A process for producing a cyclic phosphoric acid ester comprising: - reacting an alkylene glycol compound represented by the general formula: HO-R 0 -OH with a phosphorus trihalide represented by the general formula: PX 3 to obtain a cyclic alkylene phosphorohalidite represented by the general formula: wherein R 0 is a linear or branched alkylene group having 2 to 20 carbon atoms or a cyclic alkylene group having 3 to 20 carbon atoms, and X is a halogen atom, the phosphorus trihalide and the alkylene glycol compound being reacted under conditions where the phosphorus trihalide is present in an excess amount relative to the amount of the alkylene glycol compound in the reaction system; - reacting the cyclic alkylene phosphorohalidite represented by the general formula with a compound having a hydroxyl group represented by the general formula: R n wherein n is an integer from 1 to 4, and R is an aliphatic residue having 1 to 8 carbon atoms or an aromatic residue having 6 to 18 carbon atoms that may have a substituent and that is represented by the following formula: wherein R 1 and R 2 are each independently a linear alkyl group having 1 to 8 carbon atoms or a branched alkyl group having 3 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, or an aryl group having 6 to 12 carbon atoms that may be substituted with a linear alkyl group having 1 to 4 carbon atoms or a branched alkyl group having 3 to 4 carbon atoms; or alternatively, R 1 and R 2, together with the oxygen atoms and the phosphorus atom to which they are attached, constitute a ring structure to obtain a reaction product represented by the general formula: wherein R 0, R and n are as defined above; and oxidizing the reaction product to obtain a cyclic phosphoric acid ester represented by the general formula: wherein R 0, R and n are as defined above and the cyclic phosphoric acid ester of the general formula has a purity of more than 90.0% area determined by gas chromatography and a halogen content of 750 ppm or less; wherein the reaction of the phosphorus trihalide of the general formula and the alkylene glycol compound of the general formula comprises adding the whole amount of the phosphorus trihalide to use to the reaction system and then gradually adding the alkylene glycol compound thereto, said reaction of the phosphorus trihalide of the general formula and the alkylene glycol compound of the general formula being carried out at a temperature in a range of 0°C to 45°C. - reacting an alkylene glycol compound represented by the general formula: HO-R 0 -OH with a phosphorus trihalide represented by the general formula: PX 3 to obtain a cyclic alkylene phosphorohalidite represented by the general formula: wherein R 0 is a linear or branched alkylene group having 2 to 20 carbon atoms or a cyclic alkylene group having 3 to 20 carbon atoms, and X is a halogen atom, the phosphorus trihalide and the alkylene glycol compound being reacted under conditions where the phosphorus trihalide is present in an excess amount relative to the amount of the alkylene glycol compound in the reaction system; - reacting the cyclic alkylene phosphorohalidite represented by the general formula with a compound having a hydroxyl group represented by the general formula: R n wherein n is an integer from 1 to 4, and R is an aliphatic residue having 1 to 8 carbon atoms or an aromatic residue having 6 to 18 carbon atoms that may have a substituent and that is represented by the following formula: wherein R 1 and R 2 are each independently a linear alkyl group having 1 to 8 carbon atoms or a branched alkyl group having 3 to 8 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, or an aryl group having 6 to 12 carbon atoms that may be substituted with a linear alkyl group having 1 to 4 carbon atoms or a branched alkyl group having 3 to 4 carbon atoms; or alternatively, R 1 and R 2, together with the oxygen atoms and the phosphorus atom to which they are attached, constitute a ring structure to obtain a reaction product represented by the general formula: wherein R 0, R and n are as defined above; and oxidizing the reaction product to obtain a cyclic phosphoric acid ester represented by the general formula: wherein R 0, R and n are as defined above and the cyclic phosphoric acid ester of the general formula has a purity of more than 90.0% area determined by gas chromatography and a halogen content of 750 ppm or less; wherein the reaction of the phosphorus trihalide of the general formula and the alkylene glycol compound of the general formula comprises adding the whole amount of the phosphorus trihalide to use to the reaction system and then gradually adding the alkylene glycol compound thereto, said reaction of the phosphorus trihalide of the general formula and the alkylene glycol compound of the general formula being carried out at a temperature in a range of 0°C to 45°C.