A maintenance system of a substrate processing apparatus, comprising: a remote operation unit for operating said substrate processing apparatus (M1-Mn) from a remote place by transmitting a remote operation information to a side of said substrate processing apparatus through a communication, network and providing said remote operation information to said substrate processing apparatus; and a communication control unit for receiving said remote operation information transmitted to the side of said substrate processing apparatus (M1-Mn) and providing said remote operation information to said substrate processing apparatus; wherein said communication control unit provides said remote operation information to said substrate processing apparatus only when there is an allow setting for a remote operation by a worker in the side of said substrate processing apparatus (M1-Mn); the system further comprising: a sensor for detecting an approach of a person to said substrate processing apparatus (M1-Mn) in the side of said substrate processing apparatus; wherein said sensor can selectively detect the approach of the person other than workers identified in advance; wherein an operation for starting a detection by said sensor can be performed in the side of said substrate processing apparatus or in the side of said remote operation unit with said communication network put therebetween; and wherein an operation for stopping the detection by said sensor can be performed only in the side of said substrate processing apparatus (M1-Mn). a remote operation unit for operating said substrate processing apparatus (M1-Mn) from a remote place by transmitting a remote operation information to a side of said substrate processing apparatus through a communication, network and providing said remote operation information to said substrate processing apparatus; and a communication control unit for receiving said remote operation information transmitted to the side of said substrate processing apparatus (M1-Mn) and providing said remote operation information to said substrate processing apparatus; wherein said communication control unit provides said remote operation information to said substrate processing apparatus only when there is an allow setting for a remote operation by a worker in the side of said substrate processing apparatus (M1-Mn); the system further comprising: a sensor for detecting an approach of a person to said substrate processing apparatus (M1-Mn) in the side of said substrate processing apparatus; wherein said sensor can selectively detect the approach of the person other than workers identified in advance; wherein an operation for starting a detection by said sensor can be performed in the side of said substrate processing apparatus or in the side of said remote operation unit with said communication network put therebetween; and wherein an operation for stopping the detection by said sensor can be performed only in the side of said substrate processing apparatus (M1-Mn). a sensor for detecting an approach of a person to said substrate processing apparatus (M1-Mn) in the side of said substrate processing apparatus; wherein said sensor can selectively detect the approach of the person other than workers identified in advance; wherein an operation for starting a detection by said sensor can be performed in the side of said substrate processing apparatus or in the side of said remote operation unit with said communication network put therebetween; and wherein an operation for stopping the detection by said sensor can be performed only in the side of said substrate processing apparatus (M1-Mn).