Acoustic wave and electromechanical resonators : concept to key applications This groundbreaking book provides you with a comprehensive understanding of FBAR (thin film bulk acoustic wave resonator) MEMS (microelectomechanical system) and NEMS (nanoelectromechanical system) resonators. For the first time anywhere you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design fabrication and characterization of FBARs MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary metal oxide semiconductor) technologies and their application to sensin