A method of fabricating an electrochromic window, the method comprising: sequentially depositing on an architectural glass substrate which is at least 20 inches (508 mm) by 20 inches (508 mm) (i) an electrochromic layer, (ii) an ion conducting layer, and (iii) a counter electrode layer to form a stack in which the ion conducting layer separates the electrochromic layer and the counter electrode layer, and further comprising depositing metallic lithium on at least one of the electrochromic layer and the counter electrode layer, wherein metallic lithium is deposited in amount sufficient to compensate the blind charge in the electrochromic layer and an additional amount of 1.5 to 2.5 times, by mass, the amount used to compensate the blind charge, wherein each of the sequentially deposited layers is vapor deposited using a single integrated deposition system having a controlled ambient environment in which the pressure and gas composition are controlled independently of an external environment outside of the integrated deposition system, wherein the integrated deposition system includes a plurality of deposition stations aligned in series and interconnected and operable to pass the substrate from one station to the next without exposing the substrate to an external environment, and wherein the metallic lithium is physical vapor deposited, wherein a substrate holder holding the architectural glass substrate in a substantially vertical orientation translates through the plurality of deposition stations of the integrated deposition system without exposing the architectural glass substrate to the external environment during deposition; and wherein the architectural glass substrate does not leave the integrated deposition system at any time during the sequential deposition of the electrochromic layer comprising metal oxide, the ion conducting layer, the counter electrode layer, and the metallic lithium. sequentially depositing on an architectural glass substrate which is at least 20 inches (508 mm) by 20 inches (508 mm) (i) an electrochromic layer, (ii) an ion conducting layer, and (iii) a counter electrode layer to form a stack in which the ion conducting layer separates the electrochromic layer and the counter electrode layer, and further comprising depositing metallic lithium on at least one of the electrochromic layer and the counter electrode layer, wherein metallic lithium is deposited in amount sufficient to compensate the blind charge in the electrochromic layer and an additional amount of 1.5 to 2.5 times, by mass, the amount used to compensate the blind charge, wherein each of the sequentially deposited layers is vapor deposited using a single integrated deposition system having a controlled ambient environment in which the pressure and gas composition are controlled independently of an external environment outside of the integrated deposition system, wherein the integrated deposition system includes a plurality of deposition stations aligned in series and interconnected and operable to pass the substrate from one station to the next without exposing the substrate to an external environment, and wherein the metallic lithium is physical vapor deposited, wherein a substrate holder holding the architectural glass substrate in a substantially vertical orientation translates through the plurality of deposition stations of the integrated deposition system without exposing the architectural glass substrate to the external environment during deposition; and wherein the architectural glass substrate does not leave the integrated deposition system at any time during the sequential deposition of the electrochromic layer comprising metal oxide, the ion conducting layer, the counter electrode layer, and the metallic lithium.