A device for the controlled processing of at least one workpiece with processing radiation, comprising a workpiece carrier which has at least one workpiece receptacle (2.1) for receiving the at least one workpiece, at least one processing unit having a processing beam source (3.1) which directs a processing beam onto the workpiece received in the at least one workpiece receptacle (2.1), at least one inspection unit having an inspection beam source (4.1) which directs an inspection beam onto the workpiece received in the at least one workpiece receptacle (2.1), and a detector (4.2), which detects a transmitted, reflected or scattered inspection beam portion (P') of the inspection beam, and at least one linear motor, by which the at least one processing unit and the at least one inspection unit can be moved relative to the workpiece carrier, wherein the workpiece positioned in the at least one workpiece receptacle (2.1) is scanned by the processing beam and the inspection beam, following the processing beam, along scan lines extending side by side, and the workpiece is processed and inspected along the scan lines, characterised in that a motor is present and the workpiece carrier has a revolving rotary shaft (2.0) which is connected to the motor in order to generate a rotary motion of the workpiece carrier in a direction of rotation (R dreh), the at least one processing unit and the at least one inspection unit, offset by an angular distance (β n) relative to one another with respect to the rotary shaft (2.0), are arranged so as to be radially adjustable relative to the rotary shaft (2.0) and are connected to the at least one linear motor in order to generate translational movements of the processing unit and of the inspection unit relative to the workpiece carrier in two radial translational directions (R trans 1, R trans 2) which enclose the angular distance (β n) with one another, whereby, when the motor and the at least one linear motor are controlled simultaneously, the processing beam and the inspection beam, offset from one another by the angular distance (β n) describe the same spiral movement path with a plurality of turnings relative to the workpiece carrier, the at least one workpiece receptacle (2.1) is arranged at a distance (a) from the rotary shaft (2.0) so that the at least one workpiece receptacle (2.1) or a workpiece positioned therein is covered by partial sections (S') of the turnings which each represent one of the scan lines, and a control and computing unit is present, which is connected to the at least one inspection unit, to the at least one processing unit, to the motor and to the at least one linear motor in order to change at least one process parameter of the device as a function of inspection results derived from the detected inspection beam portion '. a workpiece carrier which has at least one workpiece receptacle (2.1) for receiving the at least one workpiece, at least one processing unit having a processing beam source (3.1) which directs a processing beam onto the workpiece received in the at least one workpiece receptacle (2.1), at least one inspection unit having an inspection beam source (4.1) which directs an inspection beam onto the workpiece received in the at least one workpiece receptacle (2.1), and a detector (4.2), which detects a transmitted, reflected or scattered inspection beam portion (P') of the inspection beam, and at least one linear motor, by which the at least one processing unit and the at least one inspection unit can be moved relative to the workpiece carrier, wherein the workpiece positioned in the at least one workpiece receptacle (2.1) is scanned by the processing beam and the inspection beam, following the processing beam, along scan lines extending side by side, and the workpiece is processed and inspected along the scan lines, characterised in that a motor is present and the workpiece carrier has a revolving rotary shaft (2.0) which is connected to the motor in order to generate a rotary motion of the workpiece carrier in a direction of rotation (R dreh), the at least one processing unit and the at least one inspection unit, offset by an angular distance (β n) relative to one another with respect to the rotary shaft (2.0), are arranged so as to be radially adjustable relative to the rotary shaft (2.0) and are connected to the at least one linear motor in order to generate translational movements of the processing unit and of the inspection unit relative to the workpiece carrier in two radial translational directions (R trans 1, R trans 2) which enclose the angular distance (β n) with one another, whereby, when the motor and the at least one linear motor are controlled simultaneously, the processing beam and the inspection beam, offset from one another by the angular distance (β n) describe the same spiral movement path with a plurality of turnings relative to the workpiece carrier, the at least one workpiece receptacle (2.1) is arranged at a distance (a) from the rotary shaft (2.0) so that the at least one workpiece receptacle (2.1) or a workpiece positioned therein is covered by partial sections (S') of the turnings which each represent one of the scan lines, and a control and computing unit is present, which is connected to the at least one inspection unit, to the at least one processing unit, to the motor and to the at least one linear motor in order to change at least one process parameter of the device as a function of inspection results derived from the detected inspection beam portion '.