An electric system, comprising: an electric device arranged on a substrate; and an interface arranged on the substrate and adapted to receive a radio frequency probe for testing the electric device, the interface comprising: a first conductive structure for receiving at least one probe tip of the radio frequency probe, wherein the first conductive structure is coupled to a signal line in or on the substrate that couples to the electric device; a second conductive structure for receiving at least one further probe tip of the radio frequency probe; said second conductive structure being electrically coupled to the electric device by one or more vias of the substrate, in order to provide a reference signal to said electric device; and a capacitive element for providing a compensation capacitance, wherein the capacitive element and the first conductive structure are electrically coupled in order to form a compensation network for compensating radio frequency parasitics, wherein the first conductive structure extends lengthwise along a spatial axis ( x), wherein the capacitive element and the signal line are arranged on opposite sides of the first conductive structure along the spatial axis ( x), and wherein the capacitive element comprises a MEMS capacitor configured to receive one or more control signals for adjusting an adjustable capacitance of the MEMS capacitor. an electric device arranged on a substrate; and an interface arranged on the substrate and adapted to receive a radio frequency probe for testing the electric device, the interface comprising: a first conductive structure for receiving at least one probe tip of the radio frequency probe, wherein the first conductive structure is coupled to a signal line in or on the substrate that couples to the electric device; a second conductive structure for receiving at least one further probe tip of the radio frequency probe; said second conductive structure being electrically coupled to the electric device by one or more vias of the substrate, in order to provide a reference signal to said electric device; and a capacitive element for providing a compensation capacitance, wherein the capacitive element and the first conductive structure are electrically coupled in order to form a compensation network for compensating radio frequency parasitics, wherein the first conductive structure extends lengthwise along a spatial axis ( x), wherein the capacitive element and the signal line are arranged on opposite sides of the first conductive structure along the spatial axis ( x), and wherein the capacitive element comprises a MEMS capacitor configured to receive one or more control signals for adjusting an adjustable capacitance of the MEMS capacitor. a first conductive structure for receiving at least one probe tip of the radio frequency probe, wherein the first conductive structure is coupled to a signal line in or on the substrate that couples to the electric device; a second conductive structure for receiving at least one further probe tip of the radio frequency probe; said second conductive structure being electrically coupled to the electric device by one or more vias of the substrate, in order to provide a reference signal to said electric device; and a capacitive element for providing a compensation capacitance, wherein the capacitive element and the first conductive structure are electrically coupled in order to form a compensation network for compensating radio frequency parasitics, wherein the first conductive structure extends lengthwise along a spatial axis ( x), wherein the capacitive element and the signal line are arranged on opposite sides of the first conductive structure along the spatial axis ( x), and wherein the capacitive element comprises a MEMS capacitor configured to receive one or more control signals for adjusting an adjustable capacitance of the MEMS capacitor.