Vacuum apparatus with a valve, the valve comprising: a first housing element and a second housing element connected with the first housing element, wherein an outer chamber is defined by the first housing element and the second housing element 14), wherein the first housing element has a first opening and the second housing element has a second opening in fluid communication with the first opening via the outer chamber, wherein an inner chamber is defined by the first housing element and the second housing element, wherein a membrane is disposed in the inner chamber dividing the inner chamber in a first inner chamber and a second inner chamber, wherein a sealing element is connected to the membrane, wherein the sealing element is movable from a first position to a second position, wherein in the first position the sealing element closes the first opening in a leaktight manner and in the second position the sealing element opens the first opening to allow a gaseous medium to flow through the valve, wherein the inner chamber is at least partially and preferably completely surrounded by the outer chamber, wherein the second inner chamber is connected to vacuum and the first inner chamber is connected to a higher pressure or atmosphere pressure to move the sealing element from the first position into the second position, the valve further comprising: a first channel connecting the second inner chamber to a region of low pressure, and in particular to the second housing element and/or the outer chamber; a first 3-way valve disposed in the first channel connected to atmosphere; a second channel connecting the first inner chamber to atmosphere; and a second 3-way valve is disposed in the second channel connected to a region of low pressure, and in particular to the second housing element and/or the outer chamber, the vacuum apparatus further comprising a vacuum pump connected to the second opening of the valve and a vacuum chamber connected to the first opening of the valve to separate the vacuum pump from the vacuum chamber. wherein the first housing element has a first opening and the second housing element has a second opening in fluid communication with the first opening via the outer chamber, wherein an inner chamber is defined by the first housing element and the second housing element, wherein a membrane is disposed in the inner chamber dividing the inner chamber in a first inner chamber and a second inner chamber, wherein a sealing element is connected to the membrane, wherein the sealing element is movable from a first position to a second position, wherein in the first position the sealing element closes the first opening in a leaktight manner and in the second position the sealing element opens the first opening to allow a gaseous medium to flow through the valve, wherein the inner chamber is at least partially and preferably completely surrounded by the outer chamber, wherein the second inner chamber is connected to vacuum and the first inner chamber is connected to a higher pressure or atmosphere pressure to move the sealing element from the first position into the second position, the valve further comprising: a first channel connecting the second inner chamber to a region of low pressure, and in particular to the second housing element and/or the outer chamber; a first 3-way valve disposed in the first channel connected to atmosphere; a second channel connecting the first inner chamber to atmosphere; and a second 3-way valve is disposed in the second channel connected to a region of low pressure, and in particular to the second housing element and/or the outer chamber, a first channel connecting the second inner chamber to a region of low pressure, and in particular to the second housing element and/or the outer chamber; a first 3-way valve disposed in the first channel connected to atmosphere; a second channel connecting the first inner chamber to atmosphere; and a second 3-way valve is disposed in the second channel connected to a region of low pressure, and in particular to the second housing element and/or the outer chamber, the vacuum apparatus further comprising a vacuum pump connected to the second opening of the valve and a vacuum chamber connected to the first opening of the valve to separate the vacuum pump from the vacuum chamber.