Method for aligning and bringing a first substrate into contact with a second substrate with the following steps in particular, the following course of action: - Fixing the first substrate to a first holder and the second substrate to a second holder, which is arranged opposite to the first holder, whereby the first and second substrates (14, 14') are arranged between the first and second holders (4, 5) at a distance A between a first contact surface of the first substrate and a second contact surface of the second substrate, - Detecting first markings (17") of the first substrate and second markings (17") of the second substrate by at least four detection units (3, 3', 3", 3"'), whereupon: a) At least two first detection units (3, 3") can be moved at least in X-direction and in Y-direction, and b) At least two second detection units (3', 3"') are moved during the detection in a Z-direction, wherein the Z-direction is arranged crosswise to the X- and Y-direction - Aligning the first substrate relative to the second substrate in X-direction and Y-direction running crosswise thereto by means of movement of the substrates (14, 14') through the holders (4, 5), and - Bringing into contact the contact surfaces of the aligned substrates (14, 14') in Z-direction. wherein the second substrate that is fixed to the second holder can be moved exclusively in the Z-direction. wherein the first substrate is moved in the X- and/or Y-direction such that a left second detection unit detects a left marking (17") on the first substrate, wherein the first substrate is moved in the X- and/or Y-direction such that a right second detection unit (3"') detects a right marking (17") on the first substrate, wherein a left first detection unit is moved in the X- and/or Y-direction such that a left marking (17") on the second substrate is detected by the left first detection unit, wherein the second substrate is moveable exclusively in the Z-direction, wherein a right first detection unit (3") is moved in the X- and/or Y-direction such that a right marking (17") on the second substrate is detected by the right first detection unit (3"), characterized in that the at least two first detection units (3, 3") are moveable independently from the first substrate and that the at least two second detection units (3', 3''') are moved during detection exclusively in the Z-direction. - Fixing the first substrate to a first holder and the second substrate to a second holder, which is arranged opposite to the first holder, whereby the first and second substrates (14, 14') are arranged between the first and second holders (4, 5) at a distance A between a first contact surface of the first substrate and a second contact surface of the second substrate, - Detecting first markings (17") of the first substrate and second markings (17") of the second substrate by at least four detection units (3, 3', 3", 3"'), whereupon: a) At least two first detection units (3, 3") can be moved at least in X-direction and in Y-direction, and b) At least two second detection units (3', 3"') are moved during the detection in a Z-direction, wherein the Z-direction is arranged crosswise to the X- and Y-direction a) At least two first detection units (3, 3") can be moved at least in X-direction and in Y-direction, and b) At least two second detection units (3', 3"') are moved during the detection in a Z-direction, wherein the Z-direction is arranged crosswise to the X- and Y-direction - Aligning the first substrate relative to the second substrate in X-direction and Y-direction running crosswise thereto by means of movement of the substrates (14, 14') through the holders (4, 5), and - Bringing into contact the contact surfaces of the aligned substrates (14, 14') in Z-direction.