An illumination optical system for illuminating an illumination objective surface with light from a light source, the illumination optical system comprising: a first spatial light modulator which has a plurality of optical elements arranged on a first plane and controlled individually, and which distributes a first light among the light from the light source to a portion on an intersecting plane that intersects an optical axis of the illumination optical system and distributes a second light among the light from the light source, the second light being different from the first light, to a portion on the intersecting plane, the first light being incident on a first position on the first plane and the second light being incident on a second position, on the first plane, different from the first position, the portion to which the second light is distributed being different from the portion to which the first light is distributed; a polarizing member which gives a change of a polarization state to a light passing through a first position on the intersecting plane, the change of the polarization state being different from a change of a polarization state given to a light passing through a second position, on the intersecting plane, which is different from the first position; a second spatial light modulator which has a plurality of optical elements arranged on a second plane and controlled individually, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system with a light from the polarizing member; and a controller which controls the first spatial light modulator such that the first spatial light modulator changes a position, on the intersecting plane, through which the first light passes and a position, on the intersecting plane, through which the second light passes. a first spatial light modulator which has a plurality of optical elements arranged on a first plane and controlled individually, and which distributes a first light among the light from the light source to a portion on an intersecting plane that intersects an optical axis of the illumination optical system and distributes a second light among the light from the light source, the second light being different from the first light, to a portion on the intersecting plane, the first light being incident on a first position on the first plane and the second light being incident on a second position, on the first plane, different from the first position, the portion to which the second light is distributed being different from the portion to which the first light is distributed; a polarizing member which gives a change of a polarization state to a light passing through a first position on the intersecting plane, the change of the polarization state being different from a change of a polarization state given to a light passing through a second position, on the intersecting plane, which is different from the first position; a second spatial light modulator which has a plurality of optical elements arranged on a second plane and controlled individually, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system with a light from the polarizing member; and a controller which controls the first spatial light modulator such that the first spatial light modulator changes a position, on the intersecting plane, through which the first light passes and a position, on the intersecting plane, through which the second light passes.