A method of inspecting a sample, comprising the steps of: preparing a SEM comprising: an electron optical column which generates an electron beam; and a vacuum chamber connected to the electron optical column having a hole permitting passage of the electron beam to outside of the chamber at an atmospheric pressure, preparing a sample holder comprising: a film through which an electron beam is transmitted, the film having a first surface on which a sample is placed, and a second surface to which the electron beam irradiates, the sample holder permitting the sample on the first surface to be irradiated with the electron beam transmitted through the film; and a fixing member mounted on the first or second surface of the film, placing the sample on the first surface of the film of the sample holder, placing the sample holder on the outside surface of the vacuum chamber such that the hole of the vacuum chamber is closed by the sample holder and the second surface of the film faces to inside of the vacuum chamber and the electron beam may pass through the hole and irradiates the second surface of the film, evacuating the vacuum chamber, irradiating the sample placed on the first surface of the film with the electron beam from a side of the second surface of the film through the hole; and detecting a secondary signal produced from the sample in response to the irradiation and obtaining information about the sample. preparing a SEM comprising: an electron optical column which generates an electron beam; and a vacuum chamber connected to the electron optical column having a hole permitting passage of the electron beam to outside of the chamber at an atmospheric pressure, an electron optical column which generates an electron beam; and a vacuum chamber connected to the electron optical column having a hole permitting passage of the electron beam to outside of the chamber at an atmospheric pressure, preparing a sample holder comprising: a film through which an electron beam is transmitted, the film having a first surface on which a sample is placed, and a second surface to which the electron beam irradiates, the sample holder permitting the sample on the first surface to be irradiated with the electron beam transmitted through the film; and a fixing member mounted on the first or second surface of the film, a film through which an electron beam is transmitted, the film having a first surface on which a sample is placed, and a second surface to which the electron beam irradiates, the sample holder permitting the sample on the first surface to be irradiated with the electron beam transmitted through the film; and a fixing member mounted on the first or second surface of the film, placing the sample on the first surface of the film of the sample holder, placing the sample holder on the outside surface of the vacuum chamber such that the hole of the vacuum chamber is closed by the sample holder and the second surface of the film faces to inside of the vacuum chamber and the electron beam may pass through the hole and irradiates the second surface of the film, evacuating the vacuum chamber, irradiating the sample placed on the first surface of the film with the electron beam from a side of the second surface of the film through the hole; and detecting a secondary signal produced from the sample in response to the irradiation and obtaining information about the sample.