A method for treating articles comprising: providing a first chamber configured for processing at least one article; providing a second chamber for staging the at least one article; providing a linear transport system; providing a first gate valve positioned between and in communication with the first and second chambers (11, 15), said first gate valve having a closed position to seal the first chamber and an open position to allow a passageway between the first chamber and the second chamber; providing a dock station configured for loading and unloading the at least one article; providing a second gate valve positioned between and in communication with the second chamber and the dock station, said second gate valve having a closed position to seal the second chamber and an open position to allow a passageway between the second chamber and the dock station; providing at least one vacuum pump in communication with the first or second chamber (11, 15); providing a plurality of carriers (29, 31) configured to support the at least one article to be treated; loading the at least one article onto one of the plurality of carriers (29, 31); establishing and maintaining a low pressure in the first and second chambers (11, 15) while transporting at least one of the plurality of carriers (29, 31) via the linear transport system between the first and second chambers (11, 15) such that one carrier (29, 31) comprising the at least one article to be treated is disposed in the first chamber; and processing the at least one article supported by the carrier (29, 31) in the first chamber; characterized in that the linear transport system comprises a plurality of sets of rails (45, 47), a number of the sets of rails (45, 47) corresponding to a number of the carriers (29, 31), configured to move laterally independently of each other along the linear transport system between the first chamber and the second chamber, wherein each of the plurality of sets of rails (45, 47) is configured to support one of the plurality of carriers (29, 31). providing a first chamber configured for processing at least one article; providing a second chamber for staging the at least one article; providing a linear transport system; providing a first gate valve positioned between and in communication with the first and second chambers (11, 15), said first gate valve having a closed position to seal the first chamber and an open position to allow a passageway between the first chamber and the second chamber; providing a dock station configured for loading and unloading the at least one article; providing a second gate valve positioned between and in communication with the second chamber and the dock station, said second gate valve having a closed position to seal the second chamber and an open position to allow a passageway between the second chamber and the dock station; providing at least one vacuum pump in communication with the first or second chamber (11, 15); providing a plurality of carriers (29, 31) configured to support the at least one article to be treated; loading the at least one article onto one of the plurality of carriers (29, 31); establishing and maintaining a low pressure in the first and second chambers (11, 15) while transporting at least one of the plurality of carriers (29, 31) via the linear transport system between the first and second chambers (11, 15) such that one carrier (29, 31) comprising the at least one article to be treated is disposed in the first chamber; and processing the at least one article supported by the carrier (29, 31) in the first chamber; characterized in that the linear transport system comprises a plurality of sets of rails (45, 47), a number of the sets of rails (45, 47) corresponding to a number of the carriers (29, 31), configured to move laterally independently of each other along the linear transport system between the first chamber and the second chamber, wherein each of the plurality of sets of rails (45, 47) is configured to support one of the plurality of carriers (29, 31).