Optical Characterization of Thin Solid Films Introduction and modelling activities Optical film characterization topics: An overview Universal dispersion model for characterization of optical thin films over wide spectral range Predicting optical properties of oxides from ab initio calculations Spectrophotometry and spectral ellipsometry Optical characterization of thin films by means of spectroscopic imaging spectrophotometry Data processing methods for imaging spectrophotometry In situ and ex situ spectrophotometry in thin film characterization Ellipsometric characterization of thin solid films Characterization of defective and corrugated coatings Optical characterization of thin films exhibiting defects Scanning probe microscopy characterization of optical thin films Resonant grating waveguide structures Absorption and scatter Roughness and scatter in optical coatings Absorption and fluorescence measurements in optical coatings Cavity ring down technique for optical coating characterization. This book is an up to date survey of the major optical characterization techniques for thin solid films. Emphasis is placed on practicability of the various approaches. Relevant fundamentals are briefly reviewed before demonstrating the application of these techniques to practically relevant research and development topics. The book is written by international top experts all of whom are involved in industrial research and development projects.