Defect Mediated Degradation of Diffusion Barriers The wide practical use of the diffusion barrier phenomenon in the various areas of science and modern engineering is impossible without the studying of all aspects of their creation functioning and degradation. The present monograph covers a specific and important aspect of the diffusion barriers damaging process the deleterious effect of atomic scale defects in the structure of diffusion barriers. Diffusion Diffusion Coefficient Diffusion Barriers Atomic Scale Defects Films Layers Deposition Coatings Materials Science