A system including: a stage configured to support a sample; a light source configured to generate incident light having a wavelength in a range between 100 nm and 300 nm; a sensor; and an optical system configured to direct said incident light onto the sample, and to direct reflected light from the sample to the sensor, wherein at least one of the light source and the optical system includes at least one optical component comprising: a substrate positioned to receive a light portion such that said received light portion is directed toward a top surface of the substrate, said received light portion comprising one of the incident light and the reflected light; and a first optical material layer disposed on the substrate over the top surface and configured such that a portion of the received light portion passes through the first optical material layer to the top surface of the substrate, and wherein first optical material layer consists essentially of strontium tetraborate (SrB 4 O 7); wherein the substrate has an outer peripheral surface including said top surface and a bottom surface disposed opposite to the top surface, and wherein the first optical material layer includes a first portion disposed over the top surface and a first portion disposed over the bottom surface; and wherein the optical component comprises a frequency conversion crystal and said substrate comprises a hygroscopic non-linear optical material, and wherein the first optical material layer forms a continuous encapsulating structure that entirely surrounds the outer peripheral surface of said substrate. a stage configured to support a sample; a light source configured to generate incident light having a wavelength in a range between 100 nm and 300 nm; a sensor; and an optical system configured to direct said incident light onto the sample, and to direct reflected light from the sample to the sensor, wherein at least one of the light source and the optical system includes at least one optical component comprising: a substrate positioned to receive a light portion such that said received light portion is directed toward a top surface of the substrate, said received light portion comprising one of the incident light and the reflected light; and a first optical material layer disposed on the substrate over the top surface and configured such that a portion of the received light portion passes through the first optical material layer to the top surface of the substrate, and a substrate positioned to receive a light portion such that said received light portion is directed toward a top surface of the substrate, said received light portion comprising one of the incident light and the reflected light; and a first optical material layer disposed on the substrate over the top surface and configured such that a portion of the received light portion passes through the first optical material layer to the top surface of the substrate, and wherein first optical material layer consists essentially of strontium tetraborate (SrB 4 O 7); wherein the substrate has an outer peripheral surface including said top surface and a bottom surface disposed opposite to the top surface, and wherein the first optical material layer includes a first portion disposed over the top surface and a first portion disposed over the bottom surface; and