A capacitive load driving circuit comprising: a drive waveform signal generator that is arranged to generate a drive waveform signal; a subtractor that is arranged to output a differential signal between the drive waveform signal and a feedback signal; a modulator that is arranged to pulse-modulate the differential signal and to output a modulated signal; a digital power amplifier that is arranged to amplify the power of the modulated signal and is arranged to output a power-amplified modulated signal; a smoothing filter that is constructed by connecting an inductor and a capacitive load with a wire, is arranged to smooth the power-amplified modulated signal, and is arranged to output a drive signal of the capacitive load: a compensator that is arranged to cause a phase to precede the drive signal; and an attenuator that is arranged to attenuate signal amplitude in a band at least including a modulation frequency of the modulated signal, wherein a signal output from a connecting point between the inductor and the wire is made to pass through the compensator and the attenuator and is then used as a feedback signal to the subtractor, characterized in that the attenuator is arranged to attenuate the signal amplitude so as not to exceed an allowable operating range of at least one of the subtractor and the modulator. a drive waveform signal generator that is arranged to generate a drive waveform signal; a subtractor that is arranged to output a differential signal between the drive waveform signal and a feedback signal; a modulator that is arranged to pulse-modulate the differential signal and to output a modulated signal; a digital power amplifier that is arranged to amplify the power of the modulated signal and is arranged to output a power-amplified modulated signal; a smoothing filter that is constructed by connecting an inductor and a capacitive load with a wire, is arranged to smooth the power-amplified modulated signal, and is arranged to output a drive signal of the capacitive load: a compensator that is arranged to cause a phase to precede the drive signal; and an attenuator that is arranged to attenuate signal amplitude in a band at least including a modulation frequency of the modulated signal, wherein a signal output from a connecting point between the inductor and the wire is made to pass through the compensator and the attenuator and is then used as a feedback signal to the subtractor, characterized in that the attenuator is arranged to attenuate the signal amplitude so as not to exceed an allowable operating range of at least one of the subtractor and the modulator. a compensator that is arranged to cause a phase to precede the drive signal; and an attenuator that is arranged to attenuate signal amplitude in a band at least including a modulation frequency of the modulated signal, wherein a signal output from a connecting point between the inductor and the wire is made to pass through the compensator and the attenuator and is then used as a feedback signal to the subtractor, characterized in that the attenuator is arranged to attenuate the signal amplitude so as not to exceed an allowable operating range of at least one of the subtractor and the modulator.