Microfluidic component, more particularly a micropump, microvalve or micromixer, for manipulating a fluid, having a first substrate, a second substrate and a third substrate, which is arranged between the first substrate and the second substrate and made of an elastic material, wherein - at least one first recess is made in the side of the first substrate which faces the third substrate, said recess forming a first control chamber, - at least one second recess (5a; 5b) is made, said recess forming a fluid channel or a fluid chamber (5a'; 5b'), which is for the fluid to be manipulated and at least in portions overlaps with the first control chamber, - a second control chamber, which is spatially separated from the first control chamber, and a control channel, which connects the first control chamber to the second control chamber, are made in the first substrate, - the control chambers (4', 8') and the control channel are filled with a control fluid and - at least one sidewall of the second control chamber is made of elastic material and can be deformed by an actuator, more particularly a mechanical activation member of an actuator, such that the internal volume of the second control chamber is reduced, characterized in that the second recess (5a; 5b) is made in the side of the second substrate which faces the third substrate and in that at least one seventh recess (61a, 61b) is made in the side of the first substrate which faces the third substrate, said seventh recess forming a pressure compensation valve, which, via a first pressure compensation channel, is connected to the first control chamber, the second control chamber or the control channel and connected to the external surroundings via a second pressure compensation channel. - at least one first recess is made in the side of the first substrate which faces the third substrate, said recess forming a first control chamber, - at least one second recess (5a; 5b) is made, said recess forming a fluid channel or a fluid chamber (5a'; 5b'), which is for the fluid to be manipulated and at least in portions overlaps with the first control chamber, - a second control chamber, which is spatially separated from the first control chamber, and a control channel, which connects the first control chamber to the second control chamber, are made in the first substrate, - the control chambers (4', 8') and the control channel are filled with a control fluid and - at least one sidewall of the second control chamber is made of elastic material and can be deformed by an actuator, more particularly a mechanical activation member of an actuator, such that the internal volume of the second control chamber is reduced, characterized in that the second recess (5a; 5b) is made in the side of the second substrate which faces the third substrate and in that at least one seventh recess (61a, 61b) is made in the side of the first substrate which faces the third substrate, said seventh recess forming a pressure compensation valve, which, via a first pressure compensation channel, is connected to the first control chamber, the second control chamber or the control channel and connected to the external surroundings via a second pressure compensation channel.