A proof mass assembly comprising: a first (56a, 86a, 116a) and a second (56b, 86b, 116b) resonator, wherein each respective resonator comprises a respective first bond pad (32a, 58a, 88a, 118a), a respective second bond pad (32b, 58b, 88b, 118b), and a respective pair of elongated tines (34a, 34b, 60, 90, 120), and wherein the respective first bond pad and the respective second bond pad are positioned at opposite ends of the respective pair of elongated tines of the respective resonator; a proof mass (12, 52, 82, 112) comprising a first major proof mass surface (53a, 83a, 113a) and a second major proof mass surface (53b, 83b, 113b), wherein the first major proof mass surface comprises a bond region (69, 99, 129) comprising one or more channels (62, 92a, 92b, 122a) extending in a direction substantially parallel to a longitudinal axis of the respective pair of elongated tines of the first resonator, wherein each of the one or more channels comprises a pair of facing walls (68, 98, 128, 134), wherein at least two walls (68, 98, 128,134) of the one or more channels extend under the first bond pad of the first resonator in the direction substantially parallel to the longitudinal axis of the respective pair of elongated tines of the first resonator; a proof support (14, 54, 84, 114) comprising a first major proof support surface (55a, 85a, 115a) and a second major proof support surface (55b, 85b, 115b); at least one flexure (16a, 16b) connecting the proof mass to the proof support; and an adhesive (66, 96, 126) bonding the respective first bond pad of the first resonator to the bond region of the first major proof mass surface, bonding the respective second bond pad of the first resonator to the first major proof support surface, bonding the respective first bond pad of the second resonator to the second major proof mass surface, and bonding the respective second bond pad of the second resonator to the second major proof support surface. a first (56a, 86a, 116a) and a second (56b, 86b, 116b) resonator, wherein each respective resonator comprises a respective first bond pad (32a, 58a, 88a, 118a), a respective second bond pad (32b, 58b, 88b, 118b), and a respective pair of elongated tines (34a, 34b, 60, 90, 120), and wherein the respective first bond pad and the respective second bond pad are positioned at opposite ends of the respective pair of elongated tines of the respective resonator; a proof mass (12, 52, 82, 112) comprising a first major proof mass surface (53a, 83a, 113a) and a second major proof mass surface (53b, 83b, 113b), wherein the first major proof mass surface comprises a bond region (69, 99, 129) comprising one or more channels (62, 92a, 92b, 122a) extending in a direction substantially parallel to a longitudinal axis of the respective pair of elongated tines of the first resonator, wherein each of the one or more channels comprises a pair of facing walls (68, 98, 128, 134), wherein at least two walls (68, 98, 128,134) of the one or more channels extend under the first bond pad of the first resonator in the direction substantially parallel to the longitudinal axis of the respective pair of elongated tines of the first resonator; a proof support (14, 54, 84, 114) comprising a first major proof support surface (55a, 85a, 115a) and a second major proof support surface (55b, 85b, 115b); at least one flexure (16a, 16b) connecting the proof mass to the proof support; and an adhesive (66, 96, 126) bonding the respective first bond pad of the first resonator to the bond region of the first major proof mass surface, bonding the respective second bond pad of the first resonator to the first major proof support surface, bonding the respective first bond pad of the second resonator to the second major proof mass surface, and bonding the respective second bond pad of the second resonator to the second major proof support surface.