An arrangement of a first capture vacuum pump and a second capture vacuum pump, each of the capture vacuum pumps comprising an open sided chamber comprising two or more plates (322, 324, 326, 328) with surfaces having a view of each other, the two or more plates comprising one or more side plates coupled to an end plate at a first end of the one or more side plates and extending to an opening defined by a second end of the one or more side plates, the opening defining an area equivalent to the surface of the end plate with the length of the one or more side plates defining a depth of the capture vacuum pump, and the two or more plates (322, 324, 326, 328) with surfaces having a view of the opening; a film of titanium deposited on the surfaces of the two or more plates, wherein the film deposited surfaces having a sticking factor corresponding to the probability of an individual gas molecule sticking to the film deposited surface due to a single hit of the individual gas molecule to the film deposited surface when the film deposited surfaces are exposed to the gas, wherein the capture vacuum pump has a sticking factor greater than a sticking factor of the film deposited surface of the end plate on its own; and wherein at least one of the two or more plates of the first and second capture vacuum pumps comprise a first array of individual capture vacuum pumps, wherein each individual capture vacuum pump in the first array of individual capture vacuum pumps comprising two or more plates (322, 324, 326, 328) with surfaces having a view of each other, the two or more plates comprising one or more side plates coupled to an end plate at a first end of the one or more side plates and extending to an opening defined by a second end of the one or more side plates, the opening defining an area equivalent to the surface of the end plate with the length of the one or more side plates defining a depth of the individual capture vacuum pump, and the two or more plates (322, 324, 326, 328) with surfaces having a view of the opening. an open sided chamber comprising two or more plates (322, 324, 326, 328) with surfaces having a view of each other, the two or more plates comprising one or more side plates coupled to an end plate at a first end of the one or more side plates and extending to an opening defined by a second end of the one or more side plates, the opening defining an area equivalent to the surface of the end plate with the length of the one or more side plates defining a depth of the capture vacuum pump, and the two or more plates (322, 324, 326, 328) with surfaces having a view of the opening; a film of titanium deposited on the surfaces of the two or more plates, wherein the film deposited surfaces having a sticking factor corresponding to the probability of an individual gas molecule sticking to the film deposited surface due to a single hit of the individual gas molecule to the film deposited surface when the film deposited surfaces are exposed to the gas, wherein the capture vacuum pump has a sticking factor greater than a sticking factor of the film deposited surface of the end plate on its own; and wherein at least one of the two or more plates of the first and second capture vacuum pumps comprise a first array of individual capture vacuum pumps, wherein each individual capture vacuum pump in the first array of individual capture vacuum pumps comprising two or more plates (322, 324, 326, 328) with surfaces having a view of each other, the two or more plates comprising one or more side plates coupled to an end plate at a first end of the one or more side plates and extending to an opening defined by a second end of the one or more side plates, the opening defining an area equivalent to the surface of the end plate with the length of the one or more side plates defining a depth of the individual capture vacuum pump, and the two or more plates (322, 324, 326, 328) with surfaces having a view of the opening.