A laminate substrate measurement method for a laminate substrate having: a base substrate; a measurement-target layer; and an absorption layer positioned between the base substrate and the measurement-target layer, wherein the measurement-target layer includes: a measurement-target monolayer which is a monolayer or a measurement-target laminate layer formed by laminating a plurality of the measurement-target monolayers, the laminate substrate measurement method comprises: emitting incident light including light with a wavelength shorter than a threshold wavelength toward a surface of the laminate substrate on a side on which the measurement-target layer is positioned; measuring reflected light of the incident light from the laminate substrate; and extracting mutually independent 2n, wherein n is a layer count of the measurement-target monolayers included in the measurement-target layer and is an integer equal to one or larger, or more reflected light-related values for wavelengths equal to the threshold wavelength or shorter, said reflected light-related values being spectroscopic ellipsometric data; and calculating values related to the measurement-target monolayers for each measurement-target monolayer included in the measurement-target layer using the extracted 2n or more reflected light-related values, and the threshold wavelength used is a maximum wavelength in a wavelength range over which an absolute value of a first-order derivative dk(λ)/dλ, obtained if an extinction coefficient k of the absorption layer is expressed as a function k(λ) of a wavelength λ expressed in nm becomes equal to an extinction derivative threshold value or lower, said extinction derivative threshold value referring to a value defined to indicate where the extinction coefficient changes rapidly. the measurement-target layer includes: a measurement-target monolayer which is a monolayer or a measurement-target laminate layer formed by laminating a plurality of the measurement-target monolayers, the laminate substrate measurement method comprises: emitting incident light including light with a wavelength shorter than a threshold wavelength toward a surface of the laminate substrate on a side on which the measurement-target layer is positioned; measuring reflected light of the incident light from the laminate substrate; and extracting mutually independent 2n, wherein n is a layer count of the measurement-target monolayers included in the measurement-target layer and is an integer equal to one or larger, or more reflected light-related values for wavelengths equal to the threshold wavelength or shorter, said reflected light-related values being spectroscopic ellipsometric data; and calculating values related to the measurement-target monolayers for each measurement-target monolayer included in the measurement-target layer using the extracted 2n or more reflected light-related values, and emitting incident light including light with a wavelength shorter than a threshold wavelength toward a surface of the laminate substrate on a side on which the measurement-target layer is positioned; measuring reflected light of the incident light from the laminate substrate; and extracting mutually independent 2n, wherein n is a layer count of the measurement-target monolayers included in the measurement-target layer and is an integer equal to one or larger, or more reflected light-related values for wavelengths equal to the threshold wavelength or shorter, said reflected light-related values being spectroscopic ellipsometric data; and calculating values related to the measurement-target monolayers for each measurement-target monolayer included in the measurement-target layer using the extracted 2n or more reflected light-related values, and the threshold wavelength used is a maximum wavelength in a wavelength range over which an absolute value of a first-order derivative dk(λ)/dλ, obtained if an extinction coefficient k of the absorption layer is expressed as a function k(λ) of a wavelength λ expressed in nm becomes equal to an extinction derivative threshold value or lower, said extinction derivative threshold value referring to a value defined to indicate where the extinction coefficient changes rapidly.