MEMS : a practical guide to design analysis and applications While the first generation of MEMS books comprehensively cover fabrication techniques a lack of industry standards has created a void of books providing cohesive guidance on the design and analysis of micro electro mechanical systems (MEMS) across their wide range of innovative and varied applications. This book is the first to fill the void with 18 chapters written by leading experts worldwide covering topics such as transducer operations topology simulation and modeling free space microsystems interface circuitry magnetic mechanical chemical thermal and fluid microsensors biomedical microsystems integrated micro optics microactuators and micromachining. The chapters address issues of alternative designs reliability performance production packaging and cost effectiveness in the context of appropriate applications including automotive biomedical consumer building and industrial products. TOC:Introduction. Microtransducer Operation. Material Properties: Measurement And Data. Topology S Imulation For Microtransducers. Microtransducer Modeling And S Imulation. System Level S Imulation Of Microsystems. Thermal Based Sensors. Photon Detectors. Free Space Microsystems. Integrated Micro Optics. Magnetic Microsensors. Mechanical Microsensors. Chemical Microsensors. Fluidic Microsystems. Biomedical Microsystems. Microactuators. Micromachining Technology. Electrodeposition Techology For Mems. Liga Technologies. Interface Circuitry And Microsystems