A method for determining a depression/protrusion of a sample (305; 1602), comprising the steps of: emitting a charged particle beam (303; 1614); focusing the charged particle beam (303; 1614); detecting charged particles emitted from the sample (305; 1602) as a result of irradiation by said charged particle beam (303; 1614); scanning the charged particle beam (303; 1614) on the location on which a profile waveform was formed on said sample (305; 1602) from a direction of an original optical axis which is normal to said sample surface or from a direction being inclined at a first angle (-θ) to said original optical axis to form a profile waveform having first and second peaks, characterized by: scanning said charged particle beam (303; 1614) from a direction being inclined at a second angle (+θ) to said original optical axis opposite to said first angle (-θ) to form a profile waveform having third and fourth peaks; judging that the sample (305; 1602) has a protrusion between positions corresponding to said peaks, if said third peak width is smaller than said first peak width and said fourth peak width is greater than said second peak width; and judging that the sample (305; 1602) has a depression between positions corresponding to said peaks, if said third peak width is greater than said first peak width and said fourth peak width is smaller than said second peak width. emitting a charged particle beam (303; 1614); focusing the charged particle beam (303; 1614); detecting charged particles emitted from the sample (305; 1602) as a result of irradiation by said charged particle beam (303; 1614); scanning the charged particle beam (303; 1614) on the location on which a profile waveform was formed on said sample (305; 1602) from a direction of an original optical axis which is normal to said sample surface or from a direction being inclined at a first angle (-θ) to said original optical axis to form a profile waveform having first and second peaks, characterized by: scanning said charged particle beam (303; 1614) from a direction being inclined at a second angle (+θ) to said original optical axis opposite to said first angle (-θ) to form a profile waveform having third and fourth peaks; judging that the sample (305; 1602) has a protrusion between positions corresponding to said peaks, if said third peak width is smaller than said first peak width and said fourth peak width is greater than said second peak width; and judging that the sample (305; 1602) has a depression between positions corresponding to said peaks, if said third peak width is greater than said first peak width and said fourth peak width is smaller than said second peak width. scanning said charged particle beam (303; 1614) from a direction being inclined at a second angle (+θ) to said original optical axis opposite to said first angle (-θ) to form a profile waveform having third and fourth peaks; judging that the sample (305; 1602) has a protrusion between positions corresponding to said peaks, if said third peak width is smaller than said first peak width and said fourth peak width is greater than said second peak width; and judging that the sample (305; 1602) has a depression between positions corresponding to said peaks, if said third peak width is greater than said first peak width and said fourth peak width is smaller than said second peak width.