A method for producing a stack of layers on a semiconductor substrate, the method comprising the steps of: • providing a substrate, • producing on said substrate a first electrically conductive layer, • by atomic layer deposition, producing a sub-stack of layers on said conductive layer, at least one of said layers of the sub-stack being a TiO 2 layer, the other layer or layers of the sub-stack being layers of a dielectric material having a composition suitable to form a cubic perovskite phase upon crystallization of said sub-stack of layers, and further comprising: • subjecting the substrate including said sub-stack of layers to a heat treatment to thereby crystallize the substack of layers, so as to obtain a crystallized dielectric layer with a cubic-perovskite structure on said first conductive layer, by full intermixing of the TiO 2 layer or layers with the other layer or layers of the substack, • producing a second electrically conductive layer on said crystallized dielectric layer. or: • producing a second electrically conductive layer on said sub-stack of layers, • subjecting the substrate including said sub-stack of layers and said second conductive layer to a heat treatment to thereby crystallize the substack of layers, so as to obtain a crystallized dielectric layer with a cubic-perovskite structure on said first conductive layer, by full intermixing of the TiO 2 layer or layers with the other layer or layers of the substack. wherein: - the layer or layers of a dielectric material having a composition suitable to form a cubic perovskite phase upon crystallization of said sub-stack of layers are: ∘ one or more layers of strontium-rich strontium titanium oxide STO in metastable phase wherein the ratio Sr/(Sr+Ti) is higher than 50%, and possibly one or more layers of strontium oxide SrO or ∘ one or more layers of titanium-rich strontium titanium oxide STO in a metastable phase wherein the ratio of Sr/(Sr+Ti) is lower than 50% and one or more layers of strontium oxide (SrO), - the crystallized dielectric layer with a cubic-perovskite structure is a layer of strontium-rich strontium titanium oxide STO wherein the ratio Sr/(Sr+Ti) is higher than 50%. • providing a substrate, • producing on said substrate a first electrically conductive layer, • by atomic layer deposition, producing a sub-stack of layers on said conductive layer, at least one of said layers of the sub-stack being a TiO 2 layer, the other layer or layers of the sub-stack being layers of a dielectric material having a composition suitable to form a cubic perovskite phase upon crystallization of said sub-stack of layers, • subjecting the substrate including said sub-stack of layers to a heat treatment to thereby crystallize the substack of layers, so as to obtain a crystallized dielectric layer with a cubic-perovskite structure on said first conductive layer, by full intermixing of the TiO 2 layer or layers with the other layer or layers of the substack, • producing a second electrically conductive layer on said crystallized dielectric layer. • producing a second electrically conductive layer on said sub-stack of layers, • subjecting the substrate including said sub-stack of layers and said second conductive layer to a heat treatment to thereby crystallize the substack of layers, so as to obtain a crystallized dielectric layer with a cubic-perovskite structure on said first conductive layer, by full intermixing of the TiO 2 layer or layers with the other layer or layers of the substack. - the layer or layers of a dielectric material having a composition suitable to form a cubic perovskite phase upon crystallization of said sub-stack of layers are: ∘ one or more layers of strontium-rich strontium titanium oxide STO in metastable phase wherein the ratio Sr/(Sr+Ti) is higher than 50%, and possibly one or more layers of strontium oxide SrO or ∘ one or more layers of titanium-rich strontium titanium oxide STO in a metastable phase wherein the ratio of Sr/(Sr+Ti) is lower than 50% and one or more layers of strontium oxide (SrO), ∘ one or more layers of strontium-rich strontium titanium oxide STO in metastable phase wherein the ratio Sr/(Sr+Ti) is higher than 50%, and possibly one or more layers of strontium oxide SrO or ∘ one or more layers of titanium-rich strontium titanium oxide STO in a metastable phase wherein the ratio of Sr/(Sr+Ti) is lower than 50% and one or more layers of strontium oxide (SrO), - the crystallized dielectric layer with a cubic-perovskite structure is a layer of strontium-rich strontium titanium oxide STO wherein the ratio Sr/(Sr+Ti) is higher than 50%.