An exhaust system for evacuating a chamber of a manufacturing apparatus for manufacturing semiconductor devices, liquid crystal panels, LEDs, or solar cells comprising: a vacuum pump apparatus configured to evacuate said chamber; an exhaust gas treatment apparatus configured to treat an exhaust gas discharged from said chamber; a pipe for connecting said manufacturing apparatus, said vacuum pump apparatus and said exhaust gas treatment apparatus; and a controller configured to control said vacuum pump apparatus and/or said exhaust gas treatment apparatus; wherein said controller is configured to have information of the operation process of said manufacturing apparatus, and the kind of gas and the flow rate of the gas supplied to said manufacturing apparatus to be inputted into said controller, and to control said vacuum pump apparatus and/or said exhaust gas treatment apparatus based on the inputted information; wherein the vacuum pump apparatus comprises a first vacuum pump having two compression stages (14, 15), a second vacuum pump having two compression stages (25, 26), a pump suction port connected to said chamber provided in said first vacuum pump, and a pump exhaust port connected to said exhaust gas treatment apparatus provided in said second vacuum pump; said second vacuum pump having a pressure sensor arranged to measure a pressure at an interstage part between the two compression stages (25, 26) of the second vacuum pump, said pressure sensor being connected to the controller; wherein said controller is configured to judge whether a process gas is introduced from said pump suction port to an interior of said first vacuum pump based on a measured pressure value provided by said pressure sensor; and wherein said controller is further configured to predict the time when maintenance is required for said vacuum pump apparatus or said exhaust gas treatment apparatus based at least in part on the kind of gas and quantity of the gas supplied to said manufacturing apparatus or to predict the kind of gas to be treated and an available supply quantity of the gas to be treated until maintenance is required for said vacuum pump apparatus or said exhaust gas treatment apparatus, and to output the prediction information to said manufacturing apparatus. a vacuum pump apparatus configured to evacuate said chamber; an exhaust gas treatment apparatus configured to treat an exhaust gas discharged from said chamber; a pipe for connecting said manufacturing apparatus, said vacuum pump apparatus and said exhaust gas treatment apparatus; and a controller configured to control said vacuum pump apparatus and/or said exhaust gas treatment apparatus; wherein said controller is configured to have information of the operation process of said manufacturing apparatus, and the kind of gas and the flow rate of the gas supplied to said manufacturing apparatus to be inputted into said controller, and to control said vacuum pump apparatus and/or said exhaust gas treatment apparatus based on the inputted information; wherein the vacuum pump apparatus comprises a first vacuum pump having two compression stages (14, 15), a second vacuum pump having two compression stages (25, 26), a pump suction port connected to said chamber provided in said first vacuum pump, and a pump exhaust port connected to said exhaust gas treatment apparatus provided in said second vacuum pump; said second vacuum pump having a pressure sensor arranged to measure a pressure at an interstage part between the two compression stages (25, 26) of the second vacuum pump, said pressure sensor being connected to the controller; wherein said controller is configured to judge whether a process gas is introduced from said pump suction port to an interior of said first vacuum pump based on a measured pressure value provided by said pressure sensor; and wherein said controller is further configured to predict the time when maintenance is required for said vacuum pump apparatus or said exhaust gas treatment apparatus based at least in part on the kind of gas and quantity of the gas supplied to said manufacturing apparatus or to predict the kind of gas to be treated and an available supply quantity of the gas to be treated until maintenance is required for said vacuum pump apparatus or said exhaust gas treatment apparatus, and to output the prediction information to said manufacturing apparatus.