A micro-electro-mechanical device comprising: a fixed structure having a cavity; a tiltable structure, elastically suspended over the cavity, having a main extension in a tiltable plane rotatable, together with the tiltable structure, about at least one rotation axis belonging to the tiltable plane; a suspension structure elastically coupling the tiltable structure to the fixed structure and including supporting elements (65A, 65B) and elastic suspension elements (66A, 66B) extending longitudinally along the rotation axis; a piezoelectric actuation structure including at least a first and a second driving arm (72A, 72B), the first and second driving arms carrying respective piezoelectric material regions and extending on opposite sides of the rotation axis, the first and the second driving arms (72A, 72B) being rigidly coupled to the fixed structure and being elastically coupled to the tiltable structure by respective elastic decoupling elements (74A, 74B, 74C, 74D) different from the elastic suspension elements (66A, 66B); and a stop structure (83A-83D, 90), different from the suspension structure (65A, 65B, 66A, 66B) and the piezoelectric actuation structure, configured to limit, during the rotation of the tiltable structure around the rotation axis, movements of the tiltable structure with respect to the actuation structure along a planar direction parallel to the tiltable plane and perpendicular to the rotation axis, the stop structure including at least a first planar stop element formed between the first driving arm and the tiltable structure and a second planar stop element formed between the second driving arm and the tiltable structure. a fixed structure having a cavity; a tiltable structure, elastically suspended over the cavity, having a main extension in a tiltable plane rotatable, together with the tiltable structure, about at least one rotation axis belonging to the tiltable plane; a suspension structure elastically coupling the tiltable structure to the fixed structure and including supporting elements (65A, 65B) and elastic suspension elements (66A, 66B) extending longitudinally along the rotation axis; a piezoelectric actuation structure including at least a first and a second driving arm (72A, 72B), the first and second driving arms carrying respective piezoelectric material regions and extending on opposite sides of the rotation axis, the first and the second driving arms (72A, 72B) being rigidly coupled to the fixed structure and being elastically coupled to the tiltable structure by respective elastic decoupling elements (74A, 74B, 74C, 74D) different from the elastic suspension elements (66A, 66B); and a stop structure (83A-83D, 90), different from the suspension structure (65A, 65B, 66A, 66B) and the piezoelectric actuation structure, configured to limit, during the rotation of the tiltable structure around the rotation axis, movements of the tiltable structure with respect to the actuation structure along a planar direction parallel to the tiltable plane and perpendicular to the rotation axis, the stop structure including at least a first planar stop element formed between the first driving arm and the tiltable structure and a second planar stop element formed between the second driving arm and the tiltable structure.