A complex inspection device for a printed substrate, comprising: a substrate table configured to place a printed substrate on which a plurality of electronic components is mounted; an optical imaging apparatus configured to capture an optical image of an inspection object portion of the printed substrate placed on the substrate table; an X-ray irradiation unit configured to irradiate X-rays onto the inspection object portion; an X-ray camera configured to capture an X-ray image of the inspection object portion from X-rays travelling through the printed substrate; magnification changing means configured to change a magnification of the X-ray image by displacing one of the X-ray irradiation unit and the X-ray camera within a range between a close-up position where an arrival path of X-rays arriving at the X-ray camera from the X-ray irradiation unit has a first distance for close-up imaging, and a non-close-up position where the arrival path has a distance longer than the first distance; drive means configured to move the optical imaging apparatus between an imaging position where the optical imaging apparatus faces the inspection object portion at a space between the X-ray irradiation unit and the X-ray camera, and a withdrawn position to which the optical imaging apparatus is moved out from the imaging position so as to enable the one of the X-ray irradiation unit and the X-ray camera to move toward the close-up position; imaging position control means configured to control the drive means such that, when the one of the X-ray irradiation unit and the X-ray camera is required to move to the close-up position, the optical imaging apparatus is moved out in advance to the withdrawn position; a table-driving mechanism configured to move the substrate table in a plane parallel to the substrate table; and table movement control means configured to control the table-driving mechanism characterized in that the optical imaging apparatus is configured to capture an image of the inspection object portion at the withdrawn position, when the optical imaging apparatus has moved out to the withdrawn position. a substrate table configured to place a printed substrate on which a plurality of electronic components is mounted; an optical imaging apparatus configured to capture an optical image of an inspection object portion of the printed substrate placed on the substrate table; an X-ray irradiation unit configured to irradiate X-rays onto the inspection object portion; an X-ray camera configured to capture an X-ray image of the inspection object portion from X-rays travelling through the printed substrate; magnification changing means configured to change a magnification of the X-ray image by displacing one of the X-ray irradiation unit and the X-ray camera within a range between a close-up position where an arrival path of X-rays arriving at the X-ray camera from the X-ray irradiation unit has a first distance for close-up imaging, and a non-close-up position where the arrival path has a distance longer than the first distance; drive means configured to move the optical imaging apparatus between an imaging position where the optical imaging apparatus faces the inspection object portion at a space between the X-ray irradiation unit and the X-ray camera, and a withdrawn position to which the optical imaging apparatus is moved out from the imaging position so as to enable the one of the X-ray irradiation unit and the X-ray camera to move toward the close-up position; imaging position control means configured to control the drive means such that, when the one of the X-ray irradiation unit and the X-ray camera is required to move to the close-up position, the optical imaging apparatus is moved out in advance to the withdrawn position; a table-driving mechanism configured to move the substrate table in a plane parallel to the substrate table; and table movement control means configured to control the table-driving mechanism characterized in that the optical imaging apparatus is configured to capture an image of the inspection object portion at the withdrawn position, when the optical imaging apparatus has moved out to the withdrawn position.