A sputtering device comprising: a vacuum chamber that is evacuated and hermetically sealed; a plurality of targets each and fixed in the vacuum chamber and comprising a film forming material; a shield that selectively exposes, to an inside of the vacuum chamber, only a target among the plurality of targets out of which a film is to be formed; a substrate holding unit that holds a substrate on which fine particles ejected from the target are deposited to form a film; a first transfer unit that fixedly holds the substrate holding unit and moves the substrate holding unit within the vacuum chamber; a mask disposed between the substrate and the targets; and a second transfer unit that moves the mask within the vacuum chamber; characterized by a plurality of through-hole units (17a-17f) having patterned through holes penetrating through the mask, wherein: the first transfer unit includes a belt stretched between a pair of first rollers and positions the substrate in front of one of the plurality of targets, the mask Is formed as an elongate sheet stretched between a pair of second rollers, the first rollers and the second rollers are coupled to output shafts of first and second motors (15, 20), respectively, the plurality of through-hole units (17a-17f) are formed in a manner associated with the targets, and at least one of the targets is associated with two or more of the plurality of through-hole units (17a-17f). a vacuum chamber that is evacuated and hermetically sealed; a plurality of targets each and fixed in the vacuum chamber and comprising a film forming material; a shield that selectively exposes, to an inside of the vacuum chamber, only a target among the plurality of targets out of which a film is to be formed; a substrate holding unit that holds a substrate on which fine particles ejected from the target are deposited to form a film; a first transfer unit that fixedly holds the substrate holding unit and moves the substrate holding unit within the vacuum chamber; a mask disposed between the substrate and the targets; and a second transfer unit that moves the mask within the vacuum chamber; characterized by a plurality of through-hole units (17a-17f) having patterned through holes penetrating through the mask, wherein: the first transfer unit includes a belt stretched between a pair of first rollers and positions the substrate in front of one of the plurality of targets, the mask Is formed as an elongate sheet stretched between a pair of second rollers, the first rollers and the second rollers are coupled to output shafts of first and second motors (15, 20), respectively, the plurality of through-hole units (17a-17f) are formed in a manner associated with the targets, and at least one of the targets is associated with two or more of the plurality of through-hole units (17a-17f). the first transfer unit includes a belt stretched between a pair of first rollers and positions the substrate in front of one of the plurality of targets, the mask Is formed as an elongate sheet stretched between a pair of second rollers, the first rollers and the second rollers are coupled to output shafts of first and second motors (15, 20), respectively, the plurality of through-hole units (17a-17f) are formed in a manner associated with the targets, and at least one of the targets is associated with two or more of the plurality of through-hole units (17a-17f).