Optical arrangement for use in an optical imaging device, in particular for microlithography, comprising - an optical element unit and - a detection device and/or an actuating device, wherein - the optical element unit comprises at least one optical element (108.1), wherein - the detection device is configured to determine in a plurality of M degrees of freedom in each case a detection value which is representative of a relative position or orientation of an element reference of the optical element (108.1) in relation to a primary reference of the detection device in the respective degree of freedom, wherein - the detection device comprises a plurality of N detection units (112.1), each of which is configured to output a detection signal which is representative of a distance and/or a displacement of the detection unit (112.1) in relation to a secondary reference (112.2) assigned to the optical element (108.1) and the respective detection unit (112.1), and - the optical element unit and the detection device define a detection transformation matrix which is representative of the transformation of the N detection signals into the M detection values, and/or - the actuating device is configured to set in a plurality of R degrees of freedom in each case a situation value which is representative of a relative position or orientation of an element reference of the optical element in relation to a primary reference of the actuating device in the respective degree of freedom, wherein - the actuating device comprises a plurality of S actuating units (110.1), each of which is configured to generate an actuating state at an interface of the actuating unit (110.1) with respect to the optical element unit, and - the optical element unit and the actuating device define an actuating transformation matrix which is representative of the transformation of the S actuating states into the R situation values, wherein - the condition number of a transformation matrix is defined by the ratio of the largest singular value of the transformation matrix to the smallest singular value of the transformation matrix, characterized in that - the detection device and/or the optical element unit is configured in such a way that the condition number of the detection transformation matrix is 5 to 30, in particular is 5 to 20, more preferably is 8 to 15, and/or - the actuating device and/or the optical element unit is configured in such a way that the condition number of the actuating transformation matrix is 5 to 30, in particular is 5 to 20, more preferably is 8 to 15. - an optical element unit and - a detection device and/or an actuating device, - the optical element unit comprises at least one optical element (108.1), - the detection device is configured to determine in a plurality of M degrees of freedom in each case a detection value which is representative of a relative position or orientation of an element reference of the optical element (108.1) in relation to a primary reference of the detection device in the respective degree of freedom, wherein - the detection device comprises a plurality of N detection units (112.1), each of which is configured to output a detection signal which is representative of a distance and/or a displacement of the detection unit (112.1) in relation to a secondary reference (112.2) assigned to the optical element (108.1) and the respective detection unit (112.1), and - the optical element unit and the detection device define a detection transformation matrix which is representative of the transformation of the N detection signals into the M detection values, - the detection device comprises a plurality of N detection units (112.1), each of which is configured to output a detection signal which is representative of a distance and/or a displacement of the detection unit (112.1) in relation to a secondary reference (112.2) assigned to the optical element (108.1) and the respective detection unit (112.1), and - the optical element unit and the detection device define a detection transformation matrix which is representative of the transformation of the N detection signals into the M detection values, - the actuating device is configured to set in a plurality of R degrees of freedom in each case a situation value which is representative of a relative position or orientation of an element reference of the optical element in relation to a primary reference of the actuating device in the respective degree of freedom, - the actuating device comprises a plurality of S actuating units (110.1), each of which is configured to generate an actuating state at an interface of the actuating unit (110.1) with respect to the optical element unit, and - the optical element unit and the actuating device define an actuating transformation matrix which is representative of the transformation of the S actuating states into the R situation values, - the condition number of a transformation matrix is defined by the ratio of the largest singular value of the transformation matrix to the smallest singular value of the transformation matrix, - the detection device and/or the optical element unit is configured in such a way that the condition number of the detection transformation matrix is 5 to 30, in particular is 5 to 20, more preferably is 8 to 15, - the actuating device and/or the optical element unit is configured in such a way that the condition number of the actuating transformation matrix is 5 to 30, in particular is 5 to 20, more preferably is 8 to 15.