Method (100, 200) for inspection of a substrate, the method (100, 200) comprising the following steps: - creating, based on at least two light beams (4, 5) originating from one and the same light source, a measurement volume at the intersection between said at least two light beams (4, 5), the measurement volume containing interference fringes and being positioned so as to extend over or into the substrate, said substrate being in movement with respect to said measurement volume in a direction parallel to a main surface of said substrate; - acquiring (102, 202) a measurement signal representative of the light scattered by the substrate, as a function of the location of the measurement volume on said substrate; - calculating (108, 208) at least one expected parameter, including at least one expected modulation frequency being an expected Doppler frequency, of an expected signal representative of the passage of a defect of said substrate through the measurement volume; - determining (114, 214) characteristic values representative of a frequency content of the measurement signal in a neighbourhood around the expected modulation frequency, so as to constitute a validated signal representative of the presence of defects; the step (114, 214) of determining the characteristic values comprising the following steps: - modelling the expected signal according to a model function, in order to produce a modelled signal; - comparing the modelled signal to the measurement signal, including calculating a distance within the meaning of a Euclidian norm between the modelled signal and the measurement signal; and - analyzing said validated signal in order to locate and/or identify defects. - creating, based on at least two light beams (4, 5) originating from one and the same light source, a measurement volume at the intersection between said at least two light beams (4, 5), the measurement volume containing interference fringes and being positioned so as to extend over or into the substrate, said substrate being in movement with respect to said measurement volume in a direction parallel to a main surface of said substrate; - acquiring (102, 202) a measurement signal representative of the light scattered by the substrate, as a function of the location of the measurement volume on said substrate; - calculating (108, 208) at least one expected parameter, including at least one expected modulation frequency being an expected Doppler frequency, of an expected signal representative of the passage of a defect of said substrate through the measurement volume; - determining (114, 214) characteristic values representative of a frequency content of the measurement signal in a neighbourhood around the expected modulation frequency, so as to constitute a validated signal representative of the presence of defects; the step (114, 214) of determining the characteristic values comprising the following steps: - modelling the expected signal according to a model function, in order to produce a modelled signal; - comparing the modelled signal to the measurement signal, including calculating a distance within the meaning of a Euclidian norm between the modelled signal and the measurement signal; and - modelling the expected signal according to a model function, in order to produce a modelled signal; - comparing the modelled signal to the measurement signal, including calculating a distance within the meaning of a Euclidian norm between the modelled signal and the measurement signal; and - analyzing said validated signal in order to locate and/or identify defects.