An MEMS comprising: a deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13'); and an abutment area (14; 14_5-11); wherein an integral piezoelectric functional layer of the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13') is configured across an active area (A PS; A PS _1; A PS _2) of the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13'); wherein the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13') comprises a controlled state (on-state) and a non-controlled state (off-state) and effects a hollow warp in at least one of the two states; wherein the abutment area (14; 14_5-13; 14_9'-13') of a hollow side is disposed facing a hollow side of the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13'); wherein the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13') is configured to provide in the state in which the same effects the hollow warp, mechanical contact between the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13') and the abutment area (14; 14_5-13; 14_9'-13'); and wherein the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13') is spaced apart from the abutment area (14; 14_5-13; 14_9'-13') in the other state; characterized in that: an elliptical ring (32; 32_1; 32_2; 32_3) exists, which overlaps by more than 95% with the active area (A PS; A PS _1; A PS _2) and whose elliptical ring area (A ER; A ER _1; A ER _2) takes up at least 60 % of an overall area (A AP; A AP _1; A AP _2) of the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13'); wherein the elliptical ring (32; 32_1; 32_2; 32_3) comprises an outer elliptical trajectory with a main axis (34; 34_1; 34_4) and a minor axis (36; 36_1; 36_4) disposed perpendicularly to the main axis; and wherein a ratio between the main axis (34; 34_1; 34_4) and the minor axis (36; 36_1; 36_4) comprises a value in the range of greater than or equal to 0.25 and less than or equal to 4. a deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13'); and an abutment area (14; 14_5-11); wherein an integral piezoelectric functional layer of the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13') is configured across an active area (A PS; A PS _1; A PS _2) of the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13'); wherein the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13') comprises a controlled state (on-state) and a non-controlled state (off-state) and effects a hollow warp in at least one of the two states; wherein the abutment area (14; 14_5-13; 14_9'-13') of a hollow side is disposed facing a hollow side of the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13'); wherein the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13') is configured to provide in the state in which the same effects the hollow warp, mechanical contact between the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13') and the abutment area (14; 14_5-13; 14_9'-13'); and wherein the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13') is spaced apart from the abutment area (14; 14_5-13; 14_9'-13') in the other state; characterized in that: an elliptical ring (32; 32_1; 32_2; 32_3) exists, which overlaps by more than 95% with the active area (A PS; A PS _1; A PS _2) and whose elliptical ring area (A ER; A ER _1; A ER _2) takes up at least 60 % of an overall area (A AP; A AP _1; A AP _2) of the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13'); wherein the elliptical ring (32; 32_1; 32_2; 32_3) comprises an outer elliptical trajectory with a main axis (34; 34_1; 34_4) and a minor axis (36; 36_1; 36_4) disposed perpendicularly to the main axis; and wherein a ratio between the main axis (34; 34_1; 34_4) and the minor axis (36; 36_1; 36_4) comprises a value in the range of greater than or equal to 0.25 and less than or equal to 4. an elliptical ring (32; 32_1; 32_2; 32_3) exists, which overlaps by more than 95% with the active area (A PS; A PS _1; A PS _2) and whose elliptical ring area (A ER; A ER _1; A ER _2) takes up at least 60 % of an overall area (A AP; A AP _1; A AP _2) of the deflectable actuator plate (12; 12_1-14; 12_2'; 12_5'; 12_9'; 12_10'-13'); wherein the elliptical ring (32; 32_1; 32_2; 32_3) comprises an outer elliptical trajectory with a main axis (34; 34_1; 34_4) and a minor axis (36; 36_1; 36_4) disposed perpendicularly to the main axis; and wherein a ratio between the main axis (34; 34_1; 34_4) and the minor axis (36; 36_1; 36_4) comprises a value in the range of greater than or equal to 0.25 and less than or equal to 4.