A method of measuring a surface of an object with a scanning probe, said probe comprising: a housing for mounting to an arm of a coordinate positioning apparatus; a stylus mounted on a stylus supporting member, said stylus having a stylus tip, and said stylus and stylus supporting member being deflectable with respect to the housing; a first transducer system (40-48, 60) which measures movement of the stylus supporting member relative to the arm of the coordinate positioning apparatus with a first mechanical frequency response; and a second transducer system (38, 62) which measures movement of the tip of the stylus relative to the stylus supporting member with a second mechanical frequency response; the method comprising the steps of: mounting the probe on the arm of the coordinate positioning apparatus; positioning the probe so that the stylus is in contact with the surface to be measured; moving the arm of the coordinate positioning apparatus so as to move the probe along said surface with the stylus remaining in contact with said surface; obtaining data from the first transducer system (40-48, 60) which measures movement of the stylus supporting member relative to the arm of the coordinate positioning apparatus; obtaining data from the second transducer system (38, 62) which measures movement of the tip of the stylus relative to the stylus supporting member; and combining the data from the first and second transducer systems (40-48, 60; 38, 62) to produce a measurement of total probe deflection; wherein the probe is moved at a speed which is higher than a speed at which the first mechanical frequency response of the first transducer system (40-48, 60) would be able to follow contours of the surface; and wherein the second mechanical frequency response of the second transducer system (38, 62) is higher than the first mechanical frequency response of the first transducer system (40-48, 60), whereby the first transducer system (40-48, 60) controls the working range of the scanning probe and the second transducer system (38, 62) controls the surface response of the probe so that the stylus remains in contact with the surface contours. a housing for mounting to an arm of a coordinate positioning apparatus; a stylus mounted on a stylus supporting member, said stylus having a stylus tip, and said stylus and stylus supporting member being deflectable with respect to the housing; a first transducer system (40-48, 60) which measures movement of the stylus supporting member relative to the arm of the coordinate positioning apparatus with a first mechanical frequency response; and a second transducer system (38, 62) which measures movement of the tip of the stylus relative to the stylus supporting member with a second mechanical frequency response; the method comprising the steps of: mounting the probe on the arm of the coordinate positioning apparatus; positioning the probe so that the stylus is in contact with the surface to be measured; moving the arm of the coordinate positioning apparatus so as to move the probe along said surface with the stylus remaining in contact with said surface; obtaining data from the first transducer system (40-48, 60) which measures movement of the stylus supporting member relative to the arm of the coordinate positioning apparatus; obtaining data from the second transducer system (38, 62) which measures movement of the tip of the stylus relative to the stylus supporting member; and combining the data from the first and second transducer systems (40-48, 60; 38, 62) to produce a measurement of total probe deflection; wherein the probe is moved at a speed which is higher than a speed at which the first mechanical frequency response of the first transducer system (40-48, 60) would be able to follow contours of the surface; and wherein the second mechanical frequency response of the second transducer system (38, 62) is higher than the first mechanical frequency response of the first transducer system (40-48, 60), whereby the first transducer system (40-48, 60) controls the working range of the scanning probe and the second transducer system (38, 62) controls the surface response of the probe so that the stylus remains in contact with the surface contours. mounting the probe on the arm of the coordinate positioning apparatus; positioning the probe so that the stylus is in contact with the surface to be measured; moving the arm of the coordinate positioning apparatus so as to move the probe along said surface with the stylus remaining in contact with said surface; obtaining data from the first transducer system (40-48, 60) which measures movement of the stylus supporting member relative to the arm of the coordinate positioning apparatus; obtaining data from the second transducer system (38, 62) which measures movement of the tip of the stylus relative to the stylus supporting member; and combining the data from the first and second transducer systems (40-48, 60; 38, 62) to produce a measurement of total probe deflection; wherein the probe is moved at a speed which is higher than a speed at which the first mechanical frequency response of the first transducer system (40-48, 60) would be able to follow contours of the surface; and wherein the second mechanical frequency response of the second transducer system (38, 62) is higher than the first mechanical frequency response of the first transducer system (40-48, 60), whereby the first transducer system (40-48, 60) controls the working range of the scanning probe and the second transducer system (38, 62) controls the surface response of the probe so that the stylus remains in contact with the surface contours.