A filter assembly for filtering semiconductor manufacturing liquids, the filter assembly comprising: a filter housing having a filter inlet defining an inlet flow path and a filter outlet spaced from the filter inlet defining an outlet flow path, the filter housing defining a filter cavity at least partially defined by an upstream sidewall (155, 185), a downstream sidewall (235, 190) spaced from the upstream sidewall, a third wall (180, 275) running from the upstream sidewall (155, 185) to the downstream sidewall (235, 190) and a fourth wall (175, 270) running from the upstream sidewall (155, 185) to the downstream sidewall (235, 190) and spaced from the third wall, wherein the inlet interfaces with the filter cavity at the third wall (180, 275) and the outlet interfaces with the filter cavity at the fourth wall (175, 270), a filter element disposed in the filter cavity, wherein the filter element is shifted toward the upstream sidewall (155, 185) such that a distance between the filter element and the upstream sidewall (155, 185) decreases in a direction from the third wall (180, 275) to the fourth wall (175, 270), the filter cavity comprising an upstream portion of the filter cavity in fluid communication with the inlet and a downstream portion of the filter cavity in fluid communication with the outlet, the filter element comprising a filter membrane to filter micron or submicron impurities from semiconductor process fluids, the filter element at least partially overlapping the filter inlet on a first side of the filter element, the filter element separating the upstream portion of the filter cavity from the downstream portion of the filter cavity, the filter element further comprising a potted rectangular pleated filter in which the filter membrane is pleated parallel to a long axis of the filter housing with a set of pleats having a first set of pleat tips facing the upstream portion of the filter cavity and a second set of pleat tips facing the downstream portion of the filter cavity, the first set of pleat tips form a planar rectangular entrance interface and the second set of pleat tips form a rectangular planar exit interface and wherein the primary flow path of the fluid through the filter element is perpendicular to the flow path through the filter inlet; and a filter cover coupled to the filter housing to retain the filter element in place. a filter housing having a filter inlet defining an inlet flow path and a filter outlet spaced from the filter inlet defining an outlet flow path, the filter housing defining a filter cavity at least partially defined by an upstream sidewall (155, 185), a downstream sidewall (235, 190) spaced from the upstream sidewall, a third wall (180, 275) running from the upstream sidewall (155, 185) to the downstream sidewall (235, 190) and a fourth wall (175, 270) running from the upstream sidewall (155, 185) to the downstream sidewall (235, 190) and spaced from the third wall, wherein the inlet interfaces with the filter cavity at the third wall (180, 275) and the outlet interfaces with the filter cavity at the fourth wall (175, 270), a filter element disposed in the filter cavity, wherein the filter element is shifted toward the upstream sidewall (155, 185) such that a distance between the filter element and the upstream sidewall (155, 185) decreases in a direction from the third wall (180, 275) to the fourth wall (175, 270), the filter cavity comprising an upstream portion of the filter cavity in fluid communication with the inlet and a downstream portion of the filter cavity in fluid communication with the outlet, the filter element comprising a filter membrane to filter micron or submicron impurities from semiconductor process fluids, the filter element at least partially overlapping the filter inlet on a first side of the filter element, the filter element separating the upstream portion of the filter cavity from the downstream portion of the filter cavity, the filter element further comprising a potted rectangular pleated filter in which the filter membrane is pleated parallel to a long axis of the filter housing with a set of pleats having a first set of pleat tips facing the upstream portion of the filter cavity and a second set of pleat tips facing the downstream portion of the filter cavity, the first set of pleat tips form a planar rectangular entrance interface and the second set of pleat tips form a rectangular planar exit interface and wherein the primary flow path of the fluid through the filter element is perpendicular to the flow path through the filter inlet; and a filter cover coupled to the filter housing to retain the filter element in place.