A radio frequency, RF, control system comprising: a plurality of RF generators (16, 712b', 712b", 712c', 712c") configured to output a respective RF signal to a load (14, 718b, 718c), each RF generator including: a power amplifier configured to output the respective RF signal to the load; an energy detection circuit configured to determine an energy of the RF signal in accordance with a sensor signal received from a senor configured to monitor the RF signal and generate the sensor signal based on the RF signal; a feedback loop comprising a power feedback loop for power regulation and an energy feedback loop for energy regulation, wherein the power feedback loop is configured to generate a power control signal and wherein the energy feedback loop outputs an energy feedback error signal; an energy control module configured to receive the power control signal and the energy feedback error signal and to generate a control signal for varying the RF signal in accordance with the energy determined by the energy detection circuit, the control signal including a power adjustment and an energy adjustment; and a RF delivery coordination module, the RF delivery coordination module configured to receive the control signal and an input from an analysis module configured to receive a signal from an RF sensor (716b, 716c) coupled between the RF generators and the load and to generate a modulation signal to provide phase coherence between one RF generator (712b', 712c') of the plurality and an other RF generator (712b", 712c") of the plurality by synchronizing operation of the one RF generator to the other RF generator to control energy with respect to time for the RF signal output by each respective RF generator. a power amplifier configured to output the respective RF signal to the load; an energy detection circuit configured to determine an energy of the RF signal in accordance with a sensor signal received from a senor configured to monitor the RF signal and generate the sensor signal based on the RF signal; a feedback loop comprising a power feedback loop for power regulation and an energy feedback loop for energy regulation, wherein the power feedback loop is configured to generate a power control signal and wherein the energy feedback loop outputs an energy feedback error signal; an energy control module configured to receive the power control signal and the energy feedback error signal and to generate a control signal for varying the RF signal in accordance with the energy determined by the energy detection circuit, the control signal including a power adjustment and an energy adjustment; and a RF delivery coordination module, the RF delivery coordination module configured to receive the control signal and an input from an analysis module configured to receive a signal from an RF sensor (716b, 716c) coupled between the RF generators and the load and to generate a modulation signal to provide phase coherence between one RF generator (712b', 712c') of the plurality and an other RF generator (712b", 712c") of the plurality by synchronizing operation of the one RF generator to the other RF generator to control energy with respect to time for the RF signal output by each respective RF generator.