Device able to cooperate with at least two items of substrate processing equipment, the said device comprising fluidtight walls capable of being able to withstand and maintain a vacuum, comprising: - a first port comprising means of connection to a first item of equipment chosen from a transfer chamber and a process chamber, - a second port comprising means of connection to a substrate transport pod - a basket intended to be contained inside a substrate transport pod, comprising a series of stacked parallel trays configured to each store a substrate wafer and shims (53; 81) placed between the trays and the substrate wafers, the basket being able to be transported within the walls of the device, - means of moving the basket from and toward the transport pod, - means for immobilizing the trays, characterized in that it further comprises - a third port comprising means of connection to a second item of equipment chosen from an EFEM and a transfer chamber, and - means for setting down and supporting a substrate wafer in a given position, these means being able to cooperate with means for moving the substrate wafer of the first or second item of equipment so as to allow it to pass through the first port or the third port, the means for setting down and supporting a substrate wafer comprising: - two movable setting-down arms (50; 82) positioned facing each other on two walls of the device and perpendicular to the walls of the device in which the first and third ports are situated, and - shims (53; 81) positioned between the trays and the substrate wafers, configured to allow the passage of the setting-down arms. - a first port comprising means of connection to a first item of equipment chosen from a transfer chamber and a process chamber, - a second port comprising means of connection to a substrate transport pod - a basket intended to be contained inside a substrate transport pod, comprising a series of stacked parallel trays configured to each store a substrate wafer and shims (53; 81) placed between the trays and the substrate wafers, the basket being able to be transported within the walls of the device, - means of moving the basket from and toward the transport pod, - means for immobilizing the trays, - a third port comprising means of connection to a second item of equipment chosen from an EFEM and a transfer chamber, and - means for setting down and supporting a substrate wafer in a given position, these means being able to cooperate with means for moving the substrate wafer of the first or second item of equipment so as to allow it to pass through the first port or the third port, the means for setting down and supporting a substrate wafer comprising: - two movable setting-down arms (50; 82) positioned facing each other on two walls of the device and perpendicular to the walls of the device in which the first and third ports are situated, and - shims (53; 81) positioned between the trays and the substrate wafers, configured to allow the passage of the setting-down arms. - two movable setting-down arms (50; 82) positioned facing each other on two walls of the device and perpendicular to the walls of the device in which the first and third ports are situated, and - shims (53; 81) positioned between the trays and the substrate wafers, configured to allow the passage of the setting-down arms.