A Micro-electro-mechanical system (MEMS) sensor, comprising: a substrate; at least one proof mass having a first plurality of combs, wherein the proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable; at least one anchor having a second plurality of combs, wherein the anchor is coupled to the substrate such that the anchor and second plurality of combs are fixed in position relative to the substrate; wherein the first plurality of combs are interleaved with the second plurality of combs; characterized in that each comb in the first plurality of combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers, wherein each comb in the first plurality of combs comprises a first outer conductive layer, a second outer conductive layer, and a first inner conductive layer, wherein the first outer conductive layer and the second outer conductive layer are arranged on opposite surfaces of the combs in the first plurality of combs; wherein each comb in the second plurality of combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers, wherein each comb of the second plurality of combs comprises a third outer conductive layer, a fourth outer conductive layer, and a second inner conductive layer wherein the third outer conductive layer and the fourth outer conductive layer are arranged on opposite surfaces of the combs in the second plurality of combs; wherein each conductive layer is individually couplable to a respective electric potential such that at least one conductive layer of each of the combs in the first plurality of combs and the second plurality of combs is couplable to a first electric potential and at least one conductive layer of each of the combs in the first plurality of combs and the second plurality of combs is couplable to a second electric potential; wherein when coupled to the first and second electric potentials, the respective conductive layers are configured to create an electrical field configuration in which capacitance between the first plurality of combs and the second plurality of combs varies linearly with displacement of the movable combs in an out-of-plane direction. a substrate; at least one proof mass having a first plurality of combs, wherein the proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable; at least one anchor having a second plurality of combs, wherein the anchor is coupled to the substrate such that the anchor and second plurality of combs are fixed in position relative to the substrate; wherein the first plurality of combs are interleaved with the second plurality of combs; characterized in that each comb in the first plurality of combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers, wherein each comb in the first plurality of combs comprises a first outer conductive layer, a second outer conductive layer, and a first inner conductive layer, wherein the first outer conductive layer and the second outer conductive layer are arranged on opposite surfaces of the combs in the first plurality of combs; wherein each comb in the second plurality of combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers, wherein each comb of the second plurality of combs comprises a third outer conductive layer, a fourth outer conductive layer, and a second inner conductive layer wherein the third outer conductive layer and the fourth outer conductive layer are arranged on opposite surfaces of the combs in the second plurality of combs; wherein each conductive layer is individually couplable to a respective electric potential such that at least one conductive layer of each of the combs in the first plurality of combs and the second plurality of combs is couplable to a first electric potential and at least one conductive layer of each of the combs in the first plurality of combs and the second plurality of combs is couplable to a second electric potential; wherein when coupled to the first and second electric potentials, the respective conductive layers are configured to create an electrical field configuration in which capacitance between the first plurality of combs and the second plurality of combs varies linearly with displacement of the movable combs in an out-of-plane direction.