A laser machining system (100;400) comprising: a base and a frame supported on the base; a part handling system including a workpiece support surface for supporting a workpiece (101;401;1301) to be machined; at least one laser source (106;406;602) for generating at least one laser beam; the system being characterised by: a beam delivery system including a stationary segment located on the frame or on the base and a movable segment for modifying and delivering the laser beam to the workpiece (101;401;1301); at least one laser scanning stage (120;420) positioned relative to the part handling system for linear movement along a scanning axis; an optical head (422;600;1300) located on the laser scanning stage (120;420), the optical head (422;600;1300) including the movable segment of the beam delivery system (408;610;1310) for receiving the laser beam and modifying the beam while moving, the movable segment of the beam delivery system (408;610;1310) comprising: a beam splitter (614;1314) for splitting the laser beam into multiple beamlets (616a-616d;1316a-1316d); a mask (622;1322) for providing an aperture shape; and imaging optics (624;1324) for directing the multiple beamlets (616a-616d;1316a-1316d) to a workpiece (601;1301) and for imaging the aperture shape on the workpiece (601;1301), wherein the stationary segment of the beam delivery system directs the laser beam into the movable segment of the beam delivery system located in said optical head (422;600;1300) while said optical head is moving relative to said at least one laser source (106;406;602) linearly for imaging the aperture shape on the workpiece (601;1301) such that multiple lines are scribed simultaneously in the workpiece. a base and a frame supported on the base; a part handling system including a workpiece support surface for supporting a workpiece (101;401;1301) to be machined; at least one laser source (106;406;602) for generating at least one laser beam; the system being characterised by: a beam delivery system including a stationary segment located on the frame or on the base and a movable segment for modifying and delivering the laser beam to the workpiece (101;401;1301); at least one laser scanning stage (120;420) positioned relative to the part handling system for linear movement along a scanning axis; an optical head (422;600;1300) located on the laser scanning stage (120;420), the optical head (422;600;1300) including the movable segment of the beam delivery system (408;610;1310) for receiving the laser beam and modifying the beam while moving, the movable segment of the beam delivery system (408;610;1310) comprising: a beam splitter (614;1314) for splitting the laser beam into multiple beamlets (616a-616d;1316a-1316d); a mask (622;1322) for providing an aperture shape; and imaging optics (624;1324) for directing the multiple beamlets (616a-616d;1316a-1316d) to a workpiece (601;1301) and for imaging the aperture shape on the workpiece (601;1301), wherein the stationary segment of the beam delivery system directs the laser beam into the movable segment of the beam delivery system located in said optical head (422;600;1300) while said optical head is moving relative to said at least one laser source (106;406;602) linearly for imaging the aperture shape on the workpiece (601;1301) such that multiple lines are scribed simultaneously in the workpiece. a beam delivery system including a stationary segment located on the frame or on the base and a movable segment for modifying and delivering the laser beam to the workpiece (101;401;1301); at least one laser scanning stage (120;420) positioned relative to the part handling system for linear movement along a scanning axis; an optical head (422;600;1300) located on the laser scanning stage (120;420), the optical head (422;600;1300) including the movable segment of the beam delivery system (408;610;1310) for receiving the laser beam and modifying the beam while moving, the movable segment of the beam delivery system (408;610;1310) comprising: a beam splitter (614;1314) for splitting the laser beam into multiple beamlets (616a-616d;1316a-1316d); a mask (622;1322) for providing an aperture shape; and imaging optics (624;1324) for directing the multiple beamlets (616a-616d;1316a-1316d) to a workpiece (601;1301) and for imaging the aperture shape on the workpiece (601;1301), wherein the stationary segment of the beam delivery system directs the laser beam into the movable segment of the beam delivery system located in said optical head (422;600;1300) while said optical head is moving relative to said at least one laser source (106;406;602) linearly for imaging the aperture shape on the workpiece (601;1301) such that multiple lines are scribed simultaneously in the workpiece. a beam splitter (614;1314) for splitting the laser beam into multiple beamlets (616a-616d;1316a-1316d); a mask (622;1322) for providing an aperture shape; and imaging optics (624;1324) for directing the multiple beamlets (616a-616d;1316a-1316d) to a workpiece (601;1301) and for imaging the aperture shape on the workpiece (601;1301), wherein the stationary segment of the beam delivery system directs the laser beam into the movable segment of the beam delivery system located in said optical head (422;600;1300) while said optical head is moving relative to said at least one laser source (106;406;602) linearly for imaging the aperture shape on the workpiece (601;1301) such that multiple lines are scribed simultaneously in the workpiece.