MOEMS : micro opto electro mechanical systems Foreword S. D. Senturia Preface M. E. Motamedi Acknowledgments Chapter 1. Introduction Manouchehr E. Motamedi Chapter 2. Microfabrication Olga B. Spahn S. Mani Chapter 3. Micro optics H. P. Herzig E. B. Kley M. Cumme L. C. Wittig Chapter 4. Actuation and sensing Long Que Yogesh B. Gianchandani Chapter 5. Micro optic components testing and applications Manouchehr E. Motamedi and Johannes Schwider Chapter 6. Fiber optic systems Rolf Göring Chapter 7. Optical scanners Tarik Bourouina Hiroyuki Fujita M. Gilbert Reyne and M. Edward Motamedi Chapter 8. Display and imaging systems Hakan Urey David L. Dickensheets Chapter 9. Adaptive optics Scot S. Olivier Chapter 10. MOEMS MEMS CAD and simulation Ridha Hamza Jean Michel Karam Philippe Nachtergaele Chapter 11. MEMS and MOEMS packaging Ajay P. Malshe John Patrick OConnor Chapter 12. MOEMS and MEMS materials William D. Cowan Problems and exercises Acronyms Index This book introduces the exciting and fast moving field of MOEMS to graduate students scientists and engineers by providing a foundation of both micro optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro optics MOEMS are proving to be an attractive and low cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication sensing and mobile systems such as v grooves gratings shutters scanners filters micromirrors switches alignment aids lens arrays and hermetic wafer scale optical packaging. An international team of leading researchers contributed to this book and it presents examples and problems employing cutting edge MOEM devices. It will inspire researchers to further advance the design fabrication and analysis of MOEM systems