Nanoscale Spectroscopy and Its Applications to Semiconductor Research Fabrication technologies for nanostructured devices have be en developed recently and the electrical and optical pro perties of such nanostructures are a subject of advanced re search. This book describes the different approaches to spectroscopic microscopy i.e. electron beam probe spec troscopy spectroscopic photoelectron microscopy and scan ning probe spectroscopy. It will be useful as a compact source of reference for the experienced researcher taking into account at the same time the needs of postgraduate stu dents and nonspecialist researchers by using a tutorial ap proach throughout. Fabrication technologies for nano structured devices have been developed recently and the electrical and optical properties of such nonostructures are a subject of advanced research. This book describes the different approaches to spectroscopic microscopy that is Electron Beam Probe Spectroscopy Spectroscopic Photoelectron Microscopy and Scanning Probe Spectroscopy. It will be useful as a compact source of reference for the experienced reseracher taking at the same time into account the needs of post graduate students and nonspecialist researchers by using a tutorial approach throughout