A heating apparatus for heating a plate-like heating target object, the plate-like heating target object having a thickness of about 1mm or less, the heating apparatus comprising: a heater having a front face formed to have a size capable of covering a whole face (Wf) of the heating target object and configured to generate heat to be applied to the heating target object; and a support member for supporting the face (Wf) of the heating target object in such a manner that the support member is configured to prevent direct heat transfer between the face (Wf) of the heating target object and the support member and a clearance between the front face and the face (Wf) of the heating target object is maintained in a predetermined clearance when the heating target object is supported, wherein the predetermined clearance allows a fluid to be present between the front face and the face (Wf) of the heating target object but does not induce convection of the fluid; the heater including: a heating source for receiving external energy and converting the external energy into heat; and a jig having the front face formed thereon, the jig being configured to receive heat from the heating source and transfer heat to the fluid present in the predetermined clearance while preventing the heating target object from being directly exposed to electromagnetic waves that cause heat generation; wherein the support member is configured to include a plurality of projections which are disposed on the front face of the jig; the heating apparatus further comprising: a chamber accommodating the jig and the support member; and a gas supply unit for supplying an inert gas or reducing gas into the chamber at such a flow rate that the heating target object supported on the support member is not flapped; wherein the fluid present in the predetermined clearance is the inert gas or reducing gas; characterised in that each of the projections is formed integrally with the jig and the jig is configured to be movable between a state of being located in a position opposed to the heating source and a state of not being located in the position opposed to the heating source. a heater having a front face formed to have a size capable of covering a whole face (Wf) of the heating target object and configured to generate heat to be applied to the heating target object; and a support member for supporting the face (Wf) of the heating target object in such a manner that the support member is configured to prevent direct heat transfer between the face (Wf) of the heating target object and the support member and a clearance between the front face and the face (Wf) of the heating target object is maintained in a predetermined clearance when the heating target object is supported, wherein the predetermined clearance allows a fluid to be present between the front face and the face (Wf) of the heating target object but does not induce convection of the fluid; the heater including: a heating source for receiving external energy and converting the external energy into heat; and a jig having the front face formed thereon, the jig being configured to receive heat from the heating source and transfer heat to the fluid present in the predetermined clearance while preventing the heating target object from being directly exposed to electromagnetic waves that cause heat generation; a heating source for receiving external energy and converting the external energy into heat; and a jig having the front face formed thereon, the jig being configured to receive heat from the heating source and transfer heat to the fluid present in the predetermined clearance while preventing the heating target object from being directly exposed to electromagnetic waves that cause heat generation; wherein the support member is configured to include a plurality of projections which are disposed on the front face of the jig; the heating apparatus further comprising: a chamber accommodating the jig and the support member; and a gas supply unit for supplying an inert gas or reducing gas into the chamber at such a flow rate that the heating target object supported on the support member is not flapped; a chamber accommodating the jig and the support member; and a gas supply unit for supplying an inert gas or reducing gas into the chamber at such a flow rate that the heating target object supported on the support member is not flapped; wherein the fluid present in the predetermined clearance is the inert gas or reducing gas; characterised in that each of the projections is formed integrally with the jig and the jig is configured to be movable between a state of being located in a position opposed to the heating source and a state of not being located in the position opposed to the heating source.