A method of making a surface-structured, cross-linked silicone-based material, the method comprising: providing a surface-structured silicone-based material comprising silicone pressure sensitive adhesive, wherein the surface-structured material is substantially free of catalysts and initiators for curing the silicone-based material such that an amount of catalyst or initiator does not reduce the cure time of the composition by at least 10% relative to the cure time for the same composition absent that catalyst or initiator; exposing the surface-structured silicone-based material to an electron-beam to cross-link the silicone-based material to provide the surface-structured, cross-linked silicone-based material; wherein providing the surface-structured silicone-based material comprises one of: 1) providing a replication tool having a major surface having at least one of nano-sized or micro-sized surface structures, and applying the silicone-based material that is substantially free of the catalysts and initiators onto at least a portion of the major surface of the replication tool to form the surface-structured silicone-based material that is substantially free of the catalysts and initiators, wherein the surface-structured, cross-linked silicone-based material has peak to valley measurements of less than 2500 micrometers; or 2) providing a substrate having a first major surface; coating the silicone-based material that is substantially free of the catalysts and initiators on at least a portion of the major surface of the substrate; and contacting the coated composition with a major surface of a replication tool having at least one of nano-sized or micro-sized surface structures on the major surface to form the surface-structured silicone-based material that is substantially free of the catalysts and initiators, wherein the surface-structured, cross-linked silicone-based material has peak to valley measurements of less than 2500 micrometers. providing a surface-structured silicone-based material comprising silicone pressure sensitive adhesive, wherein the surface-structured material is substantially free of catalysts and initiators for curing the silicone-based material such that an amount of catalyst or initiator does not reduce the cure time of the composition by at least 10% relative to the cure time for the same composition absent that catalyst or initiator; exposing the surface-structured silicone-based material to an electron-beam to cross-link the silicone-based material to provide the surface-structured, cross-linked silicone-based material; wherein providing the surface-structured silicone-based material comprises one of: 1) providing a replication tool having a major surface having at least one of nano-sized or micro-sized surface structures, and applying the silicone-based material that is substantially free of the catalysts and initiators onto at least a portion of the major surface of the replication tool to form the surface-structured silicone-based material that is substantially free of the catalysts and initiators, wherein the surface-structured, cross-linked silicone-based material has peak to valley measurements of less than 2500 micrometers; or 2) providing a substrate having a first major surface; 1) providing a replication tool having a major surface having at least one of nano-sized or micro-sized surface structures, and applying the silicone-based material that is substantially free of the catalysts and initiators onto at least a portion of the major surface of the replication tool to form the surface-structured silicone-based material that is substantially free of the catalysts and initiators, wherein the surface-structured, cross-linked silicone-based material has peak to valley measurements of less than 2500 micrometers; or 2) providing a substrate having a first major surface; coating the silicone-based material that is substantially free of the catalysts and initiators on at least a portion of the major surface of the substrate; and contacting the coated composition with a major surface of a replication tool having at least one of nano-sized or micro-sized surface structures on the major surface to form the surface-structured silicone-based material that is substantially free of the catalysts and initiators, wherein the surface-structured, cross-linked silicone-based material has peak to valley measurements of less than 2500 micrometers.