A susceptor wherein a multiplicity of circular recesses having an identical diameter are disposed in a circular surface thereof, where the multiplicity of recesses comprises a plurality of recess arrays (A1, A2) disposed in a closest packed arrangement and an outermost peripheral recess array disposed on an outer peripheral portion of the plurality of recess arrays (A1, A2); the closest packed arrangement comprises one recess (M) disposed at a central portion of the circular surface, and N number of concentric regular hexagonal recess arrays (A1, A2) (N is any integer equal to or greater than 2) disposed on an outer peripheral side of the recess (M) disposed at the central portion; in each of the recess arrays (A1, A2), each of the recesses (M, M) forming the recess array (A1, A2) is substantially in point contact with adjacent recesses thereto; each of the recesses (M) forming a first recess array located to be an innermost one of the N number of the recess arrays (A1, A2) is substantially in point contact with the recess (M) disposed at the central portion; each of the recesses (M) forming the E-th recess array being closer to the outer circumference than the first recess array of the plurality of recess arrays (A1, A2) is substantially in point contact with each of the recesses (M) forming the (E ― 1)th recess array being on the inner peripheral side of the E-th recess array, wherein E is any integer in the range 2 ≤ E ≤ N; and the outermost peripheral recess array is configured so that i) each of the recesses (M) located at vertex positions of the N-th recess array of the N number of recess arrays (A1, A2) forming the closest packed arrangement is substantially in point contact with two of the recesses (M) forming the outermost peripheral recess array, ii) that in the outermost peripheral recess array, each of the recesses (M) forming the outermost peripheral recess array is substantially in point contact with adjacent recesses thereto, and that iii) the same number of recesses (M) as the number of the recesses (M) sandwiched by the two recesses (M) disposed at two vertices of the N-th recess array are interposed between the two recesses (M) related to one of adjacent vertex positions of the N-th recess array and the two recesses (M) related to the other one of the adjacent vertex positions thereof. the multiplicity of recesses comprises a plurality of recess arrays (A1, A2) disposed in a closest packed arrangement and an outermost peripheral recess array disposed on an outer peripheral portion of the plurality of recess arrays (A1, A2); the closest packed arrangement comprises one recess (M) disposed at a central portion of the circular surface, and N number of concentric regular hexagonal recess arrays (A1, A2) (N is any integer equal to or greater than 2) disposed on an outer peripheral side of the recess (M) disposed at the central portion; in each of the recess arrays (A1, A2), each of the recesses (M, M) forming the recess array (A1, A2) is substantially in point contact with adjacent recesses thereto; each of the recesses (M) forming a first recess array located to be an innermost one of the N number of the recess arrays (A1, A2) is substantially in point contact with the recess (M) disposed at the central portion; each of the recesses (M) forming the E-th recess array being closer to the outer circumference than the first recess array of the plurality of recess arrays (A1, A2) is substantially in point contact with each of the recesses (M) forming the (E ― 1)th recess array being on the inner peripheral side of the E-th recess array, wherein E is any integer in the range 2 ≤ E ≤ N; and the outermost peripheral recess array is configured so that i) each of the recesses (M) located at vertex positions of the N-th recess array of the N number of recess arrays (A1, A2) forming the closest packed arrangement is substantially in point contact with two of the recesses (M) forming the outermost peripheral recess array, ii) that in the outermost peripheral recess array, each of the recesses (M) forming the outermost peripheral recess array is substantially in point contact with adjacent recesses thereto, and that iii) the same number of recesses (M) as the number of the recesses (M) sandwiched by the two recesses (M) disposed at two vertices of the N-th recess array are interposed between the two recesses (M) related to one of adjacent vertex positions of the N-th recess array and the two recesses (M) related to the other one of the adjacent vertex positions thereof. i) each of the recesses (M) located at vertex positions of the N-th recess array of the N number of recess arrays (A1, A2) forming the closest packed arrangement is substantially in point contact with two of the recesses (M) forming the outermost peripheral recess array, ii) that in the outermost peripheral recess array, each of the recesses (M) forming the outermost peripheral recess array is substantially in point contact with adjacent recesses thereto, and that iii) the same number of recesses (M) as the number of the recesses (M) sandwiched by the two recesses (M) disposed at two vertices of the N-th recess array are interposed between the two recesses (M) related to one of adjacent vertex positions of the N-th recess array and the two recesses (M) related to the other one of the adjacent vertex positions thereof.