A resonant transducer comprising: a silicon single crystal substrate; a silicon single crystal resonator disposed over the silicon single crystal substrate; a shell made of silicon, the shell forming a chamber together with the silicon single crystal substrate, and the chamber surrounding the resonator; an exciting module configured to excite the resonator; a vibration detecting module configured to detect vibration of the resonator, the exciting module and the vibration detecting module being disposed in both sides of the resonator in a longitudinal direction keeping a predetermined gap from the resonator; wherein the shell comprises: a first layer disposed over the chamber, the first layer having a through-hole over the resonator; a second layer disposed over the first layer, the second layer covering a gap (29, 31) being positioned above the through-hole and being communicated with the through-hole, the gap (29, 31) extending from a first position at an upper side of the through-hole to a second position between the first layer and the second layer, and the second layer having non-empty spacers which are integral with the second layer, and which keep the gap (29, 31), to prevent the gap from being narrowed by stress; and a third layer covering the first layer and the second layer, and the third layer sealing the gap (29, 31). a silicon single crystal substrate; a silicon single crystal resonator disposed over the silicon single crystal substrate; a shell made of silicon, the shell forming a chamber together with the silicon single crystal substrate, and the chamber surrounding the resonator; an exciting module configured to excite the resonator; a vibration detecting module configured to detect vibration of the resonator, the exciting module and the vibration detecting module being disposed in both sides of the resonator in a longitudinal direction keeping a predetermined gap from the resonator; wherein the shell comprises: a first layer disposed over the chamber, the first layer having a through-hole over the resonator; a second layer disposed over the first layer, the second layer covering a gap (29, 31) being positioned above the through-hole and being communicated with the through-hole, the gap (29, 31) extending from a first position at an upper side of the through-hole to a second position between the first layer and the second layer, and the second layer having non-empty spacers which are integral with the second layer, and which keep the gap (29, 31), to prevent the gap from being narrowed by stress; and a third layer covering the first layer and the second layer, and the third layer sealing the gap (29, 31). a first layer disposed over the chamber, the first layer having a through-hole over the resonator; a second layer disposed over the first layer, the second layer covering a gap (29, 31) being positioned above the through-hole and being communicated with the through-hole, the gap (29, 31) extending from a first position at an upper side of the through-hole to a second position between the first layer and the second layer, and the second layer having non-empty spacers which are integral with the second layer, and which keep the gap (29, 31), to prevent the gap from being narrowed by stress; and a third layer covering the first layer and the second layer, and the third layer sealing the gap (29, 31).