An optical scanning device (240, 400, 500, 600, 700, 800, 905, 1800) comprising: a base (305, 405, 505, 705, 805, 1805); a cantilevered beam (310, 410, 510, 610, 710, 810, 1810) extending from the base (305, 405, 505, 705, 805, 1805), the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) including a proximal end attached to the base and a distal end; characterised in that the optical scanning device further comprises: at least one optical waveguide (315, 425, 525, 625, 825, 1825) positioned on the base (305, 405, 505, 705, 805, 1805) and on the cantilevered beam (310, 410, 510, 610, 710, 810, 1810), and extending from the base (305, 405, 505, 705, 805, 1805) along the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) from the proximate end to the distal end; a plurality of heaters (435, 535, 635, 735, 835, 1005, 1010, 1015, 1020, 1835) disposed on the cantilevered beam (310, 410, 510, 610, 710, 810, 1810), wherein actuating the plurality of heaters (435, 535, 635, 735, 835, 1005, 1010, 1015, 1020, 1835) induces a thermal expansion of a plurality of regions in the cantilevered beam (310, 410, 510, 610, 710, 810, 1810), causing a deflection of the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) and of the optical waveguide (315, 425, 525, 625, 825, 1825); and a first capacitive sensing electrode disposed on the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) and a second capacitive sensing electrode disposed adjacent to the cantilevered beam. a base (305, 405, 505, 705, 805, 1805); a cantilevered beam (310, 410, 510, 610, 710, 810, 1810) extending from the base (305, 405, 505, 705, 805, 1805), the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) including a proximal end attached to the base and a distal end; characterised in that the optical scanning device further comprises: at least one optical waveguide (315, 425, 525, 625, 825, 1825) positioned on the base (305, 405, 505, 705, 805, 1805) and on the cantilevered beam (310, 410, 510, 610, 710, 810, 1810), and extending from the base (305, 405, 505, 705, 805, 1805) along the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) from the proximate end to the distal end; a plurality of heaters (435, 535, 635, 735, 835, 1005, 1010, 1015, 1020, 1835) disposed on the cantilevered beam (310, 410, 510, 610, 710, 810, 1810), wherein actuating the plurality of heaters (435, 535, 635, 735, 835, 1005, 1010, 1015, 1020, 1835) induces a thermal expansion of a plurality of regions in the cantilevered beam (310, 410, 510, 610, 710, 810, 1810), causing a deflection of the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) and of the optical waveguide (315, 425, 525, 625, 825, 1825); and a first capacitive sensing electrode disposed on the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) and a second capacitive sensing electrode disposed adjacent to the cantilevered beam. at least one optical waveguide (315, 425, 525, 625, 825, 1825) positioned on the base (305, 405, 505, 705, 805, 1805) and on the cantilevered beam (310, 410, 510, 610, 710, 810, 1810), and extending from the base (305, 405, 505, 705, 805, 1805) along the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) from the proximate end to the distal end; a plurality of heaters (435, 535, 635, 735, 835, 1005, 1010, 1015, 1020, 1835) disposed on the cantilevered beam (310, 410, 510, 610, 710, 810, 1810), wherein actuating the plurality of heaters (435, 535, 635, 735, 835, 1005, 1010, 1015, 1020, 1835) induces a thermal expansion of a plurality of regions in the cantilevered beam (310, 410, 510, 610, 710, 810, 1810), causing a deflection of the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) and of the optical waveguide (315, 425, 525, 625, 825, 1825); and a first capacitive sensing electrode disposed on the cantilevered beam (310, 410, 510, 610, 710, 810, 1810) and a second capacitive sensing electrode disposed adjacent to the cantilevered beam.