Surveying device, in particular designed as a total station, a theodolite or a tachymeter or a laser tracker, having a position determination functionality for determining the position of a target point with respect to an internal coordinate system, wherein the surveying device has for this purpose • a control and evaluation unit with an evaluation, data processing and control functionality, • a base, • a targeting device, in particular a telescopic sight, which defines a target axis, • means for changing the orientation of the target axis, • a beam source for emitting an illumination beam, in particular a laser beam, of defined intensity in the direction of the target axis, wherein the emission duration can be controlled using the control and evaluation unit in such a manner that illumination beam flashes (3, 4) can be continuously generated, • a photosensitive areal sensor, in particular a CMOS 2D sensor, for detecting reflected illumination beams, wherein ▪ image recording by the sensor can be controlled using the control and evaluation unit in such a manner that images (9a-9e) capturing reflected illumination beam flashes can be continuously generated, and ▪ a radiation beam impinging on the sensor appears in the image as a light spot (8, 8a-8d, 13, 13a-13d), wherein a respective illumination beam flash reflected by the target point appears in the image as a reflected spot (8, 8a-8d), • a fine targeting and target tracking functionality, wherein, in the course of the fine targeting and target tracking functionality, ▪ a deviation between a respective current actual orientation of the target axis and a hypothetical orientation of the target axis sighting the target point is determined from the detected position of the reflected spot (8, 8a-8d) in the image (9a-9e), and ▪ the target axis is oriented for fine targeting and/or tracking of the target point using the determined deviation by means of the motorization means, such that the target axis is precisely aligned with the target point and/or the target axis is continuously tracked to a moving target point, characterized in that the control and evaluation unit is designed in such a manner that, in the course of the fine targeting and target tracking functionality, the intensity and/or the emission duration of the illumination beam is varied according to a defined algorithm under the automatic control of the control and evaluation unit, with the result that a known sequence of different illumination beam flashes (3, 4) is produced during continuous generation of the illumination beam flashes (3, 4). • a control and evaluation unit with an evaluation, data processing and control functionality, • a base, • a targeting device, in particular a telescopic sight, which defines a target axis, • means for changing the orientation of the target axis, • a beam source for emitting an illumination beam, in particular a laser beam, of defined intensity in the direction of the target axis, wherein the emission duration can be controlled using the control and evaluation unit in such a manner that illumination beam flashes (3, 4) can be continuously generated, • a photosensitive areal sensor, in particular a CMOS 2D sensor, for detecting reflected illumination beams, wherein ▪ image recording by the sensor can be controlled using the control and evaluation unit in such a manner that images (9a-9e) capturing reflected illumination beam flashes can be continuously generated, and ▪ a radiation beam impinging on the sensor appears in the image as a light spot (8, 8a-8d, 13, 13a-13d), wherein a respective illumination beam flash reflected by the target point appears in the image as a reflected spot (8, 8a-8d), ▪ image recording by the sensor can be controlled using the control and evaluation unit in such a manner that images (9a-9e) capturing reflected illumination beam flashes can be continuously generated, and ▪ a radiation beam impinging on the sensor appears in the image as a light spot (8, 8a-8d, 13, 13a-13d), wherein a respective illumination beam flash reflected by the target point appears in the image as a reflected spot (8, 8a-8d), • a fine targeting and target tracking functionality, wherein, in the course of the fine targeting and target tracking functionality, ▪ a deviation between a respective current actual orientation of the target axis and a hypothetical orientation of the target axis sighting the target point is determined from the detected position of the reflected spot (8, 8a-8d) in the image (9a-9e), and ▪ the target axis is oriented for fine targeting and/or tracking of the target point using the determined deviation by means of the motorization means, such that the target axis is precisely aligned with the target point and/or the target axis is continuously tracked to a moving target point, ▪ a deviation between a respective current actual orientation of the target axis and a hypothetical orientation of the target axis sighting the target point is determined from the detected position of the reflected spot (8, 8a-8d) in the image (9a-9e), and ▪ the target axis is oriented for fine targeting and/or tracking of the target point using the determined deviation by means of the motorization means, such that the target axis is precisely aligned with the target point and/or the target axis is continuously tracked to a moving target point,