An exposure apparatus for exposing an object with an energy beam via an optical system, the apparatus comprising: a stage system which has a movable body for holding the object and which is arranged to move the object by driving the movable body; a measurement system which has a plurality of heads (64,66,74,76,72a,72b,72c,72d) that respectively face a plurality of grating members (39Y 1, 39Y 2, 39X 1, 39X 2) placed substantially parallel to a predetermined plane orthogonal to an optical axis of the optical system, and which is configured to measure positional information of the movable body in a first direction and a second direction orthogonal to each other in the predetermined plane, and to measure positional information of the movable body in a third direction orthogonal to the predetermined plane, by irradiating a beam on each of the plurality of grating members; a detection system (90a,90b) arranged to detect surface positional information of the object in the third direction by irradiating a measurement light on the object held by the movable body; and a control system, configured to control the stage system based on the positional information measured by the measurement system, in an exposure operation of the object and a detection operation of the object by the detection system, wherein the control system is configured to drive the movable body using the stage system so that a positional relation between the grating members and the heads is changed from one of a first state and a second state to the other, in the first state the plurality of grating members respectively facing the plurality of heads and in the second state remaining grating members, which exclude one grating member from the plurality of grating members, facing some of the plurality of heads, the control system further being configured to drive the movable body in the third direction on the basis of the positional information of the movable body in the third direction measured by the measurement system and the surface positional information of the object detected by the detection system. a stage system which has a movable body for holding the object and which is arranged to move the object by driving the movable body; a measurement system which has a plurality of heads (64,66,74,76,72a,72b,72c,72d) that respectively face a plurality of grating members (39Y 1, 39Y 2, 39X 1, 39X 2) placed substantially parallel to a predetermined plane orthogonal to an optical axis of the optical system, and which is configured to measure positional information of the movable body in a first direction and a second direction orthogonal to each other in the predetermined plane, and to measure positional information of the movable body in a third direction orthogonal to the predetermined plane, by irradiating a beam on each of the plurality of grating members; a detection system (90a,90b) arranged to detect surface positional information of the object in the third direction by irradiating a measurement light on the object held by the movable body; and a control system, configured to control the stage system based on the positional information measured by the measurement system, in an exposure operation of the object and a detection operation of the object by the detection system, wherein the control system is configured to drive the movable body using the stage system so that a positional relation between the grating members and the heads is changed from one of a first state and a second state to the other, in the first state the plurality of grating members respectively facing the plurality of heads and in the second state remaining grating members, which exclude one grating member from the plurality of grating members, facing some of the plurality of heads, the control system further being configured to drive the movable body in the third direction on the basis of the positional information of the movable body in the third direction measured by the measurement system and the surface positional information of the object detected by the detection system.