A measurement apparatus for measuring a thickness of a film formed on a to-be-coated module, comprising: a first quartz-crystal oscillator sheet coated with the film during the film-coating; a second quartz-crystal oscillator sheet identical to the first quartz-crystal oscillator sheet and shielded during the film-coating so as not to be coated with the film; an excitation source generation unit configured to generate alternating current and output the alternating current to the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet; a first calculation module configured to calculate a frequency-variation initial value in accordance with a first response signal generated in response to the alternating current by the first quartz-crystal oscillator sheet during the film-coating; a second calculation module configured to calculate a frequency-variation modified value in accordance with a second response signal generated in response to the alternating current by the second quartz-crystal oscillator sheet during the film-coating; a third calculation module configured to calculate a thickness of the film in accordance with a frequency-variation target value obtained by modifying the frequency-variation initial value with the frequency-variation modified value; and a shielding module configured to shield the second quartz-crystal oscillator sheet during the film-coating, so as to prevent the second quartz-crystal oscillator sheet from being coated with the film; characterized in that the measurement apparatus further comprises a vacuum adsorption apparatus comprising an adsorption surface and configured to adsorb the to-be-coated module, wherein the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet are arranged at a level identical to the to-be-coated module; the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet are arranged in a circular manner, the shielding module is a rotatable shielding sheet with a via-hole, and the rotatable shielding sheet is rotated in such a manner as to enable the via-hole to be above different quartz-crystal oscillator sheets; there exists a plurality of second quartz-crystal oscillator sheets, and the second calculation module is configured to calculate a frequency-variation median value of each second quartz-crystal oscillator sheet in accordance with the second response signal generated in response to the alternating current by each second quartz-crystal oscillator sheet during the film-coating, and calculate a mean value of all the frequency-variation median values as the frequency-variation modified value. a first quartz-crystal oscillator sheet coated with the film during the film-coating; a second quartz-crystal oscillator sheet identical to the first quartz-crystal oscillator sheet and shielded during the film-coating so as not to be coated with the film; an excitation source generation unit configured to generate alternating current and output the alternating current to the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet; a first calculation module configured to calculate a frequency-variation initial value in accordance with a first response signal generated in response to the alternating current by the first quartz-crystal oscillator sheet during the film-coating; a second calculation module configured to calculate a frequency-variation modified value in accordance with a second response signal generated in response to the alternating current by the second quartz-crystal oscillator sheet during the film-coating; a third calculation module configured to calculate a thickness of the film in accordance with a frequency-variation target value obtained by modifying the frequency-variation initial value with the frequency-variation modified value; and a shielding module configured to shield the second quartz-crystal oscillator sheet during the film-coating, so as to prevent the second quartz-crystal oscillator sheet from being coated with the film; characterized in that the measurement apparatus further comprises a vacuum adsorption apparatus comprising an adsorption surface and configured to adsorb the to-be-coated module, wherein the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet are arranged at a level identical to the to-be-coated module; the first quartz-crystal oscillator sheet and the second quartz-crystal oscillator sheet are arranged in a circular manner, the shielding module is a rotatable shielding sheet with a via-hole, and the rotatable shielding sheet is rotated in such a manner as to enable the via-hole to be above different quartz-crystal oscillator sheets; there exists a plurality of second quartz-crystal oscillator sheets, and the second calculation module is configured to calculate a frequency-variation median value of each second quartz-crystal oscillator sheet in accordance with the second response signal generated in response to the alternating current by each second quartz-crystal oscillator sheet during the film-coating, and calculate a mean value of all the frequency-variation median values as the frequency-variation modified value.