Particle beam device with - a first particle beam column with a first optical axis, - a second particle beam column with a second optical axis, wherein the first optical axis and the second optical axis form an included angle (α), - at least one carrier element, which is formed movably in three spatial directions (x, y, z) arranged perpendicularly in relation to one another and which is rotatable about a first axis and about a second axis (x), which is perpendicular to the first axis, - at least a first receiving element for receiving a first specimen and with at least a second receiving element for receiving a second specimen, wherein the first receiving element and the second receiving element are arranged on the carrier element in such a way that a movement of the carrier element always causes a movement of the first receiving element and the second receiving element in the same spatial direction (x, y, z) and/or about the same axis (8, 8', x), wherein the first receiving element and the second receiving element do not have any movement mechanisms, - wherein the carrier element can be moved into at least a first position and into at least a second position, wherein, in the first position, a first specimen in the first receiving element can be irradiated by means of a particle beam and wherein, in the second position, a second specimen in the second receiving element can be irradiated by means of a particle beam, wherein - the first receiving element has a first receiving surface, which lies in a first plane, and the second receiving element has a second receiving surface, which lies in a second plane, - the first plane and the second plane are arranged offset in relation to one another by an angle (β) in the range from 10° to 90°, which corresponds to the angle (α) between the first optical axis and the second optical axis, - the first receiving surface and the second receiving surface are aligned in relation to one another in such a way that, in a first rotational position about the second axis, the first plane is aligned perpendicularly to the first optical axis and in that, in a second rotational position about the second axis, the second plane is aligned perpendicularly to the first optical axis, and wherein - a detector (9, 22) is arranged downstream of the carrier element - in the direction of the carrier element as seen from a beam generator (23, 34). - a first particle beam column with a first optical axis, - a second particle beam column with a second optical axis, wherein the first optical axis and the second optical axis form an included angle (α), - at least one carrier element, which is formed movably in three spatial directions (x, y, z) arranged perpendicularly in relation to one another and which is rotatable about a first axis and about a second axis (x), which is perpendicular to the first axis, - at least a first receiving element for receiving a first specimen and with at least a second receiving element for receiving a second specimen, wherein the first receiving element and the second receiving element are arranged on the carrier element in such a way that a movement of the carrier element always causes a movement of the first receiving element and the second receiving element in the same spatial direction (x, y, z) and/or about the same axis (8, 8', x), wherein the first receiving element and the second receiving element do not have any movement mechanisms, - wherein the carrier element can be moved into at least a first position and into at least a second position, wherein, in the first position, a first specimen in the first receiving element can be irradiated by means of a particle beam and wherein, in the second position, a second specimen in the second receiving element can be irradiated by means of a particle beam, - the first receiving element has a first receiving surface, which lies in a first plane, and the second receiving element has a second receiving surface, which lies in a second plane, - the first plane and the second plane are arranged offset in relation to one another by an angle (β) in the range from 10° to 90°, which corresponds to the angle (α) between the first optical axis and the second optical axis, - the first receiving surface and the second receiving surface are aligned in relation to one another in such a way that, in a first rotational position about the second axis, the first plane is aligned perpendicularly to the first optical axis and in that, in a second rotational position about the second axis, the second plane is aligned perpendicularly to the first optical axis, and wherein - a detector (9, 22) is arranged downstream of the carrier element - in the direction of the carrier element as seen from a beam generator (23, 34).