A method of forming a fiber coupling device, which fiber coupling device comprises a substrate comprising a substrate surface and at least one opto-electronic and/or photonic element and further comprises at least one fiber coupling alignment structure that is optically transmissive, - wherein the method at least comprises: a) applying a polymerizable material to the substrate surface of the substrate, b) selectively polymerizing, using a method of 3D lithography executed by performing 3D laser scanning by means of a laser beam, a region of the polymerizable material so as to convert the region of the polymerizable material into a polymer material, thereby forming at least one fiber coupling alignment structure that is arranged on the substrate surface of the substrate and that comprises: - a support interface surface at which the polymer material is in direct contact with the substrate surface of the substrate, - a fiber support region adapted to support at least one optical fiber in an aligned position for optical coupling to the at least one opto-electronic and/or photonic element of the substrate, and - a reflection surface for reflecting light propagating between an optical fiber and the substrate, and c) cleaning the substrate and the polymer material from remaining non-polymerized polymerizable material, thereby exposing the at least one fiber coupling alignment structure of the fiber coupling device, - wherein performing 3D laser scanning comprises measuring a real-time position of the optoelectronic and/or photonic element relative to a focal region of the laser beam, relative to a partially fabricated polymer structure or relative to a predefined reference position for starting polymerization on the substrate, and - wherein any offset of the measured real-time position from a predefined default position of the optoelectronic and/or photonic element is compensated by shifting, before and/or during selective polymerizing, the position of the laser beam, of its focal region and/or of the substrate. - wherein the method at least comprises: a) applying a polymerizable material to the substrate surface of the substrate, b) selectively polymerizing, using a method of 3D lithography executed by performing 3D laser scanning by means of a laser beam, a region of the polymerizable material so as to convert the region of the polymerizable material into a polymer material, thereby forming at least one fiber coupling alignment structure that is arranged on the substrate surface of the substrate and that comprises: - a support interface surface at which the polymer material is in direct contact with the substrate surface of the substrate, - a fiber support region adapted to support at least one optical fiber in an aligned position for optical coupling to the at least one opto-electronic and/or photonic element of the substrate, and - a reflection surface for reflecting light propagating between an optical fiber and the substrate, and c) cleaning the substrate and the polymer material from remaining non-polymerized polymerizable material, thereby exposing the at least one fiber coupling alignment structure of the fiber coupling device, a) applying a polymerizable material to the substrate surface of the substrate, b) selectively polymerizing, using a method of 3D lithography executed by performing 3D laser scanning by means of a laser beam, a region of the polymerizable material so as to convert the region of the polymerizable material into a polymer material, thereby forming at least one fiber coupling alignment structure that is arranged on the substrate surface of the substrate and that comprises: - a support interface surface at which the polymer material is in direct contact with the substrate surface of the substrate, - a fiber support region adapted to support at least one optical fiber in an aligned position for optical coupling to the at least one opto-electronic and/or photonic element of the substrate, and - a reflection surface for reflecting light propagating between an optical fiber and the substrate, and - a support interface surface at which the polymer material is in direct contact with the substrate surface of the substrate, - a fiber support region adapted to support at least one optical fiber in an aligned position for optical coupling to the at least one opto-electronic and/or photonic element of the substrate, and - a reflection surface for reflecting light propagating between an optical fiber and the substrate, and c) cleaning the substrate and the polymer material from remaining non-polymerized polymerizable material, thereby exposing the at least one fiber coupling alignment structure of the fiber coupling device, - wherein performing 3D laser scanning comprises measuring a real-time position of the optoelectronic and/or photonic element relative to a focal region of the laser beam, relative to a partially fabricated polymer structure or relative to a predefined reference position for starting polymerization on the substrate, and - wherein any offset of the measured real-time position from a predefined default position of the optoelectronic and/or photonic element is compensated by shifting, before and/or during selective polymerizing, the position of the laser beam, of its focal region and/or of the substrate.