A film forming method of forming a film by accelerating powder of a material with gas and spraying and depositing the powder onto a surface of a substrate with the powder being kept in a solid state, the film forming method comprising: a substrate arrangement step of arranging the substrate in a chamber, wherein a holding unit is provided in the chamber and holds the substrate; and a film forming step of forming a film, including: jetting out the powder and inert gas from a nozzle towards the substrate; causing inside of the chamber to be under positive pressure by the inert gas; and depositing the powder on the surface of the substrate, characterized in that a) a flow regulating unit is formed by bending one end of a cylindrical member inwards and provided near the bottom portion of the chamber to surround the holding unit; or b) a flow regulating unit is formed with an opening by a central portion of a plate shaped member being bent and being doughnut shaped, the flow regulating unit being provided like a brim at a height in the middle of an inner wall side surface of the chamber; wherein the film forming step is performed while flow of the inert gas in the chamber is regulated by the flow regulating unit (17; 19). a substrate arrangement step of arranging the substrate in a chamber, wherein a holding unit is provided in the chamber and holds the substrate; and a film forming step of forming a film, including: jetting out the powder and inert gas from a nozzle towards the substrate; causing inside of the chamber to be under positive pressure by the inert gas; and depositing the powder on the surface of the substrate, characterized in that a) a flow regulating unit is formed by bending one end of a cylindrical member inwards and provided near the bottom portion of the chamber to surround the holding unit; or b) a flow regulating unit is formed with an opening by a central portion of a plate shaped member being bent and being doughnut shaped, the flow regulating unit being provided like a brim at a height in the middle of an inner wall side surface of the chamber; jetting out the powder and inert gas from a nozzle towards the substrate; causing inside of the chamber to be under positive pressure by the inert gas; and depositing the powder on the surface of the substrate, characterized in that a) a flow regulating unit is formed by bending one end of a cylindrical member inwards and provided near the bottom portion of the chamber to surround the holding unit; or b) a flow regulating unit is formed with an opening by a central portion of a plate shaped member being bent and being doughnut shaped, the flow regulating unit being provided like a brim at a height in the middle of an inner wall side surface of the chamber; a) a flow regulating unit is formed by bending one end of a cylindrical member inwards and provided near the bottom portion of the chamber to surround the holding unit; or b) a flow regulating unit is formed with an opening by a central portion of a plate shaped member being bent and being doughnut shaped, the flow regulating unit being provided like a brim at a height in the middle of an inner wall side surface of the chamber; wherein the film forming step is performed while flow of the inert gas in the chamber is regulated by the flow regulating unit (17; 19).