A chemically amplified negative resist composition comprising: (i) a polymer and (ii) a crosslinker and/or a recurring unit having a crosslinkable functional group in the polymer, adapted such that the polymer may turn insoluble in alkaline developer by reacting with the crosslinker and/or the recurring unit having a crosslinkable functional group in the polymer under the catalysis of an acid generated upon exposure to high-energy radiation, to form crosslinks between polymer molecules, said polymer comprising recurring units of the general formulae and and recurring units of at least one type selected from the general formulae,, and: wherein A is a single bond or a C 1 -C 10 alkylene group which may be separated by ethereal oxygen, Rf is each independently hydrogen, fluorine, trifluoromethyl, or pentafluoroethyl, with the proviso that not all Rf's are hydrogen, B is a C 1 -C 10 divalent hydrocarbon group in which some or all hydrogen atoms may be replaced by fluorine and in which a methylene moiety at a position other than α- and β-positions relative to the ester oxygen atom may be replaced by oxygen, C is a single bond or a C 1 -C 10 alkylene group which may be separated by ethereal oxygen, R 1 is hydrogen, fluorine, methyl, or trifluoromethyl, R 2, R 3, and R 4 are each independently a straight, branched or cyclic C 1 -C 10 alkyl or alkoxy group, R 5 is a substituted or unsubstituted, straight, branched or cyclic C 1 -C 30 alkyl group which may contain an ether bond, or a substituted or unsubstituted C 6 -C 14 aryl group, R 6 is each independently a C 1 -C 8 alkyl group, R 7 is each independently a C 1 -C 8 alkyl group, k, m and n are each independently an integer of 0 to 3, a is an integer of 0 to 4, b is an integer of 1 to 5, c and d each are an integer of 1 to 4, e is an integer of 0 to (4-c), f is an integer of 0 to (4-d), p is independently 0 or 1, and t is an integer of 0 to 2, D is a single bond or a C 1 -C 10 alkylene group which may be separated by ethereal oxygen, R 8 is each independently halogen, an optionally halo-substituted C 1 -C 8 alkyl or alkoxy group, a C 6 -C 20 aromatic ring-containing hydrocarbon group, or an optionally halo-substituted C 1 -C 12 acyloxy group, g is an integer of 0 to 5, q is 0 or 1, and s is an integer of 0 to 2; wherein the recurring units of formula account for 0.5 to 10 mol% and the sum of recurring units of formulae,, and accounts for 50 to 99.5 mol%, based on the entire recurring units of the polymer. (i) a polymer and (ii) a crosslinker and/or a recurring unit having a crosslinkable functional group in the polymer, wherein A is a single bond or a C 1 -C 10 alkylene group which may be separated by ethereal oxygen, Rf is each independently hydrogen, fluorine, trifluoromethyl, or pentafluoroethyl, with the proviso that not all Rf's are hydrogen, B is a C 1 -C 10 divalent hydrocarbon group in which some or all hydrogen atoms may be replaced by fluorine and in which a methylene moiety at a position other than α- and β-positions relative to the ester oxygen atom may be replaced by oxygen, C is a single bond or a C 1 -C 10 alkylene group which may be separated by ethereal oxygen, R 1 is hydrogen, fluorine, methyl, or trifluoromethyl, R 2, R 3, and R 4 are each independently a straight, branched or cyclic C 1 -C 10 alkyl or alkoxy group, R 5 is a substituted or unsubstituted, straight, branched or cyclic C 1 -C 30 alkyl group which may contain an ether bond, or a substituted or unsubstituted C 6 -C 14 aryl group, R 6 is each independently a C 1 -C 8 alkyl group, R 7 is each independently a C 1 -C 8 alkyl group, k, m and n are each independently an integer of 0 to 3, a is an integer of 0 to 4, b is an integer of 1 to 5, c and d each are an integer of 1 to 4, e is an integer of 0 to (4-c), f is an integer of 0 to (4-d), p is independently 0 or 1, and t is an integer of 0 to 2, D is a single bond or a C 1 -C 10 alkylene group which may be separated by ethereal oxygen, R 8 is each independently halogen, an optionally halo-substituted C 1 -C 8 alkyl or alkoxy group, a C 6 -C 20 aromatic ring-containing hydrocarbon group, or an optionally halo-substituted C 1 -C 12 acyloxy group, g is an integer of 0 to 5, q is 0 or 1, and s is an integer of 0 to 2; wherein the recurring units of formula account for 0.5 to 10 mol% and the sum of recurring units of formulae,, and accounts for 50 to 99.5 mol%, based on the entire recurring units of the polymer.