An apparatus for producing trichlorosilane, comprising: a reaction vessel in which a supply gas containing silicon tetrachloride and hydrogen is supplied to an internal reaction passageway to produce a reaction product gas containing trichlorosilane and hydrogen chloride, where the reaction vessel includes a plurality of cylindrical reaction tubular walls (9a, 9b, 9c, 9d, 9e, 9f) that have different inner diameters and that are disposed concentrically and constitute a central columnar space and a plurality of tubular spaces (11b, 11e, 11d, 11e, 11f) in the periphery thereof; a heating mechanism that heats the interior of the reaction vessel; a gas supply section that supplies the supply gas in the reaction vessel; and a gas discharge section that discharges the reaction product gas from the reaction vessel to the outside, wherein the reaction passageway includes: a supply side passageway that is connected to the gas supply section at the columnar space of the reaction vessel and flows the supply gas toward the outermost tubular space while meandering in the reaction vessel; a return passageway that is connected to a downstream end of the supply side passageway and extends to the central portion of the reaction vessel; and a discharge side passageway that is disposed so as to be connected to a downstream end of the return passageway and to adjoin the supply side passageway at the innermost tubular space, the discharge side passageway being connected to the gas discharge section. a reaction vessel in which a supply gas containing silicon tetrachloride and hydrogen is supplied to an internal reaction passageway to produce a reaction product gas containing trichlorosilane and hydrogen chloride, where the reaction vessel includes a plurality of cylindrical reaction tubular walls (9a, 9b, 9c, 9d, 9e, 9f) that have different inner diameters and that are disposed concentrically and constitute a central columnar space and a plurality of tubular spaces (11b, 11e, 11d, 11e, 11f) in the periphery thereof; a heating mechanism that heats the interior of the reaction vessel; a gas supply section that supplies the supply gas in the reaction vessel; and a gas discharge section that discharges the reaction product gas from the reaction vessel to the outside, wherein the reaction passageway includes: a supply side passageway that is connected to the gas supply section at the columnar space of the reaction vessel and flows the supply gas toward the outermost tubular space while meandering in the reaction vessel; a return passageway that is connected to a downstream end of the supply side passageway and extends to the central portion of the reaction vessel; and a discharge side passageway that is disposed so as to be connected to a downstream end of the return passageway and to adjoin the supply side passageway at the innermost tubular space, the discharge side passageway being connected to the gas discharge section. a supply side passageway that is connected to the gas supply section at the columnar space of the reaction vessel and flows the supply gas toward the outermost tubular space while meandering in the reaction vessel; a return passageway that is connected to a downstream end of the supply side passageway and extends to the central portion of the reaction vessel; and a discharge side passageway that is disposed so as to be connected to a downstream end of the return passageway and to adjoin the supply side passageway at the innermost tubular space, the discharge side passageway being connected to the gas discharge section.