Controlled solvent vapor annealing of block copolymer films This project was focused on exploring the phase behavior of poly(styrene)187000 block poly(2 vinylpyridine)203000 (SV390) with high molecular weight (390 kg mol) in thin films in which the self assembly of block copolymers (BCPs) was realized via thermo solvent annealing. The advanced processing technique of solvent vapor treatment provides controlled and stable conditions. In Chapter 3 the factors to influence the annealing process and the swelling behavior of homopolymers are presented and discussed. The swelling behavior of BCP in films is controlled by the temperature of the vapor and of the substrate on one hand and variation of the saturation of the solvent vapor atmosphere (different solvents) on the other hand. Additional factors like the geometry and material of the chamber the type of flow inside the chamber etc. also influence the reproducibility and stability of the processing. The slightly selective solvent vapor of chloroform gives 10% more swelling of P2VP than PS in films with thickness of ~40 nm. ...