A polishing composition comprising: 0.01 wt% to 30 wt% of abrasive; 0.01 wt% to 30 wt% of at least one oxidizing agent; 0.0005 wt% to 10 wt% of activator; 0.1ppm to 10,000 ppm of additive; a pH adjusting agent; and water; wherein the abrasive is selected from the group consisting of colloidal silica, fumed silica, alumina, titania, ceria, zirconia, surface modified particles selected from the group consisting of activator-containing particles, composite particles, and lattice doped and inorganic oxide particles; and combinations thereof; the oxidizing agent is selected from the group consisting of a peroxy compound selected from the group consisting of hydrogen peroxide, urea peroxide, peroxyformic acid, peracetic acid, propaneperoxoic acid, substituted or unsubstituted butaneperoxoic acid, hydroperoxy-acetaldehyde, potassium periodate, ammonium peroxymonosulfate; and a non-per-oxy compound selected from the group consisting of ferric nitrite, KClO 4, KBrO 4, KMnO 4; and combinations thereof; the activator is selected from the group consisting of inorganic oxide particles with transition metal coated onto their surface; and the transition metal is selected from the group consisting of Fe, Cu, Mn, Co, Ce, and combinations thereof; soluble catalyst selected from the group consisting of ammonium iron oxalate trihydrate, iron citrate tribasic monohydrate, iron acetylacetonate and ethylenediamine tetraacetic acid, and iron sodium salt hydrate; a metal compound having multiple oxidation states selected from the group consisting of Ag, Co, Cr, Cu, Fe, Mo, Mn, Nb, Ni, Os, Pd, Ru, Sn, Ti, V; and combinations thereof; the additive is selected from the group consisting of a sarcosinate, a related carboxylic compound, a hydrocarbon substituted sarcosinate; a polyethylene oxide having the general molecular structure of wherein n refers to the total numbers of the repeating unit and ranges from 4 to 113636; an ethoxylated non-ionic surfactant selected from the group consisting of alkyl phenol ethoxylate, fatty alcohol ethoxylate, fatty amine ethoxylate, propylene glycol - ethylene glycol block copolymer, polyether silicone surfactant, and combinations thereof; and combinations thereof; and the pH of the composition is between 2 and 10. 0.01 wt% to 30 wt% of abrasive; 0.01 wt% to 30 wt% of at least one oxidizing agent; 0.0005 wt% to 10 wt% of activator; 0.1ppm to 10,000 ppm of additive; a pH adjusting agent; and water; wherein the abrasive is selected from the group consisting of colloidal silica, fumed silica, alumina, titania, ceria, zirconia, surface modified particles selected from the group consisting of activator-containing particles, composite particles, and lattice doped and inorganic oxide particles; and combinations thereof; the oxidizing agent is selected from the group consisting of a peroxy compound selected from the group consisting of hydrogen peroxide, urea peroxide, peroxyformic acid, peracetic acid, propaneperoxoic acid, substituted or unsubstituted butaneperoxoic acid, hydroperoxy-acetaldehyde, potassium periodate, ammonium peroxymonosulfate; and a non-per-oxy compound selected from the group consisting of ferric nitrite, KClO 4, KBrO 4, KMnO 4; and combinations thereof; the activator is selected from the group consisting of inorganic oxide particles with transition metal coated onto their surface; and the transition metal is selected from the group consisting of Fe, Cu, Mn, Co, Ce, and combinations thereof; soluble catalyst selected from the group consisting of ammonium iron oxalate trihydrate, iron citrate tribasic monohydrate, iron acetylacetonate and ethylenediamine tetraacetic acid, and iron sodium salt hydrate; a metal compound having multiple oxidation states selected from the group consisting of Ag, Co, Cr, Cu, Fe, Mo, Mn, Nb, Ni, Os, Pd, Ru, Sn, Ti, V; and combinations thereof; the additive is selected from the group consisting of a sarcosinate, a related carboxylic compound, a hydrocarbon substituted sarcosinate; a polyethylene oxide having the general molecular structure of wherein n refers to the total numbers of the repeating unit and ranges from 4 to 113636; an ethoxylated non-ionic surfactant selected from the group consisting of alkyl phenol ethoxylate, fatty alcohol ethoxylate, fatty amine ethoxylate, propylene glycol - ethylene glycol block copolymer, polyether silicone surfactant, and combinations thereof; and combinations thereof; and the pH of the composition is between 2 and 10.