An actinic ray-sensitive or radiation-sensitive resin composition, comprising: a resin capable of increasing a solubility of the resin in an alkali developer by an action of an acid; and a compound capable of generating an acid upon irradiation with an actinic ray or radiation, wherein the compound capable of generating an acid upon irradiation with an actinic ray or radiation is contained in an amount of 10 to 18 mass% based on the entire solid content of the actinic ray-sensitive or radiation-sensitive resin composition and the component is a compound represented by the following formula or: wherein in formula, R 13 represents a hydrogen atom, a fluorine atom, a hydroxyl group, an alkyl group, a cycloalkyl group, an alkoxy group, an alkoxycarbonyl group, or a group having a monocyclic or polycyclic cycloalkyl skeleton; R 14 represents an alkyl group, a cycloalkyl group, an alkoxy group, an alkylsulfonyl group, a cycloalkylsulfonyl group, an alkylcarbonyl group, an alkoxycarbonyl group, or an alkoxy group having a monocyclic or polycyclic cycloalkyl skeleton, and when a plurality of R 14 's are present, the plurality of R 14 's are the same or different; each R 15 independently represents an alkyl group or a cycloalkyl group, and two R 15 's may combine with each other to form a ring; 1 represents an integer of 0 to 2; r represents an integer of 0 to 8; and X - represents a non-nucleophilic anion; and in formula, M represents an alkyl group, a cycloalkyl group, an aryl group or a benzyl group and when M has a ring structure, the ring structure may contain an oxygen atom, a sulfur atom, an ester bond, an amide bond or a carbon-carbon double bond; each of R 1c and R 2c independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group or an aryl group, and R 1c and R 2c may combine with each other to form a ring; each of R x and R y independently represents an alkyl group, a cycloalkyl group, a 2-oxoalkyl group, an alkoxycarbonylalkyl group, an allyl group or a vinyl group; R x and R y may combine with each other to form a ring, at least two members of M, R 1c and R 2c may combine with each other to form a ring, and the ring structure may contain a carbon-carbon double bond; and X - represents a non-nucleophilic anion. a resin capable of increasing a solubility of the resin in an alkali developer by an action of an acid; and a compound capable of generating an acid upon irradiation with an actinic ray or radiation, R 13 represents a hydrogen atom, a fluorine atom, a hydroxyl group, an alkyl group, a cycloalkyl group, an alkoxy group, an alkoxycarbonyl group, or a group having a monocyclic or polycyclic cycloalkyl skeleton; R 14 represents an alkyl group, a cycloalkyl group, an alkoxy group, an alkylsulfonyl group, a cycloalkylsulfonyl group, an alkylcarbonyl group, an alkoxycarbonyl group, or an alkoxy group having a monocyclic or polycyclic cycloalkyl skeleton, and when a plurality of R 14 's are present, the plurality of R 14 's are the same or different; each R 15 independently represents an alkyl group or a cycloalkyl group, and two R 15 's may combine with each other to form a ring; 1 represents an integer of 0 to 2; r represents an integer of 0 to 8; and X - represents a non-nucleophilic anion; and in formula, M represents an alkyl group, a cycloalkyl group, an aryl group or a benzyl group and when M has a ring structure, the ring structure may contain an oxygen atom, a sulfur atom, an ester bond, an amide bond or a carbon-carbon double bond; each of R 1c and R 2c independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group or an aryl group, and R 1c and R 2c may combine with each other to form a ring; each of R x and R y independently represents an alkyl group, a cycloalkyl group, a 2-oxoalkyl group, an alkoxycarbonylalkyl group, an allyl group or a vinyl group; R x and R y may combine with each other to form a ring, at least two members of M, R 1c and R 2c may combine with each other to form a ring, and the ring structure may contain a carbon-carbon double bond; and X - represents a non-nucleophilic anion.