A computer-implemented method of analyzing a shape of a wafer, the method comprising: acquiring a sectional image showing a wafer to be analyzed; finding a series of coordinates of a surface contour of the wafer in the sectional image; and obtaining shape analysis data including information on a shape of the wafer using the series of coordinates, wherein the finding of the series of coordinates of the surface contour comprises: obtaining a luminance of each pixel in the sectional image; obtaining luminance differences between adjacent pixels; determining temporary contour pixels using the luminance differences; determining whether modification of a temporary surface contour formed by the determined temporary contour pixels is required, wherein the temporary contour pixels are re-determined by proceeding to the step of determining the temporary contour pixels when the modification of the temporary surface contour is required (34; 35); determining an array of the temporary contour pixels as the series of coordinates of the surface contour when the modification of the temporary surface contour is not required; and converting the series of coordinates of the surface contour into a series of coordinates having a form of Cartesian coordinates, wherein the shape analysis data is obtained by using the converted series of coordinates. acquiring a sectional image showing a wafer to be analyzed; finding a series of coordinates of a surface contour of the wafer in the sectional image; and obtaining shape analysis data including information on a shape of the wafer using the series of coordinates, wherein the finding of the series of coordinates of the surface contour comprises: obtaining a luminance of each pixel in the sectional image; obtaining luminance differences between adjacent pixels; determining temporary contour pixels using the luminance differences; determining whether modification of a temporary surface contour formed by the determined temporary contour pixels is required, wherein the temporary contour pixels are re-determined by proceeding to the step of determining the temporary contour pixels when the modification of the temporary surface contour is required (34; 35); determining an array of the temporary contour pixels as the series of coordinates of the surface contour when the modification of the temporary surface contour is not required; and converting the series of coordinates of the surface contour into a series of coordinates having a form of Cartesian coordinates, obtaining a luminance of each pixel in the sectional image; obtaining luminance differences between adjacent pixels; determining temporary contour pixels using the luminance differences; determining whether modification of a temporary surface contour formed by the determined temporary contour pixels is required, wherein the temporary contour pixels are re-determined by proceeding to the step of determining the temporary contour pixels when the modification of the temporary surface contour is required (34; 35); determining an array of the temporary contour pixels as the series of coordinates of the surface contour when the modification of the temporary surface contour is not required; and converting the series of coordinates of the surface contour into a series of coordinates having a form of Cartesian coordinates, wherein the shape analysis data is obtained by using the converted series of coordinates.