An exposure apparatus for exposing a substrate via a projection optical system, comprising: a base member arranged to be below the projection optical system and having an upper surface that is substantially parallel to a predetermined plane, the predetermined plane being orthogonal to an optical axis of the projection optical system, first and second directions (X, Y) in the plane being orthogonal to each other; first and second movable bodies (WST1, WST2) levitationally supported above the base member and each arranged for holding a substrate; a measuring apparatus for obtaining positional information of the first and second movable bodies; a first piping member connected to the first movable body and having a part which extends away from the first moveable body in the first direction and a bent part different from the part, a second piping member connected to the second movable body and having a part which extends away from the second movable body in the direction opposite to the first direction and a bent part different from the part; a first substage having a first support part arranged on a first side of the base member to support the first piping member and being movable in the second direction; a second substage having a second support part arranged on a second side of the base member which is opposite in the first direction to the first side of the base member to support the second piping member and being movable in the second direction; a drive system having a planar motor and a substage motor, the planar motor being arranged to drive the first and second movable bodies on the base member and having movable parts provided to the first and second movable bodies, respectively, and a fixed part provided to the base member, the substage motor being arranged to drive the first and second substages relative to the base member; and a control apparatus arranged to control the drive system based on the positional information obtained with the measuring apparatus, characterised in that the first and second support parts are supported noncontactually above and by the base member. a base member arranged to be below the projection optical system and having an upper surface that is substantially parallel to a predetermined plane, the predetermined plane being orthogonal to an optical axis of the projection optical system, first and second directions (X, Y) in the plane being orthogonal to each other; first and second movable bodies (WST1, WST2) levitationally supported above the base member and each arranged for holding a substrate; a measuring apparatus for obtaining positional information of the first and second movable bodies; a first piping member connected to the first movable body and having a part which extends away from the first moveable body in the first direction and a bent part different from the part, a second piping member connected to the second movable body and having a part which extends away from the second movable body in the direction opposite to the first direction and a bent part different from the part; a first substage having a first support part arranged on a first side of the base member to support the first piping member and being movable in the second direction; a second substage having a second support part arranged on a second side of the base member which is opposite in the first direction to the first side of the base member to support the second piping member and being movable in the second direction; a drive system having a planar motor and a substage motor, the planar motor being arranged to drive the first and second movable bodies on the base member and having movable parts provided to the first and second movable bodies, respectively, and a fixed part provided to the base member, the substage motor being arranged to drive the first and second substages relative to the base member; and a control apparatus arranged to control the drive system based on the positional information obtained with the measuring apparatus, characterised in that the first and second support parts are supported noncontactually above and by the base member.