A pressure sensor (100; 200; 600; 700), comprising: a probe body (106; 212; 300; 400); and a capacitive sensor (102, 202, 600, 700) disposed at a distal end of the probe body (106, 212, 300, 400), the pressure sensor being characterized by the capacitive sensor comprising: a pressure deflectable diaphragm cap having a first capacitive surface electrically coupled to the probe body, a component (252; 704) disposed at the distal end of the probe body within the probe body, the component comprising a second capacitive surface (254, 708b) spaced apart from the first capacitive surface, the component comprising a dielectric material having a dielectric constant that changes with changes in temperature, and a lead (204; 266; 302; 402) electrically coupled to the second capacitive surface (254, 708b) and electrically isolated from the probe body, wherein changes in the dielectric constant of the dielectric material with changes in temperature result in changes in a shunt capacitance between the lead and the probe body through the component, and wherein the changes in the shunt capacitance offset temperature-induced changes in a sensing capacitance between the first capacitive surface and the second capacitive surface (254, 708b), to decrease temperature-induced changes in a total capacitance that is a function of the shunt capacitance and the sensing capacitance. a probe body (106; 212; 300; 400); and a capacitive sensor (102, 202, 600, 700) disposed at a distal end of the probe body (106, 212, 300, 400), the pressure sensor being characterized by the capacitive sensor comprising: a pressure deflectable diaphragm cap having a first capacitive surface electrically coupled to the probe body, a component (252; 704) disposed at the distal end of the probe body within the probe body, the component comprising a second capacitive surface (254, 708b) spaced apart from the first capacitive surface, the component comprising a dielectric material having a dielectric constant that changes with changes in temperature, and a lead (204; 266; 302; 402) electrically coupled to the second capacitive surface (254, 708b) and electrically isolated from the probe body, wherein changes in the dielectric constant of the dielectric material with changes in temperature result in changes in a shunt capacitance between the lead and the probe body through the component, and wherein the changes in the shunt capacitance offset temperature-induced changes in a sensing capacitance between the first capacitive surface and the second capacitive surface (254, 708b), to decrease temperature-induced changes in a total capacitance that is a function of the shunt capacitance and the sensing capacitance. a pressure deflectable diaphragm cap having a first capacitive surface electrically coupled to the probe body, a component (252; 704) disposed at the distal end of the probe body within the probe body, the component comprising a second capacitive surface (254, 708b) spaced apart from the first capacitive surface, the component comprising a dielectric material having a dielectric constant that changes with changes in temperature, and a lead (204; 266; 302; 402) electrically coupled to the second capacitive surface (254, 708b) and electrically isolated from the probe body, wherein changes in the dielectric constant of the dielectric material with changes in temperature result in changes in a shunt capacitance between the lead and the probe body through the component, and wherein the changes in the shunt capacitance offset temperature-induced changes in a sensing capacitance between the first capacitive surface and the second capacitive surface (254, 708b), to decrease temperature-induced changes in a total capacitance that is a function of the shunt capacitance and the sensing capacitance.