A specific resistance value adjustment apparatus comprising: a hollow fiber membrane module having a configuration in which an ultrapure water phase side area to which an ultrapure water is supplied and a gas phase side area to which an adjustment gas for adjusting a specific resistance value of the ultrapure water is supplied is divided by a hollow fiber membrane and the adjustment gas permeating the hollow fiber membrane is dissolved in the ultrapure water to produce an adjustment gas addition liquid in which the adjustment gas is dissolved in the ultrapure water; a gas supply pipe which supplies the adjustment gas to the hollow fiber membrane module; a liquid supply pipe to which the ultrapure water is supplied; a module passing pipe which communicates with the liquid supply pipe through a branch portion branching the liquid supply pipe and passes through the hollow fiber membrane module; a bypassing pipe which communicates with the liquid supply pipe through the branch portion and bypasses the hollow fiber membrane module; a liquid discharge pipe which communicates with the module passing pipe and the bypassing pipe through a joint portion in which the module passing pipe and the bypassing pipe are joined to each other at a downstream side of the hollow fiber membrane module; and a control valve which opens and closes the module passing pipe; wherein the module passing pipe includes a supply side module passing pipe which is disposed at an upstream side of the hollow fiber membrane module and supplies the ultrapure water to the hollow fiber membrane module and a discharge side module passing pipe which is disposed at a downstream side of the hollow fiber membrane module and discharges the adjustment gas addition liquid from the hollow fiber membrane module, wherein the control valve is attached to the discharge side module passing pipe and opens and closes the discharge side module passing pipe, and characterized in that the specific resistance value adjustment apparatus further comprises: a control unit configured to set an opening degree of the control valve in response to a first flow rate detected by a first flow rate detection unit; wherein the first flow rate detection unit detects a flow rate of the ultrapure water flowing through the liquid discharge pipe. a hollow fiber membrane module having a configuration in which an ultrapure water phase side area to which an ultrapure water is supplied and a gas phase side area to which an adjustment gas for adjusting a specific resistance value of the ultrapure water is supplied is divided by a hollow fiber membrane and the adjustment gas permeating the hollow fiber membrane is dissolved in the ultrapure water to produce an adjustment gas addition liquid in which the adjustment gas is dissolved in the ultrapure water; a gas supply pipe which supplies the adjustment gas to the hollow fiber membrane module; a liquid supply pipe to which the ultrapure water is supplied; a module passing pipe which communicates with the liquid supply pipe through a branch portion branching the liquid supply pipe and passes through the hollow fiber membrane module; a bypassing pipe which communicates with the liquid supply pipe through the branch portion and bypasses the hollow fiber membrane module; a liquid discharge pipe which communicates with the module passing pipe and the bypassing pipe through a joint portion in which the module passing pipe and the bypassing pipe are joined to each other at a downstream side of the hollow fiber membrane module; and a control valve which opens and closes the module passing pipe; wherein the module passing pipe includes a supply side module passing pipe which is disposed at an upstream side of the hollow fiber membrane module and supplies the ultrapure water to the hollow fiber membrane module and a discharge side module passing pipe which is disposed at a downstream side of the hollow fiber membrane module and discharges the adjustment gas addition liquid from the hollow fiber membrane module, wherein the control valve is attached to the discharge side module passing pipe and opens and closes the discharge side module passing pipe, and characterized in that the specific resistance value adjustment apparatus further comprises: a control unit configured to set an opening degree of the control valve in response to a first flow rate detected by a first flow rate detection unit; wherein the first flow rate detection unit detects a flow rate of the ultrapure water flowing through the liquid discharge pipe. a control unit configured to set an opening degree of the control valve in response to a first flow rate detected by a first flow rate detection unit; wherein the first flow rate detection unit detects a flow rate of the ultrapure water flowing through the liquid discharge pipe.