A method of examining a sample using non-transmission charged-particle microscopy, comprising the following steps: - Mounting the sample on a sample holder; - Using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; - Using a detector arrangement (100; 420) to detect at least a portion of said emitted radiation, - Recording an output O n of said detector arrangement (100; 420) as a function of emergence angle θ n of said emitted radiation, measured relative to an axis normal to S, thus compiling a measurement set M = {(O n, θ n)} for a plurality of values of θ n; - Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R = {(V k, L k)}, in which a spatial variable V demonstrates a value V k at an associated discrete depth level L k referenced to the surface S, whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk, and wherein the measurement set M is automatically processed in a manner that comprises the following steps: - Defining a Point Spread Function that, for each value of n, has a kernel value K n representing a behavior of said beam of particulate radiation in a bulk of the sample as perceived by the detector arrangement (100; 420) for emergence angle θ n; - Defining an imaging quantity that, for each value of n, has a value Q n that is a multidimensional convolution of K n and V, such that Q n = K n * V; - For each value of n, computationally determining a minimum divergence min D O n ‖ K n * V between O n and Q n, wherein one solves for V while applying constraints on the values K n. - Mounting the sample on a sample holder; - Using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; - Using a detector arrangement (100; 420) to detect at least a portion of said emitted radiation, - Recording an output O n of said detector arrangement (100; 420) as a function of emergence angle θ n of said emitted radiation, measured relative to an axis normal to S, thus compiling a measurement set M = {(O n, θ n)} for a plurality of values of θ n; - Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R = {(V k, L k)}, in which a spatial variable V demonstrates a value V k at an associated discrete depth level L k referenced to the surface S, - Defining a Point Spread Function that, for each value of n, has a kernel value K n representing a behavior of said beam of particulate radiation in a bulk of the sample as perceived by the detector arrangement (100; 420) for emergence angle θ n; - Defining an imaging quantity that, for each value of n, has a value Q n that is a multidimensional convolution of K n and V, such that Q n = K n * V; - For each value of n, computationally determining a minimum divergence min D O n ‖ K n * V between O n and Q n, wherein one solves for V while applying constraints on the values K n.