A process for the production of fluorinated quartz glass, characterized by the following process steps: a. generation of SiO 2 particles in a synthesis burner; b. deposition of the SiO 2 particles resulting from process step a. to form a body; c. vitrification of the body resulting from process step b, characterized in that a fluorinating agent having a boiling point of greater than or equal to -10°C is introduced to the synthesis burner during process step a, wherein the fluorinating agent is selected from the group consisting of i. oxygen-containing fluorinating agents; ii. nitrile-containing fluorinating agents; iii. mixtures of the oxygen-containing and nitrile-containing fluorinating agents, characterized in that the oxygen-containing fluorinating agents are selected from the group consisting of i. Perfluoroketones of the general formula R F1 -CO-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; and R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; ii. Perfluoroethers of the general formula R FI -C(X 1)(X 2)O-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; and X 1 and X 2 are F or CF 3. iii. Hydrofluoroethers of the general formula R F1 -C(X 1)(X 2)O-R 2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R 2 is a non-fluorinated hydrocarbon group having from 1 to 3 carbon atoms; X 1 and X 2 stand for F or CF 3. a. generation of SiO 2 particles in a synthesis burner; b. deposition of the SiO 2 particles resulting from process step a. to form a body; c. vitrification of the body resulting from process step b, characterized in that a fluorinating agent having a boiling point of greater than or equal to -10°C is introduced to the synthesis burner during process step a, wherein the fluorinating agent is selected from the group consisting of i. oxygen-containing fluorinating agents; ii. nitrile-containing fluorinating agents; iii. mixtures of the oxygen-containing and nitrile-containing fluorinating agents, characterized in that the oxygen-containing fluorinating agents are selected from the group consisting of i. Perfluoroketones of the general formula R F1 -CO-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; and R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; ii. Perfluoroethers of the general formula R FI -C(X 1)(X 2)O-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; and X 1 and X 2 are F or CF 3. iii. Hydrofluoroethers of the general formula R F1 -C(X 1)(X 2)O-R 2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R 2 is a non-fluorinated hydrocarbon group having from 1 to 3 carbon atoms; X 1 and X 2 stand for F or CF 3. i. oxygen-containing fluorinating agents; ii. nitrile-containing fluorinating agents; iii. mixtures of the oxygen-containing and nitrile-containing fluorinating agents, characterized in that the oxygen-containing fluorinating agents are selected from the group consisting of i. Perfluoroketones of the general formula R F1 -CO-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; and R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; ii. Perfluoroethers of the general formula R FI -C(X 1)(X 2)O-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; and X 1 and X 2 are F or CF 3. iii. Hydrofluoroethers of the general formula R F1 -C(X 1)(X 2)O-R 2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R 2 is a non-fluorinated hydrocarbon group having from 1 to 3 carbon atoms; X 1 and X 2 stand for F or CF 3. i. Perfluoroketones of the general formula R F1 -CO-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; and R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; ii. Perfluoroethers of the general formula R FI -C(X 1)(X 2)O-R F2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R F2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; and X 1 and X 2 are F or CF 3. iii. Hydrofluoroethers of the general formula R F1 -C(X 1)(X 2)O-R 2, wherein R F1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R 2 is a non-fluorinated hydrocarbon group having from 1 to 3 carbon atoms; X 1 and X 2 stand for F or CF 3.