A method of manufacturing a titanium alloy material, the method comprising a hot rolling step and a cold rolling step, wherein shot peening is performed on a surface of a hot rolled sheet to remove scale, and in addition, a crack is given to the scale generated in a superficial layer part of the hot rolled sheet, then a first acid cleaning treatment is performed to remove remaining scale, the titanium alloy material that has been subjected to the hot rolling step is then subjected to cold rolling and annealing plural times, after annealing, the superficial layer part of the titanium alloy material is removed by a second acid cleaning treatment or a mechanical grinding once or a plurality of times, wherein a removal amount of the superficial layer part at each time is 1 μm or more for a target plane of the titanium alloy material, and when an average value of intensity of background signals in surface mapping analysis using an EPMA surface analysis apparatus is N and N+3N 1/2 is maximum intensity of the background signal of an Fe characteristic X-ray, a removal of the superficial layer is performed until a ratio of an area, at which a signal of an Fe characteristic X-ray exceeding the maximum intensity is obtained, is 0.1 % or less, or when an average value of intensity of background signals in surface mapping analysis using an EPMA surface analysis apparatus is N and N+3N 1/2 is maximum intensity of the background signal of an S characteristic X-ray, a removal of the superficial layer is performed until a ratio of an area, at which a signal of an S characteristic X-ray exceeding the maximum intensity is obtained, is 0.1 % or less, and optionally, cleaning with an aqueous solution of ferric chloride and brushing of the surface of the hot-rolled sheet, the titanium alloy material comprising: 0.01 to 0.25 % by mass of a platinum group metal, and optionally at least one selected from the group consisting of Ni in 0.05 to 1.0% by mass, Cr in 0.05 to 0.3 % by mass, and Mo in 0.05 to 0.5 % by mass. shot peening is performed on a surface of a hot rolled sheet to remove scale, and in addition, a crack is given to the scale generated in a superficial layer part of the hot rolled sheet, then a first acid cleaning treatment is performed to remove remaining scale, the titanium alloy material that has been subjected to the hot rolling step is then subjected to cold rolling and annealing plural times, after annealing, the superficial layer part of the titanium alloy material is removed by a second acid cleaning treatment or a mechanical grinding once or a plurality of times, wherein a removal amount of the superficial layer part at each time is 1 μm or more for a target plane of the titanium alloy material, and when an average value of intensity of background signals in surface mapping analysis using an EPMA surface analysis apparatus is N and N+3N 1/2 is maximum intensity of the background signal of an Fe characteristic X-ray, a removal of the superficial layer is performed until a ratio of an area, at which a signal of an Fe characteristic X-ray exceeding the maximum intensity is obtained, is 0.1 % or less, or when an average value of intensity of background signals in surface mapping analysis using an EPMA surface analysis apparatus is N and N+3N 1/2 is maximum intensity of the background signal of an S characteristic X-ray, a removal of the superficial layer is performed until a ratio of an area, at which a signal of an S characteristic X-ray exceeding the maximum intensity is obtained, is 0.1 % or less, and optionally, cleaning with an aqueous solution of ferric chloride and brushing of the surface of the hot-rolled sheet, the titanium alloy material comprising: 0.01 to 0.25 % by mass of a platinum group metal, and optionally at least one selected from the group consisting of Ni in 0.05 to 1.0% by mass, Cr in 0.05 to 0.3 % by mass, and Mo in 0.05 to 0.5 % by mass. 0.01 to 0.25 % by mass of a platinum group metal, and optionally at least one selected from the group consisting of Ni in 0.05 to 1.0% by mass, Cr in 0.05 to 0.3 % by mass, and Mo in 0.05 to 0.5 % by mass.