A method for deactivating a contamination in a gas mixture inside a flow-through chamber, the method comprising: selecting at least one contamination to be deactivated in the chamber; determining at least a first chemical component and a second chemical component, and respective first and second predetermined concentrations, for effectively deactivating said at least one contamination; introducing the first chemical component in the chamber; increasing the concentration of the first chemical component in the chamber to the first predetermined concentration; introducing the second chemical component in the chamber; and increasing the concentration of the second chemical component in the chamber to the second predetermined concentration, wherein the first and second chemical components are usable for contamination deactivation and the concentration of the first and second chemical components for effectively deactivating the contamination are determined by: exposing at least one capacitor, having first and second plates, to the first and second chemical components introduced into the chamber, determining a change in an electrical property of the at least one capacitor, wherein said change in the electrical property varies in accordance with changes in the concentrations of the first and second chemical components; and maintaining the first and second chemical components in the chamber at the respective first and second predetermined concentrations for a time period sufficient to deactivate the contamination. selecting at least one contamination to be deactivated in the chamber; determining at least a first chemical component and a second chemical component, and respective first and second predetermined concentrations, for effectively deactivating said at least one contamination; introducing the first chemical component in the chamber; increasing the concentration of the first chemical component in the chamber to the first predetermined concentration; introducing the second chemical component in the chamber; and increasing the concentration of the second chemical component in the chamber to the second predetermined concentration, wherein the first and second chemical components are usable for contamination deactivation and the concentration of the first and second chemical components for effectively deactivating the contamination are determined by: exposing at least one capacitor, having first and second plates, to the first and second chemical components introduced into the chamber, determining a change in an electrical property of the at least one capacitor, wherein said change in the electrical property varies in accordance with changes in the concentrations of the first and second chemical components; and maintaining the first and second chemical components in the chamber at the respective first and second predetermined concentrations for a time period sufficient to deactivate the contamination. exposing at least one capacitor, having first and second plates, to the first and second chemical components introduced into the chamber, determining a change in an electrical property of the at least one capacitor, wherein said change in the electrical property varies in accordance with changes in the concentrations of the first and second chemical components; and maintaining the first and second chemical components in the chamber at the respective first and second predetermined concentrations for a time period sufficient to deactivate the contamination.