A method of manufacturing a coated substrate comprising: a) providing a vapour distribution nozzle arrangement (7'; 222) in a vacuum recipient (3'; 224), said nozzle arrangement comprising a vapour ejection opening arrangement (1'; 221); b) providing an arrangement of at least one substrate (5'; 228) in the vacuum recipient; c) evacuating the vacuum recipient at the latest when said substrate arrangement is provided therein; d) providing a vaporising compartment (212; 310); e) heating said vaporising compartment; f) injecting a predetermined portion of a liquid precursor material ((CS+SO) l) comprising a coating substance dissolved in a solvent in said vaporising compartment and vaporising said portion by said heating thereby raising the pressure in at least one of in said vaporising compartment and of in said vacuum recipient; g) ejecting a result of said vaporising said predetermined portion through said vapour ejection opening arrangement into the vacuum recipient; h) establishing in at least one of said vaporising compartment and of said vacuum recipient a pressure course rising to a maximum (p VCmax) due to said vaporising and ejecting and dropping by half of the value of said rising in the respective one of said at least one of said vaporising compartment and of said vacuum recipient within at most 10 sec. from reaching said maximum, preferably within at most 5 sec., even more preferred within at most 1 sec.; i) establishing a coating of said coating substance on the arrangement of at least one substrate; j) removing said arrangement of at least one substrate from said vacuum recipient after said coating. a) providing a vapour distribution nozzle arrangement (7'; 222) in a vacuum recipient (3'; 224), said nozzle arrangement comprising a vapour ejection opening arrangement (1'; 221); b) providing an arrangement of at least one substrate (5'; 228) in the vacuum recipient; c) evacuating the vacuum recipient at the latest when said substrate arrangement is provided therein; d) providing a vaporising compartment (212; 310); e) heating said vaporising compartment; f) injecting a predetermined portion of a liquid precursor material ((CS+SO) l) comprising a coating substance dissolved in a solvent in said vaporising compartment and vaporising said portion by said heating thereby raising the pressure in at least one of in said vaporising compartment and of in said vacuum recipient; g) ejecting a result of said vaporising said predetermined portion through said vapour ejection opening arrangement into the vacuum recipient; h) establishing in at least one of said vaporising compartment and of said vacuum recipient a pressure course rising to a maximum (p VCmax) due to said vaporising and ejecting and dropping by half of the value of said rising in the respective one of said at least one of said vaporising compartment and of said vacuum recipient within at most 10 sec. from reaching said maximum, preferably within at most 5 sec., even more preferred within at most 1 sec.; i) establishing a coating of said coating substance on the arrangement of at least one substrate; j) removing said arrangement of at least one substrate from said vacuum recipient after said coating.