An accelerometer having a substantially planar plate-like proof mass, four or more flexible mounting legs each co-planar with the proof mass, a substantially planar, ring-like support, in which the proof mass is moveably mounted, which support is fixedly mounted relative to the proof mass and co-planar therewith, with each mounting leg being connected at one end to the proof mass and connected at another end to the support so that the proof mass is mounted for linear movement in a sensing direction in the plane containing the proof mass, mounting legs and support, in response to acceleration change applied to the accelerometer, and with the mounting legs extending substantially perpendicularly to the sensing direction, a plurality of interdigitated capacitor fingers (9, 9a, 14, 14a) mounted, in a gaseous medium, in the ring-like support for sensing linear movement of, and for providing gaseous medium squeeze damping for, the proof mass in the sensing direction, with the fingers, proof mass, mounting legs and support being co-planar and formed from a single plate of mono-crystalline silicon, which fingers (9, 9a; 14, 14a) comprise: fixed first, second, third and fourth arrays (5, 6, 7, 8) of laterally spaced fingers (9, 9a) extending substantially perpendicularly to the sensing direction and away from the support towards the proof mass, with the first and second arrays (5, 6) being located on one side of the proof mass and with the third and fourth arrays (7, 8) being located on the opposite side of the proof mass; and moveable fifth, sixth, seventh and eighth arrays (10, 11, 12, 13) of laterally spaced fingers (14, 14a) extending substantially perpendicularly to the sensing direction from and attached to the proof mass towards the support; with the moveable fifth and sixth arrays (10, 11) being located on said one side of the proof mass and interdigitated respectively with the fixed first and second arrays (5, 6); and with the moveable seventh and eighth arrays (12,13) being located on said opposite side of the proof mass and interdigitated respectively with the fixed third and fourth arrays (7, 8); with the interdigitation of the fixed first and moveable fifth arrays (5,10) and of the fixed third and moveable seventh arrays (7, 12) being at a first offset in one direction in the sensing direction from a median line between adjacent fingers in the fixed first and third arrays (5, 7); and with the interdigitation of the fixed second and moveable sixth arrays (6,11) and of the fixed fourth and moveable eighth arrays (7,13) being at a second offset equal and in the opposite direction to the first offset from a median line between adjacent fingers in the fixed second and fourth arrays (6, 8), and means (24, 25, 26) for providing a first drive voltage to the fixed first and third offset arrays (5, 7) of fingers (9, 9a) and an equal and opposite second drive voltage to the fixed second and fourth offset arrays (6,8) of fingers (9, 9a) such that the interdigitated fingers (9, 9a; 14, 14a) provide for the proof mass sensing of displacement in response to acceleration applied to the accelerometer, drive and damping of displacement. fixed first, second, third and fourth arrays (5, 6, 7, 8) of laterally spaced fingers (9, 9a) extending substantially perpendicularly to the sensing direction and away from the support towards the proof mass, with the first and second arrays (5, 6) being located on one side of the proof mass and with the third and fourth arrays (7, 8) being located on the opposite side of the proof mass; and moveable fifth, sixth, seventh and eighth arrays (10, 11, 12, 13) of laterally spaced fingers (14, 14a) extending substantially perpendicularly to the sensing direction from and attached to the proof mass towards the support; with the moveable fifth and sixth arrays (10, 11) being located on said one side of the proof mass and interdigitated respectively with the fixed first and second arrays (5, 6); and with the moveable seventh and eighth arrays (12,13) being located on said opposite side of the proof mass and interdigitated respectively with the fixed third and fourth arrays (7, 8); with the interdigitation of the fixed first and moveable fifth arrays (5,10) and of the fixed third and moveable seventh arrays (7, 12) being at a first offset in one direction in the sensing direction from a median line between adjacent fingers in the fixed first and third arrays (5, 7); and with the interdigitation of the fixed second and moveable sixth arrays (6,11) and of the fixed fourth and moveable eighth arrays (7,13) being at a second offset equal and in the opposite direction to the first offset from a median line between adjacent fingers in the fixed second and fourth arrays (6, 8), and