A Neutral particle beam source comprising a plasma generating source with a plasma chamber; and one or more neutralizing reflecting plate with high conductivity, installed in the plasma chamber; wherein the plasma generating source comprising: the plasma chamber which forms plasma generating space; at least one pair of belt type magnets that surround the outer wall of the plasma chamber; and a microwave irradiating equipment that irradiates microwave into the plasma generating space; wherein the microwave irradiating equipment is configured to irradiate microwaves in pulse mode or in continuous mode; and wherein the neutralizing reflecting plate is adhered along the inside wall of the plasma chamber to be surrounded by the magnetic field formed in the plasma generating space by said at least one pair of belt type magnets, and wherein more than one neutralizing reflecting plate is further arranged parallel on the upper side of said plasma chamber, such that a neutral particle beam is generated; characterized in that said at least one pair of belt type magnets comprises an upper belt type magnet surrounding the outer wall of the plasma chamber, and a lower belt type magnet which is arranged lower than the upper belt type magnet and surrounds the outer wall of the plasma chamber, and wherein the upper belt type magnet is arranged in parallel to the lower belt type magnet, and wherein a magnetic field is formed by said at least one pair of belt type magnets inside of the plasma generating space, and wherein said microwave irradiating equipment includes ring type wave guide, toroidal type wave guide or track type wave guide, being mounted on the upper side of the plasma chamber, and wherein said wave guides includes a slit which is an opening without a window and microwave is incident through the slit into the plasma chamber, and wherein said plasma chamber and microwave irradiating equipment are vacuumed together, and wherein microwave irradiated into the magnetic-field formed in the plasma generating space by said at least one pair of belt type magnets forms ECR (Electron Cyclotron Resonance) plasma to enhance plasma density along magnetic field distribution. the plasma chamber which forms plasma generating space; at least one pair of belt type magnets that surround the outer wall of the plasma chamber; and a microwave irradiating equipment that irradiates microwave into the plasma generating space; wherein the microwave irradiating equipment is configured to irradiate microwaves in pulse mode or in continuous mode; and wherein the neutralizing reflecting plate is adhered along the inside wall of the plasma chamber to be surrounded by the magnetic field formed in the plasma generating space by said at least one pair of belt type magnets, and wherein more than one neutralizing reflecting plate is further arranged parallel on the upper side of said plasma chamber, such that a neutral particle beam is generated; characterized in that said at least one pair of belt type magnets comprises an upper belt type magnet surrounding the outer wall of the plasma chamber, and a lower belt type magnet which is arranged lower than the upper belt type magnet and surrounds the outer wall of the plasma chamber, and wherein the upper belt type magnet is arranged in parallel to the lower belt type magnet, and wherein a magnetic field is formed by said at least one pair of belt type magnets inside of the plasma generating space, and wherein said microwave irradiating equipment includes ring type wave guide, toroidal type wave guide or track type wave guide, being mounted on the upper side of the plasma chamber, and wherein said wave guides includes a slit which is an opening without a window and microwave is incident through the slit into the plasma chamber, and wherein said plasma chamber and microwave irradiating equipment are vacuumed together, and wherein microwave irradiated into the magnetic-field formed in the plasma generating space by said at least one pair of belt type magnets forms ECR (Electron Cyclotron Resonance) plasma to enhance plasma density along magnetic field distribution.