Arrangement for three-dimensional electron beam tomography, comprising: - an electron gun for generating an electron beam within a vacuum chamber such that the electron beam exits from the electron gun in an electron beam direction, - an electron-optical system for focusing and deflecting the electron beam within the vacuum chamber, - a target arranged within the vacuum chamber for decelerating the electron beam and for generating X-ray radiation, which target in turn comprises a target base body and a conversion layer applied to the inner side of the target base body, wherein the target is designed in such a way that the X-ray radiation can radiate through it, - an X-ray detector subdivided into a plurality of circular-arc segments (6a, 6b, 6c, 6d) and arranged within the vacuum chamber, - a receiving opening for the examination object, - electron beam stops arranged within the vacuum chamber and - a detector collimator arranged within the vacuum chamber, wherein - the target surrounds the receiving opening for the examination object, - the target is designed as a cylindrical ring tapering in the electron beam direction present when exiting from the electron gun, - the circular-arc segments (6a, 6b, 6c, 6d) of the X-ray detector surround the target on the outside with certain axial distances from one another, - the electron beam is forced into a spiral path by means of the electron-optical system and thereby generates a spatially spiral-shaped focal-spot path on the inside of the target or the electron beam is successively forced into circular paths with different diameters by means of the electron-optical system and thereby generates a spatial focal-spot path that consists of a multiplicity of circles with different diameters on the inside of the target. - an electron gun for generating an electron beam within a vacuum chamber such that the electron beam exits from the electron gun in an electron beam direction, - an electron-optical system for focusing and deflecting the electron beam within the vacuum chamber, - a target arranged within the vacuum chamber for decelerating the electron beam and for generating X-ray radiation, which target in turn comprises a target base body and a conversion layer applied to the inner side of the target base body, wherein the target is designed in such a way that the X-ray radiation can radiate through it, - an X-ray detector subdivided into a plurality of circular-arc segments (6a, 6b, 6c, 6d) and arranged within the vacuum chamber, - a receiving opening for the examination object, - electron beam stops arranged within the vacuum chamber and - a detector collimator arranged within the vacuum chamber, wherein - the target surrounds the receiving opening for the examination object, - the target is designed as a cylindrical ring tapering in the electron beam direction present when exiting from the electron gun, - the circular-arc segments (6a, 6b, 6c, 6d) of the X-ray detector surround the target on the outside with certain axial distances from one another, - the electron beam is forced into a spiral path by means of the electron-optical system and thereby generates a spatially spiral-shaped focal-spot path on the inside of the target or the electron beam is successively forced into circular paths with different diameters by means of the electron-optical system and thereby generates a spatial focal-spot path that consists of a multiplicity of circles with different diameters on the inside of the target.