A plating composition for electrolytic copper deposition, comprising copper ions, halide ions and at least one acid, characterized in that the plating composition further comprises (a) at least one benzothiazole compound represented by the following formula wherein R BT1 is selected from the group consisting of substituted and unsubstituted alkyl group, substituted and unsubstituted aryl group and substituted and unsubstituted alkaryl group; R BT2 and R BT3 are independently substituted and unsubstituted alkyl groups; each of R BT4, R BT5, R BT6 and R BT7 are independently selected from the group consisting of hydrogen, substituted and unsubstituted alkyl group, substituted and unsubstituted oxyalkyl group and wherein R BT8 is selected from the group consisting of substituted and unsubstituted alkyl group, substituted and unsubstituted aryl group and substituted and unsubstituted alkaryl group; each of R BT9, R BT10, R BT11 and R BT12 are independently selected from the group consisting of hydrogen, substituted and unsubstituted alkyl group, substituted and unsubstituted oxyalkyl group and sulfonic acid group; (b) at least one phenanzine dye; and (c) at least one ethanediamine derivative represented by the following formula wherein R ED1, R ED2, R ED3 and R ED4 are independently selected from the group consisting of substituted and unsubstituted oligo(oxyalkanediyl) group; and substituted and unsubstituted poly(oxyalkanediyl) group. (a) at least one benzothiazole compound represented by the following formula wherein R BT1 is selected from the group consisting of substituted and unsubstituted alkyl group, substituted and unsubstituted aryl group and substituted and unsubstituted alkaryl group; R BT2 and R BT3 are independently substituted and unsubstituted alkyl groups; each of R BT4, R BT5, R BT6 and R BT7 are independently selected from the group consisting of hydrogen, substituted and unsubstituted alkyl group, substituted and unsubstituted oxyalkyl group and wherein R BT8 is selected from the group consisting of substituted and unsubstituted alkyl group, substituted and unsubstituted aryl group and substituted and unsubstituted alkaryl group; each of R BT9, R BT10, R BT11 and R BT12 are independently selected from the group consisting of hydrogen, substituted and unsubstituted alkyl group, substituted and unsubstituted oxyalkyl group and sulfonic acid group; R BT1 is selected from the group consisting of substituted and unsubstituted alkyl group, substituted and unsubstituted aryl group and substituted and unsubstituted alkaryl group; R BT2 and R BT3 are independently substituted and unsubstituted alkyl groups; each of R BT4, R BT5, R BT6 and R BT7 are independently selected from the group consisting of hydrogen, substituted and unsubstituted alkyl group, substituted and unsubstituted oxyalkyl group and wherein R BT8 is selected from the group consisting of substituted and unsubstituted alkyl group, substituted and unsubstituted aryl group and substituted and unsubstituted alkaryl group; each of R BT9, R BT10, R BT11 and R BT12 are independently selected from the group consisting of hydrogen, substituted and unsubstituted alkyl group, substituted and unsubstituted oxyalkyl group and sulfonic acid group; wherein R BT8 is selected from the group consisting of substituted and unsubstituted alkyl group, substituted and unsubstituted aryl group and substituted and unsubstituted alkaryl group; each of R BT9, R BT10, R BT11 and R BT12 are independently selected from the group consisting of hydrogen, substituted and unsubstituted alkyl group, substituted and unsubstituted oxyalkyl group and sulfonic acid group; (b) at least one phenanzine dye; and (c) at least one ethanediamine derivative represented by the following formula wherein R ED1, R ED2, R ED3 and R ED4 are independently selected from the group consisting of substituted and unsubstituted oligo(oxyalkanediyl) group; and substituted and unsubstituted poly(oxyalkanediyl) group.