A projection objective lens system comprising, from an object plane to an image plane: a first lens group having a positive refractive power; a second lens group having a negative refractive power; a third lens group having a positive refractive power; a fourth lens group having a negative refractive power; a fifth lens group having a positive refractive power and including a first sub-lens group and a second sub-lens group; and an aperture stop positioned between the first sub-lens group and the second sub-lens group; wherein the projection objective lens system includes at least two types of optical materials including high refractive index materials having a refractive index of greater than 1.6 at a working wavelength and low refractive index materials having a refractive index of smaller than 1.6 at a working wavelength; wherein the first lens group includes: a first sub-lens group having a negative refractive power and including at least one negative lens with an aspheric front surface; and a second sub-lens group having a positive refractive power and including at least three lenses; wherein the second lens group includes at least three negative lenses; wherein the third lens group includes at least three positive lenses; wherein the fourth lens group includes at least three negative lenses, and a last lens of the fourth lens group has an aspheric rear surface; wherein all lenses of the first sub-lens group of the fifth lens group are positive lenses formed of low refractive index materials; a positive lens of the first sub-lens group disposed closest to the aperture stop has: a front surface bending away from the aperture stop, an apex of the front surface being far apart from the aperture stop, a radius of curvature of the front surface being positive; and a rear surface bending toward the aperture stop, an apex of the rear surface being close to the aperture stop, an absolute value of a radius of curvature of the rear surface being greater than that of the front surface; wherein the second sub-lens group of the fifth lens group includes a negative lens which has an aspheric rear surface and is formed of a high refractive index material; a free diameter of said negative lens is no smaller than 0.9Dmax, where Dmax is a greatest free diameter of all lenses; and wherein the following formula is satisfied: ΔR / R < 1 %, where ΔH represents a difference between a radius at the aperture stop of a marginal field beam bundle and a radius at the aperture stop of a central field beam bundle, and R represents a radius at the aperture stop of a central field beam bundle. a first lens group having a positive refractive power; a second lens group having a negative refractive power; a third lens group having a positive refractive power; a fourth lens group having a negative refractive power; a fifth lens group having a positive refractive power and including a first sub-lens group and a second sub-lens group; and an aperture stop positioned between the first sub-lens group and the second sub-lens group; wherein the projection objective lens system includes at least two types of optical materials including high refractive index materials having a refractive index of greater than 1.6 at a working wavelength and low refractive index materials having a refractive index of smaller than 1.6 at a working wavelength; wherein the first lens group includes: a first sub-lens group having a negative refractive power and including at least one negative lens with an aspheric front surface; and a second sub-lens group having a positive refractive power and including at least three lenses; wherein the second lens group includes at least three negative lenses; wherein the third lens group includes at least three positive lenses; wherein the fourth lens group includes at least three negative lenses, and a last lens of the fourth lens group has an aspheric rear surface; wherein all lenses of the first sub-lens group of the fifth lens group are positive lenses formed of low refractive index materials; a positive lens of the first sub-lens group disposed closest to the aperture stop has: a front surface bending away from the aperture stop, an apex of the front surface being far apart from the aperture stop, a radius of curvature of the front surface being positive; and a rear surface bending toward the aperture stop, an apex of the rear surface being close to the aperture stop, an absolute value of a radius of curvature of the rear surface being greater than that of the front surface; wherein the second sub-lens group of the fifth lens group includes a negative lens which has an aspheric rear surface and is formed of a high refractive index material; a free diameter of said negative lens is no smaller than 0.9Dmax, where Dmax is a greatest free diameter of all lenses; and wherein the following formula is satisfied: ΔR / R < 1 %, where ΔH represents a difference between a radius at the aperture stop of a marginal field beam bundle and a radius at the aperture stop of a central field beam bundle, and R represents a radius at the aperture stop of a central field beam bundle.