A process for producing a fluorinated quartz glass, comprising the following process steps: a. providing a SiO 2 soot body; b. reacting of the SiO 2 soot body with a fluorinating agent having a boiling point greater than or equal to -10 °C to obtain a fluorinated SiO 2 soot body; c. vitrifying the fluorinated SiO 2 soot body, wherein the fluorination provided in step b. is carried out with a fluorinating agent selected from the group consisting of i. oxygen-containing fluorinating agents; ii. nitrile-containing fluorinating agents; iii. mixtures of oxygen-containing and nitrile-containing fluorinating agents, characterized in that the oxygen-containing fluorinating agents are selected from the group consisting of i. Perfluoroketones of the general formula R F1 -CO-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; and R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; ii. Perfluoroethers of general formula R F1 -C(X 1)(X 2)O-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; and X 1 and X 2 are fluorine or CF 3; iii. Hydrofluoroethers of the general formula R F1 -C(X 1)(X 2)O-R 2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine, R 2 is a non-fluorinated hydrocarbon group having 1 to 3 carbon atoms; and X 1 and X 2 are fluorine or CF 3. a. providing a SiO 2 soot body; b. reacting of the SiO 2 soot body with a fluorinating agent having a boiling point greater than or equal to -10 °C to obtain a fluorinated SiO 2 soot body; c. vitrifying the fluorinated SiO 2 soot body, wherein the fluorination provided in step b. is carried out with a fluorinating agent selected from the group consisting of i. oxygen-containing fluorinating agents; ii. nitrile-containing fluorinating agents; iii. mixtures of oxygen-containing and nitrile-containing fluorinating agents, i. oxygen-containing fluorinating agents; ii. nitrile-containing fluorinating agents; iii. mixtures of oxygen-containing and nitrile-containing fluorinating agents, characterized in that the oxygen-containing fluorinating agents are selected from the group consisting of i. Perfluoroketones of the general formula R F1 -CO-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; and R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; ii. Perfluoroethers of general formula R F1 -C(X 1)(X 2)O-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; and X 1 and X 2 are fluorine or CF 3; iii. Hydrofluoroethers of the general formula R F1 -C(X 1)(X 2)O-R 2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine, R 2 is a non-fluorinated hydrocarbon group having 1 to 3 carbon atoms; and X 1 and X 2 are fluorine or CF 3. i. Perfluoroketones of the general formula R F1 -CO-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; and R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; ii. Perfluoroethers of general formula R F1 -C(X 1)(X 2)O-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; and X 1 and X 2 are fluorine or CF 3; iii. Hydrofluoroethers of the general formula R F1 -C(X 1)(X 2)O-R 2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine, R 2 is a non-fluorinated hydrocarbon group having 1 to 3 carbon atoms; and X 1 and X 2 are fluorine or CF 3.