A process for the manufacture of a multilayer structure suitable for forming part of an organic electronic device having a cathode and an anode, comprising the steps of a. depositing a n th layer L n of the multilayer structure onto a substrate out of a liquid composition C n comprising a solvent system S n comprising at least one solvent and at least one organic compound M i which comprises ionizable groups G mainly or totally in neutral (G n) or mainly or totally in ionized (G i) form, wherein the substrate is a previously deposited layer L n-1 of the multilayer structure or is an element suitable for forming the cathode or the anode of the organic electronic device, and thereafter either b1.1 evaporating the solvent system S n to form the dry n th layer and, if the organic compound M i comprises the group G mainly or totally in its ionized form G i, converting partly or completely the groups G i to the neutral form G n, and b1.2 thereafter depositing a (n+1) th layer L n+1 of the multilayer structure onto the first layer L n out of a liquid composition C n+1 comprising a solvent system S n+1, and organic compound M i comprising the ionizable group G mainly or totally in ionized form G i and thereafter b1.3. evaporating the solvent system S n+1 and converting the groups G i to form the dry (n+1) th layer mainly or totally to the neutral form G n or, b2.1. evaporating the solvent system S n to form the dry n th layer L n comprising groups G mainly or totally in ionized form G i and thereafter b2.2. depositing the (n+1) th layer L n+1 of the multilayer structure onto the dry n th layer L n out of a liquid composition C (n+1)' comprising a solvent system S (n+1)' comprising organic compound M i comprising ionizable groups G mainly or totally in the neutral form G n and evaporating the solvent system S (n+1)' to form a dry (n+1) th layer mainly or totally to the neutral form G n and thereafter either b3.1 depositing a (n+2) th layer out of a liquid composition C (n+2) comprising a solvent system S (n+2) comprising organic compound M i comprising groups G mainly or totally in the ionized form G i followed by converting the groups G i in the dry n th and the dry (n+2) th layer mainly or totally to the neutral form, or b3.2 directly converting the groups G i in the n th layer mainly or totally to the neutral form G n wherein the solubility of organic compound M i comprising groups G mainly or totally in ionized form G i in solvent system S n+1 and S n+2, different or same, is at least three times as high as the solubility of organic compounds M i comprising groups G mainly or totally in neutral form G n in said solvent system S n+1 and S n+2, and wherein the solubility of organic compounds M i comprising groups G mainly or totally in neutral form G n in solvent system S (n+1)' is at least three times as high as the solubility of organic compound M i comprising groups G mainly or totally in ionized form G i in said solvent system S (n+1)'., the solubility in all cases determined at 23°C and atmospheric pressure. a. depositing a n th layer L n of the multilayer structure onto a substrate out of a liquid composition C n comprising a solvent system S n comprising at least one solvent and at least one organic compound M i which comprises ionizable groups G mainly or totally in neutral (G n) or mainly or totally in ionized (G i) form, wherein the substrate is a previously deposited layer L n-1 of the multilayer structure or is an element suitable for forming the cathode or the anode of the organic electronic device, and thereafter either b1.1 evaporating the solvent system S n to form the dry n th layer and, if the organic compound M i comprises the group G mainly or totally in its ionized form G i, converting partly or completely the groups G i to the neutral form G n, and b1.2 thereafter depositing a (n+1) th layer L n+1 of the multilayer structure onto the first layer L n out of a liquid composition C n+1 comprising a solvent system S n+1, and organic compound M i comprising the ionizable group G mainly or totally in ionized form G i and thereafter b1.3. evaporating the solvent system S n+1 and converting the groups G i to form the dry (n+1) th layer mainly or totally to the neutral form G n or, b2.1. evaporating the solvent system S n to form the dry n th layer L n comprising groups G mainly or totally in ionized form G i and thereafter b2.2. depositing the (n+1) th layer L n+1 of the multilayer structure onto the dry n th layer L n out of a liquid composition C (n+1)' comprising a solvent system S (n+1)' comprising organic compound M i comprising ionizable groups G mainly or totally in the neutral form G n and evaporating the solvent system S (n+1)' to form a dry (n+1) th layer mainly or totally to the neutral form G n and thereafter either b3.1 depositing a (n+2) th layer out of a liquid composition C (n+2) comprising a solvent system S (n+2) comprising organic compound M i comprising groups G mainly or totally in the ionized form G i followed by converting the groups G i in the dry n th and the dry (n+2) th layer mainly or totally to the neutral form, or b3.2 directly converting the groups G i in the n th layer mainly or totally to the neutral form G n