A vacuum pump arrangement with abatement function comprising: a vacuum pump having a discharge port; a combustion-type abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless; characterized by: the combustion-type abatement part being provided directly on the discharge port of the vacuum pump without a pipe between the combustion-type abatement part and the discharge port of the vacuum pump, such that the exhaust gas which has been heated by compression heat in the vacuum pump is introduced from the discharge port directly into the combustion-type abatement part in which the exhaust gas is treated by combustion, thereby utilizing the compression heat generated in the vacuum pump for treating the exhaust gas in the abatement part; the combustion-type abatement part being configured to meet the expected amount and kind of the exhaust gas discharged from the vacuum pump, and the combustion-type abatement part being selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas; and a common utility facility, which is configured to supply an inert gas to the combustion-type abatement part, wherein the combustion-type abatement part is configured to use heat generated by a combustion-type abatement treatment of the exhaust gas in the combustion-type abatement part to heat the inert gas, and to supply the heated inert gas to the vacuum pump for purging the vacuum pump. a vacuum pump having a discharge port; a combustion-type abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless; characterized by: the combustion-type abatement part being provided directly on the discharge port of the vacuum pump without a pipe between the combustion-type abatement part and the discharge port of the vacuum pump, such that the exhaust gas which has been heated by compression heat in the vacuum pump is introduced from the discharge port directly into the combustion-type abatement part in which the exhaust gas is treated by combustion, thereby utilizing the compression heat generated in the vacuum pump for treating the exhaust gas in the abatement part; the combustion-type abatement part being configured to meet the expected amount and kind of the exhaust gas discharged from the vacuum pump, and the combustion-type abatement part being selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas; and a common utility facility, which is configured to supply an inert gas to the combustion-type abatement part, wherein the combustion-type abatement part is configured to use heat generated by a combustion-type abatement treatment of the exhaust gas in the combustion-type abatement part to heat the inert gas, and to supply the heated inert gas to the vacuum pump for purging the vacuum pump. the combustion-type abatement part being provided directly on the discharge port of the vacuum pump without a pipe between the combustion-type abatement part and the discharge port of the vacuum pump, such that the exhaust gas which has been heated by compression heat in the vacuum pump is introduced from the discharge port directly into the combustion-type abatement part in which the exhaust gas is treated by combustion, thereby utilizing the compression heat generated in the vacuum pump for treating the exhaust gas in the abatement part; the combustion-type abatement part being configured to meet the expected amount and kind of the exhaust gas discharged from the vacuum pump, and the combustion-type abatement part being selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas; and a common utility facility, which is configured to supply an inert gas to the combustion-type abatement part, wherein the combustion-type abatement part is configured to use heat generated by a combustion-type abatement treatment of the exhaust gas in the combustion-type abatement part to heat the inert gas, and to supply the heated inert gas to the vacuum pump for purging the vacuum pump.