A substrate transfer device, comprising: a pair of guide mechanisms (60,62) disposed in a state of being spaced apart from each other so as to extend in a substrate conveyance direction; a first conveyor belt disposed on each of the pair of guide mechanisms (60,62) at an upstream side in the substrate conveyance direction and configured to convey a substrate to a downstream side in the substrate conveyance direction; a second conveyor belt disposed on each of the pair of guide mechanisms (60,62) at the downstream side in the substrate conveyance direction and configured to convey the substrate conveyed by the first conveyor belt further to the downstream side; and a holding device configured to hold the substrate supported by both the first conveyor belt and the second conveyor belt, wherein a distance between a downstream end of the first conveyor belt and an upstream end of the second conveyor belt is shorter than a substrate length in the substrate conveyance direction, and work can be performed on the substrate held by the holding device, characterized by the substrate transfer device further comprising a lifting and lowering device configured to lift and lower the pair of guide mechanisms (60,62), the first conveyor belt, the second conveyor belt, and the holding device integrally, wherein work can be performed on the substrate held by the holding device in a state in which the pair of guide mechanisms (60,62), the first conveyor belt, the second conveyor belt, and the holding device are integrally lifted by the lifting and lowering device, and after the substrate held by the holding device is released, the first conveyor belt and the second conveyor belt are configured to start an operation while the pair of guide mechanisms (60,62), the first conveyor belt, the second conveyor belt, and the holding device are integrally lowered by the lifting and lowering device. a pair of guide mechanisms (60,62) disposed in a state of being spaced apart from each other so as to extend in a substrate conveyance direction; a first conveyor belt disposed on each of the pair of guide mechanisms (60,62) at an upstream side in the substrate conveyance direction and configured to convey a substrate to a downstream side in the substrate conveyance direction; a second conveyor belt disposed on each of the pair of guide mechanisms (60,62) at the downstream side in the substrate conveyance direction and configured to convey the substrate conveyed by the first conveyor belt further to the downstream side; and a holding device configured to hold the substrate supported by both the first conveyor belt and the second conveyor belt, wherein a distance between a downstream end of the first conveyor belt and an upstream end of the second conveyor belt is shorter than a substrate length in the substrate conveyance direction, and work can be performed on the substrate held by the holding device, characterized by the substrate transfer device further comprising a lifting and lowering device configured to lift and lower the pair of guide mechanisms (60,62), the first conveyor belt, the second conveyor belt, and the holding device integrally, wherein work can be performed on the substrate held by the holding device in a state in which the pair of guide mechanisms (60,62), the first conveyor belt, the second conveyor belt, and the holding device are integrally lifted by the lifting and lowering device, and after the substrate held by the holding device is released, the first conveyor belt and the second conveyor belt are configured to start an operation while the pair of guide mechanisms (60,62), the first conveyor belt, the second conveyor belt, and the holding device are integrally lowered by the lifting and lowering device.