Apparatus for atomic layer deposition on a surface of a sheeted substrate, comprising: - an injector head comprising ∘ a deposition space provided with a precursor supply and a precursor drain; said supply and drain arranged for providing a precursor gas flow from the precursor supply via the deposition space to the precursor drain; the deposition space in use being bounded by the injector head and the substrate surface; ∘ a gas bearing comprising a bearing gas injector arranged for injecting a bearing gas between the injector head and the substrate surface, the bearing gas thus forming a gas-bearing; - a support part arranged opposite the injector head, the support part constructed to provide a gas bearing pressure arrangement that counters the injector head gas-bearing pressure in the conveying plane, so that the substrate is balanced supportless by said gas bearing pressure arrangement in between the injector head and the support part; and - a conveying system comprising a drive section; ∘ the drive section comprising transport elements arranged to provide relative movement of the substrate and the injector head along a plane of the substrate to form a conveying plane along which the substrate is conveyed towards the injector head in a conveying direction; and ∘ a centering air bearing comprising centering-bearing gas supplies that are provided sideways to the drive section along the direction of the relative movement, the supplies, in use, arranged opposite the planar faces of the substrate, and each ending in a recessed space extending along the substrate's planar face towards and beyond the sides of the substrate, to provide a bearing gas flow towards the substrate planar face, so that, in use a bearing pressure is provided against a side face of the substrate so as to center the substrate along the conveying direction. - an injector head comprising ∘ a deposition space provided with a precursor supply and a precursor drain; said supply and drain arranged for providing a precursor gas flow from the precursor supply via the deposition space to the precursor drain; the deposition space in use being bounded by the injector head and the substrate surface; ∘ a gas bearing comprising a bearing gas injector arranged for injecting a bearing gas between the injector head and the substrate surface, the bearing gas thus forming a gas-bearing; ∘ a deposition space provided with a precursor supply and a precursor drain; said supply and drain arranged for providing a precursor gas flow from the precursor supply via the deposition space to the precursor drain; the deposition space in use being bounded by the injector head and the substrate surface; ∘ a gas bearing comprising a bearing gas injector arranged for injecting a bearing gas between the injector head and the substrate surface, the bearing gas thus forming a gas-bearing; - a support part arranged opposite the injector head, the support part constructed to provide a gas bearing pressure arrangement that counters the injector head gas-bearing pressure in the conveying plane, so that the substrate is balanced supportless by said gas bearing pressure arrangement in between the injector head and the support part; and - a conveying system comprising a drive section; ∘ the drive section comprising transport elements arranged to provide relative movement of the substrate and the injector head along a plane of the substrate to form a conveying plane along which the substrate is conveyed towards the injector head in a conveying direction; and ∘ a centering air bearing comprising centering-bearing gas supplies that are provided sideways to the drive section along the direction of the relative movement, the supplies, in use, arranged opposite the planar faces of the substrate, and each ending in a recessed space extending along the substrate's planar face towards and beyond the sides of the substrate, to provide a bearing gas flow towards the substrate planar face, so that, in use a bearing pressure is provided against a side face of the substrate so as to center the substrate along the conveying direction. ∘ the drive section comprising transport elements arranged to provide relative movement of the substrate and the injector head along a plane of the substrate to form a conveying plane along which the substrate is conveyed towards the injector head in a conveying direction; and ∘ a centering air bearing comprising centering-bearing gas supplies that are provided sideways to the drive section along the direction of the relative movement, the supplies, in use, arranged opposite the planar faces of the substrate, and each ending in a recessed space extending along the substrate's planar face towards and beyond the sides of the substrate, to provide a bearing gas flow towards the substrate planar face, so that, in use a bearing pressure is provided against a side face of the substrate so as to center the substrate along the conveying direction.