An accelerometer device, the device comprising: a support base defining a first plane; a resonator (18, 18a, 18b, 818, 900, 1000) comprising an anchored portion and a released portion, wherein the anchored portion of the resonator (18, 18a, 18b, 818, 900, 1000) mechanically connects to the support base; a pendulous proof mass (32, 112) mechanically connected to the released portion of the resonator (18, 18a, 18b, 818, 900, 1000), the proof mass (32, 112) comprising one or more damping combs, wherein the damping combs: comprise movable comb fingers and anchored comb fingers, wherein the anchored comb fingers of the one or more damping combs are mechanically connected to the support base, wherein the movable comb fingers of the one or more damping combs are mechanically connected to the proof mass (32, 112), and wherein a spacing between the movable comb fingers of the one or more damping combs and the anchored comb fingers of the one or more damping combs is configured to provide air damping for the proof mass (32, 112); a pressure cavity, wherein the pressure cavity contains the support base, the resonator (18, 18a, 18b, 818, 900, 1000), the proof mass (32, 112) and the one or more damping combs, a resonator connection structure (16, 116) mechanically connected to the support base with an anchor (14, 46), wherein the resonator connection structure (16, 116) is in a second plane parallel to the first plane; and a hinge flexure (22, 114) configured to connect the pendulous proof mass (32, 112) to the resonator connection structure (16, 116), wherein the hinge flexure (22, 114) suspends the pendulous proof mass (32, 112) parallel to the support base at the anchor (14, 46), and wherein the pendulous proof mass (32, 112) rotates about the hinge flexure (22, 114) in the second plane in response to an acceleration of the device parallel to the first plane of the support base, wherein the resonator (18, 18a, 18b, 818, 900, 1000) is configured to connect the pendulous proof mass (32, 112) to the resonator connection structure (16, 116) and to flex in the second plane based on a rotation of the pendulous proof mass (32, 112) about the hinge flexure (22, 114), and wherein the pendulous proof mass (32, 112), the hinge flexure (22, 114), and the resonator (18, 18a, 18b, 818, 900, 1000) are in the second plane. a support base defining a first plane; a resonator (18, 18a, 18b, 818, 900, 1000) comprising an anchored portion and a released portion, wherein the anchored portion of the resonator (18, 18a, 18b, 818, 900, 1000) mechanically connects to the support base; a pendulous proof mass (32, 112) mechanically connected to the released portion of the resonator (18, 18a, 18b, 818, 900, 1000), the proof mass (32, 112) comprising one or more damping combs, wherein the damping combs: comprise movable comb fingers and anchored comb fingers, wherein the anchored comb fingers of the one or more damping combs are mechanically connected to the support base, wherein the movable comb fingers of the one or more damping combs are mechanically connected to the proof mass (32, 112), and wherein a spacing between the movable comb fingers of the one or more damping combs and the anchored comb fingers of the one or more damping combs is configured to provide air damping for the proof mass (32, 112); comprise movable comb fingers and anchored comb fingers, wherein the anchored comb fingers of the one or more damping combs are mechanically connected to the support base, wherein the movable comb fingers of the one or more damping combs are mechanically connected to the proof mass (32, 112), and wherein a spacing between the movable comb fingers of the one or more damping combs and the anchored comb fingers of the one or more damping combs is configured to provide air damping for the proof mass (32, 112); a pressure cavity, wherein the pressure cavity contains the support base, the resonator (18, 18a, 18b, 818, 900, 1000), the proof mass (32, 112) and the one or more damping combs, a resonator connection structure (16, 116) mechanically connected to the support base with an anchor (14, 46), wherein the resonator connection structure (16, 116) is in a second plane parallel to the first plane; and a hinge flexure (22, 114) configured to connect the pendulous proof mass (32, 112) to the resonator connection structure (16, 116), wherein the hinge flexure (22, 114) suspends the pendulous proof mass (32, 112) parallel to the support base at the anchor (14, 46), and wherein the pendulous proof mass (32, 112) rotates about the hinge flexure (22, 114) in the second plane in response to an acceleration of the device parallel to the first plane of the support base, wherein the resonator (18, 18a, 18b, 818, 900, 1000) is configured to connect the pendulous proof mass (32, 112) to the resonator connection structure (16, 116) and to flex in the second plane based on a rotation of the pendulous proof mass (32, 112) about the hinge flexure (22, 114), and wherein the pendulous proof mass (32, 112), the hinge flexure (22, 114), and the resonator (18, 18a, 18b, 818, 900, 1000) are in the second plane.