An image evaluation method that evaluates a template image used for a pattern matching process that is implemented in a charged particle beam device, the image evaluation method comprising acquiring a reference image by applying a charge particle beam to a specimen: a template image acquisition step that designates part of the reference image to acquire the template image; a first comparative image acquisition step that acquires a first comparative image in which a position of the template image is moved in a first direction by a first moving amount Lx relative to the reference image; calculating a first shift amount Dx between the position of the template image in the reference image and the potion of the template image in the first comparative image; a first evaluation step that performs the pattern matching process on the template image and the first comparative image and evaluates the template image by calculating a ratio Dx/Lx, wherein the template image is deemed appropriate in the first direction when the ration Dx/Lx falls within a predetermined range including 1; a second comparative image acquisition step that acquires a second comparative image in which the position of the template image is moved in a second direction that is orthogonal to the first direction by a second moving amount Ly relative to the reference image; and calculating a second shift amount Dy between the position of the template image in the reference image and the potion of the template image in the second comparative image; a second evaluation step that performs the pattern matching process on the template image and the second comparative image and evaluates the template image by calculating a ratio Dy/Ly, wherein the template image is deemed appropriate in the second direction when the ration Dy/Ly falls within a predetermined range including 1, wherein the first and second moving amounts relate to moving the field of view by one of deflecting the electron beam using the beam deflector, controlling the specimen stage and by performing image processing on the reference image I. a template image acquisition step that designates part of the reference image to acquire the template image; a first comparative image acquisition step that acquires a first comparative image in which a position of the template image is moved in a first direction by a first moving amount Lx relative to the reference image; calculating a first shift amount Dx between the position of the template image in the reference image and the potion of the template image in the first comparative image; a first evaluation step that performs the pattern matching process on the template image and the first comparative image and evaluates the template image by calculating a ratio Dx/Lx, wherein the template image is deemed appropriate in the first direction when the ration Dx/Lx falls within a predetermined range including 1; a second comparative image acquisition step that acquires a second comparative image in which the position of the template image is moved in a second direction that is orthogonal to the first direction by a second moving amount Ly relative to the reference image; and calculating a second shift amount Dy between the position of the template image in the reference image and the potion of the template image in the second comparative image; a second evaluation step that performs the pattern matching process on the template image and the second comparative image and evaluates the template image by calculating a ratio Dy/Ly, wherein the template image is deemed appropriate in the second direction when the ration Dy/Ly falls within a predetermined range including 1, wherein the first and second moving amounts relate to moving the field of view by one of deflecting the electron beam using the beam deflector, controlling the specimen stage and by performing image processing on the reference image I.