A metal or metal alloy deposition composition, particularly a copper or copper alloy deposition composition, for electrolytic deposition of a metal or metal alloy layer, particularly of a copper or copper alloy layer, comprising a) at least one type of metal ions to be deposited, preferably copper ions, b) at least one plating compound comprising at least one structural unit represented by formula wherein each R 1 and R 2 are independently selected from the group consisting of hydrogen and alkyl group; each X 1 and X 2 are independently selected from the group consisting of - a structural unit represented by formula (X-1) wherein Y 1 is an alkanediyl group; each R 11 is independently selected from the group consisting of hydrogen, alkyl group, aryl group and alkaryl group; b is an integer ranging from 1 to 10; and - a structural unit represented by formula (X-2) wherein R 21, R 22, R 23, R 24 and R 25 are independently selected from the group consisting of hydrogen, alkyl group, aryl group and alkaryl group; c is an integer selected from 1, 2, 3, 4, 5 and 6; d is an integer selected from 1 and 2; e is an integer selected from 1, 2, 3, 4, 5 and 6; with the proviso that at least one of X 1 and X 2 is a structural unit represented by formula (X-1); and a is an integer ranging from 1 to 10. a) at least one type of metal ions to be deposited, preferably copper ions, b) at least one plating compound comprising at least one structural unit represented by formula wherein each R 1 and R 2 are independently selected from the group consisting of hydrogen and alkyl group; each X 1 and X 2 are independently selected from the group consisting of - a structural unit represented by formula (X-1) wherein Y 1 is an alkanediyl group; each R 11 is independently selected from the group consisting of hydrogen, alkyl group, aryl group and alkaryl group; b is an integer ranging from 1 to 10; and - a structural unit represented by formula (X-2) wherein R 21, R 22, R 23, R 24 and R 25 are independently selected from the group consisting of hydrogen, alkyl group, aryl group and alkaryl group; c is an integer selected from 1, 2, 3, 4, 5 and 6; d is an integer selected from 1 and 2; e is an integer selected from 1, 2, 3, 4, 5 and 6; with the proviso that at least one of X 1 and X 2 is a structural unit represented by formula (X-1); each R 1 and R 2 are independently selected from the group consisting of hydrogen and alkyl group; each X 1 and X 2 are independently selected from the group consisting of - a structural unit represented by formula (X-1) wherein Y 1 is an alkanediyl group; each R 11 is independently selected from the group consisting of hydrogen, alkyl group, aryl group and alkaryl group; b is an integer ranging from 1 to 10; and - a structural unit represented by formula (X-2) wherein R 21, R 22, R 23, R 24 and R 25 are independently selected from the group consisting of hydrogen, alkyl group, aryl group and alkaryl group; c is an integer selected from 1, 2, 3, 4, 5 and 6; d is an integer selected from 1 and 2; e is an integer selected from 1, 2, 3, 4, 5 and 6; with the proviso that at least one of X 1 and X 2 is a structural unit represented by formula (X-1); - a structural unit represented by formula (X-1) wherein Y 1 is an alkanediyl group; each R 11 is independently selected from the group consisting of hydrogen, alkyl group, aryl group and alkaryl group; b is an integer ranging from 1 to 10; and Y 1 is an alkanediyl group; each R 11 is independently selected from the group consisting of hydrogen, alkyl group, aryl group and alkaryl group; b is an integer ranging from 1 to 10; - a structural unit represented by formula (X-2) wherein R 21, R 22, R 23, R 24 and R 25 are independently selected from the group consisting of hydrogen, alkyl group, aryl group and alkaryl group; c is an integer selected from 1, 2, 3, 4, 5 and 6; d is an integer selected from 1 and 2; e is an integer selected from 1, 2, 3, 4, 5 and 6; with the proviso that at least one of X 1 and X 2 is a structural unit represented by formula (X-1); R 21, R 22, R 23, R 24 and R 25 are independently selected from the group consisting of hydrogen, alkyl group, aryl group and alkaryl group; c is an integer selected from 1, 2, 3, 4, 5 and 6; d is an integer selected from 1 and 2; e is an integer selected from 1, 2, 3, 4, 5 and 6;