A foreign object inspection device for inspecting foreign objects at inspection spots of a workpiece, the device comprising: a nozzle including a suction port configured to suck a foreign object; an exhauster; a suction channel connecting the nozzle to the exhauster; a detector (40, 73, 91) installed on the suction channel, and configured to detect foreign object information about a shape of the foreign object sucked through the suction port; and a controller (60, 80, 99) including a storage (61, 81, 105) configured to store the foreign object information in a manner associated with an inspection spot; wherein the detector (40, 73, 91) includes a housing containing a cylindrical capture chamber, a suction path connection port in a side surface of the capture chamber, the suction path connection port connecting to the suction channel, a filter configured to capture a foreign object entering the capture chamber, a support supporting the filter, and configured to allow a gas to flow through the support, a window in the capture chamber, and an imaging device configured to form an image of the foreign object captured on the filter, and the storage includes a filter image storage configured to store a filter image for each inspection spot, and a foreign object image storage configured to store a foreign object image, and the controller includes an extractor configured to extract the foreign object image from the filter image, and a matching unit configured to match a foreign object image extracted from a filter image for a target inspection spot to a foreign object image extracted from a filter image for an inspection spot preceding the target inspection spot, and determine an unmatching foreign object image as a foreign object image for the target inspection spot. a nozzle including a suction port configured to suck a foreign object; an exhauster; a suction channel connecting the nozzle to the exhauster; a detector (40, 73, 91) installed on the suction channel, and configured to detect foreign object information about a shape of the foreign object sucked through the suction port; and a controller (60, 80, 99) including a storage (61, 81, 105) configured to store the foreign object information in a manner associated with an inspection spot; wherein the detector (40, 73, 91) includes a housing containing a cylindrical capture chamber, a suction path connection port in a side surface of the capture chamber, the suction path connection port connecting to the suction channel, a filter configured to capture a foreign object entering the capture chamber, a support supporting the filter, and configured to allow a gas to flow through the support, a window in the capture chamber, and an imaging device configured to form an image of the foreign object captured on the filter, and the storage includes a filter image storage configured to store a filter image for each inspection spot, and a foreign object image storage configured to store a foreign object image, and the controller includes an extractor configured to extract the foreign object image from the filter image, and a matching unit configured to match a foreign object image extracted from a filter image for a target inspection spot to a foreign object image extracted from a filter image for an inspection spot preceding the target inspection spot, and determine an unmatching foreign object image as a foreign object image for the target inspection spot.