A method of recovering vaporized precursor material with a carrier gas in a multi-chamber solid precursor delivery assembly (100, 200), the method comprising: delivering carrier gas to a multi-chamber solid precursor delivery assembly (100, 200); retaining carrier gas within headspace of a first precursor chamber (140, 240) of the multi-chamber solid precursor delivery assembly (100, 200) generally above precursor material disposed within the first precursor chamber (140, 240) until a pressure differential of about 0.5 percent to about 50 percent of the average pressure in the first precursor chamber (140, 240) exists across a first porous distributor plate (150, 250) of the multi-chamber solid precursor delivery assembly (100, 200) separating the first precursor chamber (140, 240) from a second precursor chamber (142, 242), at which time the carrier gas and vaporized precursor material recovered by the carrier gas flows through the first porous distributor plate (150, 250) to the second precursor chamber (142, 242); retaining the carrier gas within headspace of the second precursor chamber (142, 242) of the multi-chamber solid precursor delivery assembly (100, 200) generally above precursor material disposed within the second precursor chamber (142, 242) until a pressure differential of about 0.5 percent to about 50 percent of the average pressure in the second precursor chamber (142, 242) exists across a second porous distributor plate (152, 252) of the multi-chamber solid precursor delivery assembly (100, 200) separating the second precursor chamber (142, 242) from a third chamber, at which time the carrier gas and vaporized precursor material recovered by the carrier gas flows through the second porous distributor plate (152, 252) to the third chamber; and removing the carrier gas and vaporized precursor material recovered by the carrier gas from the multi-chamber solid precursor delivery assembly (100, 200). delivering carrier gas to a multi-chamber solid precursor delivery assembly (100, 200); retaining carrier gas within headspace of a first precursor chamber (140, 240) of the multi-chamber solid precursor delivery assembly (100, 200) generally above precursor material disposed within the first precursor chamber (140, 240) until a pressure differential of about 0.5 percent to about 50 percent of the average pressure in the first precursor chamber (140, 240) exists across a first porous distributor plate (150, 250) of the multi-chamber solid precursor delivery assembly (100, 200) separating the first precursor chamber (140, 240) from a second precursor chamber (142, 242), at which time the carrier gas and vaporized precursor material recovered by the carrier gas flows through the first porous distributor plate (150, 250) to the second precursor chamber (142, 242); retaining the carrier gas within headspace of the second precursor chamber (142, 242) of the multi-chamber solid precursor delivery assembly (100, 200) generally above precursor material disposed within the second precursor chamber (142, 242) until a pressure differential of about 0.5 percent to about 50 percent of the average pressure in the second precursor chamber (142, 242) exists across a second porous distributor plate (152, 252) of the multi-chamber solid precursor delivery assembly (100, 200) separating the second precursor chamber (142, 242) from a third chamber, at which time the carrier gas and vaporized precursor material recovered by the carrier gas flows through the second porous distributor plate (152, 252) to the third chamber; and removing the carrier gas and vaporized precursor material recovered by the carrier gas from the multi-chamber solid precursor delivery assembly (100, 200).