An electrical element for use in microelectromechanical systems comprising: i) a thin film ceramic member formed of a plurality of layers of ceramic material (04, 06, 08) having a proportion above 50 vol.% of a perovskite phase, said thin film ceramic member having a first side and an opposing second side spaced apart in a thickness direction; ii) first and second electrodes disposed adjacent to the thin film ceramic member - - - wherein, relative to each other, one of the first or second (01, 02) electrodes is a higher potential electrode and the other one of the first and second electrodes (01, 02) is a lower potential electrode, such that a potential difference is established between the first and second electrodes and through the thin film ceramic member during operation; wherein the thin film ceramic member comprises: a first layer of ceramic material doped with: I) one or more transition metal ions capable of Jahn-Teller distortion of the perovskite crystal structure of the ceramic material and/or II) one or more non-transition metal ions which have a lower oxidation state and/or one or more transition metal ions which preferentially undergo reduction, compared to the B-site cation of the perovskite crystal structure of the ceramic material; and a second layer of ceramic material not doped with any of the one or more metal ions as defined for the first layer of ceramic material; characterised in that said first layer of ceramic material is located, over the thickness of the thin film ceramic member, so as to be: a) adjacent and in contact with both of the first and second electrodes such that there are no additional layers of material located between the first layer of ceramic material and the first and second electrodes, wherein first and second electrodes are both disposed adjacent to one of the first or second sides of the thin film ceramic member; or b) adjacent and in contact with the one of the first or second electrodes which is the lower potential electrode such that there are no additional layers of material located between the first layer of ceramic material and the one of the first or second electrodes which is the lower potential electrode, wherein first and second electrodes are interposed by the thin film ceramic member. i) a thin film ceramic member formed of a plurality of layers of ceramic material (04, 06, 08) having a proportion above 50 vol.% of a perovskite phase, said thin film ceramic member having a first side and an opposing second side spaced apart in a thickness direction; ii) first and second electrodes disposed adjacent to the thin film ceramic member - - - wherein, relative to each other, one of the first or second (01, 02) electrodes is a higher potential electrode and the other one of the first and second electrodes (01, 02) is a lower potential electrode, such that a potential difference is established between the first and second electrodes and through the thin film ceramic member during operation; a first layer of ceramic material doped with: I) one or more transition metal ions capable of Jahn-Teller distortion of the perovskite crystal structure of the ceramic material and/or II) one or more non-transition metal ions which have a lower oxidation state and/or one or more transition metal ions which preferentially undergo reduction, compared to the B-site cation of the perovskite crystal structure of the ceramic material; and I) one or more transition metal ions capable of Jahn-Teller distortion of the perovskite crystal structure of the ceramic material and/or II) one or more non-transition metal ions which have a lower oxidation state and/or one or more transition metal ions which preferentially undergo reduction, compared to the B-site cation of the perovskite crystal structure of the ceramic material; and a second layer of ceramic material not doped with any of the one or more metal ions as defined for the first layer of ceramic material; characterised in that said first layer of ceramic material is located, over the thickness of the thin film ceramic member, so as to be: a) adjacent and in contact with both of the first and second electrodes such that there are no additional layers of material located between the first layer of ceramic material and the first and second electrodes, wherein first and second electrodes are both disposed adjacent to one of the first or second sides of the thin film ceramic member; or b) adjacent and in contact with the one of the first or second electrodes which is the lower potential electrode such that there are no additional layers of material located between the first layer of ceramic material and the one of the first or second electrodes which is the lower potential electrode, wherein first and second electrodes are interposed by the thin film ceramic member. a) adjacent and in contact with both of the first and second electrodes such that there are no additional layers of material located between the first layer of ceramic material and the first and second electrodes, wherein first and second electrodes are both disposed adjacent to one of the first or second sides of the thin film ceramic member; or b) adjacent and in contact with the one of the first or second electrodes which is the lower potential electrode such that there are no additional layers of material located between the first layer of ceramic material and the one of the first or second electrodes which is the lower potential electrode, wherein first and second electrodes are interposed by the thin film ceramic member.