A gas purification processing apparatus comprising: - a main body having an inner tube in which a gas passage part having a mesh shape or a net shape is formed and an outer tube which is disposed on an outer circumference of the inner tube and in which a gas passage part having a mesh shape or a net shape is formed; - a source material supplying part for supplying a source material gas to be processed; - a dispersion part for dispersing the supplied source material gas; - a purification part for conducting purification processing of the dispersed source material gas; - a discharging part for discharging a gas that has passed through the purification part; - a thermometer for measuring a temperature of the purification part; and - a cooling processing part disposed in an upper part of the purification part and for conducting cooling processing of the purification part, wherein the dispersion part is formed of the inner tube and an inside space of the inner tube, and the discharging part is formed of the outer tube, an outside space of the outer tube, and a discharging flow passage; or alternatively, the dispersion part is formed of the outer tube and an outer circumferential space of the outer tube, and the discharging part is formed of the inner tube, an inside space of the inner tube, and a discharging flow passage; the purification part is formed in a space part between the inner tube and the outer tube, and the space part is filled with a gas-permeable adsorbent that is capable of desorption by heating; wherein the inner tube and the outer tube are divided into a plurality of tube bodies (10, 10a - 10d) by one or a plurality of wall parts (8, 8a - 8c) having a central axis of the main body in common; and each of the tube bodies (10, 10a - 10d) has a source material supplying part (2, 2a- 2d), a dispersion part (3, 3a - 3d), a purification part (4, 4a - 4d), a discharging part (5, 5a - 5d), a thermometer (6, 6a - 6d), and a cooling processing part (7, 7a - 7d), wherein the source material gas supplied from the source material supplying part and dispersed in the dispersion part is adapted to pass through the purification part to be subjected to the purification processing and thereafter can be discharged as a purified gas via the discharging part; and when the temperature of the purification part exceeds a predetermined temperature, a cooling medium is adapted to be supplied out from the cooling processing part so as to perform the cooling processing of the purification part. - a main body having an inner tube in which a gas passage part having a mesh shape or a net shape is formed and an outer tube which is disposed on an outer circumference of the inner tube and in which a gas passage part having a mesh shape or a net shape is formed; - a source material supplying part for supplying a source material gas to be processed; - a dispersion part for dispersing the supplied source material gas; - a purification part for conducting purification processing of the dispersed source material gas; - a discharging part for discharging a gas that has passed through the purification part; - a thermometer for measuring a temperature of the purification part; and - a cooling processing part disposed in an upper part of the purification part and for conducting cooling processing of the purification part, wherein the dispersion part is formed of the inner tube and an inside space of the inner tube, and the discharging part is formed of the outer tube, an outside space of the outer tube, and a discharging flow passage; or alternatively, the dispersion part is formed of the outer tube and an outer circumferential space of the outer tube, and the discharging part is formed of the inner tube, an inside space of the inner tube, and a discharging flow passage; the purification part is formed in a space part between the inner tube and the outer tube, and the space part is filled with a gas-permeable adsorbent that is capable of desorption by heating; wherein the inner tube and the outer tube are divided into a plurality of tube bodies (10, 10a - 10d) by one or a plurality of wall parts (8, 8a - 8c) having a central axis of the main body in common; and each of the tube bodies (10, 10a - 10d) has a source material supplying part (2, 2a- 2d), a dispersion part (3, 3a - 3d), a purification part (4, 4a - 4d), a discharging part (5, 5a - 5d), a thermometer (6, 6a - 6d), and a cooling processing part (7, 7a - 7d),