An electrophotographic photosensitive member comprising: a substrate, a photoconductive layer provided on the substrate and constituted of amorphous silicon, and a surface layer provided on the photoconductive layer and constituted of hydrogenated amorphous silicon carbide, wherein, the electrophotographic photosensitive member further comprises, between the photoconductive layer and the surface layer, a change layer consisting of five or more intermediate layers each constituted of hydrogenated amorphous silicon carbide, and wherein, a ratio of the number of carbon atoms to the sum of the number of silicon atoms (Si) and the number of carbon atoms, hereinafter referred to as "C/(Si+C)", in the surface layer is from 0.61 to 0.90, a ratio of C/(Si+C) in each of the intermediate layers included in the change layer increases monotonously from an innermost intermediate layer on the side of the photoconductive layer toward an outermost intermediate layer on the side of the surface layer, the ratio of C/(Si+C) in the surface layer is larger than the ratio of C/(Si+C) in any intermediate layer included in the change layer, and two or more intermediate layers having the ratio of C/(Si+C) of from 0.35 to 0.65 are included in the change layer, when, two layers contiguous to each other are selected from among the two or more intermediate layers having the ratio of C/(Si+C) of from 0.35 to 0.65, a ratio of C/(Si+C) in a layer on the side of the photoconductive layer selected from among the two layers contiguous to each other, is represented by A, and a ratio of C/(Si+C) in a layer on the side of the surface layer selected from among the two layers contiguous to each other, is represented by B, all the intermediate layers having the ratio of C/(Si+C) of from 0.35 to 0.65 in among the five or more intermediate layers of which the change layer consists, satisfy the following expression: B - A / A × 100 ≤ 19 % a substrate, a photoconductive layer provided on the substrate and constituted of amorphous silicon, and a surface layer provided on the photoconductive layer and constituted of hydrogenated amorphous silicon carbide, wherein, the electrophotographic photosensitive member further comprises, between the photoconductive layer and the surface layer, a change layer consisting of five or more intermediate layers each constituted of hydrogenated amorphous silicon carbide, and wherein, a ratio of the number of carbon atoms to the sum of the number of silicon atoms (Si) and the number of carbon atoms, hereinafter referred to as "C/(Si+C)", in the surface layer is from 0.61 to 0.90, a ratio of C/(Si+C) in each of the intermediate layers included in the change layer increases monotonously from an innermost intermediate layer on the side of the photoconductive layer toward an outermost intermediate layer on the side of the surface layer, the ratio of C/(Si+C) in the surface layer is larger than the ratio of C/(Si+C) in any intermediate layer included in the change layer, and two or more intermediate layers having the ratio of C/(Si+C) of from 0.35 to 0.65 are included in the change layer, when, two layers contiguous to each other are selected from among the two or more intermediate layers having the ratio of C/(Si+C) of from 0.35 to 0.65, a ratio of C/(Si+C) in a layer on the side of the photoconductive layer selected from among the two layers contiguous to each other, is represented by A, and a ratio of C/(Si+C) in a layer on the side of the surface layer selected from among the two layers contiguous to each other, is represented by B, all the intermediate layers having the ratio of C/(Si+C) of from 0.35 to 0.65 in among the five or more intermediate layers of which the change layer consists, satisfy the following expression: B - A / A × 100 ≤ 19 %