Chemical-mechanical polishing composition comprising the following constituents: abrasive particles containing ceria one or more polymers, wherein each macromolecule of said polymers comprises (i) one or more anionic functional groups and (ii) one or more structure units - a -R wherein in each structure unit - a -R independently from each other structure unit - a -R A is C x H 2x wherein for each A in said structure units - a -R, x is independently from each other x selected from the range of integers from 2 to 4, wherein x is preferably 2 or 3, further preferably x =2 wherein within each structure unit - a -R the groups A are the same or different a is an integer selected from the range of from 5 to 200, preferably 8 to 150, most preferably 20 to 135, R is hydrogen or a branched or linear alkyl group having 1 to 4 carbon atoms, wherein in said polymer the sum of the molar masses of all structure units (ii) is at least 50 % of the molar mass of said polymer wherein said composition has a pH in the range of from 6 to 10 and wherein the concentration of said one or more polymers is in a range of from 0.0002 to 0.1 wt.-% based on the total weight of the respective CMP composition. abrasive particles containing ceria one or more polymers, wherein each macromolecule of said polymers comprises (i) one or more anionic functional groups and (ii) one or more structure units - a -R wherein in each structure unit - a -R independently from each other structure unit - a -R A is C x H 2x wherein for each A in said structure units - a -R, x is independently from each other x selected from the range of integers from 2 to 4, wherein x is preferably 2 or 3, further preferably x =2 wherein within each structure unit - a -R the groups A are the same or different a is an integer selected from the range of from 5 to 200, preferably 8 to 150, most preferably 20 to 135, R is hydrogen or a branched or linear alkyl group having 1 to 4 carbon atoms, wherein in said polymer the sum of the molar masses of all structure units (ii) is at least 50 % of the molar mass of said polymer wherein said composition has a pH in the range of from 6 to 10 and wherein the concentration of said one or more polymers is in a range of from 0.0002 to 0.1 wt.-% based on the total weight of the respective CMP composition. (i) one or more anionic functional groups and (ii) one or more structure units - a -R wherein in each structure unit - a -R independently from each other structure unit - a -R A is C x H 2x wherein for each A in said structure units - a -R, x is independently from each other x selected from the range of integers from 2 to 4, wherein x is preferably 2 or 3, further preferably x =2 wherein within each structure unit - a -R the groups A are the same or different a is an integer selected from the range of from 5 to 200, preferably 8 to 150, most preferably 20 to 135, R is hydrogen or a branched or linear alkyl group having 1 to 4 carbon atoms, wherein in said polymer the sum of the molar masses of all structure units (ii) is at least 50 % of the molar mass of said polymer wherein said composition has a pH in the range of from 6 to 10 and wherein the concentration of said one or more polymers is in a range of from 0.0002 to 0.1 wt.-% based on the total weight of the respective CMP composition.