Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and  smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication.-Diane Kauzlarick, EET