A substrate surface defect detection device, comprising: an optical waveguide for receiving first light and directing the received first light to a surface of a to be tested substrate, the optical waveguide having a first surface facing toward the substrate and a second surface facing away from the substrate; at least one microlens array disposed on the second surface of the optical waveguide, the at least one microlens array comprising a plurality of microlenses arranged in an array for receiving second light from the surface of the to be tested substrate and converging the received second light to converged light, wherein; an imaging component for receiving the converged light from the at least one microlens array for optical imaging, the imaging component comprising a plurality of imaging units (213, 223, 233), each of the imaging units comprising a plurality of pixels, each of the imaging units being associated with one of the microlenses to receive a portion of the converged light; and a plurality of light confinement members disposed between a corresponding imaging unit (213, 223, 233) and a corresponding microlens and configured to enable light from the corresponding microlens to reflect a specific field of view to pass therethrough and into the corresponding imaging unit (213, 223, 233); -, whereinthe at least one microlens array comprises a first microlens array and a second microlens array stacked over each other, the first and second microlens arrays each having a plurality of microlenses, each of the microlenses of the first microlens array having an optical axis aligned to an optical axis of one corresponding microlens of the second microlens array; and - whereinthe light confinement members each comprise a cylindrical optical member having a light receiving surface and a light exit surface. an optical waveguide for receiving first light and directing the received first light to a surface of a to be tested substrate, the optical waveguide having a first surface facing toward the substrate and a second surface facing away from the substrate; at least one microlens array disposed on the second surface of the optical waveguide, the at least one microlens array comprising a plurality of microlenses arranged in an array for receiving second light from the surface of the to be tested substrate and converging the received second light to converged light, wherein; an imaging component for receiving the converged light from the at least one microlens array for optical imaging, the imaging component comprising a plurality of imaging units (213, 223, 233), each of the imaging units comprising a plurality of pixels, each of the imaging units being associated with one of the microlenses to receive a portion of the converged light; and a plurality of light confinement members disposed between a corresponding imaging unit (213, 223, 233) and a corresponding microlens and configured to enable light from the corresponding microlens to reflect a specific field of view to pass therethrough and into the corresponding imaging unit (213, 223, 233); -, whereinthe at least one microlens array comprises a first microlens array and a second microlens array stacked over each other, the first and second microlens arrays each having a plurality of microlenses, each of the microlenses of the first microlens array having an optical axis aligned to an optical axis of one corresponding microlens of the second microlens array; and - whereinthe light confinement members each comprise a cylindrical optical member having a light receiving surface and a light exit surface. -, whereinthe at least one microlens array comprises a first microlens array and a second microlens array stacked over each other, the first and second microlens arrays each having a plurality of microlenses, each of the microlenses of the first microlens array having an optical axis aligned to an optical axis of one corresponding microlens of the second microlens array; and - whereinthe light confinement members each comprise a cylindrical optical member having a light receiving surface and a light exit surface.