Introduction to metrology applications in IC manufacturing Measurement methods and measurement process Metrology fundamentals measurement system characterization and calibration using traditional definitions Metrology fundamental re defining measurement system analysis Metrology in semiconductor IC industry Metrology toolsets in IC manufacturing: optical metrology Metrology toolsets in IC manufacturing: charged particle metrology systems Metrology toolsets in IC manufacturing: additional metrology systems Limitations of metrology techniques & hybrid metrology Metrology in mask making Perspectives on future challenges and considerations