A chemical mechanical polishing fastening fixture, comprising: a fastening base, comprising: an annular substrate, having a first combining face; and a plurality of protruded blocks, annularly aligned on the first combing face, each protruded block being made of polyphenylene sulfide and comprising a first buckling face, the first buckling face being tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate; and a fastening ring, having a second combing face and a plurality of first grooves, the first grooves being annularly aligned on the second combining face, parts of a flange of each first groove being constituted of a second buckling face, the second buckling face being tilted from a root portion thereof toward the second combining face; wherein the chemical mechanical polishing fastening fixture is characterized in that: the protruded block further comprises a first guiding face, disposed opposite to the first buckling face and parallel to the first buckling face, the first groove further comprises a second guiding face, disposed opposite to the second buckling face and is parallel to the second buckling face, and when the protruded blocks are disposed in the first grooves, the fastening base and the fastening ring are configured for being rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove, and the first guiding face is abutted against the second guiding face. a fastening base, comprising: an annular substrate, having a first combining face; and a plurality of protruded blocks, annularly aligned on the first combing face, each protruded block being made of polyphenylene sulfide and comprising a first buckling face, the first buckling face being tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate; and an annular substrate, having a first combining face; and a plurality of protruded blocks, annularly aligned on the first combing face, each protruded block being made of polyphenylene sulfide and comprising a first buckling face, the first buckling face being tilted from a root portion thereof toward an outer side of the protruded block along a plane radially extending from the annular substrate; and a fastening ring, having a second combing face and a plurality of first grooves, the first grooves being annularly aligned on the second combining face, parts of a flange of each first groove being constituted of a second buckling face, the second buckling face being tilted from a root portion thereof toward the second combining face; wherein the chemical mechanical polishing fastening fixture is characterized in that: the protruded block further comprises a first guiding face, disposed opposite to the first buckling face and parallel to the first buckling face, the first groove further comprises a second guiding face, disposed opposite to the second buckling face and is parallel to the second buckling face, and when the protruded blocks are disposed in the first grooves, the fastening base and the fastening ring are configured for being rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove, and the first guiding face is abutted against the second guiding face. the protruded block further comprises a first guiding face, disposed opposite to the first buckling face and parallel to the first buckling face, the first groove further comprises a second guiding face, disposed opposite to the second buckling face and is parallel to the second buckling face, and when the protruded blocks are disposed in the first grooves, the fastening base and the fastening ring are configured for being rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove, and the first guiding face is abutted against the second guiding face.