A nozzle head for subjecting a surface of a substrate to alternate surface reactions of at least two precursors (A, B) according to principles of atomic layer deposition, the nozzle head comprising: - an output face via which gas is supplied towards the surface of the substrate and discharged from the surface of the substrate; - at least one gas supply nozzle (4, 12, 16, 20, 22, 24) arranged to supply gas towards the surface of the substrate; and - at least one discharge nozzle (6, 7, 9, 10, 13, 14) arranged to discharge gas from the surface of the substrate via the output face, the nozzle head comprises on the output face in the following order: a first zone end nozzle (8, 10, 12, 13, 15), a gas supply nozzle (4, 12, 16, 20, 22, 24) and a second zone end nozzle (6, 7, 9), repeated one or more times on the output face, the first zone end nozzle (8, 10, 12, 13, 15) is a discharge nozzle (10, 13) or a purge gas nozzle (12, 13), the second zone end nozzle (6, 7, 9) is a discharge nozzle, the gas supply nozzle (4, 12, 16, 20, 22, 24) is a precursor nozzle (4, 10, 20, 22), and the first zone end nozzle (8, 10, 12, 13, 15) is arranged at a first distance (L Y) from the gas supply nozzle (4, 12, 16, 20, 22, 24) and the second zone end nozzle (6, 7, 9) is arranged at a second distance (L X) from the gas supply nozzle (4, 12, 16, 20, 22, 24), characterized in that, and that the second distance (L X) is at least 1,5 times greater than the first distance (L Y). - an output face via which gas is supplied towards the surface of the substrate and discharged from the surface of the substrate; - at least one gas supply nozzle (4, 12, 16, 20, 22, 24) arranged to supply gas towards the surface of the substrate; and - at least one discharge nozzle (6, 7, 9, 10, 13, 14) arranged to discharge gas from the surface of the substrate via the output face, the nozzle head comprises on the output face in the following order: a first zone end nozzle (8, 10, 12, 13, 15), a gas supply nozzle (4, 12, 16, 20, 22, 24) and a second zone end nozzle (6, 7, 9), repeated one or more times on the output face, the first zone end nozzle (8, 10, 12, 13, 15) is a discharge nozzle (10, 13) or a purge gas nozzle (12, 13), the second zone end nozzle (6, 7, 9) is a discharge nozzle, the gas supply nozzle (4, 12, 16, 20, 22, 24) is a precursor nozzle (4, 10, 20, 22), and the first zone end nozzle (8, 10, 12, 13, 15) is arranged at a first distance (L Y) from the gas supply nozzle (4, 12, 16, 20, 22, 24) and the second zone end nozzle (6, 7, 9) is arranged at a second distance (L X) from the gas supply nozzle (4, 12, 16, 20, 22, 24), characterized in that, and that the second distance (L X) is at least 1,5 times greater than the first distance (L Y). the nozzle head comprises on the output face in the following order: a first zone end nozzle (8, 10, 12, 13, 15), a gas supply nozzle (4, 12, 16, 20, 22, 24) and a second zone end nozzle (6, 7, 9), repeated one or more times on the output face, the first zone end nozzle (8, 10, 12, 13, 15) is a discharge nozzle (10, 13) or a purge gas nozzle (12, 13), the second zone end nozzle (6, 7, 9) is a discharge nozzle, the gas supply nozzle (4, 12, 16, 20, 22, 24) is a precursor nozzle (4, 10, 20, 22), and the first zone end nozzle (8, 10, 12, 13, 15) is arranged at a first distance (L Y) from the gas supply nozzle (4, 12, 16, 20, 22, 24) and the second zone end nozzle (6, 7, 9) is arranged at a second distance (L X) from the gas supply nozzle (4, 12, 16, 20, 22, 24), characterized in that, and that the second distance (L X) is at least 1,5 times greater than the first distance (L Y).