title: Extreme ultraviolet lithography
Malter effect
Extreme ultraviolet
Special Sensor Ultraviolet Limb Imager
Extreme Ultraviolet Explorer
International Ultraviolet Explorer
TAUVEX
Chang'e 3
Chang'e 4
Chang'e 2
sentences: Extreme ultraviolet lithography (also known as "EUV" or "EUVL") is a next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm.
 EUV is currently being developed for high volume use by 2020.
The Malter effect is named after Louis Malter, who first described the effect.
 Following exposure to ionizing radiation (e.g., electrons, ions, X-rays, extreme ultraviolet, vacuum ultraviolet), secondary electron emission from the surface of a thin insulating layer results in the establishment of a positive charge on the surface.
 This positive charge produces a high electric field in the insulator, resulting in the emission of electrons through the surface.
 This tends to pull more electrons from further beneath the surface.
 Eventually the sample replenishes the lost electrons, by picking up the collected secondary electrons through the ground loop.
Extreme ultraviolet radiation (EUV or XUV) or high-energy ultraviolet radiation is electromagnetic radiation in the part of the electromagnetic spectrum spanning wavelengths from 124 nm down to 10 nm, and therefore (by the Planck–Einstein equation) having photons with energies from 10 eV up to 124 eV (corresponding to 124 nm to 10 nm respectively).
 EUV is naturally generated by the solar corona and artificially by plasma and synchrotron light sources.
The Special Sensor Ultraviolet Limb Imager (SSULI) is an imaging spectrometer that is used to observe the earth's ionosphere and thermosphere.
 These sensors provide vertical intensity profiles of airglow emissions in the extreme ultraviolet and far ultraviolet spectral range of 800 to 1700 Angstrom (80 to 170 nanometre) and scan from 75 km to 750 km tangent altitude.
 The data from these sensors will be used to infer altitude profiles of ion, electron and neutral density.
The Extreme Ultraviolet Explorer (EUVE) was a space telescope for ultraviolet astronomy, launched on June 7, 1992.
 With instruments for ultraviolet (UV) radiation between wavelengths of 7 and 76 nm, the EUVE was the first satellite mission especially for the short-wave ultraviolet range.
 The satellite compiled an all-sky survey of 801 astronomical targets before being decommissioned on January 31, 2001.
 It re-entered the atmosphere on January 30, 2002.
The International Ultraviolet Explorer (IUE) was an astronomical observatory satellite primarily designed to take ultraviolet spectra.
 The satellite was a collaborative project between NASA, the UK Science Research Council and the European Space Agency (ESA).
 The mission was first proposed in early 1964, by a group of scientists in the United Kingdom, and was launched on January 26, 1978 aboard a NASA Delta rocket.
 The mission lifetime was initially set for 3 years, but in the end it lasted almost 18 years, with the satellite being shut down in 1996.
 The switch-off occurred for financial reasons, while the telescope was still functioning at near original efficiency.
The Tel Aviv University Ultraviolet Explorer, or TAUVEX, is a space telescope array conceived by Noah Brosch of Tel Aviv University and designed and constructed in Israel for Tel Aviv University by El-Op, Electro-Optical Industries, Ltd. (a division of Elbit systems) acting as Prime Contractor, for the exploration of the ultraviolet (UV) sky.
 TAUVEX was selected in 1988 by the Israel Space Agency (ISA) as its first priority scientific payload.
 Although originally slated to fly on a national Israeli satellite of the Ofeq series, TAUVEX was shifted in 1991 to fly as part of a Spektr-RG international observatory, a collaboration of a large number of countries with the Soviet Union (Space Research Institute) leading.
Chang'e 3 ( ; ) is an unmanned lunar exploration mission operated by the China National Space Administration (CNSA), incorporating a robotic lander and China's first lunar rover.
 It was launched in December 2013 as part of the second phase of the Chinese Lunar Exploration Program.
 The mission's chief commander was Ma Xingrui.
Chang'e 4 () will be a Chinese lunar exploration mission, incorporating a robotic lander and rover.
 Chang'e 4 will be China's second lunar lander and rover, and was built as a backup to Chang'e 3, as Chang'e 2 was to Chang'e 1.
 Following the successful landing of the Chang'e 3 mission, the configuration of Chang'e 4 will be adjusted to meet new scientific objectives.
 Like its predecessors, the spacecraft is named after the Chinese Moon goddess.
Chang'e 2 ( ; ) is a Chinese unmanned lunar probe that was launched on 1 October 2010.
 It was a follow-up to the Chang'e 1 lunar probe, which was launched in 2007.
 Chang'e 2 was part of the first phase of the Chinese Lunar Exploration Program, and conducted research from a 100-kilometer-high lunar orbit in preparation for the December 2013 soft landing by the Chang'e 3 lander and rover.
 Chang'e 2 was similar in design to Chang'e 1, although it featured some technical improvements, including a more advanced onboard camera.
 Like its predecessor, the probe was named after Chang'e, an ancient Chinese moon goddess.

