A diagnosis apparatus for diagnosing a target apparatus configured to perform a plurality of processing stages to process a target article, the diagnosis apparatus comprising: a processor configured to identify each one of the plurality of processing stages as a different processing stage from each other based on processing information uniquely associated with each one of the plurality of processing stages; receive a plurality of detection information output from a detector (225, 25, 25a) configured to detect a physical quantity that changes in the target apparatus depending on processing at each one of the plurality of the processing stages performed in the target apparatus while performing a normal operation in the target apparatus; group the plurality of detection information of the target apparatus, which are received while performing the normal operation in the target apparatus, into a plurality of groups, based on contents of the plurality of detection information, by corresponding each one of the groups respectively to each one of the plurality of processing stages, so as to prepare reference detection information for each one of the plurality of processing stages; receive a plurality of detection information output from the detector (225, 25, 25a) while performing a diagnosis target operation in the target apparatus; and determine whether abnormality occurs in the target apparatus during the diagnosis target operation based on the reference detection information and the plurality of detection information output from the detector (225, 25, 25a) during the diagnosis target operation, characterised in that the processor is adapted to use segment data indicating an operation segment set for the target apparatus as the processing information to calculate a segment length of the operation segment, wherein the processor is adapted to use frequency data acquired from at least any one of a vibration sensor signal and a microphone device signal as the plurality of detection information of the target apparatus, and to group two or more of the detection information corresponding to specific segment data matching the segment length as one group. a processor configured to identify each one of the plurality of processing stages as a different processing stage from each other based on processing information uniquely associated with each one of the plurality of processing stages; receive a plurality of detection information output from a detector (225, 25, 25a) configured to detect a physical quantity that changes in the target apparatus depending on processing at each one of the plurality of the processing stages performed in the target apparatus while performing a normal operation in the target apparatus; group the plurality of detection information of the target apparatus, which are received while performing the normal operation in the target apparatus, into a plurality of groups, based on contents of the plurality of detection information, by corresponding each one of the groups respectively to each one of the plurality of processing stages, so as to prepare reference detection information for each one of the plurality of processing stages; receive a plurality of detection information output from the detector (225, 25, 25a) while performing a diagnosis target operation in the target apparatus; and determine whether abnormality occurs in the target apparatus during the diagnosis target operation based on the reference detection information and the plurality of detection information output from the detector (225, 25, 25a) during the diagnosis target operation, characterised in that the processor is adapted to use segment data indicating an operation segment set for the target apparatus as the processing information to calculate a segment length of the operation segment, wherein the processor is adapted to use frequency data acquired from at least any one of a vibration sensor signal and a microphone device signal as the plurality of detection information of the target apparatus, and to group two or more of the detection information corresponding to specific segment data matching the segment length as one group.