A sensor integrated haptic device, comprising: a sensor and an actuator, wherein the sensor is arranged to be adjacent to at least a part of the actuator or surround a circumference of the actuator, the actuator is formed to be arranged on a same plane as the sensor, wherein the sensor and the actuator include: sacrificial layers (120, 120a) formed in a predetermined sensor region and a predetermined actuator region, respectively, on a substrate, a lower electrode of the sensor formed, through a first process, on an upper surface of the sacrificial layer formed in the predetermined sensor region and a lower electrode of the actuator formed, through said first process, on a region of an upper surface of the substrate adjacent to the sacrificial layer formed in the predetermined actuator region and on an upper surface of the sacrificial layer formed in the predetermined actuator region, the predetermined sensor region arranged to be adjacent to at least a part of the predetermined actuator region or surrounding a circumference of the actuator, ionic elastomer layers (140, 230) stacked, through a second process, on the lower electrodes (130, 210) respectively, and upper electrodes (150, 240) formed, through a third process, on the ionic elastomer layers (140, 230) respectively, wherein after the formation of the upper electrodes (150, 240), the sacrificial layer is removed from the predetermined actuator region by selective etching, wherein and such that the lower electrode of the actuator has a cantilever shape supported by one self-supporting post anchored on the substrate or a bridge shape supported by two self-supporting posts anchored on the substrate. a sensor and an actuator, wherein the sensor is arranged to be adjacent to at least a part of the actuator or surround a circumference of the actuator, the actuator is formed to be arranged on a same plane as the sensor, wherein the sensor and the actuator include: sacrificial layers (120, 120a) formed in a predetermined sensor region and a predetermined actuator region, respectively, on a substrate, a lower electrode of the sensor formed, through a first process, on an upper surface of the sacrificial layer formed in the predetermined sensor region and a lower electrode of the actuator formed, through said first process, on a region of an upper surface of the substrate adjacent to the sacrificial layer formed in the predetermined actuator region and on an upper surface of the sacrificial layer formed in the predetermined actuator region, the predetermined sensor region arranged to be adjacent to at least a part of the predetermined actuator region or surrounding a circumference of the actuator, ionic elastomer layers (140, 230) stacked, through a second process, on the lower electrodes (130, 210) respectively, and upper electrodes (150, 240) formed, through a third process, on the ionic elastomer layers (140, 230) respectively, wherein after the formation of the upper electrodes (150, 240), the sacrificial layer is removed from the predetermined actuator region by selective etching, wherein and such that the lower electrode of the actuator has a cantilever shape supported by one self-supporting post anchored on the substrate or a bridge shape supported by two self-supporting posts anchored on the substrate. on a substrate, a lower electrode of the sensor formed, through a first process, on an upper surface of the sacrificial layer formed in the predetermined sensor region and a lower electrode of the actuator formed, through said first process, on a region of an upper surface of the substrate adjacent to the sacrificial layer formed in the predetermined actuator region and on an upper surface of the sacrificial layer formed in the predetermined actuator region, the predetermined sensor region arranged to be adjacent to at least a part of the predetermined actuator region or surrounding a circumference of the actuator, ionic elastomer layers (140, 230) stacked, through a second process, on the lower electrodes (130, 210) respectively, and upper electrodes (150, 240) formed, through a third process, on the ionic elastomer layers (140, 230) respectively, wherein after the formation of the upper electrodes (150, 240), the sacrificial layer is removed from the predetermined actuator region by selective etching, wherein and such that the lower electrode of the actuator has a cantilever shape supported by one self-supporting post anchored on the substrate or a bridge shape supported by two self-supporting posts anchored on the substrate.