A vacuum processing apparatus comprising: a vacuum chamber; a stage disposed inside the vacuum chamber, on which an object to be processed is placed; an internal guide rail (31, 33) laid in the vacuum chamber to guide the stage; a through-hole made in a sidewall of the vacuum chamber; a connecting rod coupled to the stage at one end and inserted in the through-hole, the other end being disposed outside the vacuum chamber; a movable member connected to the other end of the connecting rod; a driving mechanism (81, 82) disposed outside the vacuum chamber to move the movable member; and a bellows disposed between the movable member and the sidewall, the bellows following a movement of the movable member while maintaining airtightness of the vacuum chamber, wherein the internal guide rail (31, 33) includes: a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and a second internal guide rail laid along a second direction crossing the first direction; and wherein the driving mechanism (81, 82) includes a first driving mechanism configured to move the movable member along the first direction; and characterized in that: the driving mechanism includes a second driving mechanism configured to move the movable member along the second direction; wherein a width of the through-hole along the second direction is larger than a moving range of the connecting rod along the second direction. a vacuum chamber; a stage disposed inside the vacuum chamber, on which an object to be processed is placed; an internal guide rail (31, 33) laid in the vacuum chamber to guide the stage; a through-hole made in a sidewall of the vacuum chamber; a connecting rod coupled to the stage at one end and inserted in the through-hole, the other end being disposed outside the vacuum chamber; a movable member connected to the other end of the connecting rod; a driving mechanism (81, 82) disposed outside the vacuum chamber to move the movable member; and a bellows disposed between the movable member and the sidewall, the bellows following a movement of the movable member while maintaining airtightness of the vacuum chamber, wherein the internal guide rail (31, 33) includes: a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and a second internal guide rail laid along a second direction crossing the first direction; and wherein the driving mechanism (81, 82) includes a first driving mechanism configured to move the movable member along the first direction; and characterized in that: the driving mechanism includes a second driving mechanism configured to move the movable member along the second direction; wherein a width of the through-hole along the second direction is larger than a moving range of the connecting rod along the second direction. a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and a second internal guide rail laid along a second direction crossing the first direction; and wherein the driving mechanism (81, 82) includes a first driving mechanism configured to move the movable member along the first direction; and characterized in that: the driving mechanism includes a second driving mechanism configured to move the movable member along the second direction; wherein a width of the through-hole along the second direction is larger than a moving range of the connecting rod along the second direction.