Authors: Jian‐Min Zuo | Haw-Wen Hsiao | Kaijun Yin | Hsu-Chih Ni | Haoyang Ni | Robert Busch | Renliang Yuan | Jiong Zhang
Source: Microscopy and Microanalysis (article, 2023-07-22)
Field: Materials Science — Surfaces, Coatings and Films

Extending 4D-STEM to Defect and Short-range Ordering Analysis: Principles, Methodology and Applications Journal Article Extending 4D-STEM to Defect and Short-range Ordering Analysis: Principles, Methodology and Applications Get access Jian-Min Zuo, Jian-Min Zuo Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of AmericaMaterials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of America Search for other works by this author on: Oxford Academic Google Scholar Haw-Wen Hsiao, Haw-Wen Hsiao Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of AmericaMaterials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of America Search for other works by this author on: Oxford Academic Google Scholar Kaijun Yin, Kaijun Yin Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of AmericaMaterials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of America Search for other works by this author on: Oxford Academic Google Scholar Hsu-Chih Ni, Hsu-Chih Ni Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of AmericaMaterials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of America Search for other works by this author on: Oxford Academic Google Scholar Haoyang Ni, Haoyang Ni Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of AmericaMaterials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of America Search for other works by this author on: Oxford Academic Google Scholar Robert Busch, Robert Busch Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of AmericaMaterials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of America Search for other works by this author on: Oxford Academic Google Scholar Renliang Yuan, Renliang Yuan Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of AmericaMaterials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, United States of AmericaIntel Corp., Hillsboro, Oregon, United States of America Search for other works by this author on: Oxford Academic Google Scholar Jiong Zhang Jiong Zhang Intel Corp., Hillsboro, Oregon, United States of America Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 29, Issue Supplement_1, 1 August 2023, Pages 249–250, https://doi.org/10.1093/micmic/ozad067.112 Published: 22 July 2023 Library science ; Engineering ; Computer science Electron and X-Ray Spectroscopy Techniques ; Surface and Thin Film Phenomena ; Semiconductor materials and interfaces