A sublimated gas supply system for supplying a sublimated gas produced from a solid material to a post process, the system comprising: - a container that stores a solid material; - a container heating unit that heats the container so that the sublimated gas of the solid material is produced; - a container pressure gauge that measures a pressure inside the container; - a first vacuum container configured so that the sublimated gas is introduced from the container in a state where a pressure of the sublimated gas is in a prescribed negative pressure range when the pressure measured with the container pressure gauge is a saturated vapor pressure of the sublimated gas; - a first pressure gauge that measures a pressure inside the first vacuum container; - a second vacuum container configured so that the sublimated gas is introduced from the container in a state where a pressure of the sublimated gas is in a prescribed negative pressure range when the pressure measured with the container pressure gauge is a saturated vapor pressure of the sublimated gas; - a second pressure gauge that measures a pressure inside the second vacuum container; - a sublimated gas lead-out line that leads out the sublimated gas from the container to the first vacuum container or the second vacuum container in a switchable manner; - a dilution gas line that introduces dilution gas into the first vacuum container or the second vacuum container in a switchable manner; - a flow amount control unit that controls a flow amount of the dilution gas so that a concentration of the sublimated gas in the dilution gas inside the first vacuum container is controlled to be a prescribed concentration based on the pressure inside the first vacuum container when the sublimated gas is introduced into the first vacuum container, and for controlling a flow amount of the dilution gas so that a concentration of the sublimated gas in the dilution gas inside the second vacuum container is controlled to be a prescribed concentration based on the pressure inside the second vacuum container when the sublimated gas is introduced into the second vacuum container; - a lead-out line that leads out the sublimated gas from the first vacuum container or the second vacuum container into the post process when the concentration of the sublimated gas in the dilution gas reaches the prescribed concentration in a switchable manner; and - a vacuum pump line that comprises a vacuum pump and makes the vacuum containers be in a vacuum state in a switchable manner. - a container that stores a solid material; - a container heating unit that heats the container so that the sublimated gas of the solid material is produced; - a container pressure gauge that measures a pressure inside the container; - a first vacuum container configured so that the sublimated gas is introduced from the container in a state where a pressure of the sublimated gas is in a prescribed negative pressure range when the pressure measured with the container pressure gauge is a saturated vapor pressure of the sublimated gas; - a first pressure gauge that measures a pressure inside the first vacuum container; - a second vacuum container configured so that the sublimated gas is introduced from the container in a state where a pressure of the sublimated gas is in a prescribed negative pressure range when the pressure measured with the container pressure gauge is a saturated vapor pressure of the sublimated gas; - a second pressure gauge that measures a pressure inside the second vacuum container; - a sublimated gas lead-out line that leads out the sublimated gas from the container to the first vacuum container or the second vacuum container in a switchable manner; - a dilution gas line that introduces dilution gas into the first vacuum container or the second vacuum container in a switchable manner; - a flow amount control unit that controls a flow amount of the dilution gas so that a concentration of the sublimated gas in the dilution gas inside the first vacuum container is controlled to be a prescribed concentration based on the pressure inside the first vacuum container when the sublimated gas is introduced into the first vacuum container, and for controlling a flow amount of the dilution gas so that a concentration of the sublimated gas in the dilution gas inside the second vacuum container is controlled to be a prescribed concentration based on the pressure inside the second vacuum container when the sublimated gas is introduced into the second vacuum container; - a lead-out line that leads out the sublimated gas from the first vacuum container or the second vacuum container into the post process when the concentration of the sublimated gas in the dilution gas reaches the prescribed concentration in a switchable manner; and - a vacuum pump line that comprises a vacuum pump and makes the vacuum containers be in a vacuum state in a switchable manner.