A wafer transport system for transporting a wafer, in particular to an inspection position of a wafer inspection installation, including: - a wafer aligning device for depositing a wafer in a predetermined rotational angular position (α S), including: - a wafer table comprising a table receptacle for receiving the wafer in a table receptacle plane, - an aligning means comprising an aligning receptacle adapted for aligning the wafer with a predetermined rotational angular position, wherein - at least one of the aligning receptacle and the table receptacle is adapted, by a vertical relative movement with respect to the other one of the aligning receptacle and the table receptacle, to deposit the wafer received in the aligning receptacle on the table receptacle when the aligning receptacle and the table receptacle plane pass each other, and wherein - the wafer table includes a recess through which the aligning receptacle is vertically traversable, and whose boundary is at least partly formed as at least one table receptacle element, and - the aligning receptacle in its resting position (P RA) is arranged below the table receptacle plane of the wafer table, and - an extraction means comprising an extraction receptacle for the transport of the wafer from a storage place in a wafer store to the wafer aligning device, wherein the extraction receptacle is arranged above the aligning receptacle before handing over the wafer in a hand-over position Pu, - the extraction means is vertically traversable through the recess of the wafer table at least with the extraction receptacle for transporting the wafer from a storage place in a wafer store to the wafer aligning device, wherein - the aligning receptacle is arranged in an aligning position (P A) above the table receptacle plane of the wafer table when the wafer is received, - at least one of the aligning receptacle and the extraction receptacle is adapted to deposit a wafer received in the extraction receptacle on the aligning receptacle by a vertical relative movement with respect to the other one of the aligning receptacle and the extraction receptacle on reversal of the relative vertical positions of the aligning receptacle and the extraction receptacle with respect to each other, characterized in that - the wafer table is adapted to transport an aligned wafer into an inspection position of a wafer inspection installation. - a wafer aligning device for depositing a wafer in a predetermined rotational angular position (α S), including: - a wafer table comprising a table receptacle for receiving the wafer in a table receptacle plane, - an aligning means comprising an aligning receptacle adapted for aligning the wafer with a predetermined rotational angular position, wherein - at least one of the aligning receptacle and the table receptacle is adapted, by a vertical relative movement with respect to the other one of the aligning receptacle and the table receptacle, to deposit the wafer received in the aligning receptacle on the table receptacle when the aligning receptacle and the table receptacle plane pass each other, and wherein - the wafer table includes a recess through which the aligning receptacle is vertically traversable, and whose boundary is at least partly formed as at least one table receptacle element, and - the aligning receptacle in its resting position (P RA) is arranged below the table receptacle plane of the wafer table, and - a wafer table comprising a table receptacle for receiving the wafer in a table receptacle plane, - an aligning means comprising an aligning receptacle adapted for aligning the wafer with a predetermined rotational angular position, wherein - at least one of the aligning receptacle and the table receptacle is adapted, by a vertical relative movement with respect to the other one of the aligning receptacle and the table receptacle, to deposit the wafer received in the aligning receptacle on the table receptacle when the aligning receptacle and the table receptacle plane pass each other, and wherein - the wafer table includes a recess through which the aligning receptacle is vertically traversable, and whose boundary is at least partly formed as at least one table receptacle element, and - the aligning receptacle in its resting position (P RA) is arranged below the table receptacle plane of the wafer table, - an extraction means comprising an extraction receptacle for the transport of the wafer from a storage place in a wafer store to the wafer aligning device, wherein the extraction receptacle is arranged above the aligning receptacle before handing over the wafer in a hand-over position Pu, - the extraction means is vertically traversable through the recess of the wafer table at least with the extraction receptacle for transporting the wafer from a storage place in a wafer store to the wafer aligning device, - the aligning receptacle is arranged in an aligning position (P A) above the table receptacle plane of the wafer table when the wafer is received, - at least one of the aligning receptacle and the extraction receptacle is adapted to deposit a wafer received in the extraction receptacle on the aligning receptacle by a vertical relative movement with respect to the other one of the aligning receptacle and the extraction receptacle on reversal of the relative vertical positions of the aligning receptacle and the extraction receptacle with respect to each other, characterized in that - the wafer table is adapted to transport an aligned wafer into an inspection position of a wafer inspection installation.