A mass flow controller for controlling flow of a fluid, the mass flow controller comprising: an inlet for receiving the fluid; a valve actuator coupled to a valve to regulate the flow of the fluid out of an outlet of the mass flow controller by controlling operation of the valve; at least one sensor to measure at least one of a fluid type, a pressure, and a temperature relating to flow of the fluid through a flow path; and a linearization control system coupled with the valve actuator to determine a gain value of the mass flow controller to control a linear response of the valve actuator using a desired fluid flow rate and the at least one of the fluid type, the pressure, and the temperature; wherein the linearization control system determines the gain value from a filtered set point value, at least one real-time fluid parameter value, valve model data, an actuator gain, and a valve model gain characterized in that the linearization control system further comprises: a flow modeling system to determine fluid properties according to the measure of the fluid type, the pressure, and the temperature; and a valve modeling system to determine required operational characteristics of the valve according to valve specifications and the determined fluid properties and, wherein the valve modeling system is further configured to: determine a drive value to control the lift of the valve in order to acquire the desired fluid flow rate; wherein the drive value is determined based on the required operational characteristics. an inlet for receiving the fluid; a valve actuator coupled to a valve to regulate the flow of the fluid out of an outlet of the mass flow controller by controlling operation of the valve; at least one sensor to measure at least one of a fluid type, a pressure, and a temperature relating to flow of the fluid through a flow path; and a linearization control system coupled with the valve actuator to determine a gain value of the mass flow controller to control a linear response of the valve actuator using a desired fluid flow rate and the at least one of the fluid type, the pressure, and the temperature; wherein the linearization control system determines the gain value from a filtered set point value, at least one real-time fluid parameter value, valve model data, an actuator gain, and a valve model gain characterized in that the linearization control system further comprises: a flow modeling system to determine fluid properties according to the measure of the fluid type, the pressure, and the temperature; and a valve modeling system to determine required operational characteristics of the valve according to valve specifications and the determined fluid properties and, wherein the valve modeling system is further configured to: determine a drive value to control the lift of the valve in order to acquire the desired fluid flow rate; wherein the drive value is determined based on the required operational characteristics. a flow modeling system to determine fluid properties according to the measure of the fluid type, the pressure, and the temperature; and a valve modeling system to determine required operational characteristics of the valve according to valve specifications and the determined fluid properties and, wherein the valve modeling system is further configured to: determine a drive value to control the lift of the valve in order to acquire the desired fluid flow rate; wherein the drive value is determined based on the required operational characteristics. determine a drive value to control the lift of the valve in order to acquire the desired fluid flow rate; wherein the drive value is determined based on the required operational characteristics.