Process for the polymerization of oxasilacycles which are selected from among the general formulae and wherein the oxasilacycles which are selected from among the general formulae and and optionally siloxanes which are selected from among linear siloxanes of the general formula or cyclic siloxanes of the general formula R-Si(R 7) 2 O[Si(R 7) 2 O] o Si(R 7) 2 -R, are polymerized in the presence of acid catalyst K to form compounds of the general formula, where R is hydrogen, an unsubstituted or substituted hydrocarbon radical or acyl radical, in each case having from 1 to 50 carbon atoms, R 1, R 2, R 1, R 2', R 1", R 2" are each hydrogen, halogen, cyano, OH or an unsubstituted or substituted hydrocarbonoxy radical, acyloxy radical, alkoxy radical or hydrocarbon radical in each case having from 1 to 50 carbon atoms, in which in each case nonadjacent carbon atoms can be replaced by heteroatoms selected from among N, 0, P, S, where two or three of the radicals R 1, R 2, R 1', R 2', R 1", R 2" can be joined to one another, R 3, R 4, R 3' R 4', R 3" are each an unsubstituted or substituted hydrocarbon radical in each case having from 1 to 50 carbon atoms, in which in each case nonadjacent carbon atoms can be replaced by heteroatoms selected from among N, 0, P, S, or a high molecular weight radical, R 4" is hydrogen, an unsubstituted or substituted hydrocarbon radical in each case having from 1 to 49 carbon atoms, in which in each case nonadjacent carbon atoms can be replaced by heteroatoms selected from among N, 0, P, S, or a high molecular weight radical, R 6 is an unsubstituted or substituted hydrocarbon radical in each case having from 1 to 50 carbon atoms, in which in each case nonadjacent carbon atoms can be replaced by heteroatoms selected from among N, 0, P, S, R 7, R 10 are each an unsubstituted or substituted hydrocarbon radical in each case having from 1 to 10 carbon atoms, R 8 is a radical R 6 or R 9, R 9 is a radical of the general formula n, n', n" are integers of at least 1, x, y, y 1 are each 0 or 1, z is an integer of at least 1, o is an integer of at least 0, p is an integer of at least 1 and s is an integer of at least 1. R is hydrogen, an unsubstituted or substituted hydrocarbon radical or acyl radical, in each case having from 1 to 50 carbon atoms, R 1, R 2, R 1, R 2', R 1", R 2" are each hydrogen, halogen, cyano, OH or an unsubstituted or substituted hydrocarbonoxy radical, acyloxy radical, alkoxy radical or hydrocarbon radical in each case having from 1 to 50 carbon atoms, in which in each case nonadjacent carbon atoms can be replaced by heteroatoms selected from among N, 0, P, S, where two or three of the radicals R 1, R 2, R 1', R 2', R 1", R 2" can be joined to one another, R 3, R 4, R 3' R 4', R 3" are each an unsubstituted or substituted hydrocarbon radical in each case having from 1 to 50 carbon atoms, in which in each case nonadjacent carbon atoms can be replaced by heteroatoms selected from among N, 0, P, S, or a high molecular weight radical, R 4" is hydrogen, an unsubstituted or substituted hydrocarbon radical in each case having from 1 to 49 carbon atoms, in which in each case nonadjacent carbon atoms can be replaced by heteroatoms selected from among N, 0, P, S, or a high molecular weight radical, R 6 is an unsubstituted or substituted hydrocarbon radical in each case having from 1 to 50 carbon atoms, in which in each case nonadjacent carbon atoms can be replaced by heteroatoms selected from among N, 0, P, S, R 7, R 10 are each an unsubstituted or substituted hydrocarbon radical in each case having from 1 to 10 carbon atoms, R 8 is a radical R 6 or R 9, R 9 is a radical of the general formula n, n', n" are integers of at least 1, x, y, y 1 are each 0 or 1, z is an integer of at least 1, o is an integer of at least 0, p is an integer of at least 1 and s is an integer of at least 1.