A defect judging unit (370, 470, 570, 670) comprising: a measuring probe(300, 400, 500, 600) including: a stylus(336, 436, 536, 636) having a contact part(362, 462, 562, 662) to be in contact with an object to be measured; at least one detection element(325, 425, 525, 625) capable of detecting a movement of the contact part(362, 462, 562, 662); and a signal processing part(366, 466, 566, 666) configured to process a generated signal(Sg) obtained from an output(Ss) of the at least one detection element(325, 425, 525, 625) to output a touch signal(Str); a defect judging part(372, 472, 572, 672, 772, 872, 972) configured to compare at least one judged signal(Sh) corresponding to the generated signal(Sg) with a predetermined threshold(St,Su) when the object to be measured and the contact part(362, 462, 562, 662) are out of contact with each other and judge that a defect exists if any of the at least one judged signal(Sh) is greater than the predetermined threshold(St,Su); and a judged result output part(390, 490, 590, 690) configured to output a judged result of the defect judging part(372, 472, 572, 672, 772, 872, 972), wherein the measuring probe(300, 400, 500, 600) further includes: a probe housing capable of supporting the stylus(336, 436, 536, 636) on an axial center; and at least one supporting member(322, 324, 422, 424, 522, 524, 622, 624) having a rotationally symmetric shape and disposed in an axial direction of the probe housing so as to allow for an orientation change of the stylus(336, 436, 536, 636), and four said detection elements(325, 425, 525, 625) are disposed at fourfold symmetry positions on deformable arm parts of the at least one supporting member(322, 324, 422, 424, 522, 524, 622, 624). a measuring probe(300, 400, 500, 600) including: a stylus(336, 436, 536, 636) having a contact part(362, 462, 562, 662) to be in contact with an object to be measured; at least one detection element(325, 425, 525, 625) capable of detecting a movement of the contact part(362, 462, 562, 662); and a signal processing part(366, 466, 566, 666) configured to process a generated signal(Sg) obtained from an output(Ss) of the at least one detection element(325, 425, 525, 625) to output a touch signal(Str); a defect judging part(372, 472, 572, 672, 772, 872, 972) configured to compare at least one judged signal(Sh) corresponding to the generated signal(Sg) with a predetermined threshold(St,Su) when the object to be measured and the contact part(362, 462, 562, 662) are out of contact with each other and judge that a defect exists if any of the at least one judged signal(Sh) is greater than the predetermined threshold(St,Su); and a judged result output part(390, 490, 590, 690) configured to output a judged result of the defect judging part(372, 472, 572, 672, 772, 872, 972), wherein the measuring probe(300, 400, 500, 600) further includes: a probe housing capable of supporting the stylus(336, 436, 536, 636) on an axial center; and at least one supporting member(322, 324, 422, 424, 522, 524, 622, 624) having a rotationally symmetric shape and disposed in an axial direction of the probe housing so as to allow for an orientation change of the stylus(336, 436, 536, 636), and four said detection elements(325, 425, 525, 625) are disposed at fourfold symmetry positions on deformable arm parts of the at least one supporting member(322, 324, 422, 424, 522, 524, 622, 624).