An analysis method comprising: acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting photoelectrons emitted from a specimen by irradiating the specimen with X-rays, and the X-ray-excited Auger spectrum being obtained by detecting Auger electrons emitted from the specimen by irradiating the specimen with X-rays; calculating a quantitative value of each element included in the specimen based on the photoelectron spectrum; and performing a curve fitting process on the X-ray-excited Auger spectrum by using an electron beam-excited Auger electron standard spectrum, and calculating a quantitative value of an analysis target element in each chemical bonding state included in the specimen, characterized in that: the calculating of the quantitative value of the analysis target element in each chemical bonding state performs the curve fitting process on the X-ray-excited Auger spectrum by using the electron beam-excited Auger electron standard spectrum, and calculates the quantitative value of the analysis target element in each chemical bonding state when the analysis target element is a metal that belongs to the fourth or higher period of the periodic table; the X-ray-excited Auger spectrum has one peak including a plurality of superimposed peaks corresponding to a plurality of chemical bonding states; and the calculating of the quantitative value of the analysis target element in each chemical bonding state performs the curve fitting process on said one peak of the X-ray-excited Auger spectrum by using a plurality of electron beam-excited Auger electron standard spectra corresponding to a plurality of chemical bonding states which are different from each other. acquiring a photoelectron spectrum and an X-ray-excited Auger spectrum, the photoelectron spectrum being obtained by detecting photoelectrons emitted from a specimen by irradiating the specimen with X-rays, and the X-ray-excited Auger spectrum being obtained by detecting Auger electrons emitted from the specimen by irradiating the specimen with X-rays; calculating a quantitative value of each element included in the specimen based on the photoelectron spectrum; and performing a curve fitting process on the X-ray-excited Auger spectrum by using an electron beam-excited Auger electron standard spectrum, and calculating a quantitative value of an analysis target element in each chemical bonding state included in the specimen, characterized in that: the calculating of the quantitative value of the analysis target element in each chemical bonding state performs the curve fitting process on the X-ray-excited Auger spectrum by using the electron beam-excited Auger electron standard spectrum, and calculates the quantitative value of the analysis target element in each chemical bonding state when the analysis target element is a metal that belongs to the fourth or higher period of the periodic table; the X-ray-excited Auger spectrum has one peak including a plurality of superimposed peaks corresponding to a plurality of chemical bonding states; and the calculating of the quantitative value of the analysis target element in each chemical bonding state performs the curve fitting process on said one peak of the X-ray-excited Auger spectrum by using a plurality of electron beam-excited Auger electron standard spectra corresponding to a plurality of chemical bonding states which are different from each other. the calculating of the quantitative value of the analysis target element in each chemical bonding state performs the curve fitting process on the X-ray-excited Auger spectrum by using the electron beam-excited Auger electron standard spectrum, and calculates the quantitative value of the analysis target element in each chemical bonding state when the analysis target element is a metal that belongs to the fourth or higher period of the periodic table; the X-ray-excited Auger spectrum has one peak including a plurality of superimposed peaks corresponding to a plurality of chemical bonding states; and the calculating of the quantitative value of the analysis target element in each chemical bonding state performs the curve fitting process on said one peak of the X-ray-excited Auger spectrum by using a plurality of electron beam-excited Auger electron standard spectra corresponding to a plurality of chemical bonding states which are different from each other.