A distance measuring method for measuring surfaces, in particular of industrial workpieces, having at least one - generation of a laser beam, the wavelength of which is tunable by a frequency modulation of a laser source, in particular in the form of a ramp, in a wavelength range to provide measuring radiation having a coherence length, in particular a coherence length of greater than 1 mm, preferably of greater than 60 mm, - emission of the measuring radiation onto the surface, which is located within a predefined distance range, - reception of the measuring radiation backscattered from the surface, and - interferometric distance measurement of a reference point to the surface employing a measuring interferometer arm and a reference interferometer arm, in particular wherein the measuring radiation is emitted during a scanning guiding over the surface to be measured and is received again and during the interferometric distance measurements, measuring interferometer arm and reference interferometer arm have a partially shared beam path, preferably having a reference surface, which defines the reference interferometer arm and lies within a beam shaping optic used for emitting the laser beam, characterized in that - the predefined distance range lies at least partially, in particular completely outside the coherence length and - the measuring radiation is split into two radiation fractions (5, 6), wherein one of the radiation fractions is time-delayed in relation to the other fraction by means of a delay section (3, 3') such that an optical path difference thus caused corresponds to an optical path difference, which corresponds to a distance in the predefined distance range, plus or minus the coherence length of the laser, and wherein the delay section (3, 3') is at least partly embodied in Zerodur, in particular with walls embodied in Zerodur, and - the two radiation fractions (5, 6) are embodied by a first radiation fraction and a second radiation fraction, in particular the measuring radiation is split into the first radiation fraction and the second radiation fraction by coupling into a first 50%-beam splitter (2', 2'''), - wherein the first radiation fraction propagates in sealed air channels in a Zerodur part, and, in particular by means of a second 50% beam splitter (2'', 2''''), the first radiation fraction and the second radiation fraction are guided together again, in particular wherein the first beam splitter (2', 2'''), the second beam splitter (2'', 2'''') and the Zerodur part are designed and arranged such that the optical path in the air channels is constant independent of temperature as well as the paths within the beam splitters (2', 2'', 2''', 2'''') are identical for both interferometer arms resulting therefrom. - generation of a laser beam, the wavelength of which is tunable by a frequency modulation of a laser source, in particular in the form of a ramp, in a wavelength range to provide measuring radiation having a coherence length, in particular a coherence length of greater than 1 mm, preferably of greater than 60 mm, - emission of the measuring radiation onto the surface, which is located within a predefined distance range, - reception of the measuring radiation backscattered from the surface, and - interferometric distance measurement of a reference point to the surface employing a measuring interferometer arm and a reference interferometer arm, in particular wherein the measuring radiation is emitted during a scanning guiding over the surface to be measured and is received again and during the interferometric distance measurements, measuring interferometer arm and reference interferometer arm have a partially shared beam path, preferably having a reference surface, which defines the reference interferometer arm and lies within a beam shaping optic used for emitting the laser beam, characterized in that - the predefined distance range lies at least partially, in particular completely outside the coherence length and - the measuring radiation is split into two radiation fractions (5, 6), wherein one of the radiation fractions is time-delayed in relation to the other fraction by means of a delay section (3, 3') such that an optical path difference thus caused corresponds to an optical path difference, which corresponds to a distance in the predefined distance range, plus or minus the coherence length of the laser, and wherein the delay section (3, 3') is at least partly embodied in Zerodur, in particular with walls embodied in Zerodur, and - the two radiation fractions (5, 6) are embodied by a first radiation fraction and a second radiation fraction, in particular the measuring radiation is split into the first radiation fraction and the second radiation fraction by coupling into a first 50%-beam splitter (2', 2'''), - wherein the first radiation fraction propagates in sealed air channels in a Zerodur part, and, in particular by means of a second 50% beam splitter (2'', 2''''), the first radiation fraction and the second radiation fraction are guided together again, in particular wherein the first beam splitter (2', 2'''), the second beam splitter (2'', 2'''') and the Zerodur part are designed and arranged such that the optical path in the air channels is constant independent of temperature as well as the paths within the beam splitters (2', 2'', 2''', 2'''') are identical for both interferometer arms resulting therefrom.