Scanning probe lithography : fundamentals materials and applications Introduces historical background of SPL including evolution of the technique and tools Explains the mechanism of sample modification manipulation types of AFM tips technical parts of the experimental setup and materials on which the technique can be applied Shows the different types of devices and structures fabricated by SPL together with the processing steps Contains a complete and state of the art package of examples and different approaches performed by different international research groups Summarizes strengths limitations and potential of SPL