An interferometric microscopy arrangement for inspecting a sample placed at a sample plane by shining a light beam from an illumination source onto the sample and detecting an interference pattern at an optical detector, the interferometric microscopy arrangement comprising: - an objective lens configured to receive the light beam after the light beam has interacted with the sample; - a beam splitter unit positioned at a focal length of the objective lens and configured to receive the light beam from the objective lens, wherein the beam splitter unit comprises a transparent substrate and a point-like beam splitting layer wherein the point-like beam splitting layer is configured to split a part of the light beam into a reference beam resulting from reflection at the point-like beam splitting layer and an object beam resulting from transmission through the point-like beam splitting layer, wherein the point-like beam splitting layer is configured to spatially filter a part of the light beam to remove at least a part of an object information from the reference beam so created; - a reference beam tube lens configured to receive the reference beam from the beam splitter unit; - an object beam tube lens configured to receive the object beam from the beam splitter unit; - an optical detector; - a beam combiner unit comprising a transparent substrate and a beam combiner layer, the beam combiner unit configured to receive the reference beam from the reference beam tube lens and to receive the object beam from the object beam tube lens, and to combine the reference beam and the object beam to form a pattern generating beam and to direct the pattern generating beam towards the optical detector to form the interference pattern at the optical detector; - a reference beam reflector that reflects the reference beam coming from the reference beam tube lens towards the beam combiner unit; and - an object beam reflector that reflects the object beam coming from the object beam tube lens towards the beam combiner unit. - an objective lens configured to receive the light beam after the light beam has interacted with the sample; - a beam splitter unit positioned at a focal length of the objective lens and configured to receive the light beam from the objective lens, wherein the beam splitter unit comprises a transparent substrate and a point-like beam splitting layer wherein the point-like beam splitting layer is configured to split a part of the light beam into a reference beam resulting from reflection at the point-like beam splitting layer and an object beam resulting from transmission through the point-like beam splitting layer, wherein the point-like beam splitting layer is configured to spatially filter a part of the light beam to remove at least a part of an object information from the reference beam so created; - a reference beam tube lens configured to receive the reference beam from the beam splitter unit; - an object beam tube lens configured to receive the object beam from the beam splitter unit; - an optical detector; - a beam combiner unit comprising a transparent substrate and a beam combiner layer, the beam combiner unit configured to receive the reference beam from the reference beam tube lens and to receive the object beam from the object beam tube lens, and to combine the reference beam and the object beam to form a pattern generating beam and to direct the pattern generating beam towards the optical detector to form the interference pattern at the optical detector; - a reference beam reflector that reflects the reference beam coming from the reference beam tube lens towards the beam combiner unit; and - an object beam reflector that reflects the object beam coming from the object beam tube lens towards the beam combiner unit.