A device for measuring short-wavelength characteristic X-ray diffraction based on array detection, comprising an X-ray irradiation system, a sample table and an X-ray detection system, wherein the X-ray irradiation system comprises a radiation source and an incident collimator, the radiation source comprises a heavy metal target X-ray tube with an atomic number greater than 55, a high-voltage power supply with a power supply voltage greater than 160kv, and a controller; the X-ray irradiation system is configured to emit X-rays to pass through the incident collimator to form an incident X-ray beam irradiating a to-be-measured part inside a sample fixed on the sample table; the X-ray detection system is configured to perform fixed-point measurement on intensity and distribution of a short-wavelength characteristic X-ray diffracted by the to-be-measured part inside the sample; the X-ray detection system comprises a receiving collimator and an array detector matched with the receiving collimator; the array detector is configured to detect and receive a diffraction ray that is diffracted by the to-be-measured part inside the sample and passes through a through hole A of the receiving collimator, and other stray rays passing through the through hole A of the receiving collimator; an extension line of a first inner cone edge of the through hole A interests with an extension line of a second inner cone edge of the through hole A at an intersection point on a central line of the incident X-ray beam, the intersection point is a center of a diffractometer circle of the device, and the to-be-measured part inside the sample is placed at the center of the diffractometer circle of the device; and each of detection pixels of the array detector is configured to perform single-photon measurement, the array detector is a multi-energy array detector with two or more energy thresholds, and each of the detection pixels is capable of measuring one or more short-wavelength characteristic X-ray based on predetermined energy thresholds; or the array detector is an energy dispersive array detector. the X-ray irradiation system comprises a radiation source and an incident collimator, the radiation source comprises a heavy metal target X-ray tube with an atomic number greater than 55, a high-voltage power supply with a power supply voltage greater than 160kv, and a controller; the X-ray irradiation system is configured to emit X-rays to pass through the incident collimator to form an incident X-ray beam irradiating a to-be-measured part inside a sample fixed on the sample table; the X-ray detection system is configured to perform fixed-point measurement on intensity and distribution of a short-wavelength characteristic X-ray diffracted by the to-be-measured part inside the sample; the X-ray detection system comprises a receiving collimator and an array detector matched with the receiving collimator; the array detector is configured to detect and receive a diffraction ray that is diffracted by the to-be-measured part inside the sample and passes through a through hole A of the receiving collimator, and other stray rays passing through the through hole A of the receiving collimator; an extension line of a first inner cone edge of the through hole A interests with an extension line of a second inner cone edge of the through hole A at an intersection point on a central line of the incident X-ray beam, the intersection point is a center of a diffractometer circle of the device, and the to-be-measured part inside the sample is placed at the center of the diffractometer circle of the device; and each of detection pixels of the array detector is configured to perform single-photon measurement, the array detector is a multi-energy array detector with two or more energy thresholds, and each of the detection pixels is capable of measuring one or more short-wavelength characteristic X-ray based on predetermined energy thresholds; or the array detector is an energy dispersive array detector.