A process, comprising the steps of: etching three coplanar proofmasses into a substrate, wherein the three coplanar proofmasses are employable to sense acceleration along three respective input axes; and etching one or more voids into the three coplanar proofmasses to orient the three respective input axes into three orthogonal acceleration sensing directions; wherein the three respective input axes intersect at a common point and are substantially orthogonal; wherein each of the first proofmass, the second proofmass, and the third proofmass comprise a center of geometry, and a center of mass; and forming a plurality of cross-leaf flexures coupling each of the three coplanar proofmasses to a frame formed from the substrate in a seesaw configuration, wherein each of the cross-leaf flexures further comprises two flexure components; wherein the two flexure components comprise a first beam parallel with a plane of the three proofmasses and a second beam adjacent to the first beam and orthogonal to the plane of the three proofmasses to promote a reduction in compliancy of the two flexure components in a direction out of the plane; and wherein one or more voids are positioned in the first proofmass, the second proofmass, and the third proofmass to orient the first input axis, the second input axis, and the third input axis into three substantially orthogonal directions; and wherein the one or more voids in the first and second proofmasses orient the first and second input axes in an in-plane direction and position the center of mass below the center of geometry; and wherein the first proofmass is positioned relative to the second proofmass in the plane to orient the first input axis to be orthogonal to the second input axis; and wherein the one or more voids in the third proofmass serve to position the center of mass of the third proofmass below the center of geometry and to a side of an axis of rotation of the third proofmass to orient the third input axis into an out-of-plane direction orthogonal to the first and second input axes. etching three coplanar proofmasses into a substrate, wherein the three coplanar proofmasses are employable to sense acceleration along three respective input axes; and etching one or more voids into the three coplanar proofmasses to orient the three respective input axes into three orthogonal acceleration sensing directions; wherein the three respective input axes intersect at a common point and are substantially orthogonal; wherein each of the first proofmass, the second proofmass, and the third proofmass comprise a center of geometry, and a center of mass; and forming a plurality of cross-leaf flexures coupling each of the three coplanar proofmasses to a frame formed from the substrate in a seesaw configuration, wherein each of the cross-leaf flexures further comprises two flexure components; wherein the two flexure components comprise a first beam parallel with a plane of the three proofmasses and a second beam adjacent to the first beam and orthogonal to the plane of the three proofmasses to promote a reduction in compliancy of the two flexure components in a direction out of the plane; and wherein one or more voids are positioned in the first proofmass, the second proofmass, and the third proofmass to orient the first input axis, the second input axis, and the third input axis into three substantially orthogonal directions; and wherein the one or more voids in the first and second proofmasses orient the first and second input axes in an in-plane direction and position the center of mass below the center of geometry; and wherein the first proofmass is positioned relative to the second proofmass in the plane to orient the first input axis to be orthogonal to the second input axis; and wherein the one or more voids in the third proofmass serve to position the center of mass of the third proofmass below the center of geometry and to a side of an axis of rotation of the third proofmass to orient the third input axis into an out-of-plane direction orthogonal to the first and second input axes.