A method for determining a cause of a mounting failure for each of a plurality of components mounted on a substrate, which is performed by a substrate inspection device, comprising: receiving a first error value of each of a plurality of first components determined by inspecting a plurality of substrates on which the plurality of first components are mounted, a mounting position of each of the plurality of first components on the plurality of substrates being different to each other; characterized by dividing the first error value of each of the plurality of first components into a second error value due to a component mounting position setting error, a third error value due to a mounting condition setting error according to a component type and a fourth error value due to a defect of a nozzle included in a mounter; determining a plurality of second components in which a mounting failure has occurred among the plurality of first components based on the second error value, the third error value and the fourth error value of each of the plurality of first components; and determining a cause of the mounting failure for each of the plurality of second components as at least one of the component mounting position setting error, the mounting condition setting error according to a component type and the defect of the nozzle included in the mounter, based on the second error value, the third error value and the fourth error value of each of the plurality of second components, wherein the plurality of first components are components mounted on the substrate; the plurality of second components are components for which a mounting failure has occurred among the plurality of first components; a plurality of third components are components included in each of a plurality of first component groups; the plurality of first component groups are groups in which the plurality of first components are classified according to a plurality of first component types; a plurality of fourth components are components having the first error value determined as an outlier among the plurality of first components; and a plurality of fifth components are components except for the plurality of fourth components among the plurality of first components. receiving a first error value of each of a plurality of first components determined by inspecting a plurality of substrates on which the plurality of first components are mounted, a mounting position of each of the plurality of first components on the plurality of substrates being different to each other; characterized by dividing the first error value of each of the plurality of first components into a second error value due to a component mounting position setting error, a third error value due to a mounting condition setting error according to a component type and a fourth error value due to a defect of a nozzle included in a mounter; determining a plurality of second components in which a mounting failure has occurred among the plurality of first components based on the second error value, the third error value and the fourth error value of each of the plurality of first components; and determining a cause of the mounting failure for each of the plurality of second components as at least one of the component mounting position setting error, the mounting condition setting error according to a component type and the defect of the nozzle included in the mounter, based on the second error value, the third error value and the fourth error value of each of the plurality of second components, wherein the plurality of first components are components mounted on the substrate; the plurality of second components are components for which a mounting failure has occurred among the plurality of first components; a plurality of third components are components included in each of a plurality of first component groups; the plurality of first component groups are groups in which the plurality of first components are classified according to a plurality of first component types; a plurality of fourth components are components having the first error value determined as an outlier among the plurality of first components; and a plurality of fifth components are components except for the plurality of fourth components among the plurality of first components.