A method for storage and delivery of a liquid chemical precursor to a process tool comprising: providing the liquid chemical precursor selected from the group consisting of metal β-diketonates, metal β-diketoesterates, metal β-ketoiminates, metal β-diiminates, metal alkyls, metal carbonyls, alkyl metal carbonyls, metal cyclopentadienyls, metal cyclopentadienyls carbonyls, metal pyrrolyls, metal imidazolyls, metal amidinates, metal alkoxides, and combinations thereof; wherein ligand in the chemical precursor is selected from the group consisting of monodentate, bidentate and multidentate complexing to the metal atoms, and the metal is selected from the group consisting of Mg, Ca, Sr, Ba, Y, La, Ce, Sm, Tb, Er, Yb, Lu, Ti, Zr, Hf, Fe, Co, Ni, Ru, Ir, Rh, Cu, Al, Sn, Pb, Sb, Bi, Te, Cr, Mo and W; providing a container containing the chemical precursor, comprising a sidewall; a base; a lid; and a head space including space above surface of the liquid chemical precursor within the container; an inlet passing through the lid and having a nozzle inside the head space; and an outlet passing through the lid; wherein a tip of the nozzle is located with a distance of greater than or equal to 0.5 inches (1.3 cm) from surface of the liquid chemical precursor; the nozzle is at an angle in the range of 88 to 92°to the lid; passing a carrier gas through the nozzle and impinging upon the surface of the liquid chemical precursor to produce a vapor or droplets of the chemical precursor mixing with the carrier gas to form a precursor-laden fluid stream; and passing the precursor-laden fluid stream through the outlet of the container to the process tool; wherein the liquid chemical precursor has a low vapor pressure less than 50 Torr-absolute (6.7 kPa) at container temperature set for delivery; and the container has a volume in the range of 100 milliliters (ml) to 10 liters. providing the liquid chemical precursor selected from the group consisting of metal β-diketonates, metal β-diketoesterates, metal β-ketoiminates, metal β-diiminates, metal alkyls, metal carbonyls, alkyl metal carbonyls, metal cyclopentadienyls, metal cyclopentadienyls carbonyls, metal pyrrolyls, metal imidazolyls, metal amidinates, metal alkoxides, and combinations thereof; wherein ligand in the chemical precursor is selected from the group consisting of monodentate, bidentate and multidentate complexing to the metal atoms, and the metal is selected from the group consisting of Mg, Ca, Sr, Ba, Y, La, Ce, Sm, Tb, Er, Yb, Lu, Ti, Zr, Hf, Fe, Co, Ni, Ru, Ir, Rh, Cu, Al, Sn, Pb, Sb, Bi, Te, Cr, Mo and W; wherein ligand in the chemical precursor is selected from the group consisting of monodentate, bidentate and multidentate complexing to the metal atoms, and the metal is selected from the group consisting of Mg, Ca, Sr, Ba, Y, La, Ce, Sm, Tb, Er, Yb, Lu, Ti, Zr, Hf, Fe, Co, Ni, Ru, Ir, Rh, Cu, Al, Sn, Pb, Sb, Bi, Te, Cr, Mo and W; providing a container containing the chemical precursor, comprising a sidewall; a base; a lid; and a head space including space above surface of the liquid chemical precursor within the container; an inlet passing through the lid and having a nozzle inside the head space; and an outlet passing through the lid; wherein a tip of the nozzle is located with a distance of greater than or equal to 0.5 inches (1.3 cm) from surface of the liquid chemical precursor; the nozzle is at an angle in the range of 88 to 92°to the lid; a sidewall; a base; a lid; and a head space including space above surface of the liquid chemical precursor within the container; an inlet passing through the lid and having a nozzle inside the head space; and an outlet passing through the lid; wherein a tip of the nozzle is located with a distance of greater than or equal to 0.5 inches (1.3 cm) from surface of the liquid chemical precursor; the nozzle is at an angle in the range of 88 to 92°to the lid; wherein a tip of the nozzle is located with a distance of greater than or equal to 0.5 inches (1.3 cm) from surface of the liquid chemical precursor; the nozzle is at an angle in the range of 88 to 92°to the lid; passing a carrier gas through the nozzle and impinging upon the surface of the liquid chemical precursor to produce a vapor or droplets of the chemical precursor mixing with the carrier gas to form a precursor-laden fluid stream; and passing the precursor-laden fluid stream through the outlet of the container to the process tool; the liquid chemical precursor has a low vapor pressure less than 50 Torr-absolute (6.7 kPa) at container temperature set for delivery; and the container has a volume in the range of 100 milliliters (ml) to 10 liters.