A micro-electro-mechanical switch device, comprising: a substrate having a gate connection, a source connection and a drain connection formed thereon, and a switch structure, coupled to the substrate, comprising: a beam member having a length sufficient to overhang both the gate connection and the drain connection, an anchor coupling the switch structure to the substrate, the anchor having a first thickness, and having a slot that extends through the anchor to the substrate, an anchor beam interface providing an attachment point for a hinge to the anchor, the anchor beam interface having a second thickness, and coupling to the anchor, wherein the second thickness is greater than the first thickness, and the hinge coupling the beam member to a respective anchor beam interface, the hinge configured to flex in response to a voltage differential established between the gate connection and the beam member, the anchor beam interface including an anchor beam interface end, located between the anchor beam interface and the hinge, wherein the hinge and the anchor beam interface end are offset from one another in a plane orthogonal to the substrate. a substrate having a gate connection, a source connection and a drain connection formed thereon, and a switch structure, coupled to the substrate, comprising: a beam member having a length sufficient to overhang both the gate connection and the drain connection, an anchor coupling the switch structure to the substrate, the anchor having a first thickness, and having a slot that extends through the anchor to the substrate, an anchor beam interface providing an attachment point for a hinge to the anchor, the anchor beam interface having a second thickness, and coupling to the anchor, wherein the second thickness is greater than the first thickness, and the hinge coupling the beam member to a respective anchor beam interface, the hinge configured to flex in response to a voltage differential established between the gate connection and the beam member, the anchor beam interface including an anchor beam interface end, located between the anchor beam interface and the hinge, wherein the hinge and the anchor beam interface end are offset from one another in a plane orthogonal to the substrate. a beam member having a length sufficient to overhang both the gate connection and the drain connection, an anchor coupling the switch structure to the substrate, the anchor having a first thickness, and having a slot that extends through the anchor to the substrate, an anchor beam interface providing an attachment point for a hinge to the anchor, the anchor beam interface having a second thickness, and coupling to the anchor, wherein the second thickness is greater than the first thickness, and the hinge coupling the beam member to a respective anchor beam interface, the hinge configured to flex in response to a voltage differential established between the gate connection and the beam member, the anchor beam interface including an anchor beam interface end, located between the anchor beam interface and the hinge, wherein the hinge and the anchor beam interface end are offset from one another in a plane orthogonal to the substrate.