A method of controllably bonding a thin sheet to a carrier, comprising: obtaining a thin sheet comprising glass, glass ceramic or ceramic and having a thin sheet bonding surface and a thickness of ≤ 300 μm; obtaining a carrier comprising glass, glass ceramic or ceramic and having a carrier bonding surface; depositing a carbonaceous surface modification layer onto at least one of the thin sheet bonding surface and the carrier bonding surface by plasma polymerization of a carbon-containing gas; incorporating polar groups with the surface modification layer; and bonding the thin sheet bonding surface to the carrier bonding surface via the surface modification layer, wherein the at least one of the thin sheet bonding surface and the carrier bonding surface has a surface energy including a polar component, wherein the incorporation of the polar groups increases the polar component of the surface energy by at least 20 mJ/m 2, and wherein the polar group incorporation is performed by one of: treatment of the surface modification layer with a nitrogen-containing gas; sequential treatment of the surface modification layer with a first treatment gas then a second treatment gas, wherein the first treatment gas is one of a nitrogen-containing gas and a hydrogen-containing gas, and where the second treatment gas is the other one of the nitrogen-containing gas and the hydrogen-containing gas; treatment of the surface modification layer with an oxygen-containing gas; plasma treatment of the surface modification layer with a nitrogen-and-oxygen-containing gas; sequential plasma treatment of the surface modification layer with a first treatment gas then a second treatment gas, wherein the first treatment gas is a nitrogen-and-oxygen-containing gas and wherein the second treatment gas is a nitrogen-containing gas. obtaining a thin sheet comprising glass, glass ceramic or ceramic and having a thin sheet bonding surface and a thickness of ≤ 300 μm; obtaining a carrier comprising glass, glass ceramic or ceramic and having a carrier bonding surface; depositing a carbonaceous surface modification layer onto at least one of the thin sheet bonding surface and the carrier bonding surface by plasma polymerization of a carbon-containing gas; incorporating polar groups with the surface modification layer; and bonding the thin sheet bonding surface to the carrier bonding surface via the surface modification layer, wherein the at least one of the thin sheet bonding surface and the carrier bonding surface has a surface energy including a polar component, wherein the incorporation of the polar groups increases the polar component of the surface energy by at least 20 mJ/m 2, and wherein the polar group incorporation is performed by one of: treatment of the surface modification layer with a nitrogen-containing gas; sequential treatment of the surface modification layer with a first treatment gas then a second treatment gas, wherein the first treatment gas is one of a nitrogen-containing gas and a hydrogen-containing gas, and where the second treatment gas is the other one of the nitrogen-containing gas and the hydrogen-containing gas; treatment of the surface modification layer with an oxygen-containing gas; plasma treatment of the surface modification layer with a nitrogen-and-oxygen-containing gas; sequential plasma treatment of the surface modification layer with a first treatment gas then a second treatment gas, wherein the first treatment gas is a nitrogen-and-oxygen-containing gas and wherein the second treatment gas is a nitrogen-containing gas. treatment of the surface modification layer with a nitrogen-containing gas; sequential treatment of the surface modification layer with a first treatment gas then a second treatment gas, wherein the first treatment gas is one of a nitrogen-containing gas and a hydrogen-containing gas, and where the second treatment gas is the other one of the nitrogen-containing gas and the hydrogen-containing gas; treatment of the surface modification layer with an oxygen-containing gas; plasma treatment of the surface modification layer with a nitrogen-and-oxygen-containing gas; sequential plasma treatment of the surface modification layer with a first treatment gas then a second treatment gas, wherein the first treatment gas is a nitrogen-and-oxygen-containing gas and wherein the second treatment gas is a nitrogen-containing gas.