A method for analysis of a specimen in a microscope, the method comprising: performing a first survey that collects analytical data from a region of interest on the specimen surface using a first set of conditions; performing a second survey that collects additional analytical data from selected parts of the region of interest on the specimen surface using a second set of conditions, different from the first set of conditions; wherein the analytical data from the first survey is used to select the parts used for data collection in the second survey and to decide the order in which they are used, and wherein each of the first and second surveys comprises directing a particle beam upon the specimen and detecting the resulting x-rays or electrons emitted from the specimen so as to collect the data, characterized in that using the analytical data from the first survey comprises: identifying features of interest on the specimen from the analytical data, and generating an optimal order in which the additional analytical data is collected from each of the selected parts, such that additional analytical data is collected from a part containing a greater proportion of the features of interest before additional analytical data is collected from a part containing a smaller proportion of the features of interest, and in that each of the first and second sets of conditions includes a termination condition in accordance with which each respective survey is terminated, wherein the termination condition of the second set of conditions is decided such that the second survey is terminated upon additional analytical data having been collected from a predetermined fraction of the features of interest. performing a first survey that collects analytical data from a region of interest on the specimen surface using a first set of conditions; performing a second survey that collects additional analytical data from selected parts of the region of interest on the specimen surface using a second set of conditions, different from the first set of conditions; wherein the analytical data from the first survey is used to select the parts used for data collection in the second survey and to decide the order in which they are used, and wherein each of the first and second surveys comprises directing a particle beam upon the specimen and detecting the resulting x-rays or electrons emitted from the specimen so as to collect the data, characterized in that using the analytical data from the first survey comprises: identifying features of interest on the specimen from the analytical data, and generating an optimal order in which the additional analytical data is collected from each of the selected parts, such that additional analytical data is collected from a part containing a greater proportion of the features of interest before additional analytical data is collected from a part containing a smaller proportion of the features of interest, and in that each of the first and second sets of conditions includes a termination condition in accordance with which each respective survey is terminated, wherein the termination condition of the second set of conditions is decided such that the second survey is terminated upon additional analytical data having been collected from a predetermined fraction of the features of interest. identifying features of interest on the specimen from the analytical data, and generating an optimal order in which the additional analytical data is collected from each of the selected parts, such that additional analytical data is collected from a part containing a greater proportion of the features of interest before additional analytical data is collected from a part containing a smaller proportion of the features of interest, and in that each of the first and second sets of conditions includes a termination condition in accordance with which each respective survey is terminated, wherein the termination condition of the second set of conditions is decided such that the second survey is terminated upon additional analytical data having been collected from a predetermined fraction of the features of interest.