Method of advancing a probe tip of a probe of a scanning microscopy device towards a sample surface, the device comprising the probe for scanning the sample surface for mapping nanostructures on the sample surface, wherein the probe tip of the probe is mounted on a cantilever arranged for bringing the probe tip in contact with the sample surface, the method comprising: controlling, by a controller, an actuator system of the device for moving the probe to the sample surface; receiving, by the controller, a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling; wherein the method further comprises: maintaining, during said controlling, an electric field between the sample surface and the probe tip, for applying an electrostatic force to the probe tip that is dependent on a proximity of the probe tip near the surface; and evaluating the sensor signal indicative of the at least one operational parameter for determining an influence on said probe by said electric field, for determining the proximity of the sample surface relative to the probe tip; and wherein said step of evaluating further comprises comparing the sensor signal with a reference value and controlling said actuator system dependent on said comparison, further comprising a step of adjusting an electric field strength of the electric field dependent on said step of evaluating while the probe tip advances the substrate surface. controlling, by a controller, an actuator system of the device for moving the probe to the sample surface; receiving, by the controller, a sensor signal indicative of at least one operational parameter of the probe for providing feedback to perform said controlling; wherein the method further comprises: maintaining, during said controlling, an electric field between the sample surface and the probe tip, for applying an electrostatic force to the probe tip that is dependent on a proximity of the probe tip near the surface; and evaluating the sensor signal indicative of the at least one operational parameter for determining an influence on said probe by said electric field, for determining the proximity of the sample surface relative to the probe tip; and wherein said step of evaluating further comprises comparing the sensor signal with a reference value and controlling said actuator system dependent on said comparison, further comprising a step of adjusting an electric field strength of the electric field dependent on said step of evaluating while the probe tip advances the substrate surface. maintaining, during said controlling, an electric field between the sample surface and the probe tip, for applying an electrostatic force to the probe tip that is dependent on a proximity of the probe tip near the surface; and evaluating the sensor signal indicative of the at least one operational parameter for determining an influence on said probe by said electric field, for determining the proximity of the sample surface relative to the probe tip; and wherein said step of evaluating further comprises comparing the sensor signal with a reference value and controlling said actuator system dependent on said comparison, further comprising a step of adjusting an electric field strength of the electric field dependent on said step of evaluating while the probe tip advances the substrate surface.