An electrostatic chuck apparatus comprising: an electrostatic chuck section, one surface of which is a placing surface for placing a plate-like specimen, and which is equipped with an electrode for electrostatic adsorption; an annular focus ring surrounding the electrostatic chuck section; a cooling base section which is provided on the other surface side of the electrostatic chuck section to cool the electrostatic chuck section and the focus ring, characterized by the following features: an annular thermal conducting sheet which is provided on a lower surface of the focus ring; an annular ceramic ring which is provided on a lower surface of the annular thermal conducting sheet; a heater section which is provided on a lower surface of the annular ceramic ring; a first insulating adhesive layer for bonding the heater section and the annular ceramic ring; a second insulating adhesive layer for bonding the cooling base section and the heater section; and a heater electrode is bonded to a lower surface of the heater section to supplies electricity to the heater section; a sum of thickness of the first insulating adhesive layer, the heater section and the second insulating adhesive layer is 100μm to 500μm; the thermal conducting sheet has a coefficient of heat transfer equal to or greater than 500W/m 2 K and provides the thermal conduction between the focus ring and the ceramic ring; and a coefficient of heat transfer between the cooling section and the heater section is 400W/m 2 K or more and 10.000W/m 2 K or less; and the ceramic ring has a thermal conductivity equal to or greater than 1W/mK and transmits the heat from the heater section to the focus ring via the thermal conducting sheet thereby stabilizing the surface temperature of the plate-like specimen placed on the electrostatic chuck section and equalize the in-plane characteristics of the plate-like specimen subjected to various processes. an electrostatic chuck section, one surface of which is a placing surface for placing a plate-like specimen, and which is equipped with an electrode for electrostatic adsorption; an annular focus ring surrounding the electrostatic chuck section; a cooling base section which is provided on the other surface side of the electrostatic chuck section to cool the electrostatic chuck section and the focus ring, characterized by the following features: an annular thermal conducting sheet which is provided on a lower surface of the focus ring; an annular ceramic ring which is provided on a lower surface of the annular thermal conducting sheet; a heater section which is provided on a lower surface of the annular ceramic ring; a first insulating adhesive layer for bonding the heater section and the annular ceramic ring; a second insulating adhesive layer for bonding the cooling base section and the heater section; and a heater electrode is bonded to a lower surface of the heater section to supplies electricity to the heater section; a sum of thickness of the first insulating adhesive layer, the heater section and the second insulating adhesive layer is 100μm to 500μm; the thermal conducting sheet has a coefficient of heat transfer equal to or greater than 500W/m 2 K and provides the thermal conduction between the focus ring and the ceramic ring; and a coefficient of heat transfer between the cooling section and the heater section is 400W/m 2 K or more and 10.000W/m 2 K or less; and the ceramic ring has a thermal conductivity equal to or greater than 1W/mK and transmits the heat from the heater section to the focus ring via the thermal conducting sheet thereby stabilizing the surface temperature of the plate-like specimen placed on the electrostatic chuck section and equalize the in-plane characteristics of the plate-like specimen subjected to various processes. an annular thermal conducting sheet which is provided on a lower surface of the focus ring; an annular ceramic ring which is provided on a lower surface of the annular thermal conducting sheet; a heater section which is provided on a lower surface of the annular ceramic ring; a first insulating adhesive layer for bonding the heater section and the annular ceramic ring; a second insulating adhesive layer for bonding the cooling base section and the heater section; and a heater electrode is bonded to a lower surface of the heater section to supplies electricity to the heater section; a sum of thickness of the first insulating adhesive layer, the heater section and the second insulating adhesive layer is 100μm to 500μm; the thermal conducting sheet has a coefficient of heat transfer equal to or greater than 500W/m 2 K and provides the thermal conduction between the focus ring and the ceramic ring; and a coefficient of heat transfer between the cooling section and the heater section is 400W/m 2 K or more and 10.000W/m 2 K or less; and the ceramic ring has a thermal conductivity equal to or greater than 1W/mK and transmits the heat from the heater section to the focus ring via the thermal conducting sheet thereby stabilizing the surface temperature of the plate-like specimen placed on the electrostatic chuck section and equalize the in-plane characteristics of the plate-like specimen subjected to various processes.