A compensation quantity acquisition device used when a movement target is moved in a first axis direction, comprising: a vibration acquisitor configured to acquire vibration of the movement target in a second axis direction, orthogonal to the first axis direction when the movement target is moved in the first axis direction; characterized in that the compensation quantity acquisition device further comprises: a positional frequency characteristic acquisitor configured to acquire a positional frequency characteristic by performing Fourier transformation on the vibration in the second axis direction acquired by the vibration acquisitor; a position independent frequency storage configured to store a positional frequency of the vibration in the second axis direction that occurs independently of a position of the movement target in the first axis direction, as a position independent frequency; a position dependent vibration acquisitor configured to perform inverse Fourier transformation on the positional frequency characteristic from which a component of the position independent frequency has been removed, to recover the vibration of the movement target in the second axis direction as position dependent vibration; and a compensation quantity acquisitor configured to acquire positional compensation quantity of the movement target in the second axis direction that cancels the position dependent vibration. a vibration acquisitor configured to acquire vibration of the movement target in a second axis direction, orthogonal to the first axis direction when the movement target is moved in the first axis direction; characterized in that the compensation quantity acquisition device further comprises: a positional frequency characteristic acquisitor configured to acquire a positional frequency characteristic by performing Fourier transformation on the vibration in the second axis direction acquired by the vibration acquisitor; a position independent frequency storage configured to store a positional frequency of the vibration in the second axis direction that occurs independently of a position of the movement target in the first axis direction, as a position independent frequency; a position dependent vibration acquisitor configured to perform inverse Fourier transformation on the positional frequency characteristic from which a component of the position independent frequency has been removed, to recover the vibration of the movement target in the second axis direction as position dependent vibration; and a compensation quantity acquisitor configured to acquire positional compensation quantity of the movement target in the second axis direction that cancels the position dependent vibration. a positional frequency characteristic acquisitor configured to acquire a positional frequency characteristic by performing Fourier transformation on the vibration in the second axis direction acquired by the vibration acquisitor; a position independent frequency storage configured to store a positional frequency of the vibration in the second axis direction that occurs independently of a position of the movement target in the first axis direction, as a position independent frequency; a position dependent vibration acquisitor configured to perform inverse Fourier transformation on the positional frequency characteristic from which a component of the position independent frequency has been removed, to recover the vibration of the movement target in the second axis direction as position dependent vibration; and a compensation quantity acquisitor configured to acquire positional compensation quantity of the movement target in the second axis direction that cancels the position dependent vibration.