A miniaturized device for pressure measurements over a very wide range, comprising: - at least one first electro-mechanical miniaturized sensor member configured to detect a respective first pressure value (P 1) and generate a first electrical signal (S 1) representative of the first pressure value (P 1); - an ionization-based detection member, configured to detect a second pressure value (P 2), said ionization-based detection member comprising at least one ionization source, an ionization region, ion extraction means, and at least one ion detector, configured to detect ions and generate a second electrical signal (S 2) depending on the amount of ions detected and representative of the second pressure value (P 2); - electronic processing means, operatively connected to said first sensor member and ionization-based detection member, and configured to determine a measured pressure value P based on said first (S 1) and second (S 2) detected electrical signals; - interface means, operatively connected to said electronic processing means and configured to provide in output said measured pressure value, wherein said first sensor member, ionization-based detection member, electronic processing means and interface means are comprised in a single integrated device, manufactured by means of integrated micro/nano-electronic techniques and contained, or containable, in a single, individual package; wherein the device further comprises at least one further miniaturized reference pressure sensor member, arranged within a respective casing, suitable to seal said reference sensor member, and configured to detect a reference pressure value (P ref) and to generate a reference electrical signal (S ref), representative of the reference pressure value (P ref); wherein the electronic processing means comprise a memory, configured to store characterization data characterizing the reference sensor member at the reference pressure (P ref); wherein the electronic processing means are further connected with said reference sensor member to receive the reference electrical signal (S ref), and are configured to calibrate the first sensor member, the ionization-based detection member and the reference sensor member based on the reference electrical signal (S ref) and the stored characterization data; wherein the electronic processing means are further configured to process the data received from the reference sensor member, and to carry out, based on said received data: - a diagnostic procedure of the ionization-based detection member, so as to identify possible performance degradation phenomena to which the ionization-based detection member is subjected, and - a diagnostic procedure of the first sensor member, so as to identify possible hysteresis phenomena and/or imperfections and/or possible thermal and/or mechanical drifts to which the first sensor member is subjected. - at least one first electro-mechanical miniaturized sensor member configured to detect a respective first pressure value (P 1) and generate a first electrical signal (S 1) representative of the first pressure value (P 1); - an ionization-based detection member, configured to detect a second pressure value (P 2), said ionization-based detection member comprising at least one ionization source, an ionization region, ion extraction means, and at least one ion detector, configured to detect ions and generate a second electrical signal (S 2) depending on the amount of ions detected and representative of the second pressure value (P 2); - electronic processing means, operatively connected to said first sensor member and ionization-based detection member, and configured to determine a measured pressure value P based on said first (S 1) and second (S 2) detected electrical signals; - interface means, operatively connected to said electronic processing means and configured to provide in output said measured pressure value, - a diagnostic procedure of the ionization-based detection member, so as to identify possible performance degradation phenomena to which the ionization-based detection member is subjected, and - a diagnostic procedure of the first sensor member, so as to identify possible hysteresis phenomena and/or imperfections and/or possible thermal and/or mechanical drifts to which the first sensor member is subjected.