MEMS
A newer technology uses Microelectromechanical systems (MEMS) sensor enables tilt angle measuring tasks to be performed conveniently in both single and dual axis mode. Ultra-high precision 2-axis MEMS driven digital inclinometer/ tiltmeter is available for speedy angle measurement applications and surface profiling require very high resolution and accuracy of one arc second. The 2-axis MEMS driven inclinometers/ tiltmeters can be digitally compensated and precisely calibrated for non-linearity and operating temperature variation, resulting in higher angular accuracy and stability performance over wider angular measurement range and broader operating temperature range. Further, digital display of readings can effectively prevent parallax error as experience when viewing those traditional ‘bubble’ vials located from a distance.