An imprint lithography substrate transfer method, comprising: providing a tray handler device including a first tray handler positioned opposite a second tray handler; providing a first tray and a second tray, each of the first and the second trays defining an aperture (318,320) and each having a top surface (314,316), each aperture defining at least two cutouts and two tabs; providing a substrate chuck having a top surface and a bottom surface; engaging the first tray handler with the first tray; positioning the tray handler device in a first position with i) the cutouts of the aperture of the first tray in superimposition with respective pedestals of a pedestal platform and ii) a distal end of the pedestals extending away from the top surface of the first tray; increasing a distance between the top surface of the first tray and a top surface of the pedestal platform to transfer a first substrate from the pedestals to the tabs defined by the aperture of the first tray, while concurrently engaging the second tray handler with the second tray; increasing a distance between the top surface of the second tray and the bottom surface of the substrate chuck to transfer a second substrate from the substrate chuck to the tabs defined by the second tray; rotating the tray handler device from the first position to a second position with i) the tabs defined by the aperture of the first tray in superimposition with respective channels of the substrate chuck and ii) the cutouts of the aperture of the second tray in superimposition with respective pedestals; decreasing a distance between the top surface of the first tray and the bottom surface of the substrate chuck to transfer the first substrate from the tabs defined by the aperture of the first tray to the top surface of the substrate chuck while the tabs defined by the aperture of the first tray are disposed within the respective channels of the substrate chuck; and disengaging the first tray handler from the first tray while concurrently decreasing a distance between the top surface of the second tray and the top surface of the pedestal platform to transfer the second substrate from the tabs defined by the aperture the second tray to the pedestals. providing a tray handler device including a first tray handler positioned opposite a second tray handler; providing a first tray and a second tray, each of the first and the second trays defining an aperture (318,320) and each having a top surface (314,316), each aperture defining at least two cutouts and two tabs; providing a substrate chuck having a top surface and a bottom surface; engaging the first tray handler with the first tray; positioning the tray handler device in a first position with i) the cutouts of the aperture of the first tray in superimposition with respective pedestals of a pedestal platform and ii) a distal end of the pedestals extending away from the top surface of the first tray; increasing a distance between the top surface of the first tray and a top surface of the pedestal platform to transfer a first substrate from the pedestals to the tabs defined by the aperture of the first tray, while concurrently engaging the second tray handler with the second tray; increasing a distance between the top surface of the second tray and the bottom surface of the substrate chuck to transfer a second substrate from the substrate chuck to the tabs defined by the second tray; rotating the tray handler device from the first position to a second position with i) the tabs defined by the aperture of the first tray in superimposition with respective channels of the substrate chuck and ii) the cutouts of the aperture of the second tray in superimposition with respective pedestals; decreasing a distance between the top surface of the first tray and the bottom surface of the substrate chuck to transfer the first substrate from the tabs defined by the aperture of the first tray to the top surface of the substrate chuck while the tabs defined by the aperture of the first tray are disposed within the respective channels of the substrate chuck; and disengaging the first tray handler from the first tray while concurrently decreasing a distance between the top surface of the second tray and the top surface of the pedestal platform to transfer the second substrate from the tabs defined by the aperture the second tray to the pedestals.