Handbook of vacuum science and technology Preface. Fundamentals of Vacuum Technology and Surface Physics: B. Singh and J.H. Thomas III Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput Pumping Speed Evacuation Rate Outgassing Rate and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science. Creation of Vacuum: M. Hablanian The Technology of Vacuum Pumps An Overview. F.J. Eckle Diaphragm Pumps. J. Richman Blowers. Vapor Jet Pumps: M. Hablanian Diffusion Pumps. G. Ash Cryogenic Pumps. H. Henning Turbomolecular Pumps. J. Singleton UHV Pumps. Vacuum Measurements: H.M. Brady R.H. Goehner E. Drubetsky and W.H. Bayles Jr. Measurements of Pressure. L. Lieszkovszky Mass Analysis and Partial Pressure Measurement. R. Outlaw Analysis of Partial Pressure Information. L. Hinkle Gas Flow Measurements. Systems Design and Components: Components for Vacuum Equipment and Systems: N.T. Peacock Valves. N.T. Peacock Flanges. W. Helgeland Feedthroughs. C. Kraft Ports. J. Panitz Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials. R.N. Peacock Seal Materials and Design. B. Dayton Outgassing of Materials. J. Garner Aluminum Based Vacuum Systems. D. Mattox Preparation and Cleaning of Vacuum Surfaces. Vacuum Applications: High Vacuum Based Processes: S. Rossnagel Sputtering. V. Patel Plasma Etching. M. Powers Ion Beam Based Processes. J. Cheung Laser Ablation. F. Jansen CVD and PECVD. J. Thomas UHV Based Processes. Large Scale Vacuum Based Processes: W. Robbins Large Area Coatings. H.F. Dylla The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps materials equipment and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance limitations and applications rather than theory. There aremany useful tables charts and figures that will be of use to the practitioner. Key Features * User oriented with many useful tables charts and figures of use to the practitioner * Reviews new vacuum materials and equipment * Illustrates the design and maintenance of modern vacuum systems * Includes well referenced chapters