An apparatus for controlling a direction and alignment of a Neutral Beam derived from a gas-cluster ion-beam, the apparatus comprising: a. an apparatus for forming a gas cluster ion beam having an initial axis determined at a gas jet nozzle in an ion source that has an exit aperture encircling the initial axis and an accelerating electrode (1144', 702) spaced from the exit aperture, said accelerating electrode having an aperture encircling the initial axis; wherein, the accelerating electrode and its aperture are configured to be tilted at a first tilt angle along a first tilt axis, with respect to the initial axis of the gas-cluster ion-beam; further wherein, the accelerating electrode is configured to be electrically biased with respect to the ion source to accelerate and focus the gas-cluster ion-beam in a region between the ion source exit aperture and the accelerating electrode aperture; even further wherein the accelerating electrode and its aperture are configured to be tilted at a second tilt angle along a second tilt axis with respect to the initial path of the gas-cluster ion-beam and the resulting deflection is a compound deflection, wherein the first and second tilt axes are distinct and still further wherein, the first tilt angle and the second tilt angle enable alignment and result in a deflection of the gas-cluster ion-beam away from the initial axis along a first deflected path; b. a drift space for the deflected gas-cluster ion-beam, wherein dissociation of gas-cluster ions in the accelerated and focused gas-cluster ion-beam occurs, producing accelerated and focused neutral particles; and c. means (1302, 1304) for separating ions from neutral particles to remove ions from the deflected beam path, so that the accelerated neutral particles follow the deflected beam path as a Neutral Beam. a. an apparatus for forming a gas cluster ion beam having an initial axis determined at a gas jet nozzle in an ion source that has an exit aperture encircling the initial axis and an accelerating electrode (1144', 702) spaced from the exit aperture, said accelerating electrode having an aperture encircling the initial axis; wherein, the accelerating electrode and its aperture are configured to be tilted at a first tilt angle along a first tilt axis, with respect to the initial axis of the gas-cluster ion-beam; further wherein, the accelerating electrode is configured to be electrically biased with respect to the ion source to accelerate and focus the gas-cluster ion-beam in a region between the ion source exit aperture and the accelerating electrode aperture; even further wherein the accelerating electrode and its aperture are configured to be tilted at a second tilt angle along a second tilt axis with respect to the initial path of the gas-cluster ion-beam and the resulting deflection is a compound deflection, wherein the first and second tilt axes are distinct and still further wherein, the first tilt angle and the second tilt angle enable alignment and result in a deflection of the gas-cluster ion-beam away from the initial axis along a first deflected path; wherein, the accelerating electrode and its aperture are configured to be tilted at a first tilt angle along a first tilt axis, with respect to the initial axis of the gas-cluster ion-beam; further wherein, the accelerating electrode is configured to be electrically biased with respect to the ion source to accelerate and focus the gas-cluster ion-beam in a region between the ion source exit aperture and the accelerating electrode aperture; even further wherein the accelerating electrode and its aperture are configured to be tilted at a second tilt angle along a second tilt axis with respect to the initial path of the gas-cluster ion-beam and the resulting deflection is a compound deflection, wherein the first and second tilt axes are distinct and still further wherein, the first tilt angle and the second tilt angle enable alignment and result in a deflection of the gas-cluster ion-beam away from the initial axis along a first deflected path; b. a drift space for the deflected gas-cluster ion-beam, wherein dissociation of gas-cluster ions in the accelerated and focused gas-cluster ion-beam occurs, producing accelerated and focused neutral particles; and c. means (1302, 1304) for separating ions from neutral particles to remove ions from the deflected beam path, so that the accelerated neutral particles follow the deflected beam path as a Neutral Beam.