A MEMS device for a MEMS vibrometer, the MEMS device comprising: a first layer (36, 102) of the MEMS device; a second layer (38, 104) of the MEMS device connected to the first layer of the MEMS device; a first mooring portion (40, 118) at a first side of the MEMS device; a second mooring portion (42, 120) at a second side of the MEMS device opposite the first mooring portion; and a MEMS device body connected to the first mooring portion at a first side of the MEMS device and connected to the second mooring portion at a second side of the MEMS device opposite the first mooring portion, the MEMS device body comprising: a first cantilever (78, 108) attached to the first mooring portion at a first side of the first cantilever; a second cantilever (82, 110) attached to the second mooring portion at a first side of the second cantilever; a spring (80, 106) between the first cantilever and the second cantilever, the spring connected to the first cantilever at a second side of the first cantilever opposite the first mooring portion and connected to the second cantilever at a second side of the second cantilever opposite the second mooring portion; wherein the MEMS device is manufactured as a single piece, the first cantilever, the second cantilever, and the spring being formed of the first layer and the second layer of the MEMS device; and characterized by: a first proof mass (86, 126) connected to a bottom of the second layer of the MEMS device on the first cantilever; and a second proof mass (88, 128) connected to a bottom of the second layer of the MEMS device on the second cantilever. a first layer (36, 102) of the MEMS device; a second layer (38, 104) of the MEMS device connected to the first layer of the MEMS device; a first mooring portion (40, 118) at a first side of the MEMS device; a second mooring portion (42, 120) at a second side of the MEMS device opposite the first mooring portion; and a MEMS device body connected to the first mooring portion at a first side of the MEMS device and connected to the second mooring portion at a second side of the MEMS device opposite the first mooring portion, the MEMS device body comprising: a first cantilever (78, 108) attached to the first mooring portion at a first side of the first cantilever; a second cantilever (82, 110) attached to the second mooring portion at a first side of the second cantilever; a spring (80, 106) between the first cantilever and the second cantilever, the spring connected to the first cantilever at a second side of the first cantilever opposite the first mooring portion and connected to the second cantilever at a second side of the second cantilever opposite the second mooring portion; wherein the MEMS device is manufactured as a single piece, the first cantilever, the second cantilever, and the spring being formed of the first layer and the second layer of the MEMS device; and characterized by: a first proof mass (86, 126) connected to a bottom of the second layer of the MEMS device on the first cantilever; and a second proof mass (88, 128) connected to a bottom of the second layer of the MEMS device on the second cantilever. a first cantilever (78, 108) attached to the first mooring portion at a first side of the first cantilever; a second cantilever (82, 110) attached to the second mooring portion at a first side of the second cantilever; a spring (80, 106) between the first cantilever and the second cantilever, the spring connected to the first cantilever at a second side of the first cantilever opposite the first mooring portion and connected to the second cantilever at a second side of the second cantilever opposite the second mooring portion; wherein the MEMS device is manufactured as a single piece, the first cantilever, the second cantilever, and the spring being formed of the first layer and the second layer of the MEMS device; and characterized by: a first proof mass (86, 126) connected to a bottom of the second layer of the MEMS device on the first cantilever; and a second proof mass (88, 128) connected to a bottom of the second layer of the MEMS device on the second cantilever. a first proof mass (86, 126) connected to a bottom of the second layer of the MEMS device on the first cantilever; and a second proof mass (88, 128) connected to a bottom of the second layer of the MEMS device on the second cantilever.