A support frame (111, 111A, 111B, 111C, 111D, 111E, 111F, 111G, 111H, 111I, 111J, 111K, 111L) for arranging a pellicle film, wherein the support frame (111, 111A, 111B, 111C, 111D, 111E, 111F, 111G, 111H, 111I, 111J, 111K, 111L) has one or more of through holes (18, 18A) being made from a first hole extending along a first direction, the first direction being almost parallel to a surface direction of the pellicle film, and a second hole extending along a second direction, the second direction intersecting with the first direction; one or more of filters (30, 30A) arranged at an inside of the through hole (18, 18A) or at an end of the through hole (18, 18A), and the filter (30, 30A) is arranged apart from the pellicle film, characterized in that the support frame (111B, 111C, 111D, 111E, 111F, 111G, 111H, 111I, 111J, 111K, 111L) includes a plurality of layers, the plurality of layers comprising: a bottom plate being in a frame shape; a first thin plate (13, 13B, 13D, 17A, 17C) being in a frame shape; and a second thin plate (13A, 13C, 17, 17B) being a frame shape, the first and second thin plates arranged above the bottom plate, wherein the first thin plate (13, 13B, 13D, 17A, 17C) has one or more of first concave parts (14, 14B, 19A) connected to an inner edge of the first thin plate (13, 13B, 13D, 17A, 17C) and extending along the first direction, the second thin plate (13A, 13C, 17, 17B) has one or more of second concave parts, the second concave part (14A, 14C, 19) connected to an outer edge of the second thin plate (13A, 13C, 17, 17B) and extending along the first direction, and the second hole extending to the second direction is formed by at least partially overlapping the first concave part (14, 14A, 14B, 14C, 19A) and the second concave part (14A, 19). wherein the support frame (111, 111A, 111B, 111C, 111D, 111E, 111F, 111G, 111H, 111I, 111J, 111K, 111L) has one or more of through holes (18, 18A) being made from a first hole extending along a first direction, the first direction being almost parallel to a surface direction of the pellicle film, and a second hole extending along a second direction, the second direction intersecting with the first direction; one or more of filters (30, 30A) arranged at an inside of the through hole (18, 18A) or at an end of the through hole (18, 18A), and the filter (30, 30A) is arranged apart from the pellicle film, characterized in that the support frame (111B, 111C, 111D, 111E, 111F, 111G, 111H, 111I, 111J, 111K, 111L) includes a plurality of layers, the plurality of layers comprising: a bottom plate being in a frame shape; a first thin plate (13, 13B, 13D, 17A, 17C) being in a frame shape; and a second thin plate (13A, 13C, 17, 17B) being a frame shape, the first and second thin plates arranged above the bottom plate, wherein the first thin plate (13, 13B, 13D, 17A, 17C) has one or more of first concave parts (14, 14B, 19A) connected to an inner edge of the first thin plate (13, 13B, 13D, 17A, 17C) and extending along the first direction, the second thin plate (13A, 13C, 17, 17B) has one or more of second concave parts, the second concave part (14A, 14C, 19) connected to an outer edge of the second thin plate (13A, 13C, 17, 17B) and extending along the first direction, and the second hole extending to the second direction is formed by at least partially overlapping the first concave part (14, 14A, 14B, 14C, 19A) and the second concave part (14A, 19). a bottom plate being in a frame shape; a first thin plate (13, 13B, 13D, 17A, 17C) being in a frame shape; and a second thin plate (13A, 13C, 17, 17B) being a frame shape, the first and second thin plates arranged above the bottom plate, wherein the first thin plate (13, 13B, 13D, 17A, 17C) has one or more of first concave parts (14, 14B, 19A) connected to an inner edge of the first thin plate (13, 13B, 13D, 17A, 17C) and extending along the first direction, the second thin plate (13A, 13C, 17, 17B) has one or more of second concave parts, the second concave part (14A, 14C, 19) connected to an outer edge of the second thin plate (13A, 13C, 17, 17B) and extending along the first direction, and the second hole extending to the second direction is formed by at least partially overlapping the first concave part (14, 14A, 14B, 14C, 19A) and the second concave part (14A, 19).