A radiation-sensitive resin composition comprising: a polymer having at least one type of a structure unit selected from the set consisting of a plurality of structure units each represented by the following formulae and: in the formulae and, R 1 each independently represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group, in the formula, Y represents a methanetriyl group; R 2 and R 3 each independently represent an alkyl group, wherein R 2 and R 3 may bind with each other to form an alicyclic structure together with Y; R 4 represents an alkyl group, an alkoxy group, an acyl group or an acyloxy group; when R 4 is present in a plurality of number, the plurality of R 4 may be the same or different with each other; a part or all of hydrogen atoms of R 4 may be substituted; a is 1 or 2; b is an integer of 0 to 3; and d is 1, and in the formula, R 5 represents an alkyl group; R 6 represents an alkyl group, an alkoxy group, an acyl group or an acyloxy group; when R 6 is present in a plurality of number, the plurality of R 6 may be the same or different; a part or all of hydrogen atoms of R 6 may be substituted; e is 1 or 2; and f is an integer of 0 to 5, and at least one type of a structure unit selected from the set consisting of a plurality of structure units each represented by the following formulae to: in the formulae to, R 1 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group, in the formula, Rf 1 represents a fluorinated hydrocarbon group having 1 to 30 carbon atoms, in the formula, R 7 represents a linking group having a valency of (g + 1); R 8 represents a hydrogen atom or a monovalent organic group; when R 8 is present in a plurality of number, the plurality of R 8 may be the same or different; Rf 2 and Rf 3 each independently represent a hydrogen atom, a fluorine atom or a fluorinated hydrocarbon group having 1 to 30 carbon atoms, wherein at least one of Rf 2 and Rf 3 does not represent a hydrogen atom. Rf 2 or Rf 3 is present in a plurality of number, the plurality of Rf 2 and Rf 3 may be each the same or different; g is an integer of 1 to 3, and in the formula, R 9 represents a bivalent linking group; R 10 represents a hydrogen atom or a monovalent organic group; Rf 4 and Rf 5 each independently represent a hydrogen atom, a fluorine atom or a fluorinated hydrocarbon group having 1 to 30 carbon atoms, wherein at least one of Rf 4 and Rf 5 does not represent a hydrogen atom, and having a content of fluorine atoms of no less than 5% by mass; a polymer having an acid-dissociable group, and a content of fluorine atoms of less than 5% by mass; and a radiation-sensitive acid generator. a polymer having at least one type of a structure unit selected from the set consisting of a plurality of structure units each represented by the following formulae and: in the formulae and, R 1 each independently represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group, in the formula, Y represents a methanetriyl group; R 2 and R 3 each independently represent an alkyl group, wherein R 2 and R 3 may bind with each other to form an alicyclic structure together with Y; R 4 represents an alkyl group, an alkoxy group, an acyl group or an acyloxy group; when R 4 is present in a plurality of number, the plurality of R 4 may be the same or different with each other; a part or all of hydrogen atoms of R 4 may be substituted; a is 1 or 2; b is an integer of 0 to 3; and d is 1, and in the formula, R 5 represents an alkyl group; R 6 represents an alkyl group, an alkoxy group, an acyl group or an acyloxy group; when R 6 is present in a plurality of number, the plurality of R 6 may be the same or different; a part or all of hydrogen atoms of R 6 may be substituted; e is 1 or 2; and f is an integer of 0 to 5, and at least one type of a structure unit selected from the set consisting of a plurality of structure units each represented by the following formulae to: in the formulae to, R 1 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group, in the formula, Rf 1 represents a fluorinated hydrocarbon group having 1 to 30 carbon atoms, in the formula, R 7 represents a linking group having a valency of (g + 1); R 8 represents a hydrogen atom or a monovalent organic group; when R 8 is present in a plurality of number, the plurality of R 8 may be the same or different; Rf 2 and Rf 3 each independently represent a hydrogen atom, a fluorine atom or a fluorinated hydrocarbon group having 1 to 30 carbon atoms, wherein at least one of Rf 2 and Rf 3 does not represent a hydrogen atom. Rf 2 or Rf 3 is present in a plurality of number, the plurality of Rf 2 and Rf 3 may be each the same or different; g is an integer of 1 to 3, and in the formula, R 9 represents a bivalent linking group; R 10 represents a hydrogen atom or a monovalent organic group; Rf 4 and Rf 5 each independently represent a hydrogen atom, a fluorine atom or a fluorinated hydrocarbon group having 1 to 30 carbon atoms, wherein at least one of Rf 4 and Rf 5 does not represent a hydrogen atom, and having a content of fluorine atoms of no less than 5% by mass; a polymer having an acid-dissociable group, and a content of fluorine atoms of less than 5% by mass; and a radiation-sensitive acid generator.