Principles of materials characterization and metrology Characterization enables a microscopic understanding of the fundamental properties of materials (Science) to predict their macroscopic behavior (Engineering). With this focus the book presents a comprehensive discussion of the principles of materials characterization and metrology. Characterization techniques are introduced through elementary concepts of bonding electronic structure of molecules and solids and the arrangement of atoms in crystals. Then the range of electrons photons ions neutrons and scanning probes used in characterization including their generation and related beam solid interactions that determine or limit their use are presented. This is followed by ion scattering methods optics optical diffraction microscopy and ellipsometry. Generalization of Fraunhofer diffraction to scattering by a three dimensional arrangement of atoms in crystals leads to X ray electron and neutron diffraction methods both from surfaces and the bulk. Discussion of transmission and analytical electron microscopy including recent developments is followed by chapters on scanning electron microscopy and scanning probe microscopies. It concludes with elaborate tables to provide a convenient and easily accessible way of summarizing the key points features and inter relatedness of the different spectroscopy diffraction and imaging techniques presented throughout. The book uniquely combines a discussion of the physical principles and practical application of these characterization techniques to explain and illustrate the fundamental properties of a wide range of materials in a tool based approach. Based on forty years of teaching and research and including worked examples test your knowledge questions and exercises the target readership of the book is wide for it is expected to appeal to the teaching of undergraduate and graduate students and to post docs in multiple disciplines of science engineering biology and art conservation and to professionals in industry. Provided by publisher