MEMS device comprising: a first electrode structure and a second electrode structure forming a capacitive sensing arrangement; a plurality of anti-stiction bumps arranged between the first electrode structure and the second electrode structure at a corresponding plurality of locations; wherein the plurality of locations being projected into a main surface of the second electrode structure is distributed so as to comprise a first distribution density (26 1) in a first main surface region (28 1) of the main surface and so as to comprise a second, different distribution density (26 2) in a second main surface region (28 2) of the main surface, the second main surface region (28 2) being delimited from the first main surface region (28 1); wherein the second distribution density (26 2) is zero; wherein the second main surface region (28 2) is encircled by the first main surface region (28 1), characterized in that the first electrode structure and/or the second electrode structure comprises an opening that completely forms the second main surface region (28 2), and in that the MEMS device further comprises a housing, the housing comprising an opening between an inner volume of the MEMS device and an outside of the housing of the MEMS device, wherein the opening is arranged such that a location of the opening of the housing projected into the main surface on the one hand and the second main surface region (28 2) on the other hand overlap at least partially, wherein a location of the second main surface region (28 2) and the location of the opening of the housing correspond to each other within a tolerance range of ± 20% and/or wherein a size of the second main surface region (28 2) and a size of the opening of the housing correspond to each other within a tolerance range of ± 20%. a first electrode structure and a second electrode structure forming a capacitive sensing arrangement; a plurality of anti-stiction bumps arranged between the first electrode structure and the second electrode structure at a corresponding plurality of locations; wherein the plurality of locations being projected into a main surface of the second electrode structure is distributed so as to comprise a first distribution density (26 1) in a first main surface region (28 1) of the main surface and so as to comprise a second, different distribution density (26 2) in a second main surface region (28 2) of the main surface, the second main surface region (28 2) being delimited from the first main surface region (28 1); wherein the second distribution density (26 2) is zero; wherein the second main surface region (28 2) is encircled by the first main surface region (28 1), characterized in that the first electrode structure and/or the second electrode structure comprises an opening that completely forms the second main surface region (28 2), and in that the MEMS device further comprises a housing, the housing comprising an opening between an inner volume of the MEMS device and an outside of the housing of the MEMS device, wherein the opening is arranged such that a location of the opening of the housing projected into the main surface on the one hand and the second main surface region (28 2) on the other hand overlap at least partially, wherein a location of the second main surface region (28 2) and the location of the opening of the housing correspond to each other within a tolerance range of ± 20% and/or wherein a size of the second main surface region (28 2) and a size of the opening of the housing correspond to each other within a tolerance range of ± 20%.