An ultra-high vacuum creating device comprising at least one ion pump, wherein the ion pump includes: a casing which has at least one opening (111, 112); a platc-shapcd electrode group which is arranged inside the casing and has a structure in which a center opening is formed along a predetermined central axis and electrodes are connected at intervals; a pair of plate-shaped electrodes (131, 132) which is arranged at positions inside the casing such that the electrode group is sandwiched between them from both sides; and a pair of plate-shaped magnets (141, 142) which is arranged at positions such that the pair of plate-shaped electrodes (131, 132) is sandwiched between them from both sides and applies a magnetic field inside the casing, wherein the ultra-high vacuum creating device further comprises at least one heating and non-evaporating getter pump, the heating and non-evaporating getter pump includes: a casing which has at least one opening (211, 212); a heater which is arranged inside the casing; and a pair of getter materials (231, 232) which is arranged at positions inside the casing such that the heater is sandwiched between them and is activated when being heated by radiant heat from the heater, and the at least one opening (211, 212) of the heating and non-evaporating getter pump communicates with the at least one opening (111, 112) of the ion pump, and in that the ion pump and the heating and non-evaporating getter pump share the central axis, and a columnar space is formed along the central axis, and in that the overall size of the ultra-high vacuum creating device in the central-axis direction is made compact by providing a relay casing member that can be shared between the heating and non-evaporating getter pump and the ion pump, and in that a constricted portion is inwardly constricted and formed in a central portion of the relay casing member in the central-axis direction, wherein the plate-shaped magnets (141, 142) of the ion pump are arranged in the constricted portion of the relay casing member. a casing which has at least one opening (111, 112); a platc-shapcd electrode group which is arranged inside the casing and has a structure in which a center opening is formed along a predetermined central axis and electrodes are connected at intervals; a pair of plate-shaped electrodes (131, 132) which is arranged at positions inside the casing such that the electrode group is sandwiched between them from both sides; and a pair of plate-shaped magnets (141, 142) which is arranged at positions such that the pair of plate-shaped electrodes (131, 132) is sandwiched between them from both sides and applies a magnetic field inside the casing, wherein the ultra-high vacuum creating device further comprises at least one heating and non-evaporating getter pump, the heating and non-evaporating getter pump includes: a casing which has at least one opening (211, 212); a heater which is arranged inside the casing; and a pair of getter materials (231, 232) which is arranged at positions inside the casing such that the heater is sandwiched between them and is activated when being heated by radiant heat from the heater, and the at least one opening (211, 212) of the heating and non-evaporating getter pump communicates with the at least one opening (111, 112) of the ion pump, and in that the ion pump and the heating and non-evaporating getter pump share the central axis, and a columnar space is formed along the central axis, and in that the overall size of the ultra-high vacuum creating device in the central-axis direction is made compact by providing a relay casing member that can be shared between the heating and non-evaporating getter pump and the ion pump, and in that a constricted portion is inwardly constricted and formed in a central portion of the relay casing member in the central-axis direction, wherein the plate-shaped magnets (141, 142) of the ion pump are arranged in the constricted portion of the relay casing member. a casing which has at least one opening (211, 212); a heater which is arranged inside the casing; and a pair of getter materials (231, 232) which is arranged at positions inside the casing such that the heater is sandwiched between them and is activated when being heated by radiant heat from the heater, and the at least one opening (211, 212) of the heating and non-evaporating getter pump communicates with the at least one opening (111, 112) of the ion pump,