The Science and Engineering of Microelectronic Fabrication
"This book addresses the material in an organized manner. The tool diagrams and photos are very useful. Figures, diagrams, SEMs, TEMs, are plentiful and necessary for this material."--Dr. Susan Marine, Centre College"Excellent, up-to-date compilation of the physics and engineering of microelectronic chip processing. Good reference book for semiconductor manufacturing labs and engineering libraries. Very well documented."--David Navon, UMass--Amherst"This is a very attractive book. It has a good balance of science, engineering and technology. The graphical, pictoral and SEM representatives add to the practical value of the book."--H. Thurman Henderson, Department of Electrical and Computer Engineering and Computer Science, University of Cincinnati"Excellent! New textbooks on this subject appear rarely and with great gaps between appearances. This is the best of the last ten years."-- J.G. Smits, epartment of Electrical and Computer Engineering, Boston University"Any one chapter could be expanded into a book by itself. An impressive piece of work!"-- Choice"Appears to represent an excellent balance between practical, 'real world' information and theory. It will serve as an excellent complement to the standard type semiconductor materials and devices course in the realm of engineering applications. Such material should increase student appreciation and motivation for the field of semiconductors and enhance marketability."--Robert Engelken, Arkansas State University--This text refers to an out of print or unavailable edition of this title.