A quadrature cancellation apparatus comprising: a drive charge amplifier configured to couple to a proof mass of a MEMS device and to provide oscillation motion information of the proof mass; a first sense charge amplifier configured to couple to the proof mass and to provide first sense information of a first movement of the MEMS device; a first programmable amplifier configured to receive the oscillation motion information and provide amplified oscillation motion information; a first summer configured to cancel quadrature error of the first sense information using the first sense information and the amplified oscillation motion information to provide quadrature-corrected first sense information; a selectable 0/90-degree phase shifter configured to receive the oscillation motion information and to provide carrier information; a first multiplier configured to provide demodulated first sense information using the quadrature-corrected first sense information and the carrier information; and a first baseband buffer configured to receive the demodulated first sense information and to provide buffered first sense information, wherein the first baseband buffer comprises a baseband amplifier; wherein the selectable 0/90-degree phase shifter is configured to be set to 0-degrees during test and the gain of the first programmable amplifier is configured to be adjusted until a root mean squared - RMS - value of the baseband amplifier is minimized, ensuring accurate quadrature cancellation when the selectable 0/90-degree phase shifter is set back at 90-degrees to provide the carrier information; the quadrature cancellation apparatus further comprises a first switch matrix that includes the first summer and the first multiplier; and wherein the drive charge amplifier and the first sense charge amplifier are delay-matched to each other. a drive charge amplifier configured to couple to a proof mass of a MEMS device and to provide oscillation motion information of the proof mass; a first sense charge amplifier configured to couple to the proof mass and to provide first sense information of a first movement of the MEMS device; a first programmable amplifier configured to receive the oscillation motion information and provide amplified oscillation motion information; a first summer configured to cancel quadrature error of the first sense information using the first sense information and the amplified oscillation motion information to provide quadrature-corrected first sense information; a selectable 0/90-degree phase shifter configured to receive the oscillation motion information and to provide carrier information; a first multiplier configured to provide demodulated first sense information using the quadrature-corrected first sense information and the carrier information; and a first baseband buffer configured to receive the demodulated first sense information and to provide buffered first sense information, wherein the first baseband buffer comprises a baseband amplifier; wherein the selectable 0/90-degree phase shifter is configured to be set to 0-degrees during test and the gain of the first programmable amplifier is configured to be adjusted until a root mean squared - RMS - value of the baseband amplifier is minimized, ensuring accurate quadrature cancellation when the selectable 0/90-degree phase shifter is set back at 90-degrees to provide the carrier information; the quadrature cancellation apparatus further comprises a first switch matrix that includes the first summer and the first multiplier; and wherein the drive charge amplifier and the first sense charge amplifier are delay-matched to each other.