A process of annealing a predetermined number of workpieces in a magnetic annealing tool, comprising the steps of: (a) loading the workpieces into a process chamber of the magnetic annealing tool; (b) sealing the process chamber and separately sealing an element chamber at least partly surrounding the periphery of the process chamber; (c) drawing a hard vacuum in the range of 1.3 x 10 -2 Pa (10 -4 Torr) to 1.3 Pa (10 -2 Torr) in the element chamber such that gas conduction mode of heat transfer is reduced in the element chamber, and drawing a hard vacuum in the range of 1.3 x 10 -5 Pa (10 -7 Torr) to 1.3 Pa (10 -2 Torr) in the process chamber; (d) energizing one or more electrical resistance heating elements disposed in the element chamber before, during or following step (c) to rapidly heat the workpieces from ambient temperature to a predetermined annealing temperature; (e) applying a magnetic field to the workpieces, and maintaining the annealing temperature for a predetermined period of time while the magnetic field is applied to the workpieces; (f) upon the expiration of the predetermined period of time in step (e), cutting the power to the electrical resistance heating elements and raising the pressure in the element chamber by flowing a gas therethrough, so as to facilitate cooling of workpieces by heat transfer to a cooling fluid in a cooling chamber disposed to surround the element chamber; (g) raising the pressure in the process chamber to one of a soft vacuum and a positive pressure during the cooling step (f) by introducing one of an inert atmosphere and a reducing atmosphere in the process chamber; (h) if not already at atmospheric pressure, re-pressurizing the process chamber; and (i) unloading the workpieces from the process chamber. (a) loading the workpieces into a process chamber of the magnetic annealing tool; (b) sealing the process chamber and separately sealing an element chamber at least partly surrounding the periphery of the process chamber; (c) drawing a hard vacuum in the range of 1.3 x 10 -2 Pa (10 -4 Torr) to 1.3 Pa (10 -2 Torr) in the element chamber such that gas conduction mode of heat transfer is reduced in the element chamber, and drawing a hard vacuum in the range of 1.3 x 10 -5 Pa (10 -7 Torr) to 1.3 Pa (10 -2 Torr) in the process chamber; (d) energizing one or more electrical resistance heating elements disposed in the element chamber before, during or following step (c) to rapidly heat the workpieces from ambient temperature to a predetermined annealing temperature; (e) applying a magnetic field to the workpieces, and maintaining the annealing temperature for a predetermined period of time while the magnetic field is applied to the workpieces; (f) upon the expiration of the predetermined period of time in step (e), cutting the power to the electrical resistance heating elements and raising the pressure in the element chamber by flowing a gas therethrough, so as to facilitate cooling of workpieces by heat transfer to a cooling fluid in a cooling chamber disposed to surround the element chamber; (g) raising the pressure in the process chamber to one of a soft vacuum and a positive pressure during the cooling step (f) by introducing one of an inert atmosphere and a reducing atmosphere in the process chamber; (h) if not already at atmospheric pressure, re-pressurizing the process chamber; and (i) unloading the workpieces from the process chamber.