An alignment information display method for displaying information relating to alignment measurement for positioning an object, comprising the steps of; (a) inputting data of results of predetermined processing relating to said alignment measurement, said data including data of EGA measurement results measured by an exposure apparatus and data of overlay measurement results measured by an overlay measuring device, (b) inputting information relating to a parameter of said alignment measurement, (c) finding desired information for display from data of said input results of processing based on said input parameter, and (d) displaying said found desired information for display by a predetermined display mode showing effects of said parameter of said alignment measurement on said alignment measurement, characterized in that the step (c) includes: receiving input of an evaluation target that is selected from among a plurality of prededetermined evaluation targets including at least one of an alignment measurement value, alignment correction value, residual component after alignment correction, and alignment mark waveform, receiving input of a display unit that is selected from among a plurality of prededetermined display units including at least one of: each predetermined plurality of lots, each single lot, each predetermined plurality of wafers, each single wafer, each plurality of shots processed, each single shot, each predetermined plurality of marks, and each single mark, and in that the step (d) includes designating a desired display mode, wherein said found desired information for display includes the input evaluation target and is displayed in each of said input display units by said designated display mode during the step of displaying so as to enable evaluation of said input evaluation target. (a) inputting data of results of predetermined processing relating to said alignment measurement, said data including data of EGA measurement results measured by an exposure apparatus and data of overlay measurement results measured by an overlay measuring device, (b) inputting information relating to a parameter of said alignment measurement, (c) finding desired information for display from data of said input results of processing based on said input parameter, and (d) displaying said found desired information for display by a predetermined display mode showing effects of said parameter of said alignment measurement on said alignment measurement, characterized in that the step (c) includes: receiving input of an evaluation target that is selected from among a plurality of prededetermined evaluation targets including at least one of an alignment measurement value, alignment correction value, residual component after alignment correction, and alignment mark waveform, receiving input of a display unit that is selected from among a plurality of prededetermined display units including at least one of: each predetermined plurality of lots, each single lot, each predetermined plurality of wafers, each single wafer, each plurality of shots processed, each single shot, each predetermined plurality of marks, and each single mark, and in that the step (d) includes designating a desired display mode, wherein said found desired information for display includes the input evaluation target and is displayed in each of said input display units by said designated display mode during the step of displaying so as to enable evaluation of said input evaluation target. receiving input of an evaluation target that is selected from among a plurality of prededetermined evaluation targets including at least one of an alignment measurement value, alignment correction value, residual component after alignment correction, and alignment mark waveform, receiving input of a display unit that is selected from among a plurality of prededetermined display units including at least one of: each predetermined plurality of lots, each single lot, each predetermined plurality of wafers, each single wafer, each plurality of shots processed, each single shot, each predetermined plurality of marks, and each single mark, and in that the step (d) includes designating a desired display mode, wherein said found desired information for display includes the input evaluation target and is displayed in each of said input display units by said designated display mode during the step of displaying so as to enable evaluation of said input evaluation target.