A method of making a coated article, the method comprising: providing an article to be coated; providing a sputtering apparatus comprising: a vacuum chamber, first and second rotatable cylindrical tubes located in close relative proximity to one another in the vacuum chamber, the first and second tubes respectively supporting first and second sputter targets including target material, at least one power source operably connected to the first and second sputtering tubes, and a top gas inlet located proximate to the first and second tubes and on a side of the tubes opposite the article to be coated; providing an oxygen flow to the vacuum chamber through the top gas inlet; providing an inert gas flow to the vacuum chamber to increase pressure therein to about 10 -3 to 10 -2 mbar; rotating the first and second tubes at less than about 5 RPM; detecting the oxygen flow within the vacuum chamber and/or an amount of power applied to the first and second tubes; detecting oxygen partial pressure; adjusting the oxygen flow and/or amount of power provided by the at least one power source to compensate for any detected oxygen partial pressure variations; and depositing a coating on the article to be coated in making the coated article. providing an article to be coated; providing a sputtering apparatus comprising: a vacuum chamber, first and second rotatable cylindrical tubes located in close relative proximity to one another in the vacuum chamber, the first and second tubes respectively supporting first and second sputter targets including target material, at least one power source operably connected to the first and second sputtering tubes, and a top gas inlet located proximate to the first and second tubes and on a side of the tubes opposite the article to be coated; providing an oxygen flow to the vacuum chamber through the top gas inlet; providing an inert gas flow to the vacuum chamber to increase pressure therein to about 10 -3 to 10 -2 mbar; rotating the first and second tubes at less than about 5 RPM; detecting the oxygen flow within the vacuum chamber and/or an amount of power applied to the first and second tubes; detecting oxygen partial pressure; adjusting the oxygen flow and/or amount of power provided by the at least one power source to compensate for any detected oxygen partial pressure variations; and depositing a coating on the article to be coated in making the coated article. a vacuum chamber, first and second rotatable cylindrical tubes located in close relative proximity to one another in the vacuum chamber, the first and second tubes respectively supporting first and second sputter targets including target material, at least one power source operably connected to the first and second sputtering tubes, and a top gas inlet located proximate to the first and second tubes and on a side of the tubes opposite the article to be coated; providing an oxygen flow to the vacuum chamber through the top gas inlet; providing an inert gas flow to the vacuum chamber to increase pressure therein to about 10 -3 to 10 -2 mbar; rotating the first and second tubes at less than about 5 RPM; detecting the oxygen flow within the vacuum chamber and/or an amount of power applied to the first and second tubes; detecting oxygen partial pressure; adjusting the oxygen flow and/or amount of power provided by the at least one power source to compensate for any detected oxygen partial pressure variations; and depositing a coating on the article to be coated in making the coated article.