A vibration sensor comprising: first and second substrates configured to be relatively movable by an external vibration while opposed to each other; an electret group comprising a pturality of electrets that are arrayed in a relative movement direction on a side of one o surfaces of the first substrate; and, an electrode group comprising a plurality of electeode that are arrayed in the retative movement direction on a side of a surface of the second substrate, the surface of the second substate being opposed to the electret group, wherein a positional relationship between the electret group and the electrode group is adapted to change with a relative change in position of the first and second substrates by the external vibration to output an external vibration detection signal, the electode group is divided into a predetermined number of phases of at least two, a small electrode group configured an electric signal according to the external vibration in each phase, in one of the electrode group and the electret group, a phase difference generation gap that is adapted to generate a predetermined phase difference between electric signals generated by the plurality of small electrode group is provided according to the predetermined number of phases, the phase difference generation gap provided between the electrodes adjacent to each other comprised in the electrode group or between electrets adjacent to each other comprised in the electret group, and wherein the vibration sensor is, as a result of the relative change in position of the first and second substrates by the external vibration, adapted to output a signal formed by superimposing the electric signals generated by the plurality of small electrode groups on each other as the external vibration detection signal. first and second substrates configured to be relatively movable by an external vibration while opposed to each other; an electret group comprising a pturality of electrets that are arrayed in a relative movement direction on a side of one o surfaces of the first substrate; and, an electrode group comprising a plurality of electeode that are arrayed in the retative movement direction on a side of a surface of the second substrate, the surface of the second substate being opposed to the electret group, wherein a positional relationship between the electret group and the electrode group is adapted to change with a relative change in position of the first and second substrates by the external vibration to output an external vibration detection signal, the electode group is divided into a predetermined number of phases of at least two, a small electrode group configured an electric signal according to the external vibration in each phase, in one of the electrode group and the electret group, a phase difference generation gap that is adapted to generate a predetermined phase difference between electric signals generated by the plurality of small electrode group is provided according to the predetermined number of phases, the phase difference generation gap provided between the electrodes adjacent to each other comprised in the electrode group or between electrets adjacent to each other comprised in the electret group, and wherein the vibration sensor is, as a result of the relative change in position of the first and second substrates by the external vibration, adapted to output a signal formed by superimposing the electric signals generated by the plurality of small electrode groups on each other as the external vibration detection signal.