An atmosphere-to-vacuum transfer module (204, 300, 404, 500, 604) for a substrate processing tool, the ATV transfer module comprising: a first side configured to interface with at least one loading station (220, 324, 520); a transfer robot assembly arranged within the ATV transfer module, wherein the transfer robot assembly is configured to transfer substrates between the at least one loading station and at least one load lock (516, 608) arranged between the ATV transfer module and a vacuum transfer module (212, 428, 612); and a second side, opposite the first side, configured to interface with the at least one load lock (208, 320, 424, 516, 608), wherein the transfer robot assembly is arranged adjacent to the second side, and wherein the at least one load lock (208, 320, 424, 516, 608) extends through the second side into an interior volume of the ATV transfer module (204, 300, 404, 500, 604); characterized in that: the transfer robot assembly includes a transfer robot platform configured to support a transfer robot; the transfer robot assembly is configured to (i) raise and lower the transfer robot platform to adjust a position of the transfer robot platform in a vertical direction and (ii) adjust the position of the transfer robot platform in a horizontal direction; the transfer robot assembly includes a first robot alignment arm and a second robot alignment arm configured to vertically and horizontally adjust the position of the transfer robot platform; the transfer robot includes an arm and is configured to fold into a folded configuration having a narrow profile; the arm of the transfer robot comprises an arm segment and an end effector; and the transfer robot assembly occupies less than 50% of an overall depth of the ATV transfer module when the transfer robot is in the folded configuration. a first side configured to interface with at least one loading station (220, 324, 520); a transfer robot assembly arranged within the ATV transfer module, wherein the transfer robot assembly is configured to transfer substrates between the at least one loading station and at least one load lock (516, 608) arranged between the ATV transfer module and a vacuum transfer module (212, 428, 612); and a second side, opposite the first side, configured to interface with the at least one load lock (208, 320, 424, 516, 608), wherein the transfer robot assembly is arranged adjacent to the second side, and wherein the at least one load lock (208, 320, 424, 516, 608) extends through the second side into an interior volume of the ATV transfer module (204, 300, 404, 500, 604); characterized in that: the transfer robot assembly includes a transfer robot platform configured to support a transfer robot; the transfer robot assembly is configured to (i) raise and lower the transfer robot platform to adjust a position of the transfer robot platform in a vertical direction and (ii) adjust the position of the transfer robot platform in a horizontal direction; the transfer robot assembly includes a first robot alignment arm and a second robot alignment arm configured to vertically and horizontally adjust the position of the transfer robot platform; the transfer robot includes an arm and is configured to fold into a folded configuration having a narrow profile; the arm of the transfer robot comprises an arm segment and an end effector; and the transfer robot assembly occupies less than 50% of an overall depth of the ATV transfer module when the transfer robot is in the folded configuration. the transfer robot assembly includes a transfer robot platform configured to support a transfer robot; the transfer robot assembly is configured to (i) raise and lower the transfer robot platform to adjust a position of the transfer robot platform in a vertical direction and (ii) adjust the position of the transfer robot platform in a horizontal direction; the transfer robot assembly includes a first robot alignment arm and a second robot alignment arm configured to vertically and horizontally adjust the position of the transfer robot platform; the transfer robot includes an arm and is configured to fold into a folded configuration having a narrow profile; the arm of the transfer robot comprises an arm segment and an end effector; and the transfer robot assembly occupies less than 50% of an overall depth of the ATV transfer module when the transfer robot is in the folded configuration.