Method for contacting of a stamping surface of a template stamp and an exposed surface of a substrate, comprising the steps of: a. providing an anchor having an anchor surface for contacting the stamping surface, the anchor surface and the exposed surface of the substrate having an adjustable first relative lateral position to each other; b. using a first contacting process to establish a first contacting stage of the method wherein at least a first part of the stamping surface is in contact with at least one of the anchor surface and the exposed surface of the substrate; c. while residing in the first stage, determining a first lateral misalignment of the stamping surface with respect to any one of the surfaces with which the stamping surface is in contact; d. if the first lateral misalignment exceeds a threshold, establishing a second contacting stage of the method wherein a part of the stamping surface is in contact with the anchor surface, while no part of the stamping surface is in contact with the exposed surface of the substrate, the second stage being established in such a manner that at all times between the first and second stages at least a part of the stamping surface is kept in contact with at least one of the anchor surface and the exposed surface of the substrate; e. while residing in the second stage, adjusting the first relative lateral position to correct for the first lateral misalignment; and f. using a second contacting process to establish a third contacting stage of the method wherein the stamping surface is in contact with the exposed surface of the substrate, the second contacting process being more accurate than the first contacting process. a. providing an anchor having an anchor surface for contacting the stamping surface, the anchor surface and the exposed surface of the substrate having an adjustable first relative lateral position to each other; b. using a first contacting process to establish a first contacting stage of the method wherein at least a first part of the stamping surface is in contact with at least one of the anchor surface and the exposed surface of the substrate; c. while residing in the first stage, determining a first lateral misalignment of the stamping surface with respect to any one of the surfaces with which the stamping surface is in contact; d. if the first lateral misalignment exceeds a threshold, establishing a second contacting stage of the method wherein a part of the stamping surface is in contact with the anchor surface, while no part of the stamping surface is in contact with the exposed surface of the substrate, the second stage being established in such a manner that at all times between the first and second stages at least a part of the stamping surface is kept in contact with at least one of the anchor surface and the exposed surface of the substrate; e. while residing in the second stage, adjusting the first relative lateral position to correct for the first lateral misalignment; and f. using a second contacting process to establish a third contacting stage of the method wherein the stamping surface is in contact with the exposed surface of the substrate, the second contacting process being more accurate than the first contacting process.