Process for producing trisilylamine in the liquid phase, in that (a) at least monochlorosilane dissolved in a solvent is charged in a reactor in the liquid state, wherein the solvent is inert with respect to MCS, ammonia (NH 3) and TSA, and has a higher boiling point than TSA, the solution is stirred, and the temperature T of the solution is set to 10°C or above, and (b) the reaction is carried out in reactor, wherein NH 3 is introduced into the reactor in a stoichiometric excess relative to MCS, wherein the temperature T is maintained, and then (c) the reactor is depressurized, a pressure of from 0.5 bara to 0.8 bara is set, the reactor is heated, the product mixture (TSA, L, NH 4 Cl, DSA, NH 3) is conducted in gaseous form overhead from the reactor through a distillation unit, the NH 3 is separated off by means of a vacuum unit, the product mixture (TSA, L, NH 4 Cl, DSA) is condensed in a heat exchanger and the product mixture (TSA, L, NH 4 Cl, DSA) is collected in a vessel, then (d) the product mixture is filtered by means of filter unit, with solid ammonium chloride (NH 4 Cl) being separated off from the product mixture, and the filtrate is conducted from the filter unit into the rectification column in which DSA is separated off overhead from the mixture (TSA, L), and the mixture (TSA, L) is conducted into a rectification column, in which TSA is separated off overhead from the solvent, with the solvent being recirculated, or the filtrate is conducted from the filter unit into a batch rectification column from which DSA is first separated off overhead and then TSA is separated off overhead, with the solvent being recirculated, and (e) the bottom product mixture (L, NH 4 Cl) is conducted from the reactor through a filter unit in which solid ammonium chloride (NH 4 Cl) is separated off, and the solvent is obtained, which is collected in a vessel and then (f) 0 to 99% of this solvent is recirculated and non-recirculated solvent is replaced by solvent. (a) at least monochlorosilane dissolved in a solvent is charged in a reactor in the liquid state, wherein the solvent is inert with respect to MCS, ammonia (NH 3) and TSA, and has a higher boiling point than TSA, the solution is stirred, and the temperature T of the solution is set to 10°C or above, and (b) the reaction is carried out in reactor, wherein NH 3 is introduced into the reactor in a stoichiometric excess relative to MCS, wherein the temperature T is maintained, and then (c) the reactor is depressurized, a pressure of from 0.5 bara to 0.8 bara is set, the reactor is heated, the product mixture (TSA, L, NH 4 Cl, DSA, NH 3) is conducted in gaseous form overhead from the reactor through a distillation unit, the NH 3 is separated off by means of a vacuum unit, the product mixture (TSA, L, NH 4 Cl, DSA) is condensed in a heat exchanger and the product mixture (TSA, L, NH 4 Cl, DSA) is collected in a vessel, then (d) the product mixture is filtered by means of filter unit, with solid ammonium chloride (NH 4 Cl) being separated off from the product mixture, and the filtrate is conducted from the filter unit into the rectification column in which DSA is separated off overhead from the mixture (TSA, L), and the mixture (TSA, L) is conducted into a rectification column, in which TSA is separated off overhead from the solvent, with the solvent being recirculated, or the filtrate is conducted from the filter unit into a batch rectification column from which DSA is first separated off overhead and then TSA is separated off overhead, with the solvent being recirculated, and in which DSA is separated off overhead from the mixture (TSA, L), and the mixture (TSA, L) is conducted into a rectification column, in which TSA is separated off overhead from the solvent, with the solvent being recirculated, or (e) the bottom product mixture (L, NH 4 Cl) is conducted from the reactor through a filter unit in which solid ammonium chloride (NH 4 Cl) is separated off, and the solvent is obtained, which is collected in a vessel and then (f) 0 to 99% of this solvent is recirculated and non-recirculated solvent is replaced by solvent.