A transducer (20, 162) adapted to sense acceleration, the MEMS transducer further comprising: a first sensor adapted to detect said acceleration, said first sensor including a first substrate having a first surface; first fixed electrodes (48, 50) formed on said first surface; a first proof mass movably coupled to said first surface and positioned in spaced apart relationship above said first surface; a second sensor (30, 164) adapted to detect said acceleration, said second sensor (30, 164) including a second substrate (56, 168) having a second surface (60, 166); a second fixed electrode (62, 174) formed on said second surface; a second proof mass (58, 170) movably coupled to said second surface (60, 166) and in spaced apart relationship above said second surface (60, 166); and wherein said second substrate (56, 168) is coupled to said first substrate such that said second surface (60, 166) faces said first surface and said second proof mass (58, 170) is situated facing said first proof mass; a first anchor system is formed on said first surface of said first substrate and coupled with said first proof mass, said first anchor system enabling said first proof mass to move substantially parallel to said first surface of said first substrate in response to said acceleration in a first direction; said first anchor system further enabling said first proof mass to move substantially parallel to said first surface of said first substrate in response to said acceleration in a second direction, said second direction being orthogonal to said first direction; said second proof mass is adapted for motion relative to a rotational axis; and a second anchor system is formed on said second surface of said second substrate and pivotally coupled with said second proof mass, said second anchor system enabling said second proof mass to rotate about said rotational axis in response to said acceleration in a direction perpendicular to said second surface of said second substrate. a first sensor adapted to detect said acceleration, said first sensor including a first substrate having a first surface; first fixed electrodes (48, 50) formed on said first surface; a first proof mass movably coupled to said first surface and positioned in spaced apart relationship above said first surface; a second sensor (30, 164) adapted to detect said acceleration, said second sensor (30, 164) including a second substrate (56, 168) having a second surface (60, 166); a second fixed electrode (62, 174) formed on said second surface; a second proof mass (58, 170) movably coupled to said second surface (60, 166) and in spaced apart relationship above said second surface (60, 166); and wherein said second substrate (56, 168) is coupled to said first substrate such that said second surface (60, 166) faces said first surface and said second proof mass (58, 170) is situated facing said first proof mass; a first anchor system is formed on said first surface of said first substrate and coupled with said first proof mass, said first anchor system enabling said first proof mass to move substantially parallel to said first surface of said first substrate in response to said acceleration in a first direction; said first anchor system further enabling said first proof mass to move substantially parallel to said first surface of said first substrate in response to said acceleration in a second direction, said second direction being orthogonal to said first direction; said second proof mass is adapted for motion relative to a rotational axis; and a second anchor system is formed on said second surface of said second substrate and pivotally coupled with said second proof mass, said second anchor system enabling said second proof mass to rotate about said rotational axis in response to said acceleration in a direction perpendicular to said second surface of said second substrate.