Change owner+group before setting xattrs to avoid xattr loss.
Fixes bug 10163.
Fix a few issues with make_path().

The make_path() utility function was not returning the right status
when --dry-run was used, so I added some stat() checking that only
happens for -n.  I also noticed that the function was not handling
the case where the whole path needed to be created, so I fixed that.
Fixes bug 10209.