A method for the delivery of a liquid chemical precursor to a process tool, comprising: providing the liquid chemical precursor; providing a container containing the liquid chemical precursor, comprising a sidewall; a base; a lid; and a head space including space above surface of the liquid chemical precursor within the container; an inlet passing through the lid and having a nozzle with its tip as an exit point; and an outlet passing through the lid; wherein the nozzle has an equivalent diameter in the range of 1/16 inch to 1/2 inch (0.16 to 1.3 cm), and the carrier gas at the tip of the nozzle has a Reynolds number of ≥ 50, where the equivalent diameter for a cylindrical pipe is the internal diameter and the equivalent diameter for a rectangular pipe or non- cylindrical pipe is defined as D E = 4A/P, where A is the cross sectional area and P is the perimeter of the cross-section; and wherein the tip of the nozzle is located with a distance of greater than or equal to 0.5 inches (1.3 cm) from the surface of the chemical precursor and the nozzle is at an angle in the range of 88 to 92° to the lid passing a carrier gas passing in use through the exit point of the nozzle and impinging upon the surface of the liquid chemical precursor to produce a vapor or droplets of the chemical precursor combining with the carrier gas to form a precursor-laden fluid stream; and passing the precursor-laden fluid stream passing through the outlet of the container to the process tool; wherein the liquid chemical precursor has a vapor pressure less than 50 Torr-absolute (6.7 kPa) at the container temperature set for delivery; and the container has a volume in the range of 100 milliliters (ml) to 10 liters. providing the liquid chemical precursor; providing a container containing the liquid chemical precursor, comprising a sidewall; a base; a lid; and a head space including space above surface of the liquid chemical precursor within the container; an inlet passing through the lid and having a nozzle with its tip as an exit point; and an outlet passing through the lid; wherein the nozzle has an equivalent diameter in the range of 1/16 inch to 1/2 inch (0.16 to 1.3 cm), and the carrier gas at the tip of the nozzle has a Reynolds number of ≥ 50, where the equivalent diameter for a cylindrical pipe is the internal diameter and the equivalent diameter for a rectangular pipe or non- cylindrical pipe is defined as D E = 4A/P, where A is the cross sectional area and P is the perimeter of the cross-section; and wherein the tip of the nozzle is located with a distance of greater than or equal to 0.5 inches (1.3 cm) from the surface of the chemical precursor and the nozzle is at an angle in the range of 88 to 92° to the lid a sidewall; a base; a lid; and a head space including space above surface of the liquid chemical precursor within the container; an inlet passing through the lid and having a nozzle with its tip as an exit point; and an outlet passing through the lid; wherein the nozzle has an equivalent diameter in the range of 1/16 inch to 1/2 inch (0.16 to 1.3 cm), and the carrier gas at the tip of the nozzle has a Reynolds number of ≥ 50, where the equivalent diameter for a cylindrical pipe is the internal diameter and the equivalent diameter for a rectangular pipe or non- cylindrical pipe is defined as D E = 4A/P, where A is the cross sectional area and P is the perimeter of the cross-section; and wherein the tip of the nozzle is located with a distance of greater than or equal to 0.5 inches (1.3 cm) from the surface of the chemical precursor and the nozzle is at an angle in the range of 88 to 92° to the lid passing a carrier gas passing in use through the exit point of the nozzle and impinging upon the surface of the liquid chemical precursor to produce a vapor or droplets of the chemical precursor combining with the carrier gas to form a precursor-laden fluid stream; and passing the precursor-laden fluid stream passing through the outlet of the container to the process tool; wherein the liquid chemical precursor has a vapor pressure less than 50 Torr-absolute (6.7 kPa) at the container temperature set for delivery; and the container has a volume in the range of 100 milliliters (ml) to 10 liters.