A method of forming an electromechanical transducer device comprising: forming on a fixed structure a movable structure and an actuating structure of the electromechanical transducer device, wherein the movable structure is arranged in operation of the electromechanical transducer device to be movable in relation to the fixed structure in response to actuation of the actuating structure; providing a stress trimming layer on at least part of the movable structure; after providing the stress trimming layer, releasing the movable structure from the fixed structure to provide a released electromechanical transducer device; and after releasing the movable structure from the fixed structure, changing stress in the stress trimming layer of the released electromechanical transducer device such that the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state, characterized in that the changing stress comprises: determining a value for an anneal parameter for a stress trimming anneal to be performed on the released electromechanical transducer device, such that after the anneal of the released electromechanical transducer device, the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state; and performing the stress trimming anneal on the released electromechanical transducer device according to the determined value of the anneal parameter. forming on a fixed structure a movable structure and an actuating structure of the electromechanical transducer device, wherein the movable structure is arranged in operation of the electromechanical transducer device to be movable in relation to the fixed structure in response to actuation of the actuating structure; providing a stress trimming layer on at least part of the movable structure; after providing the stress trimming layer, releasing the movable structure from the fixed structure to provide a released electromechanical transducer device; and after releasing the movable structure from the fixed structure, changing stress in the stress trimming layer of the released electromechanical transducer device such that the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state, characterized in that the changing stress comprises: determining a value for an anneal parameter for a stress trimming anneal to be performed on the released electromechanical transducer device, such that after the anneal of the released electromechanical transducer device, the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state; and performing the stress trimming anneal on the released electromechanical transducer device according to the determined value of the anneal parameter. determining a value for an anneal parameter for a stress trimming anneal to be performed on the released electromechanical transducer device, such that after the anneal of the released electromechanical transducer device, the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state; and performing the stress trimming anneal on the released electromechanical transducer device according to the determined value of the anneal parameter.