A micro-electromechanical system, MEMS, variable capacitor, comprising: a movable component being movable with respect to a substrate, the movable component comprising a bottom surface facing the substrate and a top surface opposing the bottom surface; first and second actuation electrodes (MAE1, SAE1) being spaced apart, the first actuation electrode being attached to a top surface of the movable component, the second actuation electrode being attached to the substrate, and first actuation electrode being movable with respect to the second actuation electrode when a voltage is applied across the first and second actuation electrodes (MAE1, SAE1); a first capacitive electrode attached to the substrate; a second capacitive electrode attached to the top surface of the movable component and spaced from the first capacitive electrode for movement of the second capacitive electrode with respect to the first capacitive electrode upon application of the voltage across the first and second actuation electrodes (MAE1, SAE1) to change the capacitance between the first and second capacitive electrodes (SCE, MCE1); a plurality of tethers (T1, T2, T3, T4) attached to the movable component and to a support structure for suspending the movable component above the substrate, the tethers (T1, T2, T3, T4) being flexible for allowing movement of the first and second capacitive electrodes (SCE, MCE1) with respect to one another, and the support structure being rigidly attached to the substrate; a third actuation electrode and a third capacitive electrode, both attached to a bottom surface of the movable component opposing the second actuation electrode and the second capacitive electrode, respectively, the third actuation electrode being in electrical communication with the first actuation electrode via a first conductive interconnect extending through the movable component, and the third capacitive electrode being in electrical communication with the second capacitive electrode via a second conductive interconnect extending through the movable component. a movable component being movable with respect to a substrate, the movable component comprising a bottom surface facing the substrate and a top surface opposing the bottom surface; first and second actuation electrodes (MAE1, SAE1) being spaced apart, the first actuation electrode being attached to a top surface of the movable component, the second actuation electrode being attached to the substrate, and first actuation electrode being movable with respect to the second actuation electrode when a voltage is applied across the first and second actuation electrodes (MAE1, SAE1); a first capacitive electrode attached to the substrate; a second capacitive electrode attached to the top surface of the movable component and spaced from the first capacitive electrode for movement of the second capacitive electrode with respect to the first capacitive electrode upon application of the voltage across the first and second actuation electrodes (MAE1, SAE1) to change the capacitance between the first and second capacitive electrodes (SCE, MCE1); a plurality of tethers (T1, T2, T3, T4) attached to the movable component and to a support structure for suspending the movable component above the substrate, the tethers (T1, T2, T3, T4) being flexible for allowing movement of the first and second capacitive electrodes (SCE, MCE1) with respect to one another, and the support structure being rigidly attached to the substrate; a third actuation electrode and a third capacitive electrode, both attached to a bottom surface of the movable component opposing the second actuation electrode and the second capacitive electrode, respectively, the third actuation electrode being in electrical communication with the first actuation electrode via a first conductive interconnect extending through the movable component, and the third capacitive electrode being in electrical communication with the second capacitive electrode via a second conductive interconnect extending through the movable component.