A drying apparatus for drying a plurality of drying target objects having air permeability and mounted on a tray by using a drying medium penetrating through the tray, the drying apparatus comprising: a tray having a tray vent hole for the drying medium passing therethrough at respective mounting positions of the drying target objects; a suction duct provided on an under surface side of the tray for sucking the drying medium from the tray vent hole; and a first resistant lid for regulating of passing resistance of the drying medium by opening and closing a suction port of the suction duct, the lid having a first vent hole for the drying medium passing therethrough with the suction port closed, wherein, in the suction duct corresponding to the tray vent hole, on which the drying target object is mounted, the drying medium is circulated passing through a first gap formed between the first resistant lid and the suction port of the suction duct, and wherein, in the suction duct corresponding to the tray vent hole, on which a drying target object is not mounted, the drying medium is circulated passing through the first vent hole formed in the first resistant lid; the drying apparatus further comprising: a spring for biasing the first resistant lid in a direction in which the suction port of the suction duct is closed, wherein the first resistant lid is caused to move in a direction, such that the passing resistance of the drying medium is lowered, against the bias, due to weight of the drying target object, for forming the first gap. a tray having a tray vent hole for the drying medium passing therethrough at respective mounting positions of the drying target objects; a suction duct provided on an under surface side of the tray for sucking the drying medium from the tray vent hole; and a first resistant lid for regulating of passing resistance of the drying medium by opening and closing a suction port of the suction duct, the lid having a first vent hole for the drying medium passing therethrough with the suction port closed, wherein, in the suction duct corresponding to the tray vent hole, on which the drying target object is mounted, the drying medium is circulated passing through a first gap formed between the first resistant lid and the suction port of the suction duct, and wherein, in the suction duct corresponding to the tray vent hole, on which a drying target object is not mounted, the drying medium is circulated passing through the first vent hole formed in the first resistant lid; the drying apparatus further comprising: a spring for biasing the first resistant lid in a direction in which the suction port of the suction duct is closed, wherein the first resistant lid is caused to move in a direction, such that the passing resistance of the drying medium is lowered, against the bias, due to weight of the drying target object, for forming the first gap. a spring for biasing the first resistant lid in a direction in which the suction port of the suction duct is closed, wherein the first resistant lid is caused to move in a direction, such that the passing resistance of the drying medium is lowered, against the bias, due to weight of the drying target object, for forming the first gap.