A variable wavelength interference filter comprising: a) a first substrate; b) a second substrate disposed so as to be opposed to the first substrate; c) a first reflecting film provided to the first substrate; d) a second reflecting film provided to the second substrate, and opposed to the first reflecting film via a gap so as to form an optical interference region (ArO); e) a first electrode provided to the first substrate; peripherally surrounding the first reflecting film and f) a second electrode peripherally surrounding the second reflecting film and provided to the second substrate, and opposed to the first electrode so as to form an electrostatic actuator, g) wherein the first electrode and the second electrode are disposed outside said optical interference region where the first reflecting film and the second reflecting film overlap each other in a plan view of the first substrate and the second substrate viewed from a substrate thickness direction, h1) a peripheral edge of the first electrode, the peripheral edge being located near to the optical interference region, is located nearer to the optical interference region than peripheral edges of the second electrode in the plan view, and h2) a peripheral edge of the first electrode, the peripheral edge being located on an opposite side to the optical interference region, is located further from the optical interference region than the peripheral edges of the second electrode in the plan view; and i) a first extraction electrode connected to the first electrode; and j) a second extraction electrode connected to the second electrode, characterized in that the first electrode has a plurality of substantially arc-shaped first partial electrodes (561A, 561B) in the plan view, k) the first extraction electrode is disposed at a position, which fails to overlap the second electrode and the second extraction electrode in the plan view, and 1) the second extraction electrode is connected to the second electrode at a position, which overlaps an area between either two of the first partial electrodes (561A, 561B) in the plan view; and m) wherein the first electrode has a first connection electrode disposed at a position, which fails to overlap the second electrode and the second extraction electrode in the plan view, and adapted to connect the two first partial electrodes (561A, 561B) to each other. a) a first substrate; b) a second substrate disposed so as to be opposed to the first substrate; c) a first reflecting film provided to the first substrate; d) a second reflecting film provided to the second substrate, and opposed to the first reflecting film via a gap so as to form an optical interference region (ArO); e) a first electrode provided to the first substrate; peripherally surrounding the first reflecting film and f) a second electrode peripherally surrounding the second reflecting film and provided to the second substrate, and opposed to the first electrode so as to form an electrostatic actuator, g) wherein the first electrode and the second electrode are disposed outside said optical interference region where the first reflecting film and the second reflecting film overlap each other in a plan view of the first substrate and the second substrate viewed from a substrate thickness direction, h1) a peripheral edge of the first electrode, the peripheral edge being located near to the optical interference region, is located nearer to the optical interference region than peripheral edges of the second electrode in the plan view, and h2) a peripheral edge of the first electrode, the peripheral edge being located on an opposite side to the optical interference region, is located further from the optical interference region than the peripheral edges of the second electrode in the plan view; and i) a first extraction electrode connected to the first electrode; and j) a second extraction electrode connected to the second electrode, k) the first extraction electrode is disposed at a position, which fails to overlap the second electrode and the second extraction electrode in the plan view, and 1) the second extraction electrode is connected to the second electrode at a position, which overlaps an area between either two of the first partial electrodes (561A, 561B) in the plan view; and m) wherein the first electrode has a first connection electrode disposed at a position, which fails to overlap the second electrode and the second extraction electrode in the plan view, and adapted to connect the two first partial electrodes (561A, 561B) to each other.