BioNanoFluidic MEMS : [evolved from contributions by faculty members who participated in workshops on NanoBioFluidic Micro Electro Mechanical Systems (MEMS) at the Georgia Institute of Technology Atlanta Georgia in November 2005 and June 2006] Nanotechnology: retrospect and prospect James D. Meindl Synthesis of oxide nanostructures Chenguo Hu Hong Liu and Zhong Lin Wang Nanolithography Raghunath Murali Nano microfabrication methods for sensors and NEMS MEMS Peter J. Hesketh Micro and nanomanufacturing via molding Harry D. Rowland and William P. King Temperature measurement of microdevices using thermoreeflectance and raman thermometry Thomas Beechem and Samuel Graham Stereolithography and rapid prototyping David W. Rosen Case studies in chemical sensor development Gary W. Hunter Jennifer C. Xu and Darby B. Makel Engineered nanopores Amir G. Ahmadi and Sankar Nair Engineering biomaterial interfaces through micro and nano patterning Joseph L. Charest and William P. King Biosensors micro and nano integration Ravi Doraiswami