An inspection apparatus for inspecting an electronic device, including: a placement table on which a substrate having the electronic device provided thereon is placed, wherein a side of the placement table opposite to a substrate placement side of the placement table is formed of a light-transmissive member, and the placement table has a refrigerant flow path provided therein and through which a refrigerant capable of transmitting light flows; and a light irradiation mechanism disposed so as to face a surface of the side of the placement table opposite to the substrate placement side of the placement table and having a plurality of LEDs directed to the substrate, the inspection apparatus being characterized by a controller configured to control heat absorption by the refrigerant flowing through the refrigerant flow path and heating by the light from the plurality of LEDs so as to control a temperature of the electronic device as an inspection object, wherein the controller includes: a temperature information acquisition part configured to acquire information on the temperature of the electronic device as the inspection object; a heating controller configured to perform the control of the heating of the electronic device as the inspection object by the light from the plurality of LEDs by a closed loop control based on the temperature of the electronic device as a current inspection object; and a heat absorption controller configured to estimate a transition of power applied to the electronic device at a next inspection based on a transition of the temperature of the electronic device in a past inspection, and perform the control of the heat absorption from the electronic device as the inspection object by the refrigerant at a time of the next inspection by an open loop control based on the estimated transition of the power, and wherein the heat absorption controller is configured to use a successive least squares method to estimate the transition of the power based on the transition of the temperature of the electronic device in the past inspection. a placement table on which a substrate having the electronic device provided thereon is placed, wherein a side of the placement table opposite to a substrate placement side of the placement table is formed of a light-transmissive member, and the placement table has a refrigerant flow path provided therein and through which a refrigerant capable of transmitting light flows; and a light irradiation mechanism disposed so as to face a surface of the side of the placement table opposite to the substrate placement side of the placement table and having a plurality of LEDs directed to the substrate, the inspection apparatus being characterized by a controller configured to control heat absorption by the refrigerant flowing through the refrigerant flow path and heating by the light from the plurality of LEDs so as to control a temperature of the electronic device as an inspection object, wherein the controller includes: a temperature information acquisition part configured to acquire information on the temperature of the electronic device as the inspection object; a heating controller configured to perform the control of the heating of the electronic device as the inspection object by the light from the plurality of LEDs by a closed loop control based on the temperature of the electronic device as a current inspection object; and a heat absorption controller configured to estimate a transition of power applied to the electronic device at a next inspection based on a transition of the temperature of the electronic device in a past inspection, and perform the control of the heat absorption from the electronic device as the inspection object by the refrigerant at a time of the next inspection by an open loop control based on the estimated transition of the power, and a temperature information acquisition part configured to acquire information on the temperature of the electronic device as the inspection object; a heating controller configured to perform the control of the heating of the electronic device as the inspection object by the light from the plurality of LEDs by a closed loop control based on the temperature of the electronic device as a current inspection object; and a heat absorption controller configured to estimate a transition of power applied to the electronic device at a next inspection based on a transition of the temperature of the electronic device in a past inspection, and perform the control of the heat absorption from the electronic device as the inspection object by the refrigerant at a time of the next inspection by an open loop control based on the estimated transition of the power, and wherein the heat absorption controller is configured to use a successive least squares method to estimate the transition of the power based on the transition of the temperature of the electronic device in the past inspection.