An automatic analysis apparatus for a local region of a substrate, comprising: a pump that supplies analysis liquid; a nozzle for local analysis that ejects the analysis liquid supplied from the pump onto a predetermined region of a substrate surface to transfer an object to be analyzed in the predetermined region to the analysis liquid, and takes in the analysis liquid to collect the object to be analyzed; a nebulizer that sucks the analysis liquid including the object to be analyzed, in the nozzle for local analysis by negative pressure; an inductively coupled plasma mass spectrometry apparatus that analyzes the object to be analyzed included in the analysis liquid fed from the nebulizer; the nozzle for local analysis having: analysis-liquid supply means that ejects the analysis liquid onto the substrate; analysis-liquid discharge means that takes the analysis liquid including the object to be analyzed from the substrate into the nozzle for local analysis to feed the analysis liquid to the nebulizer; and exhaust means including an exhaust channel in the nozzle for local analysis, automatic liquid-feed means that automatically feeds the analysis liquid including the object to be analyzed, taken into the nozzle for local analysis, to the inductively coupled plasma mass spectrometry apparatus; flow adjustment means that adjusts a flow of the analysis liquid to be supplied from the pump to the nozzle for local analysis and a flow of the analysis liquid to be fed from the nozzle for local analysis to the nebulizer; and automatic control means that simultaneously perform the taking-in of the analysis liquid with the nozzle for local analysis and analysis of the object to be analyzed with the inductively coupled plasma mass spectrometry apparatus to perform automatic analysis to a plurality of the adjacent predetermined regions of the substrate, successively, wherein the nozzle for local analysis includes an end portion that supplies the analysis liquid to the substrate, cylindrical in nozzle shape, and includes an internal space capable of retaining the analysis liquid along an internal wall of a cylindrical portion at the cylindrical end portion. a pump that supplies analysis liquid; a nozzle for local analysis that ejects the analysis liquid supplied from the pump onto a predetermined region of a substrate surface to transfer an object to be analyzed in the predetermined region to the analysis liquid, and takes in the analysis liquid to collect the object to be analyzed; a nebulizer that sucks the analysis liquid including the object to be analyzed, in the nozzle for local analysis by negative pressure; an inductively coupled plasma mass spectrometry apparatus that analyzes the object to be analyzed included in the analysis liquid fed from the nebulizer; the nozzle for local analysis having: analysis-liquid supply means that ejects the analysis liquid onto the substrate; analysis-liquid discharge means that takes the analysis liquid including the object to be analyzed from the substrate into the nozzle for local analysis to feed the analysis liquid to the nebulizer; and exhaust means including an exhaust channel in the nozzle for local analysis, automatic liquid-feed means that automatically feeds the analysis liquid including the object to be analyzed, taken into the nozzle for local analysis, to the inductively coupled plasma mass spectrometry apparatus; flow adjustment means that adjusts a flow of the analysis liquid to be supplied from the pump to the nozzle for local analysis and a flow of the analysis liquid to be fed from the nozzle for local analysis to the nebulizer; and automatic control means that simultaneously perform the taking-in of the analysis liquid with the nozzle for local analysis and analysis of the object to be analyzed with the inductively coupled plasma mass spectrometry apparatus to perform automatic analysis to a plurality of the adjacent predetermined regions of the substrate, successively, wherein the nozzle for local analysis includes an end portion that supplies the analysis liquid to the substrate, cylindrical in nozzle shape, and includes an internal space capable of retaining the analysis liquid along an internal wall of a cylindrical portion at the cylindrical end portion.