A method for producing a film by decomposing a heteroleptic organometallic precursor compound; thereby producing the film, wherein the heteroleptic organometallic compound is selected from: bis(diisopropylamino)bis(dimethylamino)hafnium, bis(diisopropylamino)bis(dimethylamino)zirconium, bis(diisopropylamino)bis(dimethylamino)titanium, bis(diisopropylamino)bis(dimethylamino)molybdenum, bis(diisopropylamino)bis(dimethylamino)tungsten, bis(di-t-butylamino)bis(dimethylamino)hafnium, bis(di-t-butylamino)bis(dimethylamino)zirconium, bis(di-t-butylamino)bis(dimethylamino)titanium, bis(di-t-butylamino)bis(dimethylamino)molybdenum, bis(di-t-butylamino)bis(dimethylamino)tungsten, bis(ethylmethylamino)bis(diisopropylamino)hafnium bis(ethylmethylamino)bis(diisopropylamino)zirconium, bis(ethylmethylamino)bis(diisopropylamino)titanium, bis(ethylmethylamino)bis(diisopropylamino)molybdenum, bis(ethylmethylamino)bis(diisopropylamino)tungsten, bis(diethylamino)bis(diisopropylamino)hafnium bis(diethylamino)bis(diisopropylamino)zirconium, bis(diethylamino)bis(diisopropylamino)titanium, bis(diethylamino)bis(diisopropylamino)molybdenum, bis(diethylamino)bis(diisopropylamino)tungsten, tris(diisopropylamino)(dimethylamino)hafnium tris(diisopropylamino)(dimethylamino)zirconium, tris(diisopropylamino)(dimethylamino)titanium, tris(diisopropylamino)(dimethylamino)molybdenum, tris(diisopropylamino)(dimethylamino)tungsten, tris(diethylamino)(diisopropylamino)hafnium, tris(diethylamino)(diisopropylamino)zirconium, tris(diethylamino)(diisopropylamino)titanium, tris(diethylamino)(diisopropylamino)molybdenum, tris(diethylamino)(diisopropylamino)tungsten, bis(dimethylamino)bis(bis(trimethylsilyl)amino)hafnium, bis(dimethylamino)bis(bis(trimethylsilyl)amino)zirconium, bis(dimethylamino)bis(bis(trimethylsilyl)amino)titanium, bis(dimethylamino)bis(bis(trimethylsilyl)amino)molybdenum, bis(dimethylamino)bis(bis(trimethylsilyl)amino)tungsten, tris(dimethylamino)(bis(trimethylsilyl)amino)hafnium, tris(dimethylamino)(bis(trimethylsilyl)amino)zirconium, tris(dimethylamino)(bis(trimethylsilyl)amino)titanium, tris(dimethylamino)(bis(trimethylsilyl)amino)molybdenum, tris(dimethylamino)(bis(trimethylsilyl)amino)tungsten. bis(diisopropylamino)bis(dimethylamino)hafnium, bis(diisopropylamino)bis(dimethylamino)zirconium, bis(diisopropylamino)bis(dimethylamino)titanium, bis(diisopropylamino)bis(dimethylamino)molybdenum, bis(diisopropylamino)bis(dimethylamino)tungsten, bis(di-t-butylamino)bis(dimethylamino)hafnium, bis(di-t-butylamino)bis(dimethylamino)zirconium, bis(di-t-butylamino)bis(dimethylamino)titanium, bis(di-t-butylamino)bis(dimethylamino)molybdenum, bis(di-t-butylamino)bis(dimethylamino)tungsten, bis(ethylmethylamino)bis(diisopropylamino)hafnium bis(ethylmethylamino)bis(diisopropylamino)zirconium, bis(ethylmethylamino)bis(diisopropylamino)titanium, bis(ethylmethylamino)bis(diisopropylamino)molybdenum, bis(ethylmethylamino)bis(diisopropylamino)tungsten, bis(diethylamino)bis(diisopropylamino)hafnium bis(diethylamino)bis(diisopropylamino)zirconium, bis(diethylamino)bis(diisopropylamino)titanium, bis(diethylamino)bis(diisopropylamino)molybdenum, bis(diethylamino)bis(diisopropylamino)tungsten, tris(diisopropylamino)(dimethylamino)hafnium tris(diisopropylamino)(dimethylamino)zirconium, tris(diisopropylamino)(dimethylamino)titanium, tris(diisopropylamino)(dimethylamino)molybdenum, tris(diisopropylamino)(dimethylamino)tungsten, tris(diethylamino)(diisopropylamino)hafnium, tris(diethylamino)(diisopropylamino)zirconium, tris(diethylamino)(diisopropylamino)titanium, tris(diethylamino)(diisopropylamino)molybdenum, tris(diethylamino)(diisopropylamino)tungsten, bis(dimethylamino)bis(bis(trimethylsilyl)amino)hafnium, bis(dimethylamino)bis(bis(trimethylsilyl)amino)zirconium, bis(dimethylamino)bis(bis(trimethylsilyl)amino)titanium, bis(dimethylamino)bis(bis(trimethylsilyl)amino)molybdenum, bis(dimethylamino)bis(bis(trimethylsilyl)amino)tungsten, tris(dimethylamino)(bis(trimethylsilyl)amino)hafnium, tris(dimethylamino)(bis(trimethylsilyl)amino)zirconium, tris(dimethylamino)(bis(trimethylsilyl)amino)titanium, tris(dimethylamino)(bis(trimethylsilyl)amino)molybdenum, tris(dimethylamino)(bis(trimethylsilyl)amino)tungsten.