An arrangement for the spatially resolved determination of the specific electrical resistance and/or of the specific electrical conductivity of a sample and/or of at least one layer formed on a surface of a sample at different positions, in which a plurality of detectors that are configured for a spatially resoled spectral analysis of electromagnetic radiation within a wavelength interval are arranged in a row arrangement or in a row and column arrangement; and the detectors are connected to an electronic evaluation unit and are arranged such that electromagnetic radiation emitted by a broadband radiation source impacts the detectors after reflection at the surface of the sample and/or at a layer formed on the sample or at the surface of a layer within the sample; wherein the irradiation takes place such that a homogeneous intensity of the electromagnetic radiation is observed on a surface from which the electromagnetic radiation is reflected or through which it is transmitted; and the electronic evaluation unit is configured such that the measurement signals of the detectors detected with spatial resolution and wavelength resolution within a wavelength interval for each detected position; are compared with a wavelength-resolved function that by calculation of the propagation of electromagnetic radiation in multilayer systems, while taking account of the Fresnel formulas, using an optical model for a physical description of the examined sample while taking account of the wavelength-dependent progressions of the linear optical refractive indices n and the absorption coefficients k of all the materials and/or substances forming the sample, wherein that of the material or substance of interest can be approximated by a physical function of the complex refractive index of the conductive material or substance by the Drude model, and are brought to a sufficient overlap with a calibration curve progression by an advantageous change of the Drude parameters of the physical function, to determine the specific electrical resistance and/or the specific electrical conductivity with spatial resolution at different positions, wherein the detectors, the electronic evaluation unit, and the radiation source form a hyperspectral image system, wherein the angle of incidence of the electromagnetic radiation can be changed or set in the range of 60° to 80° with respect to the normal of the surface of the sample, wherein the detection and evaluation can be carried out at various angles of incidence. the detectors are connected to an electronic evaluation unit and are arranged such that electromagnetic radiation emitted by a broadband radiation source impacts the detectors after reflection at the surface of the sample and/or at a layer formed on the sample or at the surface of a layer within the sample; wherein the irradiation takes place such that a homogeneous intensity of the electromagnetic radiation is observed on a surface from which the electromagnetic radiation is reflected or through which it is transmitted; and the electronic evaluation unit is configured such that the measurement signals of the detectors detected with spatial resolution and wavelength resolution within a wavelength interval for each detected position; are compared with a wavelength-resolved function that by calculation of the propagation of electromagnetic radiation in multilayer systems, while taking account of the Fresnel formulas, using an optical model for a physical description of the examined sample while taking account of the wavelength-dependent progressions of the linear optical refractive indices n and the absorption coefficients k of all the materials and/or substances forming the sample, wherein that of the material or substance of interest can be approximated by a physical function of the complex refractive index of the conductive material or substance by the Drude model, and are brought to a sufficient overlap with a calibration curve progression by an advantageous change of the Drude parameters of the physical function, to determine the specific electrical resistance and/or the specific electrical conductivity with spatial resolution at different positions, wherein the detectors, the electronic evaluation unit, and the radiation source form a hyperspectral image system, wherein the angle of incidence of the electromagnetic radiation can be changed or set in the range of 60° to 80° with respect to the normal of the surface of the sample, wherein the detection and evaluation can be carried out at various angles of incidence.