A device for transporting a substrate in an XY-plane between working areas (2, 3, 22) in a chamber, comprising: (a) transport means being movable in the XY-plane between the working areas (2, 3, 22), (b) at least one sealing frame being held in the transport means in a manner deflectable in a Z-direction perpendicular with respect to the XY-plane, wherein the sealing frame has a first and a second sealing surface (10, 11) opposing one another preferably in Z-direction for sealing a space of a working area (2, 3, 22) comprising a working station (15, 18, 30), and wherein the sealing frame comprises a substrate support for receiving the substrate, (c) closure means (16, 21, 24) configured such that, by pressing against the first sealing surface of the deflectable sealing frame, it deflects the sealing frame in the Z-direction perpendicular with respect to the XY-plane of the transport direction until the second sealing surface of the deflectable sealing frame contacts the chamber wall (32, 31) neighboring the working station (15, 18, 30), so that due to the contact of the opposing sealing surfaces (10, 11) with the closure means (16, 21, 24) as well as with the chamber wall (32, 31) the area inside the sealing frame is sealed in a vacuum-tight manner in order to thus seal a space around a working station (15, 18, 30), and (d) means with a first spring (F 1) and at least one second spring (F 2) for holding the deflectable sealing frame without exertion of an external force in a central position in the Z-direction relative to the transport means and for deflecting the sealing frame from the central position in the Z-direction, wherein the forces of the at least two springs act in opposite directions perpendicular to the XY-plane, characterized in that the second spring (F 2) is acting in the Z-direction and arranged between a lower protrusion of the transport means and a connecting element, which is rigidly coupled with the sealing frame, and wherein the first spring (F 1) is arranged between an upper protrusion of the transport means and the connecting element, and wherein the first spring (F 1) and the second spring (F 2) are arranged side by side. (a) transport means being movable in the XY-plane between the working areas (2, 3, 22), (b) at least one sealing frame being held in the transport means in a manner deflectable in a Z-direction perpendicular with respect to the XY-plane, wherein the sealing frame has a first and a second sealing surface (10, 11) opposing one another preferably in Z-direction for sealing a space of a working area (2, 3, 22) comprising a working station (15, 18, 30), and wherein the sealing frame comprises a substrate support for receiving the substrate, (c) closure means (16, 21, 24) configured such that, by pressing against the first sealing surface of the deflectable sealing frame, it deflects the sealing frame in the Z-direction perpendicular with respect to the XY-plane of the transport direction until the second sealing surface of the deflectable sealing frame contacts the chamber wall (32, 31) neighboring the working station (15, 18, 30), so that due to the contact of the opposing sealing surfaces (10, 11) with the closure means (16, 21, 24) as well as with the chamber wall (32, 31) the area inside the sealing frame is sealed in a vacuum-tight manner in order to thus seal a space around a working station (15, 18, 30), and (d) means with a first spring (F 1) and at least one second spring (F 2) for holding the deflectable sealing frame without exertion of an external force in a central position in the Z-direction relative to the transport means and for deflecting the sealing frame from the central position in the Z-direction, wherein the forces of the at least two springs act in opposite directions perpendicular to the XY-plane, characterized in that the second spring (F 2) is acting in the Z-direction and arranged between a lower protrusion of the transport means and a connecting element, which is rigidly coupled with the sealing frame, and wherein the first spring (F 1) is arranged between an upper protrusion of the transport means and the connecting element, and wherein the first spring (F 1) and the second spring (F 2) are arranged side by side.