Question: Question: What is the Chang'e 3 and Extreme Ultraviolet Explorer? 

 Your answer will be verified with exact match score. To ensure correct verification, only provide the answer within the <answer> </answer> tags. Do not put any sentences or reasoning process within the <answer> </answer> tags. 

Supporting Information: Paragraph 0 

 Extreme ultraviolet lithography (also known as "EUV" or "EUVL") is a next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm.
 EUV is currently being developed for high volume use by 2020. 

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Paragraph 1 

 The Malter effect is named after Louis Malter, who first described the effect.
 Following exposure to ionizing radiation (e.g., electrons, ions, X-rays, extreme ultraviolet, vacuum ultraviolet), secondary electron emission from the surface of a thin insulating layer results in the establishment of a positive charge on the surface.
 This positive charge produces a high electric field in the insulator, resulting in the emission of electrons through the surface.
 This tends to pull more electrons from further beneath the surface.
 Eventually the sample replenishes the lost electrons, by picking up the collected secondary electrons through the ground loop. 

--------------------------------

Paragraph 2 

 Extreme ultraviolet radiation (EUV or XUV) or high-energy ultraviolet radiation is electromagnetic radiation in the part of the electromagnetic spectrum spanning wavelengths from 124 nm down to 10 nm, and therefore (by the Planck–Einstein equation) having photons with energies from 10 eV up to 124 eV (corresponding to 124 nm to 10 nm respectively).
 EUV is naturally generated by the solar corona and artificially by plasma and synchrotron light sources. 

--------------------------------

Paragraph 3 

 The Extreme Ultraviolet Explorer (EUVE) was a space telescope for ultraviolet astronomy, launched on June 7, 1992.
 With instruments for ultraviolet (UV) radiation between wavelengths of 7 and 76 nm, the EUVE was the first satellite mission especially for the short-wave ultraviolet range.
 The satellite compiled an all-sky survey of 801 astronomical targets before being decommissioned on January 31, 2001.
 It re-entered the atmosphere on January 30, 2002. 

--------------------------------

Paragraph 4 

 The International Ultraviolet Explorer (IUE) was an astronomical observatory satellite primarily designed to take ultraviolet spectra.
 The satellite was a collaborative project between NASA, the UK Science Research Council and the European Space Agency (ESA).
 The mission was first proposed in early 1964, by a group of scientists in the United Kingdom, and was launched on January 26, 1978 aboard a NASA Delta rocket.
 The mission lifetime was initially set for 3 years, but in the end it lasted almost 18 years, with the satellite being shut down in 1996.
 The switch-off occurred for financial reasons, while the telescope was still functioning at near original efficiency. 

--------------------------------

Paragraph 5 

 The Tel Aviv University Ultraviolet Explorer, or TAUVEX, is a space telescope array conceived by Noah Brosch of Tel Aviv University and designed and constructed in Israel for Tel Aviv University by El-Op, Electro-Optical Industries, Ltd. (a division of Elbit systems) acting as Prime Contractor, for the exploration of the ultraviolet (UV) sky.
 TAUVEX was selected in 1988 by the Israel Space Agency (ISA) as its first priority scientific payload.
 Although originally slated to fly on a national Israeli satellite of the Ofeq series, TAUVEX was shifted in 1991 to fly as part of a Spektr-RG international observatory, a collaboration of a large number of countries with the Soviet Union (Space Research Institute) leading. 

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Paragraph 6 

 Chang'e 3 ( ; ) is an unmanned lunar exploration mission operated by the China National Space Administration (CNSA), incorporating a robotic lander and China's first lunar rover.
 It was launched in December 2013 as part of the second phase of the Chinese Lunar Exploration Program.
 The mission's chief commander was Ma Xingrui. 

--------------------------------

Paragraph 7 

 Chang'e 4 () will be a Chinese lunar exploration mission, incorporating a robotic lander and rover.
 Chang'e 4 will be China's second lunar lander and rover, and was built as a backup to Chang'e 3, as Chang'e 2 was to Chang'e 1.
 Following the successful landing of the Chang'e 3 mission, the configuration of Chang'e 4 will be adjusted to meet new scientific objectives.
 Like its predecessors, the spacecraft is named after the Chinese Moon goddess. 

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Answer: was a space telescope for ultraviolet astronomy