A radio frequency, RF, generation system (100, 200), including an RF generator, the RF generation system comprising: an impedance determination module adapted to receive an RF voltage and an RF current, and adapted to determine an RF generator impedance based on the RF voltage and the RF current, wherein the RF voltage and the RF current are received from an RF sensor and vary in accordance with the RF signal output by the RF generator; a control module adapted to determine a plurality of electrical values based on the determined RF generator impedance, wherein the electrical values include at least one of a capacitance, an inductance, and a resistance; a matching module (110, 208), configured to control a plurality of capacitors, inductors and resistors as constituent components, the matching module being adapted to: selectively adjust the plurality of capacitors, inductors and resistors, thereby matching an impedance of a load based on the determined RF generator impedance and on the plurality of electrical values; and determine a 2 port transfer function based on the plurality of electrical values, wherein determining includes either: i) directly measuring s-parameters of the matching network versus frequency and transforming the s-parameters into an ABCD parameters matrix; or ii) analytically determining the 2 port transfer functions of the constituent components of the matching module (110, 208) and multiplying the determined 2 port transfer functions to determine a composite 2 port ABCD parameters matrix versus frequency; wherein the 2 port transfer function is adapted for the control of the selective adjustment of the plurality of electrical values to match the impedance of the RF generator to the impedance of the load; the RF generation system further comprising a virtual sensor module adapted to estimate a load voltage, a load current, and a load impedance based on the RF voltage, the RF current, the RF generator impedance, and the 2 port transfer function. an impedance determination module adapted to receive an RF voltage and an RF current, and adapted to determine an RF generator impedance based on the RF voltage and the RF current, wherein the RF voltage and the RF current are received from an RF sensor and vary in accordance with the RF signal output by the RF generator; a control module adapted to determine a plurality of electrical values based on the determined RF generator impedance, wherein the electrical values include at least one of a capacitance, an inductance, and a resistance; a matching module (110, 208), configured to control a plurality of capacitors, inductors and resistors as constituent components, the matching module being adapted to: selectively adjust the plurality of capacitors, inductors and resistors, thereby matching an impedance of a load based on the determined RF generator impedance and on the plurality of electrical values; and determine a 2 port transfer function based on the plurality of electrical values, wherein determining includes either: i) directly measuring s-parameters of the matching network versus frequency and transforming the s-parameters into an ABCD parameters matrix; or ii) analytically determining the 2 port transfer functions of the constituent components of the matching module (110, 208) and multiplying the determined 2 port transfer functions to determine a composite 2 port ABCD parameters matrix versus frequency; wherein the 2 port transfer function is adapted for the control of the selective adjustment of the plurality of electrical values to match the impedance of the RF generator to the impedance of the load; selectively adjust the plurality of capacitors, inductors and resistors, thereby matching an impedance of a load based on the determined RF generator impedance and on the plurality of electrical values; and determine a 2 port transfer function based on the plurality of electrical values, wherein determining includes either: i) directly measuring s-parameters of the matching network versus frequency and transforming the s-parameters into an ABCD parameters matrix; or ii) analytically determining the 2 port transfer functions of the constituent components of the matching module (110, 208) and multiplying the determined 2 port transfer functions to determine a composite 2 port ABCD parameters matrix versus frequency; wherein the 2 port transfer function is adapted for the control of the selective adjustment of the plurality of electrical values to match the impedance of the RF generator to the impedance of the load; i) directly measuring s-parameters of the matching network versus frequency and transforming the s-parameters into an ABCD parameters matrix; or ii) analytically determining the 2 port transfer functions of the constituent components of the matching module (110, 208) and multiplying the determined 2 port transfer functions to determine a composite 2 port ABCD parameters matrix versus frequency; the RF generation system further comprising a virtual sensor module adapted to estimate a load voltage, a load current, and a load impedance based on the RF voltage, the RF current, the RF generator impedance, and the 2 port transfer function.