A microelectromechanical systems (MEMS) device comprising: a substrate; a movable mass (32, 34) having an end region (48, 50, 54, 56) laterally displaced away from a central region (52, 58) of said movable mass (32, 34), wherein an opening (120, 122, 124, 126) extends through said end region (48, 50, 54, 56); a suspension structure located in said opening (120, 122, 124, 126), said suspension structure including an anchor coupled to a surface of said substrate, a first rigid link coupled to and extending from a first side of said anchor, and a second rigid link coupled to and extending from a second side of said anchor, each of said first and second rigid links (130, 134) having a lengthwise dimension oriented perpendicular to a drive direction of said movable mass (32, 34), said drive direction being substantially parallel to said surface of said substrate; and a spring system located in said opening (120, 122, 124, 126), said spring system including: a first spring head coupled to a first end of said first rigid link; a second spring head coupled to a second end of said second rigid link; a first drive spring coupled to said first spring head and coupled to said movable mass (32, 34); and a second drive spring coupled to said second spring head and coupled to said movable mass (32, 34), wherein said movable mass (32, 34) is resiliently suspended above said surface of said substrate via said suspension structure and said spring system, said spring system enables drive motion of said movable mass (32, 34) in said drive direction and enables sense motion of said movable mass (32, 34) in a sense direction that is perpendicular to said surface of said substrate. a substrate; a movable mass (32, 34) having an end region (48, 50, 54, 56) laterally displaced away from a central region (52, 58) of said movable mass (32, 34), wherein an opening (120, 122, 124, 126) extends through said end region (48, 50, 54, 56); a suspension structure located in said opening (120, 122, 124, 126), said suspension structure including an anchor coupled to a surface of said substrate, a first rigid link coupled to and extending from a first side of said anchor, and a second rigid link coupled to and extending from a second side of said anchor, each of said first and second rigid links (130, 134) having a lengthwise dimension oriented perpendicular to a drive direction of said movable mass (32, 34), said drive direction being substantially parallel to said surface of said substrate; and a spring system located in said opening (120, 122, 124, 126), said spring system including: a first spring head coupled to a first end of said first rigid link; a second spring head coupled to a second end of said second rigid link; a first drive spring coupled to said first spring head and coupled to said movable mass (32, 34); and a second drive spring coupled to said second spring head and coupled to said movable mass (32, 34), wherein said movable mass (32, 34) is resiliently suspended above said surface of said substrate via said suspension structure and said spring system, said spring system enables drive motion of said movable mass (32, 34) in said drive direction and enables sense motion of said movable mass (32, 34) in a sense direction that is perpendicular to said surface of said substrate. a first spring head coupled to a first end of said first rigid link; a second spring head coupled to a second end of said second rigid link; a first drive spring coupled to said first spring head and coupled to said movable mass (32, 34); and a second drive spring coupled to said second spring head and coupled to said movable mass (32, 34), wherein said movable mass (32, 34) is resiliently suspended above said surface of said substrate via said suspension structure and said spring system, said spring system enables drive motion of said movable mass (32, 34) in said drive direction and enables sense motion of said movable mass (32, 34) in a sense direction that is perpendicular to said surface of said substrate.