A process for preparing a cyclic siloxazane comprising: 1) combining starting materials comprising a) an allyl-functional amine, b) a platinum catalyst capable of catalyzing hydrosilylation reaction, c) a hydrosilylation reaction promoter of formula where - - - - - represents a bond selected from the group consisting of a double bond and a triple bond, subscript a is 1 or 2, subscript b is 0 or 1, with the provisos that when - - - - - is a double bond, then a = 2 and b = 1, and when - - - - - is a triple bond, then a = 1 and b = 0; each R 1 is independently selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms; R 2 is selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms; R 3 is selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms, and R 4 is selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms; R 5 is an independently selected monovalent hydrocarbon group of 1 to 15 carbon atoms; and R 6 is an independently selected monovalent hydrocarbon group of 1 to 15 carbon atoms; thereby forming a reaction mixture; and thereafter 2) intermittently adding to the reaction mixture: d) an SiH-terminated siloxane oligomer of formula where each R 8 is an independently selected monovalent hydrocarbon group of 1 to 18 carbon atoms 1 and subscript x is 1 or 2; thereby preparing a reaction product comprising the cyclic siloxazane and a by-product comprising hydrogen (H 2); optionally 3) removing at least some of the hydrogen during step 2); optionally 4) heating the reaction mixture at a temperature of 110 °C to 150 °C for 1 to 6 hours after step 2); and optionally 5) performing a reactive distillation of the reaction product, thereby purifying the cyclic siloxazane. 1) combining starting materials comprising a) an allyl-functional amine, b) a platinum catalyst capable of catalyzing hydrosilylation reaction, c) a hydrosilylation reaction promoter of formula where - - - - - represents a bond selected from the group consisting of a double bond and a triple bond, subscript a is 1 or 2, subscript b is 0 or 1, with the provisos that when - - - - - is a double bond, then a = 2 and b = 1, and when - - - - - is a triple bond, then a = 1 and b = 0; each R 1 is independently selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms; R 2 is selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms; R 3 is selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms, and R 4 is selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms; R 5 is an independently selected monovalent hydrocarbon group of 1 to 15 carbon atoms; and R 6 is an independently selected monovalent hydrocarbon group of 1 to 15 carbon atoms; thereby forming a reaction mixture; and thereafter a) an allyl-functional amine, b) a platinum catalyst capable of catalyzing hydrosilylation reaction, c) a hydrosilylation reaction promoter of formula where - - - - - represents a bond selected from the group consisting of a double bond and a triple bond, subscript a is 1 or 2, subscript b is 0 or 1, with the provisos that when - - - - - is a double bond, then a = 2 and b = 1, and when - - - - - is a triple bond, then a = 1 and b = 0; each R 1 is independently selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms; R 2 is selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms; R 3 is selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms, and R 4 is selected from the group consisting of hydrogen, an alkyl group of 1 to 15 carbon atoms, and an aryl group of 6 to 20 carbon atoms; R 5 is an independently selected monovalent hydrocarbon group of 1 to 15 carbon atoms; and R 6 is an independently selected monovalent hydrocarbon group of 1 to 15 carbon atoms; 2) intermittently adding to the reaction mixture: d) an SiH-terminated siloxane oligomer of formula where each R 8 is an independently selected monovalent hydrocarbon group of 1 to 18 carbon atoms 1 and subscript x is 1 or 2; thereby preparing a reaction product comprising the cyclic siloxazane and a by-product comprising hydrogen (H 2); optionally 3) removing at least some of the hydrogen during step 2); optionally 4) heating the reaction mixture at a temperature of 110 °C to 150 °C for 1 to 6 hours after step 2); and optionally 5) performing a reactive distillation of the reaction product, thereby purifying the cyclic siloxazane.