Apparatus configured to form a plurality of scribe grooves in a workpiece using direct laser scribing comprising: a process head on which is mounted a first diffractive optical element and a second diffractive optical element, the first diffractive optical element being arranged to receive a first laser beam and to divide the first laser beam into a plurality of second laser sub-beams and the second diffractive optical element being arranged to receive said plurality of second laser sub-beams and to divide the second laser sub-beams into two or more groups of third laser sub-beams, wherein: the process head is moveable relative to the workpiece in a direction parallel to a first axis in order to form, using the third laser sub-beams, a plurality of scribe grooves extending along the first axis; and the first diffractive optical element and the second diffractive optical element are configured such that the separation of the groups of third laser sub-beams in a direction perpendicular to the first axis is adjustable by rotation of the first diffractive optical element about its optical axis, characterized in that: the first diffractive optical element and the second diffractive optical element are further configured such that the separation of the third laser sub-beams within each group of third laser sub-beams in the direction perpendicular to the first axis is adjustable by rotation of the second diffractive optical element about its optical axis, thereby allowing separations between the scribe grooves, formed by the third laser sub-beams and the relative movement between the workpiece and the process head parallel to the first axis, to be adjusted, and the first diffractive optical element and the second diffractive optical element are independently rotated such that the separation, in the direction perpendicular to the first axis, of the groups is non-zero, and the separation, in the direction perpendicular to the first axis, of the third laser sub-beams within each group of third laser sub-beams is non-zero. the process head is moveable relative to the workpiece in a direction parallel to a first axis in order to form, using the third laser sub-beams, a plurality of scribe grooves extending along the first axis; and the first diffractive optical element and the second diffractive optical element are configured such that the separation of the groups of third laser sub-beams in a direction perpendicular to the first axis is adjustable by rotation of the first diffractive optical element about its optical axis, characterized in that: the first diffractive optical element and the second diffractive optical element are further configured such that the separation of the third laser sub-beams within each group of third laser sub-beams in the direction perpendicular to the first axis is adjustable by rotation of the second diffractive optical element about its optical axis, thereby allowing separations between the scribe grooves, formed by the third laser sub-beams and the relative movement between the workpiece and the process head parallel to the first axis, to be adjusted, and the first diffractive optical element and the second diffractive optical element are independently rotated such that the separation, in the direction perpendicular to the first axis, of the groups is non-zero, and the separation, in the direction perpendicular to the first axis, of the third laser sub-beams within each group of third laser sub-beams is non-zero. the first diffractive optical element and the second diffractive optical element are further configured such that the separation of the third laser sub-beams within each group of third laser sub-beams in the direction perpendicular to the first axis is adjustable by rotation of the second diffractive optical element about its optical axis, thereby allowing separations between the scribe grooves, formed by the third laser sub-beams and the relative movement between the workpiece and the process head parallel to the first axis, to be adjusted, and the first diffractive optical element and the second diffractive optical element are independently rotated such that the separation, in the direction perpendicular to the first axis, of the groups is non-zero, and the separation, in the direction perpendicular to the first axis, of the third laser sub-beams within each group of third laser sub-beams is non-zero.