An imprint lithography method, comprising: providing a turntable comprising a top surface and a first end positioned opposite a second end, each of the first and second ends including a respective opening (312, 314), each opening including two or more cutouts and two or more tabs; providing a substrate chuck comprising a top surface positioned opposite a bottom surface; positioning the turntable in a first position such that i) the two or more cutouts of the opening of the first end are in superimposition with two or more pedestals and ii) a first end of the two or more pedestals extends away from the top surface of the turntable; increasing a distance between the top surface of the turntable and the bottom surface of the substrate chuck to transfer a first substrate from the two or more pedestals to the two or more tabs of the opening of the first end of the turntable; rotating the turntable from the first position to a second position such that i) the two or more tabs of the opening of the first end of the turntable are in superimposition with two or more channels of the substrate chuck and ii) the two or more cutouts of the opening of the second end are in superimposition with the two or more pedestals; and after rotating the turntable from the first position to the second position, decreasing a distance between the top surface of the turntable and the bottom surface of the substrate chuck to transfer the first substrate from the two or more tabs of the opening of the first end of the turntable to the top surface of the substrate chuck while the two or more tabs of the opening of the first end are positioned within the channels of the substrate chuck. providing a turntable comprising a top surface and a first end positioned opposite a second end, each of the first and second ends including a respective opening (312, 314), each opening including two or more cutouts and two or more tabs; providing a substrate chuck comprising a top surface positioned opposite a bottom surface; positioning the turntable in a first position such that i) the two or more cutouts of the opening of the first end are in superimposition with two or more pedestals and ii) a first end of the two or more pedestals extends away from the top surface of the turntable; increasing a distance between the top surface of the turntable and the bottom surface of the substrate chuck to transfer a first substrate from the two or more pedestals to the two or more tabs of the opening of the first end of the turntable; rotating the turntable from the first position to a second position such that i) the two or more tabs of the opening of the first end of the turntable are in superimposition with two or more channels of the substrate chuck and ii) the two or more cutouts of the opening of the second end are in superimposition with the two or more pedestals; and after rotating the turntable from the first position to the second position, decreasing a distance between the top surface of the turntable and the bottom surface of the substrate chuck to transfer the first substrate from the two or more tabs of the opening of the first end of the turntable to the top surface of the substrate chuck while the two or more tabs of the opening of the first end are positioned within the channels of the substrate chuck.