Columbia subject headings:
Lenses--Design and construction--Congresses.
Masks (Electronics)--Congresses.
Microlithography--Computer simulation--Congresses.
Microlithography--Congresses.
Photoresists--Congresses.
Harvard subject headings:
Princeton subject headings:
Lasers--Industrial applications--Congresses.
Microlithography--Congresses.
Optical instruments--Congresses.