A method for detecting a fine geometry on a surface of a sample using a detecting apparatus, wherein the sample is placed in a vacuum environment different from atmosphere, the detecting apparatus comprising: a stage; a means for irradiating a primary irradiation beam (43, 45, 46, 82) against the sample; an EB-TDI sensor (32, 76) disposed in the vacuum environment, wherein the sensor (32, 76) has a two-dimensional array of pixels and directly receives secondary radiation emanated from the sample and outputs a detection signal; a processing device disposed in the atmosphere, wherein the processing device processes the detection signal output from the sensor (32, 76); a transmission means for transmitting the detection signal from the sensor (32, 76) to the processing device, wherein the transmission means penetrates through a structure which separates the vacuum environment from the atmosphere; and a sensor package which integrates the sensor (32, 76) and the transmission means; the method comprising the steps of: irradiating a primary irradiation beam (43, 45, 46, 82) from the irradiation means to a surface of the sample mounted on the stage of the detecting apparatus; receiving secondary radiation emanated from the sample surface by the EB-TDI sensor (32, 76) through an electron-optical system of a map projection type; integrating the received secondary radiation at the sensor (32, 76); generating a detection signal corresponding to the integrated secondary electrons from the sensor (32, 76); and processing the detection signal provided from the sensor (32, 76) at the processing device; whereby: the movement for the charge integration of the EB-TDI Sensor in the direction of integration is synchronized with a movement of the stage, on which the sample has been mounted, to receive the secondary radiation emitted from a given portion of the surface of the sample at a given detection area of the sensor (32, 76), so that the secondary radiation emitted from the same portion of the sample surface is integrated at the same detection area of the sensor (32, 76) to obtain a two-dimensional image of the sample surface at the processing device. a stage; a means for irradiating a primary irradiation beam (43, 45, 46, 82) against the sample; an EB-TDI sensor (32, 76) disposed in the vacuum environment, wherein the sensor (32, 76) has a two-dimensional array of pixels and directly receives secondary radiation emanated from the sample and outputs a detection signal; a processing device disposed in the atmosphere, wherein the processing device processes the detection signal output from the sensor (32, 76); a transmission means for transmitting the detection signal from the sensor (32, 76) to the processing device, wherein the transmission means penetrates through a structure which separates the vacuum environment from the atmosphere; and a sensor package which integrates the sensor (32, 76) and the transmission means; irradiating a primary irradiation beam (43, 45, 46, 82) from the irradiation means to a surface of the sample mounted on the stage of the detecting apparatus; receiving secondary radiation emanated from the sample surface by the EB-TDI sensor (32, 76) through an electron-optical system of a map projection type; integrating the received secondary radiation at the sensor (32, 76); generating a detection signal corresponding to the integrated secondary electrons from the sensor (32, 76); and processing the detection signal provided from the sensor (32, 76) at the processing device; the movement for the charge integration of the EB-TDI Sensor in the direction of integration is synchronized with a movement of the stage, on which the sample has been mounted, to receive the secondary radiation emitted from a given portion of the surface of the sample at a given detection area of the sensor (32, 76),