MEMS and MOEMS : technology and applications Preface chapter 1. MEMS MOEMS technology capabilities and trends Patrick J. French chapter 2. Operation and design of MEMS MOEMS devices Douglas Sparks Thomas Bifano and Dhiraj Malkani chapter 3. Optical microsystem modeling and simulation Jan G. Korvink Arokia Nathan and Henry Baltes chapter 4. The digital micromirror device a micro optical electromechanical device for display applications Michael A. Mignardi Richard O. Gale David J. Dawson and Jack C. Smith chapter 5. Optical waveguides and silicon based micromachined architectures Christophe Gorecki chapter 6. Silicon micromachines in optical communications networks: tiny machines for large systems Randy Giles Vladimir Aksyuk Chris Bolle Flavio Pardo and David J. Bishop chapter 7. Assembly and test for MEMS and optical MEMS Christopher Bang Victor Bright Michael A. Mignardi Thomas Kocian and David J. Monk chapter 8. MEMS microsystems micromachines: commercializing an emergent disruptive technology Steven Walsh Jonathan Linton Roger Grace Sid Marshall and Jim Knutti Index Cost size speed weight and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro electromechanical systems) and MOEMS (micro systems with a strong optical component). It is useful as a professional reference technology users guide and as a textbook