MEMS actuator element, comprising: a substrate, a first electrode structure with an edge structure that is stationary with respect to the substrate, a second electrode structure with an edge structure, wherein the second electrode structure is deflectably coupled to the substrate by means of a spring structure and electrostatically deflectable by means of an control voltage (V S) between the first and second electrode structures (14, 16) to move the edge structure of the second electrode structure into an intermediate position (z 1) between a minimum deflection position (z MIN) and a vertically spaced-apart maximum deflection position (z MAX), wherein the minimum and maximum deflection positions (z MIN, z MAX)specify a maximum deflection path (z S), wherein the edge structures (14-1, 16-1) of the first and second electrode structures (14, 16) are configured to be opposite to each other with respect to a top view and are vertically spaced apart in the minimum deflection position (z MIN) and wherein the first and second electrode structures (14, 16) are spaced apart by a lateral minimum distance (x 0) in a plane parallel to the substrate, wherein the vertical direction is perpendicular to the substrate plane, characterized in that the lateral minimum distance (x 0) is 0.5 to 1.5 times or 0.6 to 1 times the maximum deflection path (zs), and wherein the vertical thickness (d 14, d 16) of the first and/or second electrode structure (14, 16) is 0.6 to 1.2 times or 0.8 to 1.0 times the maximum deflection path (z S), and in the maximum deflection position (z MAX), the vertical immersion path (z E) of the edge structure of the second electrode structure into the edge structure of the first electrode structure is up to 0.5 times the maximum deflection path zs, with z E ≤ 0,5 z S, and the MEMS actuator element comprises control means configured for providing a control voltage (V S) limited by a minimum control voltage (V S_MIN) and a maximum control voltage (V S_MAX) between the first and second electrode structures (14, 16) to electrostatically deflect the second electrode structure into the intermediate position (z 1) between the minimum deflection position (z MIN) and the maximum deflection position (z MAX) based on the electric control voltage (V S), wherein the minimum control voltage (V S_MIN) effects deflection of the edge structure of the second electrode structure into the minimum deflection position (z MIN) and the maximum control voltage (V S_MAX) effects deflection into the maximum deflection position (z MAX). a substrate, a first electrode structure with an edge structure that is stationary with respect to the substrate, a second electrode structure with an edge structure, wherein the second electrode structure is deflectably coupled to the substrate by means of a spring structure and electrostatically deflectable by means of an control voltage (V S) between the first and second electrode structures (14, 16) to move the edge structure of the second electrode structure into an intermediate position (z 1) between a minimum deflection position (z MIN) and a vertically spaced-apart maximum deflection position (z MAX), wherein the minimum and maximum deflection positions (z MIN, z MAX)specify a maximum deflection path (z S), wherein the edge structures (14-1, 16-1) of the first and second electrode structures (14, 16) are configured to be opposite to each other with respect to a top view and are vertically spaced apart in the minimum deflection position (z MIN) and wherein the first and second electrode structures (14, 16) are spaced apart by a lateral minimum distance (x 0) in a plane parallel to the substrate, wherein the vertical direction is perpendicular to the substrate plane, characterized in that the lateral minimum distance (x 0) is 0.5 to 1.5 times or 0.6 to 1 times the maximum deflection path (zs), and wherein the vertical thickness (d 14, d 16) of the first and/or second electrode structure (14, 16) is 0.6 to 1.2 times or 0.8 to 1.0 times the maximum deflection path (z S), and in the maximum deflection position (z MAX), the vertical immersion path (z E) of the edge structure of the second electrode structure into the edge structure of the first electrode structure is up to 0.5 times the maximum deflection path zs, with z E ≤ 0,5 z S, and the MEMS actuator element comprises control means configured for providing a control voltage (V S) limited by a minimum control voltage (V S_MIN) and a maximum control voltage (V S_MAX) between the first and second electrode structures (14, 16) to electrostatically deflect the second electrode structure into the intermediate position (z 1) between the minimum deflection position (z MIN) and the maximum deflection position (z MAX) based on the electric control voltage (V S), wherein the minimum control voltage (V S_MIN) effects deflection of the edge structure of the second electrode structure into the minimum deflection position (z MIN) and the maximum control voltage (V S_MAX) effects deflection into the maximum deflection position (z MAX).