A method of manufacturing a polyorganosiloxane-based stamp comprising: providing a master including a transfer pattern surface; forming a first layer of a first curable composition onto the transfer pattern surface such that the first layer includes a relief pattern of said transfer pattern, the first curable composition comprising a reactive branched polyorganosiloxane, a first reactive linear polyorganosiloxane, and a first concentration of a catalyst for catalysing crosslinking of the reactive branched and first reactive linear polyorganosiloxanes, said first layer having a first thickness; partially curing the first layer; depositing a second layer of a second curable composition onto the partially cured first layer, the second curable composition comprising a second concentration of the catalyst, a second reactive linear polyorganosiloxane for forming a crosslinked second layer and for adhering the second layer to the first layer by crosslinking with reactive polyorganosiloxanes of the partially cured first layer, said second layer having a second thickness; wherein the second thickness is selected to be smaller than the first thickness and/or the second concentration is selected to be equal to or greater than the first concentration; co-curing the partially cured first layer and the second layer to form a cured first layer having a first Young's modulus, adhered to a cured second layer having a second Young's modulus smaller than the first Young's modulus; depositing a third layer of a third curable composition onto the second layer, the third curable composition comprising a third reactive polyorganosiloxane for forming a crosslinked third layer and for adhering the third layer to the cured second layer by crosslinking with the second reactive linear polyorganosiloxane; and curing the third layer to form a cured third layer adhered to the cured second layer. providing a master including a transfer pattern surface; forming a first layer of a first curable composition onto the transfer pattern surface such that the first layer includes a relief pattern of said transfer pattern, the first curable composition comprising a reactive branched polyorganosiloxane, a first reactive linear polyorganosiloxane, and a first concentration of a catalyst for catalysing crosslinking of the reactive branched and first reactive linear polyorganosiloxanes, said first layer having a first thickness; partially curing the first layer; depositing a second layer of a second curable composition onto the partially cured first layer, the second curable composition comprising a second concentration of the catalyst, a second reactive linear polyorganosiloxane for forming a crosslinked second layer and for adhering the second layer to the first layer by crosslinking with reactive polyorganosiloxanes of the partially cured first layer, said second layer having a second thickness; wherein the second thickness is selected to be smaller than the first thickness and/or the second concentration is selected to be equal to or greater than the first concentration; co-curing the partially cured first layer and the second layer to form a cured first layer having a first Young's modulus, adhered to a cured second layer having a second Young's modulus smaller than the first Young's modulus; depositing a third layer of a third curable composition onto the second layer, the third curable composition comprising a third reactive polyorganosiloxane for forming a crosslinked third layer and for adhering the third layer to the cured second layer by crosslinking with the second reactive linear polyorganosiloxane; and curing the third layer to form a cured third layer adhered to the cured second layer.