Illumination optical unit for projection lithography for illuminating an illumination field with illumination light of a primary light source - having at least one raster arrangement (12, 16) having raster elements (12a, 16a) arranged in raster rows and raster columns, said raster elements influencing the illumination light for predefining a shape of the illumination field, - having a transfer optical unit for the superimposing transfer of the illumination light from the raster elements (12a, 16a) towards the illumination field, in which an object displaceable in an object displacement direction (y) is arrangeable, - having an illumination angle variation device (14, 14'; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113), which deflects the illumination light incident on the illumination angle variation device (14; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113) in a deflection plane (xz) perpendicular to the object displacement direction (y) in a spatially dependent manner with different deflection angles, - wherein the illumination angle variation device (14, 14'; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113) has at least: -- one illumination angle variation unit (14b, 14b'; 34b; 45, 46; 51; 64, 65; 73, 74; 76, 77; 89; 96; 99; 106; 112; 116; 117), displaceable overall relative to the raster arrangement (12, 16), for generating a deflection angle for the illumination light in the deflection plane (xz) perpendicular to the object displacement direction (y), - wherein the displaceability of the overall displaceable illumination angle variation unit (14b, 14b'; 34b; 45, 46; 51; 64, 65; 73, 74; 76, 77; 89; 96; 99; 106; 112; 116; 117) relative to the raster arrangement (12, 16) serves for influencing a magnitude of the deflection angle in the deflection plane (xz) perpendicular to the object displacement direction (y). - having at least one raster arrangement (12, 16) having raster elements (12a, 16a) arranged in raster rows and raster columns, said raster elements influencing the illumination light for predefining a shape of the illumination field, - having a transfer optical unit for the superimposing transfer of the illumination light from the raster elements (12a, 16a) towards the illumination field, in which an object displaceable in an object displacement direction (y) is arrangeable, - having an illumination angle variation device (14, 14'; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113), which deflects the illumination light incident on the illumination angle variation device (14; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113) in a deflection plane (xz) perpendicular to the object displacement direction (y) in a spatially dependent manner with different deflection angles, - wherein the illumination angle variation device (14, 14'; 34; 44a; 51; 63; 63a; 88; 95; 98; 101; 104; 110; 113) has at least: -- one illumination angle variation unit (14b, 14b'; 34b; 45, 46; 51; 64, 65; 73, 74; 76, 77; 89; 96; 99; 106; 112; 116; 117), displaceable overall relative to the raster arrangement (12, 16), for generating a deflection angle for the illumination light in the deflection plane (xz) perpendicular to the object displacement direction (y), -- one illumination angle variation unit (14b, 14b'; 34b; 45, 46; 51; 64, 65; 73, 74; 76, 77; 89; 96; 99; 106; 112; 116; 117), displaceable overall relative to the raster arrangement (12, 16), for generating a deflection angle for the illumination light in the deflection plane (xz) perpendicular to the object displacement direction (y), - wherein the displaceability of the overall displaceable illumination angle variation unit (14b, 14b'; 34b; 45, 46; 51; 64, 65; 73, 74; 76, 77; 89; 96; 99; 106; 112; 116; 117) relative to the raster arrangement (12, 16) serves for influencing a magnitude of the deflection angle in the deflection plane (xz) perpendicular to the object displacement direction (y).