A mass flow controller comprising: a fluid inlet for supplying with an inlet pressure a fluid into said mass flow controller so as to establish a flow therethrough; at least one first flow meter configured and arranged to measure a first flow rate ( F 1) and to output a first flow signal ( FS 1); at least one second flow meter configured and arranged to measure a second flow ( F 2) rate and to output a second flow signal ( FS 2); a control device connected to said first and second flow meters (11,12) and configured and arranged to generate a control signal; and at least one control valve connected to said control device and configured and arranged to control an outlet flow rate ( F out) out of the mass flow controller in response to the control signal; wherein the control signal is generated as a function of both the first and second flow signals ( FS 1,FS 2) such that the mass flow controller's sensitivity to perturbations of said inlet pressure is minimized; and wherein said mass flow controller comprises integrated circuitry that is configured: - to receive said first and second flow signals ( FS 1,FS 2); - to calculate said control signal such that it is substantially independent of perturbations of said inlet pressure; and - to output said control signal to said control valve, characterized in that the control signal is generated on the basis of a difference between the first flow signal ( FS 1) or a derivative thereof and the second flow signal (FS 2) or a derivative thereof. a fluid inlet for supplying with an inlet pressure a fluid into said mass flow controller so as to establish a flow therethrough; at least one first flow meter configured and arranged to measure a first flow rate ( F 1) and to output a first flow signal ( FS 1); at least one second flow meter configured and arranged to measure a second flow ( F 2) rate and to output a second flow signal ( FS 2); a control device connected to said first and second flow meters (11,12) and configured and arranged to generate a control signal; and at least one control valve connected to said control device and configured and arranged to control an outlet flow rate ( F out) out of the mass flow controller in response to the control signal; wherein the control signal is generated as a function of both the first and second flow signals ( FS 1,FS 2) such that the mass flow controller's sensitivity to perturbations of said inlet pressure is minimized; and wherein said mass flow controller comprises integrated circuitry that is configured: - to receive said first and second flow signals ( FS 1,FS 2); - to calculate said control signal such that it is substantially independent of perturbations of said inlet pressure; and - to output said control signal to said control valve, - to receive said first and second flow signals ( FS 1,FS 2); - to calculate said control signal such that it is substantially independent of perturbations of said inlet pressure; and - to output said control signal to said control valve, characterized in that the control signal is generated on the basis of a difference between the first flow signal ( FS 1) or a derivative thereof and the second flow signal (FS 2) or a derivative thereof.