An acceleration sensor comprising: an excitation mass having excitation electrodes, which excitation mass is mounted moveably along a movement axis (x) above a substrate; detection electrodes that are fixedly connected to the substrate and that correspond to the excitation electrodes; wherein a first group of pairings of excitation electrodes and corresponding detection electrodes is configured to deflect the excitation mass along the movement axis (x) in a first direction; a second group of pairings of excitation electrodes and corresponding detection electrodes is configured to deflect the excitation mass along the movement axis (x) in a second direction that is opposite to the first direction; the number of pairings in the first group is equal to the number of parings in the second group; the excitation electrodes and the detection electrodes of the first group of pairings and of the second group of pairings are arranged such that the averaged distance between excitation electrodes and detection electrodes of pairings of the first group, which is determined from distances of the respective pairing, corresponds to the averaged distance between excitation electrodes and detection electrodes of pairings of the second group, which is determined from distances of the respective pairing; by arranging the groups such that the first group comprises at least two subgroups (370a, 370b) of pairings; the second group comprises at least two subgroups (375a, 375b) of pairings; in the subgroups excitation electrodes and detection electrodes are arranged alternatingly; a virtual first connecting line between centers of the two subgroups (370a, 370b) of the first group crosses a virtual second connection line between centers of the two subgroups (375a, 375b) of the second group. an excitation mass having excitation electrodes, which excitation mass is mounted moveably along a movement axis (x) above a substrate; detection electrodes that are fixedly connected to the substrate and that correspond to the excitation electrodes; wherein a first group of pairings of excitation electrodes and corresponding detection electrodes is configured to deflect the excitation mass along the movement axis (x) in a first direction; a second group of pairings of excitation electrodes and corresponding detection electrodes is configured to deflect the excitation mass along the movement axis (x) in a second direction that is opposite to the first direction; the number of pairings in the first group is equal to the number of parings in the second group; the excitation electrodes and the detection electrodes of the first group of pairings and of the second group of pairings are arranged such that the averaged distance between excitation electrodes and detection electrodes of pairings of the first group, which is determined from distances of the respective pairing, corresponds to the averaged distance between excitation electrodes and detection electrodes of pairings of the second group, which is determined from distances of the respective pairing; by arranging the groups such that the first group comprises at least two subgroups (370a, 370b) of pairings; the second group comprises at least two subgroups (375a, 375b) of pairings; in the subgroups excitation electrodes and detection electrodes are arranged alternatingly; a virtual first connecting line between centers of the two subgroups (370a, 370b) of the first group crosses a virtual second connection line between centers of the two subgroups (375a, 375b) of the second group.