An integrated circuit comprising: a plurality of sensors implemented in corresponding ones of one or more functional circuit blocks (130, 140); a metrology control circuit including: an analog process monitoring circuit; a reference sensor, wherein the reference sensor is implemented using a circuit topology identical to each of the plurality of sensors and has substantially same operating characteristics as each of the plurality of sensors; a precision voltage generation circuit configured to provide a known voltage value to the reference sensor; a precision temperature sensing circuit in close proximity to the reference sensor; and a processing circuit configured to correlate readings received from the reference sensor to a voltage received from the precision voltage generation circuit and the precision temperature sensing circuit, and further configured to calibrate each of the plurality of sensors based on the correlated readings; characterized in that the analog process monitoring circuit is configured to determine operating characteristics of each transistor of at least a subset of a plurality of transistors implemented on the integrated circuit. a plurality of sensors implemented in corresponding ones of one or more functional circuit blocks (130, 140); a metrology control circuit including: an analog process monitoring circuit; a reference sensor, wherein the reference sensor is implemented using a circuit topology identical to each of the plurality of sensors and has substantially same operating characteristics as each of the plurality of sensors; a precision voltage generation circuit configured to provide a known voltage value to the reference sensor; a precision temperature sensing circuit in close proximity to the reference sensor; and a processing circuit configured to correlate readings received from the reference sensor to a voltage received from the precision voltage generation circuit and the precision temperature sensing circuit, and further configured to calibrate each of the plurality of sensors based on the correlated readings; characterized in that the analog process monitoring circuit is configured to determine operating characteristics of each transistor of at least a subset of a plurality of transistors implemented on the integrated circuit. an analog process monitoring circuit; a reference sensor, wherein the reference sensor is implemented using a circuit topology identical to each of the plurality of sensors and has substantially same operating characteristics as each of the plurality of sensors; a precision voltage generation circuit configured to provide a known voltage value to the reference sensor; a precision temperature sensing circuit in close proximity to the reference sensor; and a processing circuit configured to correlate readings received from the reference sensor to a voltage received from the precision voltage generation circuit and the precision temperature sensing circuit, and further configured to calibrate each of the plurality of sensors based on the correlated readings; characterized in that the analog process monitoring circuit is configured to determine operating characteristics of each transistor of at least a subset of a plurality of transistors implemented on the integrated circuit.