A process for generating mist and forming new material or the modification of material by mist gas discharge, the process comprising the steps of: 1) providing a first container, the pressure and temperature in the container or some specific region of a part of the container being settable; and providing a device for forming new material therein or a material to be modified, placing it in the first container; 2) introducing a pretreating gas, generating spark or arc discharge, followed by glow discharge to pretreat the device or the material using the glow discharge; 3) heating or cooling the device or the material to be modified in the first container to a designated temperature and holding at the temperature; 4) providing a second container, in which a solid or liquid elementary substance or/and compound is provided, the second container being placed inside or outside the first container; 5) generating mist as follows: altering the temperature or/and pressure in the second container to gasify the solid or liquid elementary substance or and compound in the second container and make the gasified solid or liquid elementary substance or/and compound in the second container enter into the first container to generate mist, the mist formed by either raising the pressure P of at least some part of the first container more than P 0 while maintaining the temperature T of the first container at T 0 or lowering the temperature T of the first container less than T 0 while maintaing the pressure P of the first container at P 0, where P 0 is saturated vapor pressure of the solid or liquid elementary substance and/or compound in the second container at temperature T 0, the mist being dispersed in the first container or a part of the first container; 6) turning on power supply equipment, generating mist gas discharge between the two electrodes in the first container to form new materials in the specific device or the material is subjected to mist gas discharge modification in a designated pressure in the first container. 1) providing a first container, the pressure and temperature in the container or some specific region of a part of the container being settable; and providing a device for forming new material therein or a material to be modified, placing it in the first container; 2) introducing a pretreating gas, generating spark or arc discharge, followed by glow discharge to pretreat the device or the material using the glow discharge; 3) heating or cooling the device or the material to be modified in the first container to a designated temperature and holding at the temperature; 4) providing a second container, in which a solid or liquid elementary substance or/and compound is provided, the second container being placed inside or outside the first container; 5) generating mist as follows: altering the temperature or/and pressure in the second container to gasify the solid or liquid elementary substance or and compound in the second container and make the gasified solid or liquid elementary substance or/and compound in the second container enter into the first container to generate mist, the mist formed by either raising the pressure P of at least some part of the first container more than P 0 while maintaining the temperature T of the first container at T 0 or lowering the temperature T of the first container less than T 0 while maintaing the pressure P of the first container at P 0, where P 0 is saturated vapor pressure of the solid or liquid elementary substance and/or compound in the second container at temperature T 0, the mist being dispersed in the first container or a part of the first container; 6) turning on power supply equipment, generating mist gas discharge between the two electrodes in the first container to form new materials in the specific device or the material is subjected to mist gas discharge modification in a designated pressure in the first container.