A specimen preparation apparatus comprising: a lower-side structure that forms a specimen chamber in which a specimen base is provided; an upper-side structure that forms a nozzle chamber above the specimen chamber; a gate valve configured to separate the specimen chamber and the nozzle chamber; and a controller configured to control a gas pressure in the specimen chamber, characterized in that the a specimen preparation apparatus further comprises: a nozzle comprising a nozzle tip opening, the nozzle configured to that eject a specimen from the nozzle tip opening; and a transport mechanism configured to transport the nozzle between the upper-side structure and the lower-side structure, such that at least the nozzle tip opening of the nozzle is present in the nozzle chamber; wherein the upper-side structure comprises a deformation member configured to deform with a movement of the nozzle; the lower-side structure comprises a drying gas pipe; and the controller is configured to maintain a relationship of gas pressures such that a gas pressure in the specimen chamber is higher than a gas pressure in the nozzle chamber by controlling the supply of a drying gas through the drying gas pipe into the specimen chamber, when the lower-side structure and the upper-side structure are in communication with each other, and, in this state, the controller configured to control the transport mechanism to transport the nozzle from the nozzle chamber into the specimen chamber, and configured to cause the nozzle to eject a specimen, and to drop the specimen onto the specimen base. a lower-side structure that forms a specimen chamber in which a specimen base is provided; an upper-side structure that forms a nozzle chamber above the specimen chamber; a gate valve configured to separate the specimen chamber and the nozzle chamber; and a controller configured to control a gas pressure in the specimen chamber, characterized in that the a specimen preparation apparatus further comprises: a nozzle comprising a nozzle tip opening, the nozzle configured to that eject a specimen from the nozzle tip opening; and a transport mechanism configured to transport the nozzle between the upper-side structure and the lower-side structure, such that at least the nozzle tip opening of the nozzle is present in the nozzle chamber; wherein the upper-side structure comprises a deformation member configured to deform with a movement of the nozzle; the lower-side structure comprises a drying gas pipe; and the controller is configured to maintain a relationship of gas pressures such that a gas pressure in the specimen chamber is higher than a gas pressure in the nozzle chamber by controlling the supply of a drying gas through the drying gas pipe into the specimen chamber, when the lower-side structure and the upper-side structure are in communication with each other, and, in this state, the controller configured to control the transport mechanism to transport the nozzle from the nozzle chamber into the specimen chamber, and configured to cause the nozzle to eject a specimen, and to drop the specimen onto the specimen base. a nozzle comprising a nozzle tip opening, the nozzle configured to that eject a specimen from the nozzle tip opening; and a transport mechanism configured to transport the nozzle between the upper-side structure and the lower-side structure, such that at least the nozzle tip opening of the nozzle is present in the nozzle chamber; wherein the upper-side structure comprises a deformation member configured to deform with a movement of the nozzle; the lower-side structure comprises a drying gas pipe; and the controller is configured to maintain a relationship of gas pressures such that a gas pressure in the specimen chamber is higher than a gas pressure in the nozzle chamber by controlling the supply of a drying gas through the drying gas pipe into the specimen chamber, when the lower-side structure and the upper-side structure are in communication with each other, and, in this state, the controller configured to control the transport mechanism to transport the nozzle from the nozzle chamber into the specimen chamber, and configured to cause the nozzle to eject a specimen, and to drop the specimen onto the specimen base.