A process for analysing a single molecule comprising the following steps: (a) providing at least one single molecule to be analysed positioned at an individual sample spot on a support, wherein said spot has a diameter in the range of about 1 - 20 nm and the distance between each individual spot is at least about 10 times, preferably about 20 - 500 times the diameter of the spot, (b) individually illuminating a single molecule at an individual sample spot with a light source, wherein said light source provides at least one illuminated volume element at the sample spot, (c) individually detecting light from said single molecule with a light detector comprising at least one detection pixel, wherein said detection pixel on the detector has a diameter in the range of about 0.5 μm - 50 μm and the distance between each detection pixel is at least about 2 times, preferably about 3-10 times the diameter of the detection pixel, (d) optically projecting said detection pixel onto the support by means of an optical pathway between the light source, the support and the light detector, wherein the optical projection has a diameter in the range of about 100 nm - 5 μm and is about 10-200 times smaller than the size of the detection pixel on the detector, (e) aligning an individual sample spot on the support to the optical projection of a single detection pixel, particularly to the center of the projection of a single detection pixel on the support, wherein the distance between individual sample spots on the support is equivalent to the distance between optical projections of detection pixels on the support and (f) correlating the detected light from an individual detection pixel with an event associated with a single molecule positioned on an individual spot, wherein the molecules to be analysed are illuminated through an at least partially optically transparent support and wherein emission light emitted through the support is determined, wherein light is emitted through the support and the formation of an evanescent excitation field is caused by internal reflection, particularly by total internal reflection, on the support surface in the region of the illuminated sample spots. (a) providing at least one single molecule to be analysed positioned at an individual sample spot on a support, wherein said spot has a diameter in the range of about 1 - 20 nm and the distance between each individual spot is at least about 10 times, preferably about 20 - 500 times the diameter of the spot, (b) individually illuminating a single molecule at an individual sample spot with a light source, wherein said light source provides at least one illuminated volume element at the sample spot, (c) individually detecting light from said single molecule with a light detector comprising at least one detection pixel, wherein said detection pixel on the detector has a diameter in the range of about 0.5 μm - 50 μm and the distance between each detection pixel is at least about 2 times, preferably about 3-10 times the diameter of the detection pixel, (d) optically projecting said detection pixel onto the support by means of an optical pathway between the light source, the support and the light detector, wherein the optical projection has a diameter in the range of about 100 nm - 5 μm and is about 10-200 times smaller than the size of the detection pixel on the detector, (e) aligning an individual sample spot on the support to the optical projection of a single detection pixel, particularly to the center of the projection of a single detection pixel on the support, wherein the distance between individual sample spots on the support is equivalent to the distance between optical projections of detection pixels on the support and (f) correlating the detected light from an individual detection pixel with an event associated with a single molecule positioned on an individual spot,