A charged particle optical system comprising: a beam generating system configured to generate a plurality of charged particle beams and to direct the plurality of particle beams onto an object plane; a first deflector arrangement arranged in the beam path of the particle beams upstream of the object plane and configured to deflect the plurality of particle beams before they are incident on the object plane; an object holder configured to hold an object to be inspected in the object plane; a plurality of detectors configured to receive and to detect the plurality of particle beams having traversed the object plane, wherein the detectors are arranged in a detection plane on a side of the object plane opposite to the beam generating system; at least one first particle optical lens configured to collect particles of the particle beams emanating from the object plane on the detectors; and a controller configured to control the first deflector arrangement in order to deflect locations of incidence of the particle beams on the object plane by deflecting the particle beams; characterized by a second deflector arrangement arranged in the beam path of the particle beams between the object plane and the detection plane and configured to deflect the plurality of particle beams having traversed the object plane; wherein the controller is further configured to control the second deflector arrangement such that each particle beam is directed onto a separate same detector by deflecting the particle beams deflected by the first deflector arrangement and having traversed the object plane, irrespective of a deflection amount provided by the first deflector arrangement. a beam generating system configured to generate a plurality of charged particle beams and to direct the plurality of particle beams onto an object plane; a first deflector arrangement arranged in the beam path of the particle beams upstream of the object plane and configured to deflect the plurality of particle beams before they are incident on the object plane; an object holder configured to hold an object to be inspected in the object plane; a plurality of detectors configured to receive and to detect the plurality of particle beams having traversed the object plane, wherein the detectors are arranged in a detection plane on a side of the object plane opposite to the beam generating system; at least one first particle optical lens configured to collect particles of the particle beams emanating from the object plane on the detectors; and a controller configured to control the first deflector arrangement in order to deflect locations of incidence of the particle beams on the object plane by deflecting the particle beams; characterized by a second deflector arrangement arranged in the beam path of the particle beams between the object plane and the detection plane and configured to deflect the plurality of particle beams having traversed the object plane; wherein the controller is further configured to control the second deflector arrangement such that each particle beam is directed onto a separate same detector by deflecting the particle beams deflected by the first deflector arrangement and having traversed the object plane, irrespective of a deflection amount provided by the first deflector arrangement.