A conveyance apparatus that conveys a substrate (P(n)), comprising: a substrate loading portion configured to load the substrate on the conveyance apparatus; an intermittent feeding unit configured to intermittently feed the substrate loaded on the conveyance apparatus; a substrate discharge portion configured to discharge the intermittently fed substrate to the outside of the conveyance apparatus; and a controller configured to control conveyance of the substrate, said substrate loading portion, said intermittent feeding unit, said substrate discharge portion being arranged from an upstream side to a downstream side along a substrate conveyance direction, wherein the substrate loading portion has a substrate loading inlet that includes a first conveyance path configured to convey the substrate; a first sensor provided in the vicinity of the substrate loading inlet thereof, and a second sensor arranged in a downstream side of the first sensor along the substrate conveyance direction, the intermittent feeding unit has an upstream end along the substrate conveyance direction that includes a second conveyance path for conveying the substrate, and a third sensor placed in the vicinity of the upstream end thereof, and the controller controls conveyance of the substrate using the first conveyance path and the second conveyance path by determining a position of the substrate depending on presence of the substrate detected by the first, second, and third sensors (20A, 20B, 20C); wherein the first conveyance path includes a pusher configured to push the substrate conveyed on the first conveyance path to the second conveyance path; and when the third sensor detects a preceding substrate out of the substrates conveyed by the conveyance apparatus, and the second sensor detects a front end of a following substrate, the controller suspends conveyance of the following substrate. a substrate loading portion configured to load the substrate on the conveyance apparatus; an intermittent feeding unit configured to intermittently feed the substrate loaded on the conveyance apparatus; a substrate discharge portion configured to discharge the intermittently fed substrate to the outside of the conveyance apparatus; and a controller configured to control conveyance of the substrate, said substrate loading portion, said intermittent feeding unit, said substrate discharge portion being arranged from an upstream side to a downstream side along a substrate conveyance direction, wherein the substrate loading portion has a substrate loading inlet that includes a first conveyance path configured to convey the substrate; a first sensor provided in the vicinity of the substrate loading inlet thereof, and a second sensor arranged in a downstream side of the first sensor along the substrate conveyance direction, a first conveyance path configured to convey the substrate; a first sensor provided in the vicinity of the substrate loading inlet thereof, and a second sensor arranged in a downstream side of the first sensor along the substrate conveyance direction, the intermittent feeding unit has an upstream end along the substrate conveyance direction that includes a second conveyance path for conveying the substrate, and a third sensor placed in the vicinity of the upstream end thereof, and a second conveyance path for conveying the substrate, and a third sensor placed in the vicinity of the upstream end thereof, and the controller controls conveyance of the substrate using the first conveyance path and the second conveyance path by determining a position of the substrate depending on presence of the substrate detected by the first, second, and third sensors (20A, 20B, 20C); wherein the first conveyance path includes a pusher configured to push the substrate conveyed on the first conveyance path to the second conveyance path; and when the third sensor detects a preceding substrate out of the substrates conveyed by the conveyance apparatus, and the second sensor detects a front end of a following substrate, the controller suspends conveyance of the following substrate.