Columbia subject headings:
Integrated circuits--Very large scale integration--Design and construction--Congresses.
Ion beam lithography--Congresses.
Photolithography--Congresses.
X-ray lithography--Congresses.
Harvard subject headings:
Integrated circuits--Very large scale integration--Design and construction--Congresses
Ion beam lithography--Congresses.
Photolithography--Congresses.
X-ray lithography--Congresses.
Princeton subject headings: