熱伝導率
where C0 is constant. Thermal conductivity is determined by the linear slope of ΔT vs. log(ω) curve. The main advantages of the 3ω-method are minimization of radiation effects and easier acquisition of the temperature dependence of the thermal conductivity than in the steady-state techniques. Although some expertise in thin film patterning and microlithography is required, this technique is considered as the best pseudo-contact method available. (ch23)