A planar positioning device having three degrees of freedom (X, Y, R z) comprising: - a static base having a flat bearing surface; and - a moveable stage, being moveable over the bearing surface of the base in an XY-plane parallel to the bearing surface by electromagnetic driving means, wherein the XY-plane is defined by orthogonal directions X and Y, and the moveable stage including air bearings and being supported without contact by the bearing surface of the base via said air bearings; wherein: the electromagnetic driving means comprise a linear motor acting in the X-direction and a linear motor acting in the Y-direction, and at least one additional linear motor acting in the X-direction or in the Y-direction, each of said linear motors includes a magnet assembly arranged on the moveable stage and a coil assembly that is arranged on the base, and the base includes a slider track extending in the X-direction and a slider track extending in the Y-direction, wherein the coil assembly of the linear motor(s) acting in the X-direction is arranged on a slider which is moveable along the slider track extending in the Y-direction and is coupled to the stage in the Y-direction, and the coil assembly of the linear motor(s) acting in the Y-direction is arranged on a slider which is moveable along the slider track extending in the X-direction and is coupled to the stage in the X-direction, characterized in that the sliders each have a reluctance actuator arranged on it, which reluctance actuator is configured and arranged to cooperate with (ferro)magnetic material on the moveable stage such that the slider follows the movement of the stage. - a static base having a flat bearing surface; and - a moveable stage, being moveable over the bearing surface of the base in an XY-plane parallel to the bearing surface by electromagnetic driving means, wherein the XY-plane is defined by orthogonal directions X and Y, and the moveable stage including air bearings and being supported without contact by the bearing surface of the base via said air bearings; the electromagnetic driving means comprise a linear motor acting in the X-direction and a linear motor acting in the Y-direction, and at least one additional linear motor acting in the X-direction or in the Y-direction, each of said linear motors includes a magnet assembly arranged on the moveable stage and a coil assembly that is arranged on the base, and the base includes a slider track extending in the X-direction and a slider track extending in the Y-direction, wherein the coil assembly of the linear motor(s) acting in the X-direction is arranged on a slider which is moveable along the slider track extending in the Y-direction and is coupled to the stage in the Y-direction, and the coil assembly of the linear motor(s) acting in the Y-direction is arranged on a slider which is moveable along the slider track extending in the X-direction and is coupled to the stage in the X-direction, characterized in that the sliders each have a reluctance actuator arranged on it, which reluctance actuator is configured and arranged to cooperate with (ferro)magnetic material on the moveable stage such that the slider follows the movement of the stage.