An acceleration sensor comprising: a support substrate having a first direction and a second direction orthogonal thereto in a single surface; a device layer disposed on the support substrate (la); and a cap layer disposed on the device layer, the device layer having a mass provided therein with a space interposed between the mass and the support substrate, and between the mass and the cap layer, the mass being displaced according to application of acceleration, a fixed part which is fixed to the support substrate and a beam which is provided to extend to the fixed part and is connected to the mass to allow the mass to be in a movable state are provided at a center of the mass, wherein a plurality of posts (T1, T8) formed as through electrodes are formed in the cap layer characterized in that the plurality of posts (T1-T8) connect, directly or indirectly through the fixed part, the support substrate and the cap layer and are provided to the fixed part and wherein inputting and outputting of an electric signal with respect to the mass are performed through the posts (T1-T8), and wherein the sensor is an electrostatic capacitance detection type acceleration sensor, and wherein the mass is configured so as to rotate around the first direction or the second direction according to application of acceleration in a third direction orthogonal to the first direction and the second direction, namely, so as to be displaced in the third direction, the displacement of the mass is output as an electric signal by detecting a change in electrostatic capacitance between detection electrodes (C1, C2) formed in the mass and the support substrate or the cap layer, wherein the mass and a center of a cavity which is configured with the support substrate and the cap layer so as to surround the mass are formed to be coincident with each other, wherein a center of rotation of the mass rotating around the first direction or the second direction is formed so as not to be coincident with a center of the mass and the center of the cavity, wherein the detection electrodes (C1, C2) are formed to be equally spaced from the center of the mass and the center of the cavity, wherein a plurality of the posts (T1-T8) are provided in a central portion of the mass. a support substrate having a first direction and a second direction orthogonal thereto in a single surface; a device layer disposed on the support substrate (la); and a cap layer disposed on the device layer, the device layer having a mass provided therein with a space interposed between the mass and the support substrate, and between the mass and the cap layer, the mass being displaced according to application of acceleration, a fixed part which is fixed to the support substrate and a beam which is provided to extend to the fixed part and is connected to the mass to allow the mass to be in a movable state are provided at a center of the mass, wherein a plurality of posts (T1, T8) formed as through electrodes are formed in the cap layer characterized in that the plurality of posts (T1-T8) connect, directly or indirectly through the fixed part, the support substrate and the cap layer and are provided to the fixed part and wherein inputting and outputting of an electric signal with respect to the mass are performed through the posts (T1-T8), and wherein the sensor is an electrostatic capacitance detection type acceleration sensor, and wherein the mass is configured so as to rotate around the first direction or the second direction according to application of acceleration in a third direction orthogonal to the first direction and the second direction, namely, so as to be displaced in the third direction, the displacement of the mass is output as an electric signal by detecting a change in electrostatic capacitance between detection electrodes (C1, C2) formed in the mass and the support substrate or the cap layer, wherein the mass and a center of a cavity which is configured with the support substrate and the cap layer so as to surround the mass are formed to be coincident with each other, wherein a center of rotation of the mass rotating around the first direction or the second direction is formed so as not to be coincident with a center of the mass and the center of the cavity, wherein the detection electrodes (C1, C2) are formed to be equally spaced from the center of the mass and the center of the cavity, wherein a plurality of the posts (T1-T8) are provided in a central portion of the mass.