A data processing device comprising a calculation part, a classification part, and a Proxel calculation part, wherein the calculation part is configured to collect a plurality of data groups associated with a predetermined step of a process, and calculate effects in the predetermined step for each of the plurality of data groups; the classification part is configured to divide a feature space such that a distribution of each of the plurality of data groups associated with the predetermined step in the feature space is classified for each of the calculated effects; and the Proxel calculation part is configured to calculate a Proxel that specifies respective regions of the divided feature space, characterized in that the Proxel is a minimum data unit in a fine processing in a semiconductor manufacturing process, the effect is a difference between a first data indicating a state before the predetermined step of the process is executed and a second data indicating a state after the predetermined step of the process is executed, the classification part is configured to divide the feature space by performing a clustering processing on each of the plurality of data groups such that, among the plurality of data groups, data groups in which the calculated effects are equal to each other are classified into a same data group, the Proxel calculation part is configured to calculate the Proxel by calculating a minimum value and a maximum value for each data included in each of the data groups classified into the same data group by the classification part, the Proxel calculation part is configured to interpolate an incomplete data group including a blank and handle the incomplete data group as one versatile data group including no blank by calculating the Proxel, and the process is the semiconductor manufacturing process, wherein the predetermined step changes a state in the semiconductor manufacturing process as a minimum processing unit, and the state includes at least an attribute of an object to be processed in the semiconductor manufacturing process. the calculation part is configured to collect a plurality of data groups associated with a predetermined step of a process, and calculate effects in the predetermined step for each of the plurality of data groups; the classification part is configured to divide a feature space such that a distribution of each of the plurality of data groups associated with the predetermined step in the feature space is classified for each of the calculated effects; and the Proxel calculation part is configured to calculate a Proxel that specifies respective regions of the divided feature space, the Proxel is a minimum data unit in a fine processing in a semiconductor manufacturing process, the effect is a difference between a first data indicating a state before the predetermined step of the process is executed and a second data indicating a state after the predetermined step of the process is executed, the classification part is configured to divide the feature space by performing a clustering processing on each of the plurality of data groups such that, among the plurality of data groups, data groups in which the calculated effects are equal to each other are classified into a same data group, the Proxel calculation part is configured to calculate the Proxel by calculating a minimum value and a maximum value for each data included in each of the data groups classified into the same data group by the classification part, the Proxel calculation part is configured to interpolate an incomplete data group including a blank and handle the incomplete data group as one versatile data group including no blank by calculating the Proxel, and the process is the semiconductor manufacturing process, wherein the predetermined step changes a state in the semiconductor manufacturing process as a minimum processing unit, and the state includes at least an attribute of an object to be processed in the semiconductor manufacturing process. the predetermined step changes a state in the semiconductor manufacturing process as a minimum processing unit, and the state includes at least an attribute of an object to be processed in the semiconductor manufacturing process.