A radical gas generation system comprising: a radical gas generator configured to generate a radical gas from a source gas using a dielectric barrier discharge; and a process chamber apparatus that is connected to said radical gas generator, is configured to accommodate a target object, and is configued to perform on said target object, a process in which said radical gas is used, wherein said process chamber apparatus includes a table on which said target object is placed, said radical gas generator includes: a plurality of discharge cells configured to cause said dielectric barrier discharge; and a source gas supply unit configured to supply said radical gas generator with said source gas, each of said plurality of discharge cells includes: a first electrode portion (3, 5, 31) including a first electrode member (5,31); a second electrode portion (1, 2) that is opposed to said first electrode portion and includes a low voltage second electrode member; and an opening connected to the inside of said process chamber and facing said target object placed on said table, said opening configured to output said radical gas; characterized in that said table is configured to cause said target object to rotate, said plurality of discharge cells share said second low voltage electrode member, and of said plurality of discharge cells, the first electrode member (5,31) of a discharge cell located farther from a center position of the rotation of said target object in a plan view is larger than the first electrode member (5,31) of a discharge cell located closer to a center position of rotation of said target object in a plan view. a radical gas generator configured to generate a radical gas from a source gas using a dielectric barrier discharge; and a process chamber apparatus that is connected to said radical gas generator, is configured to accommodate a target object, and is configued to perform on said target object, a process in which said radical gas is used, wherein said process chamber apparatus includes a table on which said target object is placed, said radical gas generator includes: a plurality of discharge cells configured to cause said dielectric barrier discharge; and a source gas supply unit configured to supply said radical gas generator with said source gas, a plurality of discharge cells configured to cause said dielectric barrier discharge; and a source gas supply unit configured to supply said radical gas generator with said source gas, each of said plurality of discharge cells includes: a first electrode portion (3, 5, 31) including a first electrode member (5,31); a second electrode portion (1, 2) that is opposed to said first electrode portion and includes a low voltage second electrode member; and an opening connected to the inside of said process chamber and facing said target object placed on said table, said opening configured to output said radical gas; characterized in that a first electrode portion (3, 5, 31) including a first electrode member (5,31); a second electrode portion (1, 2) that is opposed to said first electrode portion and includes a low voltage second electrode member; and an opening connected to the inside of said process chamber and facing said target object placed on said table, said opening configured to output said radical gas; characterized in that said table is configured to cause said target object to rotate, said plurality of discharge cells share said second low voltage electrode member, and of said plurality of discharge cells, the first electrode member (5,31) of a discharge cell located farther from a center position of the rotation of said target object in a plan view is larger than the first electrode member (5,31) of a discharge cell located closer to a center position of rotation of said target object in a plan view.