A method of calibrating a humidity sensor device, comprising the steps a) determining a first dew point and a first relative humidity at a first temperature in an environment by the humidity sensor device using a first calibration offset; b) subsequently heating the humidity sensor device, in particular, by self-heating, thereby heating the environment to a second temperature higher than the first temperature; c) subsequently determining a second dew point at the second temperature by the humidity sensor device; d) subsequently determining whether the determined second dew point differs from the determined first dew point by more than a predetermined difference; characterized in that said method also comprises the steps: e) subsequently changing the first calibration offset of the humidity sensor device by a predetermined value being some predetermined fraction of the first calibration offset to obtain a second calibration offset, if it is determined that the determined second dew point differs from the determined first dew point by more than the predetermined difference; and f) determining a new value of the first dew point based on the changed calibration offset; g) subsequently determining a third dew point at a third temperature by the humidity sensor device; h) subsequently determining whether the determined third dew point differs from the determined new value of the first dew point by more than a predetermined difference; and i) subsequently changing the calibration offset of the humidity sensor device by the predetermined value, if it is determined that the determined third dew point differs from the determined new value of the first dew point by more than the predetermined difference; and repeating the steps f) to i) until the determined respective dew point determined in step g) differs from the determined respective new value of the first dew point determined in step f) by not more than the predetermined difference. a) determining a first dew point and a first relative humidity at a first temperature in an environment by the humidity sensor device using a first calibration offset; b) subsequently heating the humidity sensor device, in particular, by self-heating, thereby heating the environment to a second temperature higher than the first temperature; c) subsequently determining a second dew point at the second temperature by the humidity sensor device; d) subsequently determining whether the determined second dew point differs from the determined first dew point by more than a predetermined difference; characterized in that said method also comprises the steps: e) subsequently changing the first calibration offset of the humidity sensor device by a predetermined value being some predetermined fraction of the first calibration offset to obtain a second calibration offset, if it is determined that the determined second dew point differs from the determined first dew point by more than the predetermined difference; and f) determining a new value of the first dew point based on the changed calibration offset; g) subsequently determining a third dew point at a third temperature by the humidity sensor device; h) subsequently determining whether the determined third dew point differs from the determined new value of the first dew point by more than a predetermined difference; and i) subsequently changing the calibration offset of the humidity sensor device by the predetermined value, if it is determined that the determined third dew point differs from the determined new value of the first dew point by more than the predetermined difference; and repeating the steps f) to i) until the determined respective dew point determined in step g) differs from the determined respective new value of the first dew point determined in step f) by not more than the predetermined difference.