A pump for semiconductor manufacturing comprising: a feed stage motor to draw fluid into a feed chamber via an inlet of the pump; a dispense stage motor to dispense fluid from a dispense chamber via an outlet of the pump; a removable filter disposed in a fluid flow path between the pump inlet and the pump outlet; an isolation valve between the feed chamber and the removable filter; a barrier valve between the removable filter and the dispense chamber; a vent valve in fluid communication with the removable filter; and characterised by a pump controller configured to select a priming routine from a set of priming routines based on a filter type and process fluid, wherein the set of priming routines comprises: a first priming routine that includes a forward pressurization segment for a first type of removable filter, wherein the forward pressurization segment comprises operating the feed stage motor to pressurize fluid in the feed chamber with the isolation valve open and the barrier and vent valves closed; and a second priming routine that includes a back pressurization segment for a second type of removable filter, wherein the back pressurization segment comprises operating the dispense stage motor to pressurize fluid in the dispense chamber with the isolation and vent valves closed and the barrier valve open; and the pump controller is configured to control the pump to perform the selected priming routine to prime the removable filter and, when the second priming routine is selected, to introduce a process fluid to the removable filter and back-pressurize the removable filter by performing the back pressurization segment for a predetermined period of time. a feed stage motor to draw fluid into a feed chamber via an inlet of the pump; a dispense stage motor to dispense fluid from a dispense chamber via an outlet of the pump; a removable filter disposed in a fluid flow path between the pump inlet and the pump outlet; an isolation valve between the feed chamber and the removable filter; a barrier valve between the removable filter and the dispense chamber; a vent valve in fluid communication with the removable filter; and characterised by a pump controller configured to select a priming routine from a set of priming routines based on a filter type and process fluid, wherein the set of priming routines comprises: a first priming routine that includes a forward pressurization segment for a first type of removable filter, wherein the forward pressurization segment comprises operating the feed stage motor to pressurize fluid in the feed chamber with the isolation valve open and the barrier and vent valves closed; and a second priming routine that includes a back pressurization segment for a second type of removable filter, wherein the back pressurization segment comprises operating the dispense stage motor to pressurize fluid in the dispense chamber with the isolation and vent valves closed and the barrier valve open; and the pump controller is configured to control the pump to perform the selected priming routine to prime the removable filter and, when the second priming routine is selected, to introduce a process fluid to the removable filter and back-pressurize the removable filter by performing the back pressurization segment for a predetermined period of time. a first priming routine that includes a forward pressurization segment for a first type of removable filter, wherein the forward pressurization segment comprises operating the feed stage motor to pressurize fluid in the feed chamber with the isolation valve open and the barrier and vent valves closed; and a second priming routine that includes a back pressurization segment for a second type of removable filter, wherein the back pressurization segment comprises operating the dispense stage motor to pressurize fluid in the dispense chamber with the isolation and vent valves closed and the barrier valve open; and the pump controller is configured to control the pump to perform the selected priming routine to prime the removable filter and, when the second priming routine is selected, to introduce a process fluid to the removable filter and back-pressurize the removable filter by performing the back pressurization segment for a predetermined period of time.