An element substrate having a multilayered structure comprising: a base; a wiring layer formed on a side of a front surface of the base; a first interlayer insulation film configured to cover a first surface of the wiring layer, the first surface of the wiring layer being opposite to a second surface of the wiring layer facing the side of the front surface of the base; a temperature detection element formed on a first surface of the first interlayer insulation film, the first surface of the first interlayer insulation film being opposite to a second surface of the first interlayer insulation film facing the side of the front surface of the base; a first electrical connecting member configured to penetrate through the first interlayer insulation film, and electrically connect the temperature detection element and a wiring for the temperature detection element of the wiring layer, the first electrical connecting member extending between a second surface of the temperature detection element contacting the first surface of the first interlayer insulation film, and the first surface of the wiring layer, along a direction perpendicular to the front surface of the base; a second interlayer insulation film formed on a first surface of the temperature detection element and the first surface of the first interlayer insulation film, the first surface of the temperature detection element being opposite to the second surface of the temperature detection element; and an electrothermal transducer arranged at a position where at least a part of the electrothermal transducer overlaps the temperature detection element when viewed from the perpendicular direction, and formed on a first surface of the second interlayer insulation film, the first surface of the second interlayer insulation film being opposite to a second surface of the second interlayer insulation film facing the front surface of the base; characterized by a second electrical connecting member configured to penetrate through at least the second interlayer insulation film, and electrically connect the electrothermal transducer and a wiring for the electrothermal transducer of the wiring layer, the second electrical connecting member extending between the first surface of the wiring layer, and a second surface of the electrothermal transducer contacting the first surface of the second interlayer insulation film, along the perpendicular direction; and a coated membrane configured to cover a first surface of the electrothermal transducer, the first surface of the electrothermal transducer being opposite to the second surface of the electrothermal transducer. a base; a wiring layer formed on a side of a front surface of the base; a first interlayer insulation film configured to cover a first surface of the wiring layer, the first surface of the wiring layer being opposite to a second surface of the wiring layer facing the side of the front surface of the base; a temperature detection element formed on a first surface of the first interlayer insulation film, the first surface of the first interlayer insulation film being opposite to a second surface of the first interlayer insulation film facing the side of the front surface of the base; a first electrical connecting member configured to penetrate through the first interlayer insulation film, and electrically connect the temperature detection element and a wiring for the temperature detection element of the wiring layer, the first electrical connecting member extending between a second surface of the temperature detection element contacting the first surface of the first interlayer insulation film, and the first surface of the wiring layer, along a direction perpendicular to the front surface of the base; a second interlayer insulation film formed on a first surface of the temperature detection element and the first surface of the first interlayer insulation film, the first surface of the temperature detection element being opposite to the second surface of the temperature detection element; and an electrothermal transducer arranged at a position where at least a part of the electrothermal transducer overlaps the temperature detection element when viewed from the perpendicular direction, and formed on a first surface of the second interlayer insulation film, the first surface of the second interlayer insulation film being opposite to a second surface of the second interlayer insulation film facing the front surface of the base; characterized by a second electrical connecting member configured to penetrate through at least the second interlayer insulation film, and electrically connect the electrothermal transducer and a wiring for the electrothermal transducer of the wiring layer, the second electrical connecting member extending between the first surface of the wiring layer, and a second surface of the electrothermal transducer contacting the first surface of the second interlayer insulation film, along the perpendicular direction; and a coated membrane configured to cover a first surface of the electrothermal transducer, the first surface of the electrothermal transducer being opposite to the second surface of the electrothermal transducer.