A distribution body for distributing a process gas relative to a substrate to treat the substrate by means of the process gas, comprising: - a distribution plate, - at least one gas inlet channel, - a plurality of gas distribution channels, and - a plurality of gas extraction channels, wherein the gas inlet channel extends from a lateral surface of the distribution plate to an interior of the distribution plate, wherein the gas distribution channels branch off from the at least one gas inlet channel and extend to a substrate-facing surface of the distribution plate to supply process gas to the substrate to be treated, wherein the gas distribution channels are directed essentially perpendicular to the substrate-facing surface, wherein the gas extraction channels extend from the substrate-facing surface to another surface of the distribution plate to convey gas away from the substrate, wherein a single opening of the gas distribution channels in the substrate-facing surface is surrounded by several openings of gas extraction channels arranged on an imaginary circular line around the opening of the gas distribution channels as imaginary circle centre, and wherein the openings of the gas distribution channels have a diameter larger than a diameter of the openings of the gas extraction channels, a summation of the cross sections of all openings of the gas distribution channels in the substrate-facing surface being equal to or smaller than a summation of the cross sections of all openings of the gas extraction channels in the substrate-facing surface. - a distribution plate, - at least one gas inlet channel, - a plurality of gas distribution channels, and - a plurality of gas extraction channels, wherein the gas inlet channel extends from a lateral surface of the distribution plate to an interior of the distribution plate, wherein the gas distribution channels branch off from the at least one gas inlet channel and extend to a substrate-facing surface of the distribution plate to supply process gas to the substrate to be treated, wherein the gas distribution channels are directed essentially perpendicular to the substrate-facing surface, wherein the gas extraction channels extend from the substrate-facing surface to another surface of the distribution plate to convey gas away from the substrate, wherein a single opening of the gas distribution channels in the substrate-facing surface is surrounded by several openings of gas extraction channels arranged on an imaginary circular line around the opening of the gas distribution channels as imaginary circle centre, and wherein the openings of the gas distribution channels have a diameter larger than a diameter of the openings of the gas extraction channels, a summation of the cross sections of all openings of the gas distribution channels in the substrate-facing surface being equal to or smaller than a summation of the cross sections of all openings of the gas extraction channels in the substrate-facing surface. wherein the gas inlet channel extends from a lateral surface of the distribution plate to an interior of the distribution plate, wherein the gas distribution channels branch off from the at least one gas inlet channel and extend to a substrate-facing surface of the distribution plate to supply process gas to the substrate to be treated, wherein the gas distribution channels are directed essentially perpendicular to the substrate-facing surface, wherein the gas extraction channels extend from the substrate-facing surface to another surface of the distribution plate to convey gas away from the substrate, wherein a single opening of the gas distribution channels in the substrate-facing surface is surrounded by several openings of gas extraction channels arranged on an imaginary circular line around the opening of the gas distribution channels as imaginary circle centre, and wherein the openings of the gas distribution channels have a diameter larger than a diameter of the openings of the gas extraction channels, a summation of the cross sections of all openings of the gas distribution channels in the substrate-facing surface being equal to or smaller than a summation of the cross sections of all openings of the gas extraction channels in the substrate-facing surface.