Apparatus for atomic layer deposition on a surface of a sheeted substrate, comprising: - an injector head comprising ∘ a deposition space provided with a precursor supply and a precursor drain; said supply and drain arranged for providing a precursor gas flow from the precursor supply via the deposition space to the precursor drain; the deposition space in use being bounded by the injector head and the substrate surface; ∘ a gas bearing comprising a bearing gas injector arranged for injecting a bearing gas between the injector head and the substrate surface, the bearing gas thus forming a gas-bearing; - a support part arranged opposite the injector head, the support part constructed to provide a gas bearing pressure arrangement that counters the injector head gas-bearing pressure in the conveying plane, so that the substrate is balanced supportless by said gas bearing pressure arrangement in between the injector head and the support part; and - a conveying system comprising a lead in zone and a drive section; ∘ the drive section comprising transport elements arranged to provide relative movement of the substrate and the injector head along a plane of the substrate to form a conveying plane along which the substrate is conveyed; and ∘ the lead in zone comprising slanted wall parts symmetrically arranged relative to the conveying plane and constructed to reduce a working height above the conveying plane in a first conveying direction towards the drive section; wherein a slitted outlet is arranged bridging the slanted wall parts and the drive section, the slitted outlet extending over the lead in zone transverse to the first conveying direction; and a gas flow provision for providing a gas flow out of the slitted outlet along the substrate to provide a high impact particle removal gas flow opposite said first conveying direction. - an injector head comprising ∘ a deposition space provided with a precursor supply and a precursor drain; said supply and drain arranged for providing a precursor gas flow from the precursor supply via the deposition space to the precursor drain; the deposition space in use being bounded by the injector head and the substrate surface; ∘ a gas bearing comprising a bearing gas injector arranged for injecting a bearing gas between the injector head and the substrate surface, the bearing gas thus forming a gas-bearing; ∘ a deposition space provided with a precursor supply and a precursor drain; said supply and drain arranged for providing a precursor gas flow from the precursor supply via the deposition space to the precursor drain; the deposition space in use being bounded by the injector head and the substrate surface; ∘ a gas bearing comprising a bearing gas injector arranged for injecting a bearing gas between the injector head and the substrate surface, the bearing gas thus forming a gas-bearing; - a support part arranged opposite the injector head, the support part constructed to provide a gas bearing pressure arrangement that counters the injector head gas-bearing pressure in the conveying plane, so that the substrate is balanced supportless by said gas bearing pressure arrangement in between the injector head and the support part; and - a conveying system comprising a lead in zone and a drive section; ∘ the drive section comprising transport elements arranged to provide relative movement of the substrate and the injector head along a plane of the substrate to form a conveying plane along which the substrate is conveyed; and ∘ the lead in zone comprising slanted wall parts symmetrically arranged relative to the conveying plane and constructed to reduce a working height above the conveying plane in a first conveying direction towards the drive section; wherein a slitted outlet is arranged bridging the slanted wall parts and the drive section, the slitted outlet extending over the lead in zone transverse to the first conveying direction; and a gas flow provision for providing a gas flow out of the slitted outlet along the substrate to provide a high impact particle removal gas flow opposite said first conveying direction. ∘ the drive section comprising transport elements arranged to provide relative movement of the substrate and the injector head along a plane of the substrate to form a conveying plane along which the substrate is conveyed; and ∘ the lead in zone comprising slanted wall parts symmetrically arranged relative to the conveying plane and constructed to reduce a working height above the conveying plane in a first conveying direction towards the drive section; wherein a slitted outlet is arranged bridging the slanted wall parts and the drive section, the slitted outlet extending over the lead in zone transverse to the first conveying direction; and a gas flow provision for providing a gas flow out of the slitted outlet along the substrate to provide a high impact particle removal gas flow opposite said first conveying direction.