An exposure apparatus, comprising: an illumination system for illuminating a first object with illumination light; and a projection system for projecting a pattern image of the first object onto a second object, wherein the illumination system comprises a formation optical system (21, 71, 72) which includes: a deflection member for generating a plurality of light beams to be respectively distributed in a plurality of areas on a predetermined plane in the illumination system which is conjugated with a pupil plane of the projection system, said plurality of areas being different from each other and comprising a plurality of areas being away from an optical axis of the illumination system and an area which substantially includes the optical axis, the area which substantially includes the optical axis being annular and having a ratio of an outer radius and an inner radius between 0 and 1; an optical integrator being a fly eye lens or a micro fly eye lens; and a polarization setting member which is arranged between the deflection member and the optical integrator to set polarization states of the plurality of light beams generated from the deflection member, whereby the formation optical system is adapted to set a light amount distribution in which an amount of light is larger in the plurality of areas than in an area other than the plurality of areas such that the first object is illuminated with the illumination light including the plurality of light beams. an illumination system for illuminating a first object with illumination light; and a projection system for projecting a pattern image of the first object onto a second object, wherein the illumination system comprises a formation optical system (21, 71, 72) which includes: a deflection member for generating a plurality of light beams to be respectively distributed in a plurality of areas on a predetermined plane in the illumination system which is conjugated with a pupil plane of the projection system, said plurality of areas being different from each other and comprising a plurality of areas being away from an optical axis of the illumination system and an area which substantially includes the optical axis, the area which substantially includes the optical axis being annular and having a ratio of an outer radius and an inner radius between 0 and 1; an optical integrator being a fly eye lens or a micro fly eye lens; and a polarization setting member which is arranged between the deflection member and the optical integrator to set polarization states of the plurality of light beams generated from the deflection member, whereby the formation optical system is adapted to set a light amount distribution in which an amount of light is larger in the plurality of areas than in an area other than the plurality of areas such that the first object is illuminated with the illumination light including the plurality of light beams. a deflection member for generating a plurality of light beams to be respectively distributed in a plurality of areas on a predetermined plane in the illumination system which is conjugated with a pupil plane of the projection system, said plurality of areas being different from each other and comprising a plurality of areas being away from an optical axis of the illumination system and an area which substantially includes the optical axis, the area which substantially includes the optical axis being annular and having a ratio of an outer radius and an inner radius between 0 and 1; an optical integrator being a fly eye lens or a micro fly eye lens; and a polarization setting member which is arranged between the deflection member and the optical integrator to set polarization states of the plurality of light beams generated from the deflection member, whereby the formation optical system is adapted to set a light amount distribution in which an amount of light is larger in the plurality of areas than in an area other than the plurality of areas such that the first object is illuminated with the illumination light including the plurality of light beams.