Device for interferometric measurement of an object, comprising a radiation source, an interferometer and at least one first detector, wherein the interferometer is embodied with an output-beam beam input for coupling in an output beam and with a beam splitter device for splitting the output beam into at least one first sub-beam as measuring beam, a first reference sub-beam and at least one second reference sub-beam, wherein the interferometer is in the form of a heterodyne interferometer in that at least one optical frequency shifter is arranged in the beam path of the interferometer and wherein the interferometer has one or more optical waveguide elements (2, F2, F3, F4) by means of which optical waveguides are formed at least between the output-beam beam input, the beam splitter device and the frequency shifter, wherein the frequency shifter is arranged in the beam path of one of the sub-beams, wherein the radiation source and the interferometer are configured to co-operate in such a way that a light beam generated by the radiation source can be coupled as output beam into the output-beam beam input, wherein the interferometer is configured to image the first sub-beam as measuring beam onto the object and wherein the beam splitter device is also configured to split the measuring beam at least partly reflected by the object into a first received sub-beam and at least one second received sub-beam, wherein the device has at least one second detector and is configured in such a way that the first received sub-beam is superimposed with the first reference sub-beam on a detection surface of the first detector and the second received sub-beam is superimposed with the second reference sub-beam on a detection surface of the second detector, in each case giving rise to optical interference, and the device has an evaluating unit for evaluating the measuring signals of the first and second detectors (12a, 12b), which evaluating unit is configured to evaluate the measuring signals of the two detectors according to the principle of reception diversity and wherein the device is configured in such a way that the raw signals of the first detector and of the second detector are substantially statistically independent, wherein the device comprises at least one optical beam-splitting means which is arranged in the beam path of the received beam and/or of the first and/or of the second received sub-beam and is configured in such a way that, using the first and second detectors, different polarisation components and/or different beam cross-section components and/or different modes of the received beam can be evaluated. wherein the interferometer is embodied with an output-beam beam input for coupling in an output beam and with a beam splitter device for splitting the output beam into at least one first sub-beam as measuring beam, a first reference sub-beam and at least one second reference sub-beam, wherein the interferometer is in the form of a heterodyne interferometer in that at least one optical frequency shifter is arranged in the beam path of the interferometer and wherein the interferometer has one or more optical waveguide elements (2, F2, F3, F4) by means of which optical waveguides are formed at least between the output-beam beam input, the beam splitter device and the frequency shifter, wherein the frequency shifter is arranged in the beam path of one of the sub-beams, wherein the radiation source and the interferometer are configured to co-operate in such a way that a light beam generated by the radiation source can be coupled as output beam into the output-beam beam input, wherein the interferometer is configured to image the first sub-beam as measuring beam onto the object and wherein the beam splitter device is also configured to split the measuring beam at least partly reflected by the object into a first received sub-beam and at least one second received sub-beam, wherein the device has at least one second detector and is configured in such a way that the first received sub-beam is superimposed with the first reference sub-beam on a detection surface of the first detector and the second received sub-beam is superimposed with the second reference sub-beam on a detection surface of the second detector, in each case giving rise to optical interference, and the device has an evaluating unit for evaluating the measuring signals of the first and second detectors (12a, 12b), which evaluating unit is configured to evaluate the measuring signals of the two detectors according to the principle of reception diversity and wherein the device is configured in such a way that the raw signals of the first detector and of the second detector are substantially statistically independent, wherein the device comprises at least one optical beam-splitting means which is arranged in the beam path of the received beam and/or of the first and/or of the second received sub-beam and is configured in such a way that, using the first and second detectors, different polarisation components and/or different beam cross-section components and/or different modes of the received beam can be evaluated.