A substrate transfer apparatus adapted to transfer a substrate stopped at a first position toward a second position and to stop the substrate at the second position, the substrate transfer apparatus characterized by comprising: substrate transfer means (21 a, 21 b, 21 c) for transferring a substrate along a substrate transfer path extending from the first position to the second position; detection means (SNb) for detecting the substrate at an intermediate position between the first position and the second position when the substrate is traveling along the substrate transfer path; and control means for controlling the substrate transfer means (21 a, 21 b, 21 c), the control means includes: a time measurement section adapted to measure an intermediate position arrival time that is a period of time required for transferring the substrate from the first position to the intermediate position where the substrate is detected by the detection means (SNb); and a velocity control section (31, 33) adapted to control a deceleration pattern in accordance with the intermediate position arrival time so that the substrate detected by the detection means (SNb) is decelerated to stop at the second position, wherein the control means is configured to measure the intermediate position arrival time while the substrate is being transferred from the substrate stop position toward the second position and the control means is configured to assess a transfer status of the substrate based on the intermediate position arrival time, and, before transferring the substrate to the second position, the control means is configured to control the deceleration pattern by altering control parameters in accordance with the intermediate position arrival time in order to accurately stop and position the substrate at the second position. substrate transfer means (21 a, 21 b, 21 c) for transferring a substrate along a substrate transfer path extending from the first position to the second position; detection means (SNb) for detecting the substrate at an intermediate position between the first position and the second position when the substrate is traveling along the substrate transfer path; and control means for controlling the substrate transfer means (21 a, 21 b, 21 c), the control means includes: a time measurement section adapted to measure an intermediate position arrival time that is a period of time required for transferring the substrate from the first position to the intermediate position where the substrate is detected by the detection means (SNb); and a velocity control section (31, 33) adapted to control a deceleration pattern in accordance with the intermediate position arrival time so that the substrate detected by the detection means (SNb) is decelerated to stop at the second position, wherein the control means is configured to measure the intermediate position arrival time while the substrate is being transferred from the substrate stop position toward the second position and the control means is configured to assess a transfer status of the substrate based on the intermediate position arrival time, and, before transferring the substrate to the second position, the control means is configured to control the deceleration pattern by altering control parameters in accordance with the intermediate position arrival time in order to accurately stop and position the substrate at the second position. a time measurement section adapted to measure an intermediate position arrival time that is a period of time required for transferring the substrate from the first position to the intermediate position where the substrate is detected by the detection means (SNb); and a velocity control section (31, 33) adapted to control a deceleration pattern in accordance with the intermediate position arrival time so that the substrate detected by the detection means (SNb) is decelerated to stop at the second position, wherein the control means is configured to measure the intermediate position arrival time while the substrate is being transferred from the substrate stop position toward the second position and the control means is configured to assess a transfer status of the substrate based on the intermediate position arrival time, and, before transferring the substrate to the second position, the control means is configured to control the deceleration pattern by altering control parameters in accordance with the intermediate position arrival time in order to accurately stop and position the substrate at the second position.