A substrate de-bowing mechanism (12, 12a, 12b, 12c, 12d, 12e), comprising: a substrate support having a substrate travel path; a first, stationary substrate contact member (43, 52) mounted on the substrate support and positioned to engage a surface of a substrate during de-bowing; a first, movable substrate contact member (60, 60a) rotatably mounted on the substrate support for rotation about a rotation axis, and the first, movable substrate contact member is rotatable between a first home position that is on one side of the substrate travel path to permit engagement of the first, movable substrate contact member with a first surface of the substrate and a second home position that is on a second, opposite side of the substrate travel path to permit engagement of the first, movable substrate contact member with a second surface of the substrate; a second, movable substrate contact member (62, 62a) rotatably mounted on the substrate support for rotation about a rotation axis, and the second, movable substrate contact member is rotatable between a first home position that is on the one side of the substrate travel path to permit engagement of the second, movable substrate contact member with the first surface of the substrate and a second home position that is on the second, opposite side of the substrate travel path to permit engagement of the second, movable substrate contact member with the second surface of the substrate; the first, movable substrate contact member is disposed on a first axial side of the first, stationary substrate contact member and the second, movable substrate contact member is disposed on a second axial side of the first, stationary substrate contact member, and the first, stationary substrate contact member is located between the first and second movable substrate contact members; and the rotation axes of the first and second movable substrate contact members are located axially between the first and second movable substrate contact members, and the rotation axes are perpendicular to a substrate transport direction (X-X). a substrate support having a substrate travel path; a first, stationary substrate contact member (43, 52) mounted on the substrate support and positioned to engage a surface of a substrate during de-bowing; a first, movable substrate contact member (60, 60a) rotatably mounted on the substrate support for rotation about a rotation axis, and the first, movable substrate contact member is rotatable between a first home position that is on one side of the substrate travel path to permit engagement of the first, movable substrate contact member with a first surface of the substrate and a second home position that is on a second, opposite side of the substrate travel path to permit engagement of the first, movable substrate contact member with a second surface of the substrate; a second, movable substrate contact member (62, 62a) rotatably mounted on the substrate support for rotation about a rotation axis, and the second, movable substrate contact member is rotatable between a first home position that is on the one side of the substrate travel path to permit engagement of the second, movable substrate contact member with the first surface of the substrate and a second home position that is on the second, opposite side of the substrate travel path to permit engagement of the second, movable substrate contact member with the second surface of the substrate; the first, movable substrate contact member is disposed on a first axial side of the first, stationary substrate contact member and the second, movable substrate contact member is disposed on a second axial side of the first, stationary substrate contact member, and the first, stationary substrate contact member is located between the first and second movable substrate contact members; and the rotation axes of the first and second movable substrate contact members are located axially between the first and second movable substrate contact members, and the rotation axes are perpendicular to a substrate transport direction (X-X).