A filling apparatus for filling a hole of a substrate with a fluid material, comprising: a scavenging section (4, 16) for forming a first hermetically closed chamber when brought into contact with a substrate surface and for depressurizing said first hermetically closed chamber; and a fluid material filling section (4, 15) for forming a second hermetically closed chamber provided adjacent to said first hermetically closed chamber when brought into contact with said substrate surface and for stuffing said fluid material into the hole of said substrate within said second hermetically closed chamber characterized in that the filling apparatus further comprises: a depressurizing device for depressurizing said second hermetically closed chamber of said fluid material filling section; and shifting means for shifting said first hermetically closed chamber of said scavenging section to a position of said hole of the substrate to depressurize said hole of the substrate shifting said second hermetically closed chamber depressurized by said depressing device to the position of said hole of the substrate after said hole of the substrate is depressurized in said first hermetically closed chamber of said scavenging section (4, 16), wherein said fluid material filling section (4, 15) comprises a supply section for supplying said fluid material onto a substrate surface within said second hermetically closed chamber depressurized by said depressurizing device and a squeezing unit for pushing said fluid material into the hole of said substrate within said second hermetically closed chamber depressurized by said depressurizing device. a scavenging section (4, 16) for forming a first hermetically closed chamber when brought into contact with a substrate surface and for depressurizing said first hermetically closed chamber; and a fluid material filling section (4, 15) for forming a second hermetically closed chamber provided adjacent to said first hermetically closed chamber when brought into contact with said substrate surface and for stuffing said fluid material into the hole of said substrate within said second hermetically closed chamber characterized in that the filling apparatus further comprises: a depressurizing device for depressurizing said second hermetically closed chamber of said fluid material filling section; and shifting means for shifting said first hermetically closed chamber of said scavenging section to a position of said hole of the substrate to depressurize said hole of the substrate shifting said second hermetically closed chamber depressurized by said depressing device to the position of said hole of the substrate after said hole of the substrate is depressurized in said first hermetically closed chamber of said scavenging section (4, 16), wherein said fluid material filling section (4, 15) comprises a supply section for supplying said fluid material onto a substrate surface within said second hermetically closed chamber depressurized by said depressurizing device and a squeezing unit for pushing said fluid material into the hole of said substrate within said second hermetically closed chamber depressurized by said depressurizing device. a depressurizing device for depressurizing said second hermetically closed chamber of said fluid material filling section; and shifting means for shifting said first hermetically closed chamber of said scavenging section to a position of said hole of the substrate to depressurize said hole of the substrate shifting said second hermetically closed chamber depressurized by said depressing device to the position of said hole of the substrate after said hole of the substrate is depressurized in said first hermetically closed chamber of said scavenging section (4, 16), wherein said fluid material filling section (4, 15) comprises a supply section for supplying said fluid material onto a substrate surface within said second hermetically closed chamber depressurized by said depressurizing device and a squeezing unit for pushing said fluid material into the hole of said substrate within said second hermetically closed chamber depressurized by said depressurizing device.