a stator comprising at least one core, which is positioned in proximity to the at least one mirror and wound with one or more coils; a gimbal drive assembly (34, 36, 38), which is configured to rotate the gimbal about the gimbal axis; and drive circuitry, which is coupled to apply electrical currents to the gimbal drive assembly and to the one or more coils of the mirror drive assembly so as to cause the gimbal and the at least one mirror to rotate about the gimbal axis and the at least one mirror axis, respectively. a support, which is mounted in the gimbal along the edges of the support so that the gimbal axis is parallel to the surface of the substrate; at least one mirror, contained within the support; and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, perpendicular to the gimbal axis about which the at least one mirror rotates relative to the support, and a drive, comprising: a mirror drive assembly, which comprises at least one rotor comprising one or more permanent magnets, which are fixed to the at least one mirror, and a stator comprising at least one core, which is positioned in proximity to the at least one mirror and wound with one or more coils; a gimbal drive assembly (34, 36, 38), which is configured to rotate the gimbal about the gimbal axis; and drive circuitry, which is coupled to apply electrical currents to the gimbal drive assembly and to the one or more coils of the mirror drive assembly so as to cause the gimbal and the at least one mirror to rotate about the gimbal axis and the at least one mirror axis, respectively. a mirror drive assembly, which comprises at least one rotor comprising one or more permanent magnets, which are fixed to the at least one mirror, and a stator comprising at least one core, which is positioned in proximity to the at least one mirror and wound with one or more coils; a gimbal drive assembly (34, 36, 38), which is configured to rotate the gimbal about the gimbal axis; and drive circuitry, which is coupled to apply electrical currents to the gimbal drive assembly and to the one or more coils of the mirror drive assembly so as to cause the gimbal and the at least one mirror to rotate about the gimbal axis and the at least one mirror axis, respectively.