A microvalve device comprising: a first substrate having a first surface, wherein: at least one fluidic channel are formed in the shape of a groove into the first surface of the first substrate; and at least one valve seat are formed in the fluidic channel, wherein the at least one valve seat is formed to cross the fluidic channel in a direction of a width of the fluidic channel; a second substrate having a second surface including at least one air channel, wherein: at least one air chamber are formed on the second surface of the second substrate, wherein the at least one air chamber and the at least one valve seat are formed to face each other; the air chamber is connected to the air channel; and an elastic film interposed between the first substrate and the second substrate, a plurality of first holes formed in a third surface of the first substrate which is substantially opposite to the first surface of the first substrate, wherein the first holes are connected to the fluidic channel; a plurality of second holes formed in a fourth surface of the second substrate which is substantially opposite to the second surface of the second substrate, wherein the second holes are connected to the air channel, and wherein the second holes are configured for providing air into the air chamber through the air channel to deform the elastic film toward the valve seat to contact the valve seat and block a flow of a fluid in the fluidic channel; and at least one reaction chamber formed in the first surface of the first substrate. wherein a top portion of the valve seat is lower than the first surface of the first substrate such that the valve seat and the elastic film do not contact each other, and wherein the top portion of the at least one valve seat being one of round and pointed. a first substrate having a first surface, wherein: at least one fluidic channel are formed in the shape of a groove into the first surface of the first substrate; and at least one valve seat are formed in the fluidic channel, wherein the at least one valve seat is formed to cross the fluidic channel in a direction of a width of the fluidic channel; a second substrate having a second surface including at least one air channel, wherein: at least one air chamber are formed on the second surface of the second substrate, wherein the at least one air chamber and the at least one valve seat are formed to face each other; the air chamber is connected to the air channel; and an elastic film interposed between the first substrate and the second substrate, a plurality of first holes formed in a third surface of the first substrate which is substantially opposite to the first surface of the first substrate, wherein the first holes are connected to the fluidic channel; a plurality of second holes formed in a fourth surface of the second substrate which is substantially opposite to the second surface of the second substrate, wherein the second holes are connected to the air channel, and wherein the second holes are configured for providing air into the air chamber through the air channel to deform the elastic film toward the valve seat to contact the valve seat and block a flow of a fluid in the fluidic channel; and at least one reaction chamber formed in the first surface of the first substrate. wherein a top portion of the valve seat is lower than the first surface of the first substrate such that the valve seat and the elastic film do not contact each other, and wherein the top portion of the at least one valve seat being one of round and pointed.