A precision actuating device for achieving precision actuation in at least two directions, comprising: a first moving component having an installation space formed therein, wherein the first moving component has an upper surface and an inner side face, the installation space is recessed from the upper surface towards the interior of the first moving component and is open towards the upper surface, and the periphery of the installation space is defined by the inner side face; a first precision driving mechanism in transmission connection with the first moving component, wherein the first precision driving mechanism is used for driving the first moving component to move along a first direction; and a second moving component and a second precision driving mechanism, which are arranged and held within the installation space so as to be able to move along the first direction together with the first moving component, wherein the second precision driving mechanism is in transmission connection with the second moving component and is used for driving the second moving component to move in the installation space along a second direction that is different from the first direction; characterized in that a guiding and limiting structure is formed between the first precision driving mechanism and the first moving component, and/or, between the second precision driving mechanism and the second moving component, for guiding the first and/or second moving component to be movable only along the corresponding first direction and/or second direction relative to the corresponding first and/or second precision driving mechanism; and wherein the guiding and limiting structure comprises: a guide groove; and a slide block used for cooperation with the guide groove and arranged in the guide groove; and wherein the first and/or second precision driving mechanism is provided with one of the guide groove and the slide block, and the first and/or second moving component is provided with the other of the guide groove and the slide block. a first moving component having an installation space formed therein, wherein the first moving component has an upper surface and an inner side face, the installation space is recessed from the upper surface towards the interior of the first moving component and is open towards the upper surface, and the periphery of the installation space is defined by the inner side face; a first precision driving mechanism in transmission connection with the first moving component, wherein the first precision driving mechanism is used for driving the first moving component to move along a first direction; and a second moving component and a second precision driving mechanism, which are arranged and held within the installation space so as to be able to move along the first direction together with the first moving component, wherein the second precision driving mechanism is in transmission connection with the second moving component and is used for driving the second moving component to move in the installation space along a second direction that is different from the first direction; characterized in that a guiding and limiting structure is formed between the first precision driving mechanism and the first moving component, and/or, between the second precision driving mechanism and the second moving component, for guiding the first and/or second moving component to be movable only along the corresponding first direction and/or second direction relative to the corresponding first and/or second precision driving mechanism; and wherein the guiding and limiting structure comprises: a guide groove; and a slide block used for cooperation with the guide groove and arranged in the guide groove; and a guide groove; and a slide block used for cooperation with the guide groove and arranged in the guide groove; and wherein the first and/or second precision driving mechanism is provided with one of the guide groove and the slide block, and the first and/or second moving component is provided with the other of the guide groove and the slide block.