Progress in Nanoscale Characterization and Manipulation This book focuses on charged particle optics and microscopy as well as their applications in the materials sciences. Presenting a range of cutting edge theoretical and methodological advances in electron microscopy and microanalysis and examining their crucial roles in modern materials research it offers a unique resource for all researchers who work in ultramicroscopy and or materials research. The book addresses the growing opportunities in this field and introduces readers to the state of the art in charged particle microscopy techniques. It showcases recent advances in scanning electron microscopy transmission electron microscopy and helium ion microscopy including advanced spectroscopy spherical corrected microscopy focused ion imaging and in situ microscopy. Covering these and other essential topics the book is intended to facilitate the development of microscopy techniques inspire young researchers and make a valuable contribution to the field Electron Ion Optics Scanning Electron Microscopy Transmission Electron Microscopy Scanning Transmission Electron Microscopy (STEM) Spectroscopy Aberration Corrected Transmission Electron Microscopy and Its Applications In situ TEM: Theory and Applications Helium Ion Microscopy