A secondary charged particle detection device for detection of a signal beam, the secondary charged particle detection device being switchable between a topography detection mode and a one-detection-channel mode, and comprising: a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap; a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam, wherein the particle optics comprises: an aperture plate having at least a first aperture opening (202, 204) in the aperture plate and at least one second aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first aperture opening and the at least one second aperture opening; and a focusing lens configured (i) for being switched off or operated, in the topography detection mode, such that secondary particles of the signal beam are formed to a beam diameter adapted to the size of the first aperture opening and of the at least one second aperture opening, such that the secondary charged particles pass through the first aperture opening to form the first portion of the signal beam and through the at least one second aperture opening to form the at least one second portion of the signal beam, and (ii) for being controlled, in the one-detection-channel mode, to focus the signal beam to completely pass through the first aperture opening. a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap; a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam, wherein the particle optics comprises: an aperture plate having at least a first aperture opening (202, 204) in the aperture plate and at least one second aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first aperture opening and the at least one second aperture opening; and a focusing lens configured (i) for being switched off or operated, in the topography detection mode, such that secondary particles of the signal beam are formed to a beam diameter adapted to the size of the first aperture opening and of the at least one second aperture opening, such that the secondary charged particles pass through the first aperture opening to form the first portion of the signal beam and through the at least one second aperture opening to form the at least one second portion of the signal beam, and (ii) for being controlled, in the one-detection-channel mode, to focus the signal beam to completely pass through the first aperture opening. an aperture plate having at least a first aperture opening (202, 204) in the aperture plate and at least one second aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first aperture opening and the at least one second aperture opening; and a focusing lens configured (i) for being switched off or operated, in the topography detection mode, such that secondary particles of the signal beam are formed to a beam diameter adapted to the size of the first aperture opening and of the at least one second aperture opening, such that the secondary charged particles pass through the first aperture opening to form the first portion of the signal beam and through the at least one second aperture opening to form the at least one second portion of the signal beam, and (ii) for being controlled, in the one-detection-channel mode, to focus the signal beam to completely pass through the first aperture opening.