A semiconductor coating composition useful as aperture fill compositions and bottom antireflective coatings, the semiconductor coating composition comprising: at least one nonpolymeric, binder; at least one crosslinking agent; and at least one solvent, and wherein the nonpolymeric binder is a non-polymeric, chromophore-containing binder (NPCB) represented by formula, where: Q 1 is a multivalent organic nucleus; Z 1 and Z 11 are divalent linking groups; W is a divalent organic bridging group; T is an organic DUV chromophore-containing substituent, the DUV chromophore selected from the group consisting of: a susbstituted or unsubstituted phenyl, a substituted or unsubstituted C 3 -C 5 mononuclear heteroaryl containing one or more oxygen, sulfur, or nitrogen atoms including mixtures thereof, a substituted or unsubstituted C 10 -C 30 polynuclear aryl, a substituted or unsubstituted C 6 -C 30 polynuclear heteroaryl containing one or more oxygen, sulfur, or nitrogen atoms including mixtures thereof, and a nonaromatic Deep UV chromophore-containing at least one double bond conjugated with at least one electron withdrawing group; X is a reactive functional group, each X group may be the same or different and is selected from the group consisting of hydroxyl, sulfhydryl, primary or secondary amino, alkenyl, allyl ether, vinyl ether, (meth)acryl, halogen, sulfonate, carboxyl, carboxyl ester, carboxyl anhydride, and carboxyl acid halide; Y 11 is a reactive functional group; a ranges from 2 to 15; b ranges from zero to 10; c ranges from zero to 5; and d = 1, wherein Q 1, W, and T together contain at least two groups or sites which are reactive in a crosslinking reaction with the proviso that the sum of ( a + b + c) is greater than or equal to 3 and Q 1 is an unsubstituted C 2 -C 40 linear, branched, cyclic, or polycyclic aliphatic group not containing as an integral part of a ring or chain structure oxygen, sulfur, or nitrogen atoms. at least one nonpolymeric, binder; at least one crosslinking agent; and at least one solvent, and Q 1 is a multivalent organic nucleus; Z 1 and Z 11 are divalent linking groups; W is a divalent organic bridging group; T is an organic DUV chromophore-containing substituent, the DUV chromophore selected from the group consisting of: a susbstituted or unsubstituted phenyl, a substituted or unsubstituted C 3 -C 5 mononuclear heteroaryl containing one or more oxygen, sulfur, or nitrogen atoms including mixtures thereof, a substituted or unsubstituted C 10 -C 30 polynuclear aryl, a substituted or unsubstituted C 6 -C 30 polynuclear heteroaryl containing one or more oxygen, sulfur, or nitrogen atoms including mixtures thereof, and a nonaromatic Deep UV chromophore-containing at least one double bond conjugated with at least one electron withdrawing group; a susbstituted or unsubstituted phenyl, a substituted or unsubstituted C 3 -C 5 mononuclear heteroaryl containing one or more oxygen, sulfur, or nitrogen atoms including mixtures thereof, a substituted or unsubstituted C 10 -C 30 polynuclear aryl, a substituted or unsubstituted C 6 -C 30 polynuclear heteroaryl containing one or more oxygen, sulfur, or nitrogen atoms including mixtures thereof, and a nonaromatic Deep UV chromophore-containing at least one double bond conjugated with at least one electron withdrawing group; X is a reactive functional group, each X group may be the same or different and is selected from the group consisting of hydroxyl, sulfhydryl, primary or secondary amino, alkenyl, allyl ether, vinyl ether, (meth)acryl, halogen, sulfonate, carboxyl, carboxyl ester, carboxyl anhydride, and carboxyl acid halide; Y 11 is a reactive functional group; a ranges from 2 to 15; b ranges from zero to 10; c ranges from zero to 5; and d = 1,