A maintenance system of a substrate processing apparatus (M1-Mn), comprising: a remote operation unit adapted to operate said substrate processing apparatus (M1-Mn) from a remote place by transmitting remote operation information to said substrate processing apparatus (M1-Mn) through a communication network and by providing said remote operation information to said substrate processing apparatus (M1-Mn); and a communication control unit adapted to receive said remote operation information transmitted to said substrate processing apparatus and to provide said remote operation information to said substrate processing apparatus (M1-Mn), wherein said communication control unit is adapted to provide said remote operation information to said substrate processing apparatus (M1-Mn) only when remote operation is set to be allowed, said apparatus being characterised by: said communication control unit comprising an allowance setting section adapted to perform setting of allowance of remote operation; said allowance setting section being provided only at the substrate processing apparatus (M1-Mn) side of said communication network; said allowance setting section being arranged to divide setting of allowance of remote operation into plural stages; and said allowance setting section being arranged to include in separate stages setting of allowance of remote operation wherein said substrate processing apparatus (M1-Mn) is driven and setting of allowance of remote operation wherein said substrate processing apparatus (M1-Mn) is not driven. a remote operation unit adapted to operate said substrate processing apparatus (M1-Mn) from a remote place by transmitting remote operation information to said substrate processing apparatus (M1-Mn) through a communication network and by providing said remote operation information to said substrate processing apparatus (M1-Mn); and a communication control unit adapted to receive said remote operation information transmitted to said substrate processing apparatus and to provide said remote operation information to said substrate processing apparatus (M1-Mn), wherein said communication control unit is adapted to provide said remote operation information to said substrate processing apparatus (M1-Mn) only when remote operation is set to be allowed, said apparatus being characterised by: said communication control unit comprising an allowance setting section adapted to perform setting of allowance of remote operation; said allowance setting section being provided only at the substrate processing apparatus (M1-Mn) side of said communication network; said allowance setting section being arranged to divide setting of allowance of remote operation into plural stages; and said allowance setting section being arranged to include in separate stages setting of allowance of remote operation wherein said substrate processing apparatus (M1-Mn) is driven and setting of allowance of remote operation wherein said substrate processing apparatus (M1-Mn) is not driven. said communication control unit comprising an allowance setting section adapted to perform setting of allowance of remote operation; said allowance setting section being provided only at the substrate processing apparatus (M1-Mn) side of said communication network; said allowance setting section being arranged to divide setting of allowance of remote operation into plural stages; and said allowance setting section being arranged to include in separate stages setting of allowance of remote operation wherein said substrate processing apparatus (M1-Mn) is driven and setting of allowance of remote operation wherein said substrate processing apparatus (M1-Mn) is not driven.