A substrate fixing apparatus comprising: a back-up member which is located between a pair of conveying members (225, 226) arranged at a distance from each other in a plan view from above and is below a film-like substrate conveyed along the conveyance path and supported from below by the pair of conveying members (225, 226); a substrate pressing member (431, 432, 433, 434); and an elevation driver (SL, SF, CY) which moves at least one of the back-up member and the substrate pressing member (431, 432, 433, 434) upward and downward, wherein the elevation driver (SL, SF, CY) elevates the back-up member and/or lowers the substrate pressing member (431, 432, 433, 434) together with the pair of conveying members (225, 226), thereby separating the substrate upward from the pair of conveying members (225, 226) while supporting the substrate from below by the back-up member and pressing the surface of the outer peripheral part of the substrate downward by the substrate pressing member (431, 432, 433, 434) to correct warpage of the outer peripheral part of the substrate, wherein: the substrate pressing member (431, 432, 433, 434) is attached to at least one of a first conveyor frame which supports one of the pair of conveying members (225, 226) and a second conveyor frame which supports the other of the pair of conveying members (225, 226) such that the substrate pressing member (431, 432, 433, 434) is separated upward from the pair of conveying members (225, 226) by a distance larger than a sum of a thickness and a warpage amount of the substrate, characterized by: a first movable member supported movably relative to the first and second conveyor frames (221, 222) at an upstream side of the back-up member in a conveying direction in which the substrate is conveyed; a second movable member supported movably relative to the first and second conveyor frames (221, 222) at a downstream side of the back-up member in the conveying direction; and a switching driver which switches the positions of the first and second movable members (471, 472) by moving the first and second movable members (471, 472); wherein: the substrate pressing member (431, 432, 433, 434) includes a third substrate pressing member and a fourth substrate pressing member respectively extending in a substrate width direction perpendicular to the conveying direction; the third substrate pressing member is attached to the first movable member and the fourth substrate pressing member is attached to the second movable member; and the switching driver moves the third substrate pressing member to a position above the surface of the outer peripheral part of the substrate conveyed to the working position or a first retracted position distant from the conveyance path at the upstream side of the back-up member by a movement of the first movable member and moves the fourth substrate pressing member to a position above the surface of the outer peripheral part of the substrate conveyed to the working position or a second retracted position distant from the conveyance path at the downstream side of the back-up member by a movement of the second movable member. a back-up member which is located between a pair of conveying members (225, 226) arranged at a distance from each other in a plan view from above and is below a film-like substrate conveyed along the conveyance path and supported from below by the pair of conveying members (225, 226); a substrate pressing member (431, 432, 433, 434); and an elevation driver (SL, SF, CY) which moves at least one of the back-up member and the substrate pressing member (431, 432, 433, 434) upward and downward, the substrate pressing member (431, 432, 433, 434) is attached to at least one of a first conveyor frame which supports one of the pair of conveying members (225, 226) and a second conveyor frame which supports the other of the pair of conveying members (225, 226) such that the substrate pressing member (431, 432, 433, 434) is separated upward from the pair of conveying members (225, 226) by a distance larger than a sum of a thickness and a warpage amount of the substrate, a first movable member supported movably relative to the first and second conveyor frames (221, 222) at an upstream side of the back-up member in a conveying direction in which the substrate is conveyed; a second movable member supported movably relative to the first and second conveyor frames (221, 222) at a downstream side of the back-up member in the conveying direction; and a switching driver which switches the positions of the first and second movable members (471, 472) by moving the first and second movable members (471, 472); the substrate pressing member (431, 432, 433, 434) includes a third substrate pressing member and a fourth substrate pressing member respectively extending in a substrate width direction perpendicular to the conveying direction; the third substrate pressing member is attached to the first movable member and the fourth substrate pressing member is attached to the second movable member; and the switching driver moves the third substrate pressing member to a position above the surface of the outer peripheral part of the substrate conveyed to the working position or a first retracted position distant from the conveyance path at the upstream side of the back-up member by a movement of the first movable member and moves the fourth substrate pressing member to a position above the surface of the outer peripheral part of the substrate conveyed to the working position or a second retracted position distant from the conveyance path at the downstream side of the back-up member by a movement of the second movable member.