A method for producing solid layers and/or uneven solids comprising the following steps: providing a workpiece for the detachment of at least one solid layer and/or at least one solid, wherein the workpiece comprises at least one exposed surface, applying an immersion liquid on the exposed surface, generating defects inside the workpiece, wherein the defects define at least one crack-conducting layer, wherein, to generate the defects, the workpiece is acted upon by means of a defect-generating device through the immersion liquid, removing the immersion liquid from the exposed surface, applying or generating a receiving layer on the exposed surface of the workpiece thereby forming a composite structure, tempering the receiving layer to generate stresses inside the workpiece, wherein the stresses give rise to a crack propagation inside the workpiece, wherein, as a result of the crack propagation, a solid layer or a solid is separated from the workpiece along the crack-conducting layer, wherein the immersion liquid is applied on the exposed surface in a quantity which is such that at least over half the exposed surface is wetted by it, and the immersion liquid is covered with a cover plate in such a way that at least essentially the same refractive index is present between the crack-conducting layer to be generated and the cover plate, wherein the surface of the cover plate that is in contact with the immersion liquid and the exposed surface of the workpiece are orientated inclined with respect to one another, in such a way that the proportion of the immersion liquid between the cover plate and the exposed surface varies depending on location. providing a workpiece for the detachment of at least one solid layer and/or at least one solid, wherein the workpiece comprises at least one exposed surface, applying an immersion liquid on the exposed surface, generating defects inside the workpiece, wherein the defects define at least one crack-conducting layer, wherein, to generate the defects, the workpiece is acted upon by means of a defect-generating device through the immersion liquid, removing the immersion liquid from the exposed surface, applying or generating a receiving layer on the exposed surface of the workpiece thereby forming a composite structure, tempering the receiving layer to generate stresses inside the workpiece, wherein the stresses give rise to a crack propagation inside the workpiece, wherein, as a result of the crack propagation, a solid layer or a solid is separated from the workpiece along the crack-conducting layer, wherein the immersion liquid is applied on the exposed surface in a quantity which is such that at least over half the exposed surface is wetted by it, and the immersion liquid is covered with a cover plate in such a way that at least essentially the same refractive index is present between the crack-conducting layer to be generated and the cover plate, wherein the surface of the cover plate that is in contact with the immersion liquid and the exposed surface of the workpiece are orientated inclined with respect to one another, in such a way that the proportion of the immersion liquid between the cover plate and the exposed surface varies depending on location.