A laser metrology system comprising: a laser modulator for modulating a laser output by a degree of modulation based on a measured area to be scanned on a surface of a target structure, wherein the degree of modulation is based on a look-up table including the measured area and a corresponding power density of the laser output at a given set of coordinates on the surface of the target structure at a given laser output; means for transmitting a modulated measurement beam comprising the modulated laser output; a beam splitter for splitting said measurement beam into a local oscillator beam and a transmitted beam; an optical assembly for projecting said transmitted beam to the measured area on the surface of the target structure and for receiving a reflected beam from said measured area, said reflected beam being a return of said transmitted beam; a beam combiner for combining said reflected beam and said local oscillator beam into a detection beam; a detector for processing said detection beam, said detector comprising a micro-lens for projecting said detection beam, a photodetector for carrying out coherent detection of said detection beam and detector electronics in communication with the photodetector for generating informational data from said detection beam; and a range processor for computing dimensional data about said measured area from said informational data, wherein said detector comprises a plurality of micro-lenses forming a micro-lens array and a plurality of photodetectors forming a photodetector array, wherein each micro-lens of said micro-lens array projects a portion of said detection beam representing at least one measured point of said measured area to an associated photodetector of said photodetector array, wherein said associated photodetector carries out coherent detection of said portion of said detection beam, and wherein said range processor calculates a range value for said measured point. a laser modulator for modulating a laser output by a degree of modulation based on a measured area to be scanned on a surface of a target structure, wherein the degree of modulation is based on a look-up table including the measured area and a corresponding power density of the laser output at a given set of coordinates on the surface of the target structure at a given laser output; means for transmitting a modulated measurement beam comprising the modulated laser output; a beam splitter for splitting said measurement beam into a local oscillator beam and a transmitted beam; an optical assembly for projecting said transmitted beam to the measured area on the surface of the target structure and for receiving a reflected beam from said measured area, said reflected beam being a return of said transmitted beam; a beam combiner for combining said reflected beam and said local oscillator beam into a detection beam; a detector for processing said detection beam, said detector comprising a micro-lens for projecting said detection beam, a photodetector for carrying out coherent detection of said detection beam and detector electronics in communication with the photodetector for generating informational data from said detection beam; and a range processor for computing dimensional data about said measured area from said informational data, wherein said detector comprises a plurality of micro-lenses forming a micro-lens array and a plurality of photodetectors forming a photodetector array, wherein each micro-lens of said micro-lens array projects a portion of said detection beam representing at least one measured point of said measured area to an associated photodetector of said photodetector array, wherein said associated photodetector carries out coherent detection of said portion of said detection beam, and wherein said range processor calculates a range value for said measured point.