An exposure apparatus that exposes an object with an energy beam via a projection optical system, the apparatus comprising: a stage that has a holder for holding the object, and is movable at least within a predetermined plane that includes a first direction and a second direction orthogonal to each other, the predetermined plane being perpendicular to an optical axis of the projection optical system; a drive system configured to drive the stage; an encoder system (70A, 70B, 70C, 70D, 70E, 70F) in which one of a grating section (39X 1, 39X 2; 39Y 1, 39Y 2) and a plurality of heads (64, 66) is provided to the stage and the other of the grating section (39X 1, 39X 2; 39Y 1, 39Y 2) and the plurality of heads (64, 66) is provided on a lower end side of the projection optical system so as to face the stage, and which is configured to measure position information of the stage at least within a predetermined plane with multiple heads that face the grating section, of the plurality of heads, one of two directions that are orthogonal to each other within the predetermined plane serving as a measurement direction within the predetermined plane of each of the plurality of heads; and a controller configured to control the drive system, based on measurement information of the encoder system, and correction information for compensating a measurement error of the encoder system that occurs due to a relative motion between the head (64, 66) and the grating section (39X 1, 39X 2; 39Y 1, 39Y 2) in a different direction different from the measurement direction within the predetermined plane of each of the multiple heads used in measurement of the positional information, the measurement error relating to the measurement direction of each of the multiple heads used in the measurement of the positional information, wherein the different direction includes a third direction orthogonal to the predetermined plane. a stage that has a holder for holding the object, and is movable at least within a predetermined plane that includes a first direction and a second direction orthogonal to each other, the predetermined plane being perpendicular to an optical axis of the projection optical system; a drive system configured to drive the stage; an encoder system (70A, 70B, 70C, 70D, 70E, 70F) in which one of a grating section (39X 1, 39X 2; 39Y 1, 39Y 2) and a plurality of heads (64, 66) is provided to the stage and the other of the grating section (39X 1, 39X 2; 39Y 1, 39Y 2) and the plurality of heads (64, 66) is provided on a lower end side of the projection optical system so as to face the stage, and which is configured to measure position information of the stage at least within a predetermined plane with multiple heads that face the grating section, of the plurality of heads, one of two directions that are orthogonal to each other within the predetermined plane serving as a measurement direction within the predetermined plane of each of the plurality of heads; and a controller configured to control the drive system, based on measurement information of the encoder system, and correction information for compensating a measurement error of the encoder system that occurs due to a relative motion between the head (64, 66) and the grating section (39X 1, 39X 2; 39Y 1, 39Y 2) in a different direction different from the measurement direction within the predetermined plane of each of the multiple heads used in measurement of the positional information, the measurement error relating to the measurement direction of each of the multiple heads used in the measurement of the positional information, wherein the different direction includes a third direction orthogonal to the predetermined plane.