Pulse light source device, being configured for creating fs output laser pulses (1, 1.1, 1.2, 1.3) having carrier-envelope-phase CEP stability, comprising - a pulse source device including a ps laser pulse source, which is arranged for creating primary ps laser pulses, - a first beam splitting device, which is arranged for splitting the primary ps laser pulses to first ps laser pulses (2.1) and second ps laser pulses (2.2), - a pulse shortening device, which is arranged for creating first sub-ps laser pulses by shortening and spectrally broadening the first ps laser pulses (2.1) using an optical nonlinear process, wherein the pulse shortening device includes a cross-polarized wave generation unit, - a primary supercontinuum generation device, which is arranged for creating primary fs laser pulses by subjecting the first sub-ps laser pulses to a supercontinuum generation process, - a pulse stretcher device, which is arranged for creating stretched ps laser pulses (5, 5.1) by stretching the primary fs laser pulses, - a first optical parametric chirped-pulse amplification OPCPA device, which is arranged for creating first amplified ps laser pulses (6, 6.1) on the basis of the stretched ps laser pulses (5, 5.1) and the second ps laser pulses (2.2), - a first phase stabilization device, which is arranged for creating first CEP stable ps laser pulses (7, 7.1) by difference frequency generation of the first amplified ps laser pulses (6, 6.1) and reference laser pulses derived from the primary ps laser pulses or from the first sub-ps laser pulses, - a first pulse compressor device, which is arranged for creating first compressed fs laser pulses (8, 8.1) by compressing the first CEP stable ps laser pulses (7, 7.1) output by the first phase stabilization device, and - a first secondary supercontinuum generation device, which is arranged for creating first fs output laser pulses as the fs output laser pulses (1, 1.1) to be obtained by spectrally broadening the first compressed fs laser pulses (8, 8.1). - a pulse source device including a ps laser pulse source, which is arranged for creating primary ps laser pulses, - a first beam splitting device, which is arranged for splitting the primary ps laser pulses to first ps laser pulses (2.1) and second ps laser pulses (2.2), - a pulse shortening device, which is arranged for creating first sub-ps laser pulses by shortening and spectrally broadening the first ps laser pulses (2.1) using an optical nonlinear process, wherein the pulse shortening device includes a cross-polarized wave generation unit, - a primary supercontinuum generation device, which is arranged for creating primary fs laser pulses by subjecting the first sub-ps laser pulses to a supercontinuum generation process, - a pulse stretcher device, which is arranged for creating stretched ps laser pulses (5, 5.1) by stretching the primary fs laser pulses, - a first optical parametric chirped-pulse amplification OPCPA device, which is arranged for creating first amplified ps laser pulses (6, 6.1) on the basis of the stretched ps laser pulses (5, 5.1) and the second ps laser pulses (2.2), - a first phase stabilization device, which is arranged for creating first CEP stable ps laser pulses (7, 7.1) by difference frequency generation of the first amplified ps laser pulses (6, 6.1) and reference laser pulses derived from the primary ps laser pulses or from the first sub-ps laser pulses, - a first pulse compressor device, which is arranged for creating first compressed fs laser pulses (8, 8.1) by compressing the first CEP stable ps laser pulses (7, 7.1) output by the first phase stabilization device, and - a first secondary supercontinuum generation device, which is arranged for creating first fs output laser pulses as the fs output laser pulses (1, 1.1) to be obtained by spectrally broadening the first compressed fs laser pulses (8, 8.1).