A method of forming a pattern, comprising: (i) the step of etching a substrate to form a gap; (ii) the step of filling a gap filling composition comprising a low molecular weight compound having 2 to 25 carbon atoms into the substrate surface comprising a gap formed thereon; and (iii) the step of removing the composition; wherein the gap filling composition comprises an organic solvent and water, wherein the mass ratio of water to the total mass of the gap filling composition is less than that of the organic solvent, wherein the gap filling composition includes not more than 30% of water, and wherein the low molecular weight compound is a compound represented by the following general formula (Ia), wherein each R a independently represents hydrogen, alkyl having 1 to 5 carbon atoms, or aryl having 6 to 12 carbon atoms, each L a independently represents alkylene having 1 to 10 carbon atoms, haloalkylene having 1 to 10 carbon atoms, heteroalkylene having 1 to 10 carbon atoms comprising oxy, imino, or sulfide on a terminal or between carbons thereof, oxy, imino, sulfide, or a single bond, each Y a independently represents -OH, -COOH, or -NR 1 2, each R 1 independently represents hydrogen or alkyl having 1 to 5 carbon atoms, and p represents an integer of 1 to 8, or the following general formula (Ib), and wherein each R b independently represents alkyl having 1 to 5 carbon atoms, or aryl having 6 to 12 carbon atoms, Z b represents cycloalkyl having 3 to 13 ring members, heterocycloalkyl having 3 to 13 ring members comprising O, N, or S, or aryl having 6 to 20 carbon atoms, each Y b independently represents -OH, -COOH, or -NR 2 2, each R 2 independently represents hydrogen or alkyl having 1 to 5 carbon atoms, and q represents an integer of 2 to 5, and r represents [a maximum number of substituents of the cycloalkyl, the heterocycloalkyl, or the aryl] - q. (i) the step of etching a substrate to form a gap; (ii) the step of filling a gap filling composition comprising a low molecular weight compound having 2 to 25 carbon atoms into the substrate surface comprising a gap formed thereon; and (iii) the step of removing the composition; wherein the gap filling composition comprises an organic solvent and water, wherein the mass ratio of water to the total mass of the gap filling composition is less than that of the organic solvent, wherein the gap filling composition includes not more than 30% of water, and wherein the low molecular weight compound is a compound represented by the following general formula (Ia), wherein each R a independently represents hydrogen, alkyl having 1 to 5 carbon atoms, or aryl having 6 to 12 carbon atoms, each L a independently represents alkylene having 1 to 10 carbon atoms, haloalkylene having 1 to 10 carbon atoms, heteroalkylene having 1 to 10 carbon atoms comprising oxy, imino, or sulfide on a terminal or between carbons thereof, oxy, imino, sulfide, or a single bond, each Y a independently represents -OH, -COOH, or -NR 1 2, each R 1 independently represents hydrogen or alkyl having 1 to 5 carbon atoms, and p represents an integer of 1 to 8, or wherein the gap filling composition comprises an organic solvent and water, wherein the mass ratio of water to the total mass of the gap filling composition is less than that of the organic solvent, wherein the gap filling composition includes not more than 30% of water, and wherein the low molecular weight compound is a compound represented by the following general formula (Ia), wherein each R a independently represents hydrogen, alkyl having 1 to 5 carbon atoms, or aryl having 6 to 12 carbon atoms, each L a independently represents alkylene having 1 to 10 carbon atoms, haloalkylene having 1 to 10 carbon atoms, heteroalkylene having 1 to 10 carbon atoms comprising oxy, imino, or sulfide on a terminal or between carbons thereof, oxy, imino, sulfide, or a single bond, each Y a independently represents -OH, -COOH, or -NR 1 2, each R 1 independently represents hydrogen or alkyl having 1 to 5 carbon atoms, and p represents an integer of 1 to 8, or and wherein each R b independently represents alkyl having 1 to 5 carbon atoms, or aryl having 6 to 12 carbon atoms, Z b represents cycloalkyl having 3 to 13 ring members, heterocycloalkyl having 3 to 13 ring members comprising O, N, or S, or aryl having 6 to 20 carbon atoms, each Y b independently represents -OH, -COOH, or -NR 2 2, each R 2 independently represents hydrogen or alkyl having 1 to 5 carbon atoms, and q represents an integer of 2 to 5, and r represents [a maximum number of substituents of the cycloalkyl, the heterocycloalkyl, or the aryl] - q.