A composition for selectively removing PVD titanium nitride of the formula TiN or TiNxOy, where x = 0 to 1.3 and y = 0 to 2 from a semiconductor device comprising the PVD titanium nitride and a second material selected from the group consisting of Cu, Co, CVD titanium nitride, dielectric material, low-k dielectric material, and combinations thereof, the composition comprising: 1 to 20 wt % peroxide, 1-5 wt% base, wherein the base is selected from the group consisting of tetraethylammonium hydroxide, trimethylphenylammonium hydroxide, tetramethylammonium hydroxide, tetrabutylammonium hydroxide, choline hydroxide, ammonium hydroxide, and combinations thereof, 0.1-1 wt% weak acid, wherein the weak acid is carboxylic acid selected from the group consisting of citric acid, oxalic acid, malonic acid, lactic acid, adipic acid, acetic acid, iminodiacetic acid, and combinations thereof, 0.5 to 2 wt% ammonium salt, wherein the ammonium salt is selected from the group consisting of ammonium citrate, ammonium acetate, ammonium malonate, ammonium adipate, ammonium lactate, ammonium iminodiacetate, ammonium chloride, ammonium bromide, ammonium fluoride, ammonium bifluoride, ammonium sulfate, and combinations thereof, 25 to 5000 ppm corrosion inhibitor, wherein the corrosion inhibitor is selected from the group consisting of 1,2,4-triazole, benzotriazole, methyl-1H-benzotriazole, 2-aminobenthothiazole, benzimidazole, 2-mercapto-5-methylbenzimidaole, 8-hydroxyquinoline, 1-thioglycerol, ascorbic acid, pyrazole, and combinations thereof or 1 -15 wt % of a long chain or mixed alkylammonium hydroxide, wherein the long chain or mixed alkylammonium hydroxide is selected from the group consisting of trimethylphenylammonium hydroxide, choline hydroxide, tetrabutylammonium hydroxide and mixed tetraalkylammonium hydroxide, wherein the alkylammonium cation contains alkyl groups of at least two different chain lengths, 10 to 5000 ppm, long chain organic amine or polyalkylamine, wherein the long chain organic amine or polyalkylamine is selected from the group consisting of hexylamine, surfactant salts of hexylamine, octylamine, surfactant salts of octylamine, dicyclohexylamine, surfactant salts of dicyclohexylamine, polyethyleneimine, surfactant salts of polyethyleneimine, decylamine, surfactant salts of decylamine, dodecylamine, surfactant salts of dodecylamine, and combinations thereof, and the rest is solvent, wherein the composition has a pH ranging from 7 to 11.5. 1 to 20 wt % peroxide, 1-5 wt% base, wherein the base is selected from the group consisting of tetraethylammonium hydroxide, trimethylphenylammonium hydroxide, tetramethylammonium hydroxide, tetrabutylammonium hydroxide, choline hydroxide, ammonium hydroxide, and combinations thereof, 0.1-1 wt% weak acid, wherein the weak acid is carboxylic acid selected from the group consisting of citric acid, oxalic acid, malonic acid, lactic acid, adipic acid, acetic acid, iminodiacetic acid, and combinations thereof, 0.5 to 2 wt% ammonium salt, wherein the ammonium salt is selected from the group consisting of ammonium citrate, ammonium acetate, ammonium malonate, ammonium adipate, ammonium lactate, ammonium iminodiacetate, ammonium chloride, ammonium bromide, ammonium fluoride, ammonium bifluoride, ammonium sulfate, and combinations thereof, 25 to 5000 ppm corrosion inhibitor, wherein the corrosion inhibitor is selected from the group consisting of 1,2,4-triazole, benzotriazole, methyl-1H-benzotriazole, 2-aminobenthothiazole, benzimidazole, 2-mercapto-5-methylbenzimidaole, 8-hydroxyquinoline, 1-thioglycerol, ascorbic acid, pyrazole, and combinations thereof or 1 -15 wt % of a long chain or mixed alkylammonium hydroxide, wherein the long chain or mixed alkylammonium hydroxide is selected from the group consisting of trimethylphenylammonium hydroxide, choline hydroxide, tetrabutylammonium hydroxide and mixed tetraalkylammonium hydroxide, wherein the alkylammonium cation contains alkyl groups of at least two different chain lengths, 10 to 5000 ppm, long chain organic amine or polyalkylamine, wherein the long chain organic amine or polyalkylamine is selected from the group consisting of hexylamine, surfactant salts of hexylamine, octylamine, surfactant salts of octylamine, dicyclohexylamine, surfactant salts of dicyclohexylamine, polyethyleneimine, surfactant salts of polyethyleneimine, decylamine, surfactant salts of decylamine, dodecylamine, surfactant salts of dodecylamine, and combinations thereof, and the rest is solvent, wherein the composition has a pH ranging from 7 to 11.5.