Molecular theory of lithography This book is a unified exposition of the molecular theory that underlies lithographic imaging. It explains with physical chemical theories the molecular level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithographic process as well as for advanced lithographic imaging mechanisms including photochemical and radiochemical imprint and directed block copolymer self assembly imaging mechanisms. The book is intended for student and professionals whose knowledge of lithography extends to the chemistry and physics underlying its various forms. A familiarity with chemical kinetics thermodynamics statistical mechanics and quantum mechanics will be helpful as will be familiarity with elementary concepts in physics such as energy force electrostatics electrodynamics and optics Preface Acronyms and abbreviations 1. Overview of lithography 2. Theory of the lithographic process 3. Theory of molecular interactions in lithography 4. Theory of photochemical and radiochemical lithographic imaging mechanisms 5. Theory of block copolymer self assembly lithographic imaging mechanisms 6. Theory of imprint lithographic imaging mechanisms Index