A MEMS device, comprising: a layer stack having at least one second layer formed between a first layer and a third layer, wherein a cavity is formed in the second layer; two laterally deflectable elements (120, 130) arranged laterally spaced apart in the cavity, each of the two laterally deflectable elements (120, 130) each having an end connected to a sidewall of the cavity; a connecting element connected to the two laterally deflectable elements (120, 130) to couple the movement of the two laterally deflectable elements (120, 130); a plurality of first fingers (150-1,..., 150-6) arranged discretely spaced apart between the two laterally deflectable elements (120, 130) on the sidewall of the cavity; a plurality of second fingers (160-1,..., 160-5) arranged discretely spaced apart between the two laterally deflectable elements (120, 130) on the connecting element and engaging with the plurality of first fingers (150-1,..., 150-6), wherein the plurality of second fingers (160-1,..., 160-5) is laterally displaceable relative to the plurality of first fingers (150-1,..., 150-6) upon deformation of the two laterally deflectable elements (120, 130), so that the plurality of first fingers (150-1,..., 150-6) and the plurality of second fingers (160-1,..., 160-5) define a plurality of volume-variable sub-cavities (116-1,..., 116-10) within the cavity, wherein each of the plurality of sub-cavities (116-1,..., 116-10) is in contact with an ambient fluid of the MEMS device via a respective opening (170-1,..., 170-5, 180-1,..., 180-5), and wherein, in the case of adjacent sub-cavities of the plurality of sub-cavities (116-1,..., 116-10), the opening (170-1,..., 170-5) of the one sub-cavity of the adjacent sub-cavities is respectively formed in a different layer of the first layer, the second layer, and the third layer than the opening (180-1,..., 180-5) of the other sub-cavity of the adjacent sub-cavities. a layer stack having at least one second layer formed between a first layer and a third layer, wherein a cavity is formed in the second layer; two laterally deflectable elements (120, 130) arranged laterally spaced apart in the cavity, each of the two laterally deflectable elements (120, 130) each having an end connected to a sidewall of the cavity; a connecting element connected to the two laterally deflectable elements (120, 130) to couple the movement of the two laterally deflectable elements (120, 130); a plurality of first fingers (150-1,..., 150-6) arranged discretely spaced apart between the two laterally deflectable elements (120, 130) on the sidewall of the cavity; a plurality of second fingers (160-1,..., 160-5) arranged discretely spaced apart between the two laterally deflectable elements (120, 130) on the connecting element and engaging with the plurality of first fingers (150-1,..., 150-6), wherein the plurality of second fingers (160-1,..., 160-5) is laterally displaceable relative to the plurality of first fingers (150-1,..., 150-6) upon deformation of the two laterally deflectable elements (120, 130), so that the plurality of first fingers (150-1,..., 150-6) and the plurality of second fingers (160-1,..., 160-5) define a plurality of volume-variable sub-cavities (116-1,..., 116-10) within the cavity, wherein each of the plurality of sub-cavities (116-1,..., 116-10) is in contact with an ambient fluid of the MEMS device via a respective opening (170-1,..., 170-5, 180-1,..., 180-5), and wherein, in the case of adjacent sub-cavities of the plurality of sub-cavities (116-1,..., 116-10), the opening (170-1,..., 170-5) of the one sub-cavity of the adjacent sub-cavities is respectively formed in a different layer of the first layer, the second layer, and the third layer than the opening (180-1,..., 180-5) of the other sub-cavity of the adjacent sub-cavities.