A MEMS pressure sensing apparatus, comprising: a MEMS pressure sensor, wherein, the MEMS pressure sensor comprises a first space on a side of a pressure detection surface of a diaphragm, wherein the side of the pressure detection surface faces the part under measurement, the diaphragm for detecting a pressure using the pressure detection surface facing the first space, wherein the MEMS pressure sensor is configured to output an electrical signal corresponding to the detected pressure; and a first film sheet placed in between the MEMS pressure sensor and a part under measurement so as to support the MEMS pressure sensor, the first film sheet comprises a second space communicating with the first space and having a size in a direction parallel to the pressure detection surface, the size of the first film sheet being larger than the first space, characterized in that the MEMS pressure sensing apparatus further comprises a second film sheet having a third space with a size in a direction parallel to the pressure detection surface for positioning the MEMS pressure sensing apparatus on the part under measurement, the second film sheet is configured for being placed such that an area of the part under measurement is located in the third space before the MEMS pressure sensing apparatus is placed on the part under measurement, wherein the first space, the second space and the third space have bottom surfaces substantially parallel to the pressure detection surface of the diaphragm, wherein the diameter of the bottom surface of the third space is larger than the diameter of the bottom surface of the second space, and the diameter of the bottom surface of the second space is larger than the diameter of the bottom surface of the first space. a MEMS pressure sensor, wherein, the MEMS pressure sensor comprises a first space on a side of a pressure detection surface of a diaphragm, wherein the side of the pressure detection surface faces the part under measurement, the diaphragm for detecting a pressure using the pressure detection surface facing the first space, wherein the MEMS pressure sensor is configured to output an electrical signal corresponding to the detected pressure; and the MEMS pressure sensor comprises a first space on a side of a pressure detection surface of a diaphragm, wherein the side of the pressure detection surface faces the part under measurement, the diaphragm for detecting a pressure using the pressure detection surface facing the first space, wherein a first space on a side of a pressure detection surface of a diaphragm, wherein the side of the pressure detection surface faces the part under measurement, the diaphragm for detecting a pressure using the pressure detection surface facing the first space, wherein the MEMS pressure sensor is configured to output an electrical signal corresponding to the detected pressure; and a first film sheet placed in between the MEMS pressure sensor and a part under measurement so as to support the MEMS pressure sensor, the first film sheet comprises a second space communicating with the first space and having a size in a direction parallel to the pressure detection surface, the size of the first film sheet being larger than the first space, characterized in that the MEMS pressure sensing apparatus further comprises a second film sheet having a third space with a size in a direction parallel to the pressure detection surface for positioning the MEMS pressure sensing apparatus on the part under measurement, the second film sheet is configured for being placed such that an area of the part under measurement is located in the third space before the MEMS pressure sensing apparatus is placed on the part under measurement, wherein the first space, the second space and the third space have bottom surfaces substantially parallel to the pressure detection surface of the diaphragm, wherein the diameter of the bottom surface of the third space is larger than the diameter of the bottom surface of the second space, and the diameter of the bottom surface of the second space is larger than the diameter of the bottom surface of the first space. the diameter of the bottom surface of the third space is larger than the diameter of the bottom surface of the second space, and the diameter of the bottom surface of the second space is larger than the diameter of the bottom surface of the first space.