A system for laser processing of a workpiece (38, 52), the system comprising - a laser source for generating a working beam, wherein the laser source is further configured for generating a measurement beam or wherein the system comprises a further optical source for generating a measurement beam, - a laser scanning system defining a center beam axis and being both configured for scanning the working beam over the workpiece (38, 52) and for scanning the measurement beam over the workpiece, - a camera which is inclined to the center beam axis, spaced from the center beam axis and arranged in a fixed relation to the laser scanning system, - a robot configured for moving the laser scanning system, - a processing unit configured - to determine a relation between a setting of the system and a resulting position of a focus of the working beam or of a projection of the working beam relative to the workpiece (38, 52) for that setting, based on a spatial relation between the working beam and the measurement beam and based on a camera image of the workpiece (38, 52) taken when the workpiece is scanned by the measurement beam, and - to generate path data based on said determined relation and based on predefined criteria, - a control unit configured to - control the setting of the system for scanning the working beam over the workpiece (38, 52) according to the path data for processing the material of the workpiece. - a laser source for generating a working beam, wherein the laser source is further configured for generating a measurement beam or wherein the system comprises a further optical source for generating a measurement beam, - a laser scanning system defining a center beam axis and being both configured for scanning the working beam over the workpiece (38, 52) and for scanning the measurement beam over the workpiece, - a camera which is inclined to the center beam axis, spaced from the center beam axis and arranged in a fixed relation to the laser scanning system, inclined to the center beam axis, spaced from the center beam axis and arranged in a fixed relation to the laser scanning system, - a robot configured for moving the laser scanning system, - a processing unit configured - to determine a relation between a setting of the system and a resulting position of a focus of the working beam or of a projection of the working beam relative to the workpiece (38, 52) for that setting, based on a spatial relation between the working beam and the measurement beam and based on a camera image of the workpiece (38, 52) taken when the workpiece is scanned by the measurement beam, and - to generate path data based on said determined relation and based on predefined criteria, - to determine a relation between a setting of the system and a resulting position of a focus of the working beam or of a projection of the working beam relative to the workpiece (38, 52) for that setting, based on a spatial relation between the working beam and the measurement beam and based on a camera image of the workpiece (38, 52) taken when the workpiece is scanned by the measurement beam, and - to generate path data based on said determined relation and based on predefined criteria, - a control unit configured to - control the setting of the system for scanning the working beam over the workpiece (38, 52) according to the path data for processing the material of the workpiece. - control the setting of the system for scanning the working beam over the workpiece (38, 52) according to the path data for processing the material of the workpiece.